WO2007046485A1 - Systeme, dispositif et puce electrophoretiques - Google Patents

Systeme, dispositif et puce electrophoretiques Download PDF

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Publication number
WO2007046485A1
WO2007046485A1 PCT/JP2006/320879 JP2006320879W WO2007046485A1 WO 2007046485 A1 WO2007046485 A1 WO 2007046485A1 JP 2006320879 W JP2006320879 W JP 2006320879W WO 2007046485 A1 WO2007046485 A1 WO 2007046485A1
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WO
WIPO (PCT)
Prior art keywords
electrode
lane
electrophoresis
migration
dielectrophoresis
Prior art date
Application number
PCT/JP2006/320879
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English (en)
Japanese (ja)
Other versions
WO2007046485A8 (fr
Inventor
Osamu Teranuma
Mayuko Sakamoto
Yoshihiro Izumi
Masayuki Fujimoto
Original Assignee
Sharp Kabushiki Kaisha
National University Corporation Shizuoka University
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Application filed by Sharp Kabushiki Kaisha, National University Corporation Shizuoka University filed Critical Sharp Kabushiki Kaisha
Publication of WO2007046485A1 publication Critical patent/WO2007046485A1/fr
Publication of WO2007046485A8 publication Critical patent/WO2007046485A8/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502753—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/087—Multiple sequential chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0424—Dielectrophoretic forces

Definitions

  • Dielectrophoresis chip dielectrophoresis apparatus, and dielectrophoresis system
  • the present invention relates to a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system for conveying particles such as biomolecules and resin beads by dielectrophoretic force.
  • Analyzes of these chemical analysis systems are blood cell components such as erythrocytes, leukocytes, and lymphocytes obtained by separating blood; bacteria such as Escherichia coli and Listeria; DNA (deoxyribonucleic acid: deoxyribonucleic acid) acid; deoxyribose nucleic acid), biomolecules such as protein, etc.
  • the main applications include, for example, analysis of these DNAs, proteins, cells, etc. (reaction “detection” separation ”transport); chemical synthesis (microplant);
  • the dielectrophoresis phenomenon is a non-uniform alternating electric field that can act on any particle regardless of its own charge as a driving force for transporting, separating, and collecting particles (including biomolecules) in a fluid. Suitable for particle separation 'conveyance. For this reason, since the dielectrophoresis phenomenon is suitable for selecting an object (particulate matter), research on a chemical analysis system using the dielectrophoresis phenomenon is underway (for example, Patent Documents 1 to 5). Non-patent documents 1 to 4).
  • FIG. 35 is a perspective view showing a schematic configuration of a conventional particle transport device using the dielectrophoresis phenomenon, and FIG. 35 shows a schematic configuration of the particle transport device in which a plurality of non-parallel electrode pairs are arranged. Yes.
  • FIG. 35 the lower surface of a channel 101 for flowing a sample liquid such as a blood sample is shown.
  • a particle conveying device 100 in which a plurality of non-parallel electrode pairs 111 and 112 are arranged.
  • particles are conveyed by the dielectrophoretic force generated by the non-uniform electric field obtained by the non-parallel electrode pairs 111 and 112.
  • FIG. 36 (a) is a side view showing a schematic configuration of a conventional dielectrophoresis apparatus that separates cells using a comb-shaped electrode
  • FIG. 36 (b) is a side view of FIG. 36 (a). It is a top view which shows the structure of the principal part (electrode formation part) in the dielectrophoresis apparatus shown.
  • Non-Patent Document 1 As shown in FIGS. 36 (a) and 36 (b), a comb-shaped electrode 202 provided on a glass substrate 201 is subjected to high frequency by an alternating current (AC) signal generator 203.
  • AC alternating current
  • a comb-shaped electrode is used to concentrate microorganisms (biological particles such as bacteria) in a sample solution by dielectrophoresis in the gap portion of the electrode that is an electric field concentration portion.
  • a technique for measuring the concentration of the microorganism by performing impedance measurement between the two is disclosed.
  • FIG. 37 is a diagram for explaining a technique for transporting cells using comb-shaped electrodes.
  • Non-Patent Document 2 and Patent Document 3 as shown in FIG. 37, the particles in the electrophoresis medium are placed above the surface of the electrode 301 depending on the phase condition of the signal applied to the adjacent electrodes 301. It is disclosed that it floats and is transported.
  • Dielectrophoresis is a phenomenon in which a force acts on particles due to the interaction between an applied electric field and an electric dipole induced thereby, and more specifically, when a nonuniform AC electric field is applied. This is a phenomenon in which a substance moves under the force (dielectrophoretic force) due to the interaction between the electric field lines generated in the field and the polarization of the substance.
  • the dielectrophoretic force depends on the dielectric constant of the particles and the solvent, the frequency of the applied voltage, and the like.
  • Dielectrophoresis is called “positive dielectrophoresis” (hereinafter referred to as “p-DEP”) in which force is applied in the direction of strong electric field depending on the dielectric constant of particles and solvent, and the frequency of applied voltage.
  • p-DEP Positive dielectrophoresis
  • n-DEP Native dielectrophoresis
  • a dipole moment When an electric field is applied to a particle force system suspended in a solvent, a dipole moment is induced.
  • the electric field is, for example, alternating current (AC)
  • the dipole moment is defined as a vector having in-phase and out-of-phase components.
  • the time average value of the dielectrophoretic force F (t) acting on the dielectric particles in the non-uniform electric field is expressed by the following formula (1) as described in Non-Patent Document 3, for example.
  • each symbol represents the following components.
  • Vacuum dielectric constant [FZm] r: particle radius [m], :: root mean square of electric field [VZm], E: each electric field
  • the dielectrophoretic force has two components, a stationary DEP (DEP) and a traveling-wave DEP (hereinafter referred to as "TWD").
  • DEP stationary DEP
  • TWD traveling-wave DEP
  • DEP is a force (in-phase component of the polarization induced by the electric field; real part of equation (1)) caused by the non-uniform distribution of the electric field.
  • TWD is the force (loss component of polarization induced by the electric field; imaginary part of equation (1)) caused by the non-uniform distribution of the phase of the electric field component.
  • the electrophoretic force works in the direction of strong electric field strength.
  • a positive dielectrophoresis (p—DEP) force is applied.
  • p—DEP positive dielectrophoresis
  • Negative dielectrophoretic (n—DEP) force acts. As a result, the particles move in the direction where the electric field gradient is small.
  • the dielectrophoretic force acts in the direction of the large phase, that is, the electric field movement direction.
  • I [f] ⁇ 0 m CM the dielectrophoretic force is in the direction of the small electric field phase, that is, the direction opposite to the electric field movement direction.
  • TWD works in a direction perpendicular to the electrode wiring length direction.
  • the action of TWD varies depending on the height from the electrode plane.
  • the effect of TWD is more noticeable at a certain distance from the plane than near the electrode plane. Therefore, when the target particles are transported by TWD, the target particles are first lifted only by DEP (DEP mode), and then the target particles are transported by TWD (TWD mode). , TWD can act efficiently on target particles.
  • phase condition of the applied voltage in the conventional dielectrophoresis apparatus will be described with reference to FIG.
  • the phase condition of a signal applied to the adjacent electrode 301 in an electrode array composed of a plurality of electrodes 301 is described in Non-Patent Document 2 and Patent Document 3.
  • Equation (1) becomes only the real part (that is, Equation (2)).
  • the particles in the electrophoresis medium float by receiving a force (DEP) that floats above the surface of the electrode 301.
  • the phase condition of the signal applied to the adjacent electrodes 301 is 0 as described in Non-Patent Document 2 and Patent Document 3.
  • equation (1) has both real and imaginary parts.
  • the particles in the electrophoresis medium are transported by receiving a transport force (TWD).
  • Patent Document 2 Corresponding to Japanese Patent Gazette “Special Table 2003-504196 (Publication Date: February 4, 2003)” (International Publication No. 01Z005514 Pamphlet (International Publication Date: January 25, 2001) )
  • Patent Document 3 Japanese Patent Publication “JP 2000-125846 (Publication Date: May 9, 2000)”
  • Patent Document 4 Corresponds to Japanese Patent Gazette “Special Publication 2003-504629 (Publication Date: February 4, 2003)” (International Publication No. 01Z005512 Pamphlet (International Publication Date: January 25, 2001) )
  • Patent Document 5 Japanese Patent Publication Gazette “Patent No. 3453136 (Registration Date: July 2003 1) 8th, publication date: November 2, 1994) "(corresponding US Pat. No. 5,454,472 (registration date: October 3, 1995))
  • Patent Document 6 Japanese Published Patent Publication “Japanese Patent Laid-Open No. 2000-298109 (Publication Date: 24th January 2000)”
  • Non-Patent Literature 1 HaiDo Li et al., Dielectrophoretic separation and manipulation of live and heat-treated cells of Listeria on microfabricated devices with interdigitated elec trades ", Sensors and Actuators B 86, p.215-221, 2002.
  • Non-Patent Document 2 Ronald Pethig et al., 'Enhancing Traveling-Wave Dielectrophoresis with Signal Superposition ", IEEE Engineering in medicine and biology magazine, p.43- 50, Nov./Dec. 2003.
  • Non-Patent Document 3 Xiao- Bo Wang et al., 'Dielectrophoretic Manipulation of Particles, IE EE Trans.Ind.Applicat., Vol.33, No.3, p.660-669, May./June 1997.
  • Non-Patent Document 4 R. Krupke et.al., "Separation of metallic from semiconducting single-walled carbon nanotubes" SCIENCE, vol.301, 18 July 2003, p.344-347
  • Non-Patent Document 5 J. Voldman et al. "Design and analysis of extruded quadrupolar dielec trophoretic traps", Journal of Electrostatics 57 (2003) p.69- 90
  • a metal material such as gold (Au) is generally used for the dielectrophoresis electrode.
  • the conventional dielectrophoresis apparatus thus has an optically opaque electrode, such as a gold electrode, formed on one side of the flow path, so that an imaging apparatus such as a CCD (imaging system) ) Is limited to one surface of the flow path opposite to the electrode formation surface.
  • an imaging apparatus such as a CCD (imaging system)
  • the present invention has been made in view of the above problems, and its purpose is, for example, a dielectrophoresis chip in which the observation environment is improved compared to the prior art, for example, the restriction of observation conditions is relaxed. And a dielectrophoresis apparatus and a dielectrophoresis system.
  • the dielectrophoresis chip is a dielectrophoresis chip that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to a sample containing the dielectric substance.
  • an electrophoretic lane for dielectrophoresis of the dielectric substance and a plurality of electrode forces intersecting the swimming lane, and an AC voltage is applied to apply an electric field to the sample injected into the electrophoretic lane.
  • An electrode array for performing dielectrophoresis of a dielectric substance, and the electrophoresis lane has a transparent surface facing the electrode array of the electrophoresis lane in at least a part of a region where the electrophoresis lane and the electrode array overlap.
  • the electrode array has a structure in which at least a part of the electrode overlapping the transparent region in the electrophoresis lane is formed of a transparent electrode! /
  • the electrode region that is, the region that imparts an electrophoretic force to the dielectric substance from any direction above or below the electrophoresis lane that is not blocked by the electrode. Can be observed.
  • observation and photographing with transmitted light observation and photographing with a transmission mode
  • observation and photographing with a transmission mode can be performed, so that an observation system by projection can be constructed. Therefore, according to the above configuration, the restriction of the observation conditions is relaxed compared to the conventional case, and as a result, it is possible to provide a dielectrophoresis chip having a wide application range with respect to the test conditions. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis chip in which the observation environment is improved as compared with the related art.
  • the dielectrophoresis apparatus includes the dielectrophoresis chip in order to solve the above problems.
  • the dielectrophoresis system includes the dielectrophoresis apparatus in order to solve the above problems.
  • the dielectrophoresis apparatus and the dielectrophoresis system include the dielectrophoresis chip, so that when the sample is observed, the dielectrophoresis device and the dielectrophoresis system are provided in the electrophoresis lane of the dielectrophoresis chip.
  • Observation in the electrode region that is, the region in which the dielectrophoretic force is applied to the dielectric substance, can be performed from above and below the migration lane without being blocked by the electrode. Therefore, according to each of the above-described configurations, the restriction on the observation conditions is relaxed as compared with the conventional one.
  • FIG. 1 is a perspective view showing a schematic configuration of a dielectrophoresis panel according to a first exemplary embodiment.
  • FIG. 2 is a plan view of the dielectrophoresis panel shown in FIG. 1 as viewed from the upper substrate side.
  • FIG. 3 is a cross-sectional view taken along the line AA of the dielectrophoresis panel shown in FIG.
  • FIG. 4 is a cross-sectional view of the dielectrophoresis panel shown in FIG.
  • FIG. 5 is a schematic configuration diagram of a dielectrophoresis system including the dielectrophoresis panel shown in FIG.
  • FIG. 6 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a second exemplary embodiment.
  • FIG. 7 is a plan view showing the schematic configuration in the vicinity of the observation region in one electrophoresis lane of the dielectrophoresis panel shown in FIG.
  • FIG. 8 is a cross-sectional view taken along the line D-D of the dielectrophoresis panel shown in FIG.
