WO2008129615A1 - Ｔｆｔアレイ検査装置 - Google Patents

Ｔｆｔアレイ検査装置 Download PDF

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Publication number
WO2008129615A1
WO2008129615A1 PCT/JP2007/057809 JP2007057809W WO2008129615A1 WO 2008129615 A1 WO2008129615 A1 WO 2008129615A1 JP 2007057809 W JP2007057809 W JP 2007057809W WO 2008129615 A1 WO2008129615 A1 WO 2008129615A1
Authority
WO
WIPO (PCT)
Prior art keywords
main chamber
glass substrate
inspection device
electron gun
tft array
Prior art date
Application number
PCT/JP2007/057809
Other languages
English (en)
French (fr)
Inventor
Hideki Okamoto
Original Assignee
Shimadzu Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corporation filed Critical Shimadzu Corporation
Priority to PCT/JP2007/057809 priority Critical patent/WO2008129615A1/ja
Publication of WO2008129615A1 publication Critical patent/WO2008129615A1/ja

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements

Abstract

ＴＦＴアレイ検査装置は、メインチャンバ１の上方に電子銃ユニット３を有すると共にメインチャンバ１内にガラス基板用ステージ２を備え、このガラス基板用ステージ２に、電子銃ユニット３の下方位置においてＺ方向に駆動可能なＺステージ２ｄを設ける。これにより、メインチャンバを小型化する。メインチャンバ１内において、ガラス基板１０をＺ方向に移動可能とすることによって、電子銃ユニット３がメインチャンバ１内の何れの位置に設置されているかに係わらず、ガラス基板１０とプローバフレーム６との接触を、電子銃ユニット３と干渉することなく行う。
PCT/JP2007/057809 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置 WO2008129615A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057809 WO2008129615A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057809 WO2008129615A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Publications (1)

Publication Number Publication Date
WO2008129615A1 true WO2008129615A1 (ja) 2008-10-30

Family

ID=39875164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057809 WO2008129615A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Country Status (1)

Country Link
WO (1) WO2008129615A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109541335A (zh) * 2018-09-30 2019-03-29 宁波艾思科汽车音响通讯有限公司 一种玻璃天线滤波器测试工装及测试方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325711A (ja) * 1997-05-23 1998-12-08 Hitachi Ltd 検査方法およびその装置並びに半導体基板の製造方法
JP2001255292A (ja) * 2000-03-08 2001-09-21 Hitachi Ltd 異物分析方法およびその装置並びに分析方法
WO2006129347A1 (ja) * 2005-05-31 2006-12-07 Topcon Corporation 半導体検査製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325711A (ja) * 1997-05-23 1998-12-08 Hitachi Ltd 検査方法およびその装置並びに半導体基板の製造方法
JP2001255292A (ja) * 2000-03-08 2001-09-21 Hitachi Ltd 異物分析方法およびその装置並びに分析方法
WO2006129347A1 (ja) * 2005-05-31 2006-12-07 Topcon Corporation 半導体検査製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109541335A (zh) * 2018-09-30 2019-03-29 宁波艾思科汽车音响通讯有限公司 一种玻璃天线滤波器测试工装及测试方法

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