WO2008025174A3 - Massenspektrometer - Google Patents

Massenspektrometer Download PDF

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Publication number
WO2008025174A3
WO2008025174A3 PCT/CH2007/000371 CH2007000371W WO2008025174A3 WO 2008025174 A3 WO2008025174 A3 WO 2008025174A3 CH 2007000371 W CH2007000371 W CH 2007000371W WO 2008025174 A3 WO2008025174 A3 WO 2008025174A3
Authority
WO
WIPO (PCT)
Prior art keywords
arrangement
emitter area
mass spectrometer
cathode
reaction zone
Prior art date
Application number
PCT/CH2007/000371
Other languages
English (en)
French (fr)
Other versions
WO2008025174A2 (de
Inventor
Martin Wueest
Wolfram Knapp
Original Assignee
Inficon Gmbh
Martin Wueest
Wolfram Knapp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh, Martin Wueest, Wolfram Knapp filed Critical Inficon Gmbh
Priority to DE112007001837.2T priority Critical patent/DE112007001837B4/de
Priority to GB0902542A priority patent/GB2453702B/en
Priority to JP2009525884A priority patent/JP5044835B2/ja
Priority to US12/376,542 priority patent/US8071941B2/en
Publication of WO2008025174A2 publication Critical patent/WO2008025174A2/de
Publication of WO2008025174A3 publication Critical patent/WO2008025174A3/de
Priority to US13/205,925 priority patent/US8410433B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/08—Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission

Abstract

Die Erfindung bezieht sich auf eine Massenspektrometeranordnung enthaltend eine Kathodenanordnung (6) zur Emission von Elektronen (21), eine Reaktionszone (3), die mit einer Eintrittsöffnung (14) für die Zuführung von Neutralteilchen (20) verbunden ist wobei diese mit der Kathodenanordnung (6) wirkverbunden ist zur Ionisierung von Neutralteilchen (20), eine lonenextraktionsanordnung (4) welche kommunizierend mit dem Wirkbereich der Reaktionszone (3) angeordnet ist, Mittel zur Führung von Ionen (22) zu einem Detektionssystem (12) und Mittel zur Evakuierung der Massenspektrometeranordnung. Hierbei enthält die Kathodenanordnung (6) eine Feldemissionskathode mit einer Emitterfläche (7), wobei in geringem Abstand zu dieser Emitterfläche (7) ein Extraktionsgitter (9) zur Extraktion von Elektronen angeordnet ist, welches die Emitterfläche (7) im wesentlichen überdeckt. Die Emitterfläche (7) umschliesst hierbei mindestens teilweise einen Hohlraum (13), derart dass eine rohrförmige Struktur ausgebildet ist.
PCT/CH2007/000371 2006-08-29 2007-07-27 Massenspektrometer WO2008025174A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112007001837.2T DE112007001837B4 (de) 2006-08-29 2007-07-27 Massenspektrometer
GB0902542A GB2453702B (en) 2006-08-29 2007-07-27 Mass spectrometer
JP2009525884A JP5044835B2 (ja) 2006-08-29 2007-07-27 質量分析計
US12/376,542 US8071941B2 (en) 2006-08-29 2007-07-27 Mass spectrometer
US13/205,925 US8410433B2 (en) 2006-08-29 2011-08-09 Mass spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH01380/06A CH698896B1 (de) 2006-08-29 2006-08-29 Massenspektrometer.
CH1380/06 2006-08-29

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/376,542 A-371-Of-International US8071941B2 (en) 2006-08-29 2007-07-27 Mass spectrometer
US13/205,925 Continuation US8410433B2 (en) 2006-08-29 2011-08-09 Mass spectrometer

Publications (2)

Publication Number Publication Date
WO2008025174A2 WO2008025174A2 (de) 2008-03-06
WO2008025174A3 true WO2008025174A3 (de) 2008-09-18

Family

ID=37136894

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2007/000371 WO2008025174A2 (de) 2006-08-29 2007-07-27 Massenspektrometer

Country Status (6)