  • FIG. 9 is a cross-sectional view showing a schematic configuration of another dielectrophoresis panel according to the second exemplary embodiment.
  • FIG. 10 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a third embodiment.
  • FIG. 11 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a fourth exemplary embodiment.
  • FIG. 12 (a) is a plan view showing a schematic configuration of the dielectrophoresis panel according to the fifth embodiment, and (b) to (e) are electrophoretic lanes of the dielectrophoresis panel shown in (a).
  • FIG. 6 is a plan view schematically showing the shape of a migration electrode in FIG.
  • FIG. 13 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a sixth embodiment.
  • FIG. 14 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a seventh embodiment.
  • FIG. 15 is an exploded cross-sectional view of the dielectrophoresis panel shown in FIG.
  • FIG. 16 is a plan view showing a schematic configuration of a dielectrophoresis panel according to an eighth embodiment.
  • FIG. 17 is a cross-sectional view of the dielectrophoresis panel shown in FIG.
  • FIG. 18 is a plan view of the dielectrophoresis panel according to the ninth embodiment when the upper substrate side force is also viewed.
  • FIG. 19 is a cross-sectional view of the dielectrophoresis panel shown in FIG.
  • FIG. 20 is a cross-sectional view taken along the line B′-B of the dielectrophoresis panel shown in FIG.
  • FIG. 21 is a schematic configuration diagram of a dielectrophoresis system including the dielectrophoresis panel shown in FIG.
  • FIG. 22 is a cross-sectional view of the main part schematically showing the state of floating and transporting the target particles in the electrophoresis medium using the dielectrophoresis system shown in FIG. 21 in the cross section of the dielectrophoresis panel shown in FIG.
  • (A) is a cross-sectional view of the main part showing how the target particles are levitated in the DEP mode
  • (b) is a cross-sectional view of the main part showing how the levitated target particles are conveyed in the TWD mode. is there.
  • FIG. 23 is a plan view of another dielectrophoresis panel according to the ninth embodiment viewed from the upper substrate side.
  • FIG. 24 is a plan view for explaining a planar positional shift between an electrode in the first electrode row and an electrode in the second electrode row in the dielectrophoresis panel according to the ninth embodiment.
  • FIG. 25 is a plan view of the dielectrophoresis panel according to the tenth embodiment when the upper substrate side force is also viewed.
  • FIG. 26 is a cross-sectional view of the dielectrophoresis panel shown in FIG. 25, taken along line C′-C.
  • FIG. 27 is a sectional view showing a schematic configuration of another dielectrophoresis panel according to the tenth embodiment.
  • FIG. 28 is a cross-sectional view of another main part schematically showing the state in which the target particles in the electrophoresis medium are floated and conveyed using the dielectrophoresis system shown in FIG. 21 in the cross section of the dielectrophoresis panel shown in FIG. (A) is a principal part sectional view showing how the target particles are floated, and (b) and (c) are principal part sectional views showing a state where the floated target particles are conveyed.
  • FIG. 29 is a cross-sectional view of still another main part schematically showing the state of floating and transporting the target particles in the electrophoretic medium using the dielectrophoresis system shown in FIG. 21 in the cross section of the dielectrophoresis panel shown in FIG.
  • (A) is a cross-sectional view of the main part showing how the target particles are levitated
  • (b) and (c) are cross-sectional views of the main part showing how the levitated target particles are conveyed. .
  • FIG. 30 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a twelfth embodiment.
  • FIG. 31 is a cross-sectional view of the dielectrophoresis panel shown in FIG. 30, taken along line D′-D ′.
  • FIG. 32 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a thirteenth embodiment.
  • FIG. 33 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a fourteenth embodiment.
  • FIG. 34 (a) is a plan view showing a schematic configuration of the dielectrophoresis panel according to the fifteenth embodiment, and (b) to (e) are diagrams in each electrophoresis lane of the dielectrophoresis panel shown in (a). Electrophoresis electrode It is a top view which shows a shape typically.
  • FIG. 35 is a perspective view showing a schematic configuration of a conventional particle transport device using a dielectrophoresis phenomenon.
  • FIG. 36 (a) is a side view showing a schematic configuration of a conventional dielectrophoresis apparatus for separating cells using comb-shaped electrodes, and (b) is a schematic diagram of the dielectrophoresis apparatus shown in (a). It is a top view which shows the structure of a part.
  • FIG. 37 is a diagram for explaining a technique for transporting cells using comb-shaped electrodes.
  • Electrophoretic electrode array (electrode array)
  • Electrophoretic electrode array (first electrode array) 42 Second electrode
  • Electrophoresis array (second electrode array) 43 Spacing layer (electrophoresis lane wall) 43a Bulkhead (electrophoresis lane wall)
  • a dielectrophoresis chip microchip substrate having a plurality of electrophoresis lanes will be described as an example of the flow path.
  • the present embodiment is not limited to this. It is not a thing.
  • FIG. 1 is a perspective view showing a schematic configuration of a dielectrophoresis panel according to the present embodiment.
  • FIG. 2 is a plan view of the dielectrophoresis panel shown in FIG. 1 viewed from the upper substrate side.
  • 3 is a cross-sectional view taken along the line AA of the dielectrophoresis panel shown in FIG. 2
  • FIG. 4 is a cross-sectional view taken along the line BB of the electrophoretic panel shown in FIG.
  • FIG. 5 is a schematic configuration diagram of the dielectrophoresis system according to the present embodiment provided with the dielectrophoresis panel shown in FIG.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 (dielectrophoresis chip, electrophoresis array) according to the present embodiment as a so-called microchip substrate has a lower substrate 1 ( A plurality of migration lanes 3 (flow paths) having migration spaces are provided between the first substrate) and the upper substrate 2 (second substrate).
  • the migration lane 3 has a pattern of the migration lane wall 4 on one substrate of the pair of substrates, in the present embodiment, the lower substrate 1 and along the formation region of the migration lane 3. Is formed.
  • Each migration lane 3 has an injection hole 5 (opening, injection) for injecting and discharging a sample (swimming medium) containing an object to be observed (dielectric substance) such as a sample solution. An entrance) is formed.
  • At least one of the lower substrate 1 and the upper substrate 2 is preferably formed of a transparent substrate (transparent insulator substrate) such as glass, quartz, or plastic.
  • a transparent substrate transparent insulator substrate
  • transparent substrates for example, transparent substrates of about 10 cm ⁇ 10 cm are used.
  • an electrophoresis electrode array 6 electrophoresis electrode wiring
  • an electrode array (comb electrode) force composed of a plurality of electrophoresis electrodes 6a (electrodes for electrophoresis) is straddled across each electrophoresis lane 3 ... It is provided perpendicular to each electrophoresis lane 3.
  • the migration electrode 6a includes, for example, ITO (Indium Tin Oxide), ZnO
  • a transparent conductive oxide film such as (Zinc Oxide) or IZO (Indium Zinc Oxide).
  • the electrode material used for the migration electrode 6a is not particularly limited as long as it is a transparent conductive material, but among these, ITO is preferable.
  • a migration electrode 6 a having a film thickness of about 2000 A, an electrode length of about 10 cm, and an electrode width (L: line) of 30 m and an electrode interval (S: space) of 30 ⁇ m. 1000 lines are formed so that m (that is, LZS force S is 30 ⁇ m).
  • the conditions such as the electrode width, the electrode interval, and the electrode length (wiring length) are not particularly limited, and the size and arrangement of the particles to be analyzed (that is, the particles in the electrophoresis medium) are not particularly limited. In addition, it may be set as appropriate according to the intended operation (separation, collection, transport, etc.). Further, the film thickness and electrode material of the swimming electrode 6a can also be set as appropriate, and are not particularly limited.
  • the migration electrode array 6 (that is, each migration electrode 6 a) extends over the plurality of migration lanes 3, and acts in common on each migration lane 3.
  • the electrophoresis electrode array 6 has a mounting / connecting portion 6b (input terminal portion) at one end portion of the lower substrate.
  • a flexible printed circuit (hereinafter referred to as “FPC”) 17 is mounted on the mounting / connecting portion 6b, and the control board 50 (control portion; drive) shown in FIG. Connected to the control unit).
  • the control board 50 will be described later.
  • a lower surface protective film is provided on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively.
  • the lower surface protective film 7 and the upper surface protective film 8 are formed.
  • the lower surface protective film 7 and the upper surface protective film 8 constitute the bottom wall and the top wall of the inner wall of the migration lane 3, respectively.
  • Examples of the material for the lower surface protective film 7 and the upper surface protective film 8 include fluorine-based resin; human cell film; organic film such as acrylic resin and polyimide resin; The materials for the film 7 and the upper surface protective film 8 are appropriately set according to the type of particles to be migrated. There is no particular limitation. Further, the film thickness of the lower surface protective film 7 and the upper surface protective film 8 is not particularly limited as long as it can protect (cover) the inner wall of the migration lane 3, particularly the surface of each of the migration electrodes 6 a. It is not something.
  • the artificial cell membrane includes, for example, “Livisure” (registered trademark) manufactured by NOF Corporation, “PCmodifer” (registered trademark) manufactured by fcAI Neochip, and the like.
  • a material having photosensitivity can also be used as the material for the lower surface protective film 7 and the upper surface protective film 8.
  • a material having photosensitivity as the material for the lower surface protective film 7 and the upper surface protective film 8 for example, a portion where no protective film other than the migration lane 3 is required, for example, a mounting terminal portion (implementation 'connection portion 6b) Can be removed by, for example, photolithography, and the time and labor of subsequent processes can be saved.
  • the migration lane wall 4 is a frame provided with a plurality of partition walls 4a that partition the inside into a plurality of lanes as partition walls (partitions). Each partition wall 4a is perpendicular to the electrophoresis electrode array 6 so that the electrophoresis electrode array 6 (each electrophoresis electrode 6a) and the electrophoresis lane 3 intersect (orthogonal in the present embodiment). In parallel!
  • the migration lane wall 4 is formed of, for example, a sealing material (adhesive).
  • the sealing material is not particularly limited.
  • a conventionally known resin is used as the sealing material.
  • an epoxy resin or an adhesive resin (adhesive) such as an epoxy adhesive made of a resin composition containing epoxy resin as a main component is used.
  • the sealing material includes V or a loose spacer (spacing retaining material) such as a spherical spacer or a fiber-like spacer.
  • spacer mixed in the sealing material for example, polytetrafluoroethylene, glass so-called Teflon (registered trademark) spacer, glass spacer or the like is used. Can be used.
  • electrophoresis lanes 3 having a lane width (interval between partition walls 4a'4a) of about 1 cm and a lane length of about 6 cm are formed in parallel.
  • the width of the electrophoresis lane wall 4 is set to about 2 mm.
  • a glass spacer with a particle size of 40 ⁇ m is mixed in the sealant so that the thickness of electrophoresis lane 3 (height of electrophoresis lane wall 4) is uniform.
  • either one of the lower substrate 1 and the upper substrate 2 has an injection hole 5 for injecting and discharging a sample (electrophoresis medium) to and from each of the electrophoresis lanes 3 described above. Formed for each electrophoresis lane 3.
  • holes having a hole diameter of about 2 mm are provided at both ends of each electrophoresis lane 3 in the upper substrate 2 as the injection and discharge holes 5.
  • each electrophoresis lane 3 the extending direction (longitudinal direction) of the electrophoresis electrode array 6 and the straight line connecting the two injection / discharge holes 5 in each electrophoresis lane 3 are as vertical as possible. It is hoped that it will be provided!
  • transparent substrates of, for example, 10 cm ⁇ 10 cm are used for the lower substrate 1 and the upper substrate 2.
  • the electrophoresis electrode array 6 is formed on the lower substrate 1.
  • an ITO film is formed on the lower substrate 1 by sputtering deposition or the like, and then patterned into an electrode shape using photolithography.
  • the migration electrode array 6 having a thickness of about 2000 A, an LZS force S of 30 ⁇ m, an electrode length of about 10 cm and 1000 electrode array forces is formed.
  • a mounting / connecting portion 6b (input terminal portion) is formed as a pattern on the end portion of the electrophoresis electrode array 6 as a mounting terminal.
  • each electrophoresis lane 3 is formed by drilling, for example, with a drill, a portion that overlaps the electrophoresis lane 3 in the upper substrate 2.
  • Inject and discharge holes 5 each having a hole diameter of about 2 mm are provided at both ends of each.
  • other methods such as blasting and etching can be used.
  • a lower protective film 7 and an upper protective film 8 are formed respectively.
  • an epoxy system in which, for example, a glass spacer having a particle size of 40 ⁇ m is mixed as a reactive adhesive (thermosetting adhesive) on the lower substrate 1 on which the lower surface protective film 7 is formed.
  • Apply adhesive (seal).
  • the electrophoresis lane wall 4 having a width of about 2 mm and a height of about 40 m is formed.
  • a printing method using a screen plate or a drawing method using a dispenser is used for the application of the sealing material.
  • the migration lane wall 4 is formed of a sealing material containing a glass spacer! Can be kept uniform. Further, as described above, the migration lane wall 4 having a plurality of partition walls 4a can be easily formed by patterning the sealing material using printing or a drawing method. Thereby, a plurality of electrophoresis lanes 3 can be easily formed.
