WO2008053561A1 - Electric field sensing element and display device making use of the same - Google Patents

Electric field sensing element and display device making use of the same Download PDF

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Publication number
WO2008053561A1
WO2008053561A1 PCT/JP2006/322011 JP2006322011W WO2008053561A1 WO 2008053561 A1 WO2008053561 A1 WO 2008053561A1 JP 2006322011 W JP2006322011 W JP 2006322011W WO 2008053561 A1 WO2008053561 A1 WO 2008053561A1
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WO
WIPO (PCT)
Prior art keywords
electric field
electrode layer
layer
optical functional
sensitive element
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PCT/JP2006/322011
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French (fr)
Japanese (ja)
Inventor
Akira Nakazawa
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Shinoda Plasma Co., Ltd.
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Publication date
Application filed by Shinoda Plasma Co., Ltd. filed Critical Shinoda Plasma Co., Ltd.
Priority to KR1020097008823A priority Critical patent/KR101354889B1/en
Priority to JP2008541973A priority patent/JP5297809B2/en
Priority to CN2006800562924A priority patent/CN101535885B/en
Priority to EP06822929.3A priority patent/EP2078980B1/en
Priority to PCT/JP2006/322011 priority patent/WO2008053561A1/en
Priority to US12/312,252 priority patent/US8004737B2/en
Publication of WO2008053561A1 publication Critical patent/WO2008053561A1/en
Priority to US13/213,670 priority patent/US8587855B2/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153Constructional details
    • G02F1/155Electrodes
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/10Materials and properties semiconductor

Definitions

  • the present invention relates to an element capable of controlling the value of visible light transmittance by applying an electric field, and a display device to which the element is applied.
  • Liquid crystals and electochromic substances are known as materials whose optical transmittance changes in response to an applied electric field. Liquid crystals are already widely used in displays. Electrochromic materials are materials that exhibit chromism (reversible color change) due to electrochemical redox reactions, and have various applications such as paper-like displays. It is a possible substance. A material that is sensitive to this type of electric field has the advantage that it is easier to control in terms of the configuration of the control means than a substance that is sensitive to light or heat.
  • Patent Document 1 JP 2000-502398
  • the electochromic material does not require a polarizing plate or a knocklight, and thus is superior in terms of transparency in a translucent state and power consumption.
  • electoric chromism involves the movement of ions in the electrolyte, it is considered difficult to improve the response speed of the response in the electoric chromic material to the same or higher than that of liquid crystals. Changes in white and black in typical liquid crystals The response speed is 10-20ms.
  • the present invention provides a novel electric field sensitive element including a metal oxide that has a fast transition between states having different values of visible light transmittance.
  • the electric field sensitive element of the present invention is composed of tin dioxide, titanium dioxide, and a metal oxide having a selected group force including an acid and zinc force, and an insulator covering the metal oxide.
  • An optical functional layer whose visible light transmittance value changes by the application of, and first and second electrode layers sandwiching the optical functional layer.
  • a display device provided by the present invention covers a support having a light surface color, a first translucent electrode layer fixed to the support, and the first translucent electrode layer.
  • the optical functional layer is composed of a metal oxide selected from a group oxide such as tin dioxide, titanium dioxide, and acid zinc zinc, and an insulator covering the metal oxide. The value of visible light transmittance changes with the application of an electric field.
  • the manufacturing method provided by the present invention includes a step of coating the first electrode layer fixed to a support with a translucent layer comprising the metal oxide and an insulator covering the first oxide layer, Irradiating the translucent layer with ultraviolet rays, thereby transforming the translucent layer into the optical functional layer, and fixing the second electrode layer to the optical functional layer. .
  • FIG. 1 is a cross-sectional view showing a configuration of an electric field sensitive element according to an example of the present invention.
  • FIG. 2 is a perspective view showing a configuration of a display device according to an example of the present invention.
  • FIG. 3 is a photograph of an oscilloscope waveform showing the response of the electric field sensitive element according to the first example of the present invention.
  • FIG. 4 is a photograph of an oscilloscope waveform showing the responsiveness of an electric field sensitive element according to a second example of the present invention.
  • FIG. 5 is an explanatory diagram of the operation principle of the electric field sensitive element according to the embodiment of the present invention.
  • the present inventor has applied an electric field when a semiconductor oxide having a band gap of 3.2 eV or more and translucent metal oxide is provided with an effective excitation energy in a state of being covered with an insulating coating. It has been found that the material can change the value of visible light transmittance. Tin dioxide ( SnO), titanium dioxide (TiO) and zinc oxide (ZnO) fall under the above metal oxides.
  • the Insulation coating materials include thermoplastic resin such as polyethylene, polypropylene, polystyrene, polybutadiene, polychlorinated butyl, polymethyl methacrylate, polyamide, polycarbonate, polyimide, cellulose acetate, phenol resin, amino resin, unsaturated resin
  • thermosetting resins such as polyester resin, aryl resin, alkyd resin, epoxy resin, polyurethane, silicone resin.
  • silicone polysiloxane
  • paraffin mineral oil
  • magnesium oxide MgO
  • SiO 2 silicon dioxide
  • Al 2 O 3 alumina
  • the electric field sensitive element 1 By sandwiching the substance between electrode layers made of different materials as shown in Fig. 1, the electric field sensitive element 1 in which the value of visible light transmittance is reversibly changed is realized.
  • the electric field sensitive element 1 includes an optical functional layer 5 whose visible light transmittance value changes by application of an electric field, a first electrode layer 7, and a second electrode layer 9.
  • the first electrode layer 7 is a single layer
  • the second electrode layer 9 is composed of a lower layer 9A, which is different from the material of the first electrode layer 7, and a material of the first electrode layer. It consists of the upper layer 9B which is the same as the material of 7.
  • the lower layer 9A can be formed sufficiently thick and the upper layer 9B can be omitted.
  • the lower layer 9 A has a role of preventing unnecessary electron injection into the upper layer 9 B force optical function layer 5.
  • a reversible state change can be caused.
  • the display device 10 includes a substrate 11 having a light surface color, strip-shaped first electrodes 17 arranged in parallel to be fixed to the substrate 11, an optical function layer 15, and an array in parallel to be fixed to the optical function layer 15.
  • a strip-shaped second electrode 19 is provided.
  • the first electrode 17 and the second electrode 19 intersect to form an electrode matrix.
  • the electric field sensitive element 1 corresponds to each intersection of the electrode matrix. That is, the first electrode layer 17, the optical functional layer 15, and the second electrode 19 have partial forces corresponding to the first electrode layer 7, the optical functional layer 5, and the second electrode layer 9.
  • the position of one electric field sensing element 1 is indicated by a dashed-dotted line.
  • the display device 10 can perform matrix display by controlling the amount of external light reflected by the substrate 11 for each element.
  • the first and second electric field sensitive elements 1 As the electrode layers 7 and 9, it is necessary to provide a translucent conductive layer made of, for example, indium tin oxide (hereinafter referred to as ITO).
  • ITO indium tin oxide
  • the first electrode layer 7 is ITO
  • a transparent semiconductor is preferable as the material for the lower layer of the second electrode layer 9.
  • the display device 10 and the electric field sensitive manufacturing method included in the display device 10 include the following steps 1 to 4.
