WO2008135220A1 - Unité de préhension de surface - Google Patents

Unité de préhension de surface Download PDF

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Publication number
WO2008135220A1
WO2008135220A1 PCT/EP2008/003516 EP2008003516W WO2008135220A1 WO 2008135220 A1 WO2008135220 A1 WO 2008135220A1 EP 2008003516 W EP2008003516 W EP 2008003516W WO 2008135220 A1 WO2008135220 A1 WO 2008135220A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
thin
gripping
suction
walled
Prior art date
Application number
PCT/EP2008/003516
Other languages
German (de)
English (en)
Inventor
Johannes Lörcher
Manfred Schneider
Original Assignee
Scolomatic Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scolomatic Gmbh filed Critical Scolomatic Gmbh
Publication of WO2008135220A1 publication Critical patent/WO2008135220A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/0808—Suction grippers
    • B65H3/0883—Construction of suction grippers or their holding devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/31—Suction box; Suction chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/35—Other elements with suction surface, e.g. plate or wall
    • B65H2406/351—Other elements with suction surface, e.g. plate or wall facing the surface of the handled material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/36—Means for producing, distributing or controlling suction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2555/00—Actuating means
    • B65H2555/10—Actuating means linear
    • B65H2555/11—Actuating means linear pneumatic, e.g. inflatable elements

Definitions

  • the invention is based on a surface gripper unit according to the preamble of claim 1.
  • the gripping unit has a suction tube which is intended to be placed on a wafer and to seize it.
  • the invention is based on a surface gripper unit with at least one gripping unit.
  • the gripping unit has at least one suction unit, which is provided to suck and / or hold at least one thin-walled structural unit and / or fiber unit over a distance.
  • the surface gripping unit can be embodied as a surface wafer gripping unit, surface fiber gripping unit and / or as a surface film gripping unit and can therefore be provided specifically for sucking wafers, fiber units and / or films.
  • a "thin-walled structural unit” should be understood to mean a structural unit with a wall thickness which is less than five millimeters, in particular less than one millimeter and particularly advantageously less than five hundred micrometers
  • a fiber unit is to be understood to mean an assembly of fibers in which the fibers may have an order, which may consist in fibers of a part of the fiber unit having at least partially a certain spatial orientation with respect to one another In the case of suction of a fiber unit, the order of the fibers can advantageously not be changed.
  • Suction over a distance is intended to mean, in particular, that the thin-walled structural unit and / or fiber unit are separated by suction over a distance is moved to the gripper unit, preferably over at least a distance greater than 1 mm and more preferably greater than 5 mm.
  • the gripping unit facing side of the thin-walled structural unit and / or fiber unit prevail in comparison to at least a part of its side facing away from a negative pressure, which ensures that the thin-walled structural unit and / or fiber unit in the direction of Suction unit moves until either a balance between the Weight of the thin-walled structural unit and / or fiber unit and the force on the thin-walled structural unit and / or fiber unit, which by a negative pressure on the gripping unit facing side of the thin-walled structural unit and / or fiber unit compared to the opposite
  • a silicon wafer having a thickness of eighty to three hundred micrometers shall be understood to mean a "wafer.”
  • the surface texture of the gripping unit may be provided for use in gases and / or liquids
  • the energy consumption can thereby be reduced, and in addition, gripping of a thin-walled structural unit and / or fiber unit can take place without significant pressure on the thin-walled structural unit and / or fiber unit or stack with thin-walled
  • a "significant pressure" should in particular designate a pressure which is suitable for breaking a thin-walled structural unit and / or fiber unit.
  • the gripping unit can hold and remove the fragments of the thin-walled structural unit and / or fiber unit due to the favorable flow conditions.
  • the gripping unit leaves on a thin-walled structural unit and / or fiber unit in particular few residues and can ensure a gentle transport of the thin-walled structural unit and / or fiber unit.
  • the transport pro- Zess the thin-walled assembly and / or fiber unit are executed quickly, so that in particular a transport of up to a thin-walled unit and / or fiber unit per second is possible.
  • low manufacturing costs of the surface gripper unit can be achieved.
