WO2008050071A3 - Couche d ' alliage de nickel-titane comprenant des atomes d ' azote inseres, procede d ' implantation - Google Patents

Couche d ' alliage de nickel-titane comprenant des atomes d ' azote inseres, procede d ' implantation Download PDF

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Publication number
WO2008050071A3
WO2008050071A3 PCT/FR2007/052244 FR2007052244W WO2008050071A3 WO 2008050071 A3 WO2008050071 A3 WO 2008050071A3 FR 2007052244 W FR2007052244 W FR 2007052244W WO 2008050071 A3 WO2008050071 A3 WO 2008050071A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
nickel
titanium alloy
alloy containing
nitrogen atoms
Prior art date
Application number
PCT/FR2007/052244
Other languages
English (en)
Other versions
WO2008050071A2 (fr
Inventor
Denis Busardo
Original Assignee
Quertech Ingenierie
Denis Busardo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quertech Ingenierie, Denis Busardo filed Critical Quertech Ingenierie
Publication of WO2008050071A2 publication Critical patent/WO2008050071A2/fr
Publication of WO2008050071A3 publication Critical patent/WO2008050071A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0822—Multiple sources
    • H01J2237/0825—Multiple sources for producing different ions simultaneously

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials For Medical Uses (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Couche d'alliage de nickel-titane comprenant des atomes d'azote insérés sur une épaisseur supérieure ou égale à 0,05 μm, et où le profil de concentration de l'azote en fonction de l'épaisseur de la couche est une courbe résultant de la somme d'au moins deux courbes sensiblement gaussiennes. Les atomes d'azote sont insérés par implantation ionique multi-énergie. Procédé d'implantation associé.
PCT/FR2007/052244 2006-10-26 2007-10-25 Couche d ' alliage de nickel-titane comprenant des atomes d ' azote inseres, procede d ' implantation WO2008050071A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0609392 2006-10-26
FR0609392A FR2907797B1 (fr) 2006-10-26 2006-10-26 Dispositif de nitruration par implantation ionique d'une piece en alliage a memoire de forme en nickel titane et procede mettant en oeuvre un tel dispositif.

Publications (2)

Publication Number Publication Date
WO2008050071A2 WO2008050071A2 (fr) 2008-05-02
WO2008050071A3 true WO2008050071A3 (fr) 2008-08-07

Family

ID=39272279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2007/052244 WO2008050071A2 (fr) 2006-10-26 2007-10-25 Couche d ' alliage de nickel-titane comprenant des atomes d ' azote inseres, procede d ' implantation

Country Status (2)

Country Link
FR (1) FR2907797B1 (fr)
WO (1) WO2008050071A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102828157A (zh) * 2012-07-30 2012-12-19 北京航空航天大学 一种Nb离子注入沉积对医用TiNi形状记忆合金进行表面改性的方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2942801B1 (fr) * 2009-03-05 2012-03-23 Quertech Ingenierie Procede de traitement d'une piece en elastomere par des ions multi-energies he+ et he2+ pour diminuer le frottement
CN101935824B (zh) 2009-07-03 2013-03-06 中芯国际集成电路制造(上海)有限公司 离子注入方法、设备及形成轻掺杂结构的方法
FR2949236B1 (fr) 2009-08-19 2011-10-28 Aircelle Sa Procede d'implantation ionique pour la realisation d'une surface hydrophobe
CN101914757B (zh) * 2010-07-21 2012-10-10 北京航空航天大学 一种表面注入金属元素的NiTi形状记忆合金及其制备方法
WO2016055842A1 (fr) * 2014-08-15 2016-04-14 Universidad Eafit Matériau ternaire à base de titane, nickel et azote
CN114561623A (zh) * 2021-11-05 2022-05-31 杭州大和热磁电子有限公司 一种碲化铋材料表面处理方法
CN117512496B (zh) * 2024-01-05 2024-03-08 沈阳市口腔医院 一种镍钛合金矫治弓丝表面防护的处理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085491A2 (fr) * 2004-02-04 2005-09-15 Societe Quertech Ingenierie (Qi) Dispositif et procede d'implantation ionique d'une piece en alliage d'aluminium
WO2006074604A1 (fr) * 2005-01-13 2006-07-20 Versitech Limited Materiaux a memoire de forme traites en surface et procede de production associes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085491A2 (fr) * 2004-02-04 2005-09-15 Societe Quertech Ingenierie (Qi) Dispositif et procede d'implantation ionique d'une piece en alliage d'aluminium
WO2006074604A1 (fr) * 2005-01-13 2006-07-20 Versitech Limited Materiaux a memoire de forme traites en surface et procede de production associes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FUKUMOTO S ET AL: "Corrosion resistance of nitrogen ion implanted titanium alloy for medical implants in physiological saline solution", ION IMPLANTATION TECHNOLOGY, 2000. CONFERENCE ON SEP. 17-22, 2000, PISCATAWAY, NJ, USA,IEEE, 17 September 2000 (2000-09-17), pages 777 - 780, XP010543189, ISBN: 978-0-7803-6462-2 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102828157A (zh) * 2012-07-30 2012-12-19 北京航空航天大学 一种Nb离子注入沉积对医用TiNi形状记忆合金进行表面改性的方法

Also Published As

Publication number Publication date
FR2907797A1 (fr) 2008-05-02
WO2008050071A2 (fr) 2008-05-02
FR2907797B1 (fr) 2011-07-22

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