WO2007131609A2 - Fast double scanner for high-speed profilometer - Google Patents

Fast double scanner for high-speed profilometer Download PDF

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Publication number
WO2007131609A2
WO2007131609A2 PCT/EP2007/003743 EP2007003743W WO2007131609A2 WO 2007131609 A2 WO2007131609 A2 WO 2007131609A2 EP 2007003743 W EP2007003743 W EP 2007003743W WO 2007131609 A2 WO2007131609 A2 WO 2007131609A2
Authority
WO
WIPO (PCT)
Prior art keywords
scanning device
housing part
support member
scanning
deflection
Prior art date
Application number
PCT/EP2007/003743
Other languages
German (de)
French (fr)
Other versions
WO2007131609A3 (en
Inventor
Harald WÖLFELSCHNEIDER
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO2007131609A2 publication Critical patent/WO2007131609A2/en
Publication of WO2007131609A3 publication Critical patent/WO2007131609A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging

Definitions

  • the invention relates to a scanning device for contour measurement of objects, in particular of clearance profiles, with at least one light source and at least one deflector, which deflecting device is arranged in a housing part rotatable about a rotation axis and which directs a coming of the light source scanning beam as a transmission beam to an object to be measured and directs reflected light from the object as a receiving beam in the direction of a detector of a receiving device.
  • Such a scanning device is known for example from DE 10 2004 033 928 A1.
  • the known scanning device describes an arrangement with a deflection device housed in a rotatable housing part in the form of a mirror, in which the transmitted transmission beams have been doubled by bilateral use of the deflection device, whereby a double number of measuring points can be detected with the same measuring time and rotational speed.
  • the previously known scanning device is also subject to certain disadvantages.
  • the rotation of the housing part requires a relatively large and therefore expensive storage, since it must be designed to be larger than the aperture of the optics of the scanning device in order to shade non-essential parts of the collected stray light.
  • the mentioned storage is also subject by the high peripheral speeds of the housing part a strong wear, resulting in a short life, also cause this storage a high loss line and make certain demands on the drive to be used.
  • a further problem is caused by the relatively thick deflector arranged in the housing part, in which the inserted mirror can bend at high speeds and also causes a beam offset of the transmission beam.
  • a scanning device of the type mentioned in which the housing part is rotatably disposed on a support member passing through this along the axis of rotation, mounted outside of the housing part and in which the support member provided with a separate deflection for the transmission beam is. Due to the rotationally fixed arrangement of the housing part on the support member, both parts are moved together when acted upon by a drive force of at least one of these parts, wherein the dimension of the housing part has no influence on the size of the bearing due to the bearing of the support member and therefore also inexpensive, small bearings with a long service life and low power loss can be used. The simultaneously possibly even higher numbers of revolutions allow either an improved spatial resolution of the measurement process or a faster implementation of the measurement with the same resolution.
  • a separate deflection device for the transmission beam makes it possible to separate the light paths of the transmitting and receiving beams of the scanning device and thus to reduce the influence of interference signals on the receiving optics.
  • a separate deflection device with a smaller beam offset can be used which, moreover, since the bending of the at least one deflection device caused by centrifugal forces no longer has any influence, also has a smaller beam deflection.
  • the cost of the wedge correction is reduced.
  • the inventive Sampling device that can be operated as a so-called double scanner particularly advantageous with two in different, especially opposite directions of the scanning away emitted scanning beams, which may be generated by one or more light sources, further possibilities of drive design.
  • the support member is formed as a shaft with an opening extending substantially along the longitudinal axis of the shaft, in particular as a hollow shaft, since this allows a particularly effective decoupling of the light paths of the transmitting and receiving beam.
  • the transmission beam in this case runs m the opening of the support member and meets there on the separate deflection, so that are directed by the transmission beam substantially no or only small interference components in the direction of the detector as scattered light.
  • the simplest possible construction of the device and the least possible deflection of the backscattered by the object to be measured light in the direction of the detector is achieved in a development of the scanning that the preferably integrally formed support member engages through an opening arranged on the at least one deflection device.
  • An expedient development of the scanning device according to the invention with an independent of the cross section of the support member and the dimensions of the separate deflecting storage can be realized that the support organ provided with a modified, preferably reduced cross-section, end portions which are received by bearings.
  • the bearing located at the bearings can be in basically any, the rotational movement of stock type, for example, as a ball or roller bearings, be formed.
  • a favorable storage of the scanning device, for example, on the means necessary for the translational movement means of transport can be achieved when the bearings are arranged m these supporting, translucent wall elements.
  • the wall elements in turn serve to encapsulate the scanning device as protection against environmental influences. But there are also other place for the arrangement of the bearings conceivable.
  • the support member has at its located within the housing portion a transversely to the longitudinal axis arranged, preferably cylindrical, passage opening, in which the separate deflection device is arranged for the transmission beam, as so the one or more transmitted beams initially undisturbed the separate deflection and then optimally m direction can be directed to the objects to be measured.
  • the separate deflection device is particularly preferably accommodated completely in the passage opening, so that the light path of the backscattered receive beams does not undergo additional shadowing.
  • the deflection device as a mirror, beam splitter prism or like the transmission path changing device is provided.
  • the surfaces formed by the at least one deflecting device and the separate deflecting device are arranged in parallel ,
  • the Verbmdungsetti may be formed for example of a translucent, for example, transparent material such as plastic or glass or by spoke-like elements that cause only a minimum level of shading of the light components.
  • a particularly stable, the centrifugal forces of the rotary motion well counteracting arrangement of the scanning results in an embodiment thereof, in which provided for the deflection of the receiving beams or, at least one deflector is connected to the housing part and the support member, for example by articulation of the respective Part of adjacent end areas.
  • the connection of the at least one deflecting device to the housing part is not absolutely necessary, but rather are also embodiments. conceivable forms in which this deflector is provided with additional support members only connected to the support member, while their end portion remote from the support member to a certain extent freely rotate. However, these support members must then again take into account a possible shadowing of the light path of the receiving beam by shaping or choice of material.
  • the deflection with at least one, preferably with at least one adjusting element, for example in the form of screws, so that the baffles with little effort in itself, for example by temperature influences, changing environmental conditions are well adjusted.
  • An expedient development of the scanning device according to the invention may consist in that the support member and / or the housing part are provided with a drive device which mediates a rotational drive force directly or via a transmission member.
  • a stator can be arranged as a rotor for a direct drive both on the support member and on the housing part, but it is also conceivable to drive by means of a belt acting on one of the rotatable parts as a transfer member.
  • the recording device is provided with an encoder and / or a control and evaluation unit.
  • the encoder is preferably provided with a reading unit, which process information of one of the rotatable parts of the arrangement and at the same time can trigger the data acquisition via the control unit.
  • this light source can be designed as a laser light source, which is particularly suitable for modulation when used in pulse transit time and / or phase transit time method.