  • the suction unit has at least one channel which widens toward a gripping surface.
  • a "channel widening toward a gripping surface” is intended to mean, in particular, that a cross-sectional area perpendicular to the channel direction, which extends towards the gripping surface, increases in this direction, thus allowing favorable flow conditions for sucking and / or holding a thin-walled structural unit and / or fiber unit are created.
  • the suction unit has at least one suction nozzle, which has a well-defined shape.
  • a suction nozzle should be understood to mean in particular a technical means which is intended to divert a gas or liquid flow.
  • a "well-defined form" is to be understood here in particular as meaning that the shape of the suction nozzle can be clearly defined and / or, in particular, can be replicated identically, so that in particular defined and / or regular flow conditions can be created.
  • the surface gripper unit has at least one vacuum accumulator, which is provided for generating a suction.
  • a vacuum accumulator an air or liquid flow, for sucking and / or holding a thin-walled structural unit and / or fiber unit can be used.
  • a “vacuum store” is to be understood here in particular as a lockable storage space which is connected to at least one line and whose extent in at least two directions is at least a factor of five, in particular at least a factor of ten and particularly advantageously at least one
  • the vacuum reservoir is in particular a reservoir with negative pressure, which can be measured with the aid of a manometer in bar, compared to at least one supply line, which in particular by means of a valve can be closed and which can lead to the gripping unit, wherein after opening this valve in the supply line, a suction can be generated, which can be used for sucking a thin-walled structural unit and / or fiber unit by means of the gripping unit, in particular w remains almost constant during the entire intake process of the vacuum.
  • Nearly constant is meant in particular that the pressure varies by less than five hundred percent, in particular by less than fifty percent, or more preferably by less than five percent during at least parts of the intake process in a gripping unit.
  • the surface gripper unit has at least one Ablösaku, which is provided for a non-uniform detachment of a thin-walled structural unit and / or fiber unit.
  • a "detachment unit” is to be understood as a unit which is purposefully intended to unevenly detach thin-walled structural units and / or fiber units from a stack of thin-walled structural units and / or fiber units
  • "non-uniform detachment” should be understood to mean that the pressure distribution on the side of the thin-walled unit and / or fiber unit facing the release unit is influenced in such a way that the negative pressure at at least one end of this side is thin-walled Assembly and / or fiber unit is greater than at least one of the previous ends opposite end of this side of the thin-walled Bauein- unit and / or fiber unit and that the thin-walled unit and / or fiber unit thus at the former end of the thin-walled unit and / or Fiber
  • the Ablösher has at least one skew adjusting means.
  • a tiltting means in particular a
  • Hinge a hinge and / or a tilted bearing are understood.
  • non-uniform detachment of a thin-walled structural unit and / or fiber unit can be achieved with a tilting means.
  • the transport of a thin-walled structural unit and / or fiber unit can be improved.
  • the separation unit has unevenly distributed suction means.
  • non-uniform detachment of a thin-walled structural unit and / or fiber unit from a stack of thin-walled structural units and / or fiber units can thereby be achieved, which can be assisted by blowing in air at the side which is pulled more strongly toward the release unit.
  • the Ablösech on an inclined surface and / or a concave and / or a convex surface can thus be achieved, which can be assisted by blowing in air at the side which is pulled more strongly toward the release unit.
  • the release unit has differently shaped suction means. This can be used, in particular, to detach non-uniformly thin-walled structural units and / or fiber units from a stack of thin-walled structural units and / or fiber units.
  • the surface gripper unit has an actuator unit which is provided to move the gripper unit at least as a function of a suction process and / or a suction power.
  • actuator unit is meant in particular that a change in the suction process and / or the suction power can initiate a movement of the gripping unit a thin-walled structural unit and / or fiber unit are moved.
  • the actuator unit is provided to use at least one of a suction generated by a vacuum accumulator energy technology.
  • energy use it is meant in particular that the gripping unit is raised or lowered with the aid of the suction flow generated by a vacuum accumulator, which in particular saves energy and simplifies production.
  • the surface gripper unit has a sensor unit which signals suction of a thin-walled structural unit and / or fiber unit by the suction unit of the actuator unit.