  • the lower substrate 1 and the upper substrate 2 are disposed to face each other and are bonded together.
  • the migration lane 3 surrounded by the migration lane wall 4 that partitions the space between the lower substrate 1 and the upper substrate 2 and the lower substrate 1 and the upper substrate 2 is formed.
  • the lower substrate 1 and the upper substrate 2 are disposed to face each other, and hot pressing is performed from both the upper and lower surfaces.
  • the sealing material on the lower substrate 1 is softened and softened by hot pressing, and then cured and bonded to each other, whereby the migration lane 3 is formed between the two substrates.
  • the gap in the electrophoresis lane 3 is maintained by the spacer included in the sealing material constituting the electrophoresis lane wall 4.
  • four rows of electrophoresis lanes 3 having a lane width (interval between partition walls 4a'4a) of about 1 cm, a lane length of about 6 cm, and a thickness of about 40 m are formed in parallel.
  • the dielectrophoresis panel 10 is connected to the control board 50 via the FPC 17 mounted on the mounting / connecting portion 6b formed on the end portion of the electrophoresis electrode array 6.
  • a dielectrophoresis apparatus 70 includes the dielectrophoresis panel 10, a control board 50, and a DC power source 60 (power source).
  • the dielectrophoresis system that is useful in this embodiment The system 85 includes the dielectrophoresis device 70 and an imaging system 80.
  • the control board 50 includes a frequency / timer control unit 50a, a synchronization signal control unit 50b, an oscillation circuit unit 50c, and a phase selection / amplification unit 50d.
  • the voltage (DC (direct current) voltage) output from the DC power supply 60 is input to the control board 50 and drives the control board 50.
  • an AC voltage is output from the oscillation circuit unit 50c.
  • the output AC voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 50a, synchronization signal control unit 50b, and phase selection / amplification unit 50d. It is applied (input) to the dielectrophoresis panel 10 via the FPC 17.
  • the imaging system 80 includes a light source such as a laser for applying irradiation light to the observation region (measurement unit) in the migration lane 3 of the dielectrophoresis panel 10, an optical microscope, a CCD (charge coupled device; charge coupled device) is an optical system equipped with an imaging device such as a camera, and is installed in the upper or lower portion of the electrophoresis lane 3 for optical detection.
  • a light source such as a laser for applying irradiation light to the observation region (measurement unit) in the migration lane 3 of the dielectrophoresis panel 10
  • an optical microscope a CCD (charge coupled device; charge coupled device) is an optical system equipped with an imaging device such as a camera, and is installed in the upper or lower portion of the electrophoresis lane 3 for optical detection.
  • the sample used in the present embodiment may be a sample containing an inductive substance that can induce a dielectrophoretic force. More specifically, a medium made of a dielectric substance is included in the medium. As long as the sample is dispersed in the sample, there is no particular limitation.
  • the “electrophoresis medium” used as the sample (sample solution) in the present embodiment is a dispersion in which “particles” (electrophoretic particles) to be electrophoresed are dispersed in a “solvent”. An electrophoresis medium in which particles to be migrated are dispersed in a solvent is used as the sample.
  • the particles include dielectric particles, that is, biological cells, bacteria, viruses, parasitic microorganisms, DNA, proteins, nanopolymers, botanical particles (pollen, etc.), non-biology Particle and the like.
  • the particles include other particles that can be suspended in a liquid and can induce dielectrophoretic force.
  • the particles may be a compound or gas dissolved or suspended in a liquid (so-called dielectric gas).
  • dielectric gas a liquid
  • Non-Patent Document 4 discloses that carbon nanotubes are sorted (separation between metal and semiconductor) by dielectrophoresis.
  • carbon nanotubes that are hydrophilic and do not disperse in water are supercritical.
  • Suspension of carbon nanotubes is prepared by dispersing using water, and the above-mentioned carbon nanotubes are selected using the fact that semiconductors can migrate and metals cannot.
  • the difference in the dielectrophoretic rate between the medium is a parameter of the driving force.
  • a fine valve of gas such as air or nitrogen
  • an anaerobic substance can be carried in a gas valve such as nitrogen. That is, even an anaerobic substance can be dispersed in a solvent by being enclosed in a gas valve as described above, and can be used as particles that are useful in this embodiment.
  • the solvent for example, water, physiological saline, ethanol, methanol, butanol, oil, or the like can be used as appropriate.
  • a mixed solvent in which a plurality of solvents are mixed for example, a mixed solution of water and ethanol
  • cellulose, polyvinyl alcohol or the like can be added as a regulator.
  • one lane 3 contains a diluted aqueous solution (physiological saline) of a specific concentration of specific E. coli (before culture) as a comparative sample. Inject from the discharge hole 5.
  • each E. coli cultured in three different environments was diluted with an aqueous solution diluted to the same concentration as the comparative sample from one injection 'discharge hole 5 in each electrophoresis lane 3. inject.
  • DEP stationary DEP
  • an AC voltage is applied alternately between adjacent migration electrodes 6a at an applied voltage of 8 V, a frequency of 10 MHz, and an adjacent phase difference ⁇ .
  • live cells are trapped at the end of the migration electrode 6a, and dead cells rise near the center of the migration electrode 6a.
  • the live cells trapped at the end of the electrophoresis electrode 6a are observed by the imaging system 80.
  • the difference due to each culture environment is confirmed. For example, the number of cells in a certain area is counted by epi-illumination observation. This enables a quantitative comparison.
  • TWD traveling wave DEP
  • an AC voltage is applied to the adjacent migration electrode 6a with an applied voltage of 8 V, a frequency of 10 MHz, and an adjacent phase difference ⁇ 2.
  • production by each culture environment is confirmed.
  • the number of dead cells that pass through a certain region in a certain time is increased by observation with an optical microscope, for example. This enables a quantitative comparison.
  • TWD traveling wave DEP
  • an AC voltage is applied to the adjacent migration electrode 6a with an applied voltage of 8 V, a frequency of 10 MHz, and an adjacent phase difference ⁇ 2.
  • the difference of the dead cell generation by each culture environment can be confirmed. For example, by counting the number of dead cells passing through a certain region at a certain time, for example, by observation with an optical microscope, a quantitative comparison can be made.
  • a plurality of electrophoresis lanes 3 are provided in parallel, and the electrophoresis electrodes 6a (electrophoresis electrode array 6) acting in common on each electrophoresis lane 3 are provided.
  • the migration electrode 6a the migration electrode array 6
  • the migration control voltage can be input to the migration electrode array 6 in a lump.
  • a plurality of signals are input.
  • An electric field can be applied to electrophoresis lane 3 of Therefore, according to the present embodiment, migration control of a plurality of samples (electrophoresis media) can be performed simultaneously in a lump. Therefore, according to the present embodiment, a plurality of different types of samples (for example, samples having different relative dielectric constants and viscosities of solvents, or samples having different physical property values (such as relative dielectric constant) of particles in the solvent) can be placed under the same electrophoresis conditions under the same conditions at the same time, realizing a dielectrophoresis chip and dielectrophoresis device that adapts to a wide range of test conditions and a dielectrophoresis system 85. Is possible.
  • the dielectrophoresis panel 10 dielectrophoresis chip having the plurality of electrophoresis lanes 3 as described above, the type of the solvent (electrophoresis medium) is changed to the electrophoresis lane 3. It is possible to select specific particles at the same time by changing each electrode and changing the electrode shape for each lane 3 with the same solvent (electrophoresis medium). Yes, it is possible to efficiently select a plurality of particles. Therefore, according to the present embodiment, it is possible to realize a dielectrophoresis chip and a dielectrophoresis apparatus that are compatible with a wide range of applications, and a dielectrophoresis system 85.
  • the migration electrode 6a is constituted by a transparent electrode such as ITO, and therefore, when the migration medium is observed as a sample, the migration electrode 6a is blocked by the migration electrode 6a. It is possible to observe from any direction above and below the electrophoresis lane 3 (on the lower substrate 1 side and the upper substrate 2 side). For this reason, the observation direction can be selected.
  • the migration lane wall 4 is formed on the lower substrate 1 on which the lower surface protective film 7 is formed, that is, on the lower surface protective film 7.
  • the form of the electrophoretic lane wall 4 in the lower surface protective film 7 and the upper surface protective film 8 when the lower surface protective film 7 and the upper surface protective film 8 are formed, that is, the above-described form is not limited thereto. Part or all of the overlapping region with the electrophoresis lane wall 4 (seal material) may be removed. By adopting such a structure, the lower surface protective film 7 and the upper surface protection are provided. Even when the adhesion between the membrane 8 and the sealing material is poor, sufficient adhesion can be obtained.
  • the lower surface protective film 7 and the upper surface protective film 8 are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively.
  • the configuration is described as an example.
  • the present embodiment is not limited to this, and the lower surface protective film 7 and the upper surface protective film 8 are not necessarily formed on the lower substrate 1 and the upper substrate 2.
  • the protective film (the lower surface protective film 7 and the upper surface protective film) that covers the migration electrodes 6a on the opposing surfaces of the lower substrate 1 and the upper substrate 2, particularly on the migration electrodes 6a in the migration lane 3 By providing 8), it is possible to prevent the migrating particles from adsorbing to the migration electrode 6a. Therefore, depending on the type of the particles, it is desirable that the lower protective film 7 and the upper protective film 8 are formed on the lower substrate 1 and the upper substrate 2.
  • the migration lane wall 4 is formed on the lower substrate 1 as an example.
  • the migration lane wall 4 is not necessarily provided on the lower substrate 1. It may be formed on the upper substrate 2 which need not be formed on the upper substrate 2.
  • the present embodiment is not limited to this.
  • 3 and the electrophoresis electrodes 6a overlap each other as an observation area, and the sample (electrophoresis medium) in the electrophoresis lane 3 only needs to be provided in the observation area.
  • the dielectrophoresis panel 10 only one of the lower substrate 1 and the upper substrate 2 is formed of a transparent substrate, and the electrophoresis lane 3 and the electrophoresis electrode 6a on the other substrate are formed.
  • An observation window (having an opening or a transparent region) may be provided in a region (observation region) where the (electrophoresis electrode array 6) overlaps, and may have a configuration.
  • the dielectrophoresis panel 10 is such that the lower substrate 1 and the upper substrate 2 are transparent in the region (observation region) where the electrophoresis lane 3 and the migration electrode 6a (migration electrode array 6) overlap on both substrates. It is possible to have a structure that also has a non-transparent substrate (semi-transparent or opaque substrate) force provided with a region (one of which may be an opening!).
  • the transmission mode is very effective for observation using fluorescence and filtering.
  • the substrate sizes of the lower substrate 1 and the upper substrate 2 are not particularly limited as long as they are appropriately set. Furthermore, the specific size made in the present embodiment is also only an example of the embodiment, and various changes can be made according to the analysis target. That is, the substrate size, electrode size (electrode width, electrode interval, electrode thickness, electrode length, etc.) of the lower substrate 1 and the upper substrate 2, the film thickness of the lower surface protective film 7 and the upper surface protective film 8, the migration lane wall 4 Conditions such as layer thickness (height), lane width, and lane length are not particularly limited, and can be variously changed depending on the analysis target.
  • the case where the electrophoresis lanes 3 are formed in four rows in parallel has been described as an example.
  • the number of lanes in the electrophoresis lane 3 is appropriately set according to the number of measurement samples and the like. There is no particular limitation.
  • the case where the migration electrode 6a (migration electrode array 6) force is provided in the vertical direction with respect to each migration lane 3 is described as an example.
  • the present embodiment is not limited to this.
  • the same electrophoresis electrode 6a (electrophoresis electrode array 6) force is extended over a plurality of electrophoresis lanes 3.
  • the migration electrode 6a extends in a direction perpendicular to the migration lanes 3 as long as they act in common.
  • the observation regions in each swimming lane 3 are provided adjacent to each other. For this reason, it is preferable that the electrophoresis electrode 6a is provided in a direction perpendicular to the electrophoresis lanes 3.
  • a plurality of migration lanes 3 are provided on one substrate, and the migration electrode 6a (migration electrode array 6) force spans the plurality of migration lanes 3.
  • the force described by taking the dielectrophoresis panel 10 as an example is not limited to this embodiment. Only one electrophoresis lane 3 is provided on one substrate. You may have a structure. More specifically, the dielectrophoresis panel 10 according to the present embodiment has a configuration in which one electrophoresis lane 3 is provided on the lower substrate 1 in FIGS. Have it! /
  • a dielectrophoresis panel 10 in which an electrophoresis lane 3 is provided between the lower substrate 1 and the upper substrate 2 is taken as an example.
  • the present embodiment is not limited to this, it depends on the type of the sample (sample solution).
  • the upper surface of the electrophoresis lane 3 is not covered with the upper substrate 2.
  • the migration cell formed on the lower substrate 1 may be an electrophoresis tank composed of the migration lane wall 4 formed on the lower substrate 1. It may be a closed space formed by the substrate 2 and the electrophoresis lane wall 4.
  • the dielectrophoresis chip, the dielectrophoresis apparatus, and the dielectrophoresis system according to the present embodiment are used for bio-research microarrays such as separation and detection of specific cells, such as biomolecules and resin beads.
