WO2007097500A1 - Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same - Google Patents

Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same Download PDF

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Publication number
WO2007097500A1
WO2007097500A1 PCT/KR2006/002480 KR2006002480W WO2007097500A1 WO 2007097500 A1 WO2007097500 A1 WO 2007097500A1 KR 2006002480 W KR2006002480 W KR 2006002480W WO 2007097500 A1 WO2007097500 A1 WO 2007097500A1
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WO
WIPO (PCT)
Prior art keywords
light emitting
layer
emitting diode
semiconductor light
metal
Prior art date
Application number
PCT/KR2006/002480
Other languages
French (fr)
Inventor
Chul Huh
Rae-Man Park
Jae-Heon Shin
Kyung-Hyun Kim
Tae-Youb Kim
Kwan-Sik Cho
Gun-Yong Sung
Original Assignee
Electronics And Telecommunications Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electronics And Telecommunications Research Institute filed Critical Electronics And Telecommunications Research Institute
Priority to EP06769057.8A priority Critical patent/EP1992019B1/en
Priority to JP2008556225A priority patent/JP4913162B2/en
Publication of WO2007097500A1 publication Critical patent/WO2007097500A1/en
Priority to US12/278,331 priority patent/US7608853B2/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/34—Materials of the light emitting region containing only elements of Group IV of the Periodic Table
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/18—Applying electric currents by contact electrodes
    • A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/36014—External stimulators, e.g. with patch electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • A61N1/0404—Electrodes for external use
    • A61N1/0408—Use-related aspects
    • A61N1/0452—Specially adapted for transcutaneous muscle stimulation [TMS]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • A61N1/0404—Electrodes for external use
    • A61N1/0472—Structure-related aspects
    • A61N1/0484—Garment electrodes worn by the patient
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • A61N1/0404—Electrodes for external use
    • A61N1/0472—Structure-related aspects
    • A61N1/0492—Patch electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/18—Applying electric currents by contact electrodes
    • A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/36014—External stimulators, e.g. with patch electrodes
    • A61N1/36021—External stimulators, e.g. with patch electrodes for treatment of pain
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/18—Applying electric currents by contact electrodes
    • A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/36014—External stimulators, e.g. with patch electrodes
    • A61N1/3603—Control systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
    • H01L33/18—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/962—Quantum dots and lines
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
    • Y10S977/774—Exhibiting three-dimensional carrier confinement, e.g. quantum dots