  • the sensor unit comprises a sensor means which is provided for signaling by means of a pneumatic signal.
  • this can save manufacturing costs and simplify the construction.
  • the sensor unit is at least partially formed by the suction unit.
  • a component can thus be saved.
  • the gripping unit has a gripping surface formed at least partially from plastic and / or a rubber-like material. This can special gentle treatment of a sucked thin-walled structural unit and / or fiber unit can be achieved.
  • the gripping unit has at least one damping unit, which is intended to damp a thin-walled structural unit and / or fiber unit during a suction process. This can be prevented in particular a breakage of a thin-walled structural unit and / or fiber unit, which is sucked and / or held.
  • the damping unit has at least one pneumatic damping means.
  • manufacturing costs can be saved and nonuniform detachment of a thin-walled structural unit and / or fiber unit from a stack of thin-walled structural units and / or fiber units can be achieved.
  • the damping unit expediently has at least one film.
  • this low production costs can be achieved.
  • the film may have at least one recess in a nozzle.
  • an overpressurization can take place, in particular by air pressure, as a result of which non-uniform detachment of a thin-walled structural unit and / or fiber unit from a stack of thin-walled structural units and / or fiber units can be achieved.
  • This can be achieved in particular by a film with several air chambers.
  • no contact between the film and gripping surface must be present.
  • the film may in particular rest partially on the gripping unit.
  • the damping unit comprises a network. As a result, improved damping of a thin-walled structural unit and / or fiber unit in a suction process can be achieved.
  • the surface gripper unit has a mechanical gear unit, which is intended to move the gripping unit and at least one thin-walled structural unit and / or fiber unit relative to each other.
  • a stack of thin-walled structural units and / or fiber units can thus be positioned for a suction process.
  • the accuracy of the positioning may be low because the gripping unit can suck a thin-walled structural unit and / or fiber unit over a distance.
  • low accuracy is meant in particular that the position of the thin-walled structural unit and / or fiber unit after positioning by the gear unit for a suction by more than ten microns, in particular by more than a hundred microns and in particular by more than a thousand Millimeters may deviate from the intended position of the thin-walled structural unit and / or fiber unit relative to the gripping unit.
  • the costs can be reduced.
  • the surface gripper unit preferably has at least one sensor unit, which recognizes an arrangement of at least one thin-walled structural unit in at least one operating operation and / or recognizes at least one quality state of at least one thin-walled structural unit.
  • a “arrangement” of a thin-walled unit is in particular a position the thin-walled structural unit relative to the gripping unit and in particular relative to a gripping surface of the gripping unit to be understood.
  • a "quality state" of a thin-walled structural unit is understood in particular to mean a functional and / or an intact and / or a defective and / or an at least partially destroyed state of a thin-walled structural unit in which the thin-walled structural unit can be used with regard to an operator-selectable production process.
  • a "defective" state of a thin-walled structural unit is to be understood in particular to mean a state in which the thin-walled structural unit is unusable with regard to a production process selectable by an operator
  • the sensor unit is at least partially a part of the gripping unit.
  • the sensor unit has at least one gas pressure sensor.
  • a “gas pressure sensor” is to be understood in particular as meaning a sensor which is intended to measure at least one pressure of at least one gas, so that a simple design of the sensor unit can be achieved.
  • the gripping unit has at least one receiving area of the sensor unit for receiving and / or for an input. Stop at least one gas. In this way, a high sensitivity of the sensor unit can be achieved. In particular, the sensor unit can interact with a large area of a thin-walled structural unit.
  • the receiving area is at least partially closed by at least one operating operation of at least one thin-walled structural unit.
  • the sensor unit can extract information from a gas pressure prevailing in the receiving area.
  • the sensor unit has at least one measuring unit which measures a mass of at least one quantity of gas during at least one operating operation. In this way, a sealing state of the recording area can be checked.
  • the measuring unit measures the mass which is pumped out of the receiving area in a unit of time.
  • the sensor unit has at least one ultrasonic sensor unit. In this way, a short duration of a sensing operation performed by the sensor unit can be achieved.
  • the gripping unit has at least one insulating unit which at least partially surrounds the heating unit.
