WO2008069133A1

WO2008069133A1 - Rolling member and method of processing of rolling contact surface

Info

Publication number: WO2008069133A1
Application number: PCT/JP2007/073187
Authority: WO
Inventors: Hiroki Fujiwara; Takuji Furubayashi
Original assignee: Ntn Corporation
Priority date: 2006-12-04
Filing date: 2007-11-30
Publication date: 2008-06-12

Abstract

A large number of minute depressions (5) are formed in a rolling contact portion, and the depressions (5) generate dynamic pressure effect when lubrication oil is present in the depressions. Lubrication oil containing depressions (4) deeper than the depression (5), which generate the dynamic pressure effect, are formed in the dynamic pressure generation surfaces. By this, even at a low speed, a sufficient lubrication oil film can be formed by supply of the lubrication oil from the deep depressions (4) and by dynamic effect in the large number of shallow depressions (5). Direct contact of the rolling contact portion is prevented, and, even at a very low speed, surface damage of the portion can be prevented by boundary lubrication effect.

Description

Specification

Rolling member and surface processing method of rolling contact surface

Technical field

[0001] The present invention relates to a mechanical element such as a rolling bearing that realizes friction reduction by a relative motion mainly composed of rolling, and in particular, operating conditions and swinging motion that frequently start and stop, or low speed and high speed. The present invention relates to a rolling member having a rolling contact surface suitable for operating conditions such as a load, and a surface processing method of the rolling contact surface.

Background art

[0002] In a rolling contact portion such as a rolling bearing, a fluid lubrication state is established by a dynamic pressure effect of a fluid intervening between objects by relative movement of the object, thereby preventing direct contact of the object and friction and wear. Can be reduced.

[0003] However, when the amount of lubricating oil is small or the speed is low, the dynamic pressure effect is small and the lubricating oil film is not formed, and there is a risk of causing solid contact. In particular, in recent years, low-viscosity lubricating oil has been used to reduce torque, and the amount of lubricating oil supplied from the outside has also decreased, so the possibility of a solid contact state becomes even higher. Yes.

[0004] Conventionally, the amount of lubricating oil in the vicinity of the contact portion is insufficient! / Even if the surface of the contact portion retains the lubricating oil, lubrication is possible. Therefore, a large number of fine concave portions are provided on the surface. Patent Document 1 discloses a technique for retaining lubricating oil in the recess. This technology can improve the boundary lubrication performance at low speeds.

Patent Document 1: JP-A-02-168021

[0005] In Patent Document 1, fine concave portions are formed by barrel processing. The formation of a recess by barrel processing is also disclosed in Patent Document 2.

Patent Document 2: Japanese Patent Laid-Open No. 05-288221

[0006] Further, Patent Document 3 discloses that fine irregularities are formed on the surface of a rolling part by barreling after shot blasting.

Patent Document 3: Japanese Patent Application Laid-Open No. 08-232964

[0007] Patent Document 4 discloses a method of forming a recess in a rolling surface of a rolling bearing as a thermoplastic. When a concave resin is formed by mixing a functional resin and metal powder and then allowing the resin to flow out during heat treatment, a metal powder injection molding method is introduced.

Patent Document 4: JP-A-10-227313

[0008] Further, Patent Document 5 introduces the use of a depression on the surface of a ceramic rolling element as a lubricating oil reservoir.

Patent Document 5: Japanese Unexamined Patent Publication No. 2000-205267

[0009] Further, Patent Document 6 introduces the formation of minute concave portions on the surface by roller burnishing, in which a roller having minute convex portions is pressed against the surface of a rolling member.

Patent Document 6: Japanese Unexamined Patent Application Publication No. 2004-116766

[0010] Further, Patent Document 7 introduces a method of forming a minute recess on a rolling sliding surface by irradiating a short pulse laser.

Patent Document 7: Japanese Patent Application Laid-Open No. 2005-321048

[0011] On the other hand, in a plain bearing, a technique is generally used that improves lubrication performance by forming a large number of grooves having a depth of about the oil film thickness on a sliding surface. This is based on the fact that the hydrodynamic pressure is generated because the depth of the sliding surface changes due to the presence of the groove! An example in which this effect is applied to a rolling bearing is disclosed in Patent Document 8! The technique disclosed in Patent Document 8 attempts to prevent slippage by pressing a rolling element that causes slipping on a raceway ring with pressure due to a dynamic pressure action at a site where a relatively small load is applied. However, the technique of Patent Document 8 is based on the premise that sufficient lubricating oil is supplied to the contact portion from the outside of the contact portion, as in a general dynamic pressure bearing. Patent Document 8: Japanese Unexamined Patent Publication No. 2006-105361

[0012] Non-Patent Document 1 discloses an example in which a deep concave portion is provided in a thrust flat plain bearing that supports high surface pressure. This is intended to improve the boundary lubrication performance by discharging lubricating oil from the recesses due to thermal expansion. However, this technology is not intended to generate hydrodynamic dynamic pressure effects!

Non-Patent Document 1: otera, A. Mori, N. Tagawa, PROPOSAL OF A SEIZURE PREVE NTING METHOD IN HEAVILY LOADED SLIDING PAIRS, Synopses of the Interna tional Tribology Conference Kobe, 2005, D-04

Disclosure of the invention

Problems to be solved by the invention

Incidentally, the hydrodynamic dynamic pressure action is mainly generated by the viscosity of the fluid, the speed of the contact surface, and the wedge shape of the contact surface. In normal rolling contact, the contact portion of the member is inevitably wedge-shaped. Therefore, if a certain viscosity or speed is applied, an oil film is formed and the contact surface is separated.

However, when trying to increase the dynamic pressure action at low speed, it is difficult to control the viscosity of the fluid, so the wedge shape needs to be improved. In other words, it is conceivable to increase the dynamic pressure action at low speed by providing a micro wedge shape on the surface in addition to the macro wedge shape.

[0015] Although the purpose of the rolling bearing is different from that of the technique of Patent Document 8, it is considered that the formation of a shallow concave portion that generates a dynamic pressure action improves oil film formation at low speed. However, when the speed is low, it is not possible to supply lubricating oil from the outside to the contact part.

[0016] In addition, according to the method of Patent Document 1, it is not possible to improve the fluid lubrication performance only with the lubricating oil held in the shallow recess.

[0017] Therefore, the present invention cannot be expected to provide operating conditions and swinging motions that frequently start and stop, or low speed and high load, and supply of lubricating oil from the outside to the contact portion! /, Even under operating conditions, we intend to provide a rolling member that can separate the contact area with lubricating oil and its rolling force ^ surface treatment method.

Means for solving the problem

[0018] The inventors of the present invention can not expect operating conditions and swinging motions that frequently start and stop, or low speed and high load, and supply of lubricating oil from the outside to the contact part! / Under the operating conditions, a number of small shallow recesses that generate a dynamic pressure action due to the presence of lubricating oil are formed in the rolling contact portion, and this dynamic pressure generation surface is deeper than the recess that generates the dynamic pressure action. By providing a large lubricating oil reservoir recess, a sufficient lubricating oil film can be formed even at low speeds due to the supply of lubricating oil from the deep lubricating oil reservoir recess and the dynamic pressure action of many small shallow recesses. Can prevent direct contact of the contact area, and can perform boundary lubrication even at extremely low speeds. It was found that surface damage can be prevented by use.