  • FIG. 1 shows a sectional side view of a scanning device according to the invention with a arranged on a support member housing part.
  • FIG. 2 is a sectional end view of the scanning device of Fig.1
  • a scanning device designated as a whole by 1 can be recognized for measuring the contour of objects.
  • This has a laser, not shown, as a light source, by means of which two transmit beams 6 are generated and m coupled to the beam path.
  • a deflection device 2 m is arranged in the form of a mirror which reflects light components backscattered from objects to be measured as receiving beams m in direction nes detector, not shown, directs a receiving device.
  • receive beams 10 of one of the two transmitted beams m deflected in opposite directions 6 m of FIG. 1 can be seen.
  • the housing part 3 is rotatably mounted on a support member 4 which extends through the axis of rotation and extends outside the housing part 3.
  • the support member 4 is also provided with a beam splitter prism as a separate deflection device 5 for the transmission beam 6.
  • the cylindrical housing part 3 with a smaller cross-section than this and the deflector 2 forming mirror on a recess 20 by cross-supporting member 4 is formed as a hollow shaft which has an aperture of the transmitting beam opening 7, which along the longitudinal axis of the support member 4th runs.
  • the transmission beams 6 are coupled into the opening 7 and run in the direction of the separate deflection device 5, where they are deflected in the direction of the object to be measured (not shown), whereby a complete separation of the light paths of the transmitted and received beams is achieved, so that none or only very small stray light components of the transmitted beams are directed 6 m in the direction of the detector.
  • the deflection device 2 is connected to the housing part 3 and the support member 4.
  • the transmission beams 6 are deflected and leave by a cylindrical, arranged transversely to the longitudinal axis of the support member 4 passage opening 8, first the support member 4 and then via a likewise cylindrical passage opening 9, the housing part 3. After backscattering the object to be measured enter the receiving beams 10 via the passage opening 9 again m the housing part 3, where they deflected by the deflector 2, in the direction of the detector.
  • the support member 4 has m m its end portions a reduced cross section and is accommodated in these areas located outside of the housing part 3 bearings 11, whereby a rotation of the composite of support member 4 and housing part 3, which is also called mirror head due to the deflection 2, 5 is possible.
  • the mentioned bearings 11 are arranged on them, translucent, also bearing plates said wall elements 12 are arranged, which form part of the encapsulation of the scanning device 1, which is attached to protect them from environmental influences. Due to their permeability to light, the receiving beams 10 can pass through the wall elements 12 practically unhindered, after they have previously passed the likewise translucent connecting elements 13, which are arranged between the support member 4 and the housing part 3 and form the end walls of the housing part 3.
  • the connecting elements 13 through which the receiving beams 10 leave the housing part m in the direction of the detector thus form the aperture of the receiving beams 10.
  • FIG. 2 shows a schematic end view of the scanning device 1 with an outer housing 18 as encapsulation of the scanning device, in which the observer looks at the beam direction of the transmitting beam 6 (not shown).
  • the end faces of the support member 4 designed as a hollow shaft, whose end portion is received by a bearing at the bearing point 11 and whose opening 7 forms the light path of the transmission beam 6, not shown.
  • the cylindrical housing part 3 is shown, which is connected via the translucent connecting elements 13 with the support member 4.
  • the shaded area m of Figure 2 schematically illustrates the shading caused by the support member 19 of the receiving beam 10, ie the area of the deflector 2, m by the shadow of the support member 4 of the receiving beam 10 does not fall on the deflector 2 and from there can be deflected further m direction of the detector.
  • the invention described above thus relates to a scanning device 1 for measuring the contour of objects, in particular Lichtraumprofllen, with at least one light source and at least one deflector 2, which deflector 2 m arranged around a rotation axis housing part 3 is arranged and which one coming from the light source Scanning beam as the transmitting beam 6 directs to an object to be measured and deflected by the object light components as a receiving beam 10 m direction of a detector of a recording device.
  • the housing part 3 on a scanning device 1 according to the invention is passed along this axis of rotation. gripping, mounted outside of the housing part 3 support member 4 rotatably disposed and the Stitzorgan4 provided with a separate deflection 5 for the transmission beam 6.

Abstract

The invention relates to a scanning apparatus (1) for the contour measurement of objects, in particular of structure clearances, comprising at least one light source and at least one deflection device (2), which deflection device (2) is arranged in a housing part (3) that can be rotated about an axis of rotation, and which deflection device directs a scanning beam coming from the light source as transmission beam (6) onto an object to be measured and directs light components reflected from the object as reception beam (10) in the direction of a detector of a recording device. For operating the scanning apparatus with reduced losses, wear and disturbances, it is provided that the housing part (3) is arranged fixedly in terms of rotation on a supporting member (4), which reaches through said housing part along the axis of rotation and is mounted outside the housing part, and that the supporting member (4) is provided with a separate deflection device (5) for the transmission beam (6).

Description

Schneller Doppelscanner für Hochgeschwindigkeitsprofilometer Fast double scanner for high speed profilometer
Die Erfindung betrifft eine Abtastvorrichtung zur Konturvermessung von Objekten, insbesondere von Lichtraumprofilen, mit mindestens einer Lichtquelle und mindestens einer Ablenkeinrichtung, welche Ablenkeinrichtung in einem um eine Rotationsachse drehbaren Gehäuseteil angeordnet ist und welche einen von der Lichtquelle kommenden Abtaststrahl als Sendestrahl auf ein zu vermessendes Objekt lenkt und von dem Objekt reflektierte Lichtanteile als Empfangsstrahl in Richtung eines Detektors einer Aufnahmeeinrichtung lenkt.The invention relates to a scanning device for contour measurement of objects, in particular of clearance profiles, with at least one light source and at least one deflector, which deflecting device is arranged in a housing part rotatable about a rotation axis and which directs a coming of the light source scanning beam as a transmission beam to an object to be measured and directs reflected light from the object as a receiving beam in the direction of a detector of a receiving device.