  • a low heat loss can be achieved.
  • a low mechanical load on the gripping unit can be achieved.
  • the gripping unit has at least one contact unit which, in at least one operating operation, is arranged at least partially between at least one thin-walled structural unit and the heating unit.
  • a "contactor unit” is to be understood in particular as meaning a unit to which a thin-walled structural unit at least partially rests in at least one operating state Heating unit to be prevented.
  • a gripping method in particular with a surface gripper unit, is proposed, in which a control of the thin-walled structural unit takes place during a transport of a thin-walled structural unit and / or senses whether the thin-walled structural unit is defective or intact. This allows efficient quality control to be achieved.
  • Fig. 1 shows a section through a legislativengrei- ferhim
  • Fig. Ia is a section through a portion of the surface gripper unit
  • Fig. 2 shows a detail of a plan view of a
  • FIG. 5 shows a section of a suction means of a gripping surface
  • FIG. 6 shows a section of a suction means of a gripping surface
  • Fig. 7 a Ablösher, Fig. 8 a Ablöstician, Fig. 9 a Ablöstician, Fig. 10 shows a detail of a section through a
  • FIG. 11 shows a detail of a section through a
  • FIG. 12 is a view of a transmission unit with a gripping unit and a stack
  • FIG. 13 shows a section through an embodiment variant of an ejector with a basic unit, the gripping unit and thin-walled structural units on rollers
  • FIG. 14 shows a plan view of a planar carrier with the thin-walled structural units
  • 15 is a schematic longitudinal section through an alternative embodiment of a gripping unit with a sensor unit
  • 16 is a plan view of the alternative embodiment of a gripping unit from below,
  • FIG. 17 shows a schematic longitudinal section through a further alternative embodiment of a gripping unit with a measuring unit
  • FIG. 18 is a side view of an alternative embodiment of a gripping unit with a
  • FIG. 19 shows a schematic longitudinal section through a further alternative exemplary embodiment of a gripping unit with a heating unit
  • FIG. 20 shows a schematic longitudinal section through a further alternative exemplary embodiment of a gripping unit with an attachment unit.
  • FIG. 1 shows a section through a surface gripper unit.
  • This has a base unit 14, a gripping unit 10 and a blister 40.
  • the blister 40 is located in the vertical direction substantially below the base unit 14 and the gripping unit 10 and is intended to receive a stack 36 of thin-walled units 38.
  • the gripping unit 10 is partially made of plastic or alternatively partially formed of a rubber-like material.
  • the gripping unit 10 is by means of a tilting means 32, which is designed as a hinge, rotatably mounted to the base unit 14 and stored substantially below it.
  • the gripping unit 10 has a gripping surface 12 and a suction unit 11.
  • the suction unit 11 and the gripping surface 12 in turn, have individual suction nozzles 42 with well-defined
  • the gripping unit 10 is provided for sucking a thin-walled structural unit 38 over a distance and for holding a thin-walled structural unit 38 of the stack 36. By blowing air through a recess 41 of the blister 40, the detachment of a thin-walled assembly 38 from the stack 36 can be assisted.
  • the suction flow necessary for the suction by means of the gripping unit 10 is generated by a vacuum reservoir 16 by means of a hose 30 and by means of lines 26, 28 whose contact can be opened and closed by means of controllable valves 24, 78 (see also FIG.
  • the vacuum reservoir 16 has a negative pressure, which is generated by means of an ejector 18 in comparison to the environment of the thin-walled structural unit 38.
  • an ejector could also be integrated in the basic unit 14.
  • a vacuum chamber 20 is connected to the vacuum reservoir 16 by means of the controllable valve 78 and another controllable valve 22.
  • the vacuum chamber 20 is closed by a piston 35 of an actuator 34 to the outside.
  • the piston 35 is relative to the base unit 14 in vertical
  • the actuator unit 34 has a connecting piece 33 which mechanically connects the pistons 35 and the gripping unit 10.