  • step 1 the first electrode 17 is arranged on the substrate 11 serving both as a support and a reflecting member.
  • the first electrode 11 fixed to the substrate 11 is covered with a light-transmitting layer made of a metal oxide and an insulator covering the first electrode.
  • Metal oxide is a compound selected from the group power of tin dioxide, titanium dioxide, and zinc oxide power.
  • step 3 the light-transmitting layer is irradiated with ultraviolet rays, whereby the light-transmitting layer is transformed into an optical functional layer 15 exhibiting chromism.
  • energy levels are considered to be formed in metal oxides by ultraviolet excitation as described later.
  • step 4 the second electrode 19 is arranged on the optical functional layer 15.
  • the optical functional layer 5 is composed of tin oxide (SnO), which is a metal oxide, and an insulator.
  • the thickness of the optical functional layer 5 is 1 ⁇ m.
  • the first electrode layer 7 is ITO having a thickness of 0.4 m.
  • the lower layer 9A of the second electrode layer 9 is 0.1 ⁇ m thick nickel oxide (NiO), and the upper layer 9B is 0.4 ⁇ m thick ITO.
  • the optical functional layer 5 was formed by the following procedure.
  • a mixed solution of 0.75 g of tin cabronate, 1.28 g of xylene and 0. lg of silicone oil (TSF433 manufactured by Toshiba Silicone) was prepared.
  • the above-mentioned mixed solution was applied by spin-on (1200 rpm, lOsec) to the white glass plate to which the first electrode layer 7 had been fixed, dried by exposure to lOmin in a 50 ° C. atmosphere, and then fired.
  • the firing temperature is 320 ° C and the firing time is lOmin.
  • the fired layer was irradiated with ultraviolet rays using a low-pressure mercury lamp. Irradiation conditions are 200mWZcm 2 and 60min.
  • the lower layer 9A and the upper layer 9B were laminated by sputtering to complete the production of the electric field sensitive element 1.
  • a voltage pulse signal was applied to the electric field sensitive element 1.
  • the first electrode layer 7 was connected to the potential output terminal of the pulse generator, and the second electrode layer 9 (strictly, the upper layer 9B) was connected to the ground terminal. As shown in the upper half of Fig.
  • a positive pulse with an amplitude of +10 V and a pulse width of 20 ms and a negative pulse with an amplitude of 20 V and a pulse width of 20 ms were repeatedly applied with an interval of about 500 ms.
  • the transmittance of the electric field sensitive element 1 with respect to visible light was measured using a measuring device using a light emitting diode (LED) as a light source.
  • LED light emitting diode
  • FIG. 3A shows that Example 1 of the electric field sensitive element 1 exhibits chromism.
  • FIG. 3 (B) is a waveform diagram in which the scale of the time axis of FIG. 3 (A) is enlarged, and shows the response to the positive pulse!
  • the decoloring response time was 5 ms.
  • FIG. 3 (C) is also a waveform diagram obtained by enlarging the time axis scale of FIG. 3 (A), showing the response to negative polarity pulses!
  • the coloring response time was 8 ms.
  • Example 2 the optical functional layer 5 was insulated from titanium dioxide (TiO), which is a metal oxide.
  • the thickness of the optical functional layer 5 is 1 ⁇ m.
  • the materials, thicknesses, and formation methods of the first electrode layer 7 and the second electrode layer 9 are the same as in Example 1 above.
  • the optical functional layer 5 was formed by the following procedure. A mixed solution of 0.72 g of titanium caproate, 1.14 g of xylene, 0.14 g of butyl sequestration solvent and 0.25 g of silicone oil (TSF433 manufactured by Toshiba Silicone) was prepared. The above-mentioned mixed solution was applied to the white plate glass to which the first electrode layer 7 was fixed by spinons (600 rpm, lOsec), dried by exposure to lOmin in a 50 ° C. atmosphere, and then fired. The firing temperature is 320 ° C and the firing time is lOmin. Next fired layer Were irradiated with ultraviolet rays using a low-pressure mercury lamp. The irradiation conditions are 200 m W / cm 2 and 60 min as in Example 1.
  • the optical function of the electric field sensitive element 1 was confirmed by the same method as in Example 1. That is, as shown in the upper half of Fig. 4 (A), a positive pulse with an amplitude of +10 V and a pulse width of 20 ms and a negative pulse with an amplitude of 20 V and a pulse width of 20 ms are provided with an interval of about 500 ms. Applied repeatedly. In parallel with this, the transmittance of the electric field sensitive element 1 with respect to visible light was measured using a measuring device using an LED as a light source.
  • FIG. 4A shows that Example 2 of the electric field sensitive element 1 exhibits chromism.
  • FIG. 4 (B) is a waveform diagram obtained by enlarging the time axis scale of FIG. 4 (A), and shows the responsiveness to the positive pulse!
  • the decoloring response time was 17 ms.
  • FIG. 4 (C) is also a waveform diagram obtained by enlarging the time axis scale of FIG. 4 (A), and shows the response to negative polarity pulses.
  • the color response time was 18 ms.
  • a mixed liquid of 2 g of tin caproate, 3 g of xylene and 0.5 g of silicone oil (TSF433 manufactured by Toshiba Silicone Co., Ltd.) was prepared, and the mixed liquid was applied, dried, fired, and irradiated with ultraviolet rays in the same manner as in Example 1. To form an optical functional layer 5.
  • the second electrode layer 9 was grounded, and a negative polarity pulse having an amplitude of 20 V and a pulse width of 10 ms was applied to the first electrode layer 7.
  • the transmittance value of the electric field sensitive element 1 changed from 85% to 56%. Thereafter, the transmittance value was maintained at 56% during the period when the applied voltage was zero.
  • Example 3 A mixed solution similar to that in Example 3 was prepared, and dried more rapidly than Example 3 after coating.
  • Example 3 By rapidly drying the applied mixed liquid, voids due to solvent evaporation remain, and the layer after baking becomes a particle aggregate.
  • the porous optical functional layer 5 improves contrast.
  • the transmittance value of electric field sensitive element 1 changed from 85% to 24%.
  • Fig. 5 (A) when one of the electrodes, ITO, which is a metal oxide on ITO, is irradiated with ultraviolet light, electrons in the valence band of tin dioxide are conducted. Excited by the band. In the vicinity of the interface with ITO, this electron passes through the insulator with a certain probability and is temporarily trapped in ITO, and the interatomic distance at the site where the electron in the valence band has escaped changes. The trapped electrons return to the valence band of tin dioxide again. The level at this time moves into the band gap as shown in Fig. 5 (B). Such an event occurs repeatedly, and many levels are formed in the band gap as shown in Fig.
  • the role of the insulator is to create a barrier between ITO and tin dioxide and allow the excited electrons to pass. Tin dioxide undergoes a structural change when it is exposed to ultraviolet radiation with an insulator between ITO and tin dioxide.
  • the transmittance value in a state where decoloring has occurred is large, it is possible to realize a reflective display device with high contrast and a bright background. Since the main component of the electric field sensitive element 1 is a solid, damage due to mechanical impact is less likely to occur compared to a configuration in which all liquids or liquids are contained. Since the structure is simple, it is advantageous for low cost.