Vermessungen von Konturen, insbesondere von Profilen von lichten Räumen, beispielsweise von Tunnels gleisgebundener Fahrzeuge werden heutzutage vermehrt mit Hilfe sogenannter Profilometer durchgeführt, bei welchen eine Abtastvorrichtung auf einem der betreffenden Fahrzeuge oder einem speziell dafür vorgesehen Fortbewegungsmittel angebracht ist. Dabei werden die Konturen des den Schienenweg umgebenden Hohlraums kontinuierlich dadurch vermessen, dass das betreffende Fahrzeug sich beispielsweise auf dem Schienenweg vorwärts und so im wesentlichen senkrecht zur Orientierung des Sendestrahls der Abtastvorrichtung bewegt. Aufgrund der translatorischen Bewegung des Fortbewegungsmittels und der im Vollkreis erfolgenden Abtastung des Hohlraums mit den Sendestrahlen ergibt sich eine schraubenli- nienförmige Abtastung des Gesamtprofils mit Messpunkten, deren räumliche Auflösung unter anderem von der Geschwindigkeit des Fortbewegungsmittels und der Rotationsgeschwindigkeit der Abtastvorrichtung abhängt. Eine solche Abtastvorrichtung ist beispielsweise aus der DE 10 2004 033 928 A1 bekannt. Die bekannte Abtastvorrxchtung beschreibt dabei eine Anordnung mit einer in einem drehbaren Gehäuseteil untergebrachten Ablenkeinrichtung in Form eines Spiegels, bei welcher die ausge- sandten Sendestrahlen durch beidseitige Nutzung der Ablenkeinrichtung verdoppelt wurde, wodurch bei gleicher Messzeit und Rotationsgeschwindigkeit eine doppelte Anzahl von Messpunkten erfasst werden kann.Surveying of contours, in particular of sections of clear spaces, for example of tunnels of track-bound vehicles, is nowadays increasingly carried out with the aid of so-called profilometers, in which a scanning device is mounted on one of the vehicles in question or a means of transportation specially provided for this purpose. In this case, the contours of the rail surrounding the cavity are continuously measured by the fact that the vehicle in question, for example, on the rail forward and thus moves substantially perpendicular to the orientation of the transmission beam of the scanning device. Due to the translational movement of the means of transportation and the full-circle scanning of the cavity with the transmitted beams results in a helical scan of the overall profile with measuring points whose spatial resolution depends inter alia on the speed of the means of transport and the rotational speed of the scanning device. Such a scanning device is known for example from DE 10 2004 033 928 A1. The known scanning device describes an arrangement with a deflection device housed in a rotatable housing part in the form of a mirror, in which the transmitted transmission beams have been doubled by bilateral use of the deflection device, whereby a double number of measuring points can be detected with the same measuring time and rotational speed.
Die derart vorbekannte Abtastvorrichtung ist allerdings auch mit gewissen Nachteilen behaftet. So erfordert die Rotation des Gehäuseteils eine relativ große und damit teure Lagerung, da diese größer als die Apertur der Optik des Abtastvorrichtung ausgelegt sein muß, um nicht wesentliche Teile des aufzufangen- den Streulichtes abzuschatten. Die erwähnte Lagerung ist zudem durch die hohen Umfangsgeschwindigkeiten des Gehäuseteils einem starken Verschleiß unterworfen, was zu einer kurzen Lebensdauer führt, außerdem verursachen diese Lagerung eine hohe Verlust- leitung und stellen gewisse Anforderungen an den einzusetzenden Antrieb. Em weiteres Problem wird durch die in dem Gehäuseteil angeordnete, relativ dicke Ablenkeinrichtung verursacht, bei welcher sich der eingesetzte Spiegel bei hohen Drehzahlen verbiegen kann und außerdem einen Strahlversatz des Sendestrahls verursacht. Diese wiederum macht einen hohen Aufwand zur soge- nannten Keilkorrektur über einen zu berechnenden und einzustellenden Vorhaltewinkel des Sendestrahls notwendig, überdies besteht durch die gemeinsamen Lichtwege von Sende- und Empfangsstrahlen innerhalb des Gehäuseteils das Risiko eines optischen Übersprechens an der Empfangsoptik des Detektors durch Störsignale aus Streulicht, was insbesondere bei den häufig zum Einsatz kommenden Phasenmessungen zu stark verfälschten Messergebnissen führen kann. Es besteht daher die Aufgabe, eine Abtastvorrichtung zur Verfügung zu stellen, bei welcher mit einfachen Mitteln eine preisgünstige, verlustleistungs- und verschleißarme Lagerung mit erhöhter Laufzeit sichergestellt ist und bei welcher der Einfluss von Störsignalen reduziert ist.However, the previously known scanning device is also subject to certain disadvantages. Thus, the rotation of the housing part requires a relatively large and therefore expensive storage, since it must be designed to be larger than the aperture of the optics of the scanning device in order to shade non-essential parts of the collected stray light. The mentioned storage is also subject by the high peripheral speeds of the housing part a strong wear, resulting in a short life, also cause this storage a high loss line and make certain demands on the drive to be used. A further problem is caused by the relatively thick deflector arranged in the housing part, in which the inserted mirror can bend at high speeds and also causes a beam offset of the transmission beam. This, in turn, requires a high outlay for the so-called wedge correction via a lead angle of the transmit beam to be calculated and set; moreover, the common light paths of transmit and receive beams within the housing part increase the risk of optical crosstalk at the receiver's optics due to interference signals from stray light , which can lead to greatly falsified measurement results, especially in the frequently used phase measurements. It is therefore an object to provide a scanning device available in which a simple, low-loss and low-wear storage with increased transit time is ensured by simple means and in which the influence of interference signals is reduced.
Diese zunächst an sich widersprüchlich erscheinende Aufgabe wird gelöst durch eine Abtastvorrichtung der eingangs genannten Art, bei welcher das Gehäuseteil an einem dieses entlang der Rotationsachse durchgreifenden, außerhalb des Gehäuseteils gelagerten Stützorgan drehfest angeordnet ist und bei welcher das Stützorgan mit einer separaten Ablenkeinrichtung für den Sendestrahl versehen ist. Durch die drehfeste Anordnung des Gehäuseteils an dem Stützorgan werden bei Beaufschlagung mit einer An- triebskraft zumindest des einen dieser Teile beide Teile gemeinsam bewegt, wobei durch die Lagerung des Stützorgans die Dimension des Gehäuseteils keinen Einfluss auf die Größe der Lagerung hat und demnach auch kostengünstige, kleine Lager mit hoher Lebensdauer und geringer Verlustleistung eingesetzt wer- den können. Die gleichzeitig gegebenenfalls auch noch höheren Umdrehungszahlen erlauben entweder eine verbesserte Ortsauflösung des Messvorgangs oder eine schnellere Durchführung der Messung bei gleichbleibender Auflösung. Die Anordnung einer separaten Ablenkeinrichtung für den Sendestrahl erlaubt es, die Lichtwege der Sende- und Empfangsstrahlen der Abtastvorrichtung zu trennen und damit den Einfluss von Störsignalen auf die Empfangsoptik zu reduzieren. Darüber hinaus kann eine separaten Ablenkeinrichtung mit geringerem Strahlversatz eingesetzt werden, die zudem , da die insbesondere durch Fliehkräfte ver- ursachte Verbiegung der mindestens einen Ablenkeinrichtung keinen Einfluss mehr hat, auch eine geringere Strahlablenkung aufweist. Überdies wird der Aufwand für die Keilkorrektur verringert. Schließlich ergeben sich bei der erfindungsgemäßen Abtastvorrichtung, die sich besonders vorteilhaft mit zwei in unterschiedliche, insbesondere entgegensetzte Richtungen von der Abtastvorrichtung weg ausgesandte Sendestrahlen, die gegebenenfalls von einer oder mehreren Lichtquellen erzeugt werden, als sogenannter Doppelscanner betreiben lässt, weitere Möglichkeiten der Antriebsgestaltung.This initially seemingly contradictory object is achieved by a scanning device of the type mentioned, in which the housing part is rotatably disposed on a support member passing through this along the axis of rotation, mounted outside of the housing part and in which the support member provided with a separate deflection for the transmission beam is. Due to the rotationally fixed arrangement of the housing part on the support member, both parts are moved together when acted upon by a drive force of at least one of these parts, wherein the dimension of the housing part has no influence on the size of the bearing due to the bearing of the support member and therefore also inexpensive, small bearings with a long service life and low power loss can be used. The simultaneously possibly even higher numbers of revolutions allow either an improved spatial resolution of the measurement process or a faster implementation of the measurement with the same resolution. The arrangement of a separate deflection device for the transmission beam makes it possible to separate the light paths of the transmitting and receiving beams of the scanning device and thus to reduce the influence of interference signals on the receiving optics. In addition, a separate deflection device with a smaller beam offset can be used which, moreover, since the bending of the at least one deflection device caused by centrifugal forces no longer has any influence, also has a smaller beam deflection. Moreover, the cost of the wedge correction is reduced. Finally, in the inventive Sampling device that can be operated as a so-called double scanner particularly advantageous with two in different, especially opposite directions of the scanning away emitted scanning beams, which may be generated by one or more light sources, further possibilities of drive design.