  • a pneumatic connection between the suction nozzles 42 via the hose 30 and the lines 28, 26 by means of the valves 22, 24 with the vacuum chamber 20 can be switched on and off. If the valves 22, 24 open are and a thin-walled assembly 38 was neither sucked nor held, forms a state of equilibrium with resting gripping unit 10 such that the pressure of the outer space, the pressure in the vacuum chamber 20 and a force acting on the piston 35 downward force, which consists largely of a Part of the weight of the gripping unit 10 is equalized.
  • the suction unit 11 is formed integrally with a sensor unit 62 and the suction nozzles 42 are integrally formed with a sensor means 64, due to the fact that these elements sense the suction of a thin-walled structural unit 38. After the sensor unit 62 has sensed a sucked thin-walled structural unit 38, It signals this pneumatically by means of the hose 30 and the lines 28, 26 to the actuator unit 34.
  • a detachment unit 46 is formed by the gripping unit 10 and the tilting means 32.
  • the Ablöstician 46 has a flat surface 48 which can be positioned by means of the inclined actuator 32 in a non-parallel manner to the thin-walled assembly 38 so that they with the sem encloses an acute angle.
  • the flat surface 48 is formed integrally with the gripping surface 12.
  • the gripping surface 12 has the suction nozzles 42 which are evenly distributed on the surface of the gripping surface 12.
  • the force during suction of the thin-walled unit 38 is greater than on another part of the surface of the gripping unit 10 facing the thin-walled unit 38th which, in comparison to the former, are further away from the
  • Gripping surface 12 is located. In order for a non-uniform detachment of the thin-walled assembly 38 is caused by the stack 36, which is supported by the fact that air is blown through a recess 41 to the dividing line between the thin-walled unit 38 and the remaining stack 36 thin-walled units.
  • FIG. 1a shows a section through a part of the surface gripper unit which comprises the valves 78, 22, 24 and the line 26.
  • the valve 78 is designed as a 3/2-way valve.
  • a conduit 86 establishes a connection between the valve 78 and the conduit 28 which can be opened or closed by the valve 24.
  • the line 86 also establishes a connection between the valve 78 and the vacuum chamber 20, which can be opened or closed by means of the valve 22.
  • the valve 78 has an interior 94 and a piston 82, which divides the interior 94 of the valve 78, which is bounded by a wall 92 of the valve 78, into two chambers 88, 90.
  • the piston 82 is movably mounted relative to the wall 92 of the valve 78 and connected by a spring 84 to the wall 92.
  • the piston 82 By a pressure change in the chamber 88, which can be targeted by means of the compressed air line 80 causes led, and / or a pressure change of the chamber 90, the piston 82 can be moved relative to the wall 92. In this way, the piston 82 can be positioned so that the conduit 86 is connected to either the compressed air line 80 or the line 26. In the latter case, an intake flow is generated when the valve 24 is open, which is provided for sucking the thin-walled structural unit 38 (see FIG. 1). After sucking the thin-walled structural unit 38, it can be transported by the gripping unit 10 (see FIG. 1) to a desired location. By increasing the pressure in the chamber 88 by means of the compressed air line 80, the line 86 can then be connected to the compressed air line 80.
  • FIGS. 2 and 3 show various embodiments of the gripping surface 12.
  • FIG. 2 shows a section of a plan view of a gripping surface 12A.
  • the suction nozzles 42 are evenly distributed and act as sensor means 64.
  • FIG. 3 shows a detail of a plan view of an embodiment variant of a gripping surface 12B of a detachment unit 46.
  • the gripping surface 12B has suction means 44 which are distributed unevenly.
  • the suction means 44 are designed as suction nozzles 42 and channels 45. With the help of this arrangement, in particular favorable flow conditions for sucking the thin-walled structural unit 38 are created. Furthermore, the unevenly distributed suction means 44 can be used for uneven detachment of the thin-walled structural unit 38 from the stack 36 (see FIG. 1).
  • FIGS. 4 to 6 show various embodiments of the suction nozzles 42, in particular their profiles. Substantially identical components, features and functions are generally identified by the same reference numerals. In order to distinguish the exemplary embodiments, the letters a, b and c are added as reference symbols in FIGS. 4 to 6.
  • FIG. 4 shows a suction nozzle 42a, which is arranged on a suction unit IIa.