  • the insulating material is limited to a heat-resistant material that can be fired.
  • a resin such as acrylic, polycarbonate, and epoxy can be used.
  • the optical functional layer 5 whose structure is partially changed by ultraviolet irradiation of an arbitrary pattern can be formed, and an arbitrary shape can be displayed by a combination of the irradiation pattern and the electrode layer pattern.
  • a substrate in which a reflective film is fixed to a rigid or flexible base material by lamination or painting can be used as a support for the electric field sensitive element 1.
  • the present invention is useful in a power-saving display that consumes power only when the display content is substantially updated. It can be used for various optical function devices including other displays and optical shirts.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

Electric field sensing element (1) comprising a metal oxide selected from the group consisting of tin dioxide, titanium dioxide and zinc oxide and an insulator covering the metal oxide, and further comprising optical functional layer (5) whose visible light transmittance value is changed by application of electric field and first and second electrode layers (7,9) having the optical functional layer (5) interposed therebetween.

Description

明 細 書  Specification
電界感応素子およびそれを用いた表示デバイス  Electric field sensitive element and display device using the same
技術分野  Technical field
[0001] 本発明は、電界の印加によって可視光透過率の値を制御することが可能な素子お よびそれを応用した表示デバイスに関する。  The present invention relates to an element capable of controlling the value of visible light transmittance by applying an electric field, and a display device to which the element is applied.
背景技術  Background art
[0002] 印加される電界に感応して光学透過率の値が変化する材料として、液晶およびェ レクト口クロミック物質が知られている。液晶は既にディスプレイにおいて広く用いられ ている。エレクト口クロミック物質は、電気化学的な酸化還元反応によるクロミズム(可 逆的な色変化)を呈する物質であって、ペーパーライクディスプレイ ( 、わゆる電子べ 一パー)をはじめとする種々の応用が考えられる物質である。この種の電界に感応す る材料は、光や熱に感応する物質と比べて制御手段の構成の観点で制御が容易で あるという利点をもつ。  [0002] Liquid crystals and electochromic substances are known as materials whose optical transmittance changes in response to an applied electric field. Liquid crystals are already widely used in displays. Electrochromic materials are materials that exhibit chromism (reversible color change) due to electrochemical redox reactions, and have various applications such as paper-like displays. It is a possible substance. A material that is sensitive to this type of electric field has the advantage that it is easier to control in terms of the configuration of the control means than a substance that is sensitive to light or heat.
[0003] エレクト口クロミック物質の多くは化学的に合成される高分子化合物である力 特表 2000— 502398号公報において、アンチモンまたはニオブのドープされた酸化スズ がエレクト口クロミズムを呈するとの開示がある。同公報では、 50mHzの電気信号に 追従する周期的な色変化が生じたとの報告がなされている (この場合の応答速度は 2 0秒である)。また、二酸化チタン、シリカ、アルミナなどの明色顔料とドープされた酸 ィ匕スズとを混合することが、コントラストの向上に有効であるとの記載が上記公報にあ る。  [0003] Many of the electochromic materials are high molecular compounds synthesized chemically. Special Table 2000-502398 discloses that tin oxide doped with antimony or niobium exhibits electochromochromism. is there. The publication reports that a periodic color change that follows an electrical signal of 50 mHz has occurred (the response speed in this case is 20 seconds). Further, the above-mentioned publication describes that mixing a light color pigment such as titanium dioxide, silica, and alumina and doped tin oxide is effective in improving contrast.
特許文献 1:特表 2000 - 502398号公報  Patent Document 1: JP 2000-502398
発明の開示  Disclosure of the invention
[0004] ディスプレイへの応用の観点で液晶と比べると、エレクト口クロミック物質は偏光板や ノ ックライトが不要であるので、透光状態での透明性および消費電力の観点で優れ ている。し力し、エレクト口クロミズムは電解液中のイオンの移動を伴うので、エレクト口 クロミック物質における感応の応答速度を液晶の応答速度と同程度またはそれ以上 にまで向上させるのは難しいと考えられる。典型的な液晶における白と黒との変化の 応答速度は 10〜 20msである。 [0004] Compared to liquid crystal in terms of application to a display, the electochromic material does not require a polarizing plate or a knocklight, and thus is superior in terms of transparency in a translucent state and power consumption. However, since electoric chromism involves the movement of ions in the electrolyte, it is considered difficult to improve the response speed of the response in the electoric chromic material to the same or higher than that of liquid crystals. Changes in white and black in typical liquid crystals The response speed is 10-20ms.
[0005] 本発明は、可視光透過率の値が異なる状態間の遷移が速い、金属酸化物を含む 新規な電界感応素子を提供する。本発明の電界感応素子は、二酸化スズ、二酸ィ匕 チタン、および酸ィ匕亜鉛力もなるグループ力も選ばれた金属酸ィ匕物と、前記金属酸 化物を覆う絶縁体とから構成され、電界の印加によって可視光透過率の値が変化す る光学機能層と、前記光学機能層を挟む第 1および第 2の電極層とを備える。  [0005] The present invention provides a novel electric field sensitive element including a metal oxide that has a fast transition between states having different values of visible light transmittance. The electric field sensitive element of the present invention is composed of tin dioxide, titanium dioxide, and a metal oxide having a selected group force including an acid and zinc force, and an insulator covering the metal oxide. An optical functional layer whose visible light transmittance value changes by the application of, and first and second electrode layers sandwiching the optical functional layer.
[0006] 本発明の提供する表示デバイスは、表面色が明色である支持体と、前記支持体に 固着する第 1の透光性電極層と、前記第 1の透光性電極層を覆う光学機能層と、前記 光学機能層に積層された第 2の透光性電極層とを備える。前記光学機能層は、二酸 ィ匕スズ、二酸化チタン、および酸ィ匕亜鉛カゝらなるグループカゝら選ばれた金属酸ィ匕物 と、前記金属酸化物を覆う絶縁体とから構成され、電界の印加によって可視光透過 率の値が変化する。  [0006] A display device provided by the present invention covers a support having a light surface color, a first translucent electrode layer fixed to the support, and the first translucent electrode layer. An optical functional layer; and a second translucent electrode layer laminated on the optical functional layer. The optical functional layer is composed of a metal oxide selected from a group oxide such as tin dioxide, titanium dioxide, and acid zinc zinc, and an insulator covering the metal oxide. The value of visible light transmittance changes with the application of an electric field.
[0007] 本発明の提供する製造方法は、支持体に固着した前記第 1の電極層を、前記金属 酸ィ匕物とそれを覆う絶縁体とからなる透光性の層で被覆する工程、前記透光性の層 に紫外線を照射し、それによつて前記透光性の層を前記光学機能層に変質させるェ 程、および前記光学機能層に前記第 2の電極層を固着させる工程を備える。  [0007] The manufacturing method provided by the present invention includes a step of coating the first electrode layer fixed to a support with a translucent layer comprising the metal oxide and an insulator covering the first oxide layer, Irradiating the translucent layer with ultraviolet rays, thereby transforming the translucent layer into the optical functional layer, and fixing the second electrode layer to the optical functional layer. .
