WO2008010358A1 - Method and apparatus for storing board-shaped body - Google Patents

Method and apparatus for storing board-shaped body Download PDF

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Publication number
WO2008010358A1
WO2008010358A1 PCT/JP2007/061489 JP2007061489W WO2008010358A1 WO 2008010358 A1 WO2008010358 A1 WO 2008010358A1 JP 2007061489 W JP2007061489 W JP 2007061489W WO 2008010358 A1 WO2008010358 A1 WO 2008010358A1
Authority
WO
WIPO (PCT)
Prior art keywords
pallet
plate
glass substrate
degrees
positioning member
Prior art date
Application number
PCT/JP2007/061489
Other languages
French (fr)
Japanese (ja)
Inventor
Takehiko Nose
Kazuya Toyoshima
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to JP2008525806A priority Critical patent/JP4998805B2/en
Priority to CN2007800273420A priority patent/CN101489883B/en
Priority to KR1020087025689A priority patent/KR101364947B1/en
Publication of WO2008010358A1 publication Critical patent/WO2008010358A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38Details or accessories
    • B65D19/385Frames, corner posts or pallet converters, e.g. for facilitating stacking of charged pallets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B23/00Packaging fragile or shock-sensitive articles other than bottles; Unpacking eggs
    • B65B23/20Packaging plate glass, tiles, or shingles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a plate-shaped body, particularly a flat panel display (FPD), that is, a plate for storing a large glass substrate for a liquid crystal display, a plasma display or the like, or a large glass substrate as an intermediate product in the manufacturing process on a pallet.
  • FPD flat panel display
  • the present invention relates to a storage method and a storage device for a shape.
  • a strip-shaped plate glass manufactured by a glass substrate manufacturing kiln is cut into a predetermined size, and the cut rectangular large glass substrate is conveyed by a conveyor. Then, this is sucked and held by a robot, transferred one by one to a pallet, and stored in a pallet.
  • Patent Document 1 JP 2005-298062 A
  • Patent Document 2 Japanese Unexamined Patent Application Publication No. 2006-123953
  • Patent Document 3 Japanese Patent Laid-Open No. 2005-75366
  • Patent Document 4 Japanese Patent Laid-Open No. 2005-75433
  • the present invention has been made in view of such circumstances, and a plate-like storage method that can satisfactorily store a large plate-like body such as a large glass substrate one by one on a pallet, and its An object is to provide an apparatus.
  • the plate-like body described in this specification is mainly a glass substrate called a so-called 8th generation size (about 2400 mm x about 2160 mm).
  • the thickness is about 0.4 mm and the thickness is 0.7 mm.
  • a glass substrate with a thickness of 0.7 mm has a mass of about 10 kg per sheet.
  • the plate-like body is positioned on the pallet. It can be stored without misplacement, but when using a general-purpose robot that is generally used, the movement of the general-purpose robot will vary, and the plate will not be displaced due to the performance limit of the robot during storage. can not deny. Therefore, even if a general-purpose robot is used by controlling the inclination angle (posture) of the pallet using its own weight (gravity) and sliding the plate toward the positioning position, Providing a device that can store the device without being displaced is also desirable from the viewpoint of cost reduction of the device. In this case, as explained earlier, if the pallet tilt angle is set too large, a loss of time will occur when replacing the pallet!
  • the present invention provides a method for storing a plate-like body in which a rectangular plate-like body is stored on a pallet one by one.
  • a pedestal comprising two side positioning members fixed to the upper material and arranged in an L shape, the first side of the positioning member being positioned below the pallet, and the upper material and The pallet is tilted so that the angle formed with the horizontal plane is 40 degrees or more, and the pallet is tilted so that the angle formed between the first side of the positioning member and the horizontal plane is 10 degrees or more.
  • the plate-like bodies are stored one by one in the inclined posture.
  • the lower part of the pallet refers to the lower part when the pallet is inclined so that the angle between the upper material and the horizontal surface is 40 degrees or more.
  • the plate-like body housed in the pallet is slid by gravity due to the inclined arrangement of the pallet, and a side portion of the plate-like body comes into contact with the positioning member. Therefore, it is preferable that the pallet is positioned at a predetermined position.
  • the pallet is placed in a plate-shaped storage device that stores a rectangular plate-shaped material one by one on the pallet pedestal.
  • First and second tilting means to be tilted, and transporting means for transporting and storing the plate-like bodies one by one on the pallet uppering material tilted by the tilting means A positioning member having two sides arranged in an L shape for positioning the plate-like body at a predetermined position of the pallet is fixed to the upper material, and the first tilting means is a first member of the positioning member.
  • the side of the pallet is positioned below the pallet and the pallet is inclined so that the angle between the upper material and the horizontal plane is 40 degrees or more.
  • One The pallet is tilted so that the angle between the side and the horizontal plane is 10 degrees or more.
  • the inclining means inclines the pallet so that an angle formed with the horizontal plane is 40 degrees or more in a state where the edge of the pallet is parallel to the horizontal plane, and the pallet upper material surface
  • the pallet is tilted so that the angle formed by the first side of the positioning member and the horizontal plane is 10 degrees or more by rotating about an axis orthogonal to the axis.
  • the conveying means conveys and stores the plate-like bodies one by one on the inclined pallet.
  • This angle may be 40 degrees or more, but is preferably set to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases.
  • the upper limit of the angle is preferably about 72 degrees from the viewpoint of not causing stagnation in the stored plate-like body.
  • the pallet when the pallet is tilted so that the angle between the first side of the positioning member and the horizontal plane is 10 degrees or more, the pallet is tilted to 40 degrees or more, which is combined with the plate-like body.
  • the plate-like body starts to slide toward the positioning position due to its own weight.
  • the side portion of the plate-like body is brought into contact with the positioning member, and the plate-like body is positioned at a predetermined position on the pallet.
  • the plate-like body does not slip, and the positioning time decreases as the inclination angle increases.
  • 10 to 20 degrees is preferable.
  • the slippage of the plate-like body depends on the frictional resistance between the positioning member and the plate-like body when there is a positioning member. Therefore, it is preferable to attach a glass end face sliding member such as kraft paper to the positioning member to improve the sliding property of the plate-like body with respect to the pallet.
  • the pallet is inclined so that the angle between the edge of the pallet and the horizontal plane is 40 degrees or more in a state in which the edge of the pallet is parallel to the horizontal plane, and the axis is perpendicular to the upper pallet surface of the pallet.
  • the pallet is tilted to 10 degrees or more, and the plates are transported and stored one by one in the tilted pallet. It can be stored well one by one on the pallet.
  • FIG. 1 is a side sectional view of a flat pallet.
  • FIG. 2 is a plan view of the flat pallet shown in FIG.
  • FIG. 3 is a plan view of the base of the flat pallet shown in FIG.
  • FIG. 4 is a perspective view of the upper pallet of the flat pallet shown in FIG.
  • FIG. 5 is a schematic plan view of a glass substrate storage device.
  • FIG. 6 is an explanatory view showing the operation of the pallet tilting apparatus.
  • FIG. 7 is a schematic structural diagram of a first tilting device.
  • FIG. 8 is a schematic structural diagram of a second tilting device.
  • FIG. 1 is a side sectional view of a flat pallet 1 in which a glass substrate 4 called 8th generation size (about 2400 mm ⁇ about 2160 mm) is stored.
  • the pallet 1 is composed of a pedestal 3 and an upper lid 2 placed on the pedestal 3, and about 120 glass substrates 4 are stored in a horizontally stacked state.
  • a pressing member 7 that presses the laminated glass substrate 4 from above to the pedestal 3 is disposed on the upper lid 2 of the pallet 1.
  • Fig. 2 is a plan view of the pallet 1, which matches the shape of the glass substrate 4 to be stored. Accordingly, the plan view is rectangular.
  • the upper lid 2 is removed from the pedestal 3 by appropriate means such as human power or a robot when the glass substrate is loaded on the pedestal 3 and when the glass substrate is taken out from the pedestal 3. Further, the upper lid 2 is fixed to the pedestal 3 by the clamp 10 so that it is not displaced from the pedestal 3 or dropped when the pallet 1 is transported.
  • the pallet 1 needs to have a structure capable of withstanding the weight and rigidity when a large number of glass substrates 4 are loaded.
  • the lighter the weight the better the transport efficiency and the storage efficiency.
  • the weight when the glass substrate 4 is loaded is preferably 2000 kg or less.
  • FIG. 3 is a plan view of the base 3.
  • the pedestal 3 has a frame body 30 formed by assembling a plurality of steel or non-ferrous metal shaped steels in the form of a grid in the vertical and horizontal directions.
  • the glass substrate 4 is laminated on the top material 5 (the bottom plate on which the glass substrate is laminated) 5 is fixed, and the glass substrate 4 protective material 6 (see FIG. 4) is fixed on the top material 5.
  • the side plates 14 and 15 that are positioning members of the glass substrate 4 are arranged in an L shape in parallel with the two sides of the upper material 5 and fixed.
  • the positioning members in this example, the side plates 14 and 15
  • the positioning members are arranged so that the two sides forming the L-shape are parallel to the two adjacent sides of the pallet 1.
  • the two sides forming the L-shape are connected as in this example in terms of easy attachment to and removal from the palette, but they may not be connected.
  • the length dimension of the positioning member is not particularly specified as long as it is determined in accordance with the size of the glass substrate. However, if the dimensional force is too large, it may be difficult to position the glass substrate stably.
  • the positioning member is preferably disposed in the vicinity of the edge of the pallet.
