WO2008126249A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126249A1
WO2008126249A1 PCT/JP2007/057078 JP2007057078W WO2008126249A1 WO 2008126249 A1 WO2008126249 A1 WO 2008126249A1 JP 2007057078 W JP2007057078 W JP 2007057078W WO 2008126249 A1 WO2008126249 A1 WO 2008126249A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
driver unit
base
elastic body
moving
Prior art date
Application number
PCT/JP2007/057078
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to PCT/JP2007/057078 priority Critical patent/WO2008126249A1/ja
Publication of WO2008126249A1 publication Critical patent/WO2008126249A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ｉ）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を、ステージ部に加える印加部（１６１、１６２、２２）とを備える。
PCT/JP2007/057078 2007-03-30 2007-03-30 駆動装置 WO2008126249A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057078 WO2008126249A1 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057078 WO2008126249A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126249A1 true WO2008126249A1 (ja) 2008-10-23

Family

ID=39863430

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057078 WO2008126249A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (1)

Country Link
WO (1) WO2008126249A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

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