WO2009153067A3 - Device for contactless distance measurement - Google Patents

Device for contactless distance measurement Download PDF

Info

Publication number
WO2009153067A3
WO2009153067A3 PCT/EP2009/004481 EP2009004481W WO2009153067A3 WO 2009153067 A3 WO2009153067 A3 WO 2009153067A3 EP 2009004481 W EP2009004481 W EP 2009004481W WO 2009153067 A3 WO2009153067 A3 WO 2009153067A3
Authority
WO
WIPO (PCT)
Prior art keywords
light
wavelength
optical interface
source
spectral
Prior art date
Application number
PCT/EP2009/004481
Other languages
French (fr)
Other versions
WO2009153067A8 (en
WO2009153067A2 (en
Inventor
Marius Jurca
Original Assignee
Mel Mikroelektronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41264192&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2009153067(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mel Mikroelektronik Gmbh filed Critical Mel Mikroelektronik Gmbh
Publication of WO2009153067A2 publication Critical patent/WO2009153067A2/en
Publication of WO2009153067A8 publication Critical patent/WO2009153067A8/en
Publication of WO2009153067A3 publication Critical patent/WO2009153067A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Abstract

A device for the measurement of the distance to an optical interface comprises a first light source (18a) generating polychromatic light. A first spectral source function (SFa), which is associated with the first light source (18a) and describes the dependence of the intensity of the generated light on the wavelength, includes a wavelength interval in which it is non-constant. The device further comprises a second light source (18b) which also generates polychromatic light, but to which a second spectral source function (SFb) is associated differing from the first spectral source function. An optical fiber (20) receives at one end the light generated by the light source. Imaging optics (26, 28) produces an image of the other fiber end (24) on the optical interface (12). This image is chromatically blurred along the optical axis due to chromatic longitudinal aberration of the imaging optics. A sensor (32) measures the intensity of light reflected from the optical interface (12). An evaluation unit (34) calculates the wavelength of the reflected light from the intensity measured by the sensor using the first and the second spectral source functions (SFa, SFb), and from the wavelength the distance to the optical interface.
PCT/EP2009/004481 2008-06-20 2009-06-22 Device for contacltess distance measurement WO2009153067A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008029459.4 2008-06-20
DE200810029459 DE102008029459B4 (en) 2008-06-20 2008-06-20 Method and device for non-contact distance measurement

Publications (3)

Publication Number Publication Date
WO2009153067A2 WO2009153067A2 (en) 2009-12-23
WO2009153067A8 WO2009153067A8 (en) 2010-03-04
WO2009153067A3 true WO2009153067A3 (en) 2010-05-06

Family

ID=41264192

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/004481 WO2009153067A2 (en) 2008-06-20 2009-06-22 Device for contacltess distance measurement

Country Status (2)