  • FIG. 4 is a perspective view of the upholstery material 5.
  • the upper material 5 is a non-ferrous metal plate such as an iron plate or aluminum, so that the glass substrate 4 can be stably placed on the pedestal 3 and can prevent dust from entering the interior space of the pallet that houses the glass substrate 4. It is arranged for.
  • the side plates 14 and 15 may be iron plates or iron square pipes.
  • the glass substrate 4 protective material 16, 17 has a glass end face sliding member 19, 20, such as kraft paper, ultra high molecular weight polyethylene (UPE), fluorine Fat etc. are pasted.
  • the glass substrate 4 is brought into contact with the glass end surface sliding members 19 and 20 attached to the protective members 16 and 17 fixed to the side plates 14 and 15, and is loaded in this state.
  • the glass substrate 4 is positioned in the horizontal direction with respect to the base 3.
  • the pallet of the glass substrate 4 by the storage device described later is used.
  • the glass substrate 4 slides on the glass end surface sliding member 20 due to its own weight, and the vertical side of the glass substrate 4 abuts against the protective material 16, thereby positioning the glass substrate 4 in the horizontal direction.
  • the side plates 14 and 15 are arranged in the L shape on the two sides of the pallet so that the glass substrate 4 can be easily taken out in the subsequent process. If the glass substrate 4 is also removed when the end surface of the glass substrate 4 and the protective materials 16 and 17 fixed to the side plates 14 and 15 are in contact, the protective materials 16 and 17 may be damaged due to friction caused by the end surfaces. Therefore, the side plates 14 and 15 are preferably detachable so that they can be replaced as appropriate.
  • the base 3 and the side plates 14 and 15 may be made of a non-metallic material such as non-ferrous metal such as aluminum as long as it can secure the strength to support the glass substrate 4.
  • the protective material 6, 16, 17 is preferably a material that can efficiently absorb, for example, a vibration frequency of 8 to 20 Hz in consideration of the frequency generated in the vehicle (or airplane) itself during land transportation or air transportation. .
  • vibration absorbing materials such as rubber, silicone, and various types of resin can be used.
  • the upper lid 2 has an opening on the lower surface and surrounds the outside of the loaded plate-like body 4 from above. As shown in Fig. 1, four side covers 12, a top cover 13 and An internal space S for accommodating the glass substrate 4 is defined.
  • the four side covers 12, the top cover 13, and the upper material 5 of the pedestal 3 prevent foreign matters such as dust from entering the internal space S.
  • the side cover 12 and the top cover 13 may be made of steel, but the upper lid 2 needs to be attached and removed, so it is preferable that the cover is light. Therefore, it is preferable that only the frame portion of the upper lid 2 is made of steel, and the side cover 12 and the top cover 13 are made of a resin film or a plate-like body.
  • the pallet 1 is transported to a destination by a forklift, a truck, an airplane or the like. But Therefore, the glass substrate 4 is pressed by the pressing member 7 so that the individual glass substrates 4 do not move in the pallet 1 during the conveyance.
  • the pressing member 7 does not move the individual glass substrates 4 in the pallet 1 during the conveyance, the glass substrate 1 is free from defects such as chips, wrinkles, and cracks.
  • the glass substrate 4 can be easily taken out in the subsequent process.
  • two forklift holes 11 for receiving a fork of a forklift are formed in the base 3 in one shape steel frame member.
  • the fork of the forklift can be received with respect to the knot ⁇ let 1 both in the vertical and horizontal directions and in the direction of displacement of the pedestal 3.
  • the glass substrate 4 suitable to be stored in the pallet 1 is a large glass substrate having a plate thickness of 0.4 mm to 1.3 mm and a longitudinal and lateral force of about 1800 mm ⁇ 2000 mm to 2400 mm ⁇ 2800 mm.
  • the thin substrates 18 are stacked with the thin interleaf paper 18 sandwiched between the glass substrates 4 and 4.
  • the interleaf paper 18 is air permeable and has a rough surface with a smoothness of 18 seconds or less (JIS P 8119, 1976).
  • the paper quality is preferably such that it is transferred to the surface of the glass and does not cause paper texture, burns, or smudges.
  • the grease content of the interleaf paper 18 is 0.05% or less (JIS P 8205, 1976), and the quality of the glass substrate 4 itself is not adversely affected by the combined effect with the paper surface roughness described above! /, It is like paper quality.
  • FIG. 5 is a schematic plan view of the glass substrate storage device (plate-shaped storage device) 50 of this example.
  • a storage device 50 shown in the figure is installed adjacent to a conveyor 52 installed downstream of a glass substrate manufacturing kiln (not shown), and includes a robot (conveying means) 54 and a pallet tilting device (tilting hand). Dan) It is composed mainly of 56.
  • the robot 54 is a general-purpose six-axis articulated robot, and a rectangular suction hand 60 in which a number of suction pads (not shown) are arranged flush with each other is connected to the tip of the arm 58. ing.
  • the robot 54 is swung in the arrow direction to the sampling position. And adsorption
  • the glass substrate 4 is adsorbed by the hand 60 through the interleaf paper 18, and thereafter, the glass substrate 4 is stored together with the interleaf paper 18 in the pallet 1 that is previously inclined at a predetermined angle by the pallet inclination device 56.
  • the glass substrates 4 are stored on the pallet 1 one by one.
  • the robot 54 is not limited to a 6-axis articulated robot, and may be a dedicated robot as long as it can transport a glass plate regardless of its configuration and name.
  • the glass substrates 4 are stored (stacked) one by one in the pallet 1 with the pallet 1 being horizontal, they are stacked with the uppermost glass substrate 4 stored first. Since the air intervening between the glass substrate 4 and the next glass substrate 4 is difficult to escape, that is, because the glass substrate 4 is large, air is easily trapped between the glass substrates 4 and 4, so that the glass substrate 4 A small amount of air remaining between the four causes the action of an air bearing, and a problem arises when the positions of the laminated glass substrates 4 are shifted from each other.
  • the glass substrate 4 can be stored in the pallet 1 without being displaced.
  • tilt angle of 1 is inadvertently set large, it is not preferable because a time loss occurs when changing the pallet.
  • the pallet tilting device 56 places the positioning member 15 below the pallet 1 as shown in FIG.
  • the pallet 1 is tilted around the axis 62 so that the angular force between the horizontal plane H and the horizontal plane H is 0 degree or more, and the angle between the positioning member 15 and the horizontal plane is 10 degrees as shown in Fig. 6 (B).
  • the pallet 1 is tilted by rotating around the shaft 64 orthogonal to the surface of the upper material 5 of the pallet 1.
  • the robot 54 shown in FIG. 5 transports and stores the glass substrates 4 one by one on the pallet 1 in the inclined posture.
  • the angle formed with the horizontal plane H of the pallet 1 is less than 40 degrees, the above-described problem of air venting is not improved, and when it exceeds 40 degrees, it can be drastically improved.
  • This angle is not particularly limited as long as it is 40 degrees or more, but it is preferable to set it to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases.
  • the upper limit of the angle is preferably about 72 degrees from the viewpoint of preventing stagnation in the glass substrate 4 housed in the nott 1.
  • the glass as shown in FIG. 6 (C) is coupled with the tilt of 40 degrees or more shown in FIG. 6 (A). Due to the weight of the substrate 4, the lower side 4 A of the glass substrate 4 slides on the kraft paper of the protective material 17 in the direction of arrow A, and the vertical side 4 B of the glass substrate 4 contacts the protective material 16. Thereby, the position of the glass substrate 4 in the horizontal direction (plate surface direction) is positioned, and the glass substrate 4 is positioned at a predetermined position on the pallet 1.
  • the pallet 1 is inclined so that the angular force formed with the horizontal surface H of the base 3 is 0 degree or more, and the pallet 1 is placed on the surface of the upper covering material 5. Rotate around the orthogonal axis 64 and tilt the pallet 1 more than 10 degrees.
  • the large glass substrates 4 can be satisfactorily stored in the pallet 1 one by one.
  • the frictional resistance between the glass substrates 4 and 4 becomes low, and the protective material 16 and 17 for the glass substrate 4 fixed to the side plates 14 and 15 If the glass end surface sliding members 19 and 20 are attached to the glass end surface, the frictional resistance between the glass end surface sliding members 19 and 20 and the end surface of the glass substrate 4 is reduced, so that the glass can be stored better.
  • FIG. 7 is a schematic structural diagram of a first tilting device 70 in the pallet tilting device 56 that tilts the pallet 1 so that the angle between the base 3 of the pallet 1 and the horizontal plane H is 40 degrees or more.
  • FIG. 8 shows a schematic structure of the second tilting device 80 of the pallet tilting device 56, which rotates the pallet 1 by 10 degrees or more by rotating it around an axis 64 orthogonal to the surface of the upper material 5 of the pallet 1.
  • FIG. 8 shows a schematic structural diagram of a first tilting device 70 in the pallet tilting device 56 that tilts the pallet 1 so that the angle between the base 3 of the pallet 1 and the horizontal plane H is 40 degrees or more.
  • FIG. 8 shows a schematic structure of the second tilting device 80 of the pallet tilting device 56, which rotates the pallet 1 by 10 degrees or more by rotating it around an axis 64 orthogonal to the surface of the upper material 5 of the pallet 1.
  • the pallet 1 with the upper lid 2 removed is placed on the table 72, and the table 72 can swing (raise and lower) via the shaft 62.
  • the piston 76 of the cylinder device 74 is connected to the table 72.