Eine vorteilhafte Weiterbildung der Abtastvorrichtung kann darin bestehen, dass das Stützorgan als Welle mit einer im we- sentlichen entlang der Längsachse der Welle verlaufenden Öffnung, insbesondere als Hohlwelle, ausgebildet ist, da dies eine besonders effektive Entkopplung der Lichtwege von Sende- und Empfangsstrahl gestattet. Der Sendestrahl verläuft hierbei m der Öffnung des Stützorgans und trifft dort auf die separate Ablenkeinrichtung, so dass von dem Sendestrahl im wesentlichen keine oder nur geringe Störanteile in Richtung des Detektors als Streulicht gelenkt werden.An advantageous development of the scanning device may be that the support member is formed as a shaft with an opening extending substantially along the longitudinal axis of the shaft, in particular as a hollow shaft, since this allows a particularly effective decoupling of the light paths of the transmitting and receiving beam. The transmission beam in this case runs m the opening of the support member and meets there on the separate deflection, so that are directed by the transmission beam substantially no or only small interference components in the direction of the detector as scattered light.
Eine besonders effektive, weil verschleiß- und verlustleistungsarme Lagerung wird bei einer Ausbildung der erfindungsgemäßen Abtastvorrichtung erreicht, bei der das Stützorgan einen geringeren Querschnitt als das, bevorzugt zylindrische, Gehäuseteil aufweist, weil hierdurch sehr kleine und robuste Lager zum Einsatz kommen können.A particularly effective because low wear and low-loss storage is achieved in a design of the scanning device according to the invention, in which the support member has a smaller cross-section than the, preferably cylindrical, housing part, because this very small and robust bearings can be used.
Ein möglichst einfacher Aufbau der Vorrichtung und die möglichst ungehinderte Ablenkung des von dem zu vermessenden Objekt rückgestreuten Lichts in Richtung des Detektors wird bei einer Weiterbildung der Abtastvorrichtung dadurch erreicht, dass das bevorzugt einstückig ausgebildete Stützorgan eine an der mindestens einen Ablenkvorrichtung angeordnete Öffnung durchgreift . Eine zweckmäßige Weiterbildung der erfindungsgemäßen Abtastvorrichtung mit einer von dem Querschnitt des Stützorgans und den Abmessungen der separaten Ablenkeinrichtungen unabhängigen Lagerung kann dadurch realisiert werden, dass das Stütz- organ mit geändertem, vorzugsweise reduziertem Querschnitt versehene, Endbereiche aufweist, welche von Lagerstellen aufgenommen sind. Die an den Lagerstellen befindlichen Lager können in im Grunde beliebiger, die Drehbewegung lagernder Art, beispielsweise als Kugel- oder Rollenlager, ausgebildet sein.The simplest possible construction of the device and the least possible deflection of the backscattered by the object to be measured light in the direction of the detector is achieved in a development of the scanning that the preferably integrally formed support member engages through an opening arranged on the at least one deflection device. An expedient development of the scanning device according to the invention with an independent of the cross section of the support member and the dimensions of the separate deflecting storage can be realized that the support organ provided with a modified, preferably reduced cross-section, end portions which are received by bearings. The bearing located at the bearings can be in basically any, the rotational movement of stock type, for example, as a ball or roller bearings, be formed.
Eine günstige Lagerung der Abtastvorrichtung, beispielsweise an dem für die translatorische Bewegung notwendigen Fortbewegungs- mittel, kann erzielt werden, wenn die Lagerstellen m diese tragenden, lichtdurchlässigen Wandelementen angeordnet sind. Die Wandelemente dienen dabei wiederum der Kapselung der Abtastvorrichtung als Schutz vor Umwelteinflüssen. Es sind aber auch andere Ort zur Anordnung der Lagerstellen denkbar.A favorable storage of the scanning device, for example, on the means necessary for the translational movement means of transport can be achieved when the bearings are arranged m these supporting, translucent wall elements. The wall elements in turn serve to encapsulate the scanning device as protection against environmental influences. But there are also other place for the arrangement of the bearings conceivable.
Bei einer vorteilhaften Ausführungsform der Abtastvorrichtung weist das Stützorgan an seinem innerhalb des Gehäuseteils befindlichen Bereich eine quer zur Längsachse angeordnete, bevorzugt zylindrische, Durchtrittsöffnung auf, in welcher die separate Ablenkeinrichtung für den Sendestrahl angeordnet ist, da so der eine oder die mehreren Sendestrahlen zunächst ungestört zu der separaten Ablenkeinrichtung hin und sodann optimal m Richtung auf die zu vermessenden Objekte geleitet werden können. Besonders bevorzugt ist die separate Ablenkeinrichtung dabei vollständig m der Durchtrittsöffnung aufgenommen, so dass der Lichtweg der rückgestreuten Empfangsstrahlen keine zu- sätzliche Abschattung erfährt.In an advantageous embodiment of the scanning device, the support member has at its located within the housing portion a transversely to the longitudinal axis arranged, preferably cylindrical, passage opening, in which the separate deflection device is arranged for the transmission beam, as so the one or more transmitted beams initially undisturbed the separate deflection and then optimally m direction can be directed to the objects to be measured. In this case, the separate deflection device is particularly preferably accommodated completely in the passage opening, so that the light path of the backscattered receive beams does not undergo additional shadowing.
