WO2007131609A3 - Fast double scanner for high-speed profilometer - Google Patents

Fast double scanner for high-speed profilometer Download PDF

Info

Publication number
WO2007131609A3
WO2007131609A3 PCT/EP2007/003743 EP2007003743W WO2007131609A3 WO 2007131609 A3 WO2007131609 A3 WO 2007131609A3 EP 2007003743 W EP2007003743 W EP 2007003743W WO 2007131609 A3 WO2007131609 A3 WO 2007131609A3
Authority
WO
WIPO (PCT)
Prior art keywords
housing part
deflection device
rotation
profilometer
speed
Prior art date
Application number
PCT/EP2007/003743
Other languages
German (de)
French (fr)
Other versions
WO2007131609A2 (en
Inventor
Harald Woelfelschneider
Original Assignee
Fraunhofer Ges Forschung
Harald Woelfelschneider
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Harald Woelfelschneider filed Critical Fraunhofer Ges Forschung
Publication of WO2007131609A2 publication Critical patent/WO2007131609A2/en
Publication of WO2007131609A3 publication Critical patent/WO2007131609A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging

Abstract

The invention relates to a scanning apparatus (1) for the contour measurement of objects, in particular of structure clearances, comprising at least one light source and at least one deflection device (2), which deflection device (2) is arranged in a housing part (3) that can be rotated about an axis of rotation, and which deflection device directs a scanning beam coming from the light source as transmission beam (6) onto an object to be measured and directs light components reflected from the object as reception beam (10) in the direction of a detector of a recording device. For operating the scanning apparatus with reduced losses, wear and disturbances, it is provided that the housing part (3) is arranged fixedly in terms of rotation on a supporting member (4), which reaches through said housing part along the axis of rotation and is mounted outside the housing part, and that the supporting member (4) is provided with a separate deflection device (5) for the transmission beam (6).
PCT/EP2007/003743 2006-05-12 2007-04-27 Fast double scanner for high-speed profilometer WO2007131609A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006022733A DE102006022733A1 (en) 2006-05-12 2006-05-12 Fast double scanner for high speed profilometer
DE102006022733.6 2006-05-12

Publications (2)

Publication Number Publication Date
WO2007131609A2 WO2007131609A2 (en) 2007-11-22
WO2007131609A3 true WO2007131609A3 (en) 2008-01-24

Family

ID=38580130

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/003743 WO2007131609A2 (en) 2006-05-12 2007-04-27 Fast double scanner for high-speed profilometer

Country Status (2)

Country Link
DE (1) DE102006022733A1 (en)
WO (1) WO2007131609A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4315077A1 (en) * 1992-05-13 1993-11-18 Aerospatiale Optical transmission and reception scanning arrangement - contains deflection mirror in aperture in scanning mirror on primary beam emission axis coincident with telescope axis
DE4222659A1 (en) * 1992-07-10 1994-01-13 Deutsche Aerospace Optical scanner for range finder for obstruction warning esp. for driverless transport system - has fixed and coaxial emitters and receiver, and rotating optical system located in mirrored box and consisting of lenses and inclined mirrors which focus received beam on axis where receiver is located
DE4412044A1 (en) * 1994-04-08 1995-10-12 Leuze Electronic Gmbh & Co Opto-electronic system for detecting objects in monitoring region
DE19902903C1 (en) * 1999-01-26 2000-05-31 Schmersal Eot Gmbh & Co Kg Arrangement for locating object entering monitored space has light scattering test zone on reception mirror outside effective zone for received light to deflect part of incident light to receiver
WO2005050129A2 (en) * 2003-11-21 2005-06-02 Riegl Laser Measurement Systems Gmbh System for recording an object space

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH645981A5 (en) * 1980-04-08 1984-10-31 Amberg Ingenieurbuero Ag Device for surveying cross-sectional profiles in cavity constructions and method for operating it
US4655541A (en) * 1983-11-30 1987-04-07 Fujitsu Limited Hologram scanner
US5455669A (en) * 1992-12-08 1995-10-03 Erwin Sick Gmbh Optik-Elektronik Laser range finding apparatus
DE19928957A1 (en) * 1999-05-22 2000-11-23 Volkswagen Ag Receiving device for a laser scanner
DE10304188A1 (en) * 2003-01-29 2004-08-19 Iqsun Gmbh Three-dimensional scanner has rotor consisting at least partly of transparent material and multiple parts and inclined rotatable mirror in form of mirroring on surface of rotor part
DE10304187A1 (en) * 2003-01-29 2004-08-19 Iqsun Gmbh 3D scanner
JP3875665B2 (en) * 2003-07-31 2007-01-31 北陽電機株式会社 Scanning range sensor
DE102004033928B4 (en) * 2004-07-14 2007-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Scanning device for measuring the contours of an object

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4315077A1 (en) * 1992-05-13 1993-11-18 Aerospatiale Optical transmission and reception scanning arrangement - contains deflection mirror in aperture in scanning mirror on primary beam emission axis coincident with telescope axis
DE4222659A1 (en) * 1992-07-10 1994-01-13 Deutsche Aerospace Optical scanner for range finder for obstruction warning esp. for driverless transport system - has fixed and coaxial emitters and receiver, and rotating optical system located in mirrored box and consisting of lenses and inclined mirrors which focus received beam on axis where receiver is located
DE4412044A1 (en) * 1994-04-08 1995-10-12 Leuze Electronic Gmbh & Co Opto-electronic system for detecting objects in monitoring region
DE19902903C1 (en) * 1999-01-26 2000-05-31 Schmersal Eot Gmbh & Co Kg Arrangement for locating object entering monitored space has light scattering test zone on reception mirror outside effective zone for received light to deflect part of incident light to receiver
WO2005050129A2 (en) * 2003-11-21 2005-06-02 Riegl Laser Measurement Systems Gmbh System for recording an object space

Also Published As

Publication number Publication date
DE102006022733A1 (en) 2007-11-15
WO2007131609A2 (en) 2007-11-22

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