  • the table 72 is raised and lowered around the shaft 62, which can change the posture of the pallet 1 between the position tilted more than 40 degrees and the horizontal position. it can.
  • the table 72 on which the pallet 1 is placed is provided so as to be swingable via the shaft 64, and the cylinder device is provided at the edge of the table 72.
  • Two pistons 84 are connected via a bracket 86.
  • the piston 84 is expanded and contracted, the table 72 is swung through the shaft 64, whereby the posture of the pallet 1 can be adjusted to a position inclined by 10 degrees or more.
  • the cylinder is exemplified as the tilting device.
  • any mechanism may be used as long as the pallet 1 can be tilted by motor drive.
  • the glass substrate 4 has been described as the plate to be stored, but it can also be applied to a plate such as a resin plate or a metal plate.
  • the present invention is particularly suitable for storing in a pallet a large glass substrate for a flat panel display such as a liquid crystal display or a plasma display, or a large glass substrate which is an intermediate product in the manufacturing process. It should be noted that the entire contents of the specification, claims, drawings and abstract of the Japanese Patent Application 2006-199418 filed on July 21, 2006 are cited here as disclosure of the specification of the present invention. Incorporate.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Robotics (AREA)
  • Pallets (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Provided are method and apparatus for excellently storing large board-shaped bodies, such as large glass substrates, in a pallet one by one. The glass substrate storing apparatus is provided with a pallet inclining apparatus. The pallet having a positioning member arranged in L-shape is placed on the glass substrate storing apparatus, the pallet is inclined by the pallet inclining apparatus so that an angle formed by the top layer surface whereupon the board-shaped body is to be stacked and a horizontal surface is at 40 degrees or more, and that the lower side of the pallet is at 10 degrees or more from the horizontal surface. The end section of the glass substrate carried one by one to the pallet in such inclined posture is permitted to abut to the positioning member arranged in L-shape, and is positioned and stored.

Description

明 細 書  Specification
板状体の収納方法及び収納装置  Plate-like body storage method and storage device
技術分野  Technical field
[0001] 本発明は、板状体、特にフラットパネルディスプレイ (FPD)、すなわち、液晶ディス プレイやプラズマディスプレイ等用の大型ガラス基板やその製造過程における中間 製品の大型ガラス基板をパレットに収納する板状体の収納方法及び収納装置に関 する。  [0001] The present invention relates to a plate-shaped body, particularly a flat panel display (FPD), that is, a plate for storing a large glass substrate for a liquid crystal display, a plasma display or the like, or a large glass substrate as an intermediate product in the manufacturing process on a pallet. The present invention relates to a storage method and a storage device for a shape.
背景技術  Background art
[0002] FPD用ガラス等に用いられる大型ガラス基板の製造工程では、ガラス基板製造窯 によって製造された帯状板ガラスを所定のサイズに切断し、この切断した矩形状の大 型ガラス基板をコンベアで搬送し、これをロボットにより吸着保持してパレットに一枚 ずつ移送し、パレットに多数枚収納することが行われて 、る。  [0002] In the manufacturing process of a large glass substrate used for FPD glass, etc., a strip-shaped plate glass manufactured by a glass substrate manufacturing kiln is cut into a predetermined size, and the cut rectangular large glass substrate is conveyed by a conveyor. Then, this is sucked and held by a robot, transferred one by one to a pallet, and stored in a pallet.
[0003] パレットのタイプとして、複数枚のガラス基板を立てて並べた状態で収納する、特許 文献 2に示された縦型パレットと、複数枚のガラス基板を平置きにして積層収納す る、特許文献 3、 4に示された平型パレットが知られている。平型パレットは積み重ね 可能であることから、積み重ねることが困難である縦型パレットと比較して、床面積に 対する収容枚数が多いという利点がある。また、縦型パレットは、トラックで搬送する 際、安全性を確保するために傾斜させて積載しなければならず、この結果、トラックの 荷台面積に対する収容枚数が大幅に減少する。よって、このような保管、流通時の収 容枚数の事情から、現在では平型パレットが注目されている。  [0003] As a type of pallet, a plurality of glass substrates are stored in an upright state. The vertical pallet shown in Patent Document 2 and a plurality of glass substrates are stacked and stored in a flat position. A flat pallet disclosed in Patent Documents 3 and 4 is known. Since flat pallets can be stacked, they have the advantage that they can accommodate more floor space than vertical pallets, which are difficult to stack. In addition, when vertical pallets are transported by truck, they must be loaded at an angle to ensure safety. As a result, the number of sheets that can be accommodated with respect to the truck bed area is greatly reduced. Therefore, flat pallets are now attracting attention due to the situation of the number of sheets stored and distributed.
特許文献 1:特開 2005 - 298062号公報  Patent Document 1: JP 2005-298062 A
特許文献 2 :特開 2006— 123953号公報  Patent Document 2: Japanese Unexamined Patent Application Publication No. 2006-123953
特許文献 3:特開 2005 - 75366号公報  Patent Document 3: Japanese Patent Laid-Open No. 2005-75366
特許文献 4:特開 2005 - 75433号公報  Patent Document 4: Japanese Patent Laid-Open No. 2005-75433
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] し力しながら、大型ガラス基板の収納には平型パレットが好適であることが知られて いるものの、ガラス基板製造窯によって製造され、コンベアによって搬送されてきた大 型ガラス基板を、平型パレットに一枚ずつ良好に収納するための収納方法及びその 装置につ 、ては具体的に提案されて 、な 、。 [0004] However, it is known that a flat pallet is suitable for storing a large glass substrate. However, it is proposed specifically for a storage method and apparatus for storing large glass substrates manufactured in a glass substrate manufacturing kiln and transported by conveyors one by one in a flat pallet. It has been,
[0005] 本発明は、このような事情に鑑みてなされたもので、大型ガラス基板等の大型板状 体を、パレットに一枚ずつ良好に収納することができる板状体の収納方法及びその 装置を提供することを目的とする。  [0005] The present invention has been made in view of such circumstances, and a plate-like storage method that can satisfactorily store a large plate-like body such as a large glass substrate one by one on a pallet, and its An object is to provide an apparatus.
課題を解決するための手段  Means for solving the problem
[0006] この明細書において説明する板状体とは、いわゆる第 8世代サイズ (約 2400mm X 約 2160mm)と称されるガラス基板を主としており、例えば、液晶ディスプレイ用のガ ラス基板の場合には厚みが約 0. 4mm力ら 0. 7mmであり、厚みが 0. 7mmのガラス 基板では 1枚につき約 10kgの質量を有する。このガラス基板は、収納される際にコン ベア上でその上面に通気性のある合紙が被せられるとともに、この合紙を介してロボ ットに吸着保持され、平型のパレットに一枚ずつ収納される。  [0006] The plate-like body described in this specification is mainly a glass substrate called a so-called 8th generation size (about 2400 mm x about 2160 mm). For example, in the case of a glass substrate for a liquid crystal display, The thickness is about 0.4 mm and the thickness is 0.7 mm. A glass substrate with a thickness of 0.7 mm has a mass of about 10 kg per sheet. When the glass substrate is stored, the upper surface of the conveyor is covered with a breathable interleaving paper, and the glass substrate is sucked and held by the robot via the interleaving paper, one by one on a flat pallet. Stored.
[0007] パレットを水平にした状態で板状体を一枚ずつ収納 (積層)していくと、先に収納さ れている最上部の板状体と、積層されようとする板状体との間に介在する空気が抜け にくいため、すなわち、大型であるが故に板状体間に空気が余計に閉じ込められ易 いため、板状体間に残存した少量の空気がエアベアリングの作用を生じさせて、積 層された板状体の位置が相互にずれるという問題が発生する。板状体の位置がずれ ると、後工程で自動板取りが困難になるばかりか、大きくずれた場合には板状体がパ レットの縁部や角部に接触し、欠け、瑕、割れ等の欠陥が生じる。  [0007] When the plate-like bodies are stored (stacked) one by one in a state where the pallet is horizontal, the uppermost plate-shaped body stored first, the plate-shaped body to be stacked, Since the air intervening between the plates is difficult to escape, that is, the air is easily trapped between the plates due to its large size, the small amount of air remaining between the plates causes the action of the air bearing. Thus, there arises a problem that the positions of the stacked plate-like bodies are shifted from each other. If the position of the plate-like body is shifted, automatic plate cutting becomes difficult in the subsequent process. If the plate-like body is greatly displaced, the plate-like body will come into contact with the edge or corner of the pallet, resulting in chipping, wrinkling or cracking. Such defects occur.
[0008] そこで、パレットを水平面に対して傾斜させていくと、板状体間の空気は抜け易くな り、位置ずれの問題は解消されていく。傾斜角度が大きいほど効果は高くなる。しか しながら、ガラス収納時に平型のパレットを傾斜させるということは、傾斜したパレット に所定枚数の板状体を収納した後、パレットを水平姿勢に戻し、そして、新たな空の パレットと交換し、この空のパレットを再度傾斜させる、という動作がパレット交換時に おいて必要になり、傾斜角度が大きいほど時間的なロスが生じるので効率的ではな い。  [0008] Therefore, when the pallet is inclined with respect to the horizontal plane, the air between the plate-like bodies is easily removed, and the problem of displacement is solved. The greater the tilt angle, the greater the effect. However, tilting a flat pallet when storing glass means that after storing a predetermined number of plates on the tilted pallet, the pallet is returned to a horizontal position and replaced with a new empty pallet. The operation of inclining the empty pallet again is necessary at the time of pallet replacement. The larger the inclination angle, the more time loss occurs, which is not efficient.