  • the present invention can be suitably used for a chemical analysis system that conveys the dielectric substance by dielectrophoretic force.
  • the dielectrophoresis chip, the dielectrophoresis apparatus, and the dielectrophoresis system according to the present embodiment are capable of observing and photographing with transmitted light as described above. It is very effective for observation.
  • the migration electrode 6a is formed of a so-called transparent electrode such as ITO, ITO ⁇ , and ⁇ has been described as an example.
  • the resistivity of transparent conductive materials such as ⁇ , ⁇ , and ⁇ is on the order of 10 2 ⁇ 'cm. This is two orders of magnitude larger than metal materials such as aluminum (Al, approximately 2.7 ⁇ 'cm) and gold (Au, approximately 2.5 ⁇ ' cm). Therefore, when the same shape electrode (wiring) is formed of a transparent conductive material and a metal material, the electrode formed of the transparent electrode material is relatively 1 to 2 in comparison with the electrode formed of the metal material. It becomes a digit high resistance.
  • the migration electrode 6a when the migration electrode 6a is formed of a transparent electrode material, as a result, the migration electrode 6a (the migration electrode array 6) becomes a high resistance wiring.
  • the driving voltage for dielectrophoresis is AC, but the driving conditions can range from several MHz to several tens of MHz. Under such high-frequency application conditions, there is a risk of attenuation or delay of the input voltage waveform depending on the time constant of the electrode wiring. Although it depends on the electrode conditions, if the attenuation or delay becomes significant, the error from the input drive voltage will increase, which may affect the dielectrophoretic behavior and, consequently, the experimental and analytical results. . Then, when a transparent conductive material having a high resistance is used for the migration electrode 6a (wiring), it is judged that the above-mentioned influence becomes relatively large.
  • the migration electrode 6a (migration electrode array 6) is partially formed of a transparent electrode!
  • a dielectrophoresis panel will be described as an example.
  • FIG. 6 is a plan view showing a schematic configuration of a dielectrophoresis panel according to the present embodiment.
  • FIG. 7 is a plan view showing the schematic configuration near the observation region in one migration lane of the dielectrophoresis panel shown in FIG. More specifically, FIG. 7 shows a schematic configuration of the dielectrophoresis panel shown in FIG.
  • FIG. 8 is a cross-sectional view of the dielectrophoresis panel shown in FIG.
  • FIG. 9 is a cross-sectional view showing a schematic configuration of another dielectrophoresis panel according to the present embodiment.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 that is useful in the present embodiment has each electrophoretic panel.
  • An observation area 9 for observing and imaging (transmission imaging) the sample (electrophoresis medium) in each electrophoresis lane 3 is provided at the part where the screen 3 and the electrophoresis electrode array 6 overlap.
  • the swimming electrode 6a in the observation region 9 is composed of a transparent electrode 6a. Further, a metal material (metal electrode 6a) is used for the swimming electrode 6a in a portion not overlapping with the observation region 9.
  • an electrode (electrode wiring) having a two-layer structure in which a metal electrode layer is partially formed on a transparent electrode layer is used as the migration electrode 6a.
  • the migration electrode 6a which is useful in the present embodiment, only the portion of the migration electrode 6a that overlaps the observation region 9 is composed of a single-layer electrode (single-layer wiring) of the transparent electrode 6a, and the other portions are transparent electrodes It consists of a two-layer electrode (two-layer wiring) of 6a and a metal electrode 6a.
  • the formation region of the migration electrode 6a, which is the transparent electrode 6a, is used as the observation region 9.
  • the material of the transparent electrode 6a for example, a transparent conductive material such as ITO, ⁇ , and ⁇ can be used. Among these transparent conductive materials, soot is preferably used.
  • the metal material a metal material such as aluminum (A1), titanium (Ti), molybdenum (Mo), platinum (Pt), gold (Au), or an alloy containing these metals is used. This comes out.
  • the migration electrode array 6 transparent electrode 6a and metal electrode 6a
  • Conditions such as electrode width, electrode interval, and electrode length (wiring length) are particularly limited.
  • the thickness of the electrophoresis electrode 6a transparent electrode 6a and metal electrode 6a
  • the electrode material in each electrode layer are also included.
  • the electrode length of the single-layer wiring portion of the transparent electrode 6a in the migration electrode array 6 is not particularly limited, and the lane width of the migration lane 3 and the resistivity of the migration electrode 6a (migration electrode array 6) What is necessary is just to set suitably according to etc.
  • the electrode formed of the transparent electrode material has a relatively high resistance compared to the electrode formed of the metal material.
  • the overlapping region of the migration lane wall 4 in FIG. 6 has a two-layer structure of the transparent electrode 6a and the metal electrode 6a.
  • the electrode 6a has a single-layer structure of the transparent electrode 6a in a part of the migration lane 3.
  • an ITO film is formed on the lower substrate 1 by sputtering vapor deposition or the like, and then patterned into an electrode shape using photolithography.
  • transparent electrodes 6a are formed on the lower substrate 1 on the lower substrate 1 on the lower substrate 1.
  • a metal film is formed on the lower substrate 1 on which the transparent electrodes 6a ... are formed using a metal material by sputtering or the like, and the metal film is formed using photolithography.
  • a wiring portion that patterns the electrode shape and overlaps the observation region 9 in the patterned metal film (in this embodiment, a part of the electrophoresis lane 3, more specifically, the electrophoresis lane). The pattern of the wiring part overlapping the part between the application areas of the sealing material that constitutes the wall 4 is removed.
  • the portion where the migration electrode 6a (the migration electrode array 6) overlaps the observation region 9 is an ITO single layer wiring, and the other portion is a metal electrode such as Au 6a a transparent electrode 6a such as ZITO.
  • the method for forming portions other than the migration electrode array 6 is basically the same as in the first embodiment. Also in the present embodiment, simultaneously with the formation of the migration electrode 6a, the mounting / connection portion 6b is pattern-formed at the end of the migration electrode 6a as a mounting terminal.
  • the portion of the electrophoresis electrode array 6 that overlaps the observation region 9 provided in the electrophoresis lane 3 as described above is configured by the transparent electrode 6a such as ITO, and the rest.
  • the transparent electrode 6a such as ITO
  • the part By configuring the part with a metal electrode 6a such as Au having a lower resistance than the transparent electrode 6a, the sample ( Observation from both the top and bottom of the electrophoresis lane 3 (above the lower substrate 1 side and the upper substrate 2 side) without being obstructed by the electrophoresis electrode 6a (the electrophoresis electrode array 6)
  • the resistance of the entire migration electrode array 6 is compared with the case where a migration electrode array having the same shape (same pattern) as the migration electrode array 6 and having a transparent electrode force such as ITO is used.
  • the observation conditions for optical observation are not limited, and it is possible to reduce the delay of the input voltage (electrophoresis control input voltage), and the measurement is easy to use.
  • the migration electrode array 6 is composed of a transparent electrode 6a such as ITO in the portion overlapping the observation region 9, and the other portion has a lower resistance than the transparent electrode 6a.
  • the force of the metal electrode 6a such as Au is not limited to this.
  • the electrophoresis electrode array 6 is formed of a transparent electrode in a region where the electrophoresis electrode array 6 overlaps the observation region 9.
  • the migration electrode array 6 includes a portion formed by the transparent electrode 6a in a region where the migration electrode array 6 overlaps the observation region 9 (that is, a portion consisting only of the transparent electrode 6a), The portion where the metal electrode 6a is provided (that is, the metal electrode 6a
  • the migration electrode array 6 has a configuration in which the metal electrode 6a is formed (laminated) in a part of the region where the migration electrode array 6 does not overlap the observation region 9 with respect to the transparent electrode 6a. And you can! /
  • the migration electrode array 6 is formed by forming at least a part of the migration electrode array 6 with the transparent electrode 6a in the region where the migration electrode array 6 overlaps the observation region 9 (that is, the transparent electrode 6a A non-transparent (semi-transparent or opaque) conductive material (low resistance conductive material) force other than metal in part of the observation region 9 or part of the non-observation region.
  • the electrode may be provided and may have a configuration.
  • the third electrode is used in combination with the metal electrode 6a, which may be provided instead of the metal electrode 6a.
  • the third electrode is provided in the same layer as the metal electrode 6a.
  • the migration electrode 6a By forming a laminated structure on the metal electrode 6a, the migration electrode 6a As a configuration with a multilayer structure of three or more layers.
  • the electrophoresis panel 10 includes, for example, only one of the lower substrate 1 and the upper substrate 2 formed of a transparent electrode, and the electrophoresis lane on the other substrate.
  • the observation window (opening or transparent region) may be provided in a region (observation region 9) where 3 and the migration electrode 6a (migration electrode array 6) overlap.
  • the dielectrophoresis panel 10 includes the lower substrate 1 and the upper substrate 2 in a region (observation region 9) where the electrophoresis lane 3 and the electrophoresis electrode 6a (electrophoresis electrode array 6) overlap on both substrates. It is also possible to have a structure that also has a force of a non-transparent substrate (semi-transparent or opaque substrate) provided with a transparent region (any one may be an opening).
  • the migration electrode 6a (the migration electrode array 6) in the observation region 9 (the region where the migration electrode array 6 overlaps the observation region 9) is used as a transparent electrode.
  • the structure is described as an example. However, according to the present embodiment, for example, as shown in FIG.
  • the non-transparent electrode A dielectrophoresis panel 10 capable of using an epi-illumination mode for observing and projecting reflected (epi-illumination) light from the (metal electrode) can be provided. As a result, the observation conditions can be relaxed, and more complex dielectrophoretic behavior can be observed.
  • the non-transparent electrode reflection (epi-illumination) electrode
  • the non-transparent electrode reflection (epi-illumination) electrode
  • a dielectrophoresis panel 10 that can perform various types of observations and can analyze two types of angles.
  • the migration electrode array 6 (migration electrode 6a) includes a portion made of the transparent electrode 6a and a portion provided with the metal electrode 6a.
  • the resistance of the entire migration electrode array 6 can be reduced as compared with the case where the migration electrode array 6 is formed of only the transparent electrode 6a, and the parasitic capacitance between the electrodes can be reduced. Therefore, as described above, it is possible to provide the dielectrophoresis panel 10 that can use any of the transmission mode and the epi-illumination mode using the translucent Z-illumination of light on the electrode surface as described above.
  • the transparent electrode with respect to the portion where the metal electrode 6a is provided (the reflection region 9b).
  • the ratio (9aZ9b) of the portion (transparent region 9a) that also has 6a force is not particularly limited.
  • the lower limit is 1Z3, that is, lZ3 ⁇ 9aZ9b (that is, the ratio of the transparent area 9a in the observation area 9 is 1Z4 or more).
  • L / 3 ⁇ 9a / 9b It is more preferable that l ⁇ 9aZ9b (that is, the ratio of the transparent region 9a in the observation region 9 is 1Z2 or more).
  • the transmission electrode Za (electrophoresis electrode array) is used as the dielectrophoresis panel 10 of the transmission mode Z epi-illumination mode type using light transmission Z epi-illumination on the electrode surface.
  • the case where part of 6) is formed with a transparent electrode has been described as an example, but the present embodiment is not limited to this.
  • either one of the lower substrate 1 and the upper substrate 2 is used as the migration lane 3 and the migration electrode 6a (migration electrode array) on the substrate.
  • 6) is formed with a non-transparent substrate having a transparent region in a part of the region (observation region 9) that overlaps, and the other substrate is a transparent substrate, or the electrophoresis lane 3 and the electrophoresis electrode 6a (the electrophoresis electrode).
  • the observation window appears in the area (observation area 9) where the array 6) overlaps.
  • the transmission mode Z epi-illumination mode dielectrophoresis panel 10 can also be provided by forming it with a non-transparent substrate having a region.
  • the present embodiment will be described mainly based on FIG. In the present embodiment, the differences from the first and second embodiments will be mainly described, and the components having the same functions as the components used in the first and second embodiments are described. The same number is assigned and its description is omitted.
  • FIG. 10 is a plan view showing a schematic configuration of the dielectrophoresis panel according to the present embodiment.
  • the upper substrate is indicated by a two-dot chain line.
  • LZS is 30 m for both
  • the migration electrode array 6 has a stripe structure in which the swimming electrodes 6a constituting the migration electrode array 6 are provided in parallel with each other in a stripe shape.
  • the electrode width and electrode interval of the migration electrode 6a are the regions where the migration electrode 6a (migration electrode array 6) overlaps the migration lane 3. And other areas are different. Therefore, in the present embodiment, the electrode shape of the swimming electrode 6a is different between the region where the migration electrode 6a (the migration electrode array 6) overlaps the migration lane 3 and the other regions. .
  • a plurality of frame-like migration lane walls 21 provided independently of each other are provided with a space between each other, thereby providing a plurality of migration lanes 3 provided in parallel and spaced apart from each other.
  • the electrode width and the electrode spacing of the electrophoresis electrode 6a are different between the inside of the electrophoresis lane 3 (inside the frame) and the region between the electrophoresis lanes (gap 22), that is, outside the electrophoresis lane 3 (outside the frame).
