WO2008105448A1 - 外観検査装置の確認画面表示方法 - Google Patents

外観検査装置の確認画面表示方法 Download PDF

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Publication number
WO2008105448A1
WO2008105448A1 PCT/JP2008/053381 JP2008053381W WO2008105448A1 WO 2008105448 A1 WO2008105448 A1 WO 2008105448A1 JP 2008053381 W JP2008053381 W JP 2008053381W WO 2008105448 A1 WO2008105448 A1 WO 2008105448A1
Authority
WO
WIPO (PCT)
Prior art keywords
camera
external appearance
movement
inspection device
appearance inspection
Prior art date
Application number
PCT/JP2008/053381
Other languages
English (en)
French (fr)
Inventor
Naoto Sakashita
Original Assignee
Hitachi Kokusai Electric Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc. filed Critical Hitachi Kokusai Electric Inc.
Publication of WO2008105448A1 publication Critical patent/WO2008105448A1/ja

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

 外観検査装置で不良と自動判定された不良箇所を目視検査する際に、作業者の負担の少ない、外観検査装置の確認画面表示方法を提供する。  移動ボタンを押すと、確認画面表示用カメラ6が検査対象物に移動すると共に、モニタに「移動中」の文字表示と検査対象物と同系色の画面表示、または移動前のキャプチャ画像を表示し、カメラの移動終了と共に、モニタ画面をカメラ6の映像に切替え、不良箇所を一時的に操作部1にキャプチャした画像をモニタに表示する。作業者は、全て静止画像により検査でき、移動中の画像を見ることなく検査でき、負担が軽減する。
PCT/JP2008/053381 2007-02-28 2008-02-27 外観検査装置の確認画面表示方法 WO2008105448A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007049438A JP2008215827A (ja) 2007-02-28 2007-02-28 外観検査装置の確認画面表示方法
JP2007-049438 2007-02-28

Publications (1)

Publication Number Publication Date
WO2008105448A1 true WO2008105448A1 (ja) 2008-09-04

Family

ID=39721273

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053381 WO2008105448A1 (ja) 2007-02-28 2008-02-27 外観検査装置の確認画面表示方法

Country Status (2)

Country Link
JP (1) JP2008215827A (ja)
WO (1) WO2008105448A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110146519A (zh) * 2018-02-12 2019-08-20 志圣工业股份有限公司 电路板检测方法及电路板曝光方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08210987A (ja) * 1995-02-02 1996-08-20 Olympus Optical Co Ltd 欠陥検出用顕微鏡装置
JPH0915162A (ja) * 1995-06-27 1997-01-17 Matsushita Electric Works Ltd 基板外観目視検査装置
JP2867704B2 (ja) * 1993-04-21 1999-03-10 オムロン株式会社 目視検査支援装置および基板検査装置ならびにこれらを用いたはんだ付け検査方法および修正方法
JP2004347569A (ja) * 2003-05-26 2004-12-09 Nikon Corp 観察装置
JP2005351809A (ja) * 2004-06-11 2005-12-22 Nikon Corp 観察装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2867704B2 (ja) * 1993-04-21 1999-03-10 オムロン株式会社 目視検査支援装置および基板検査装置ならびにこれらを用いたはんだ付け検査方法および修正方法
JPH08210987A (ja) * 1995-02-02 1996-08-20 Olympus Optical Co Ltd 欠陥検出用顕微鏡装置
JPH0915162A (ja) * 1995-06-27 1997-01-17 Matsushita Electric Works Ltd 基板外観目視検査装置
JP2004347569A (ja) * 2003-05-26 2004-12-09 Nikon Corp 観察装置
JP2005351809A (ja) * 2004-06-11 2005-12-22 Nikon Corp 観察装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110146519A (zh) * 2018-02-12 2019-08-20 志圣工业股份有限公司 电路板检测方法及电路板曝光方法

Also Published As

Publication number Publication date
JP2008215827A (ja) 2008-09-18

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