[0009] また、高精細な機能を有する高価なロボットを使用すれば、板状体はパレットに位 置ずれすることなく収納することができるが、一般的に使用される汎用ロボットを使用 した場合には、汎用ロボットの動作ばらつきが生じ収納時にロボットの性能限界により 板状体が位置ずれすることは否めない。そこで、板状体の自重 (重力)を利用してパ レットの傾斜角度 (姿勢)を制御し、板状体を位置決め位置に向けて滑らすことにより 、汎用ロボットを使用した場合でも、板状体を位置ずれすることなく収納することがで きる装置を提供することが、装置のコスト削減の観点力も望まれる。この場合、先にも 説明したが、パレットの傾斜角度を不用意に大きく設定すると、パレット交換時に時間 的なロスが生じるので好ましくな!/、。 [0009] If an expensive robot having a high-definition function is used, the plate-like body is positioned on the pallet. It can be stored without misplacement, but when using a general-purpose robot that is generally used, the movement of the general-purpose robot will vary, and the plate will not be displaced due to the performance limit of the robot during storage. can not deny. Therefore, even if a general-purpose robot is used by controlling the inclination angle (posture) of the pallet using its own weight (gravity) and sliding the plate toward the positioning position, Providing a device that can store the device without being displaced is also desirable from the viewpoint of cost reduction of the device. In this case, as explained earlier, if the pallet tilt angle is set too large, a loss of time will occur when replacing the pallet!
[0010] そこで、本発明は、上述した事情を踏まえ、矩形状の板状体をパレットに一枚ずつ 収納する板状体の収納方法において、前記パレットは、板状体が積層される上張り 材と該上張り材に固定され L型に配置した 2辺の位置決め部材とを備えた台座を有し 、前記位置決め部材の第 1の辺をパレットの下方に位置させて、前記上張り材と水平 面とのなす角度が 40度以上となるように前記パレットを傾斜させるとともに、前記位置 決め部材の第 1の辺と水平面とのなす角度が 10度以上となるように前記パレットを傾 斜させ、該傾斜姿勢で板状体が一枚ずつ収納されることを特徴としている。ここで、 パレットの下方とは、前記上張り材と水平面とのなす角度が 40度以上となるようにパ レットを傾斜させるときの下方を指す。  [0010] In view of the above-described circumstances, the present invention provides a method for storing a plate-like body in which a rectangular plate-like body is stored on a pallet one by one. And a pedestal comprising two side positioning members fixed to the upper material and arranged in an L shape, the first side of the positioning member being positioned below the pallet, and the upper material and The pallet is tilted so that the angle formed with the horizontal plane is 40 degrees or more, and the pallet is tilted so that the angle formed between the first side of the positioning member and the horizontal plane is 10 degrees or more. The plate-like bodies are stored one by one in the inclined posture. Here, the lower part of the pallet refers to the lower part when the pallet is inclined so that the angle between the upper material and the horizontal surface is 40 degrees or more.
[0011] 上記板状体の収納方法において、前記パレットに収納された前記板状体は、パレ ットの傾斜配置により重力で滑動して板状体の辺部が前記位置決め部材に当接する ことにより、パレットの所定の位置に位置決めされることが好ましい。  [0011] In the above method for storing a plate-like body, the plate-like body housed in the pallet is slid by gravity due to the inclined arrangement of the pallet, and a side portion of the plate-like body comes into contact with the positioning member. Therefore, it is preferable that the pallet is positioned at a predetermined position.
[0012] また、本発明は、上述した事情を踏まえ、矩形状の板状体をパレットの台座の上張 り材に一枚ずつ収納する板状体の収納装置にぉ 、て、前記パレットを傾斜配置させ る第 1と第 2の傾斜手段と、前記傾斜手段により傾斜配置された前記パレットの上張り 材に、板状体を一枚ずつ搬送して収納する搬送手段とを有し、前記上張り材には、 前記板状体をパレットの所定の位置に位置決めする、 L型に配置された 2辺の位置 決め部材が固定され、前記第 1の傾斜手段は、前記位置決め部材の第 1の辺をパレ ットの下方に位置させて、前記上張り材と水平面とのなす角度が 40度以上となるよう にパレットを傾斜させるとともに、前記第 2の傾斜手段は、前記位置決め部材の第 1の 辺と水平面とのなす角度が 10度以上となるようにパレットを傾斜させることを特徴とし ている。 [0012] Further, in the present invention, in view of the above-described circumstances, the pallet is placed in a plate-shaped storage device that stores a rectangular plate-shaped material one by one on the pallet pedestal. First and second tilting means to be tilted, and transporting means for transporting and storing the plate-like bodies one by one on the pallet uppering material tilted by the tilting means, A positioning member having two sides arranged in an L shape for positioning the plate-like body at a predetermined position of the pallet is fixed to the upper material, and the first tilting means is a first member of the positioning member. The side of the pallet is positioned below the pallet and the pallet is inclined so that the angle between the upper material and the horizontal plane is 40 degrees or more. One The pallet is tilted so that the angle between the side and the horizontal plane is 10 degrees or more.
[0013] 本発明によれば、傾斜手段は、パレットの縁部が水平面と平行な状態において水 平面とのなす角度が 40度以上となるようにパレットを傾斜させるとともに、パレットの上 張り材面に直交する軸を中心に回動させてパレットを前記位置決め部材の第 1の辺 と水平面とのなす角度が 10度以上になるように傾斜させる。そして、搬送手段が、そ の傾斜姿勢のパレットに、板状体を一枚ずつ搬送し収納する。  [0013] According to the present invention, the inclining means inclines the pallet so that an angle formed with the horizontal plane is 40 degrees or more in a state where the edge of the pallet is parallel to the horizontal plane, and the pallet upper material surface The pallet is tilted so that the angle formed by the first side of the positioning member and the horizontal plane is 10 degrees or more by rotating about an axis orthogonal to the axis. Then, the conveying means conveys and stores the plate-like bodies one by one on the inclined pallet.
[0014] パレットの上張り材と水平面とのなす角度力 0度未満の場合には、上述した空気 抜きの問題が改善されず、 40度以上となると飛躍的に改善できる。この角度は、 40 度以上であればよいが、その角度が大きくなるに従って前述したパレット交換時間が 長くなることから 40度〜 50度に設定することが好ましい。なお、角度の上限は、収納 された板状体に橈みを発生させな 、観点から 72度程度が好ま 、。  [0014] When the angular force between the pallet overlay and the horizontal plane is less than 0 degrees, the above-described air venting problem is not improved, and when it exceeds 40 degrees, it can be drastically improved. This angle may be 40 degrees or more, but is preferably set to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases. The upper limit of the angle is preferably about 72 degrees from the viewpoint of not causing stagnation in the stored plate-like body.
[0015] また、パレットを位置決め部材の第 1の辺と水平面とのなす角度が 10度以上になる ように傾斜させると、前記のパレットを 40度以上に傾斜させることと相まって、板状体 の自重により位置決め位置に向けて板状体が滑り始める。  [0015] In addition, when the pallet is tilted so that the angle between the first side of the positioning member and the horizontal plane is 10 degrees or more, the pallet is tilted to 40 degrees or more, which is combined with the plate-like body. The plate-like body starts to slide toward the positioning position due to its own weight.
[0016] パレットに位置決め部材が設けられた場合は、板状体の辺部がこの位置決め部材 に当接され、板状体がパレット上の所定の位置に位置決めされる。  [0016] When the positioning member is provided on the pallet, the side portion of the plate-like body is brought into contact with the positioning member, and the plate-like body is positioned at a predetermined position on the pallet.
[0017] 前記位置決め部材の第 1の辺と水平面とのなす傾斜角度が 10度未満であると、板 状体に滑りは生じず、また、その傾斜角度を大きくするに従って位置決め時間は短 縮するが、前述の如くパレット交換時間が長くなるので、 10度〜 20度が好適である。 また、板状体の滑りは、位置決め部材がある場合は、位置決め部材と板状体との間 の摩擦抵抗に左右される。そこで、該位置決め部材にクラフト紙等のガラス端面滑動 用部材を貼り付けてパレットに対する板状体の滑動性を向上させることが好ましい。 発明の効果  [0017] If the inclination angle formed by the first side of the positioning member and the horizontal plane is less than 10 degrees, the plate-like body does not slip, and the positioning time decreases as the inclination angle increases. However, since the pallet replacement time becomes long as described above, 10 to 20 degrees is preferable. Further, the slippage of the plate-like body depends on the frictional resistance between the positioning member and the plate-like body when there is a positioning member. Therefore, it is preferable to attach a glass end face sliding member such as kraft paper to the positioning member to improve the sliding property of the plate-like body with respect to the pallet. The invention's effect
[0018] 本発明によれば、パレットの縁部が水平面と平行な状態において水平面とのなす 角度が 40度以上となるようにパレットを傾斜させるとともに、パレットの上張り材面に直 交する軸を中心に回動させてパレットを 10度以上に傾斜させ、その傾斜姿勢のパレ ットに、板状体を一枚ずつ搬送し収納するので、大型ガラス基板等の大型板状体を、 パレットに一枚ずつ良好に収納することができる。 [0018] According to the present invention, the pallet is inclined so that the angle between the edge of the pallet and the horizontal plane is 40 degrees or more in a state in which the edge of the pallet is parallel to the horizontal plane, and the axis is perpendicular to the upper pallet surface of the pallet. , The pallet is tilted to 10 degrees or more, and the plates are transported and stored one by one in the tilted pallet. It can be stored well one by one on the pallet.