[0019] However, in the conventional method for forming a recess described in Patent Literatures !! to 8 and the like, the size and depth of the opening surface of the recess cannot be precisely controlled, and at the periphery of the processed portion of the recess. Unnecessary convex parts may be formed.

[0020] Further, in laser processing, relatively shallow! / And recesses can be processed in a short time by controlling the size, depth, and position on the order of μm or less, but an attempt was made to form deep recesses. In this case, it takes a long time to form one concave portion, and it is practically difficult to form a deep concave portion on the entire surface of the rolling member from the viewpoint of processing efficiency.

[0021] Therefore, it is not possible to provide a minute shallow concave portion that forms the dynamic pressure generating surface and a concave portion deeper than the concave portion that forms the dynamic pressure generating surface on the same rolling force ^ contact surface with high accuracy.

[0022] As a method of forming the recess, there is also a method called microblast. In this method, a film made of resin or metal is masked on the surface to be processed, and fine abrasive grains are sprayed to process. In this method, it is possible to accurately control the shape of the recess, but the diameter of the recess must be sufficiently larger than the diameter of the abrasive grains. In this method, since the mask has a certain thickness, if the concave portions are formed at a pitch smaller than the thickness of the mask, the aspect ratio of the mask deteriorates. For this reason, it is difficult to produce minute recesses on the order of diameter 10111 and pitch 30 m by microblasting.

[0023] The inventors of the present invention efficiently and accurately form a small shallow recess that forms the dynamic pressure generating surface and a deeper recess than the recess that forms the dynamic pressure generating surface on the rolling contact surface. They found a surface processing method.

[0024] One of the methods is to form a minute shallow recess that forms a dynamic pressure generating surface by laser processing or etching, and to form a recess that is deeper than the recess that forms the dynamic pressure generating surface. This is a method of efficiently and accurately disposing recesses of two different depths on the rolling contact surface by forming by machining.

[0025] That is, of the two different depths of recesses, shallow recesses are formed on the rolling contact surface of the rolling member by laser processing or etching calorie, and deep recesses are formed by microblasting. On the rolling contact surface of the rolling member on which the concave portion is formed, The recesses are additionally formed.

[0026] With this method, a laser processing apparatus equipped with a positioning mechanism can accurately form a recess with a size, depth, and position on the order of m or less, and a minute pressure forming a dynamic pressure generating surface. If it is a shallow concave part, processing in a short time is possible.

[0027] In the etching process, a resist mask is formed in which the opening pattern of the shallow concave portion that forms the dynamic pressure generating surface is exposed on the surface of the rolling contact surface, and a portion other than the opening pattern is masked, and then the resist mask After etching the surface of the rolling contact surface exposed from the surface to the depth of the shallow concave portion that forms the dynamic pressure generating surface, the resist mask is removed to form the shallow concave portion that forms the dynamic pressure generating surface on the surface of the rolling contact surface. It is a method of forming.

[0028] A method for forming a lubricating oil reservoir recess by microblasting is as follows. First, the surface of the rolling contact surface is exposed with the opening pattern of the lubricant storing recess, and the mask other than the opening pattern is masked. The microblast mask is removed after microblasting is performed by spraying fine abrasive grains onto the surface of the rolling contact surface exposed from the microblast mask.

[0029] The process of forming the shallow concave portion that generates the dynamic pressure action and the process of processing the lubricating oil storage concave portion are performed first. The force S is free. The shallow concave portion that generates the dynamic pressure action is formed first. Then, when forming a microblast mask with a resist solution in the process of processing the lubricating oil reservoir recess, the resist solution that forms the microblast mask penetrates into a shallow recess that generates a dynamic pressure action. The blast mask is difficult to remove. For this reason, it is easier to remove the microblast mask by first forming the shallow concave portion that generates the dynamic pressure action. Therefore, first, the shallow concave portion that generates the dynamic pressure action is formed first. preferable.

[0030] By repeating the above-described shallow recess processing step for generating the dynamic pressure action and the lubricating oil storage recess processing step, three or more types of recesses can be formed.

[0031] As the shapes of the shallow concave portion and the lubricating oil storage concave portion that generate the dynamic pressure action, it is possible to form independent hole shapes, groove shapes, or misalignments.

[0032] Also by the following method, it is possible to efficiently and accurately form a small shallow recess that forms the dynamic pressure generating surface and a recess that is deeper than the recess that forms the dynamic pressure generating surface. [0033] According to the method, a minute shallow recess that forms a dynamic pressure generating surface is formed by laser processing, and a recess deeper than the recess that forms the dynamic pressure generating surface is formed by etching. In this method, two concave portions having different depths are arranged on the contact surface with high accuracy and efficiency.

That is, of the two different depths of recesses, the shallow recesses are formed on the rolling contact surface of the rolling member by laser processing, and the deep recesses are formed by etching, and one of the recesses is formed. The other concave portion is additionally formed on the rolling contact surface of the rolling member.

[0035] With a laser processing apparatus equipped with a positioning mechanism, a concave portion can be formed with accuracy in the order of size, depth, and position of m or less, and if it is a small shallow concave portion that forms a dynamic pressure generating surface, Processing in a short time is possible.

[0036] As described in the first surface processing method, the etching process is performed using a resist mask in which the opening pattern of the lubricating oil reservoir recess is exposed on the surface of the rolling contact surface, and the portions other than the opening pattern are masked. Then, after etching the surface of the rolling contact surface exposed from the resist mask to the depth of the lubricating oil storage recess, the resist mask is removed to form the lubricating oil storage recess on the surface of the rolling contact surface. Is the method.

[0037] As a method for forming a resist mask in the above etching process, a photoresist layer is formed by applying a photoresist on the surface of the rolling contact surface, and an opening for a lubricating oil reservoir recess is formed on the surface of the photoresist layer. Covered with a pattern printed cover film, exposed, then removed uncured portion of the photoresist layer to expose the open pattern portion of the lubricant reservoir recess, and masked portions other than the open pattern It is possible to adopt a photo-resisting method that remains in

[0038] In addition to the above-described method using a photoresist, a method may be used in which a resist ink is printed by a screen printing method so as to cover a portion other than the opening pattern of the lubricant reservoir recess.

[0039] Further, as described in the first surface processing method, it is free to form the shallower concave portion or the deeper lubricating oil reservoir concave portion first in the laser processing and the etching processing. If the shallower recess is first formed by laser processing, it will be shallower in the etching process. Since the resist solution for forming the resist mask enters the recess, the resist mask becomes difficult to remove. For this reason, it is easier to remove the resist mask in the etching process because the resist mask can be easily removed. First, it is preferable to form the deeper lubricating oil reservoir recess in the etching process. .

[0040] Also in this second surface processing method, when the laser processing and the etching processing are repeated, three or more types of concave portions can be formed.

[0041] Further, as the shapes of the shallow concave portion and the lubricating oil storage concave portion that generate the dynamic pressure action, it is possible to form an independent hole shape, groove shape!