Definitions

  • the present invention relates to a semiconductor light emitting diode [2] that uses a silicon nano dot and a method of manufacturing the same.
  • a semiconductor light emitting diode that uses a silicon nano dot is
  • a conventional light emitting diode that uses a silicon nano dot is
  • ITO indium tin oxide
  • [I I] film is used on the upper doping layer, light emission efficiency is reduced [12] since light emitted from the light emitting layer is absorbed by the thin [13] metal film. Also, when an ITO film is used, the ITO film provides high [14] transparency, but, since it is a thin oxide film, an interface contact
  • the present invention provides a semiconductor light emitting diode
  • the present invention also provides a method of manufacturing a
  • semiconductor light emitting diode comprising: a light emitting layer that
  • [27] emits light; a hole injection layer formed on the light emitting layer; an
  • the light emitting layer may comprise amorphous silicon nitride that
  • [33] comprises a silicon nano dot.
  • the electron injection layer may comprise an n-type SiC material such
  • the metal layer may comprise one nano dot selected from the group
  • the transparent conductive electrode may comprise one material selected
  • the method may further comprise forming upper and lower electrodes
  • [50] layer is heat treated to comprise nano dot.
  • the method may further comprise forming a hole injection layer on the
  • the light emitting layer is an amorphous silicon nitride that comprises
  • the electron injection layer may be deposited on the light emitting
  • the metal layer may be deposited on the electron injection layer using
  • metal layer may be formed to have a thickness of 1000 nm or less, more
  • [60] preferably 1 to 2 nm.
  • a metal layer that includes a metal nano dot may be formed by heat
  • [71] can increase an interface contact between an electron injection layer and a
  • the metal layer that includes a metal nano dot can be any metal layer that includes a metal nano dot.
  • [82] can be controlled to increase an interface contact there between and to
  • FIG. 1 is a cross-sectional view of a semiconductor light emitting
  • FIG. 2 is a graph showing electrical characteristics of a semiconductor
  • FIG. 3 is a graph showing optical characteristics of a semiconductor
  • FIG. 1 is a cross-sectional view of a semiconductor light emitting
  • a light emitting layer 20 is formed on a hole
  • injection layer 10 More specifically, the hole injection layer 10 can be a
  • p-type Si substrate, and the light emitting layer 20 can be silicon nitride
  • An electron injection layer 30 is formed on the light emitting layer
  • [111] 20 can be an n-type Si carbide material, for example, SiC, SiCN, etc.
  • a metal layer 40 is formed on the electron injection layer 30.
  • metal layer 40 can be formed of Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, Ti, or an
  • the metal layer 40 having the metal nano dot can have a thickness of
  • the metal layer 40 is for improving an interface contact
  • [120] electrode 50 may be formed to a thickness of 1 to 3 nm so that the metal
  • nano dot can be easily formed.
  • the transparent conductive electrode 50 formed of ITO, SnO2, In2O3,
  • Cd2SnO4, ZnO, etc. can be formed on the metal layer 40.
  • An upper electrode 60 and a lower electrode 70 can further be formed
  • electrodes 60 and 70 may be formed of a conductive material such as Ni, Au,
  • a current is injected into the transparent conductive electrode 50 and
  • the metal layer 40 is formed by heat treating the metal layer 40 at a
  • treatment can be performed before forming the transparent conductive
  • electrode 50 or can be performed after the transparent conductive electrode
  • the above layers can be deposited using a conventional deposition [139] method such as a chemical vapour deposition, for example, plasma enhance
  • PECVD chemical vapor deposition
  • physical vapor deposition
  • FIG. 2 is a graph showing electrical characteristics of a semiconductor
  • FIG. 3 is a graph showing optical characteristics of a semiconductor light
  • the semiconductor light emitting diode that includes a
  • [148] metal nano dot was manufactured as follows.
  • the amorphous silicon nitride layer that includes a silicon nano
  • [154] dot was grown to a thickness of 40 nm at a substrate temperature of 250oC
  • amorphous silicon nitride layer that includes a silicon nano dot using a
  • [160] source The substrate temperature was 300oC, chamber pressure was 0.2 Torr,
  • PLD pulsed laser deposition
  • the present invention can increase an interface contact between an electron
  • injection layer and a transparent conductive electrode can increase in
  • the metal layer that includes a metal nano dot can be any metal layer that includes a metal nano dot.
  • [216] can be controlled to increase an interface contact there between and to

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Pain & Pain Management (AREA)
  • Led Devices (AREA)
  • Electroluminescent Light Sources (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

Provided is a semiconductor light emitting diode that uses a silicon nano dot and a method of manufacturing the same. The semiconductor light emitting diode includes a light emitting layer that emits light; a hole injection layer formed on the light emitting layer; an electron injection layer formed on the light emitting layer to face the hole injection layer; a metal layer that comprises a metal nano dot and is formed on the electron injection layer; and a transparent conductive electrode formed on the metal layer. Amorphous silicon nitride that includes the silicon nano dot is used as the light emitting layer.