図面の簡単な説明  Brief Description of Drawings
[0019] [図 1]平型パレットの側断面図。  FIG. 1 is a side sectional view of a flat pallet.
[図 2]図 1に示した平型パレットの平面図。  FIG. 2 is a plan view of the flat pallet shown in FIG.
[図 3]図 1に示した平型パレットの台座の平面図。  FIG. 3 is a plan view of the base of the flat pallet shown in FIG.
[図 4]図 1に示した平型パレットの上張り材の斜視図。  FIG. 4 is a perspective view of the upper pallet of the flat pallet shown in FIG.
[図 5]ガラス基板用収納装置の概略平面図。  FIG. 5 is a schematic plan view of a glass substrate storage device.
[図 6]パレット傾斜装置の動作を示す説明図。  FIG. 6 is an explanatory view showing the operation of the pallet tilting apparatus.
[図 7]第 1の傾斜装置の概略構造図。  FIG. 7 is a schematic structural diagram of a first tilting device.
[図 8]第 2の傾斜装置の概略構造図。  FIG. 8 is a schematic structural diagram of a second tilting device.
符号の説明  Explanation of symbols
[0020] 1…パレット、 2…上蓋、 3…台座、 4···ガラス基板、 5…上張り材、 6…保護材、 7- 押圧部材、 10···クランプ、 11···フォークリフト用、 12···側カバー、 13···天カバー、 1 4、 15···側板、 16、 17···保護材、 18…合紙、 19、 20···ガラス端面滑動用部材、 30 …枠体、 50···ガラス基板用収納装置、 52···コンベア、 54· "ロボット、 56···パレット傾 斜装置、 58···アーム、 60···吸着ノヽンド、 62、 64···軸、 70···1の傾斜装置、 72···テ 一ブル、 74···シリンダ装置、 76· "ピストン、 80···第 2の傾斜装置、 82···シリンダ装置 、 84· "ピストン、 86· "ブラケット  [0020] 1 ... pallet, 2 ... top cover, 3 ... pedestal, 4 ... glass substrate, 5 ... upholstery material, 6 ... protective material, 7-pressing member, 10 ... clamp, 11 ... for forklift , 12 ... Side cover, 13 ... Top cover, 14, 15 ... Side plate, 16, 17 ... Protective material, 18 ... Interleaf, 19, 20 ... Glass end face sliding member, 30 ... Frame, 50 ... Glass substrate storage device, 52 ... Conveyor, 54 "Robot, 56 ... Pallet tilting device, 58 ... Arm, 60 ... Adsorption node, 62 , 64 ... axis, 70 ... 1 tilting device, 72 ... table, 74 ... cylinder device, 76 "piston, 80 ... 2nd tilting device, 82 ... Cylinder device, 84 · "Piston, 86 ·" bracket
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0021] 以下、添付図面に従って本発明に係る板状体の収納方法及び収納装置の好まし V、実施の形態につ!、て説明する。  Hereinafter, preferred embodiments of the plate-like body storage method and storage device according to the present invention will be described with reference to the accompanying drawings.
[0022] まず、本例の板状体の収納装置に適用されるパレットについて説明する。  [0022] First, a pallet applied to the plate-like body storage device of this example will be described.
[0023] 図 1は、平型パレット 1の側断面図であり、第 8世代サイズ (約 2400mm X約 2160 mm)と称されるガラス基板 4が収納されている。このパレット 1は、台座 3と台座 3上に 設置された上蓋 2とから構成され、 120枚程度のガラス基板 4が水平に積層された状 態で収納されている。また、パレット 1の上蓋 2には、積層されたガラス基板 4を上部か ら台座 3に向けて押圧する押圧部材 7が配置される。  FIG. 1 is a side sectional view of a flat pallet 1 in which a glass substrate 4 called 8th generation size (about 2400 mm × about 2160 mm) is stored. The pallet 1 is composed of a pedestal 3 and an upper lid 2 placed on the pedestal 3, and about 120 glass substrates 4 are stored in a horizontally stacked state. In addition, a pressing member 7 that presses the laminated glass substrate 4 from above to the pedestal 3 is disposed on the upper lid 2 of the pallet 1.
[0024] 図 2は、パレット 1の平面図であり、パレット 1は、収納されるガラス基板 4の形状に合 わせて平面視が矩形に構成されている。上蓋 2は、台座 3へのガラス基板積載時、及 び台座 3からのガラス基板取り出し時に、人力やロボット等の適宜手段によって台座 3 上から取り外される。また、上蓋 2は、パレット 1の搬送時等に台座 3からずれたり、落 下したりすることがないように、クランプ 10によって台座 3に固定される。 [0024] Fig. 2 is a plan view of the pallet 1, which matches the shape of the glass substrate 4 to be stored. Accordingly, the plan view is rectangular. The upper lid 2 is removed from the pedestal 3 by appropriate means such as human power or a robot when the glass substrate is loaded on the pedestal 3 and when the glass substrate is taken out from the pedestal 3. Further, the upper lid 2 is fixed to the pedestal 3 by the clamp 10 so that it is not displaced from the pedestal 3 or dropped when the pallet 1 is transported.
[0025] なお、パレット 1は、多数枚のガラス基板 4を積載した場合に、その重量に耐えられ る構造、及び剛性が必要であるが、軽量であるほど搬送効率や収納効率がよくなる ので、ガラス基板 4を積載した際の重量が 2000kg以下であることが好ま 、。  [0025] The pallet 1 needs to have a structure capable of withstanding the weight and rigidity when a large number of glass substrates 4 are loaded. However, the lighter the weight, the better the transport efficiency and the storage efficiency. The weight when the glass substrate 4 is loaded is preferably 2000 kg or less.
[0026] 図 3は、台座 3の平面図である。この台座 3は、図 3に示すように鉄製またはアルミ- ゥム等の非鉄金属製の複数の形鋼を縦横に複数本格子状に組んで枠体 30が形成 され、この枠体 30の上面にガラス基板 4が積層される上張り材 (ガラス基板が積層さ れる底板) 5が固定され、上張り材 5の上面にガラス基板 4の保護材 6 (図 4参照)が固 定されるとともに、ガラス基板 4の位置決め部材である側板 14、 15が L型に上張り材 5 の 2辺に平行に配設、固定されることにより構成される。このように位置決め部材 (本 例では、側板 14、 15)は、 L型を形成する 2辺がパレット 1の相隣る 2辺に平行となる ように配置される。この場合、 L型を形成する 2辺は本例のように連結している方がパ レットへの着脱が容易である点で好ましいが、連結していなくてもよい。また、位置決 め部材の長さ寸法は、ガラス基板の大きさに合わせて決めればよく特定されないが、 この寸法力 、さ過ぎるとガラス基板の位置決めを安定して行い難くなるおそれが生じ る。なお、位置決め部材は、パレットの縁端に近接して配置するのが好ましい。  FIG. 3 is a plan view of the base 3. As shown in FIG. 3, the pedestal 3 has a frame body 30 formed by assembling a plurality of steel or non-ferrous metal shaped steels in the form of a grid in the vertical and horizontal directions. The glass substrate 4 is laminated on the top material 5 (the bottom plate on which the glass substrate is laminated) 5 is fixed, and the glass substrate 4 protective material 6 (see FIG. 4) is fixed on the top material 5. The side plates 14 and 15 that are positioning members of the glass substrate 4 are arranged in an L shape in parallel with the two sides of the upper material 5 and fixed. Thus, the positioning members (in this example, the side plates 14 and 15) are arranged so that the two sides forming the L-shape are parallel to the two adjacent sides of the pallet 1. In this case, it is preferable that the two sides forming the L-shape are connected as in this example in terms of easy attachment to and removal from the palette, but they may not be connected. Further, the length dimension of the positioning member is not particularly specified as long as it is determined in accordance with the size of the glass substrate. However, if the dimensional force is too large, it may be difficult to position the glass substrate stably. Note that the positioning member is preferably disposed in the vicinity of the edge of the pallet.
[0027] 図 4は、上張り材 5の斜視図である。この上張り材 5は鉄板またはアルミニウム等の 非鉄金属板力 なり、台座 3上にガラス基板 4を安定して載置するため、及びガラス 基板 4を収容するパレット内部空間内への塵埃侵入防止のために配設される。  FIG. 4 is a perspective view of the upholstery material 5. The upper material 5 is a non-ferrous metal plate such as an iron plate or aluminum, so that the glass substrate 4 can be stably placed on the pedestal 3 and can prevent dust from entering the interior space of the pallet that houses the glass substrate 4. It is arranged for.
[0028] 側板 14、 15 (位置決め部材)の内側には、ガラス基板 4の保護材 16、 17が固定さ れる。この側板 14、 15は鉄板でもよいし、鉄角パイプでもよい。ガラス基板 4の保護 材 16、 17の表面には、ガラス基板の滑り性を高めるために摩擦抵抗の小さいガラス 端面滑動用部材 19、 20、例えばクラフト紙、超高分子量ポリエチレン (UPE)、フッ素 榭脂等が貼り付けられている。ガラス基板 4は、側板 14、 15に固定された上記保護 材 16、 17に貼り付けられたガラス端面滑動用部材 19、 20に当接され、この状態で積 載されるので、台座 3に対してガラス基板 4の水平方向における位置が位置決めされ る。その結果、後工程におけるガラス基板 4の取り出しを自動で行うことが容易になる [0028] Inside the side plates 14, 15 (positioning members), the protective members 16, 17 of the glass substrate 4 are fixed. The side plates 14 and 15 may be iron plates or iron square pipes. The glass substrate 4 protective material 16, 17 has a glass end face sliding member 19, 20, such as kraft paper, ultra high molecular weight polyethylene (UPE), fluorine Fat etc. are pasted. The glass substrate 4 is brought into contact with the glass end surface sliding members 19 and 20 attached to the protective members 16 and 17 fixed to the side plates 14 and 15, and is loaded in this state. As a result, the glass substrate 4 is positioned in the horizontal direction with respect to the base 3. As a result, it becomes easy to automatically take out the glass substrate 4 in the subsequent process.