  • the suction nozzle 42a has a to a gripping surface 12a towards expanding channel 13a, which is formed as a rounded paragraph.
  • the suction nozzle 42a is integrally formed with a sensor means 64a. Further, a suction means 56 is formed through the suction nozzle 42a.
  • FIG. 5 shows a variant of an intake nozzle 42b.
  • a channel 13b is conical.
  • the suction nozzle 42b forms a suction means 58.
  • FIG. 6 shows a variant of an intake nozzle 42c.
  • a channel 13b is step-shaped.
  • a suction means 60 is formed.
  • FIGS. 7 to 11 and 13 to 20 show alternative exemplary embodiments. Substantially identical components, features and functions are basically numbered by the same reference numerals. To distinguish the embodiments, however, the reference numerals of the embodiments in Figures 7 to 9, the letters ⁇ , ß and ⁇ added. The following description is essentially limited to the differences from the exemplary embodiment in FIG. 1, it being possible to refer to the description of the exemplary embodiment in FIG. 1 with regard to components, features and functions remaining the same.
  • Figure 7 shows the Ablöstician 46 ⁇ in a variant.
  • the Ablöstician 46 ⁇ an inclined surface 50, which can be used for uneven detachment of the thin-walled assembly 38.
  • Figure 8 shows the Ablöstician 46ß in a variant.
  • the Ablöstician 46ß a concave surface 52, which can be used for uneven detachment of the thin-walled assembly 38.
  • Figure 9 shows the Ablöstician 46 ⁇ in a variant.
  • the Ablöstician 46 ⁇ has a convex surface 54 which can be used for non-uniform detachment of the thin-walled assembly 38.
  • FIG. 10 shows a detail of a section through an alternative embodiment of a gripping unit 10.1.
  • suction nozzles 42. 1 which represent an alternative embodiment to the suction nozzles shown in FIGS. 4 to 6, it has a damping unit 68, which may be designed as a pneumatic damping means 70 or as a foil 72.
  • the damping unit 68 is intended to dampen the thin-walled structural unit 38 (see FIG. 1) during a suction process.
  • the pneumatic damping means 70 can be used for a non-uniform detachment of a thin-walled structural unit 38 from a stack 36 of thin-walled structural units (see FIG. 1).
  • FIG. 11 shows a detail of a section through an alternative exemplary embodiment of a gripping unit 10.2.
  • a damping unit 68 which is designed as a net 73.
  • FIG. 12 shows a mechanical transmission unit 74, the gripping unit 10 and a stack 36 of thin-walled structural units.
  • the mechanical gear unit 74 is provided to move the stack 36 of thin-walled units relative to the gripping unit. unit 10 to position.
  • the gear unit 74 is cycled in such a way that it brings regularly after sucking the thin-walled structural unit 38 by the suction unit 11, the stack 36 for sucking a further thin-walled structural unit 38 by the suction unit 11 in position.
  • the accuracy of the spatial positioning may be relatively low, since the suction of the thin-walled assembly 38 is not dependent on high accuracy.
  • the gear unit 74 has a hinge unit 76, which is provided to tilt the stack 36 relative to the gripping unit 10.
  • FIG. 13 shows a section through an alternative embodiment of the ejector 18 'with the basic unit 14, the gripping unit 10 and the thin-walled assemblies 38 on rollers 98.
  • a pump 96 an electrolyte or another liquid is passed through a chamber 104 and a conduit 106 of the Ejector 18 'pumped into a tank or a storage tank.
  • this basin can be identical to a basin in which the thin-walled building units 38, which are to be sucked in by the suction unit 11, are at least partially surrounded by a liquid 112.
  • a line 102 is connected by means of a chicane 100.
  • the line 102 is connected to the vacuum reservoir 16 of the base unit 14 (see FIG. 1).
  • the suction generates the negative pressure in the vacuum reservoir 16 (see FIG. 1), which is used when the thin-walled structural units 38 are aspirated. fertilizes.
  • the thin-walled assemblies 38 are transported by means of the rollers 98 to the gripping unit 10.
  • the transporting of the thin-walled structural units 38 can also take place in the liquid 112, which may in particular be an electrolyte.