Description

Description Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same
Technical Field
[I] The present invention relates to a semiconductor light emitting diode [2] that uses a silicon nano dot and a method of manufacturing the same.
Background Art
[3] A semiconductor light emitting diode that uses a silicon nano dot is
[4] operated by injecting carriers into a light emitting layer through an upper
[5] doping layer formed on an upper part of the light emitting layer and a
[6] current into the light emitting layer through the doping layer from an
[7] external electrode.
[8] A conventional light emitting diode that uses a silicon nano dot is
[9] manufactured using a conductive electrode such as a thin metal film or an
[10] indium tin oxide (ITO) film on the upper doping layer. When the thin metal
[I I] film is used on the upper doping layer, light emission efficiency is reduced [12] since light emitted from the light emitting layer is absorbed by the thin [13] metal film. Also, when an ITO film is used, the ITO film provides high [14] transparency, but, since it is a thin oxide film, an interface contact
[15] between the ITO film and the upper doping layer is unsmooth. Therefore, the
[16] electrical characteristics of the semiconductor light emitting diode are
[17] reduced resulting in reduction of the light emission efficiency thereof.
Disclosure of Invention
Technical Problem
[18] The present invention provides a semiconductor light emitting diode
[19] that uses a silicon nano dot to increase electrical characteristics and light
[20] emission efficiency of the semiconductor light emitting diode.
[21] The present invention also provides a method of manufacturing a
[22] semiconductor light emitting diode that uses a silicon nano dot to increase
[23] electrical characteristics and light emission efficiency of the semiconductor
[24] light emitting diode.
Technical Solution
[25] According to an aspect of the present invention, there is provided a
[26] semiconductor light emitting diode comprising: a light emitting layer that
[27] emits light; a hole injection layer formed on the light emitting layer; an
[28] electron injection layer formed on the light emitting layer to face the hole [29] injection layer; a metal layer that comprises a metal nano dot and is formed
[30] on the electron injection layer, and a transparent conductive electrode
[31] formed on the metal layer.
[32] The light emitting layer may comprise amorphous silicon nitride that
[33] comprises a silicon nano dot.
[34] The electron injection layer may comprise an n-type SiC material such
[35] as n-type SiC or SiCN.
[36] The metal layer may comprise one nano dot selected from the group
[37] consisting of Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, Ti, and an alloy of these
[38] metals.
[39] The transparent conductive electrode may comprise one material selected
[40] from the group consisting of ITO, SnO2, In2O3, Cd2SnO4, and ZnO.
[41] The method may further comprise forming upper and lower electrodes
[42] respectively on the transparent conductive electrode and the hole injection
[43] layer to apply a current to the semiconductor light emitting diode from the
[44] exterior.
[45] According to another aspect of the present invention, there is provided
[46] a method of manufacturing a semiconductor light emitting diode, the method
[47] comprising: forming an electron injection layer on a light emitting layer
[48] that emits light; forming a metal layer on the electron injection layer;
[49] forming a transparent conductive electrode on the metal layer; and the metal
[50] layer is heat treated to comprise nano dot.
[51] The method may further comprise forming a hole injection layer on the
[52] light emitting layer facing the electron injection layer.
[53] The light emitting layer is an amorphous silicon nitride that comprises
[54] a silicon nano dot.
[55] The electron injection layer may be deposited on the light emitting
[56] layer using an n-type SiC material.
[57] The metal layer may be deposited on the electron injection layer using
[58] Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, Ti, and an alloy of these metals. The
[59] metal layer may be formed to have a thickness of 1000 nm or less, more
[60] preferably 1 to 2 nm.
[61] A metal layer that includes a metal nano dot may be formed by heat
[62] treating the metal layer at a temperature in a range of room temperature to
[63] lOOOoC for 10 seconds to 1 hour. The metal nano dot can be readily formed
[64] under the above temperature and time conditions.
[65] In this way, by forming an improved interface state between the
[66] transparent conductive electrode and the electron injection layer that [67] includes an n-type silicon SiC material, the electrical characteristics and
[68] light emission efficiency of a semiconductor light emitting diode that uses a
[69] silicon nano dot can be increased.
Advantageous Effects
[70] A semiconductor light emitting diode according to the present invention
[71] can increase an interface contact between an electron injection layer and a
[72] transparent conductive electrode and can increase in electrical
[73] characteristics of the semiconductor light emitting diode by forming a metal
[74] layer that includes a metal nano dot between the electron injection layer and
[75] the transparent conductive electrode.
[76] Also, in the semiconductor light emitting diode according to the
[77] present invention, the metal layer that includes a metal nano dot can be
[78] formed by heat treating at a temperature in a range of room temperature to
