WO2008146480A1 - 測長装置 - Google Patents

測長装置 Download PDF

Info

Publication number
WO2008146480A1
WO2008146480A1 PCT/JP2008/001295 JP2008001295W WO2008146480A1 WO 2008146480 A1 WO2008146480 A1 WO 2008146480A1 JP 2008001295 W JP2008001295 W JP 2008001295W WO 2008146480 A1 WO2008146480 A1 WO 2008146480A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
length measuring
measuring apparatus
beam source
measurement
Prior art date
Application number
PCT/JP2008/001295
Other languages
English (en)
French (fr)
Inventor
Akira Takahashi
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to EP08751804.9A priority Critical patent/EP2151666A4/en
Priority to CN200880017428A priority patent/CN101680744A/zh
Priority to JP2009516182A priority patent/JPWO2008146480A1/ja
Publication of WO2008146480A1 publication Critical patent/WO2008146480A1/ja
Priority to US12/591,156 priority patent/US20100085574A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

   本発明は、レーザ光を使用した光学式の測長装置に関し、高精度の測定を可能にすることを目的とする。 　被検物までの距離を測定する測定用レーザ光源を有する測長部と、前記測定用レーザ光源のレーザ光よりも波長安定度が高いレーザ光を発する較正用レーザ光源と、前記測定用レーザ光源のレーザ光と前記較正用レーザ光源のレーザ光とを干渉させる干渉光学系と、前記干渉光学系の出力と前記測長部の出力とに基づいて前記距離を演算する演算処理部とを備えてなることを特徴とする。
PCT/JP2008/001295 2007-05-25 2008-05-23 測長装置 WO2008146480A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08751804.9A EP2151666A4 (en) 2007-05-25 2008-05-23 LENGTH KNIFE
CN200880017428A CN101680744A (zh) 2007-05-25 2008-05-23 长度测量装置
JP2009516182A JPWO2008146480A1 (ja) 2007-05-25 2008-05-23 測長装置
US12/591,156 US20100085574A1 (en) 2007-05-25 2009-11-10 Length measuring apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-138524 2007-05-25
JP2007138524 2007-05-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/591,156 Continuation US20100085574A1 (en) 2007-05-25 2009-11-10 Length measuring apparatus

Publications (1)

Publication Number Publication Date
WO2008146480A1 true WO2008146480A1 (ja) 2008-12-04

Family

ID=40074755

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001295 WO2008146480A1 (ja) 2007-05-25 2008-05-23 測長装置

Country Status (6)

Country Link
US (1) US20100085574A1 (ja)
EP (1) EP2151666A4 (ja)
JP (1) JPWO2008146480A1 (ja)
KR (1) KR20100020001A (ja)
CN (1) CN101680744A (ja)
WO (1) WO2008146480A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021148634A (ja) * 2020-03-19 2021-09-27 株式会社ミツトヨ レーザ干渉装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11125504A (ja) * 1997-10-22 1999-05-11 Mitsutoyo Corp 微少変位測定方法及び装置
JP3418234B2 (ja) 1993-12-20 2003-06-16 オリンパス光学工業株式会社 測長装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH678108A5 (ja) * 1987-04-28 1991-07-31 Wild Leitz Ag
DE10334350B3 (de) * 2003-07-25 2005-02-03 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Bestimung der Brechzahl bei interferometrischen Längenmessungen und Interferometeranordnung hierfür
US7426039B2 (en) * 2003-12-31 2008-09-16 Corning Incorporated Optically balanced instrument for high accuracy measurement of dimensional change
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3418234B2 (ja) 1993-12-20 2003-06-16 オリンパス光学工業株式会社 測長装置
JPH11125504A (ja) * 1997-10-22 1999-05-11 Mitsutoyo Corp 微少変位測定方法及び装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2151666A4 *

Also Published As

Publication number Publication date
JPWO2008146480A1 (ja) 2010-08-19
KR20100020001A (ko) 2010-02-19
EP2151666A1 (en) 2010-02-10
CN101680744A (zh) 2010-03-24
EP2151666A4 (en) 2016-03-30
US20100085574A1 (en) 2010-04-08

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