[0042] Also by the following third surface processing method, it is possible to efficiently and accurately form a small shallow recess that forms a dynamic pressure generating surface and a recess that is deeper than the recess that forms this dynamic pressure generating surface. Is possible.

[0043] In this third surface processing method, a shallow concave portion that generates a dynamic pressure effect and a concave portion that is deeper than the shallow concave portion that generates the dynamic pressure effect are formed on the rolling contact surface by etching. This is a method of accurately arranging recesses having two different depths.

That is, one of two recesses having different depths is formed on the rolling contact surface of the rolling member by the first etching step, and then, the rolling contact of the rolling member having one recess is formed. The other concave portion is additionally formed on the touch surface in the second etching step.

[0045] In the first etching step, a resist mask in which a shallow concave portion or a lubricant storing concave portion that generates a dynamic pressure action is exposed on the surface of the rolling contact surface, and a portion other than the opening pattern is masked is used. Then, after etching the surface of the rolling contact surface exposed from the resist mask to the depth of the shallow concave portion or the lubricating oil storage concave portion that generates the dynamic pressure action, the resist mask is removed to form the surface of the rolling contact surface. This is a process of forming shallow V, concave portions or lubricating oil reservoir concave portions that generate a dynamic pressure action.

[0046] The second etching step is a step performed subsequent to the first etching step, and is a rolling contact in which a shallow concave portion or a lubricating oil storage concave portion that generates a dynamic pressure action is formed by the first etching step. On the surface of the surface, a shallow concavity that generates a dynamic pressure action or an opening pattern of a lubricating oil reservoir concavity is exposed, and a resist mask is formed in which portions other than the opening pattern are masked, and then the rolling contact surface exposed from the resist mask The surface of After etching to the depth of the shallow concavity or lubricating oil reservoir that generates dynamic pressure, the resist mask is removed, and the shallow concavity or lubricating oil reservoir that generates the second dynamic pressure action on the surface of the rolling contact surface This is a step of additionally forming a recess.

[0047] As a method of forming a resist mask in the first etching step and the second etching step, a photoresist layer is formed by applying a photoresist to the surface of the rolling contact surface. The surface is exposed with a cover film printed with a shallow recess that generates a dynamic pressure effect or an opening pattern of a lubricating oil storage recess, and then the uncured portion of the photoresist layer is removed to generate a dynamic pressure effect. It is possible to employ a photoresist method in which a portion of the opening pattern of the shallow recess or the lubricating oil storage recess is exposed and a portion other than the opening pattern is left in a masked state.

[0048] As a method for forming the resist mask in the first etching step and the second etching step, in addition to the method using the photoresist, a shallow concave portion in which the resist ink generates a dynamic pressure action by a screen printing method is used. Alternatively, a method of printing so as to cover a portion other than the opening pattern of the lubricating oil reservoir recess may be used.

[0049] In the first etching step and the second etching step, it is free to form the shallower concave portion or the deeper lubricating oil reservoir concave portion first, but the deeper lubricating oil reservoir is formed. If the concave portion is formed in the first etching step first, the resist mask is difficult to remove because the resist solution for forming the resist mask enters the deep concave portion in the first etching step. For this reason, in the first etching step, it is easier to remove the resist mask when the shallower concave portion is formed. Therefore, first, the shallower dynamic pressure generating concave portion is formed in the first etching step. I like it!

[0050] After the second etching step, when the second etching step is further repeated, three or more types of recesses can be formed.

[0051] As the shapes of the dynamic pressure generating recess and the lubricating oil storage recess, independent hole shapes, groove shapes V, and deviations can be formed.

[0052] As described above, according to the surface processing method of the present invention, the rolling contact surface is provided with a small shallow concave portion that forms the dynamic pressure generating surface and a concave portion that is deeper than the concave portion that forms the dynamic pressure generating surface. Since it can be formed accurately and efficiently, the lubricating oil from the deep lubricating oil reservoir recess An excellent rolling member that has sufficient lubrication oil film formed even at low speeds due to the supply and the shallow small number of dynamic pressure acting concave parts, and surface damage was prevented by boundary lubrication even at extremely low speeds. Can be manufactured.

In the rolling member according to the present invention, a dynamic pressure generating surface having a large number of minute concave portions that generate a dynamic pressure action due to the presence of lubricating oil is formed in the rolling contact portion, and the dynamic pressure generating surface is Deeper than the recesses! /, Interspersed with lubricating oil reservoir recesses! /.

[0054] The rolling member according to the present invention has, for example, a large number of minute dynamic pressure depressions that generate a dynamic pressure action under the condition that the amount of lubricating oil flowing into the contact portion from the outside with a low speed is small. Even when there is not enough lubricating oil, at the start of relative motion, the lubricant is discharged into the contact surface due to the lubricating oil force and thermal expansion stored in the deep lubricating oil reservoir recess. Lubricating oil is supplied to the oil and an oil film is easily formed by the dynamic pressure action. Therefore, the fluid lubrication state can be maintained even at a speed at which a sufficient oil film is not formed, and the contact portion can be separated by the lubricating oil.

[0055] In addition, in the case of extremely low speed where oil film formation is essentially difficult, good lubricity as good as fluid lubrication cannot be expected! Due to the boundary lubricity due to the oil discharged from the surface, the solid contact can be prevented and the surface damage can be prevented.

[0056] The large number of minute recesses that generate the dynamic pressure action may be hole-shaped or groove-shaped.

[0057] The deep lubricating oil reservoir recesses formed on the dynamic pressure generating surface are preferably arranged in a staggered manner in the rolling force direction.

[0058] It is preferable that the bottom surface of the minute recess that generates the dynamic pressure action is formed so as to be inclined so as to become shallower in the rolling direction.

[0059] When a solid lubricating film is provided on at least the surface of the hill portion of the dynamic pressure generating surface, even if a part of the oil film of the lubricating oil on the surface breaks and the rolling members come into contact with each other, the rolling member Since the surface of the rolling member can be prevented from being damaged by the solid lubricating film on the contact surface, the wear at the initial stage of operation can be reduced even in a broken state without the lubricating oil film.

[0060] As the above-mentioned solid lubricating coating, DLC (Diamond-like carbon "lubricating hard coating" ), Soft metal plating, and MoS coating.

2

[0061] Further, when a phosphate coating treatment or a blackening treatment coating is formed as a lubricant retaining coating on at least the hill surface of the dynamic pressure generating surface, the depth of the lubricating oil from the lubricating oil reservoir recess is increased. Due to the wettability of the supply and lubricating oil, the retention of the lubricating oil by the lubricant-retaining coating, and the dynamic pressure action by the shallow V and many small recesses, a sufficient lubricating oil film can be obtained even at low speeds. It can be formed and direct contact of the contact portion can be prevented. Moreover, surface damage can be prevented by boundary lubrication even at extremely low speeds.

[0062] The phosphate treatment and the black dyeing treatment are treatments that generate micropores on the surface and improve the wettability of the liquid. This treatment improves the retention of the lubricant and causes rolling in the initial stage of operation. It is possible to reduce wear caused by familiarity between members.

[0063] The minute recesses for generating the dynamic pressure action and the members for forming the lubricating oil storage recesses can also be formed of ceramic such as silicon nitride.