Vorteilhafterwelse ist bei der erfindungsgemäßen Abtastvorrichtung die Ablenkeinrichtung als Spiegel, Strahlteilerprisma oder dergleichen den Sendestrahlweg ändernde Einrichtung vorgesehen.Vorteilwelwelse is in the scanning device according to the invention, the deflection device as a mirror, beam splitter prism or like the transmission path changing device is provided.
Um für die Sende- und Empfangsstrahle als Abtaststrahle einen möglichst einfachen, auch von den rechnerischen Korrekturen her gut beherrschbaren Lichtweg zu erzeugen ist es von Vorteil, wenn bei einer Ausbildung der Abtastvorrichtung die durch die mindestens eine Ablenkeinrichtung und die separate Ablenkeinrichtung gebildeten Flächen parallel angeordnet sind.In order to produce as simple as possible a scanning path for the transmitted and received beams as well as the computational corrections, it is advantageous if, in a design of the scanning device, the surfaces formed by the at least one deflecting device and the separate deflecting device are arranged in parallel ,
Um den an dem zu vermessenden Objekt rückgestreuten Lichtan- teile einen möglichst ungehinderten weg m Richtung auf einen außerhalb des Gehäuseteils angeordneten Detektor zu erlauben ist es bei einer Weiterbildung der Abtastvorrichtung von Vorteil, wenn lichtdurchlässige, zwischen dem Stützorgan und dem Gehäuseteil angeordnete Verbindungselemente die Stirnwände desIn order to allow the light components backscattered on the object to be measured to have an unhindered path in the direction of a detector arranged outside the housing part, it is advantageous in a further development of the scanning device if translucent connecting elements arranged between the support member and the housing part enclose the end walls of the scanner
Gehäuseteils bilden, so dass die erwähnten Lichtanteile nach ihrer Umlenkung an der mindestens einen Ablenkeinrichtung möglichst ungehindert durch die Stirnwände hindurchtreten können. Hierzu können die Verbmdungselemente beispielsweise aus einem lichtdurchlässigen, zum Beispiel transparenten Material wie Kunststoff oder Glas oder auch durch Speichenartige Elemente gebildet sein, die nur ein Mindestmaß an Abschattung der Lichtanteile verursachen.Form housing part, so that the mentioned light components can pass as freely as possible through the end walls after their deflection at the at least one deflector. For this purpose, the Verbmdungselemente may be formed for example of a translucent, for example, transparent material such as plastic or glass or by spoke-like elements that cause only a minimum level of shading of the light components.
Eine besonders stabile, den Fliehkräften der Drehbewegung gut entgegenwirkende Anordnung der Abtastvorrichtung ergibt sich bei einer Ausführungsform derselben, bei welcher die für die Umlenkung des oder der Empfangsstrahlen vorgesehene, mindestens eine Ablenkeinrichtung mit dem Gehäuseteil und dem Stützorgan verbunden ist, beispielsweise durch Anlenkung der dem jeweiligen Teil benachbarten Endbereiche. Die Verbindung der mindestens einen Ablenkeinrichtung mit dem Gehäuseteil ist dabei nicht zwingend notwendig, vielmehr sind auch Ausführungs- formen denkbar, bei welchen diese Ablenkeinrichtung mit zusätzlichen Stützgliedern versehen lediglich mit dem Stützorgan verbunden ist, während ihre dem Stützorgan abgewandten Endbereich gewissermaßen frei rotieren. Diese Stützglieder müssen dann jedoch wiederum einer möglichen Abschattung des Lichtwegs des Empfangsstrahl durch Formgebung oder Materialwahl Rechnung tragen.A particularly stable, the centrifugal forces of the rotary motion well counteracting arrangement of the scanning results in an embodiment thereof, in which provided for the deflection of the receiving beams or, at least one deflector is connected to the housing part and the support member, for example by articulation of the respective Part of adjacent end areas. The connection of the at least one deflecting device to the housing part is not absolutely necessary, but rather are also embodiments. conceivable forms in which this deflector is provided with additional support members only connected to the support member, while their end portion remote from the support member to a certain extent freely rotate. However, these support members must then again take into account a possible shadowing of the light path of the receiving beam by shaping or choice of material.
Zur Erhöhung der Messgenauigkeit des Abtastvorgangs und sowohl zur schnellen Anpassung der Abtastvorrichtung als auch zur allgemeinen Justage kann es bei einer anderen Ausführungsform vorgesehen sein, die Ablenkeinrichtungen mit mindestens einer, vorzugsweise mit jeweils mindestens einem Justierelement zu versehen, beispielsweise in der Art von Stellschrauben, so dass die Ablenkeinrichtungen mit geringem Aufwand auch an sich, etwa durch Temperatureinflüsse, verändernde Umgebungsbedingungen gut anpassbar sind.In order to increase the measuring accuracy of the scanning operation and both for rapid adaptation of the scanning device as well as for general adjustment, it may be provided in another embodiment, to provide the deflection with at least one, preferably with at least one adjusting element, for example in the form of screws, so that the baffles with little effort in itself, for example by temperature influences, changing environmental conditions are well adjusted.
Eine zweckmäßige Weiterbildung der erfindungsgemäßen Abtastvorrichtung kann darin bestehen, dass das Stützorgan und/oder das Gehäuseteil mit einer Antriebseinrichtung versehen sind, welche eine Drehantriebskraft direkt oder über ein Übertragungsglied vermittelt. So kann sowohl an dem Stützorgan als auch an dem Gehäuseteil als Rotor ein Stator eine Direktan- triebs angeordnet sein, es ist jedoch auch ein Antrieb mittels eines an einem der drehbeweglichen Teile angreifenden Riemens als Übertragungsglied denkbar.An expedient development of the scanning device according to the invention may consist in that the support member and / or the housing part are provided with a drive device which mediates a rotational drive force directly or via a transmission member. Thus, a stator can be arranged as a rotor for a direct drive both on the support member and on the housing part, but it is also conceivable to drive by means of a belt acting on one of the rotatable parts as a transfer member.
Um die durch den Detektor erfassten Empfangssignale eindeutig zuordnen und aus den Messungen die erforderlichen Koordinateninformationen gewinnen zu können ist bei einer weiteren Ausführungsform der Abtastvorrichtung die Aufnahmeeinrichtung mit einem Encoder und/oder einer Steuer- und Auswerteeinheit verse- hen. Hierbei ist der Encoder vorzugsweise mit einer Leseeinheit versehen, welche Wmkelmformationen eines der drehbeweglichen Teile der Anordnung verarbeiten und gleichzeitig über die Steuereinheit die Datenaufnahme triggern kann.In order to be able to unambiguously allocate the received signals detected by the detector and to obtain the required coordinate information from the measurements, in a further embodiment of the scanning device the recording device is provided with an encoder and / or a control and evaluation unit. hen. In this case, the encoder is preferably provided with a reading unit, which process information of one of the rotatable parts of the arrangement and at the same time can trigger the data acquisition via the control unit.
