WO2008105287A1 - 蒸着源、蒸着装置、有機薄膜の成膜方法 - Google Patents

蒸着源、蒸着装置、有機薄膜の成膜方法 Download PDF

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Publication number
WO2008105287A1
WO2008105287A1 PCT/JP2008/052822 JP2008052822W WO2008105287A1 WO 2008105287 A1 WO2008105287 A1 WO 2008105287A1 JP 2008052822 W JP2008052822 W JP 2008052822W WO 2008105287 A1 WO2008105287 A1 WO 2008105287A1
Authority
WO
WIPO (PCT)
Prior art keywords
deposition
thin film
organic thin
vaporization chamber
deposition material
Prior art date
Application number
PCT/JP2008/052822
Other languages
English (en)
French (fr)
Inventor
Toshio Negishi
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to CN200880006232.0A priority Critical patent/CN101622372B/zh
Priority to JP2009501194A priority patent/JP5282025B2/ja
Priority to KR1020097017666A priority patent/KR101191690B1/ko
Priority to EP08711628A priority patent/EP2116629A4/en
Publication of WO2008105287A1 publication Critical patent/WO2008105287A1/ja
Priority to US12/547,676 priority patent/US20100015361A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

　膜質の良い有機薄膜を成膜可能な蒸着装置を提供する。本発明の蒸着装置１は、蒸発室１５と蒸着容器２１とを有しており、蒸着容器２１と蒸発室１５は小孔３８で接続されている。蒸着材料１６は蒸発室１５に必要量ずつ供給されるので、大量の蒸着材料１６が長時間加熱されることがない。蒸着材料１６は蒸発室１５で蒸発するので、突沸がおこっても、液滴が基板６に到達しない。レーザー光の照射で蒸着材料１６を蒸発させれば、蒸着材料１６の化学変性が少なくてすむ。
PCT/JP2008/052822 2007-02-28 2008-02-20 蒸着源、蒸着装置、有機薄膜の成膜方法 WO2008105287A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN200880006232.0A CN101622372B (zh) 2007-02-28 2008-02-20 蒸镀源、蒸镀装置、有机薄膜的成膜方法
JP2009501194A JP5282025B2 (ja) 2007-02-28 2008-02-20 蒸着源、蒸着装置、有機薄膜の成膜方法
KR1020097017666A KR101191690B1 (ko) 2007-02-28 2008-02-20 증착원, 증착 장치, 유기 박막의 성막 방법
EP08711628A EP2116629A4 (en) 2007-02-28 2008-02-20 DEPOSITION SOURCE, DEPOSITION APPARATUS, AND METHOD FOR FORMING ORGANIC THIN FILM
US12/547,676 US20100015361A1 (en) 2007-02-28 2009-08-26 Vapor deposition source, a vapor deposition apparatus and a method for forming an organic thin film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-049906 2007-02-28
JP2007049906 2007-02-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/547,676 Continuation US20100015361A1 (en) 2007-02-28 2009-08-26 Vapor deposition source, a vapor deposition apparatus and a method for forming an organic thin film

Publications (1)

Publication Number Publication Date
WO2008105287A1 true WO2008105287A1 (ja) 2008-09-04

Family

ID=39721122

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052822 WO2008105287A1 (ja) 2007-02-28 2008-02-20 蒸着源、蒸着装置、有機薄膜の成膜方法

Country Status (6)

Country Link
US (1) US20100015361A1 (ja)
EP (1) EP2116629A4 (ja)
JP (1) JP5282025B2 (ja)
CN (1) CN101622372B (ja)
TW (1) TWI428459B (ja)
WO (1) WO2008105287A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010159454A (ja) * 2009-01-08 2010-07-22 Ulvac Japan Ltd 成膜装置、成膜方法
KR100977374B1 (ko) 2009-08-03 2010-08-20 텔리오솔라 테크놀로지스 인크 대면적 박막형 ｃｉｇｓ 태양전지 고속증착 및 양산장비, 그 공정방법
WO2010123027A1 (ja) * 2009-04-24 2010-10-28 東京エレクトロン株式会社 蒸着処理装置および蒸着処理方法
EP2402480A1 (en) * 2009-02-24 2012-01-04 Ulvac, Inc. Organic compound steam generator and apparatus for producing organic thin film
KR101168706B1 (ko) 2011-05-13 2012-07-30 주식회사 제이몬 Ｃｉｇｓ 박막 성장을 위한 셀렌화 공정 장치
JP2012525505A (ja) * 2009-05-01 2012-10-22 カティーヴァ、インク． 有機蒸発材料印刷の方法および装置
KR101416589B1 (ko) 2012-10-17 2014-07-08 주식회사 선익시스템 공정 중 도가니의 교체가 가능한 하향식 증발원 및 이를 구비하는 박막 증착장치

Families Citing this family (18)