  • the thin-walled structural units 38 can also be removed directly from an inline transport, which can also take place in the liquid 112, whereby suction of the thin-walled structural unit 38 can take place by suction of the liquid 112.
  • the thin-walled assemblies 38 can be made of flat carriers 110 (see FIG.
  • FIG. 14 or stationary stations are sucked in and removed.
  • FIG. 14 shows a plan view of the planar carrier 110 on which thin-walled structural units 38 are located.
  • the thin-walled structural units 38 are arranged individually and next to one another in rows on the carrier and can be sucked from there through the suction unit 11 (see FIG. 13) and transported away.
  • FIG. 15 shows a section through an alternative embodiment of a gripping unit 10.3, wherein existing suction nozzles are not shown.
  • the gripping unit 10.3 comprises a sensor unit 114.3, which detects an arrangement of a thin-walled structural unit 38 in one operating operation.
  • the sensor unit 114.3 has a receiving region 116, which is provided for receiving and enclosing air and in which a gas pressure sensor 118 of the sensor unit 114.3 is arranged.
  • the thin-walled Bauein- unit 38 is arranged in a reference arrangement in which a force caused by an air pressure force on the thin-walled unit 38 acts that the thin-walled unit 38 rests against a gripping surface 12.3 of the gripping unit 10.3. In the reference arrangement, furthermore, a lateral projection of the thin-walled structural unit 38 relative to the gripping surface 12.3 is avoided.
  • the receiving region 116 is formed as a groove which extends in the gripping surface 12.3 (FIG. 16).
  • the groove has a rectangular shape. If a thin-walled structural unit 38 (FIG. 15) with a planar surface, which has dimensions which approximately correspond to a length and a width of the gripping surface 12.3, is arranged in the reference arrangement, then it seals the groove substantially airtight.
  • the sensor unit 114.3 also has an ejector 120, which in a sensing operation by means of the sensor unit
  • the sensor unit 114.3 can determine whether a thin-walled structural unit 38 is arranged in the reference arrangement.
  • the thin-walled structural unit 38 is arranged in the reference arrangement, by means of the sensor unit 114.3 a qualitative tuschsschreib the thin-walled structural unit recognizable. If the thin-walled structural unit 38 has a crack, a microcrack and / or a chip through which air can flow into the receiving region 116 during an activity of the ejector 120, an air pressure which is greater than that which arises in the receiving region arises adjusts itself to an intact thin-walled unit 38. In this way, an intact of a defective thin-walled unit 38 can be distinguished by means of the sensor unit 114.3.
  • FIG. 17 shows an alternative embodiment of a gripping unit 10.4 with a sensor unit 114.4.
  • the sensor unit 114.4 has a channel 122, through which air is pumped from a receiving region 116 in an operating process.
  • a measuring unit 124 of the sensor unit 114.4 is arranged, by means of which an arrangement of a thin-walled unit 38 relative to a gripping surface 12.4 of the gripping unit 10.4 is recognizable and by means of which a quality state of a thin-walled unit 38 can be seen when it is in a Referenzanordung ,
  • the measuring unit 124 measures the amount of gas and in particular a mass of the gas quantity, which is pumped out of the receiving area by means of an ejector 120. This makes it possible to determine whether the thin-walled structural unit 38 is in the
  • Reference position is located or whether the thin-walled unit is intact. If the ejector 120 pumps more gas out of the receiving region 116 than in the case in which an intact thin-walled structural unit 38 is in the reference position, then the thin-walled structural unit 38 is either not in the reference position or the thin-walled structural unit 38 has a crack. Microcrack and / or a chip through which gas can flow into the receiving area 116.
  • FIG. 18 shows an alternative embodiment of a gripping unit 10.5.
  • the gripping unit 10.5 has an ultrasonic sensor unit 126 with an ultrasonic transmitter and an ultrasonic receiver.
  • the ultrasonic receiver transmits ultrasound to a thin-walled unit in a reference position. After that receives the
  • Ultrasound receiver a reflected ultrasound of the emitted ultrasound. Due to a comparison between the received ultrasound and an ultrasound, which was received in an intact thin-walled structural unit in a reference position, a control unit, not shown, can detect whether the thin-walled structural unit 38 is arranged in a reference position or whether the thin-walled structural unit 38 is intact.
