WO2008111390A1 - 走査プローブ顕微鏡およびこれを用いた試料の観察方法 - Google Patents

走査プローブ顕微鏡およびこれを用いた試料の観察方法 Download PDF

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Publication number
WO2008111390A1
WO2008111390A1 PCT/JP2008/053268 JP2008053268W WO2008111390A1 WO 2008111390 A1 WO2008111390 A1 WO 2008111390A1 JP 2008053268 W JP2008053268 W JP 2008053268W WO 2008111390 A1 WO2008111390 A1 WO 2008111390A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
sample
order
resolution ability
several
Prior art date
Application number
PCT/JP2008/053268
Other languages
English (en)
French (fr)
Inventor
Toshihiko Nakata
Masahiro Watanabe
Takashi Inoue
Kishio Hidaka
Motoyuki Hirooka
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007322722A external-priority patent/JP5033609B2/ja
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to US12/523,369 priority Critical patent/US8272068B2/en
Publication of WO2008111390A1 publication Critical patent/WO2008111390A1/ja
Priority to US13/586,754 priority patent/US8695110B2/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

　開口プローブを用いた近接場走査顕微鏡では実用上数十ｎｍの開口形成が限界であり、また散乱プローブを用いた近接場走査顕微鏡では外部照明光が背景雑音となり、数十ナノメートルが分解能の限界であった。またプローブの損傷や磨耗により測定再現性が著しく低かった。ナノメートルオーダの円筒形構造とナノメートルオーダの微小粒子を組み合わせて、ナノメートルオーダの光学分機能を有するプラズモン増強近接場プローブを構成し、試料上の各測定点で低接触力での接近・退避を繰り返すことにより、プローブと試料の双方にダメージを与えることなく、ナノメートルオーダの分解能でかつ高い再現性で、試料表面の光学情報及び凹凸情報を測定する。
PCT/JP2008/053268 2007-03-12 2008-02-26 走査プローブ顕微鏡およびこれを用いた試料の観察方法 WO2008111390A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/523,369 US8272068B2 (en) 2007-03-12 2008-02-26 Scanning probe microscope and sample observing method using the same
US13/586,754 US8695110B2 (en) 2007-03-12 2012-08-15 Scanning probe microscope and sample observing method using the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007061201 2007-03-12
JP2007-061201 2007-03-12
JP2007-322722 2007-12-14
JP2007322722A JP5033609B2 (ja) 2007-03-12 2007-12-14 走査プローブ顕微鏡およびこれを用いた試料の観察方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/523,369 A-371-Of-International US8272068B2 (en) 2007-03-12 2008-02-26 Scanning probe microscope and sample observing method using the same
US13/586,754 Division US8695110B2 (en) 2007-03-12 2012-08-15 Scanning probe microscope and sample observing method using the same

Publications (1)

Publication Number Publication Date
WO2008111390A1 true WO2008111390A1 (ja) 2008-09-18

Family

ID=39759332

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053268 WO2008111390A1 (ja) 2007-03-12 2008-02-26 走査プローブ顕微鏡およびこれを用いた試料の観察方法

Country Status (1)

Country Link
WO (1) WO2008111390A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325840A (ja) * 1997-05-23 1998-12-08 Seiko Instr Inc 偏光を利用した走査型近視野顕微鏡
JP2002267590A (ja) * 2001-03-14 2002-09-18 Ricoh Co Ltd 近接場光用のプローブ及びその作製方法、並びに近接場光学顕微鏡、光メモリの情報記録再生方式
JP2005249588A (ja) * 2004-03-04 2005-09-15 Toyota Motor Corp 近接場分光分析装置
WO2006113192A2 (en) * 2005-04-06 2006-10-26 Drexel University Functional nanoparticle filled carbon nanotubes and methods of their production

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325840A (ja) * 1997-05-23 1998-12-08 Seiko Instr Inc 偏光を利用した走査型近視野顕微鏡
JP2002267590A (ja) * 2001-03-14 2002-09-18 Ricoh Co Ltd 近接場光用のプローブ及びその作製方法、並びに近接場光学顕微鏡、光メモリの情報記録再生方式
JP2005249588A (ja) * 2004-03-04 2005-09-15 Toyota Motor Corp 近接場分光分析装置
WO2006113192A2 (en) * 2005-04-06 2006-10-26 Drexel University Functional nanoparticle filled carbon nanotubes and methods of their production

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