[79] lOOOoC after the metal layer is formed between the electron injection layer
[80] and the transparent conductive electrode. That is, an interface structure
[81] between the electron injection layer and the transparent conductive electrode
[82] can be controlled to increase an interface contact there between and to
[83] increase electrical characteristics of the semiconductor light emitting
[84] diode, thereby increasing light emission efficiency of the semiconductor
[85] light emitting diode that uses the silicon nano dot.
Description of Drawings [86]
[87] The above and other features and advantages of the present invention
[88] will become more apparent by describing in detail exemplary embodiments
[89] thereof with reference to the attached drawings in which:
[90] FIG. 1 is a cross-sectional view of a semiconductor light emitting
[91] diode according to an embodiment of the present invention;
[92] FIG. 2 is a graph showing electrical characteristics of a semiconductor
[93] light emitting diode according to an embodiment of the present invention; and
[94] FIG. 3 is a graph showing optical characteristics of a semiconductor
[95] light emitting diode according to an embodiment of the present invention.
Best Mode
[96] The present invention will now be described more fully with reference
[97] to the accompanying drawings, in which exemplary embodiments of the invention
[98] are shown. The invention may, however, be embodied in many different forms
[99] and should not be construed as being limited to the embodiments set forth
[100] herein; rather, these embodiments are provided so that this disclosure will [101] be thorough and complete, and will fully convey the concept of the invention
[102] to those skilled in the art.
[103] FIG. 1 is a cross-sectional view of a semiconductor light emitting
[104] diode that uses a silicon nano dot according to an embodiment of the present
[105] invention.
[106] Referring to FIG. 1, a light emitting layer 20 is formed on a hole
[107] injection layer 10. More specifically, the hole injection layer 10 can be a
[108] p-type Si substrate, and the light emitting layer 20 can be silicon nitride
[109] (SiN) that includes a silicon nano dot.
[110] An electron injection layer 30 is formed on the light emitting layer
[111] 20, and can be an n-type Si carbide material, for example, SiC, SiCN, etc.
[112] A metal layer 40 is formed on the electron injection layer 30. The
[113] metal layer 40 can be formed of Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, Ti, or an
[114] alloy of these metals, and preferably Ag. The metal layer 40 undergoes a
[115] heat treatment in a subsequent process and thus a metal nano is formed
[116] therein.
[117] The metal layer 40 having the metal nano dot can have a thickness of
[118] 1000 nm or less. The metal layer 40 is for improving an interface contact
[119] between the electron injection layer 30 and a transparent conductive
[120] electrode 50, and may be formed to a thickness of 1 to 3 nm so that the metal
[121] nano dot can be easily formed.
[122] The transparent conductive electrode 50 formed of ITO, SnO2, In2O3,
[123] Cd2SnO4, ZnO, etc., can be formed on the metal layer 40.
[124] An upper electrode 60 and a lower electrode 70 can further be formed
[125] respectively on an upper surface of the transparent conductive electrode 50
[126] and on a lower surface of the hole injection layer 10. The upper and lower
[127] electrodes 60 and 70 may be formed of a conductive material such as Ni, Au,
[128] etc. A current is injected into the transparent conductive electrode 50 and
[129] the hole injection layer 10 through the upper and lower electrodes 60 and 70,
[130] and accordingly a semiconductor light emitting diode that emits light can be
[131] realized by electrons and holes injected into the light emitting layer 30.
[132] The metal layer 40 is formed by heat treating the metal layer 40 at a
[133] temperature in a range of from room temperature to 10000C for 1 second to 1
[134] hour so that the metal nano dot is formed in the metal layer. The heat
[135] treatment can be performed before forming the transparent conductive
[136] electrode 50, or can be performed after the transparent conductive electrode
[137] 50 and the upper and lower electrodes 60 and 70 are formed.
[138] The above layers can be deposited using a conventional deposition [139] method such as a chemical vapour deposition, for example, plasma enhance
[140] chemical vapor deposition (PECVD) or physical vapor deposition.
[141] FIG. 2 is a graph showing electrical characteristics of a semiconductor
[142] light emitting diode according to an embodiment of the present invention.
[143] FIG. 3 is a graph showing optical characteristics of a semiconductor light
[144] emitting diode according to an embodiment of the present invention.
[145] To test the electrical characteristics and optical characteristics of
[146] the semiconductor light emitting diode according to an embodiment of the
[147] present invention, the semiconductor light emitting diode that includes a
[148] metal nano dot was manufactured as follows.
[149] A p-type Si substrate was used as the hole injection layer 10. An
[150] amorphous silicon nitride layer that includes a silicon nano dot was
[151] deposited on the p-type Si substrate using a PECVD method. At this time,
[152] argon-diluted 10% silane and NH3 gas were used as a growing gas during
[153] deposition. The amorphous silicon nitride layer that includes a silicon nano
[154] dot was grown to a thickness of 40 nm at a substrate temperature of 250oC