  • FIG 19 shows a section through an alternative embodiment of a gripping unit 10.6.
  • the gripping unit 10.6 has a heating unit 130.6, which transmits an amount of heat by means of infrared radiation in an operation on a voltage applied to a gripping surface 12.6 thin-walled unit 38. As a result, the thin-walled structural unit 38 is held or heated at a certain temperature.
  • the gripping unit 10.6 has an insulating unit 128.6, which surrounds the heating unit 130.6.
  • the insulating unit 128.6 is formed of ceramic and prevents heat from spreading in the gripping unit 10.6 in the case of a heated heating unit 130.6.
  • the heating unit 130.6 forms a contact surface 132.6 against which the thin-walled structural unit rests in at least one operating mode. Preferably, the contact surface extends over a large part of the gripping surface 12.6.
  • FIG. 20 shows a section through an alternative embodiment of a gripping unit 10.7 with a heating unit 130.7.
  • the gripping unit 10.7 has an abutment unit 134, which is arranged between a thin-walled structural unit 38 and the heating unit when the thin-walled structural unit 38 at least partially rests against a gripping surface 12.7 of the gripping unit 10.7 and, in particular, is in a reference position.
  • the unit 134 is designed as an investment layer and is penetrated by nozzles not shown.
  • the gripping surface 12.7 is formed by the contact unit 134.
  • the abutment unit 134 may be formed from ceramic and / or plastic and / or Teflon and / or titanium sheet and / or a ceramic penetrated by holes. Be zugs sign
  • suction unit 52 concave surface

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

La présente invention concerne une unité de préhension de surface comprenant au moins une unité de préhension (10). Selon cette invention, cette unité de préhension (10) présente au moins une unité d'aspiration (11) qui est conçue pour aspirer et/ou retenir sur une certaine distance une unité modulaire à paroi mince (38) et/ou une unité en fibres.
PCT/EP2008/003516 2007-05-02 2008-04-30 Unité de préhension de surface WO2008135220A1 (fr)

Applications Claiming Priority (2)

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DE200710020864 DE102007020864A1 (de) 2007-05-02 2007-05-02 Flächengreifereinheit
DE102007020864.4 2007-05-02

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WO2008135220A1 true WO2008135220A1 (fr) 2008-11-13

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DE102014112157A1 (de) * 2014-08-26 2016-03-03 Elringklinger Ag Handhabungsvorrichtung und Verfahren zum Handhaben eines Werkstücks
CN110950073A (zh) * 2019-12-03 2020-04-03 深圳市迈创力科技有限公司 一种避免送料过程中吸取较轻和较薄板料的方法

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IT1401265B1 (it) * 2010-08-06 2013-07-18 Gallucci Dispositivo per lo scarico, da un piano di lavoro, di articoli piani nei quali sono ricavate, mediante taglio e/o incisione, porzioni su cui sono riprodotti disegni e/o scritte
DE102018200945A1 (de) * 2017-11-14 2019-05-16 Notion Systems GmbH Haltevorrichtung zum Halten von Leiterplatten und dergleichen

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JP2003174077A (ja) * 2001-12-04 2003-06-20 Lintec Corp 吸着保持装置
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EP1624484A1 (fr) * 2003-05-13 2006-02-08 Mimasu Semiconductor Industry Company Limited Procede de demontage de plaquettes, dispositif de demontage de plaquettes, et machine de demontage et de transfert de plaquettes
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014112157A1 (de) * 2014-08-26 2016-03-03 Elringklinger Ag Handhabungsvorrichtung und Verfahren zum Handhaben eines Werkstücks
CN110950073A (zh) * 2019-12-03 2020-04-03 深圳市迈创力科技有限公司 一种避免送料过程中吸取较轻和较薄板料的方法
CN110950073B (zh) * 2019-12-03 2021-05-28 深圳市迈创力科技有限公司 一种避免送料过程中吸取较轻和较薄板料的方法

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