WO2007129322A3 - System and method for imaging objects - Google Patents

System and method for imaging objects Download PDF

Info

Publication number
WO2007129322A3
WO2007129322A3 PCT/IL2007/000554 IL2007000554W WO2007129322A3 WO 2007129322 A3 WO2007129322 A3 WO 2007129322A3 IL 2007000554 W IL2007000554 W IL 2007000554W WO 2007129322 A3 WO2007129322 A3 WO 2007129322A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrical components
lateral
imaging area
imaging objects
transferor
Prior art date
Application number
PCT/IL2007/000554
Other languages
French (fr)
Other versions
WO2007129322A2 (en
Inventor
Shy Cohen
Ilan Greenberg
Original Assignee
Camtek Ltd
Shy Cohen
Ilan Greenberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd, Shy Cohen, Ilan Greenberg filed Critical Camtek Ltd
Priority to CN200780023926.0A priority Critical patent/CN101529444B/en
Publication of WO2007129322A2 publication Critical patent/WO2007129322A2/en
Publication of WO2007129322A3 publication Critical patent/WO2007129322A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sorting Of Articles (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Medicines Containing Plant Substances (AREA)
  • Studio Devices (AREA)

Abstract

A system for acquiring multiple images of electrical components, the system including: a first imager adapted to obtain a top image and two side images of electrical components positioned in a first imaging area; wherein the electrical components are small and elongated; and a lateral transferor adapted to transfer electrical components towards the first imaging area in a lateral manner, wherein the lateral transferor utilizes gas pressure differentials.
PCT/IL2007/000554 2006-05-07 2007-05-07 System and method for imaging objects WO2007129322A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200780023926.0A CN101529444B (en) 2006-05-07 2007-05-07 System and method for imaging objects

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL175455A IL175455A0 (en) 2006-05-07 2006-05-07 A system and a method for imaging, automatic and at once, objects' six-faces
IL175455 2006-05-07

Publications (2)

Publication Number Publication Date
WO2007129322A2 WO2007129322A2 (en) 2007-11-15
WO2007129322A3 true WO2007129322A3 (en) 2009-04-30

Family

ID=38668172

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2007/000554 WO2007129322A2 (en) 2006-05-07 2007-05-07 System and method for imaging objects

Country Status (5)

Country Link
KR (1) KR100990728B1 (en)
CN (1) CN101529444B (en)
IL (1) IL175455A0 (en)
TW (1) TWI454690B (en)
WO (1) WO2007129322A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216698A (en) * 2008-02-07 2009-09-24 Camtek Ltd Apparatus and method for imaging multiple sides of object
WO2010059130A1 (en) * 2008-11-19 2010-05-27 Ust Technology Pte. Ltd. An apparatus and method for inspecting an object
WO2010061388A1 (en) * 2008-11-27 2010-06-03 Camtek Ltd. Method and system for imaging multiple sides of objects
US9004284B2 (en) 2009-10-01 2015-04-14 Vitrinite Services, Llc Mineral slurry drying method and system
JP2012040466A (en) * 2010-08-13 2012-03-01 Camtek Ltd System and method of imaging two or more objective side surfaces
US20140010602A1 (en) * 2011-01-10 2014-01-09 Shy Cohen Method for imaging multiple sides of objects
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
CN105157601A (en) * 2015-06-10 2015-12-16 北京领邦仪器技术有限公司 Single-camera three-dimensional image measuring instrument
US10401148B2 (en) * 2015-12-21 2019-09-03 Philip Morris Products S.A. Apparatus and method for acquiring data relative to a dimension of an elongated object
KR102002683B1 (en) 2017-07-19 2019-10-21 최기원 Glasses Holder
GB2591792A (en) * 2020-02-07 2021-08-11 Blaylock John A device for holding spectacles

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414749A (en) * 1979-07-02 1983-11-15 Optimetrix Corporation Alignment and exposure system with an indicium of an axis of motion of the system
US6366310B1 (en) * 1996-06-20 2002-04-02 Matsushita Electric Industrial Co., Ltd. Electronic parts mounting apparatus
US20020118349A1 (en) * 2000-12-27 2002-08-29 Nikon Corporation Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method
US20040022426A1 (en) * 2002-07-31 2004-02-05 Kimberly-Clark Worldwide, Inc. Apparatus and method for inspecting articles

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587744A (en) * 1991-03-01 1993-04-06 Fujisawa Pharmaceut Co Ltd Method for inspecting surface of article and device used therefor
KR0162331B1 (en) * 1995-02-09 1998-12-15 구자홍 Optical pick-up
JPH10170446A (en) * 1996-12-13 1998-06-26 Nippon Eranko Kk Mechanism for changing attitude of tablet and visual inspection apparatus for tablet
GB0016976D0 (en) * 2000-07-12 2000-08-30 Renishaw Plc Aligning optical components

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414749A (en) * 1979-07-02 1983-11-15 Optimetrix Corporation Alignment and exposure system with an indicium of an axis of motion of the system
US6366310B1 (en) * 1996-06-20 2002-04-02 Matsushita Electric Industrial Co., Ltd. Electronic parts mounting apparatus
US20020118349A1 (en) * 2000-12-27 2002-08-29 Nikon Corporation Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method
US20040022426A1 (en) * 2002-07-31 2004-02-05 Kimberly-Clark Worldwide, Inc. Apparatus and method for inspecting articles

Also Published As

Publication number Publication date
KR20090008463A (en) 2009-01-21
CN101529444B (en) 2014-03-12
IL175455A0 (en) 2007-08-19
TW200804799A (en) 2008-01-16
KR100990728B1 (en) 2010-10-29
TWI454690B (en) 2014-10-01
CN101529444A (en) 2009-09-09
WO2007129322A2 (en) 2007-11-15

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