WO2007070475A3 - Scanning electron microscope with crt-type electron optics - Google Patents

Scanning electron microscope with crt-type electron optics Download PDF

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Publication number
WO2007070475A3
WO2007070475A3 PCT/US2006/047227 US2006047227W WO2007070475A3 WO 2007070475 A3 WO2007070475 A3 WO 2007070475A3 US 2006047227 W US2006047227 W US 2006047227W WO 2007070475 A3 WO2007070475 A3 WO 2007070475A3
Authority
WO
WIPO (PCT)
Prior art keywords
electron beam
crt
substrate
embodiment relates
electron microscope
Prior art date
Application number
PCT/US2006/047227
Other languages
French (fr)
Other versions
WO2007070475A2 (en
Inventor
David L Adler
Ady Levy
Neil Richardson
Mark A Mccord
Original Assignee
Kla Tencor Tech Corp
David L Adler
Ady Levy
Neil Richardson
Mark A Mccord
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/450,757 external-priority patent/US20070145266A1/en
Priority claimed from US11/450,758 external-priority patent/US20070145267A1/en
Application filed by Kla Tencor Tech Corp, David L Adler, Ady Levy, Neil Richardson, Mark A Mccord filed Critical Kla Tencor Tech Corp
Publication of WO2007070475A2 publication Critical patent/WO2007070475A2/en
Publication of WO2007070475A3 publication Critical patent/WO2007070475A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

One embodiment relates to an apparatus, including a CRT-type gun (for example, 102, or 302, or 510, or 1002, or 1113) and deflectors to generate and scan the electron beam, which utilizes the electron beam for inspection or metrology of a substrate. The apparatus may comprise a portable scanning electron microscope. Another embodiment relates to a method of inspecting a substrate or measuring an aspect of the substrate, where an electron beam is focused using electrostatic lenses formed by metal plates (704) supported by and separated by fused glass beads (706) or other insulating material. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.
PCT/US2006/047227 2005-12-12 2006-12-11 Scanning electron microscope with crt-type electron optics WO2007070475A2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US74986805P 2005-12-12 2005-12-12
US60/749,868 2005-12-12
US77215506P 2006-02-10 2006-02-10
US60/772,155 2006-02-10
US11/450,757 US20070145266A1 (en) 2005-12-12 2006-06-09 Electron microscope apparatus using CRT-type optics
US11/450,758 2006-06-09
US11/450,757 2006-06-09
US11/450,758 US20070145267A1 (en) 2005-12-12 2006-06-09 Portable scanning electron microscope

Publications (2)

Publication Number Publication Date
WO2007070475A2 WO2007070475A2 (en) 2007-06-21
WO2007070475A3 true WO2007070475A3 (en) 2008-04-10

Family

ID=38163457

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/047227 WO2007070475A2 (en) 2005-12-12 2006-12-11 Scanning electron microscope with crt-type electron optics

Country Status (1)

Country Link
WO (1) WO2007070475A2 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424791A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope apparatus
US2982878A (en) * 1954-11-23 1961-05-02 Rca Corp Electrode support
US4516026A (en) * 1981-02-04 1985-05-07 Centre National De La Recherche Scientifique Cnrs Scanning electron microscope assembly operating in situ
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
US6282222B1 (en) * 1996-06-12 2001-08-28 Rutgers, The State University Electron beam irradiation of gases and light source using the same
US6552341B1 (en) * 1999-04-09 2003-04-22 Centre National D'etudes Spatiales Installation and method for microscopic observation of a semiconductor electronic circuit
US6740889B1 (en) * 1998-09-28 2004-05-25 Applied Materials, Inc. Charged particle beam microscope with minicolumn
US6897443B2 (en) * 2003-06-02 2005-05-24 Harald Gross Portable scanning electron microscope

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424791A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope apparatus
US2982878A (en) * 1954-11-23 1961-05-02 Rca Corp Electrode support
US4516026A (en) * 1981-02-04 1985-05-07 Centre National De La Recherche Scientifique Cnrs Scanning electron microscope assembly operating in situ
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
US6282222B1 (en) * 1996-06-12 2001-08-28 Rutgers, The State University Electron beam irradiation of gases and light source using the same
US6740889B1 (en) * 1998-09-28 2004-05-25 Applied Materials, Inc. Charged particle beam microscope with minicolumn
US6552341B1 (en) * 1999-04-09 2003-04-22 Centre National D'etudes Spatiales Installation and method for microscopic observation of a semiconductor electronic circuit
US6897443B2 (en) * 2003-06-02 2005-05-24 Harald Gross Portable scanning electron microscope

Also Published As

Publication number Publication date
WO2007070475A2 (en) 2007-06-21

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