Country Link
US (2) US8071941B2 (de)
JP (1) JP5044835B2 (de)
CH (1) CH698896B1 (de)
DE (1) DE112007001837B4 (de)
GB (1) GB2453702B (de)
WO (1) WO2008025174A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH698896B1 (de) 2006-08-29 2009-11-30 Inficon Gmbh Massenspektrometer.
WO2010131008A1 (en) * 2009-05-13 2010-11-18 Micromass Uk Limited Surface coating on ion source
US8476587B2 (en) 2009-05-13 2013-07-02 Micromass Uk Limited Ion source with surface coating
WO2013098607A1 (en) * 2011-12-28 2013-07-04 Dh Technologies Development Pte. Ltd. Dynamic multipole kingdon ion trap
US10014166B2 (en) * 2013-05-30 2018-07-03 Dh Technologies Development Pte. Ltd. Inline ion reaction device cell and method of operation
US10217623B2 (en) 2014-06-12 2019-02-26 Micromass Uk Limited Secondary electrospray ionization at reduced pressure

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer
DE4002049A1 (de) * 1990-01-24 1991-07-25 Deutsche Forsch Luft Raumfahrt Elektronenemissionsquelle
GB2384908A (en) * 2002-02-05 2003-08-06 Microsaic Systems Ltd Miniature mass spectrometer
US20040032194A1 (en) * 2002-08-09 2004-02-19 Matsushita Electric Industrial Co., Ltd. Field-emission electron source element and image display apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3376921D1 (en) * 1982-09-10 1988-07-07 Nippon Telegraph & Telephone Ion shower apparatus
JPS6020442A (ja) * 1983-07-13 1985-02-01 Fumio Watanabe 質量分析計用熱陰極電子衝撃型イオン源
US4988869A (en) * 1989-08-21 1991-01-29 The Regents Of The University Of California Method and apparatus for electron-induced dissociation of molecular species
FR2792770A1 (fr) * 1999-04-22 2000-10-27 Cit Alcatel Fonctionnement a haute pression d'une cathode froide a emission de champ
US6429596B1 (en) * 1999-12-31 2002-08-06 Extreme Devices, Inc. Segmented gate drive for dynamic beam shape correction in field emission cathodes
US6700329B2 (en) * 2001-04-10 2004-03-02 California Institute Of Technology Method and apparatus for providing flow-stabilized microdischarges in metal capillaries
US6765215B2 (en) * 2001-06-28 2004-07-20 Agilent Technologies, Inc. Super alloy ionization chamber for reactive samples
JP2003242876A (ja) * 2002-02-15 2003-08-29 Sharp Corp 電子放出用陰極部とそれを含む蛍光表示装置
US6885010B1 (en) * 2003-11-12 2005-04-26 Thermo Electron Corporation Carbon nanotube electron ionization sources
JP2007538359A (ja) * 2004-05-19 2007-12-27 コメット ホールディング アーゲー 高線量ｘ線管
US7259381B2 (en) * 2004-08-03 2007-08-21 Applied Materials, Inc. Methodology for determining electron beam penetration depth
EP1698878A1 (de) 2005-03-04 2006-09-06 Inficon GmbH Elektrodenanordnung und Druckmessvorrichtung
CH698896B1 (de) 2006-08-29 2009-11-30 Inficon Gmbh Massenspektrometer.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer
DE4002049A1 (de) * 1990-01-24 1991-07-25 Deutsche Forsch Luft Raumfahrt Elektronenemissionsquelle
GB2384908A (en) * 2002-02-05 2003-08-06 Microsaic Systems Ltd Miniature mass spectrometer
US20040032194A1 (en) * 2002-08-09 2004-02-19 Matsushita Electric Industrial Co., Ltd. Field-emission electron source element and image display apparatus

Also Published As

Publication number Publication date
US8071941B2 (en) 2011-12-06
JP5044835B2 (ja) 2012-10-10
DE112007001837B4 (de) 2018-02-22
DE112007001837A5 (de) 2009-08-06
GB2453702A (en) 2009-04-15
GB0902542D0 (en) 2009-04-01
JP2010501986A (ja) 2010-01-21
US20110291005A1 (en) 2011-12-01
GB2453702B (en) 2011-06-22
US8410433B2 (en) 2013-04-02
US20100176293A1 (en) 2010-07-15
WO2008025174A2 (de) 2008-03-06
CH698896B1 (de) 2009-11-30

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