WO2008090617A1 - Method for generating atmospheric pressure plasma gas flow - Google Patents

Method for generating atmospheric pressure plasma gas flow Download PDF

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Publication number
WO2008090617A1
WO2008090617A1 PCT/JP2007/051172 JP2007051172W WO2008090617A1 WO 2008090617 A1 WO2008090617 A1 WO 2008090617A1 JP 2007051172 W JP2007051172 W JP 2007051172W WO 2008090617 A1 WO2008090617 A1 WO 2008090617A1
Authority
WO
WIPO (PCT)
Prior art keywords
atmospheric pressure
plasma gas
gas flow
generating
plasma
Prior art date
Application number
PCT/JP2007/051172
Other languages
French (fr)
Japanese (ja)
Inventor
Osamu Sakai
Shouhei Nankou
Tsuyoshi Honda
Original Assignee
Nissin Inc.
Kyoto University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Inc., Kyoto University filed Critical Nissin Inc.
Priority to PCT/JP2007/051172 priority Critical patent/WO2008090617A1/en
Publication of WO2008090617A1 publication Critical patent/WO2008090617A1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

A method for generating a gas flow of low temperature plasma (an atmospheric pressure plasma gas flow) by glow discharge under atmospheric pressure, while suppressing temperature rise of the plasma gas. Energy of a supplied microwave (21) is concentrated on a substrate (10) for microstrip line by a resonance circuit (14), and supply gases (31, 41) for generating plasma are made to flow by arranging dielectric tubes (30, 40) in a high electric field space, thereby generating atmospheric pressure plasma gas flows (33, 44). The plasma gas flow (44) is elongated by feeding a gas in a laminar flow state to the high electric field space through the dielectric tube (40).
PCT/JP2007/051172 2007-01-25 2007-01-25 Method for generating atmospheric pressure plasma gas flow WO2008090617A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/051172 WO2008090617A1 (en) 2007-01-25 2007-01-25 Method for generating atmospheric pressure plasma gas flow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/051172 WO2008090617A1 (en) 2007-01-25 2007-01-25 Method for generating atmospheric pressure plasma gas flow

Publications (1)

Publication Number Publication Date
WO2008090617A1 true WO2008090617A1 (en) 2008-07-31

Family

ID=39644199

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/051172 WO2008090617A1 (en) 2007-01-25 2007-01-25 Method for generating atmospheric pressure plasma gas flow

Country Status (1)

Country Link
WO (1) WO2008090617A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012525684A (en) * 2009-04-28 2012-10-22 トラスティーズ オブ タフツ カレッジ Microplasma generator and its application

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57142779A (en) * 1981-01-30 1982-09-03 Hypertherm Inc Device and method of cooling plasma arc type cutting torch and detecting its height
JP2006038729A (en) * 2004-07-29 2006-02-09 National Institute Of Advanced Industrial & Technology Inductively coupled plasma torch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57142779A (en) * 1981-01-30 1982-09-03 Hypertherm Inc Device and method of cooling plasma arc type cutting torch and detecting its height
JP2006038729A (en) * 2004-07-29 2006-02-09 National Institute Of Advanced Industrial & Technology Inductively coupled plasma torch

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KIM J. ET AL.: "Microwave excited blowing-type plasmas at atmosphere pressure", HEISEI 18 NEN ANNUAL CONFERENCE OF FUNDAMENTALS AND MATERIALS SOCIETY IEE JAPAN (CD-ROM), 21 August 2006 (2006-08-21), XP003022947 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012525684A (en) * 2009-04-28 2012-10-22 トラスティーズ オブ タフツ カレッジ Microplasma generator and its application

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