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US9249502B2 (en) * 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US7945344B2 (en) * 2008-06-20 2011-05-17 SAKT13, Inc. Computational method for design and manufacture of electrochemical systems
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
KR101207719B1 (ko) 2010-12-27 2012-12-03 주식회사 포스코 건식 코팅 장치
US10770745B2 (en) 2011-11-09 2020-09-08 Sakti3, Inc. Monolithically integrated thin-film solid state lithium battery device having multiple layers of lithium electrochemical cells
TW201245474A (en) * 2011-05-12 2012-11-16 Hon Hai Prec Ind Co Ltd Evaporation source device and a coating method using the same
US8301285B2 (en) 2011-10-31 2012-10-30 Sakti3, Inc. Computer aided solid state battery design method and manufacture of same using selected combinations of characteristics
US9127344B2 (en) 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
US20130220546A1 (en) * 2011-11-09 2013-08-29 Sakti 3, Inc. High throughput physical vapor deposition apparatus and method for manufacture of solid state batteries
US20120055633A1 (en) * 2011-11-09 2012-03-08 Sakti3, Inc. High throughput physical vapor deposition apparatus and method for manufacture of solid state batteries
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery
TWI490362B (zh) * 2013-02-04 2015-07-01 Adpv Technology Ltd Intetrust Window having self-cleaning of the vapor deposition apparatus
TWI472635B (zh) * 2013-09-13 2015-02-11 Univ Nat Taiwan 脈衝雷射蒸鍍系統
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device
CN107400861B (zh) * 2017-09-21 2020-05-08 深圳市华格纳米科技有限公司 一种自动化连续式电阻蒸发镀膜装置
CN108155303B (zh) * 2017-12-29 2020-05-19 深圳市华星光电技术有限公司 喷墨打印膜层干燥加热装置及方法
CN109732199B (zh) * 2019-02-25 2020-11-20 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置
JP2022531068A (ja) * 2019-03-13 2022-07-06 メトオックス テクノロジーズ，インコーポレイテッド 薄膜堆積用の固体前駆体フィードシステム

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JP2005060767A (ja) * 2003-08-12 2005-03-10 Sony Corp 薄膜形成装置
JP2006307239A (ja) * 2005-04-26 2006-11-09 Hitachi Zosen Corp 蒸着材料の蒸発装置

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JP2003226961A (ja) * 2002-02-04 2003-08-15 Sanyo Shinku Kogyo Kk 連続蒸着装置
JP2005060767A (ja) * 2003-08-12 2005-03-10 Sony Corp 薄膜形成装置
JP2006307239A (ja) * 2005-04-26 2006-11-09 Hitachi Zosen Corp 蒸着材料の蒸発装置

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010159454A (ja) * 2009-01-08 2010-07-22 Ulvac Japan Ltd 成膜装置、成膜方法
EP2402480A1 (en) * 2009-02-24 2012-01-04 Ulvac, Inc. Organic compound steam generator and apparatus for producing organic thin film
EP2402480A4 (en) * 2009-02-24 2013-11-20 Ulvac Inc DEVICE FOR GENERATING ORGANIC COMPOUND VAPOR AND DEVICE FOR MAKING ORGANIC FINE MEMBRANE
WO2010123027A1 (ja) * 2009-04-24 2010-10-28 東京エレクトロン株式会社 蒸着処理装置および蒸着処理方法
CN102414339A (zh) * 2009-04-24 2012-04-11 东京毅力科创株式会社 蒸镀处理装置和蒸镀处理方法
KR101283396B1 (ko) 2009-04-24 2013-07-08 도쿄엘렉트론가부시키가이샤 증착 처리 장치 및 증착 처리 방법
JP5341986B2 (ja) * 2009-04-24 2013-11-13 東京エレクトロン株式会社 蒸着処理装置および蒸着処理方法
JP2012525505A (ja) * 2009-05-01 2012-10-22 カティーヴァ、インク． 有機蒸発材料印刷の方法および装置
KR100977374B1 (ko) 2009-08-03 2010-08-20 텔리오솔라 테크놀로지스 인크 대면적 박막형 ｃｉｇｓ 태양전지 고속증착 및 양산장비, 그 공정방법
KR101168706B1 (ko) 2011-05-13 2012-07-30 주식회사 제이몬 Ｃｉｇｓ 박막 성장을 위한 셀렌화 공정 장치
KR101416589B1 (ko) 2012-10-17 2014-07-08 주식회사 선익시스템 공정 중 도가니의 교체가 가능한 하향식 증발원 및 이를 구비하는 박막 증착장치

Also Published As

Publication number Publication date
JPWO2008105287A1 (ja) 2010-06-03
EP2116629A4 (en) 2010-11-24
US20100015361A1 (en) 2010-01-21
JP5282025B2 (ja) 2013-09-04
CN101622372A (zh) 2010-01-06
CN101622372B (zh) 2013-06-19
TWI428459B (zh) 2014-03-01
TW200904998A (en) 2009-02-01
EP2116629A1 (en) 2009-11-11

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