Besonders bevorzugt kann als eine, bevorzugt sogar einzige Lichtquelle der Abtastvorrichtung bei einer Ausführungsform diese Lichtquelle als Laserlichtquelle ausgebildet sein, die sich zur Modulation bei Einsatz in Pulslaufzeit und/oder Pha- senlaufzeitverfahren besonders eignet.Particularly preferably, as an, preferably even the only, light source of the scanning device in one embodiment, this light source can be designed as a laser light source, which is particularly suitable for modulation when used in pulse transit time and / or phase transit time method.
Die Erfindung wird nachstehend anhand eines Ausführungsbei- spiels m den Figuren der Zeichnung näher erläutert, Dabei zeigen in teilweise stark schematisierter Darstellung dieThe invention will be explained in more detail below with reference to an exemplary embodiment m the figures of the drawing, showing in partially highly schematic representation of the
Fig.1 eine geschnittene Seitenansicht einer erfindungsgemäßen Abtastvorrichtung mit einem an einem Stützorgan angeordneten Gehäuseteil; und die1 shows a sectional side view of a scanning device according to the invention with a arranged on a support member housing part. and the
Fig.2 eine geschnittene Stirnansicht der Abtastvorrichtung aus der Fig.12 is a sectional end view of the scanning device of Fig.1
In der Fig.1 ist eine im Ganzen mit 1 bezeichnete Abtastvorrichtung zur Konturvermessung von Objekten zu erkennen. Diese weist einen nicht dargestellten Laser als Lichtquelle auf, mittels welchem zwei Sendestrahlen 6 erzeugt und m den Strahlweg eingekoppelt werden. In einem um die m der Betrachtungsebene liegende Rotationsachse drehbaren, zylindrischen Gehäuseteil 3 ist eine Ablenkeinrichtung 2 m Form eines Spiegels angeordnet welche von zu vermessenden Objekten rückgestreute Lichtanteile als Empfangsstrahlen m Richtung ei- nes nicht dargestellten Detektors einer Aufnahmeeinrichtung lenkt. Der besseren Übersichtlichkeit wegen sind lediglich die Empfangsstrahlen 10 einer der beiden m entgegengesetzte Richtungen umgelenkten Sendestrahlen 6 m der Fig.1 zu sehen.In FIG. 1, a scanning device designated as a whole by 1 can be recognized for measuring the contour of objects. This has a laser, not shown, as a light source, by means of which two transmit beams 6 are generated and m coupled to the beam path. In a cylindrical housing part 3 which is rotatable about the axis of rotation of the observation plane, a deflection device 2 m is arranged in the form of a mirror which reflects light components backscattered from objects to be measured as receiving beams m in direction nes detector, not shown, directs a receiving device. For the sake of clarity, only the receive beams 10 of one of the two transmitted beams m deflected in opposite directions 6 m of FIG. 1 can be seen.
Das Gehäuseteil 3 ist an einem dieses entlang der Rotationsachse durchgreifenden, außerhalb des Gehäuseteils 3 gelagerten Stützorgan 4 drehfest angeordnet. Das Stützorgan 4 ist außerdem mit einem Strahlteilerprisma als separater Ablenkeinrichtung 5 für den Sendestrahl 6 versehen. Das das zylindrische Gehäuseteil 3 mit einem geringeren Querschnitt als dieses sowie den die Ablenkeinrichtung 2 bildenden Spiegel an einer Ausnehmung 20 durchgreifende Stützorgan 4 ist als Hohlwelle ausgebildet, die eine die Apertur des Sendestrahls bildende Öffnung 7 auf- weist, welche entlang der Längsachse der Stützorgans 4 verläuft. In die Öffnung 7 sind die Sendestrahlen 6 eingekoppelt und verlaufen in Richtung der separaten Ablenkeinrichtung 5, wo sie m Richtung des nicht dargestellten zu vermessenden Objekts umgelenkt werden, wodurch eine vollständige Trennung der Licht- wege von Sende- und Empfangsstrahlen erreicht wird, so dass keine oder nur sehr geringe Streulichtanteile der Sendestrahlen 6 m Richtung des Detektors gelenkt werden. Die Ablenkeinrichtung 2 ist mit dem Gehäuseteil 3 und dem Stützorgan 4 verbunden.The housing part 3 is rotatably mounted on a support member 4 which extends through the axis of rotation and extends outside the housing part 3. The support member 4 is also provided with a beam splitter prism as a separate deflection device 5 for the transmission beam 6. The cylindrical housing part 3 with a smaller cross-section than this and the deflector 2 forming mirror on a recess 20 by cross-supporting member 4 is formed as a hollow shaft which has an aperture of the transmitting beam opening 7, which along the longitudinal axis of the support member 4th runs. The transmission beams 6 are coupled into the opening 7 and run in the direction of the separate deflection device 5, where they are deflected in the direction of the object to be measured (not shown), whereby a complete separation of the light paths of the transmitted and received beams is achieved, so that none or only very small stray light components of the transmitted beams are directed 6 m in the direction of the detector. The deflection device 2 is connected to the housing part 3 and the support member 4.
An der vollständig m dem Stützorgan 4 aufgenommenen separaten Ablenkeinrichtung 5 werden die Sendestrahlen 6 umgelenkt und verlassen durch eine zylindrische, quer zur Längsachse des Stützorgans 4 angeordnete Durchtrittsöffnung 8 zunächst das Stützorgan 4 und sodann über eine ebenfalls zylindrische Durchtrittsöffnung 9 das Gehäuseteil 3. Nach Rückstreuung an dem zu vermessenden Objekt treten die Empfangsstrahlen 10 über die Durchtrittsöffnung 9 wieder m das Gehäuseteil 3 ein, wo sie von der Ablenkeinrichtung 2, in Richtung des Detektors umgelenkt werden.At the completely m the support member 4 recorded separate deflection 5, the transmission beams 6 are deflected and leave by a cylindrical, arranged transversely to the longitudinal axis of the support member 4 passage opening 8, first the support member 4 and then via a likewise cylindrical passage opening 9, the housing part 3. After backscattering the object to be measured enter the receiving beams 10 via the passage opening 9 again m the housing part 3, where they deflected by the deflector 2, in the direction of the detector.