図面の簡単な説明  Brief Description of Drawings
[0008] [図 1]本発明の実施例に係る電界感応素子の構成を示す断面図である。 FIG. 1 is a cross-sectional view showing a configuration of an electric field sensitive element according to an example of the present invention.
[図 2]本発明の実施例に係る表示デバイスの構成を示す斜視図である。  FIG. 2 is a perspective view showing a configuration of a display device according to an example of the present invention.
[図 3]本発明の第 1実施例に係る電界感応素子の応答性を示すオシロスコープ波形 の写真である。  FIG. 3 is a photograph of an oscilloscope waveform showing the response of the electric field sensitive element according to the first example of the present invention.
[図 4]本発明の第 2実施例に係る電界感応素子の応答性を示すオシロスコープ波形 の写真である。  FIG. 4 is a photograph of an oscilloscope waveform showing the responsiveness of an electric field sensitive element according to a second example of the present invention.
[図 5]本発明の実施例に係る電界感応素子の動作原理の説明図である。  FIG. 5 is an explanatory diagram of the operation principle of the electric field sensitive element according to the embodiment of the present invention.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0009] 本発明者は、 3. 2eV以上のバンドギャップをもつ半導体であって透光性をもつ金 属酸化物が、絶縁被覆された状態で有効な励起エネルギーを与えられると、電界の 印加によって可視光透過率の値の変化する物質になることを見出した。二酸化スズ( SnO )、二酸化チタン (TiO )および酸ィ匕亜鉛 (ZnO)は上記金属酸ィ匕物に該当す[0009] The present inventor has applied an electric field when a semiconductor oxide having a band gap of 3.2 eV or more and translucent metal oxide is provided with an effective excitation energy in a state of being covered with an insulating coating. It has been found that the material can change the value of visible light transmittance. Tin dioxide ( SnO), titanium dioxide (TiO) and zinc oxide (ZnO) fall under the above metal oxides.
2 2 twenty two
る。絶縁被覆材料としては、ポリエチレン、ポリプロピレン、ポリスチレン、ポリブタジェ ン、ポリ塩化ビュル、ポリメチルメタタリレート、ポリアミド、ポリカーボネート、ポリイミド、 酢酸セルロースなどの熱可塑性榭脂、フエノール榭脂、アミノ榭脂、不飽和ポリエステ ル榭脂、ァリル榭脂、アルキド榭脂、エポキシ榭脂、ポリウレタン、シリコン榭脂などの 熱硬化性榭脂がある。その他に、シリコーン (ポリシロキサン)、パラフィン、鉱油、酸 化マグネシウム(MgO)、二酸ィ匕ケィ素(SiO )、アルミナ (Al O )などがある。  The Insulation coating materials include thermoplastic resin such as polyethylene, polypropylene, polystyrene, polybutadiene, polychlorinated butyl, polymethyl methacrylate, polyamide, polycarbonate, polyimide, cellulose acetate, phenol resin, amino resin, unsaturated resin There are thermosetting resins such as polyester resin, aryl resin, alkyd resin, epoxy resin, polyurethane, silicone resin. Other examples include silicone (polysiloxane), paraffin, mineral oil, magnesium oxide (MgO), silicon dioxide (SiO 2), and alumina (Al 2 O 3).
2 2 3  2 2 3
[0010] 上記物質を図 1のように材質の異なる電極層で挟むことによって、可逆的に可視光 透過率の値の変化する電界感応素子 1が実現される。図 1において、電界感応素子 1は、電界の印加によって可視光透過率の値が変化する光学機能層 5と、第 1の電極 層 7と、第 2の電極層 9とを備える。例示では、第 1の電極層 7は単層であるのに対し て、第 2の電極層 9は、材質が第 1の電極層 7の材質と異なる下層 9Aと、材質が第 1 の電極層 7の材質と同一である上層 9Bとからなる。ただし、下層 9Aを十分に厚く形 成して上層 9Bを省略することもできる。  [0010] By sandwiching the substance between electrode layers made of different materials as shown in Fig. 1, the electric field sensitive element 1 in which the value of visible light transmittance is reversibly changed is realized. In FIG. 1, the electric field sensitive element 1 includes an optical functional layer 5 whose visible light transmittance value changes by application of an electric field, a first electrode layer 7, and a second electrode layer 9. In the example, the first electrode layer 7 is a single layer, while the second electrode layer 9 is composed of a lower layer 9A, which is different from the material of the first electrode layer 7, and a material of the first electrode layer. It consists of the upper layer 9B which is the same as the material of 7. However, the lower layer 9A can be formed sufficiently thick and the upper layer 9B can be omitted.
[0011] 図 1の層構造において、下層 9Aは上層 9B力 光学機能層 5への不必要な電子注 入を防ぐ役割をもつ。光学機能層 5と接する 2つの導体の材質を異ならせることによつ て可逆的な状態変化を生じさせることができる。  In the layer structure of FIG. 1, the lower layer 9 A has a role of preventing unnecessary electron injection into the upper layer 9 B force optical function layer 5. By changing the material of the two conductors in contact with the optical functional layer 5, a reversible state change can be caused.
[0012] 電界感応素子 1の応用例として図 2に示す反射型の表示デバイス 10がある。表示 デバイス 10は、表面色が明色である基板 11、基板 11に固着する平行に配列された 帯状の第 1電極 17、光学機能層 15、および光学機能層 15に固着する平行に配列さ れた帯状の第 2電極 19を備える。第 1電極 17と第 2電極 19とが交差し、電極マトリク スを構成する。そして、電極マトリクスの交点のそれぞれに電界感応素子 1が対応す る。すなわち、第 1電極 17、光学機能層 15、および第 2電極 19のそれぞれの一部分 力 第 1の電極層 7、光学機能層 5および第 2の電極層 9に対応する。図では 1個の電 界感応素子 1の位置を一点鎖線の四角形で示してある。  As an application example of the electric field sensitive element 1, there is a reflective display device 10 shown in FIG. The display device 10 includes a substrate 11 having a light surface color, strip-shaped first electrodes 17 arranged in parallel to be fixed to the substrate 11, an optical function layer 15, and an array in parallel to be fixed to the optical function layer 15. A strip-shaped second electrode 19 is provided. The first electrode 17 and the second electrode 19 intersect to form an electrode matrix. The electric field sensitive element 1 corresponds to each intersection of the electrode matrix. That is, the first electrode layer 17, the optical functional layer 15, and the second electrode 19 have partial forces corresponding to the first electrode layer 7, the optical functional layer 5, and the second electrode layer 9. In the figure, the position of one electric field sensing element 1 is indicated by a dashed-dotted line.
[0013] 表示デバイス 10では、基板 11で反射する外光の光量を素子ごとに制御することに よってマトリクス表示を行うことができる。この応用例のように電界感応素子 1を積層方 向に制御対象の光が貫通する構成においては、電界感応素子 1の第 1および第 2の 電極層 7, 9として、例えば酸化インジウム ·スズ(以下、 ITOという)からなる透光性の 導電層を設ける必要がある。第 1の電極層 7が ITOである場合、第 2の電極層 9の下 層の材質として透明な半導体が好ましい。 The display device 10 can perform matrix display by controlling the amount of external light reflected by the substrate 11 for each element. In the configuration in which the light to be controlled penetrates the electric field sensitive element 1 in the stacking direction as in this application example, the first and second electric field sensitive elements 1 As the electrode layers 7 and 9, it is necessary to provide a translucent conductive layer made of, for example, indium tin oxide (hereinafter referred to as ITO). When the first electrode layer 7 is ITO, a transparent semiconductor is preferable as the material for the lower layer of the second electrode layer 9.