[0029] また、ガラス基板 4は、ガラス基板 4の下辺が当接される保護材 17にガラス端面滑 動用部材 20を介して当接されるため、後述する収納装置によるガラス基板 4のパレツ ト 1への収納時に、ガラス基板 4が自重によりガラス端面滑動用部材 20上を滑り、ガラ ス基板 4の縦辺が保護材 16に当接することにより、ガラス基板 4の水平方向における 位置が位置決めされる。 [0029] Further, since the glass substrate 4 is brought into contact with the protective member 17 with which the lower side of the glass substrate 4 is in contact through the glass end surface sliding member 20, the pallet of the glass substrate 4 by the storage device described later is used. When the glass substrate 4 is stored in 1, the glass substrate 4 slides on the glass end surface sliding member 20 due to its own weight, and the vertical side of the glass substrate 4 abuts against the protective material 16, thereby positioning the glass substrate 4 in the horizontal direction. The
[0030] 更に、後工程におけるガラス基板 4の取り出しが容易なように、側板 14、 15は L型 にパレットの 2辺に配設されている。ガラス基板 4の端面部と側板 14、 15に固定され た保護材 16、 17とが当接している状態力もガラス基板 4を取り出すと、端面部による 摩擦等で保護材 16、 17が損傷する虞があるので、側板 14、 15は適宜取替えができ るように着脱可能であることが好ま 、。  [0030] Further, the side plates 14 and 15 are arranged in the L shape on the two sides of the pallet so that the glass substrate 4 can be easily taken out in the subsequent process. If the glass substrate 4 is also removed when the end surface of the glass substrate 4 and the protective materials 16 and 17 fixed to the side plates 14 and 15 are in contact, the protective materials 16 and 17 may be damaged due to friction caused by the end surfaces. Therefore, the side plates 14 and 15 are preferably detachable so that they can be replaced as appropriate.
[0031] 台座 3、及び側板 14、 15の材質は、ガラス基板 4を支持する強度が確保できる材質 であればよぐアルミニウム等の非鉄金属ゃ榭脂等の非金属でもよい。保護材 6、 16 、 17は、陸上輸送や空輸の際に車両 (又は飛行機)自体に生じる振動数を考慮して 、例えば、 8〜20Hzの振動周波数を効率よく吸収できる材料であることが好ましい。 保護材 6、 16、 17としてゴム、シリコーン、その他各種榭脂等の振動吸収材を用いる ことができる。  [0031] The base 3 and the side plates 14 and 15 may be made of a non-metallic material such as non-ferrous metal such as aluminum as long as it can secure the strength to support the glass substrate 4. The protective material 6, 16, 17 is preferably a material that can efficiently absorb, for example, a vibration frequency of 8 to 20 Hz in consideration of the frequency generated in the vehicle (or airplane) itself during land transportation or air transportation. . As the protective materials 6, 16, and 17, vibration absorbing materials such as rubber, silicone, and various types of resin can be used.
[0032] 上蓋 2は、下面が開口されていて、積載された板状体 4の外側を上から囲うものであ り、図 1に示すように、 4枚の側カバー 12と天カバー 13とにより構成され、内部にガラ ス基板 4を収納するための内部空間 Sが画成されている。この 4枚の側カバー 12、天 カバー 13と台座 3の上張り材 5とによって、内部空間 Sに塵埃等の異物が侵入するの を防止している。側カバー 12と天カバー 13は鋼材を用いてもよいが、上蓋 2は取り付 け、取り外す必要があるので、軽量である方が好ましい。よって、上蓋 2の枠部のみを 鋼材とし、側カバー 12と天カバー 13は榭脂製のフィルム若しくは板状体であることが 好ましい。  [0032] The upper lid 2 has an opening on the lower surface and surrounds the outside of the loaded plate-like body 4 from above. As shown in Fig. 1, four side covers 12, a top cover 13 and An internal space S for accommodating the glass substrate 4 is defined. The four side covers 12, the top cover 13, and the upper material 5 of the pedestal 3 prevent foreign matters such as dust from entering the internal space S. The side cover 12 and the top cover 13 may be made of steel, but the upper lid 2 needs to be attached and removed, so it is preferable that the cover is light. Therefore, it is preferable that only the frame portion of the upper lid 2 is made of steel, and the side cover 12 and the top cover 13 are made of a resin film or a plate-like body.
[0033] パレット 1は、フォークリフト、トラック、飛行機等により目的地へと輸送される。したが つて、搬送の際にパレット 1内で個々のガラス基板 4が移動しないようにガラス基板 4 が押圧部材 7によって押圧されて 、る。 [0033] The pallet 1 is transported to a destination by a forklift, a truck, an airplane or the like. But Therefore, the glass substrate 4 is pressed by the pressing member 7 so that the individual glass substrates 4 do not move in the pallet 1 during the conveyance.
[0034] この押圧部材 7によって、搬送の際にパレット 1内で個々の各ガラス基板 4が移動す ることがないので、ガラス基板 1に欠け、瑕、割れなどの欠陥が生じることはなぐまた[0034] Because the pressing member 7 does not move the individual glass substrates 4 in the pallet 1 during the conveyance, the glass substrate 1 is free from defects such as chips, wrinkles, and cracks.
、後工程におけるガラス基板 4の取り出しが容易になる。 The glass substrate 4 can be easily taken out in the subsequent process.
[0035] 台座 3には、フォークリフト (図示せず)のフォークを受け入れるためのフォークリフト 用穴 11が 1つの形鋼枠材にっき例えば 2つ形成される。これにより、ノ《レット 1に対し ては、台座 3の縦横 、ずれの方向力ももフォークリフトのフォークを受け入れることが できる。 [0035] For example, two forklift holes 11 for receiving a fork of a forklift (not shown) are formed in the base 3 in one shape steel frame member. As a result, the fork of the forklift can be received with respect to the knot << let 1 both in the vertical and horizontal directions and in the direction of displacement of the pedestal 3.
[0036] なお、このパレット 1に収納することが好適なガラス基板 4は、板厚が 0. 4mmから 1 . 3mmであり、縦横力約 1800mm X 2000mm〜2400mmX 2800mmの大型ガラ ス基板である。また、パレット 1内への平積みにあたっては、ガラス基板 4同士が直接 接触することを避けるために、ガラス基板 4、 4間に薄い合紙 18を挟んだ状態で積層 される。  It should be noted that the glass substrate 4 suitable to be stored in the pallet 1 is a large glass substrate having a plate thickness of 0.4 mm to 1.3 mm and a longitudinal and lateral force of about 1800 mm × 2000 mm to 2400 mm × 2800 mm. In addition, when stacking in the pallet 1, in order to avoid direct contact between the glass substrates 4, the thin substrates 18 are stacked with the thin interleaf paper 18 sandwiched between the glass substrates 4 and 4.
[0037] 合紙 18は、通気性があり、平滑度 18秒以下 (JIS P 8119, 1976)の粗面を有し 、接触面積を小さくして合紙中の榭脂分が板状体 4に転写されてガラス面に紙肌模 様、焼け、汚れなどが生じないような紙質が好ましい。また合紙 18の榭脂分は、 0. 0 5%以下 (JIS P 8205, 1976)であり、上述した紙面粗さとの複合効果によってガ ラス基板 4自体の品質に悪影響を及ぼさな!/、ような紙質である。  [0037] The interleaf paper 18 is air permeable and has a rough surface with a smoothness of 18 seconds or less (JIS P 8119, 1976). The paper quality is preferably such that it is transferred to the surface of the glass and does not cause paper texture, burns, or smudges. In addition, the grease content of the interleaf paper 18 is 0.05% or less (JIS P 8205, 1976), and the quality of the glass substrate 4 itself is not adversely affected by the combined effect with the paper surface roughness described above! /, It is like paper quality.
[0038] 図 5は、本例のガラス基板用収納装置 (板状体の収納装置) 50の概略平面図であ る。  FIG. 5 is a schematic plan view of the glass substrate storage device (plate-shaped storage device) 50 of this example.
[0039] 同図に示す収納装置 50は、ガラス基板製造窯 (不図示)の下流側に設置されたコ ンベア 52に隣接して設置され、ロボット (搬送手段) 54及びパレット傾斜装置 (傾斜手 段) 56を主体として構成されて 、る。  A storage device 50 shown in the figure is installed adjacent to a conveyor 52 installed downstream of a glass substrate manufacturing kiln (not shown), and includes a robot (conveying means) 54 and a pallet tilting device (tilting hand). Dan) It is composed mainly of 56.