  • An electrophoresis electrode array 6 is provided in
  • the electrophoresis electrode 6a in the electrophoresis lane 3 in the region where the electrophoresis electrode array 6 used as the observation region 9 is overlapped with the electrophoresis lane 3 is For example, it is formed with an electrode width (L) of 10 ⁇ m and electrode spacing (S) of 10 m (electrode pitch 20 ⁇ m), while other regions, that is, regions not related to electrophoresis (that is, electrophoresis)
  • Electrophoresis electrode 6a (outside lane 3) has an electrode width of 30 m (L) and a maximum electrode interval of 30 m (that is, an electrode interval of 30 m at the center between adjacent lanes 3 and 3 at the center.
  • the electrode pitch is 60 ⁇ m.
  • the narrow pitch required only for the swimming electrode 6a group that is, the electrophoresis electrode 6a group in the observation region 9) in the electrophoresis lane 3 necessary for observation of the electrophoresis phenomenon.
  • Wiring is used, and the other area of the migration electrode 6a group (the migration electrode 6a group with a gap of 22mm) that is unrelated to the migration phenomenon is wide-pitch wiring.
  • the resistance of the entire migration electrode array 6 can be reduced, the parasitic capacitance can be reduced, and the attenuation and delay of the input AC voltage can be suppressed.
  • the wiring shape described above is only an example, and the present invention is not limited to this.
  • the migration electrode 6a is not limited to the transparent electrode, but can be in various forms as described above.
  • the migration electrode 6a has, for example, a laminated structure of a transparent electrode 6a and a metal electrode 6a.
  • observation and photographing in the transmission mode can be performed as described above, and the resistance of the entire migration electrode array 6 can be further reduced and the parasitic capacitance can be reduced.
  • the present embodiment will be described mainly based on FIG. In the present embodiment, differences from the first to third embodiments will be mainly described, and components having the same functions as the components used in the first to third embodiments will be described. Use the same number and The description of is omitted.
  • FIG. 11 is a plan view showing a schematic configuration of a migration panel that works on the present embodiment.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 shown in FIG. 11 has different electrode widths and electrode intervals (electrode pitches) of the migration electrodes 6a in each of the three migration lanes 3 provided in parallel and separated from each other! / ⁇ This is different from the dielectrophoresis panel 10 shown in FIG. In the dielectrophoresis panel 10 shown in FIG. 11, the electrode width and the electrode interval of the electrophoresis electrodes 6a are so large that the electrophoresis lane 3 on the side farther from the mounting / connecting part 6b provided at the end of the lower substrate 1 is larger.
  • the electrophoresis electrode array 6 is provided.
  • the electrophoresis electrode array 6 shown in FIG. 11 has an electrode width of 10 m, for example, in an order overlapping from the electrophoresis lane 3 on the mounting / connecting portion 6b side in the region overlapping with each electrophoresis lane 3.
  • Electrode part PI consisting of electrophoretic electrode 6a group with electrode spacing 10 m (electrode pitch 20 ⁇ m), and electrode part PI2 consisting of electrophoretic electrode 6a group with electrode width 20 ⁇ m and electrode spacing 20 m (electrode pitch 40 ⁇ m)
  • Electrode part P3 consisting of a group of electrophoretic electrodes 6a with electrode width 30 ⁇ m and electrode spacing 30 m (electrode pitch 60 ⁇ m)
  • a total of three different strip-shaped electrode parts P1, P2, P3 It has a configuration.
  • the migration electrode 6a between the electrode parts P1 and ⁇ 2 has, for example, an electrode width of 30 ⁇ m, an electrode interval at the end of the electrode part P1 of 10 ⁇ m (electrode pitch 20 ⁇ m), and the electrode parts
  • the electrode interval is 20 ⁇ m (electrode pitch 40 ⁇ m) at the P2 side end, and the electrode interval is determined by the array width of the migration electrode array 6 (both ends on both sides of the migration electrode array 6).
  • the electrode is formed so as to change linearly according to the electrode width between the electrodes 6a and 6a.
  • the migration electrode 6a between the electrode parts ⁇ 2 and ⁇ 3 has an electrode width of 30 / ⁇ ⁇ , an electrode interval of 20 ⁇ m (electrode pitch 40 ⁇ m) at the end of the electrode part ⁇ 2, and an end of the electrode part P3 side.
  • the electrode spacing is 30 m (electrode pitch 60 m), and the electrode spacing is determined by the array width of the migration electrode array 6 (the swimming electrodes 6a at both ends of the migration electrode array 6). ⁇ It is formed to change linearly according to the electrode width between 6a!
  • the electrode shape (or electrode width, electrode interval) of the migration electrode array 6 for each migration lane 3 by changing the electrode shape (or electrode width, electrode interval) of the migration electrode array 6 for each migration lane 3, a plurality of specific particles can be simultaneously used. Can be selected and identified, and multiple particles can be sorted efficiently.
  • FIGS. 12 (a) to (e) This embodiment will be described mainly based on FIGS. 12 (a) to (e).
  • differences from the first to third embodiments will be mainly described, and components having the same functions as those used in the first to third embodiments are described. The same number is assigned and its description is omitted.
  • Fig. 12 (a) is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment, and Figs. 12 (b) to 12 (e) are shown in Fig. 12 (a).
  • 4 is a plan view schematically showing the shape of the electrophoresis electrode 6a in each electrophoresis lane 3 of the dielectrophoresis panel 10.
  • FIG. 12 (a) for convenience of illustration, the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 includes four electrophoretic lanes 3 arranged in parallel in the dielectrophoresis panel 10 shown in the first embodiment.
  • the shape of the electrophoresis electrode 6a (the electrophoresis electrode array 6) is different! /.
  • the electrophoresis electrode array 6 has a wiring width as shown in Fig. 12 (b). It has a structure (stripe-type electrode structure) in which linear migration electrodes 6a of 30 / zm are provided in stripes.
  • the migration electrode array 6 has a structure in which linear migration electrodes 6a having a wiring width of 45 m are provided in a stripe pattern as shown in FIG. 12 (c). (Striped electrode structure).
  • the electrophoresis electrode array 6 is formed in a mountain-shaped (sawtooth) with a wiring width of 30 m, as shown in FIG. A plurality of electrophoretic electrodes 6a arranged in parallel at equal intervals.
  • the migration electrode array 6 has a wave width of 30 m as shown in FIG. A plurality of type migration electrodes 6a are arranged in parallel at equal intervals. The electrode spacing (electrode pitch) of each of the migration electrodes 6a is 60 ⁇ m.
  • the dielectrophoresis behavior is driven using the same sample (electrophoresis medium) and the same control voltage. Even in this case, it varies depending on the state of the electric field in the sample (electrophoresis medium) depending on the wiring, that is, the shape of the electrophoretic electrode 6a (electrophoretic electrode array 6).
  • the shape, electrode width, and electrode interval of the migration electrode 6a are small.
  • a dielectrophoresis panel in which one condition is different for each lane 3 has been described as an example.
  • the present embodiment is not limited to this.
  • the dielectrophoresis panel 10 useful for the present embodiment has a predetermined gap 22 (between the electrophoresis lanes) between the electrophoresis lanes 3 and 3 adjacent to each other.
  • the gap 22 and the migration lane 3 have a configuration in which at least one of the shape, electrode width, and electrode spacing of the migration electrode 6a (migration electrode array 6) is different. You may do it.
  • the electrode shape of the migration electrode array 6 in the migration lanes 3A.3B.3C is not a stripe shape! /
  • the electrode shape of the migration electrode array 6 in the gap portion 22 is a stripe structure, By shortening the wiring length, it is possible to suppress an increase in wiring resistance.
  • FIG. 13 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment. Also in FIG. 13, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 has mounting 'connection portions 6b at both ends of the electrophoresis electrode array 6, and these mounting'connection portions 6b' 6b Each has a configuration in which FPC 17 is mounted.
  • FPC 17 FPC 17
  • the FPCs 17 are each connected to the control board 50 (drive control unit, control device).
  • the dielectrophoresis panel 10 according to the present embodiment has the same drive AC voltage from the FPC 17 at both ends of the electrophoretic electrode array 6 to each electrophoretic electrode 6a during the dielectrophoresis test. Input at the same time.
  • the drive voltage is input from both ends of the migration electrode 6a, so that the drive voltage is also input only to one side force of the migration electrode 6a. It is possible to further suppress the effects of input voltage signal attenuation and delay due to wiring resistance and parasitic capacitance.
  • Embodiments 1 to 6 will be mainly described, and components having the same functions as those used in Embodiments 1 to 6 are described. Are given the same number and their explanation is omitted.
  • a method of injecting a sample solution (electrophoresis medium) as a sample into each electrophoresis lane 3 in the dielectrophoresis panel 10 will be mainly described.
  • Patent Document 6 describes a microchip that is not a system for dielectrophoresis but has an inlet formed above the microphone channel of the flow path chip.
  • injection / discharge hole 5 As a method for forming the injection / discharge hole 5, as shown in the first embodiment, there are methods such as drilling, blasting and etching.
  • protective layers are formed on the upper and lower substrates on the inner surface of the dielectrophoresis panel.
  • the lower substrate 1 and the upper substrate 2 are provided with a protective film (protective layer) that covers, for example, the migration electrode array 6, like the lower protective film 7 and the upper protective film 8.
  • the lower substrate 1 and the upper substrate 2 are subjected to a surface treatment such as hydrophilicity / water repellent treatment according to the sample to be injected into the electrophoresis lane 3.
  • the surface treatment agent may enter the injection port and contaminate the opening. If the surface treatment agent solidifies in the opening, it will cause an error in the opening diameter, and will cause problems such as poor connection and generation of dust when a connector is inserted.
  • FIG. 14 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment
  • FIG. 15 is a cross-sectional view taken along line E-E of the dielectrophoresis panel 10 shown in FIG. It is an exploded view.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 replaces the injection 'discharge hole 5 according to the first embodiment as an opening for injection / discharge of the sample.
  • an injection / discharge port 31 (opening, injection port) formed by the electrophoresis lane wall 4 Is provided.
  • the injection and discharge ports 31 are provided at both ends of the electrophoresis lane 3, respectively.
  • the inlet / outlet holes 5 have a diameter of about 2 mm and a height of about 40 m (equal to the gap of the panel cavity). Also in this embodiment, as in the first embodiment, the lane width (interval between partition walls 4a'4a) of each swimming lane 3 is about 1 cm and the lane length is about 6 cm. The width of 4 is set to about 2mm. In addition, a glass spacer having a particle diameter of 40 m is mixed in the sealing material used for forming the migration lane wall 4 so that the thickness of the migration lane 3 (height of the migration lane wall 4) is uniform. . Note that structures other than those described above are formed in the same manner as in the first embodiment.
  • the migration lane wall 4 is opened in each migration lane 3 by a partial force of a frame body (outer edge portion) that separates the separation lanes 3.
  • a frame body outer edge portion
  • the opening 4b as an injection and discharge port 31 extending from the opening 4b to the end of the dielectrophoresis panel 10 along the extending direction of the swimming lane 3. It has a configuration in which a flow path (passage) composed of the electrophoresis lane wall extension 4c (migration lane wall 4) is provided.
  • a transparent substrate of about 10 cm ⁇ 10 cm is used for the lower substrate 1 and the upper substrate 2. Therefore, the length of the inlet / outlet 31 (the length of the flow path (extended portion)) is about 2 cm.
  • each end side of the portion where the injection / discharge port 31 is formed on the opposing surface and the surface of the upper substrate 2 facing the lower substrate 1 is subjected to chamfering processing with chamfered corners.
  • a liquid feeding tube 13 having an outer diameter larger than the diameter of the injection 'discharge port 31 is connected (pressed contact) to the above injection' discharge port 31, thereby injecting the sample. Discharge is possible.
  • the inner end la 2a of the injection 'discharge port 31 is chamfered so that when the injection' discharge port 31 and the liquid feeding tube 13 are connected, both of them are connected.
  • the contact area is increased and the adhesion between the two is improved.
  • the liquid feeding tube 13 is made of a deformable material (for example, a flexible material) such as silicone resin from the viewpoint of adhesion between the injection / discharge port 31 and the liquid feeding tube 13. It is desirable that the material is preferably made of an elastic material.
  • a force that uses a tube made of silicone resin having an outer diameter of about 3 mm and an inner diameter of about 1 mm is not limited to this. Absent.
  • the lower surface protective film 7 and the upper surface protective film 8 are end portions of the injection / discharge ports 31 (that is, the chamfering process is performed).
  • the lower substrate 1 and the upper substrate 2 are formed on the inner side of the inner end portion la ′ 2a), that is, the lower end protective film 7 and the upper surface are formed at the end portion of the injection / discharge port 31. It is desirable that the protective film 8 be formed.
  • sample injection method sample solution feeding method
  • the liquid feeding tube 13 having an outer diameter larger than the diameter of the injection 'discharge port 31 is connected (pressed contact) to the injection' discharge port 31.
  • the method of feeding the sample solution to the injection / discharge port 31 has been described, the present embodiment is not limited to this, and the liquid supply tube 13 fitted to the injection / discharge port 31 (for example, the above-described one)
  • the liquid feeding may be performed using a liquid feeding tube 13) having an outer diameter smaller than the diameter of the inlet / outlet port 31.