Brief Description of Drawings

FIG. 1 is a conceptual diagram showing a first example in which the present invention is applied to a roller of a cylindrical roller bearing.

FIG. 2 is an enlarged plan view showing an arrangement example of a lubricating oil reservoir recess 4 formed in a rolling force S contact portion and a shallow hole-shaped recess 5 for generating a dynamic pressure action in the first example of the present invention.

FIG. 3 is an enlarged plan view showing another example of arrangement of the lubricating oil reservoir recess 4 formed in the rolling contact S contact portion and the shallow hole-shaped recess 5 that generates a dynamic pressure action in the first example of the present invention. is there.

FIG. 4 is a conceptual diagram showing a second example in which the present invention is applied to a roller of a cylindrical roller bearing.

FIG. 5 is an enlarged plan view showing an arrangement example of a lubricating oil reservoir recess 4 formed in a rolling force S contact portion and a shallow groove-shaped recess 5 for generating a dynamic pressure action in a second example of the present invention.

FIG. 6 is an enlarged plan view showing another arrangement example of the lubricating oil reservoir recess 4 formed in the rolling force S contact portion and the shallow groove-shaped recess 5 that generates the dynamic pressure action in the second example of the present invention. is there.

[Fig. 7] Rolling force of the rolling member according to the present invention S An example of the cross-sectional shape of the lubricating oil reservoir recess 4 formed in the contact portion and the shallow recess 5 that generates the dynamic pressure action is shown in FIG. 1 and FIG. It is a longitudinal cross-sectional view cut | disconnected and shown in the direction of a line | wire.

FIG. 8 shows another example of the cross-sectional shape of the lubricating oil reservoir recess 4 formed in the rolling contact portion S of the rolling member according to the present invention and the shallow recess 5 that generates the dynamic pressure action. — Direction of A line FIG.

[FIG. 9] Rolling force of the rolling member according to the present invention S An example of the cross-sectional shape of the lubricating oil reservoir recess 4 formed in the contact portion and the shallow recess 5 that generates the dynamic pressure action is shown in FIG. 1 and FIG. FIG. 4 is a longitudinal sectional view cut along the direction of the line, where (a) shows an example in which a solid lubricating film or lubricant retaining film 7 is formed only on the outermost surface, and (b) shows a solid lubricating film or This is an example in which the lubricant retaining film 7 is formed.

[Fig. 10] Another example of the cross-sectional shape of the lubricating oil reservoir recess 4 formed in the rolling contact S rolling contact portion and the shallow recess 5 that generates the dynamic pressure action of the rolling member according to the present invention. — Longitudinal sectional view cut along the direction of line A, (a) shows an example in which a solid lubricant film or lubricant retaining film 7 is formed only on the outermost surface, and (b) shows a solid material inside the recess. This is an example in which a lubricating coating or a lubricant retaining coating 7 is formed.

FIG. 11 is a process explanatory view showing a first embodiment of the surface forming method of the present invention.

FIG. 12 is an explanatory diagram of a process of forming a shallow recess in the second embodiment of the surface forming method of the present invention.

FIG. 13 is an explanatory diagram of a step of forming deep recesses in the second embodiment of the surface forming method of the present invention.

FIG. 14 is a process explanatory view of a third embodiment of the surface forming method of the present invention.

FIG. 15 is a process explanatory view showing a first etching process in the fourth embodiment of the surface forming method of the present invention.

FIG. 16 is a process explanatory view showing a second etching process in the fourth embodiment of the surface forming method of the present invention.

Explanation of symbols

1 Cylindrical roller bearing

2

3 Rolling surface

4 Deep recess

5 Shallow recess

6 Lubricating oil 7 Coating

A Base material

8, 12, 16, 20, 24 Regis capsule

9, 13, 17, 21, 25 Open P side pattern

10, 14, 18, 22, 26 Canofinolem

11 Microblast mask

15, 19, 23, 27 Regis mask

BEST MODE FOR CARRYING OUT THE INVENTION

An example in which the present invention is applied to the roller 2 of the cylindrical roller bearing 1 is shown.

First, in the example of FIG. 1, as shown in an enlarged view of FIG. 2 or FIG. 3 on the rolling surface 3 of the roller 2, the concave portions 5 having a small number of holes that generate a dynamic pressure action due to the presence of lubricating oil. The dynamic pressure generating surface having the above is formed, and the lubricating oil storing concave portions 4 deeper than the concave portion 5 are scattered on the dynamic pressure generating surface. In FIG. 2 or FIG. 3, the shallow concave portion 5 is represented by a white circle, and the lubricating oil storage concave portion 4 is represented by a black circle.

In the example shown in FIG. 2 or FIG. 3, the shallow recesses 5 are uniformly arranged on the entire rolling surface 3 of the roller 2. Further, in FIG. 2 or FIG. 3, the positional relationship between the force lubricating oil storage recess 4 and the shallow recess 5 is mutually arranged such that a part of the recess 5 is replaced with the lubricating oil storage recess 4. K;

[0068] For example, as shown in FIG. 2, the deep lubricating oil storage recesses 4 are scattered so as to be arranged in parallel at predetermined intervals in the rolling and sliding direction of the roller 2 (the direction of the arrow in FIG. 2). Alternatively, as shown in FIG. 3, the rollers 2 may be scattered in a staggered manner at predetermined intervals in the rolling and sliding direction of the roller 2 (the direction of the arrow in FIG. 3). The lubricating oil 6 discharged from the deep lubricating oil storage recess 4 moves backward in the traveling direction with the rolling motion of the roller, so that the lubricating oil storage recess 4 is moved at predetermined intervals as shown in the example of FIG. When arranged in parallel, the distribution of the lubricating oil on the surface becomes parallel streaks as shown by the dashed line in FIG. In addition, when the lubricating oil storage recesses 4 are arranged in a staggered manner as in the example of FIG. 3, the streaks to the surface of the lubricating oil 6 are formed as shown by the one-dot chain line in FIG. 3 rather than in the example of FIG. Distribution almost doubles.

[0069] In the example of Fig. 2 or Fig. 3, the shapes of the opening surfaces of the lubricating oil reservoir recess 4 and the shallow recess 5 are shown. Can be all circular forces S, ellipses, polygons, etc.

Next, in the example shown in FIG. 4, the rolling surface 3 of the roller 2 is enlarged as shown in FIG. 5 or FIG. 6, and a minute recess that generates a dynamic pressure action due to the presence of lubricating oil. In this example, the groove 5 is formed in a groove shape, and the lubricating oil reservoir recesses 4 deeper than the depth of the recess 5 are scattered on the dynamic pressure generating surface on which the recess 5 having the groove shape is formed. In FIG. 5 or FIG. 6, the lubricating oil reservoir recess 4 is represented by a black circle.

In the example of FIG. 5 or FIG. 6, the shallow groove-shaped recesses 5 are evenly arranged on the entire rolling surface 3 of the roller 2 so as to go straight in the lubricating oil flow direction. In FIG. 5 or FIG. 6, the lubricating oil storage recess 4 is disposed between the groove-shaped recess 5 and the groove-shaped recess. However, the positional relationship between the groove-shaped recess 5 and the lubricant storage recess 4 is as follows. Is optional.