[0014] 表示デバイス 10およびそれに含まれる電界感応の製造方法は次の工程 1〜工程 4 を含む。 The display device 10 and the electric field sensitive manufacturing method included in the display device 10 include the following steps 1 to 4.
[0015] 工程 1では、支持体と反射部材とを兼ねる基板 11の上に第 1電極 17を配列する。  [0015] In step 1, the first electrode 17 is arranged on the substrate 11 serving both as a support and a reflecting member.
[0016] 工程 2では、基板 11に固着した第 1電極 11を、金属酸化物とそれを覆う絶縁体とか らなる透光性の層で被覆する。金属酸ィ匕物は、二酸化スズ、二酸化チタン、および酸 化亜鉛力 なるグループ力 選ばれる化合物である。 [0016] In step 2, the first electrode 11 fixed to the substrate 11 is covered with a light-transmitting layer made of a metal oxide and an insulator covering the first electrode. Metal oxide is a compound selected from the group power of tin dioxide, titanium dioxide, and zinc oxide power.
[0017] 工程 3では、透光性の層に紫外線を照射し、それによつて透光性の層をクロミズム を呈する光学機能層 15に変質させる。変質については、後述のように紫外線励起に よって金属酸ィ匕物にエネルギー準位が形成されると考えられる。 [0017] In step 3, the light-transmitting layer is irradiated with ultraviolet rays, whereby the light-transmitting layer is transformed into an optical functional layer 15 exhibiting chromism. As for alteration, energy levels are considered to be formed in metal oxides by ultraviolet excitation as described later.
[0018] 工程 4では、光学機能層 15の上に第 2電極 19を配列する。 [0018] In step 4, the second electrode 19 is arranged on the optical functional layer 15.
[0019] 以下、電界感応素子 1の具体例を示す。 Hereinafter, a specific example of the electric field sensitive element 1 will be shown.
実施例 1  Example 1
[0020] 実施例 1にお!/ヽて、光学機能層 5は金属酸ィ匕物である二酸化スズ (SnO )と絶縁物  [0020] In Example 1, the optical functional layer 5 is composed of tin oxide (SnO), which is a metal oxide, and an insulator.
2 であるシリコーンオイルとを材料として形成される。光学機能層 5の厚さは 1 μ mであ る。第 1の電極層 7は厚さ 0. 4 mの ITOである。第 2の電極層 9の下層 9Aは厚さ 0. 1 μ mの酸化ニッケル(NiO)であり、上層 9Bは厚さ 0. 4 μ mの ITOである。  2 is formed using silicone oil as a material. The thickness of the optical functional layer 5 is 1 μm. The first electrode layer 7 is ITO having a thickness of 0.4 m. The lower layer 9A of the second electrode layer 9 is 0.1 μm thick nickel oxide (NiO), and the upper layer 9B is 0.4 μm thick ITO.
[0021] 支持体としての厚さ lmmの白板ガラスにスパッタリングによって第 1の電極層 7を形 成した後、光学機能層 5を次の手順で形成した。カブロン酸スズ 0. 75gとキシレン 1. 28gとシリコーンオイル (東芝シリコーン社製 TSF433) 0. lgとの混合液を用意した。 第 1の電極層 7が固着した白板ガラスに上記混合液をスピンオン( 1200rpm、 lOsec )によって塗布し、 50°Cの雰囲気に lOmin晒して乾燥させ、その後に焼成した。焼成 温度は 320°C、焼成時間は lOminである。次に焼成された層に低圧水銀ランプを用 いて紫外線を照射した。照射条件は 200mWZcm2、 60minである。 [0021] After the first electrode layer 7 was formed on a white plate glass having a thickness of 1 mm as a support by sputtering, the optical functional layer 5 was formed by the following procedure. A mixed solution of 0.75 g of tin cabronate, 1.28 g of xylene and 0. lg of silicone oil (TSF433 manufactured by Toshiba Silicone) was prepared. The above-mentioned mixed solution was applied by spin-on (1200 rpm, lOsec) to the white glass plate to which the first electrode layer 7 had been fixed, dried by exposure to lOmin in a 50 ° C. atmosphere, and then fired. The firing temperature is 320 ° C and the firing time is lOmin. Next, the fired layer was irradiated with ultraviolet rays using a low-pressure mercury lamp. Irradiation conditions are 200mWZcm 2 and 60min.
[0022] 光学機能層 5を形成した後、スパッタリングによって下層 9Aおよび上層 9Bを^ ^こ 積層し、電界感応素子 1の作製を終えた。 [0023] 電界感応素子 1の光学機能を確かめるため、電界感応素子 1に電圧パルス信号を 印カ卩した。その際、第 1の電極層 7をパルス発生器の電位出力端子に接続し、第 2の 電極層 9 (厳密には上層 9B)を接地端子に接続した。図 3 (A)の上半部に示されるよ うに、振幅 + 10Vでパルス幅 20msの正極性パルスと、振幅 20Vでパルス幅 20ms の負極性パルスとを約 500msのインターバルを設けて繰り返し印加した。これと並行 して、発光ダイオード (LED)を光源とする測定器を用いて可視光に対する電界感応 素子 1の透過率を測定した。 [0022] After the optical functional layer 5 was formed, the lower layer 9A and the upper layer 9B were laminated by sputtering to complete the production of the electric field sensitive element 1. [0023] In order to confirm the optical function of the electric field sensitive element 1, a voltage pulse signal was applied to the electric field sensitive element 1. At that time, the first electrode layer 7 was connected to the potential output terminal of the pulse generator, and the second electrode layer 9 (strictly, the upper layer 9B) was connected to the ground terminal. As shown in the upper half of Fig. 3 (A), a positive pulse with an amplitude of +10 V and a pulse width of 20 ms and a negative pulse with an amplitude of 20 V and a pulse width of 20 ms were repeatedly applied with an interval of about 500 ms. . In parallel with this, the transmittance of the electric field sensitive element 1 with respect to visible light was measured using a measuring device using a light emitting diode (LED) as a light source.
[0024] 図 3 (A)の下半部に示されるように、繰り返し印加されるパルスに呼応して透過率の 値が周期的に変化した。負極性パルスに感応して透過率の値が減少する状態変化( これを"着色"と呼称する)が生じ、正極性パルスに感応して透過率の値が増大する 状態変化 (これを"消色"と呼称する)が生じた。パルス印加のインターバル期間にお いては、直前の変化終了時の状態が保たれた。着色終了時の透過率は 80%で消色 終了時の透過率は 86%であった。図 3 (A)により、電界感応素子 1の実施例 1がクロ ミズムを呈することが判る。  [0024] As shown in the lower half of Fig. 3 (A), the transmittance value periodically changed in response to repeatedly applied pulses. A state change (referred to as “coloring”) occurs in response to the negative polarity pulse, and a state change in which the transmission value increases in response to the positive polarity pulse. Color "). During the pulse application interval, the state at the end of the previous change was maintained. The transmittance at the end of coloring was 80%, and the transmittance at the end of decoloring was 86%. FIG. 3A shows that Example 1 of the electric field sensitive element 1 exhibits chromism.