  • the liquid feeding tube 13 may be provided separately from the dielectrophoresis panel 10 as described above, and may be connected to the dielectrophoresis panel 10 only when a sample (sample solution) is injected.
  • the dielectrophoresis panel 10 may have a configuration fixed in advance.
  • the dielectrophoresis panel 10 that works in the present embodiment includes the liquid feeding tube 13 as injection means for feeding (injecting) a sample to the dielectrophoresis panel 10.
  • the dielectrophoresis apparatus 70 or the dielectrophoresis system 85 may serve as an injection means (injection apparatus) for supplying (injecting) a sample to the dielectrophoresis panel 10, and the liquid supply tube 13 or You may have the structure provided with the sample injection apparatus provided with the said liquid feeding tube 13.
  • the opening (injection / discharge port 31) for feeding the sample into and out of the electrophoresis lane 3 is provided on the side surface of the dielectrophoresis panel 10 so that the swimming is performed. It is possible to prevent impurities from entering the dynamic lane 3 and suppress the occurrence of defects in the liquid feeding system.
  • the injection 'discharge port 31 is inevitably formed on the side surface of the dielectrophoresis panel 10 due to the pattern of the migration lane wall 4, so the injection' discharge port 31 is formed. In order to do so, no additional materials or processes are required. Therefore, according to the above configuration, the dielectrophoresis panel 10 is compared with a method of providing an opening (injection 'discharge hole 5) on the dielectrophoresis panel 10 (for example, on the upper substrate 2) by a drill or the like. It is possible to relatively suppress the occurrence rate of defects. This suppression effect becomes more prominent as the number of migration lanes 3 increases.
  • the dielectrophoresis panel 10 is provided with an injection / discharge port with a drill or the like.
  • the dielectrophoresis panel 10 can be formed more efficiently than the case where it is provided, and is more preferable from the viewpoint of use.
  • Embodiments 1 to 7 differ from Embodiments 1 to 7, and components having the same functions as those used in Embodiments 1 to 7 are described. Are given the same number and their explanation is omitted.
  • the injection and discharge port 31 in the dielectrophoresis panel 10 is used as a sample for other methods for feeding a sample solution (electrophoresis medium). explain.
  • FIG. 16 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment
  • FIG. 17 is a cross-sectional view taken along the line FF of the dielectrophoresis panel 10 shown in FIG. FIG.
  • the dielectrophoresis panel 10 is similar to the embodiment 6 in that the lane walls 4a and 4a connecting the lanes 4a and 4a separating the lanes 3 and 4 are separated.
  • a part of the outer edge portion (frame body) of each has an opening 4b opened at both ends of each electrophoresis lane 3 (both ends in the longitudinal direction of each electrophoresis lane 3).
  • 31 was extended from the opening 4b to the end of the electrophoresis panel 10 (end of the lower substrate 1) along the extending direction of the electrophoresis lane 3 (longitudinal direction of each electrophoresis lane 3).
  • it has a configuration in which a flow path (passage) composed of the migration lane wall extending portion 4c (migration lane wall 4) is provided.
  • the dielectrophoresis panel 10 which is effective in the present embodiment is also opened at both ends of the electrophoresis lane 3 so as to face the side surfaces of the dielectrophoresis panel 10 as in the sixth embodiment.
  • the inlet / outlet port 31 (electrophoresis lane wall extending portion 4c) is provided and has a structure.
  • the lane width (interval between the partition walls 4a'4a) of each electrophoresis lane 3 is about 1 cm
  • the lane length is about 6 cm
  • the inlet / outlet hole 5 has a diameter of about 2 mm and a height of about 40 m (equal to the gap of the panel cavity).
  • the length of the injection / discharge port 31 (length of each lane wall extending portion 4c) is about 2 cm.
  • the substrate length of the upper substrate 2 in the extending direction of the electrophoresis lanes 3 It is formed so as to be shorter than the substrate length of the lower substrate 1 in the extending direction of the dynamic lane 3.
  • the side wall of the injection / discharge hole 5, that is, the swimming lane wall extending portion 4c (the migration lane wall 4) is provided so as to protrude outward from the end portion of the upper substrate 2. It has the structure which was made.
  • the substrate length of the upper substrate 2 in the extending direction of each migration lane 3 is about 4 mm shorter than the substrate length of the lower substrate 1 in the extending direction of each migration lane 3.
  • the lower substrate 1 protrudes from the upper substrate 2 by about 2 mm at each end in the extending direction of the electrophoresis lanes 3.
  • the dielectrophoresis panel 10 which is effective in the present embodiment includes the inner end portion la 2a of the injection and discharge ports 31 in the lower substrate 1 and the upper substrate 2. Only the inner end portion 2a has a configuration in which a chamfering process in which a force corner portion is chamfered is performed. That is, the dielectrophoresis panel 10 according to the present embodiment includes the upper substrate out of the opposed surface of the lower substrate 1 facing the upper substrate 2 and the opposed surface of the upper substrate 2 facing the lower substrate 1. Only the surface of the substrate 2 facing the lower substrate 1 has a structure in which chamfering treatment is performed on the end of the injection / discharge port 31 forming portion.
  • the dielectrophoresis panel 10 which is effective in the present embodiment has a configuration in which a liquid delivery connector 15 is connected to the injection / discharge port 31.
  • the liquid supply connector 15 is formed of a deformable material such as silicone resin. As shown in FIG. 17, the liquid feeding connector 15 sandwiches the ends of the dielectric swimming panel 10, that is, the ends of the lower substrate 1 and the upper substrate 2, so that the injection / discharge port 31 Connected.
  • the liquid feeding connector 15 has a plurality of U-shaped openings 15a into which the injection / discharge port 31 (electrophoresis lane wall extending portion 4c) is inserted and fitted on one side surface. ing.
  • Each electrophoresis lane 3 is structurally separated inside the liquid delivery connector 15 by inserting the injection / discharge port 31 (electrophoresis lane wall extending portion 4c) into the opening 15a.
  • the top wall (upper wall) of the liquid delivery connector 15 corresponds to the injection 'discharge port 31 and corresponds to the injection' discharge port 31 (injection 'discharge hole 16 (injection' discharge portion, opening)). Part).
  • the inner diameter of the injection / discharge port 31 is set to about 2 mm.
  • the liquid feeding connector 15 is configured so that the lower surface 1 of the lower substrate 1 at the inlet / outlet 31 is in contact with the inner wall of the opening 15a and the inlet / outlet 16 is in the plan view in the lower base. It is formed so as to be positioned above the portion where the plate 1 and the migration lane wall extending portion 4c on the lower substrate 1 are exposed (that is, the portion where the upper substrate 2 is provided).
  • the sample is injected into each electrophoresis lane 3 via the injection / discharge port 31 (liquid feeding). I am able to do it.
  • the liquid feeding connector 15 is appropriately designed according to the number of electrophoresis lanes 3.
  • the liquid feeding connector 15 may be detachably provided on the dielectric swimming panel 10 which may be fixed to the dielectrophoresis panel 10 in advance. In the latter case, the liquid feeding connector 15 can be reused for the dielectrophoresis panel 10 of the same design.
  • the dielectrophoresis panel 10 includes the liquid feeding connector 15 as injection means for feeding (injecting) a sample to the dielectrophoresis panel 10.
  • the dielectrophoresis device 70 or the dielectrophoresis system 85 may serve as an injecting means (injection device) for injecting (injecting) a sample into the electrophoretic panel 10 as the liquid feeding connector 15 or You may have the structure provided with the sample injection device provided with the said liquid feeding connector 15.
  • an opening (injection / discharge port 31) for feeding the sample into and out of the electrophoresis lane 3 is provided on the side surface of the dielectrophoresis panel 10 so that the electrophoresis lane It is possible to prevent impurities from entering 3 and suppress the occurrence of defects in the liquid feeding system.
  • the injection 'discharge port 31 is inevitably formed on the side surface of the dielectrophoresis panel 10 due to the pattern of the migration lane wall 4, so that the injection' discharge port 31 is formed. No additional materials or processes are required. Therefore, according to the above configuration, the dielectrophoresis panel 10 is compared with a method of providing an opening (injection 'discharge hole 5) on the dielectrophoresis panel 10 (for example, on the upper substrate 2) with a drill or the like. It is possible to relatively reduce the defect occurrence rate. This suppression effect becomes more prominent as the number of migration lanes 3 increases. Yo Therefore, according to the above configuration, the dielectrophoresis panel 10 can be formed more efficiently than the case where the dielectrophoresis panel 10 is provided with an injection / discharge rod with a drill or the like. It is more preferable from the above viewpoint.
  • the lower substrate 1 is configured to protrude by about 2 mm from the upper substrate 2 at each end in the extending direction of the electrophoresis lanes 3, and the implantation is performed. 'By setting the inner diameter of the discharge port 31 to about 2 mm, as shown in FIG. 17, the bottom surface 1 lb of the lower substrate 1 is in contact with the inner wall of the opening 15a.
  • An example has been described in which the configuration is located at the two end portions of the upper substrate and the one end portion of the lower substrate.
  • this embodiment is not limited to this, and the lower substrate 1 end face lb is in contact with the inner wall of the opening 15a, and the edge of the injection / discharge hole 16 is If both are formed so as to be located in the exposed region of the lower substrate 1, the inner diameter of the injection hole 16 need not be the same as the protruding length of the lower substrate 1.
  • the inner diameter of the discharge hole 16 may be formed so as to be smaller than the protruding length of the lower substrate 1.
  • the inner diameter of the injection and discharge holes 16 and the protruding length of the lower substrate 1 are not limited to the above lengths, and can be appropriately set so that the sample can be smoothly injected and discharged. Is possible.
  • the method of injecting (feeding) the sample in the dielectrophoresis panel 10 having the injection 'discharge port on the side surface (electrophoresis array cross section) of the dielectrophoresis panel 10 is not limited to the above method! / ⁇ .
  • the above method is an example of the method of injecting (feeding) the sample in the dielectrophoresis panel 10.
  • various forms of injection (liquid feeding) The method is adaptable.
  • the dielectrophoresis panel 10 has a configuration in which the electrode example (electrophoresis electrode array 6) is arranged on one side (that is, only one side) of the electrophoresis lane 3. This was explained using an example.
  • the electrophoretic particles migrating by the dielectrophoresis have a small shape, size, and dielectric constant.
  • the ideal behavior may not be achieved due to various factors such as solvent viscosity resistance.
  • the force is also applied to the dielectric material in the electrophoresis lane, that is, from the electrode array provided on both sides of the electrophoresis lane with the sample containing the dielectric substance (sample layer) sandwiched between the electrophoresis lanes.
  • the electric field exerted on the dielectric substance is stronger than when the electric field is applied only from one side of the sample (sample layer). Therefore, when the electric field is applied from both sides of the sample (sample layer), the driving voltage is not increased as compared to the case where the electric field is applied only from one side of the sample (sample layer).
  • the electrophoretic force of the dielectric substance can be increased.
  • each of the electrodes in each electrode row (hereinafter referred to as the first electrode row and the second electrode row) to which the electric field is applied from both sides of the sample (sample layer) is also used.
  • the electric field is applied from both sides of the sample (sample layer)
  • the electric field is applied only from one side (one surface) of the sample (sample layer) (that is, only one electrode row is used).
  • the dielectrophoresis chip that can control the dielectrophoretic behavior of the dielectric substance more efficiently than the conventional one, and can obtain a stable dielectrophoretic behavior.
  • a dielectrophoresis apparatus and a dielectrophoresis system will be described.
  • Embodiments 1 to 8 will be described below with reference to FIGS. In this embodiment, differences from Embodiments 1 to 8 will be mainly described, and components having the same functions as those used in Embodiments 1 to 8 are used. Are given the same numbers and their explanation is omitted.
  • FIG. 18 is a plan view of a dielectrophoresis panel that works with the present embodiment as viewed from the upper substrate side.
  • 19 is a cross-sectional view of the dielectrophoresis panel shown in FIG. 18 taken along line ⁇ ′-A
  • FIG. 20 is a cross-sectional view of the dielectrophoresis panel shown in FIG. 18 taken along line B′-B ′.
  • FIG. 21 is a schematic configuration diagram of a dielectrophoresis system according to the present embodiment provided with the dielectrophoresis panel shown in FIG.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 (dielectrophoresis chip, electrophoresis array) that works with the present embodiment is also similar to the first to eighth embodiments.
  • the (first substrate) and the upper substrate 2 (second substrate) are arranged opposite to each other via an electrophoresis lane 3 (flow path, cell) having an electrophoresis space.
  • the electrophoresis lane 3 includes the lower substrate 1 and the upper substrate 2 provided with a predetermined space (electrophoresis space) constituting the electrophoresis lane 3 between the two substrates. It is formed by bonding and fixing with a seal material (adhesive). That is, this form In the dielectrophoresis panel 10, which is effective in the state, the lower substrate 1 and the upper substrate 2 are separated from each other by a spacing layer 43 (seal) formed by the sealing material that constitutes the migration lane 3 side wall (migration lane wall). A material layer).
  • an injection 'discharge hole 5 (opening portion, injection port) for injecting and discharging a sample (electrophoresis medium) containing an object to be observed (dielectric substance) such as a sample solution. ) Is formed.