[0072] Next, the cross-sectional shape of the shallow concave portion 5, that is, the bottom surface of the concave portion 5 may be inclined without having to be parallel to the surface. However, when it is inclined deeper in the direction of fluid flow, the dynamic pressure action decreases, so at least the direction of fluid flow (see FIGS. 7 and 8), as shown in FIGS. It is desirable to incline so as to become shallow in the direction of the arrow). In particular, as shown in Fig. 8, if the shape does not have a shoulder on one side of the hole, force S can be used to reduce wear during starting and stopping.

[0073] Next, the lubricating oil storage recess 4 that is deeper than the shallow recess 5 that generates the dynamic pressure action is intended to store the lubricating oil, so that the larger the volume, the better. However, since the dynamic pressure that contributes to supporting the load is not generated in the lubricant at the opening, it is desirable that the area of the opening is small. Therefore, assuming a normal rolling force contact mechanism element represented by a rolling bearing, the lubricating oil reservoir recess 4 has a small diameter and a deep hole. Considering the current level of processing technology that can be mass-produced, the diameter will be 20 to 30 111 and the depth will be about 100 m.

[0074] On the other hand, since the concave portion 5 for generating the dynamic pressure action is intended to generate dynamic pressure in a minute contact area, there are a large number in the contact surface that is relatively small with respect to the area of the contact portion. It is desirable. Therefore, the diameter should be 20-30111 or less. In the case of a normal dynamic pressure bearing that is used in a state where there is sufficient lubricating oil, the depth of the groove that effectively generates the dynamic pressure action is a force that is as deep as the oil film thickness. Not enough oil film thickness The effect of dynamic pressure under operating conditions is expected, and in the case of a general rolling bearing, even if a sufficient oil film is generated, the oil film thickness is at most several, so the depth of this shallow recess 5 is 0.1 to about 111. The bottom of the recess 5 does not necessarily have to be flat, but the shoulder is as far as possible! /, Na! /, Force S! / ,.

[0075] The rolling bearing has a rotational speed of 0 at the start of operation or the dead center of the swing motion, and gradually reaches a predetermined or maximum rotational speed. Immediately after starting the motion from zero speed, no lubricant is supplied from the outside, and since the speed of the contact surface is low, no oil film is formed, and the solids are in contact with each other. If the movement continues in the contact state, heat is generated due to high friction, and the lubricating oil held in the concave portion of the contact surface expands. The lubricating oil retained in the recess 5 is also discharged to the contact surface and is thought to contribute to lubrication.However, in the deep lubricating oil storage recess 4, a relatively large amount of lubricating oil is caused by the difference in thermal expansion between the solid and the lubricating oil. Will be discharged onto the contact surface.

[0076] When the amount of lubricating oil at the contact portion of the rolling force S is extremely small, a dynamic pressure action cannot be generated in the shallow concave portion 5, but in the present invention, the lubrication discharged from the deep lubricating oil storing concave portion 4 The oil fills the shallow recess 5 with oil, and an oil film is formed by the dynamic pressure action at the contact area due to the rolling force S. The contact surface is immediately separated by the oil film.

[0077] Therefore, according to the present invention, solid contact on the contact surface is prevented even under operating conditions at a low speed, and the fluid lubrication state can be maintained.

[0078] In addition, in the case of extremely low speed where oil film formation is essentially difficult, solid contact is mainly caused by boundary lubricity due to oil discharged from the deep lubricating oil reservoir recess 4 to the surface mainly due to thermal expansion due to frictional heat. Is prevented.

[0079] Next, the lubricating oil stored in the deep lubricating oil storage recess 4 is discharged mainly due to thermal expansion caused by heat generation on the contact surface, but the roller member also expands due to heat generation on the contact surface. Since the volume of the lubricating oil storage recess 4 also increases, the amount of lubricating oil discharged depends on the expansion of the volume of the lubricating oil stored in the lubricating oil storage recess 4 and the increase in the volume of the lubricating oil storage recess 4. And the difference.

[0080] Therefore, the coefficient of linear expansion of steel used for ordinary rolling bearings is about 12 X lCT ⁶ ! ^ ¹ , whereas the coefficient of thermal expansion of silicon nitride is about 3 X IO ^ K— ¹ . Yes, as described above, the smaller the thermal expansion coefficient of these materials, the higher the effect of discharging the lubricating oil. Is formed of ceramic, particularly silicon nitride, it is advantageous to discharge lubricating oil.

Next, FIG. 9 (a) and FIG. 10 (a) show solid surfaces only on the outermost surface of the dynamic pressure generating surface having the shallow recess 5, that is, on the surface of the hill portion formed on the dynamic pressure generating surface. A lubricating coating or a lubricant retaining coating 7 is formed. As shown in FIGS. 9 (a) and 10 (a), a solid lubricant film or a lubricant retaining film 7 is formed only on the outermost surface, i.e., the surface of the hill, and the lubricating oil storage recess 4 and the shallow recess are formed. In order not to form the solid lubricant film or the lubricant retaining film 7 in the concave portion between the hill portions of the hills, the hole treatment may be performed after the surface treatment is performed.

In FIG. 9 (b) and FIG. 10 (b), the solid lubricant film or the lubricant retaining film 7 is formed even inside the recess between the hills. As in the examples of FIGS. 9B and 10B, in order to form the film 7 even inside the concave portion, a surface treatment may be performed after the processing of the concave portion. This solid lubricant film or lubricant retaining film 7 is applied in order to reduce wear at the initial stage of operation in a ruptured state where there is no lubricant film, or to diffuse the lubricant oil discharged to the surface. The surface treatment inside the recess is not always necessary.

[0083] Examples of the solid lubricating coating include DLC (diamond-like carbon "lubricating hard coating"), soft metal plating, and MoS coating.

2

[0084] As a method for forming the lubricant retaining film, there are a phosphate treatment and a black dyeing treatment. Phosphate treatment and black dyeing treatment produce fine pores on the surface and improve the wettability of the liquid. By this treatment, the retention of the lubricant is improved, and the rolling members at the initial stage of operation are compatible with each other. It is possible to reduce wear.

The above embodiments have shown examples in which the present invention is applied to the rolling surfaces of the rollers of the cylindrical roller bearing.

1S Can be applied to inner rings, outer rings, roller end faces and flange faces, and can be applied to rolling contact parts of any machine element that rolls and slides. Further, in the embodiment shown in FIGS. 4 to 6, the shallow concave portion 5 having a groove shape is a groove in a direction perpendicular to the rolling direction. The direction of the groove is arbitrarily determined according to the shape of the contact portion and the like. Can be determined.

[0086] (Surface processing method)

The rolling member of the present invention has, on the rolling contact surface, a small shallow concave portion that forms a dynamic pressure generating surface, and a lubricating oil storage concave portion that is deeper than the concave portion that forms this dynamic pressure generating surface. By adopting the following surface processing method, the rolling contact surface of the rolling member is more efficiently formed with a small shallow recess that forms a dynamic pressure generating surface and this shallow! It can be formed with high accuracy.