[155] under a chamber pressure of 0.5 Torr using an RF plasma power of 5W.
[156] An n-type SiC layer having a thickness of 300 nm was grown on the
[157] amorphous silicon nitride layer that includes a silicon nano dot using a
[158] PECVD method. Argon-diluted 10% silnae and methane were used as a growing
[159] gas, and try-methyl-phosphite (TMP) metalorganic was used as a doping gas
[160] source. The substrate temperature was 300oC, chamber pressure was 0.2 Torr,
[161] and RF plasma power was 4OW.
[162] An Ag metal layer having a thickness of 2.5 nm was deposited on the
[163] n-type SiC layer using a thermal evaporation method.
[164] An ITO film having a thickness of 100 nm was grown on the Ag metal
[165] layer using a pulsed laser deposition (PLD) method.
[166] The resultant product was heat treated at a temperature of 500oC for 30
[167] minutes in a PLD chamber to cause the formation of an Ag nano dot between the
[168] n-type SiC layer and the ITO layer.
[169] An upper electrode was deposited on an upper surface of the ITO film
[170] and a lower electrode was deposited on a lower surface of the p-type Si
[171] substrate using a thermal evaporation method. The upper electrode was formed
[172] of Au to a thickness of 150 nm, and the lower electrode was formed of Ni to a
[173] thickness of 30 nm, thereby completing the manufacture of the semiconductor
[174] light emitting diode according to an embodiment of the present invention.
[175] As a comparative example, a semiconductor light emitting diode that
[176] does not have an Ag metal layer was manufactured using the same method of [177] manufacturing the semiconductor light emitting diode according to an
[178] embodiment of the present invention except for forming the Ag metal layer.
[179] Currents that flow in the semiconductor light emitting diode according
[180] to an embodiment of the present invention and the semiconductor light
[181] emitting diode of the comparative example were measured by respectively
[182] applying a voltage to each of the semiconductor light emitting diodes.
[183] Referring to FIG. 2, when a voltage of approximately 6V or more is applied,
[184] it is seen that a larger current flows in the semiconductor light emitting
[185] diode (a) according to an embodiment of the present invention than in the
[186] semiconductor light emitting diode (b) of the comparative example.
[187] Accordingly, the semiconductor light emitting diode according to an
[188] embodiment of the present invention has superior electrical characteristics
[189] due to the improvement of the interface contact between the ITO film and the
[190] n-type SiC layer.
[191] Also, optical outputs according to current densities, emitted through
[192] the each of the ITO films of the semiconductor light emitting diode according
[193] to an embodiment of the present invention and the semiconductor light
[194] emitting diode of the comparative example were measured using an optical
[195] power meter. Referring to FIG. 3, it is seen that the semiconductor light
[196] emitting diode (c) according to an embodiment of the present invention
[197] outputs larger amount of light than the semiconductor light emitting diode
[198] (d) of the comparative example. It is found that the semiconductor light
[199] emitting diode that includes a silicon nano dot according to an embodiment of
[200] the present invention has greatly increased optical characteristics since an
[201] interface contact between the ITO film and the n-type SiC layer is improved
[202] by inserting an Ag metal layer that includes an Ag nano dot between the ITO
[203] film and the n-type SiC layer.
[204] As described above, a semiconductor light emitting diode according to
[205] the present invention can increase an interface contact between an electron
[206] injection layer and a transparent conductive electrode and can increase in
[207] electrical characteristics of the semiconductor light emitting diode by
[208] forming a metal layer that includes a metal nano dot between the electron
[209] injection layer and the transparent conductive electrode.
[210] Also, in the semiconductor light emitting diode according to the
[211] present invention, the metal layer that includes a metal nano dot can be
[212] formed by heat treating at a temperature in a range of room temperature to
[213] lOOOoC after the metal layer is formed between the electron injection layer
[214] and the transparent conductive electrode. That is, an interface structure [215] between the electron injection layer and the transparent conductive electrode
[216] can be controlled to increase an interface contact there between and to
[217] increase electrical characteristics of the semiconductor light emitting
[218] diode, thereby increasing light emission efficiency of the semiconductor
[219] light emitting diode that uses the silicon nano dot.
[220] While this invention has been particularly shown and described with
[221] respect to the techniques for improving an interface contact between an
[222] electron injection layer and a transparent conductive layer to increase
[223] electrical characteristics of a semiconductor light emitting diode that uses
[224] a silicon nano dot according to the present invention and a method of
[225] manufacturing the semiconductor light emitting diode, but the present
[226] invention is not limited thereto. Therefore, it will be understood by those
[227] of ordinary skill in the art that various changes in form and details may be
[228] made therein without departing from the spirit and scope of the present
[229] invention as defined by the following claims.