[0025] 図 3 (B)は図 3 (A)の時間軸のスケールを拡大した波形図であり、正極性パルスに 対する応答性を示して!/、る。消色の応答時間は 5msであった。  FIG. 3 (B) is a waveform diagram in which the scale of the time axis of FIG. 3 (A) is enlarged, and shows the response to the positive pulse! The decoloring response time was 5 ms.
[0026] 図 3 (C)も図 3 (A)の時間軸のスケールを拡大した波形図であり、負極性パルスに 対する応答性を示して!/、る。着色の応答時間は 8msであった。  [0026] FIG. 3 (C) is also a waveform diagram obtained by enlarging the time axis scale of FIG. 3 (A), showing the response to negative polarity pulses! The coloring response time was 8 ms.
実施例 2  Example 2
[0027] 実施例 2において、光学機能層 5は金属酸ィ匕物である二酸ィ匕チタン (TiO )と絶縁  [0027] In Example 2, the optical functional layer 5 was insulated from titanium dioxide (TiO), which is a metal oxide.
2 物であるシリコーンオイルとを材料として形成される。光学機能層 5の厚さは 1 μ mで ある。第 1の電極層 7および第 2の電極層 9の材質、厚さおよび形成方法は上記実施 例 1と同様である。  It is formed from two materials, silicone oil. The thickness of the optical functional layer 5 is 1 μm. The materials, thicknesses, and formation methods of the first electrode layer 7 and the second electrode layer 9 are the same as in Example 1 above.
[0028] 光学機能層 5を次の手順で形成した。カプロン酸チタン 0. 72gとキシレン 1. 14gと ブチルセ口ソルブ 0. 14gとシリコーンオイル(東芝シリコーン社製 TSF433) 0. 25gと の混合液を用意した。第 1の電極層 7が固着した白板ガラスに上記混合液をスピンォ ン(600rpm、 lOsec)によって塗布し、 50°Cの雰囲気に lOmin晒して乾燥させ、そ の後に焼成した。焼成温度は 320°C、焼成時間は lOminである。次に焼成された層 に低圧水銀ランプを用いて紫外線を照射した。照射条件は実施例 1と同様の 200m W/cm2、 60minである。 [0028] The optical functional layer 5 was formed by the following procedure. A mixed solution of 0.72 g of titanium caproate, 1.14 g of xylene, 0.14 g of butyl sequestration solvent and 0.25 g of silicone oil (TSF433 manufactured by Toshiba Silicone) was prepared. The above-mentioned mixed solution was applied to the white plate glass to which the first electrode layer 7 was fixed by spinons (600 rpm, lOsec), dried by exposure to lOmin in a 50 ° C. atmosphere, and then fired. The firing temperature is 320 ° C and the firing time is lOmin. Next fired layer Were irradiated with ultraviolet rays using a low-pressure mercury lamp. The irradiation conditions are 200 m W / cm 2 and 60 min as in Example 1.
[0029] 実施例 1と同様の方法で電界感応素子 1の光学機能を確かめた。すなわち、図 4 ( A)の上半部に示されるように、振幅 + 10Vでパルス幅 20msの正極性パルスと、振 幅 20Vでパルス幅 20msの負極性パルスとを約 500msのインターバルを設けて繰 り返し印加した。これと並行して、 LEDを光源とする測定器を用いて可視光に対する 電界感応素子 1の透過率を測定した。  [0029] The optical function of the electric field sensitive element 1 was confirmed by the same method as in Example 1. That is, as shown in the upper half of Fig. 4 (A), a positive pulse with an amplitude of +10 V and a pulse width of 20 ms and a negative pulse with an amplitude of 20 V and a pulse width of 20 ms are provided with an interval of about 500 ms. Applied repeatedly. In parallel with this, the transmittance of the electric field sensitive element 1 with respect to visible light was measured using a measuring device using an LED as a light source.
[0030] 図 4 (A)の下半部に示されるように、繰り返し印加されるパルスに呼応して透過率の 値が周期的に変化した。負極性パルスに感応して透過率の値が減少する状態変化( 着色)が生じ、正極性パルスに感応して透過率の値が増大する状態変化(消色)が生 じた。パルス印加のインターバル期間においては、直前の変化終了時の状態が保た れた。着色終了時の透過率は 79%で消色終了時の透過率は 92%であった。図 4 ( A)により、電界感応素子 1の実施例 2がクロミズムを呈することが判る。  [0030] As shown in the lower half of Fig. 4 (A), the transmittance value periodically changed in response to the repeatedly applied pulses. A state change (coloring) in which the transmittance value decreased in response to the negative polarity pulse occurred, and a state change (decoloration) in which the transmittance value increased in response to the positive polarity pulse occurred. During the pulse application interval, the state at the end of the previous change was maintained. The transmittance at the end of coloring was 79%, and the transmittance at the end of decoloring was 92%. FIG. 4A shows that Example 2 of the electric field sensitive element 1 exhibits chromism.
[0031] 図 4 (B)は図 4 (A)の時間軸のスケールを拡大した波形図であり、正極性パルスに 対する応答性を示して!/、る。消色の応答時間は 17msであった。  [0031] FIG. 4 (B) is a waveform diagram obtained by enlarging the time axis scale of FIG. 4 (A), and shows the responsiveness to the positive pulse! The decoloring response time was 17 ms.
[0032] 図 4 (C)も図 4 (A)の時間軸のスケールを拡大した波形図であり、負極性パルスに 対する応答性を示している。着色の応答時間は 18msであった。  FIG. 4 (C) is also a waveform diagram obtained by enlarging the time axis scale of FIG. 4 (A), and shows the response to negative polarity pulses. The color response time was 18 ms.
実施例 3  Example 3
[0033] カプロン酸スズ 2gとキシレン 3gとシリコーンオイル(東芝シリコーン社製 TSF433) 0 . 5gとの混合液を用意し、実施例 1と同様に混合液の塗布、乾燥、焼成、および紫外 線照射を行って光学機能層 5を形成した。  [0033] A mixed liquid of 2 g of tin caproate, 3 g of xylene and 0.5 g of silicone oil (TSF433 manufactured by Toshiba Silicone Co., Ltd.) was prepared, and the mixed liquid was applied, dried, fired, and irradiated with ultraviolet rays in the same manner as in Example 1. To form an optical functional layer 5.
[0034] 第 2の電極層 9を接地して第 1の電極層 7に振幅が 20Vでパルス幅が 10msの負 極性パルスを印加した。パルス印加に呼応して、電界感応素子 1の透過率の値が 85 %から 56%に変化した。その後、印加電圧が 0の期間において透過率の値は 56% に保たれた。  The second electrode layer 9 was grounded, and a negative polarity pulse having an amplitude of 20 V and a pulse width of 10 ms was applied to the first electrode layer 7. In response to the pulse application, the transmittance value of the electric field sensitive element 1 changed from 85% to 56%. Thereafter, the transmittance value was maintained at 56% during the period when the applied voltage was zero.
