WO2008099620A1 - 反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法 - Google Patents

反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法 Download PDF

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Publication number
WO2008099620A1
WO2008099620A1 PCT/JP2008/050076 JP2008050076W WO2008099620A1 WO 2008099620 A1 WO2008099620 A1 WO 2008099620A1 JP 2008050076 W JP2008050076 W JP 2008050076W WO 2008099620 A1 WO2008099620 A1 WO 2008099620A1
Authority
WO
WIPO (PCT)
Prior art keywords
composition
antireflection film
film formation
same
resist pattern
Prior art date
Application number
PCT/JP2008/050076
Other languages
English (en)
French (fr)
Inventor
Atsushi Sawano
Jun Koshiyama
Takako Hirosaki
Original Assignee
Tokyo Ohka Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007035300A external-priority patent/JP5037158B2/ja
Priority claimed from JP2007035301A external-priority patent/JP4970977B2/ja
Application filed by Tokyo Ohka Kogyo Co., Ltd. filed Critical Tokyo Ohka Kogyo Co., Ltd.
Priority to US12/449,494 priority Critical patent/US8158328B2/en
Priority to KR1020097015765A priority patent/KR101197442B1/ko
Publication of WO2008099620A1 publication Critical patent/WO2008099620A1/ja

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0276—Photolithographic processes using an anti-reflective coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)

Abstract

　レジスト膜上に反射防止膜を形成する際に用いられる反射防止膜形成用組成物であって、取り扱い性が容易であり、膜形成後に析出物等を生じることのない反射防止膜形成用組成物を提供すること。 　レジスト膜上に設けられる反射防止膜を形成するための反射防止膜形成用組成物であって、少なくとも所定のフッ素系界面活性剤と所定の水溶性膜形成成分とを含有してなる反射防止膜形成用組成物。この反射防止膜形成用組成物は、取り扱いが容易であって、健康や環境に悪影響を及ぼすことがなく、反射防止膜を形成させた後においても析出物等を生じることがない。
PCT/JP2008/050076 2007-02-15 2008-01-08 反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法 WO2008099620A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/449,494 US8158328B2 (en) 2007-02-15 2008-01-08 Composition for formation of anti-reflection film, and method for formation of resist pattern using the same
KR1020097015765A KR101197442B1 (ko) 2007-02-15 2008-01-08 반사 방지막 형성용 조성물 및 이것을 이용한 레지스트 패턴 형성방법

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007035300A JP5037158B2 (ja) 2007-02-15 2007-02-15 反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法
JP2007035301A JP4970977B2 (ja) 2007-02-15 2007-02-15 反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法
JP2007-035301 2007-02-15
JP2007-035300 2007-02-15

Publications (1)

Publication Number Publication Date
WO2008099620A1 true WO2008099620A1 (ja) 2008-08-21

Family

ID=39689866

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050076 WO2008099620A1 (ja) 2007-02-15 2008-01-08 反射防止膜形成用組成物、及びこれを用いたレジストパターン形成方法

Country Status (2)

Country Link
US (1) US8158328B2 (ja)
WO (1) WO2008099620A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020067547A (ja) * 2018-10-24 2020-04-30 メルク、パテント、ゲゼルシャフト、ミット、ベシュレンクテル、ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ ＧｍｂＨ 半導体水溶性組成物およびその使用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62226148A (ja) * 1986-03-27 1987-10-05 Tokyo Ohka Kogyo Co Ltd パタ−ン形成方法
JP2000187331A (ja) * 1998-09-15 2000-07-04 Shipley Co Llc 反射防止コ―ティング組成物
JP2005157259A (ja) * 2003-10-28 2005-06-16 Tokyo Ohka Kogyo Co Ltd レジスト上層膜形成材料、およびこれを用いたレジストパターン形成方法
WO2007007780A1 (ja) * 2005-07-12 2007-01-18 Tokyo Ohka Kogyo Co., Ltd. 保護膜形成用材料およびこれを用いたホトレジストパターン形成方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4910122A (en) 1982-09-30 1990-03-20 Brewer Science, Inc. Anti-reflective coating
JP2616091B2 (ja) 1990-01-29 1997-06-04 日本電気株式会社 半導体装置の製造方法
JP2599638B2 (ja) 1990-06-22 1997-04-09 大日精化工業株式会社 微粒子複合酸化物ブルーグリーン顔料及びその製造方法
US5631314A (en) * 1994-04-27 1997-05-20 Tokyo Ohka Kogyo Co., Ltd. Liquid coating composition for use in forming photoresist coating films and photoresist material using said composition
JP3950584B2 (ja) * 1999-06-29 2007-08-01 Ａｚエレクトロニックマテリアルズ株式会社 水溶性樹脂組成物
US6555510B2 (en) * 2001-05-10 2003-04-29 3M Innovative Properties Company Bis(perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods therefor
US6818384B2 (en) * 2002-10-08 2004-11-16 Samsung Electronics Co., Ltd. Methods of fabricating microelectronic features by forming intermixed layers of water-soluble resins and resist materials
KR100887202B1 (ko) * 2004-04-27 2009-03-06 도오꾜오까고오교 가부시끼가이샤 액침 노광 프로세스용 레지스트 보호막 형성용 재료, 및 이보호막을 이용한 레지스트 패턴 형성 방법
KR100640643B1 (ko) 2005-06-04 2006-10-31 삼성전자주식회사 포토레지스트용 탑 코팅 조성물과 이를 이용한포토레지스트 패턴 형성 방법
EP1806621A1 (en) * 2006-01-08 2007-07-11 Rohm and Haas Electronic Materials LLC Coating compositions for photoresists

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62226148A (ja) * 1986-03-27 1987-10-05 Tokyo Ohka Kogyo Co Ltd パタ−ン形成方法
JP2000187331A (ja) * 1998-09-15 2000-07-04 Shipley Co Llc 反射防止コ―ティング組成物
JP2005157259A (ja) * 2003-10-28 2005-06-16 Tokyo Ohka Kogyo Co Ltd レジスト上層膜形成材料、およびこれを用いたレジストパターン形成方法
WO2007007780A1 (ja) * 2005-07-12 2007-01-18 Tokyo Ohka Kogyo Co., Ltd. 保護膜形成用材料およびこれを用いたホトレジストパターン形成方法

Also Published As

Publication number Publication date
US8158328B2 (en) 2012-04-17
US20100104978A1 (en) 2010-04-29

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