[0040] ロボット 54は、汎用の 6軸多関節ロボットであり、そのアーム 58の先端部には、多数 の吸着パッド (不図示)が面一に配列された矩形状の吸着ハンド 60が連結されてい る。このロボット 54は、合紙 18が載置されたガラス基板 4がコンベア 52の下流側の採 板位置に搬送されてくると、その採板位置まで矢印方向に旋回される。そして、吸着 ハンド 60によってガラス基板 4を合紙 18を介して吸着し、この後、パレット傾斜装置 5 6によって予め所定の角度に傾斜されているパレット 1にガラス基板 4を合紙 18ととも に収納する。 [0040] The robot 54 is a general-purpose six-axis articulated robot, and a rectangular suction hand 60 in which a number of suction pads (not shown) are arranged flush with each other is connected to the tip of the arm 58. ing. When the glass substrate 4 on which the interleaf paper 18 is placed is transported to the sampling position on the downstream side of the conveyor 52, the robot 54 is swung in the arrow direction to the sampling position. And adsorption The glass substrate 4 is adsorbed by the hand 60 through the interleaf paper 18, and thereafter, the glass substrate 4 is stored together with the interleaf paper 18 in the pallet 1 that is previously inclined at a predetermined angle by the pallet inclination device 56.
この動作をロボット 54が繰り返すことにより、ガラス基板 4がー枚ずつパレット 1に収 納されていく。なお、ロボット 54は 6軸多関節ロボットに限らず、専用ロボットでもよぐ 構成、名称にかかわらずガラス板を搬送できればよい。  As the robot 54 repeats this operation, the glass substrates 4 are stored on the pallet 1 one by one. The robot 54 is not limited to a 6-axis articulated robot, and may be a dedicated robot as long as it can transport a glass plate regardless of its configuration and name.
[0041] ところで、パレット 1を水平にした状態でガラス基板 4を一枚ずつパレット 1に収納 (積 層)していくと、先に収納されている最上部のガラス基板 4と、積層されようとする次の ガラス基板 4との間に介在する空気が抜けにくいため、すなわち、ガラス基板 4が大型 であるが故にガラス基板 4、 4間に空気が余計に閉じ込められ易いため、ガラス基板 4 、 4間に残存した少量の空気がエアベアリングの作用を生じさせ、積層されたガラス 基板 4の位置が相互にずれると 、う問題が発生する。ガラス基板 4の位置がずれると 、後工程で自動板取りが困難になるばかりか、大きくずれた場合にはガラス基板 4が ノルット 1の縁部や角部に接触し、欠け、瑕、割れ等の欠陥が生じる。  [0041] By the way, when the glass substrates 4 are stored (stacked) one by one in the pallet 1 with the pallet 1 being horizontal, they are stacked with the uppermost glass substrate 4 stored first. Since the air intervening between the glass substrate 4 and the next glass substrate 4 is difficult to escape, that is, because the glass substrate 4 is large, air is easily trapped between the glass substrates 4 and 4, so that the glass substrate 4 A small amount of air remaining between the four causes the action of an air bearing, and a problem arises when the positions of the laminated glass substrates 4 are shifted from each other. If the position of the glass substrate 4 is shifted, automatic plate cutting becomes difficult in the subsequent process, and if it is greatly shifted, the glass substrate 4 will contact the edges or corners of the Nott 1, causing chipping, wrinkling, cracking, etc. Cause defects.
[0042] そこで、パレット 1を水平面に対して傾斜させていくと、ガラス基板 4、 4間の空気は 次第に抜け易くなり、位置ずれの問題は解消されていく。傾斜角度が大きいほど効 果は高くなる。し力しながら、そもそも平型のパレット 1を傾斜させるということは、傾斜 したパレット 1に所定枚数のガラス基板 4を収納した後、パレット 1を水平姿勢に戻し、 そして、新たな空のパレット 1と交換し、この空のパレット 1を再度傾斜させる、という動 作がパレット交換時において必要になり、傾斜角度が大きいほど時間的なロスが生じ るので効率的ではない。  [0042] Therefore, when the pallet 1 is inclined with respect to the horizontal plane, the air between the glass substrates 4 and 4 becomes easier to escape, and the problem of displacement is solved. The greater the tilt angle, the higher the effect. In the first place, the flat pallet 1 is tilted in the first place. After a predetermined number of glass substrates 4 are stored in the tilted pallet 1, the pallet 1 is returned to the horizontal position, and a new empty pallet 1 The operation of tilting the empty pallet 1 again is necessary at the time of pallet replacement, and the larger the tilt angle, the more time is lost, which is not efficient.
[0043] また、高精細な機能を有する高価なロボットを使用すれば、ガラス基板 4はパレット 1 に位置ずれすることなく収納することができる力 一般的に使用される 6軸多関節の 汎用ロボット 54を使用した場合には、そのまま収納するとロボットの性能限界によりガ ラス基板 4が位置ずれすることは否めな 、。  [0043] Further, if an expensive robot having a high-definition function is used, the glass substrate 4 can be stored in the pallet 1 without being displaced. A commonly used 6-axis multi-joint general-purpose robot When 54 is used, the glass substrate 4 cannot be displaced due to the performance limit of the robot.
[0044] そこで、ガラス基板 4の自重 (重力)を利用してパレット 1の傾斜角度 (姿勢)を制御し 、ガラス基板 4を位置決め位置に向けて滑らすことにより、汎用ロボット 54を使用した 場合でも、ガラス基板 4を位置ずれすることなく収納することができる装置を提供する ことが、装置のコスト削減の観点力 望まれる。この場合、先にも説明したが、ノ レット[0044] Therefore, even when the general-purpose robot 54 is used by controlling the inclination angle (posture) of the pallet 1 using its own weight (gravity) of the glass substrate 4 and sliding the glass substrate 4 toward the positioning position. A device capable of storing the glass substrate 4 without being displaced is provided. Therefore, it is desirable to reduce the cost of equipment. In this case, as previously explained,
1の傾斜角度を不用意に大きく設定すると、パレット交換時に時間的なロスが生じる ので好ましくない。 If the tilt angle of 1 is inadvertently set large, it is not preferable because a time loss occurs when changing the pallet.
[0045] 本例のガラス基板用収納装置 50によれば、パレット傾斜装置 56は、図 6 (A)で示 すように、位置決め部材 15をパレット 1の下方に位置させて、上張り材 5と水平面 Hと のなす角度力 0度以上となるようにパレット 1を、軸 62を中心に傾斜させるとともに、 図 6 (B)で示すように、位置決め部材 15と水平面とのなす角度が 10度以上となるよう に、パレット 1の上張り材 5の面に直交する軸 64を中心に回動させてパレット 1を傾斜 させる。そして、図 5に示したロボット 54力 その傾斜姿勢のパレット 1に、ガラス基板 4 を一枚ずつ搬送し収納する。  [0045] According to the glass substrate storage device 50 of the present example, the pallet tilting device 56 places the positioning member 15 below the pallet 1 as shown in FIG. The pallet 1 is tilted around the axis 62 so that the angular force between the horizontal plane H and the horizontal plane H is 0 degree or more, and the angle between the positioning member 15 and the horizontal plane is 10 degrees as shown in Fig. 6 (B). As described above, the pallet 1 is tilted by rotating around the shaft 64 orthogonal to the surface of the upper material 5 of the pallet 1. Then, the robot 54 shown in FIG. 5 transports and stores the glass substrates 4 one by one on the pallet 1 in the inclined posture.
[0046] パレット 1の水平面 Hとのなす角度が 40度未満の場合には、上述した空気抜きの問 題が改善されず、 40度以上となると飛躍的に改善できる。この角度は、 40度以上で あれば特に限定されないが、その角度が大きくなるに従って前述したパレット交換時 間が長くなることから 40度〜 50度に設定することが好ましい。なお、角度の上限は、 ノルット 1に収納されたガラス基板 4に橈みを発生させない観点力も 72度程度が好ま しい。  [0046] When the angle formed with the horizontal plane H of the pallet 1 is less than 40 degrees, the above-described problem of air venting is not improved, and when it exceeds 40 degrees, it can be drastically improved. This angle is not particularly limited as long as it is 40 degrees or more, but it is preferable to set it to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases. The upper limit of the angle is preferably about 72 degrees from the viewpoint of preventing stagnation in the glass substrate 4 housed in the nott 1.
[0047] また、軸 64を中心に回動させてパレットを 10度以上傾斜させると、図 6 (A)に示す 4 0度以上の傾斜と相まって、図 6 (C)で示すように、ガラス基板 4の自重によりガラス基 板 4の下辺部 4Aが保護材 17のクラフト紙上を矢印 A方向に滑り、ガラス基板 4の縦 辺 4Bが保護材 16に当接する。これにより、ガラス基板 4の水平方向(板面方向)にお ける位置が位置決めされ、ガラス基板 4がパレット 1上の所定の位置に位置決めされ る。  [0047] Further, when the pallet is tilted by 10 degrees or more by rotating around the shaft 64, the glass as shown in FIG. 6 (C) is coupled with the tilt of 40 degrees or more shown in FIG. 6 (A). Due to the weight of the substrate 4, the lower side 4 A of the glass substrate 4 slides on the kraft paper of the protective material 17 in the direction of arrow A, and the vertical side 4 B of the glass substrate 4 contacts the protective material 16. Thereby, the position of the glass substrate 4 in the horizontal direction (plate surface direction) is positioned, and the glass substrate 4 is positioned at a predetermined position on the pallet 1.