Claims

Claims
[1] A semiconductor light emitting diode comprising: a light emitting layer that emits light; a hole injection layer formed on the light emitting layer; an electron injection layer formed on the light emitting layer to face the hole injection layer; a metal layer that comprises a metal nano dot, formed on the electron injection layer, and a transparent conductive electrode formed on the metal layer.
[2] The semiconductor light emitting diode of claim 1, wherein the light emitting layer comprises amorphous silicon nitride that comprises a silicon nano dot.
[3] The semiconductor light emitting diode of claim 1, wherein the electron injection layer comprises an n-type SiC material.
[4] The semiconductor light emitting diode of claim 3, wherein the n-type
SiC material is SiC or SiCN.
[5] The semiconductor light emitting diode of claim 1, wherein the metal layer comprises at least one nano dot selected from the group consisting of
Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, and Ti.
[6] The semiconductor light emitting diode of claim 1, wherein the transparent conductive electrode comprises at least one material selected from the group consisting of ITO, SnO2, In2O3, Cd2SnO4, and ZnO.
[7] A method of manufacturing a semiconductor light emitting diode, the method comprising: forming an electron injection layer on a light emitting layer that emits light; forming a metal layer on the electron injection layer; forming a transparent conductive electrode on the metal layer; and heat treating the metal layer to comprise a metal nano dot in the metal layer.
[8] The method of claim 7, further comprising forming a hole injection layer on the light emitting layer to face the electron injection layer.
[9] The method of claim 7, wherein the light emitting layer is an amorphous silicon nitride that comprises a silicon nano dot.
[10] The method of claim 7, wherein the electron injection layer is formed on the light emitting layer by depositing an n-type SiC material on the light emitting layer.
[11] The method of claim 7, wherein the metal layer is formed on the electron injection layer by depositing a metal that comprises at least one metal selected from the group consisting of Au, Ag, Mg, Al, Ni, Co, In, Cu, Pt, and Ti.
[12] The method of claim 7, wherein the heat treatment is performed at a temperature in a range of room temperature to lOOOoC.
[13] The method of claim 12, wherein the heat treatment is performed for 10 seconds to 1 hour.
PCT/KR2006/002480 2006-02-21 2006-06-27 Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same WO2007097500A1 (en)

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EP06769057.8A EP1992019B1 (en) 2006-02-21 2006-06-27 Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same
JP2008556225A JP4913162B2 (en) 2006-02-21 2006-06-27 Semiconductor light emitting device using silicon nanodots and method for manufacturing the same
US12/278,331 US7608853B2 (en) 2006-02-21 2008-06-27 Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same

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KR1020060016665A KR100833489B1 (en) 2006-02-21 2006-02-21 Transparent contact electrode for Si nanocrystal light-emitting diodes, and method of fabricating
KR10-2006-0016665 2006-02-21

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KR100833489B1 (en) 2008-05-29
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JP4913162B2 (en) 2012-04-11
EP1992019A1 (en) 2008-11-19
US7608853B2 (en) 2009-10-27
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KR20070083377A (en) 2007-08-24
EP1992019A4 (en) 2011-04-13

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