Das Stützorgan 4 weist m seinen Endbereichen einen reduzierten Querschnitt auf und ist in diesen Bereichen von außerhalb des Gehäuseteils 3 befindlichen Lagerstellen 11 aufgenommen, wodurch eine Rotation des Verbundes aus Stützorgan 4 und Gehäuseteil 3, der aufgrund der Ablenkeinrichtungen 2, 5 auch Spiegelkopf genannt wird, möglich ist. Die erwähnten Lagerstellen 11 sind an sie tragenden, lichtdurchlässigen, auch Lagerschilde genannten Wandelementen 12 angeordnet, die einen Teil der Kapselung der Abtastvorrichtung 1 bilden, die zu deren Schutz vor Umwelteinflüssen angebracht ist. Aufgrund von deren Durchlässigkeit für Licht können die Empfangsstrahlen 10 die Wandelemente 12 praktisch ungehindert passieren, nachdem sie vorher die ebenfalls lichtdurchlässigen Verbindungselemente 13 passiert haben, die zwischen dem Stützorgan 4 und dem Gehäuse- teil 3angeordnet sind und die Stirnwände des Gehäuseteils 3 bilden. Die Verbmdungselemente 13, durch welche die Empfangs- strahlen 10 das Gehäuseteil m Richtung des Detektors verlassen bilden damit die Apertur der Empfangsstrahlen 10.The support member 4 has m m its end portions a reduced cross section and is accommodated in these areas located outside of the housing part 3 bearings 11, whereby a rotation of the composite of support member 4 and housing part 3, which is also called mirror head due to the deflection 2, 5 is possible. The mentioned bearings 11 are arranged on them, translucent, also bearing plates said wall elements 12 are arranged, which form part of the encapsulation of the scanning device 1, which is attached to protect them from environmental influences. Due to their permeability to light, the receiving beams 10 can pass through the wall elements 12 practically unhindered, after they have previously passed the likewise translucent connecting elements 13, which are arranged between the support member 4 and the housing part 3 and form the end walls of the housing part 3. The connecting elements 13 through which the receiving beams 10 leave the housing part m in the direction of the detector thus form the aperture of the receiving beams 10.
An der Außenwand des Gehäuseteils 3 ist über dessen Umfang ein Rotor 14 angeordnet, der zusammen mit dem Stator 15 den die An- triebsemrichtung 21 zur Erzeugung der Drehantriebskraft der Abtastvorrichtung 1 bildet. Ebenfalls an der Außenwand des Gehäuseteils 3 ist ein Encoder 16 mit Leseeinheit als Drehgeber angeordnet, der äquidistante Impulse zur Triggerung der Datenaufnahme liefert. Die Abtastvorrichtung 1 ist an einer Boden- platte 17 montiert, die ihrerseits zu einem die Abtastvorrichtung translatorisch bewegenden, nicht näher dargestellten Fortbewegungsmittel gehört. In der Fig.2 ist eine schematische Stirnansicht der Abtastvorrichtung 1 mit einem Außengehäuse 18 als Kapselung der Abtastvorrichtung zu erkennen, in welcher der Betrachter m Strahlrichtung des nicht dargestellten Sendestrahls 6 blickt. Man erkennt die Stirnflächen des als Hohlwelle ausgebildeten Stützorgans 4, dessen Endbereich von einem Lager an der Lagerstelle 11 aufgenommen ist und dessen Öffnung 7 den Lichtweg des nicht dargestellten Sendestrahls 6 bildet. Darüber hinaus ist das zylindrische Gehäuseteil 3 dargestellt, welches über die lichtdurchlässigen Verbindungselemente 13 mit dem Stützorgan 4 verbunden ist. Der schraffierte Bereich m der Fig.2 stellt schematisch die durch das Stützorgan verursachte Abschattung 19 des Empfangsstrahls 10 dar, also denjenigen Bereich der Ablenkeinrichtung 2, m dem durch die Schattenbildung des Stützorgans 4 der Empfangsstrahl 10 nicht auf die Ablenkeinrichtung 2 fällt und von dort nicht weiter m Richtung des Detektors umgelenkt werden kann.On the outer wall of the housing part 3, a rotor 14 is arranged over its circumference, which together with the stator 15 forms the drive device 21 for generating the rotational drive force of the scanning device 1. Also on the outer wall of the housing part 3, an encoder 16 is arranged with a reading unit as a rotary encoder, which provides equidistant pulses for triggering the data recording. The scanning device 1 is mounted on a bottom plate 17, which in turn belongs to a means of transporting the scanning device, not shown in detail. FIG. 2 shows a schematic end view of the scanning device 1 with an outer housing 18 as encapsulation of the scanning device, in which the observer looks at the beam direction of the transmitting beam 6 (not shown). It can be seen the end faces of the support member 4 designed as a hollow shaft, whose end portion is received by a bearing at the bearing point 11 and whose opening 7 forms the light path of the transmission beam 6, not shown. In addition, the cylindrical housing part 3 is shown, which is connected via the translucent connecting elements 13 with the support member 4. The shaded area m of Figure 2 schematically illustrates the shading caused by the support member 19 of the receiving beam 10, ie the area of the deflector 2, m by the shadow of the support member 4 of the receiving beam 10 does not fall on the deflector 2 and from there can be deflected further m direction of the detector.
Demnach betrifft die vorstehend beschriebene Erfindung also eine Abtastvorrichtung 1 zur Konturvermessung von Objekten, insbesondere von Lichtraumprofllen, mit mindestens einer Lichtquelle und mindestens einer Ablenkeinrichtung 2, welche Ablenkeinrichtung 2 m einem um eine Rotationsachse drehbaren Gehäuseteil 3 angeordnet ist und welche einen .von der Lichtquelle kommenden Abtaststrahl als Sendestrahl 6 auf ein zu vermessendes Objekt lenkt und von dem Objekt reflektierte Lichtanteile als Empfangsstrahl 10 m Richtung eines Detektors einer Aufnahmeeinrichtung lenkt. Um mit einfachen Mitteln eine preisgünstige, verlustleistungs- und verschleißarme Lagerung mit erhöhter Laufzeit sicherzustellen und eine Abtastvorrichtung mit geringem Einfluss von Störsignalen zur Verfügung zu haben, ist an der erfindungsgemäßen Abtastvorrichtung 1 das Gehäuseteil 3 an einem dieses entlang der Rotationsachse durch- greifenden, außerhalb des Gehäuseteils 3 gelagerten Stützorgan 4 drehfest angeordnet und das Stützorgan4 mit einer separaten Ablenkeinrichtung 5 für den Sendestrahl 6 versehen. Accordingly, the invention described above thus relates to a scanning device 1 for measuring the contour of objects, in particular Lichtraumprofllen, with at least one light source and at least one deflector 2, which deflector 2 m arranged around a rotation axis housing part 3 is arranged and which one coming from the light source Scanning beam as the transmitting beam 6 directs to an object to be measured and deflected by the object light components as a receiving beam 10 m direction of a detector of a recording device. In order to ensure low-cost, low-loss and low-wear storage with increased runtime by simple means and to have a scanning device with little influence of interfering signals available, the housing part 3 on a scanning device 1 according to the invention is passed along this axis of rotation. gripping, mounted outside of the housing part 3 support member 4 rotatably disposed and the Stützorgan4 provided with a separate deflection 5 for the transmission beam 6.