[0048] パレット 1の位置決め部材 15と水平面との傾斜角度が 10度未満であると、ガラス基 板 4に滑りが生じに《なる。また、その傾斜角度を大きくするに従って位置決め時間 は短縮するが、前述の如くパレット交換時間が長くなるので、 10度から 20度が好適 である。したがって、本例のガラス基板用収納装置 50によれば、台座 3の水平面 Hと のなす角度力 0度以上となるようにパレット 1を傾斜させるとともに、パレット 1の上張 り材 5の面に直交する軸 64を中心に回動させてパレット 1を 10度以上傾斜させ、その 傾斜姿勢のパレット 1に、ガラス基板 4を一枚ずつ搬送し収納するので、大型のガラス 基板 4を、パレット 1に一枚ずつ良好に収納することができる。その際、ガラス基板 4と ガラス基板 4の間に合紙があると、ガラス基板 4、 4間の摩擦抵抗が低くなり、また側板 14、 15に固定されたガラス基板 4の保護材 16、 17にガラス端面滑動用部材 19、 20 が貼り付けられていると、ガラス端面滑動用部材 19、 20とガラス基板 4の端面との間 の摩擦抵抗が低くなり、より良好に収納ができる。 [0048] If the inclination angle between the positioning member 15 of the pallet 1 and the horizontal plane is less than 10 degrees, the glass substrate 4 will slip. In addition, the positioning time is shortened as the inclination angle is increased. However, as described above, the pallet replacement time is lengthened, so 10 to 20 degrees is preferable. Therefore, according to the glass substrate storage device 50 of the present example, the pallet 1 is inclined so that the angular force formed with the horizontal surface H of the base 3 is 0 degree or more, and the pallet 1 is placed on the surface of the upper covering material 5. Rotate around the orthogonal axis 64 and tilt the pallet 1 more than 10 degrees. Since the glass substrates 4 are transported and stored one by one in the inclined pallet 1, the large glass substrates 4 can be satisfactorily stored in the pallet 1 one by one. At that time, if there is an interleaf between the glass substrate 4 and the glass substrate 4, the frictional resistance between the glass substrates 4 and 4 becomes low, and the protective material 16 and 17 for the glass substrate 4 fixed to the side plates 14 and 15 If the glass end surface sliding members 19 and 20 are attached to the glass end surface, the frictional resistance between the glass end surface sliding members 19 and 20 and the end surface of the glass substrate 4 is reduced, so that the glass can be stored better.
[0049] 図 7は、パレット傾斜装置 56のうち、パレット 1をパレット 1の台座 3と水平面 Hとのな す角度が 40度以上に傾斜させる第 1の傾斜装置 70の概略構造図であり、図 8は、パ レット傾斜装置 56のうち、パレット 1の上張り材 5の面に直交する軸 64を中心に回動 させてパレット 1を 10度以上傾斜させる第 2の傾斜装置 80の概略構造図である。  [0049] FIG. 7 is a schematic structural diagram of a first tilting device 70 in the pallet tilting device 56 that tilts the pallet 1 so that the angle between the base 3 of the pallet 1 and the horizontal plane H is 40 degrees or more. FIG. 8 shows a schematic structure of the second tilting device 80 of the pallet tilting device 56, which rotates the pallet 1 by 10 degrees or more by rotating it around an axis 64 orthogonal to the surface of the upper material 5 of the pallet 1. FIG.
[0050] 図 7に示す第 1の傾斜装置 70によれば、テーブル 72には上蓋 2が外されたパレット 1が載置され、このテーブル 72は、軸 62を介して揺動(起伏)自在に設けられるととも に、このテーブル 72にシリンダ装置 74のピストン 76が連結される。ピストン 76が伸縮 されるとテーブル 72が軸 62を中心に起伏され、これによつてパレット 1の姿勢を、前 記 40度以上に傾斜した位置と水平状態の位置との間で変更することができる。  According to the first tilting device 70 shown in FIG. 7, the pallet 1 with the upper lid 2 removed is placed on the table 72, and the table 72 can swing (raise and lower) via the shaft 62. And the piston 76 of the cylinder device 74 is connected to the table 72. When the piston 76 is expanded and contracted, the table 72 is raised and lowered around the shaft 62, which can change the posture of the pallet 1 between the position tilted more than 40 degrees and the horizontal position. it can.
[0051] 図 8に示す第 2の傾斜装置 80によれば、パレット 1が載置されるテーブル 72が、軸 64を介して揺動自在に設けられるとともに、このテーブル 72の縁部にシリンダ装置 8 2のピストン 84がブラケット 86を介して連結される。ピストン 84が伸縮されるとテープ ル 72が軸 64を介して揺動され、これによつてパレット 1の姿勢を、前記 10度以上に 傾斜した位置に調整することができる。なお、本例では傾斜装置にシリンダを例示し たが、モータ駆動でもよぐパレット 1を傾斜させることができればどのような機構でもよ い。  [0051] According to the second tilting device 80 shown in FIG. 8, the table 72 on which the pallet 1 is placed is provided so as to be swingable via the shaft 64, and the cylinder device is provided at the edge of the table 72. 8 Two pistons 84 are connected via a bracket 86. When the piston 84 is expanded and contracted, the table 72 is swung through the shaft 64, whereby the posture of the pallet 1 can be adjusted to a position inclined by 10 degrees or more. In this example, the cylinder is exemplified as the tilting device. However, any mechanism may be used as long as the pallet 1 can be tilted by motor drive.
[0052] 本例では、収納対象板状体として、ガラス基板 4につ ヽて述べたが、榭脂板、金属 板等の板状体にっ 、ても適用できる。  In this example, the glass substrate 4 has been described as the plate to be stored, but it can also be applied to a plate such as a resin plate or a metal plate.
産業上の利用可能性  Industrial applicability
[0053] 本発明は、特に液晶ディスプレイやプラズマディスプレイ等のフラットパネルデイス プレイ用の大型ガラス基板やその製造過程における中間製品の大型ガラス基板をパ レットに収納するのに好適である。 なお、 2006年 7月 21曰に出願された曰本特許出願 2006— 199418の明細書、 特許請求の範囲、図面及び要約書の全内容をここに引用し、本発明の明細書の開 示として、取り入れるものである。 The present invention is particularly suitable for storing in a pallet a large glass substrate for a flat panel display such as a liquid crystal display or a plasma display, or a large glass substrate which is an intermediate product in the manufacturing process. It should be noted that the entire contents of the specification, claims, drawings and abstract of the Japanese Patent Application 2006-199418 filed on July 21, 2006 are cited here as disclosure of the specification of the present invention. Incorporate.

Claims

請求の範囲 The scope of the claims
[1] 矩形状の板状体をパレットに一枚ずつ収納する板状体の収納方法にぉ 、て、 前記パレットは、板状体が積層される上張り材と該上張り材に固定され L型に配置し た 2辺の位置決め部材とを備えた台座を有し、  [1] According to a method of storing a plate-like body in which rectangular plate-like bodies are stored one by one in a pallet, the pallet is fixed to the upper material on which the plate-like bodies are laminated and the upper material. It has a pedestal with two side positioning members arranged in an L shape,
前記位置決め部材の第 1の辺をパレットの下方に位置させて、前記上張り材と水平 面とのなす角度が 40度以上となるように前記パレットを傾斜させるとともに、前記位置 決め部材の第 1の辺と水平面とのなす角度が 10度以上となるように前記パレットを傾 斜させ、この傾斜姿勢のパレットに板状体を一枚ずつ収納することを特徴とする板状 体の収納方法。  The first side of the positioning member is positioned below the pallet, the pallet is tilted so that the angle between the upper material and the horizontal surface is 40 degrees or more, and the first of the positioning member is The plate-like body is stored by tilting the pallet so that the angle between the side and the horizontal plane is 10 degrees or more, and storing the plate-like bodies one by one in the inclined pallet.
[2] 前記パレットに収納された前記板状体は、パレットの傾斜配置により重力で滑動し て板状体の辺部が前記位置決め部材に当接することにより、パレットの所定の位置 に位置決めされることを特徴とする請求項 1に記載の板状体の収納方法。  [2] The plate-like body stored in the pallet is slid by gravity due to the inclined arrangement of the pallet, and the side portion of the plate-like body abuts on the positioning member, thereby being positioned at a predetermined position of the pallet. The method for storing a plate-like body according to claim 1.
[3] 矩形状の板状体をパレットの台座の上張り材に一枚ずつ収納する板状体の収納装 ¾【こ; i l /、て、  [3] A plate-shaped storage device that stores rectangular plate-like materials one by one on the pallet pedestal, ¾ [this; i l /,
前記パレットを傾斜配置させる第 1と第 2の傾斜手段と、  First and second tilting means for tilting the pallet;
前記傾斜手段により傾斜配置された前記パレットの上張り材に、板状体を一枚ずつ 搬送して収納する搬送手段とを有し、  Transporting means for transporting and storing the plate-like bodies one by one on the pallet overlay arranged by the tilting means;
前記上張り材には、前記板状体をパレットの所定の位置に位置決めする、 L型に配 置された 2辺の位置決め部材が固定され、  A positioning member with two sides arranged in an L shape for positioning the plate-like body at a predetermined position on the pallet is fixed to the upper material,
前記第 1の傾斜手段は、前記位置決め部材の第 1の辺をパレットの下方に位置させ て、前記上張り材と水平面とのなす角度が 40度以上となるようにパレットを傾斜させる とともに、前記第 2の傾斜手段は、前記位置決め部材の第 1の辺と水平面とのなす角 度が 10度以上となるようにパレットを傾斜させることを特徴とする板状体の収納装置。  The first tilting means tilts the pallet so that the first side of the positioning member is positioned below the pallet and the angle between the upper material and the horizontal plane is 40 degrees or more. The second tilting means tilts the pallet so that the angle formed by the first side of the positioning member and the horizontal plane is 10 degrees or more.
PCT/JP2007/061489 2006-07-21 2007-06-06 Method and apparatus for storing board-shaped body WO2008010358A1 (en)

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