[0087] In the first method, a shallow concave portion 5 that generates dynamic pressure by laser processing was formed on the surface of the base material A of the rolling member, and then the shallow concave portion 5 was formed by microblasting. This is a method of forming a deep recess 4 to be a lubricating oil storage recess on the surface, and this method will be described with reference to FIG.

[0088] (First embodiment of surface processing method)

First, as shown in Fig. 11 (a), a shallow concave portion with a depth of about 0.1 to 1 111 is formed by laser processing on the surface of the base material の of the rolling member using a laser processing device equipped with a positioning mechanism. Form 5.

Subsequently, as shown in FIG. 11B, a resin resist film 8 is attached to the surface of the base material A of the rolling member in which the shallow recess 5 is formed.

Thereafter, as shown in FIG. 11C, the surface of the resist film 8 is covered with a cover film 10 on which the pattern 9 of the opening surface of the deep recess 4 is printed.

Next, as shown in FIG. 11 (d), ultraviolet rays are irradiated from above the cover film 10 to cure the resist film 8 immediately below the light transmitting portion of the cover film 10 and to light-shield the pattern 9 printed thereon. The resist film 8 immediately below the part is left uncured. In this example, the resist film 8 uses an ultraviolet-curing type force S, and conversely, a resist film of a type that cures the part not irradiated with ultraviolet light may be used. Use negative and positive inversion.

[0092] Thereafter, the cover film 10 is removed, the uncured portion of the resist film 8 is removed, and the opening of the deep recess 4 is formed on the surface of the base material A of the rolling member as shown in FIG. A microblast mask 11 is formed in which the pattern is exposed and the portions other than the opening pattern are masked. Next, as shown in FIG. 11 (f), micro blasting is performed to form deep recesses 4. Microblasting is a method in which fine abrasive grains are sprayed to form deep recesses 4 having a depth of about 10 to 100 m.

Thereafter, as shown in FIG. 11 (g), when the microblast mask 11 is removed, the rolling portion A shallow recess 5 and a deep recess 4 are formed on the surface of the base material A of the material.

[0094] (Second embodiment of surface processing method)

Next, shallow recesses 5 that generate dynamic pressure are formed by etching on the surface of the base material A of the rolling member, and then the lubricating oil reservoir recesses are formed on the surface on which the shallow recesses 5 are formed by microblasting. A second embodiment of the surface processing method of the present invention for forming the deep recess 4 will be described with reference to FIGS.

First, as shown in FIG. 12 (a), a resist is applied to the surface of the base material A of the rolling member and preliminarily dried to form a resist film 12.

Thereafter, as shown in FIG. 12B, the surface of the resist film 12 is covered with a cover film 14 on which the pattern 13 of the opening surface of the shallow recess 5 is printed.

Next, as shown in FIG. 12 (c), ultraviolet rays are irradiated from above the cover film 14 to cure the resist film 12 immediately below the light transmission portion of the cover film 14, thereby blocking the pattern 13 printed. The resist film 12 immediately below the light portion is left uncured. In this example, the force of using an ultraviolet curing type resist film 12 may be used. On the contrary, it is possible to use a resist film that cures the part that is not irradiated with ultraviolet rays. Use the one with the positive reversed.

[0098] Thereafter, the cover film 14 is removed, the uncured portion of the resist film 12 is removed, and FIG.

As shown in (d), a resist mask 15 is formed in which the opening pattern of the shallow concave portion 5 is exposed on the surface of the base material A of the rolling member, and portions other than the opening pattern are masked. Next, as shown in FIG. 12 (e), an etching process is performed to form a shallow recess 5. In the etching process, the shallow recesses 5 having a predetermined depth are formed by controlling the etching time, the etching solution concentration, and in the case of electrolytic etching, the voltage.

Thereafter, as shown in FIG. 12 (f), the resist mask 15 is removed, and the process of forming the shallow recess 5 is completed.

Subsequently, in the step of forming the deep recess 4 shown in FIG. 13, as shown in FIG. 13 (g), a resin is formed on the surface of the base material A of the rolling member in which the shallow recess 5 is formed by etching. A plastic resist film 8 is affixed.

Thereafter, as shown in FIG. 13 (h), the surface of the resist film 8 is patterned on the opening surface of the deep recess 4. The cover film 10 printed with the cover 9 is covered.

Next, as shown in FIG. 13 (i), the cover film 10 is irradiated with ultraviolet rays to cure the resist film 8 immediately below the light transmission portion of the cover film 10 and to light-shield the pattern 9 printed thereon. The resist film 8 immediately below the part is left uncured. In this example, the resist film 8 uses an ultraviolet curing type of force S, and conversely, a resist film of a type that cures the part that is not irradiated with ultraviolet light may be used. Use 10 negatives and positives inverted.

[0103] Thereafter, the cover film 10 is removed, the uncured portion of the resist film 8 is removed, and the opening of the deep recess 4 is formed on the surface of the base material A of the rolling member as shown in FIG. A microblast mask 11 is formed in which the pattern is exposed and the portions other than the opening pattern are masked.

Next, as shown in FIG. 13 (k), micro blasting is performed to form deep recesses 4. Microblasting is a method in which fine abrasive grains are sprayed to form deep recesses 4 having a depth of about 10 to 100 m.

Thereafter, as shown in FIG. 13 (1), when the microblast mask 11 is removed, a shallow recess 5 and a deep recess 4 are formed on the surface of the base material A of the rolling member.

Thereafter, as shown in FIG. 13 (1), the microblast mask 11 is removed, and the microblast processing is ended.

[0107] By the formation process of the shallow recess 5 and the formation process of the deep recess 4, the two different types of recesses, the shallow recess 5 and the deep recess 4, can be regularly formed on the surface of the base material A of the rolling member. .

Three or more types of recesses can also be formed on the surface of the base material A of the rolling S member by appropriately repeating the formation process of the shallow recesses 5 and the formation process of the deep recesses 4.

[0108] In the second method, when the pattern of the opening surface of the shallow concave portion 5 and the pattern of the opening surface of the deep concave portion 4 are the same, the cover film 14 and the cover film 10 are shared by the same fine rem. can do.

[0109] (Third embodiment of surface processing method)

Next, a description will be given of a third embodiment of the surface processing method of the present invention.

A shallow recess 5 that generates dynamic pressure by laser processing is applied to the surface of the base material A of the rolling member. A method of forming the deep concave portion 4 to be the lubricating oil reservoir concave portion on the surface where the shallow concave portion 5 has been formed by etching using a photoresist is described with reference to FIG.

[0110] First, as shown in FIG. 14 (a), a laser processing apparatus having a positioning mechanism is used on the surface of the base material A of the rolling member, and the depth is about 0.1 to 1 111 by laser processing. A shallow recess 5 is formed.

Subsequently, as shown in FIG. 14 (b), a resist is applied to the surface of the base material A of the rolling member in which the shallow concave portion 5 is formed by laser processing, and pre-dried to form a resist film 16 Do

Yes

Thereafter, as shown in FIG. 14 (c), the surface of the resist film 16 is covered with a cover film 18 on which the pattern 17 of the opening surface of the deep recess 4 is printed.

