WO2008126173A1 - Ｔｃｐハンドリング装置 - Google Patents

Ｔｃｐハンドリング装置 Download PDF

Info

Publication number
WO2008126173A1
WO2008126173A1 PCT/JP2007/054972 JP2007054972W WO2008126173A1 WO 2008126173 A1 WO2008126173 A1 WO 2008126173A1 JP 2007054972 W JP2007054972 W JP 2007054972W WO 2008126173 A1 WO2008126173 A1 WO 2008126173A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
tcp
probe card
carrier tape
test pad
Prior art date
Application number
PCT/JP2007/054972
Other languages
English (en)
French (fr)
Inventor
Hisashi Murano
Masataka Onozawa
Takeshi Onishi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to PCT/JP2007/054972 priority Critical patent/WO2008126173A1/ja
Priority to JP2009508724A priority patent/JPWO2008126173A1/ja
Priority to KR1020097020937A priority patent/KR20100005067A/ko
Priority to TW097107454A priority patent/TW200902423A/zh
Publication of WO2008126173A1 publication Critical patent/WO2008126173A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

　ＴＣＰが複数形成されたキャリアテープ５を搬送して、テストヘッド１０に電気的に接続されている複数のプローブ８１を有するプローブカード８に対してキャリアテープ５を押圧し、ＴＣＰのテストパッドをプローブ８１に接続させることにより、複数のＴＣＰを順次試験に付すことのできるＴＣＰハンドラ２において、キャリアテープ５とプローブカード８との間に挿入し得るカメラ６ｄを設け、そのカメラ６ｄによって、キャリアテープ５上のＴＣＰのテストパッド）と、プローブカード８のプローブ８１の先端部とを撮影する。これにより、プローブ８１の先端部を直接撮影することができるため、ＴＣＰのテストパッドとプローブカード８のプローブ８１との位置合わせを極めて正確に行うことができる。
PCT/JP2007/054972 2007-03-13 2007-03-13 Ｔｃｐハンドリング装置 WO2008126173A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2007/054972 WO2008126173A1 (ja) 2007-03-13 2007-03-13 Ｔｃｐハンドリング装置
JP2009508724A JPWO2008126173A1 (ja) 2007-03-13 2007-03-13 Ｔｃｐハンドリング装置
KR1020097020937A KR20100005067A (ko) 2007-03-13 2007-03-13 Ｔｃｐ 핸들링 장치
TW097107454A TW200902423A (en) 2007-03-13 2008-03-04 TCP handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/054972 WO2008126173A1 (ja) 2007-03-13 2007-03-13 Ｔｃｐハンドリング装置

Publications (1)

Publication Number Publication Date
WO2008126173A1 true WO2008126173A1 (ja) 2008-10-23

Family

ID=39863357

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/054972 WO2008126173A1 (ja) 2007-03-13 2007-03-13 Ｔｃｐハンドリング装置

Country Status (4)

Country Link
JP (1) JPWO2008126173A1 (ja)
KR (1) KR20100005067A (ja)
TW (1) TW200902423A (ja)
WO (1) WO2008126173A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012068032A (ja) * 2010-09-21 2012-04-05 Tesetsuku:Kk Ｔｃｐ試験装置
CN103934207A (zh) * 2013-01-18 2014-07-23 鸿劲科技股份有限公司 电子元件作业单元、作业方法及其应用的作业设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003501819A (ja) * 1999-05-27 2003-01-14 ナノネクサス インコーポレイテッド 電子回路のための大規模並列処理インターフェース
WO2004068154A1 (ja) * 2003-01-31 2004-08-12 Japan Engineering Co.,Ltd. Ｔｃｐハンドリング装置および当該装置における位置ずれ補正方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002176079A (ja) * 2000-12-06 2002-06-21 Seiko Epson Corp プローブカード検査・クリーニング機構付きウエハプローバ及びプローブカード検査方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003501819A (ja) * 1999-05-27 2003-01-14 ナノネクサス インコーポレイテッド 電子回路のための大規模並列処理インターフェース
WO2004068154A1 (ja) * 2003-01-31 2004-08-12 Japan Engineering Co.,Ltd. Ｔｃｐハンドリング装置および当該装置における位置ずれ補正方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012068032A (ja) * 2010-09-21 2012-04-05 Tesetsuku:Kk Ｔｃｐ試験装置
CN103934207A (zh) * 2013-01-18 2014-07-23 鸿劲科技股份有限公司 电子元件作业单元、作业方法及其应用的作业设备

Also Published As

Publication number Publication date
TW200902423A (en) 2009-01-16
KR20100005067A (ko) 2010-01-13
JPWO2008126173A1 (ja) 2010-07-15

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