Country Link
DE (1) DE102008029459B4 (en)
WO (1) WO2009153067A2 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101957179B (en) * 2010-08-27 2012-02-01 清华大学 Optical fiber displacement measurement system and method
JP2012154765A (en) * 2011-01-26 2012-08-16 Rexxam Co Ltd Optical measurement device
GB2497792A (en) * 2011-12-21 2013-06-26 Taylor Hobson Ltd Metrological apparatus comprising a confocal sensor
DE102012009836A1 (en) * 2012-05-16 2013-11-21 Carl Zeiss Microscopy Gmbh Light microscope and method for image acquisition with a light microscope
DE102013008582B4 (en) * 2013-05-08 2015-04-30 Technische Universität Ilmenau Method and apparatus for chromatic-confocal multipoint measurement and their use
DE102013008645B3 (en) 2013-05-21 2014-08-21 Alsitec S.A.R.L. Machining head for laser processing apparatus used for processing workpiece, has light sensors to detect emerged measurement light that is partially incident on areas of optical surfaces of focusing lens and impinged on laser radiation
DE202013004725U1 (en) 2013-05-21 2013-06-04 Alsitec Sarl Processing head for a laser processing device
DE102013113265B4 (en) * 2013-11-29 2019-03-07 Grintech Gmbh Device for non-contact optical distance measurement
US9706094B2 (en) 2014-12-05 2017-07-11 National Security Technologies, Llc Hyperchromatic lens for recording time-resolved phenomena
JP6202035B2 (en) * 2015-04-07 2017-09-27 コニカミノルタ株式会社 Image inspection apparatus and image forming apparatus
US10408676B2 (en) 2015-10-01 2019-09-10 Mission Support and Test Services, LLC Long-pulse-width variable-wavelength chirped pulse generator and method
WO2017059879A1 (en) * 2015-10-08 2017-04-13 Baden-Württemberg Stiftung Ggmbh Method for an optical distance measurement, sensor assembly, and use thereof
DE102016115827A1 (en) * 2016-08-25 2018-03-01 Nanofocus Ag Method and device for optical surface measurement with the aid of a chromatic confocal sensor
JP6819362B2 (en) * 2017-03-02 2021-01-27 オムロン株式会社 Confocal measuring device
DE102017208290A1 (en) 2017-05-17 2018-11-22 Schott Ag Apparatus and method for processing a workpiece along a predetermined processing line
US11892279B2 (en) 2018-11-05 2024-02-06 Trinamix Gmbh Detector and method for determining a position of at least one object
JP7031626B2 (en) 2019-03-13 2022-03-08 オムロン株式会社 The sensor head
EP3992562A1 (en) * 2020-11-03 2022-05-04 KIMA Process Control GmbH Optical measuring device with trigonometric evaluation
US20230369090A1 (en) * 2022-05-10 2023-11-16 Sandisk Technologies Llc Optical measurement tool containing chromatic aberration enhancement component and optical alignment method using the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2077421A (en) * 1980-05-31 1981-12-16 Rolls Royce Displacement sensing
EP1117129A2 (en) * 2000-01-12 2001-07-18 Tokyo Seimitsu Co.,Ltd. Semiconductor wafer inspection machine
DE10325942A1 (en) * 2003-06-07 2005-01-05 Jurca Optoelektronik Gmbh & Co. Kg Contactless method for measuring the thickness of a transparent body, e.g. a lens, using a spectrograph, whereby the evaluation unit also considers the dispersion characteristics of the material of the object being measured
EP1647799A1 (en) * 2004-10-12 2006-04-19 Precitec Optronik GmbH Calibration of a surface measurement system
DE102006007170A1 (en) * 2006-02-08 2007-08-16 Sirona Dental Systems Gmbh Method and arrangement for fast and robust chromatic confocal 3D metrology
US20080030743A1 (en) * 2004-05-06 2008-02-07 Carl Mahr Holding Gmbh Measuring Device Having An Optical Probe Tip

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2077421A (en) * 1980-05-31 1981-12-16 Rolls Royce Displacement sensing
EP1117129A2 (en) * 2000-01-12 2001-07-18 Tokyo Seimitsu Co.,Ltd. Semiconductor wafer inspection machine
DE10325942A1 (en) * 2003-06-07 2005-01-05 Jurca Optoelektronik Gmbh & Co. Kg Contactless method for measuring the thickness of a transparent body, e.g. a lens, using a spectrograph, whereby the evaluation unit also considers the dispersion characteristics of the material of the object being measured
US20080030743A1 (en) * 2004-05-06 2008-02-07 Carl Mahr Holding Gmbh Measuring Device Having An Optical Probe Tip
EP1647799A1 (en) * 2004-10-12 2006-04-19 Precitec Optronik GmbH Calibration of a surface measurement system
DE102006007170A1 (en) * 2006-02-08 2007-08-16 Sirona Dental Systems Gmbh Method and arrangement for fast and robust chromatic confocal 3D metrology

Also Published As

Publication number Publication date
DE102008029459B4 (en) 2011-07-14
WO2009153067A8 (en) 2010-03-04
DE102008029459A1 (en) 2010-02-04
WO2009153067A2 (en) 2009-12-23

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