Next, as shown in FIG. 14 (d), ultraviolet rays are irradiated from above the cover film 18 to cure the resist film 16 immediately below the light transmission portion of the cover film 18 and print the pattern 17. The resist film 16 immediately below the portion is left uncured. In this example, the force of using an ultraviolet curing type resist film 16 On the contrary, a resist film of a type in which a portion not irradiated with ultraviolet light is hardened may be used. Use the reverse of positive and negative.

[0114] Thereafter, the cover film 18 is removed, and the uncured portion of the resist film 16 is removed.

As shown in (e), the opening pattern of the deep recesses 4 is exposed on the surface of the base material of the rolling member, and a resist mask 19 is formed in which portions other than the opening pattern are masked.

Next, as shown in FIG. 14 (f), an etching process is performed to form deep recesses 4. The etching process controls the etching time, the etchant concentration, and in the case of electrolytic etching, the voltage is controlled to form a deep recess 4 having a depth of 10 to 100 m.

Thereafter, as shown in FIG. 14 (g), the resist mask 19 is removed, and the etching process is finished.

[0117] By the laser processing and etching processing described above, two different types of recesses, the shallow recess 5 and the deep recess 4, can be regularly formed on the surface of the base material A of the rolling member.

[0118] By further adding the above laser processing and etching processing, the base material of the rolling member Three or more types of recesses can be formed on the surface of A.

[0119] (Fourth embodiment of surface processing method)

A fourth embodiment of the surface processing method of the present invention will be described.

On the surface of the base material A of the rolling member, a shallow concave portion 5 that generates dynamic pressure is formed in the first etching step, and then the surface on which the shallow concave portion 5 is formed is lubricated in the second etching step. A fourth embodiment of the surface processing method of the present invention for forming a deep recess 4 to be an oil storage recess will be described with reference to FIGS.

FIG. 15 shows a first etching step, FIG. 16 shows a second etching step, and both the first etching step and the second etching step are performed by an etching method using a photoresist. Adopted.

First, in the first etching step shown in FIG. 15, as shown in FIG. 15 (a), a resist is applied to the surface of the base material A of the rolling member and preliminarily dried to form a resist film 20 To do.

Thereafter, as shown in FIG. 15B, the surface of the resist film 20 is covered with a cover film 22 on which the pattern 21 of the opening surface of the shallow recess 5 is printed.

Next, as shown in FIG. 15 (c), ultraviolet rays are irradiated from above the cover film 22 to cure the resist film 20 immediately below the light transmitting portion of the cover film 22, and to print the pattern 21 printed thereon. The resist film 20 immediately below the light portion is left in an uncured state. In this example, the force of using an ultraviolet curing type resist film 20 On the contrary, it is possible to use a resist film that cures the part that is not irradiated with ultraviolet rays. Use the one with the positive reversed.

[0124] Thereafter, the cover film 22 is removed, and the uncured portion of the resist film 20 is removed, so that FIG.

As shown in (d), a resist mask 23 is formed in which the opening pattern of the shallow recess 5 is exposed on the surface of the base material A of the rolling member, and the portions other than the opening pattern are masked.

Next, as shown in FIG. 15 (e), an etching process is performed to form a shallow recess 5. In the etching process, the shallow recess 5 having a predetermined depth is formed by controlling the etching time, the etching solution concentration, and in the case of electrolytic etching, the voltage.

Thereafter, as shown in FIG. 15 (f), the resist mask 23 is removed, and the first etching step is completed. Subsequently, in the second etching step shown in FIG. 16, as shown in FIG. 16 (g), on the surface of the base material A of the rolling member in which the shallow concave portion 5 is formed by the first etching step. Then, a resist is applied and pre-dried to form a resist film 24.

Thereafter, as shown in FIG. 16 (h), the surface of the resist film 24 is covered with a cover film 26 on which the pattern 25 of the opening surface of the deep recess 4 is printed.

Next, as shown in FIG. 16 (i), ultraviolet rays are irradiated from above the cover film 26 to cure the resist film 24 immediately below the light transmitting portion of the cover film 26, and to shield the light having the pattern 25 printed thereon. The resist film 24 immediately below the portion is left uncured. In this example, the force of using an ultraviolet curing type resist film 24, on the contrary, it is possible to use a resist film that cures the portion that is not irradiated with ultraviolet rays. Use an inverted version of the position.

[0130] After that, the cover film 26 is removed, and the uncured portion of the resist film 24 is removed.

As shown in (j), a resist mask 27 is formed in which the opening pattern of the deep recesses 4 is exposed and the portions other than the opening pattern are masked on the surface of the base material A of the rolling member.

Next, as shown in FIG. 16 (k), an etching process is performed to form deep recesses 4. In the etching process, the etching time, the concentration of the etchant, and in the case of electrolytic etching, the voltage is controlled to be shallower and different from the case of forming the concave portion 2 to obtain a predetermined depth! /, Concave portion 4. Form.

Thereafter, as shown in FIG. 16 (1), the resist mask 27 is removed, and the second etching step is completed.

[0133] By the first etching step and the second etching step described above, two different types of recesses, the shallow recess 5 and the deep recess 4, can be regularly formed on the surface of the base material A of the rolling member. By further adding the steps (g) to (1) of the etching step 2, three or more types of recesses can be formed on the surface of the base material A of the rolling member.

In the first etching step and the second etching step, when the pattern of the opening surface of the shallow recess 5 and the pattern of the opening surface of the deep recess 4 are the same, the cover film 22 and the cover film 26 are Can be combined with the same film.

Claims

The scope of the claims

[I] The rolling contact portion is provided with a dynamic pressure generating surface having a large number of minute concave portions that generate a dynamic pressure action due to the presence of the lubricating oil, and the dynamic pressure generating surface is more than the concave portion that generates the dynamic pressure action. A rolling member characterized by interspersed with deep lubricating oil storage recesses.

[2] The rolling member according to [1], wherein the recess for generating the dynamic pressure action has a hole shape.

[3] The rolling member according to [1], wherein the recess for generating the dynamic pressure action has a groove shape.

[4] The deep lubricating oil storage recesses formed on the dynamic pressure generating surface are arranged in a staggered manner in the rolling force ^ direction! /, According to any one of claims 1-3! Rolling member.

[5] The rolling member according to any one of [1] to [4], wherein the bottom surface of the recess that generates the dynamic pressure action is inclined so as to become shallower in the rolling direction.

[6] The rolling member according to any one of [1] to [5] above, wherein a solid lubricating film is provided on at least the hill surface of the dynamic pressure generating surface.

7. The rolling member according to claim 6, wherein the solid lubricating film is DLC (diamond-like carbon “lubricating hard film”), soft metal plating, MoS film, or the like.

2

[8] The rolling member according to any one of [1] to [5], wherein a lubricant retaining film is provided on at least the hill surface of the dynamic pressure generating surface.

[9] The rolling member according to [8], wherein the lubricant-retaining coating is a phosphate-treated or black-dyed coating.

[10] The rolling member according to any one of [1] to [9] above, wherein the member that forms the minute recess for generating the dynamic pressure action and the lubricating oil storage recess is formed of a ceramic such as silicon nitride.