実施例 4  Example 4
[0035] 実施例 3と同様の混合液を用意し、塗布の後に実施例 3よりも急激に乾燥させた。  A mixed solution similar to that in Example 3 was prepared, and dried more rapidly than Example 3 after coating.
それ以外は実施例 3と同様とした。 [0036] 塗布した混合液を急激に乾燥させることによって、溶媒蒸発による空隙が残って焼 成後の層は粒子凝集体になる。ポーラスな光学機能層 5はコントラストを向上させる。 実施例 3と同様のパルス印加に感応して、電界感応素子 1の透過率の値が 85%から 24%に変化した。 Other than that was the same as Example 3. [0036] By rapidly drying the applied mixed liquid, voids due to solvent evaporation remain, and the layer after baking becomes a particle aggregate. The porous optical functional layer 5 improves contrast. In response to the same pulse application as in Example 3, the transmittance value of electric field sensitive element 1 changed from 85% to 24%.
[0037] 以上の実施例で確認されたクロミズムについては、図 5で示される動作原理が考え られる。二酸化スズを例に挙げる力 二酸ィ匕チタンおよび酸ィ匕亜鉛についても次の 説明は当てはまる。  [0037] Regarding the chromism confirmed in the above embodiments, the operation principle shown in Fig. 5 can be considered. The power to take tin dioxide as an example The following explanations also apply to titanium dioxide and zinc oxide.
[0038] 図 5 (A)のように、一方の電極である ITO上の金属酸化物である二酸化スズ(ァモ ルファス)に紫外線が照射されると、二酸化スズの価電子帯の電子が伝導帯に励起さ れる。 ITOとの界面付近では、この電子がある確率で絶縁物を通り抜けて一時的に I TOに捕獲され、価電子帯の電子が抜けた部位の原子間距離が変化する。捕獲され ていた電子は再び二酸化スズの価電子帯に戻る力 このときの準位は図 5 (B)のよう にバンドギャップ内に移動している。このような事象が繰り返し起こり、紫外線が照射 されている間に図 5 (C)のようにバンドギャップ内に多数の準位ができる。しかし、これ ら準位に捕らえられるべき電子は紫外線により励起されて ITOに移動する。こうして 生じた電子不在のバンドギャップ内の準位は、紫外線照射を終えた後も残存する。 金属酸ィ匕物が吸収する光のエネルギー(波長)はバンドギャップ内の準位に依存す る。二酸化スズの場合、バンドギャップ内の電子が少ない状態では透過率の値が大 きい (透明な状態)。  [0038] As shown in Fig. 5 (A), when one of the electrodes, ITO, which is a metal oxide on ITO, is irradiated with ultraviolet light, electrons in the valence band of tin dioxide are conducted. Excited by the band. In the vicinity of the interface with ITO, this electron passes through the insulator with a certain probability and is temporarily trapped in ITO, and the interatomic distance at the site where the electron in the valence band has escaped changes. The trapped electrons return to the valence band of tin dioxide again. The level at this time moves into the band gap as shown in Fig. 5 (B). Such an event occurs repeatedly, and many levels are formed in the band gap as shown in Fig. 5 (C) while the ultraviolet rays are irradiated. However, electrons that should be trapped in these levels are excited by ultraviolet rays and move to ITO. The level in the band gap in the absence of electrons thus generated remains even after the ultraviolet irradiation is finished. The energy (wavelength) of light absorbed by the metal oxide depends on the level in the band gap. In the case of tin dioxide, the transmittance value is large when the number of electrons in the band gap is small (transparent state).
[0039] 絶縁物の役割は ITOと二酸化スズとの間に障壁を作り、励起された電子を通過させ ることである。 ITOと二酸化スズとの間に絶縁物が介在した状態で紫外線照射を受け ることによって二酸化スズは構造変化を起こす。  [0039] The role of the insulator is to create a barrier between ITO and tin dioxide and allow the excited electrons to pass. Tin dioxide undergoes a structural change when it is exposed to ultraviolet radiation with an insulator between ITO and tin dioxide.
[0040] バンドギャップ内に準位をもつ透明な状態の二酸化スズに図 5 (D)のようにバイアス して電界を印加すると、 ITOの電子が絶縁物による障壁を越えて二酸化スズに移る。 移った電子が二酸化スズのバンドギャップ間準位に捕獲されると、二酸化スズの透過 率の値が小さくなる。すなわち、透明な状態力も暗色を呈する状態に変わる。電界を 取り去っても、障壁の帯電荷によって暗色の状態が維持される。  [0040] When an electric field is applied to tin dioxide in a transparent state having a level in the band gap as shown in Fig. 5 (D), the ITO electrons move to the tin dioxide across the barrier due to the insulator. When the transferred electrons are trapped in the band gap level of tin dioxide, the transmittance value of tin dioxide decreases. In other words, the transparent state force also changes to a dark color state. Even when the electric field is removed, the dark state is maintained by the charge on the barrier.
[0041] 図 5 (E)のように以前とは逆の極性の電界をカ卩えると、バンドギャップに捕獲されて いた電子は、蛍光体などの室内照明程度の光量の外光で、ある確率で伝導帯の自 由電子になる。この自由電子は ITOに移動する。このため、最終的にはバンドギヤッ プ内の準位に電子のない状態になる。これによつて暗色の状態力 透明な状態に戻 る。 [0041] As shown in Fig. 5 (E), when an electric field having the opposite polarity to the previous one is captured, it is trapped in the band gap. The emitted electrons are external light with an amount of light equivalent to room lighting such as phosphors, and become free electrons in the conduction band with a certain probability. These free electrons move to ITO. As a result, the state in the bandgap finally has no electrons. This restores the dark state force to a transparent state.
[0042] 以上の実施例によれば、消色が生じた状態での透過率の値が大きいので、高コント ラストで且つ背景が明るい反射型の表示デバイスを実現することができる。電界感応 素子 1の主成分が固体であるので、全液体または液体を多く含む構成と比べて機械 的衝撃による破損が生じにくい。構造が単純であるので、低価格ィ匕に有利である。  [0042] According to the above embodiment, since the transmittance value in a state where decoloring has occurred is large, it is possible to realize a reflective display device with high contrast and a bright background. Since the main component of the electric field sensitive element 1 is a solid, damage due to mechanical impact is less likely to occur compared to a configuration in which all liquids or liquids are contained. Since the structure is simple, it is advantageous for low cost.
[0043] 上記実施例の製造方法では絶縁物が焼成に絶える耐熱性材料に限られるが、焼 成後にシリコーンオイルを洗浄除去して新たに榭脂を充填する製造方法を採用する 場合には、アクリル、ポリカーボネート、エポキシなど榭脂を用いることができる。  [0043] In the manufacturing method of the above embodiment, the insulating material is limited to a heat-resistant material that can be fired. However, when a manufacturing method in which silicone oil is washed and removed after baking and a new resin is filled, A resin such as acrylic, polycarbonate, and epoxy can be used.
[0044] 上記実施例またはその変形によって具体ィ匕される本発明の電界感応素子には次 の応用がある。  [0044] The electric field sensitive element of the present invention, which is embodied by the above embodiment or its modification, has the following applications.