  • a transparent substrate such as glass, quartz, or plastic can be preferably used.
  • transparent substrates for example, transparent substrates of about 10 cm ⁇ 10 cm are used.
  • a plurality of electrodes are provided as the electrophoresis electrode array 41 A (migrating electrode wiring, first electrode array).
  • first electrode 41 is provided (first electrode row, comb electrode).
  • Electrodes electrode wiring, second electrode array is provided with an electrode array (second electrode array, comb-shaped electrode) composed of a plurality of electrodes (electrophoresis electrode: hereinafter referred to as “second electrode”) 42.
  • the migration electrode array 41A and the migration electrode array 42A form an electric field based on an AC voltage between the first electrodes 41 ⁇ 41 and between the second electrodes 42 ⁇ 42, respectively, so that the swimming lane An electric field is applied to each of the samples injected into 3. That is, in the dielectrophoresis panel 10 according to the present embodiment, the electrophoretic electrode array 41 and the electrophoretic electrode array 42A are electric fields substantially parallel to the lower substrate 1 and the upper substrate 2, respectively, in other words. For example, an electric field (lateral electric field) substantially parallel to the lane surface of the electrophoresis lane 3 is applied to each sample injected into the electrophoresis lane 3.
  • the first electrode 41 and the second electrode 42 are overlapped with each other in a plan view through the electrophoresis lane 3 (that is, in plan view). They are placed opposite each other so as to overlap each other. Further, the first electrode 41... And the second electrode 42... Are provided so as to intersect with the electrophoresis lane 3 (orthogonal in the present embodiment).
  • At least one of the first electrode 41 and the second electrode 42 is composed of a dielectric layer. Area that receives power, specifically, at least a part of the area (observation area) where the electrophoresis lane 3 overlaps the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ). It is hoped that is made up of transparent electrodes.
  • the first electrode 41 and the second electrode 42 are, for example, ⁇ (Indium Tin Oxide), ZnO (Zinc Oxide), IZO (Indium Palladium). It is made of a transparent conductive oxide film (transparent electrode) such as Indium Zinc Oxide.
  • the electrode material used for the transparent electrode is not particularly limited as long as it is a transparent conductive material. Among them, ITO is preferable.
  • the swimming electrode arrays 41 and 42 for example, the first electrode 41 and the second electrode 42 having a film thickness of about 2000 mm, an electrode length of about 10 cm, and an electrode width (L: line) of 30 m, 1000 electrodes are formed so that the electrode spacing (S: space) force is 30 m (that is, the LZS force S is 30 ⁇ m).
  • the first electrode 41 and the second electrode 42 are composed of transparent electrodes such as ITO as described above, when observing the electrophoresis medium as a sample, Observation is possible from any direction above and below the migration lane 3 (above the lower substrate 1 side and the upper substrate 2 side) without being blocked by the first electrode 41 and the second electrode 42. Therefore, the observation direction can be selected.
  • any two electrodes adjacent to each other in the first electrode row are 41x and 41x + 1, respectively.
  • the two electrodes in the second electrode array arranged at the positions overlapping with the two electrodes 41 ⁇ 41 ⁇ + 1 are 42 ⁇ and 42 ⁇ + 1, respectively, the lower substrate 1 and the upper substrate 2
  • the electrodes 41 ⁇ and 41 ⁇ + 1 refer to the Xth and ⁇ + 1st electrodes from one end of the lower substrate 1 in the first electrode row, respectively.
  • Electrodes 42 ⁇ and 42 ⁇ + 1 denote the Xth and ⁇ + 2th electrodes from the same end as the lower substrate 1 of the upper substrate 2 in the second electrode row, respectively.
  • the electrode 41x + m or the electrode 41x + n represents the x + m-th or x + n-th electrode from one end of the lower substrate 1 in the first electrode row, respectively.
  • the electrode 42x + m or 42x + n In each of the second electrode rows, the upper substrate 2 has the same end force x + m-th or x + n-th electrode as the lower substrate 1, and x, m, and n are respectively Indicates any integer greater than or equal to 1.
  • the electrophoresis electrode array 41A includes the lower substrate.
  • the FPC 17 is mounted on the mounting / connecting section 44, and is connected to the control board 50 (control section; drive control section) shown in FIG.
  • the electrophoretic electrode array 42A has the upper substrate as shown in FIG.
  • FPC flexible wiring board
  • a lower surface protective film 7 and an upper surface protective film 8 are formed as electrode protective films on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively. ing. These lower surface protective film 7 and upper surface protective film 8 constitute the bottom wall and the top wall of the inner wall of the migration lane 3! / Speak.
  • Examples of the material of the lower surface protective film 7 and the upper surface protective film 8 include the above-described embodiment.
  • the materials for the lower surface protective film 7 and the upper surface protective film 8 are particularly limited as long as they are appropriately set according to the type of particles to be migrated. Not a thing.
  • the lower surface protective film 7 and the upper surface protective film 8 only need to protect (cover) the inner walls of the electrophoresis lane 3 and, in particular, the surfaces of the electrodes in the electrophoresis electrode arrays 41 ⁇ and 42 ⁇ .
  • the film thickness is not particularly limited.
  • a material having photosensitivity can be used as the material of the lower surface protective film 7 and the upper surface protective film 8.
  • a part other than the migration lane 3 where no protective film is required for example, a mounting terminal part (mounting connection part 44. 45) can be removed by, for example, photolithography, and the time and effort in the subsequent process can be saved.
  • the spacing layer 43 is provided on the lower protective film 7 and the upper protective film 8.
  • the sealing material used for the spacing layer 43 is not particularly limited, and a conventionally known resin is used as the sealing material.
  • a sealing material for example, a material similar to the material described in Embodiment 1 can be used.
  • the sealing material includes a so-called spacer (a spacing member) such as a spherical spacer or a fiber-like spacer.
  • a glass spacer having a particle size of 40 ⁇ m is mixed in the sealing material so that the lane height of migration lane 3 (the height of the spacing layer 43) is uniform.
  • an electrophoresis lane 3 having a lane width of about 8 mm, a lane length of about 6 cm, and a lane height of 40 ⁇ m is formed.
  • the extending direction (longitudinal direction) of the migration electrode arrays 41 and 42 and the straight line connecting the two injection / discharge holes 5 of the migration medium are as vertical as possible. It is desirable to have
  • the migration electrode array 41A and the migration electrode array 42A include, for example, the lower group On the plate 1 and the upper substrate 2, after forming a conductive oxide film such as an ITO film by sputtering deposition or the like, it can be easily formed by patterning into an electrode shape using photolithography.
  • the mounting connection portions 44 and 45 are formed as patterns on the respective ends of the migration electrode arrays 41 ⁇ and 42 ⁇ .
  • the above-described protective film material are applied to form a lower surface protective film 7 and an upper surface protective film 8, respectively.
  • an epoxy adhesive in which, for example, a glass spacer is mixed as a reactive adhesive (thermosetting adhesive) on the lower substrate 1 on which the lower surface protective film 7 is formed.
  • the region where the lower substrate 1 and the upper substrate 2 except the swimming lane 3 formation region are disposed opposite to each other that is, the region in the lower side substrate 1 where the lower surface protective film 7 is formed, Bin mounting ⁇ Apply to the connection area (excluding the end on the 44 side).
  • the spacing layer 43 (sealing material layer) constituting the migration lane wall is formed on the lower substrate 1.
  • the electrophoresis lane 3 is formed so as to be perpendicular to the electrophoresis electrode array 41A.
  • a printing method using a screen plate or a drawing method using a dispenser can be used for the application of the sealing material.
  • the lower substrate 1 and the upper substrate 2 can be formed into a straight line connecting the extending direction (longitudinal direction) of the electrophoresis electrode arrays 41 and 42 and the two injection / discharge holes 5 of the electrophoresis medium.
  • the first electrode 41 ⁇ and the second electrode 42 ⁇ that constitute the electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ are vertically viewed in plan view across the migration lane 3 in the migration lane 3 formation region. By placing them facing each other so that they overlap each other, and fixing them with the sealing material (adhesive), both Bond the substrates.
  • the electrophoresis lane 3 surrounded by the lower substrate 1 and the upper substrate 2 and the spacing layer 43 (migration lane wall) provided between the lower substrate 1 and the upper substrate 2 is formed. To do.
  • the lower substrate 1 and the upper substrate 2 are disposed to face each other, and hot pressing is performed from both the upper and lower surfaces.
  • the sealing material on the lower substrate 1 is softened and softened by hot pressing, and then cured and bonded to each other, whereby the migration lane 3 is formed between the two substrates.
  • the dielectrophoresis panel 10 that is effective in the present embodiment is formed.
  • the specific size made in this embodiment is merely an example of the embodiment, and the substrate size and electrode size of the lower substrate 1 and the upper substrate 2 (electrode width, electrode interval, electrode thickness, electrode) (Extreme length, etc.), film thickness of lower surface protective film 7 and upper surface protective film 8, layer thickness (height) of spacing layer 43, lane width, lane length, etc.
  • Various changes can be made accordingly.
  • the layer thickness of the spacing layer 43 that is, the gap (lane height) of the electrophoresis lane 3 is the above-described sheet constituting the spacing layer 43 (migration lane wall). It is maintained uniformly by the spacers contained in the lumber.
  • the electrophoresis lane 3 can be easily formed by forming a pattern using a printing material or a drawing method on the sealing material.
  • the sealing material is applied to the entire surface or a part of the lower substrate 1 excluding the mounting lane 3 formation region, the mounting portion 44 side end portion, and the like.
  • the lower substrate 1 and the upper substrate 2 are arranged such that the lower substrate 1 and the upper substrate 2 face each other in the migration lane 3 formation region.
  • the lower substrate 1 and the upper substrate 2 can be firmly bonded even when the electrophoretic electrode arrays 41 and 42 are shifted from each other in the extending direction (longitudinal direction).
  • the lower substrate 1 and the upper substrate 2 are arranged so that the lower substrate 1 and the upper substrate 2 face each other in the migration lane 3 formation region.
  • Mounting 'connection FPC 17 ⁇ 46 can be easily mounted on 44 ⁇ 45.
  • the dielectrophoresis panel 10 is connected to the control board 50 via the FPC 17 mounted on the mounting connection portion 44 formed at the end of the electrophoresis electrode array 41A. . Further, as shown in FIG. 21, the dielectrophoresis panel 10 is connected to the control board 55 via the FPC 46 mounted on the mounting / connecting portion 45 formed at the end of the electrophoresis electrode array 42A.
  • a dielectrophoresis apparatus 70 includes the dielectrophoresis panel 10, control boards 50 and 55, and a DC power source 60 (power source).
  • a dielectrophoresis system 85 includes the dielectrophoresis device 70 and an imaging system 80.
  • the control board 50 includes a frequency / timer control unit 50a, a synchronization signal control unit 50b, an oscillation circuit unit 50c, and a phase selection / amplification unit 50d.
  • the control board 55 includes a frequency timer control unit 55a, a synchronization signal control unit 55b, an oscillation circuit unit 55c, and a phase selection / amplification unit 55d.
  • the voltage (DC (direct current) voltage) output from the DC power source 60 is input to the control board 50 to drive the control board 50 and input to the control board 55. Then, the control board 55 is driven.
  • an AC voltage is output from the oscillation circuit section 50c.
  • the output AC voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 50a, synchronization signal control unit 50b, and phase selection / amplification unit 50d.
  • a printing force U is applied to the dielectrophoresis panel 10 via the FPC 17.
  • an AC voltage is output from the oscillation circuit section 55c.
  • the output AC voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 55a, the synchronization signal control unit 55b, and the phase selection / amplification unit 55d. It is applied (input) to the dielectrophoresis panel 10 via the FPC 46.
  • the synchronization signal control section 50b of the control board 50 and the synchronization signal control section 55b of the control board 55 are signals applied (input) to the dielectrophoresis panel 10 via the FPC 17.
  • the signal applied (input) to the dielectrophoresis panel 10 via the FPC 46 are synchronized and then applied (input) to the dielectrophoresis panel 10.
  • the imaging system 80 includes a light source such as a laser for applying irradiation light to the observation region (measurement unit) in the electrophoresis lane 3 of the dielectrophoresis panel 10 and an optical microscope.
  • it is an optical system equipped with an image pickup device such as a CCD (charge coupled device), etc., and is installed at the upper or lower portion of the electrophoresis lane 3 for optical detection.
  • FIGS. 22 (a) and 22 (b) show the state in which the target particles in the electrophoresis medium are floated and conveyed using the dielectrophoresis system 85 shown in FIG.
  • FIG. 19 is a cross-sectional view of an essential part schematically shown in a cross section (that is, a cross section taken along line B′-B ′ of dielectrophoresis panel 10 shown in FIG. 18).
  • Figure 22 (a) above shows how the target particles are levitated in the DEP mode.
  • Fig. 22 (b) shows how the target particles are transported in the TWD mode.
  • n ⁇ DEP dielectrophoretic force
  • the relative permittivity ( ⁇ ) of particles 91 is greater than the relative permittivity ( ⁇ ) of solvent 92.
  • Particles 91b ( ⁇ > ⁇ ) having a large p m are trapped on the edge of the first electrode 41 or the second electrode 42.