[II] Lubricating deeper than the recesses for generating the dynamic pressure action on the surface provided with a large number of minute recesses for generating the dynamic pressure action due to the presence of the lubricating oil and the recesses for generating the multiple dynamic pressure actions. A surface processing method of a rolling contact surface that forms an oil storage recess, wherein a recess that generates a dynamic pressure action on the surface of the rolling contact surface is formed by laser processing or etching, and the recess that generates this dynamic pressure action is formed. Before forming or after forming a recess that generates a dynamic pressure effect, the surface of the rolling contact surface is exposed to a microblast mask in which the opening pattern of the lubricating oil storage recess is exposed and the portions other than the opening pattern are masked. Covering, ma Microblasting is performed to inject fine abrasive grains onto the surface of the rolling contact surface exposed from the mask for microblasting, and a lubricating oil storage recess is formed on the surface of the rolling contact surface that is deeper than the recess that generates dynamic pressure. Surface processing method for rolling contact surface.

12. The microblast processing for forming a lubricating oil storage recess that is deeper than a recess that generates a dynamic pressure action is performed after forming a recess that generates a dynamic pressure action on the surface of the rolling contact surface. Rolling force S Surface processing method of contact surface.

[13] The rolling force S according to claim 11 or 12, characterized in that the step of forming a shallow recess that generates the dynamic pressure action and the step of forming a deep lubricating oil reservoir recess by microblasting are repeated. Surface processing method for contact surfaces.

[14] The surface processing method for a rolling contact surface according to any one of [11] to [13], wherein the shallow concave portion for generating the dynamic pressure action has a hole shape.

[15] The surface processing method for a rolling contact surface according to any one of [11] to [13], wherein the shallow concave portion that generates the dynamic pressure action has a groove shape.

[16] Lubricating deeper than the recesses that generate the dynamic pressure action on the surface provided with a large number of minute recesses that generate a dynamic pressure action due to the presence of lubricating oil and the recesses that generate the multiple dynamic pressure actions. Rolling force for forming an oil storage recess ^ A surface processing method of a contact surface, wherein the recess that generates the dynamic pressure action is performed by laser processing, and the lubricant storage recess deeper than the recess that generates the dynamic pressure action Form a resist mask in which the opening pattern of the lubricating oil reservoir recess is exposed on the surface of the rolling contact surface, and the portions other than the opening pattern are masked, and then the rolling force exposed from the resist mask S The surface processing method of the rolling contact surface is performed by etching to remove the resist mask after etching the surface to the depth of the lubricating oil reservoir recess.

[17] After forming a recess that generates a dynamic pressure effect by laser processing, the opening pattern of the lubricating oil reservoir recess is exposed on the surface of the rolling contact surface where the recess that generates the dynamic pressure action is formed. After forming the resist mask with the masked portion masked, and then etching the surface of the rolling contact surface exposed from the resist mask to the depth of the lubricating oil storage recess, the resist mask is removed and the rolling force is removed. 17. The rolling contact surface according to claim 16, wherein an etching process is performed to form a lubricating oil storage recess on the surface of the S contact surface. Surface processing method.

[18] A resist mask in which the opening pattern of the lubricating oil reservoir recess is exposed on the surface of the rolling contact surface and the portions other than the opening pattern are masked is formed, and then the surface of the rolling contact surface exposed from the resist mask is formed. Then, after etching to the depth of the lubricating oil reservoir recess, the resist mask is removed, and the etching force is applied to form the lubricating oil reservoir recess on the surface of the rolling contact surface, and then on the surface of the rolling contact surface. 17. The surface processing method for a rolling force contact surface according to claim 16, wherein the concave portion for generating the dynamic pressure action is formed by laser processing.

[19] Method of forming resist mask in the above etching process A photoresist layer is formed by applying a photoresist on the surface of the rolling contact surface, and an opening pattern of the lubricating oil reservoir recess is formed on the surface of the photoresist layer. Cover the printed cover film for exposure, and then remove the uncured portion of the photoresist layer to expose the portion of the opening pattern of the lubricant reservoir recess, leaving the portion other than the opening pattern masked. 19. The surface processing method for a rolling contact surface according to any one of claims 16 to 18 which is a method.

[20] The method for forming a resist mask in the etching process. The surface processing method for a rolling contact surface according to any one of claims 16 to 18, which is a screen printing method using a resist ink.

21. The surface processing method for a rolling contact surface according to any one of claims 16 to 20, wherein the recess for generating the dynamic pressure action has a hole shape.

[22] The surface processing method for a contact surface with rolling force according to any one of claims 16 to 20, wherein the recess for generating the dynamic pressure action has a groove shape.

[23] Rolling force that forms a large number of minute recesses that generate a dynamic pressure action due to the presence of lubricating oil, and a lubricant storage recess deeper than the recess that generates the dynamic pressure action on the surface provided with the recesses. A surface processing method for a contact surface, in which a resist mask in which an opening pattern of a recess or a lubricating oil storage pocket that generates a dynamic pressure action is exposed and a portion other than the opening pattern is masked is formed on the surface of the rolling contact surface. Then, after etching the surface of the rolling contact surface exposed from the resist mask to the depth of the concave portion or the lubricating oil storage concave portion that generates a dynamic pressure action, the resist mask is removed to remove the rolling contact surface. A first etching step for forming a recess or a lubricant storage pocket for generating a dynamic pressure action on the surface; and a first ethyne Recesses that generate dynamic pressure or lubrication oil storage recesses are formed by the rolling process The opening pattern of the recesses or lubricant storage recesses that generate dynamic pressure is exposed on the surface of the rolling contact surface, and other than the opening pattern After forming the resist mask with the masked portion masked, and then etching the surface of the rolling contact surface exposed from the resist mask to the depth of the recess or lubricant storage pocket that generates dynamic pressure action, the resist mask is removed. A surface processing method for a rolling force contact surface comprising a second etching step of removing and forming a recess for generating a dynamic pressure or a lubricating oil storage recess on the surface of the rolling contact surface.

[24] Method for forming resist mask in the first etching step and the second etching step The photoresist is applied to the surface of the rolling contact surface to form a photoresist layer, and the surface of the photoresist layer is formed. Then, a cover film on which an opening pattern of a recess for generating a dynamic pressure action or an opening pattern of a lubricating oil storage recess is printed and exposed, and then an uncured portion of the photoresist layer is removed to generate a dynamic pressure action. 24. The surface processing method for a rolling contact surface according to claim 23, which is a photo resist method in which an opening pattern portion of the oil reservoir recess is exposed and a portion other than the opening pattern is left in a masked state.

[25] The method for forming a resist mask in the first etching step and the second etching step. The surface processing method for a rolling contact surface according to claim 23, which is a screen printing method using a resist ink.

[26] The recesses according to claims 23 to 25, wherein a recess for generating a dynamic pressure action is formed in the first etching step and a lubricating oil storage recess is formed in the second etching step. Rolling force described in Crab Surface processing method for S contact surface.

27. The surface processing method for a rolling contact surface according to any one of claims 23 to 26, wherein the second etching step is repeated after the second etching step.

[28] The surface processing method for a contact surface with rolling force according to any one of [23] to [27], wherein the recess for generating the dynamic pressure action has a hole shape.

[29] The surface processing method for a contact surface with rolling force according to any one of [23] to [27], wherein the recess for generating the dynamic pressure action has a groove shape.