[0045] 透過率の変化量は印加する電圧に比例するので、印加電圧の多値制御によって 多階調表現をすることができる。ノ ックライトとフィルタを使用して、液晶と同様のフル カラー表示も可能である。  [0045] Since the amount of change in transmittance is proportional to the applied voltage, multi-tone expression can be achieved by multi-value control of the applied voltage. Using a knocklight and a filter, full-color display similar to liquid crystal is possible.
[0046] 任意パターンの紫外線照射によって部分的に構造が変化した光学機能層 5を形成 し、照射パターンと電極層のパターンとの組合せによって任意形状を表示することが できる。 [0046] The optical functional layer 5 whose structure is partially changed by ultraviolet irradiation of an arbitrary pattern can be formed, and an arbitrary shape can be displayed by a combination of the irradiation pattern and the electrode layer pattern.
[0047] 表示デバイス 10の変形例として、剛性または柔軟性をもつ基材にラミネートや塗装 によって反射膜を固着させた基板を電界感応素子 1の支持体とすることができる。  As a modification of the display device 10, a substrate in which a reflective film is fixed to a rigid or flexible base material by lamination or painting can be used as a support for the electric field sensitive element 1.
[0048] 電界感応素子 1および表示デバイス 10の構成、材質、製造に係る方法および材料 などは例示に限定されず、本発明の主旨に沿う範囲内で適宜変更することができる。 産業上の利用可能性  [0048] The configurations, materials, manufacturing methods and materials, etc. of the electric field sensitive element 1 and the display device 10 are not limited to the examples, and can be appropriately changed within the scope of the gist of the present invention. Industrial applicability
[0049] 本発明は、実質的に表示内容を更新するときのみに電力を消費する省電力デイス プレイにおいて有用である。その他のディスプレイ、光学シャツタを含む各種光学機 能デバイスに利用することができる。 [0049] The present invention is useful in a power-saving display that consumes power only when the display content is substantially updated. It can be used for various optical function devices including other displays and optical shirts.

Claims

請求の範囲 The scope of the claims
[1] 二酸化スズ、二酸化チタン、および酸ィ匕亜鉛カゝらなるグループカゝら選ばれた金属酸 化物と、前記金属酸化物を覆う絶縁体とから構成され、電界の印加によって可視光 透過率の値が変化する光学機能層と、  [1] Consists of a metal oxide selected from the group consisting of tin dioxide, titanium dioxide, and zinc oxide, and an insulator covering the metal oxide, and transmits visible light when an electric field is applied. An optical functional layer in which the value of the rate changes;
前記光学機能層を挟む第 1および第 2の電極層とを備える  First and second electrode layers sandwiching the optical functional layer
ことを特徴とする電界感応素子。  An electric field sensitive element characterized by that.
[2] クロミズムを呈する請求項 1に記載の電界感応素子。 [2] The electric field sensitive element according to claim 1, which exhibits chromism.
[3] 前記第 1の電極層の材質と前記第 2の電極層の材質とが異なる [3] The material of the first electrode layer is different from the material of the second electrode layer
請求項 2に記載の電界感応素子。  The electric field sensitive element according to claim 2.
[4] 前記第 1の電極層は前記金属酸化物とは異なる透明導電材料からなり、 [4] The first electrode layer is made of a transparent conductive material different from the metal oxide,
前記第 2の電極層の少なくとも前記光学機能層と接する部分は P型半導体力 なる 請求項 3に記載の電界感応素子。  4. The electric field sensitive element according to claim 3, wherein at least a portion of the second electrode layer in contact with the optical functional layer is a P-type semiconductor force.
[5] 前記第 1の電極層は酸化インジウム'スズからなり、 [5] The first electrode layer is made of indium tin oxide,
前記金属酸化物は二酸化スズであり、  The metal oxide is tin dioxide;
前記第 2の電極層における前記光学機能層と接する部分が酸ィ匕ニッケル力 なる 請求項 4に記載の電界感応素子。  5. The electric field sensitive element according to claim 4, wherein a portion of the second electrode layer that is in contact with the optical functional layer has an acid-nickel force.
[6] 電界の印加に対する応答時間が 10ms以下である [6] Response time to electric field application is 10 ms or less
請求項 5に記載の電界感応素子。  The electric field sensitive element according to claim 5.
[7] 前記第 1の電極層は酸化インジウム'スズからなり、 [7] The first electrode layer is made of indium tin oxide,
前記金属酸化物は二酸化チタンであり、  The metal oxide is titanium dioxide;
前記第 2の電極層における前記光学機能層と接する部分が酸ィ匕ニッケル力 なる 請求項 4に記載の電界感応素子。  5. The electric field sensitive element according to claim 4, wherein a portion of the second electrode layer that is in contact with the optical functional layer has an acid-nickel force.
[8] 電界の印加に対する応答時間が 20ms以下である [8] Response time to electric field application is 20 ms or less
請求項 7に記載の電界感応素子。  The electric field sensitive element according to claim 7.
[9] 表面色が明色である支持体と、 [9] a support having a light surface color;
前記支持体に固着する第 1の透光性電極層と、  A first translucent electrode layer fixed to the support;
前記第 1の透光性電極層を覆う光学機能層と、  An optical functional layer covering the first translucent electrode layer;
前記光学機能層に積層された第 2の透光性電極層とを備え、 前記光学機能層は、二酸化スズ、二酸化チタン、および酸ィ匕亜鉛カゝらなるグループ から選ばれた金属酸化物と、前記金属酸化物を覆う絶縁体とから構成され、電界の 印加によって可視光透過率の値が変化する A second translucent electrode layer laminated on the optical functional layer, The optical functional layer is composed of a metal oxide selected from the group consisting of tin dioxide, titanium dioxide, and acid-zinc carbonate, and an insulator covering the metal oxide. Visible light is applied by applying an electric field. Transmissivity value changes
ことを特徴とする表示デバイス。  A display device characterized by that.
請求項 1に記載の電界感応素子の製造方法であって、  A method of manufacturing an electric field sensitive element according to claim 1,
支持体に固着した前記第 1の電極層を、前記金属酸化物とそれを覆う絶縁体とから なる透光性の層で被覆する工程、  Coating the first electrode layer fixed to the support with a light-transmitting layer comprising the metal oxide and an insulator covering the metal oxide;
前記透光性の層に紫外線を照射し、それによつて前記透光性の層を前記光学機 能層に変質させる工程、および  Irradiating the translucent layer with ultraviolet light, thereby transforming the translucent layer into the optical functional layer; and
前記光学機能層に前記第 2の電極層を固着させる工程を備える  A step of fixing the second electrode layer to the optical functional layer.
ことを特徴とする電界感応素子の製造方法。  A method for manufacturing an electric field sensitive element.
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US20100067089A1 (en) 2010-03-18
CN101535885A (en) 2009-09-16
EP2078980A4 (en) 2010-07-28
JPWO2008053561A1 (en) 2010-02-25
US8587855B2 (en) 2013-11-19
EP2078980A1 (en) 2009-07-15
KR20090086969A (en) 2009-08-14
US20110300667A1 (en) 2011-12-08
CN101535885B (en) 2012-03-28
KR101354889B1 (en) 2014-01-22
US8004737B2 (en) 2011-08-23
EP2078980B1 (en) 2019-01-09

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