Claims

Ansprüche claims
1. Abtastvorrichtung (1) zur Konturvermessung von Objekten, insbesondere von Lichtraumprofllen, mit mindestens einer Lichtquelle und mindestens einer Ablenkeinrichtung (2), welche Ablenkeinrichtung (2) in einem um eine Rotationsachse drehbaren Gehäuseteil (3) angeordnet ist und welche einen .von der Lichtquelle kommenden Abtaststrahl als Sendestrahl (6) auf ein zu vermessendes Objekt lenkt und von dem Objekt reflektierte Lichtanteile als Empfangsstrahl (10) in Richtung eines Detektors einer Aufnahmeeinrichtung lenkt, dadurch gekennzeichnet, dass das Gehäuseteil (3) an einem dieses entlang der Rotationsachse durchgreifenden, außerhalb des Gehäuseteils gelagerten Stützorgan (4) dreh- fest angeordnet ist und dass das Stützorgan (4) mit einer separaten Ablenkeinrichtung (5) für den Sendestrahl (6) versehen ist .1. scanning device (1) for contour measurement of objects, in particular Lichtraumprofllen, with at least one light source and at least one deflection device (2), which deflection device (2) is arranged in a rotatable about a rotation axis housing part (3) and which a .von the Light source coming scanning beam as the transmission beam (6) directs to an object to be measured and deflected by the object light components as a receiving beam (10) in the direction of a detector of a receiving device, characterized in that the housing part (3) at one of these along the axis of rotation, Support member (4) mounted outside the housing part is fixed in a rotationally fixed manner and in that the support member (4) is provided with a separate deflection device (5) for the transmission beam (6).
2. Abtastvorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass das Stützorgan (4) als Welle mit einer im wesentlichen entlang der Längsachse der Welle verlaufenden Öffnung (7), insbesondere als Hohlwelle, ausgebildet ist.2. scanning device according to claim 1, characterized in that the supporting member (4) as a shaft having a substantially along the longitudinal axis of the shaft extending opening (7), in particular as a hollow shaft, is formed.
3. Abtastvorrichtung nach Anspruch 1 oder 2, dadurch gekenn- zeichnet, dass das Stützorgan (4) einen geringeren Querschnitt als das, bevorzugt zylindrische, Gehäuseteil (3) aufweist .3. Scanning device according to claim 1 or 2, characterized in that the support member (4) has a smaller cross section than the, preferably cylindrical, housing part (3).
4. Abtastvorrichtung nach einem der Ansprüche 1 bis 3, da- durch gekennzeichnet, dass das bevorzugt einstückig ausgebildete Stützorgan (4) eine an der mindestens einen Ablenkvorrichtung (2) angeordnete Ausnehmung (20) durchgreift . 4. scanning device according to one of claims 1 to 3, character- ized in that the preferably integrally formed support member (4) engages through a at least one deflection device (2) arranged recess (20).
5. Abtastvorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass das Stützorgan (4) mit geändertem, vorzugsweise reduziertem Querschnitt versehene, End- bereiche aufweist, welche von Lagerstellen (11) aufgenommen sind.5. Scanning device according to one of claims 1 to 4, characterized in that the support member (4) provided with a modified, preferably reduced cross-section, end areas, which are received by bearings (11).
6. Abtastvorrichtung nach Anspruch 5, dass die Lagerstellen6. scanning device according to claim 5, that the bearing points
(11) in diese tragenden, lichtdurchlässigen Wandelementen (12) angeordnet sind.(11) are arranged in these supporting, translucent wall elements (12).
7. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Stützorgan (4) an seinem innerhalb des Gehäuseteils (3) befindlichen Bereich eine quer zu seiner Längsachse angeordnete, bevorzugt zylindrische, Durchtrittsöffnung (8) aufweist, in welcher die separate Ablenkeinrichtung (5) für den Sendestrahl (6) angeordnet ist.7. Scanning device according to one of the preceding claims, characterized in that the support member (4) located at its inside of the housing part (3) located a region transversely to its longitudinal axis, preferably cylindrical, passage opening (8), in which the separate deflection ( 5) is arranged for the transmission beam (6).
8. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die separate Ablenkeinrichtung (5) als Spiegel, Strahlteilerprisma oder dergleichen den Sendestrahlweg ändernde Einrichtung vorgesehen ist.8. scanning device according to one of the preceding claims, characterized in that the separate deflection device (5) as a mirror, beam splitter prism or the like the transmission beam path changing means is provided.
9. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Flächen der Ablenkeinrichtungen (2, 5) parallel angeordnet sind.9. scanning device according to one of the preceding claims, characterized in that the surfaces of the deflecting means (2, 5) are arranged in parallel.
10. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass lichtdurchlässige, zwischen dem Stützorgan (4) und dem Gehäuseteil (3) angeordnete10. Scanning device according to one of the preceding claims, characterized in that translucent, between the support member (4) and the housing part (3) arranged
Verbindungselemente (13) die Stirnwände des GehäuseteilsConnecting elements (13) the end walls of the housing part
(3) bilden. (3) form.
11. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die mindestens eine Ablenkeinrichtung (2) mit dem Gehäuseteil (3) und dem Stützorgan11. Scanning device according to one of the preceding claims, characterized in that the at least one deflection device (2) with the housing part (3) and the support member
5 (4) verbunden ist.5 (4) is connected.
12. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Ablenkeinrichtungen (2, 5) mit mindestens einem, vorzugsweise mit jeweils 0 mindestens einem, Justierelement versehen sind.12. Scanning device according to one of the preceding claims, characterized in that the deflecting means (2, 5) are provided with at least one, preferably each with at least one adjusting element.
13. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Stützorgan (4) und/oder das Gehäuseteil (3) mit einer Antriebseinrichtung (21) B versehen sind, welche eine Drehantriebskraft direkt oder über ein Übertragungsglied vermittelt.13. Scanning device according to one of the preceding claims, characterized in that the support member (4) and / or the housing part (3) with a drive means (21) B are provided which mediates a rotational drive force directly or via a transmission member.
14. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Aufnahmeeinrichtung mit 0 einem Encoder (16) und/oder einer Steuer- und Auswerteeinheit versehen ist.14. Scanning device according to one of the preceding claims, characterized in that the receiving device with 0 an encoder (16) and / or a control and evaluation unit is provided.
15. Abtastvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die mindestens eine Licht- 5 quelle durch eine Laserlichtquelle gebildet ist.15. Scanning device according to one of the preceding claims, characterized in that the at least one light source 5 is formed by a laser light source.
0 0
PCT/EP2007/003743 2006-05-12 2007-04-27 Fast double scanner for high-speed profilometer WO2007131609A2 (en)

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DE102006022733A DE102006022733A1 (en) 2006-05-12 2006-05-12 Fast double scanner for high speed profilometer

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WO2007131609A3 WO2007131609A3 (en) 2008-01-24

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