  • the two or more kinds of particles 91 are separated by switching to a TWD (Traveling-Wave DEP) signal, and only the floating particles 9 la are transported. Note that the particle 9 lb trapped at the edge of the first electrode 41 or the second electrode 42 remains trapped even when a TWD signal is applied, as shown in FIG. 22 (b).
  • TWD Traveling-Wave DEP
  • the electrodes adjacent to each other in each electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ have different phases depending on the control boards 50 and 55.
  • the high frequency (alternating voltage) is printed.
  • the second electrodes 42 (42x, 42x + l, 42x + 2, 42x + 3) placed in positions overlapping with the first electrodes 41 (41x, 41x + l, 41x + 2, 41x + 3)
  • the same high-frequency Cf phase as the first electrode 41 (4 lx, 41x + l, 41x + 2, 41x + 3) arranged at the position overlapping the second electrode 42 (42 X, 42x + l, 42x + 2, 42x + 3) Are applied respectively.
  • a voltage having the same potential is applied to the electrophoresis electrodes facing vertically.
  • a symmetrical electric field can be applied to the particles 91 contained in the electrophoretic medium 90 from above and below, and compared to a case where an electric field is applied to the particles 91 from one direction. You can gain power.
  • the first electrodes 41 (41x, 41x + l, 41x + 2, 41x +) are connected to each other in each electrophoresis electrode array 41A.42A. 3)
  • the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3) so that they are shifted by about ⁇ each time, the particles 91a
  • the levitation force can be controlled efficiently.
  • the first electrodes 41 (41x, 41x + l, 41x + 2, 41x +) are connected to each other in each electrophoresis electrode array 41A.42A. 3)
  • the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3)
  • the surface is lifted by applying a high frequency so that it is shifted by ⁇ / 2 each time. It is possible to efficiently carry 9 la of the particles.
  • a suspension was prepared by mixing 9 la particles and 9 lb particles each having a size of about 10 m, and this suspension was mixed with the dielectric shown in Figs. 22 (a) and (b). Inject into electrophoresis panel 10. Subsequently, for example, 4.5 V, 50 Hz alternating current is applied to the suspension by DEP. Then, the particles 91b are trapped at the edge of the first electrode 41 or the second electrode 42 by p-DEP, and the particles 91a are trapped by the n-DEP as shown in FIG. 22 (a). 1 electrode 41 and 2nd It floats in the center of electrophoresis lane 3 sandwiched between electrodes 42).
  • the distance between the first electrode 41 and the second electrode 42 (the distance between the surface of the first electrode 41 and the surface of the second electrode 42) is V, and the center of the electrode 41x and the center of the electrode 41x + n And the distance between the center of the electrode 42x and the center of the electrode 42x + n is H, the particle 91a becomes n-DEP so that the center is the surface of the first electrode 41 or the second
  • the surface force of the electrode 42 rises to a distance of about VZ2 and a distance of about HZ2 from the edges of the first electrode 41 and the second electrode 42.
  • the frequency range for separating the particles 91a and the particles 91b is not particularly limited as long as it is appropriately set depending on the types of the particles 91a and the particles 91b.
  • the frequency range is 30kHz to 100kHz. It is preferable to be within the range.
  • particle 91a and particle 91b are both subjected to p-DEP force, and in the high frequency region above 100 kHz, particle 91a and particle 91b Since both 1S receive n-DEP forces, separation in these frequency ranges may not be possible.
  • the dielectric constant of the suspension is lower than that of particles of 9 lb (more Strictly speaking, only the particles 91a (with a relative permittivity) that is lower than the relative permittivity ( ⁇ ) of the solvent 92 are separated and transported.
  • the solvent 92 for example, a force in which physiological saline is used.
  • the present embodiment is not limited to this.
  • these particles 91 are preferably decorated with a fluorescent dye before being injected into the dielectrophoresis panel 10.
  • the behavior of the particles 91 during the migration is, for example, from above the first electrode 41 or the second electrode 42 (transparent electrode portion (observation region)) and an optical microscope. It can be observed with a CCD camera (optical system 80).
  • the relative dielectric constant ( ⁇ ) of the solvent 92 injected into the electrophoresis lane 3 is larger than that of the protective films (the lower protective film 7 and the upper protective film 8)! /
  • the relative dielectric constant ( ⁇ ) of the solvent is as small as possible, an electric field is more easily applied to the electrophoresis medium 90.
  • the thinner the protective films (the lower protective film 7 and the upper protective film 8) the easier the electric field is applied to the migration medium 90.
  • the particles 91 having a diameter of about 10 m are separated and transported as described above, for example, the first electrode row and the second electrode row are both comb-shaped electrodes.
  • the separation and transfer of particles 91 (particles 91a '91b) should be performed effectively. Can do.
  • the particles 91 (particles 91a '91b) can be separated and transported.
  • the electric field applied to the migration medium 90 is weakened, and as a result, the dielectrophoretic force applied to the particles 91, particularly the particles 91a (electrophoretic particles) may be weakened.
  • the first electrode 41 and the second electrode 42 are arranged above and below the migration medium layer composed of the migration medium 90 injected into the migration lane 3, respectively. Electrode column force arranged so that each of the electrodes overlaps each other in a plane Since a high frequency is applied to the migration medium layer, stable dielectrophoresis is achieved compared to the case where one electrode column is not used. In addition to obtaining behavior, it is possible to increase the dielectrophoretic force without increasing the drive voltage.
  • the particles can be produced without increasing the drive voltage.
  • 91 can be provided with a sufficient dielectrophoretic force for migration or retention.
  • high frequencies with different conditions such as phase and amplitude can be applied to the upper and lower electrode rows, the migration behavior can be controlled more efficiently than when only one electrode row is used. can do.
  • the electrodes adjacent to each other in each electrode array have high frequencies having different phases.
  • high frequency waves of the same phase are applied to the electrodes arranged at positions overlapping each other via the above-described electrophoresis lane 3 (electrophoresis medium layer), so that they are symmetrical with respect to the electrophoresis medium 90 from above and below. It is possible to apply a strong electric field, and a strong dielectrophoretic force can be obtained.
  • the levitation force of the particles 91 can be efficiently controlled by applying a high frequency so that the phases are sequentially shifted by ⁇ to the electrodes adjacent to each other in each electrode row. Further, by applying a high frequency so that the phase is sequentially shifted by ⁇ 2 to the electrodes adjacent to each other in each electrode row, the floating (floating) particles 91 can be efficiently conveyed.
  • the first electrode 41 and the second electrode 42 are overlapped exactly in plan view.
  • the case where the electrode shape, the electrode width, and the electrode interval of the first electrode 41 and the second electrode 42 are formed under the same conditions has been described as an example. However, this embodiment is not limited to this.
  • the conditions such as the shape of the first electrode 41 and the second electrode 42, the electrode width, the electrode interval, and the electrode length (wiring length) are determined according to the particles to be analyzed (that is, the particles 9 1 in the electrophoresis medium 90). ) And the target operation (separation, collection, transport, etc.), etc.
  • the film thicknesses and electrode materials of the first electrode 41 and the second electrode 42 can also be set as appropriate, and are not particularly limited.
  • any two electrodes adjacent to each other in the first electrode row are 41x and 41x + 1, and these two electrodes 41 ⁇ ⁇ 41 ⁇ +
  • the two electrodes in the second electrode array arranged at the position overlapping 1 are 42 ⁇ and 42 ⁇ + 1, respectively, the lower substrate 1 and the upper substrate 2 are connected to the electrodes 41 ⁇ ⁇ 41 ⁇ .
  • the force described with reference to the case where the electrodes 42 ⁇ ⁇ 42 ⁇ + 1 are arranged to face each other so as to overlap each other in the migration lane 3 formation region This embodiment is limited to this It is not a thing.
  • the lower substrate 1 and the upper substrate 2 have the first electrode 41 ⁇ and the second electrode 42 ⁇ in the migration lane 3 formation region. Ideally, it should be completely overlapped in plan view.
  • the electrodes 4 lx 41 ⁇ + 1 and the electrodes 42 ⁇ If the lower substrate 1 and the upper substrate 2 are arranged to face each other so that at least a part thereof overlaps with 42 ⁇ + 1 in plan view, for example, as shown in FIG.
  • the substrate 2 is opposed to the electrode 41 ⁇ ⁇ 41 ⁇ + 1 and the electrode 42 ⁇ ⁇ 42 ⁇ + 1 in such a manner that they are displaced from each other within a range in which they partially overlap each other. It does n’t matter! /.
  • the first electrode 41 and the second electrode 42 include, for example, an electrode 41 ⁇ in the first electrode row and a part of the electrode 42 ⁇ in the second electrode row, as shown in FIG.
  • the position may be shifted in a plane within the range where tatami mats overlap.
  • the lower substrate 1 and the upper substrate 2 have side forces close to one of the injection / discharge holes 5 in the migration lane 3 and the electrodes in the first electrode row are 41 ⁇ , 41 ⁇ + 1 in this order, and the second electrode
  • the electrodes in the row are 42 ⁇ , 42 ⁇ + 1 in order, for example, if the electrode 42 ⁇ is superimposed on a part of the electrode 41 ⁇ + 1 adjacent to the opposite electrode 41 ⁇ as shown in FIG.
  • the electrophoresis lane 3 includes the lower substrate 1 and the upper substrate 2, and a predetermined space (electrophoresis space) constituting the electrophoresis lane 3 is provided between the two substrates.
  • the electrophoresis lane 3 includes, for example, an electrophoresis lane wall (an electrophoresis lane frame) constituting the electrophoresis lane 3 on one substrate (for example, the lower substrate 1) of the pair of substrates by the sealing material or the like.
  • a pattern is formed along the formation region of the electrophoretic lane 3, and the structure may be!
  • the spacing layer 43 (seal material layer) is used as the migration lane wall on the lower substrate 1 on which the lower surface protective film 7 is formed, that is, the above-mentioned The force to be formed on the lower surface protective film 7
  • the present embodiment is not limited to this.
  • the lower surface protective film 7 and the upper surface protective film 8 are formed, the lower surface protective film 7 and the upper surface protective film 8 Alternatively, a part or all of the overlapping region with the spacing layer 43 may be removed. By adopting such a structure, even when the adhesion between the lower surface protective film 7 and the upper surface protective film 8 and the sealing material is poor, sufficient adhesion can be obtained.
  • the lower surface protective film 7 and the upper surface protective film are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively.
  • the case where 8 is formed has been described as an example.
  • the present embodiment is not limited thereto, and the lower protective film 7 and the upper protective film 8 are not necessarily formed on the lower substrate 1 and the upper substrate 2.
  • the lower surface protective film 7 and the upper surface protective film 8 By providing (the lower surface protective film 7 and the upper surface protective film 8), it is possible to prevent the migrating particles 91 (91a) from adsorbing to the electrophoretic electrode. Therefore, depending on the type of particle 91 Therefore, it is desirable that the lower surface protective film 7 and the upper surface protective film 8 are formed on the lower substrate 1 and the upper substrate 2.
  • the first electrode row and the second electrode row force The upper and lower directions of the migration lane 3, more specifically, the lower substrate 1 serving as the bottom wall of the migration lane 3 and the above
  • the present embodiment is not limited to this, and the first electrode array and the second electrode array are not limited thereto.
  • Electrode Row Force The electrode lane 3 may have a structure provided in the left-right direction of the electrophoresis lane 3, specifically, on the electrophoresis lane wall (interval holding layer 43) that constitutes the side wall of the electrophoresis lane 3.
  • the present embodiment is not limited to this, and two electrode rows (third electrode row and fourth electrode row) are further provided through the migration lane 3, and the configuration is as follows.
  • Good That is, it may have a configuration in which separate electrode rows are formed on the top wall, bottom wall, and both side walls of the electrophoresis lane 3 independently. This makes it possible to further stabilize the dielectrophoretic behavior of the dielectric material (for example, the particle 91), to transport the dielectric material more efficiently, and to achieve more complicated electrophoretic behavior. It is also possible to control.
  • a force that uses transparent substrates as the lower substrate 1 and the upper substrate 2 described above is not limited to this embodiment.
  • (Migration medium 90) may be provided so as to be observable.
  • the dielectrophoresis panel 10 only one of the lower substrate 1 and the upper substrate 2 is formed of a transparent substrate, and the electrophoresis lane 3 and the above in the other substrate are described above.
  • An observation window (opening or transparent region) is provided in a region (observation region) where the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ) overlap each other. May be.
  • the dielectrophoresis panel 10 includes the lower substrate 1 and the upper substrate 2 in which the electrophoresis lane 3, the first electrode 41, and the second electrode 42 (electrophoresis electrode array) on both substrates.
  • 41A-42A) is composed of a non-transparent substrate (semi-transparent or opaque substrate) provided with transparent regions (either one may be an opening) in the region (observation region) that overlaps with (41A-42A). You may have.
  • the transmission mode is very effective for observation using fluorescence and filtering.
  • one of the lower substrate 1 and the upper substrate 2 is formed of a transparent substrate, and the other substrate is a non-transparent substrate ( Either the first electrode 41 or the second electrode 42 (electrophoresis electrode) which may have a configuration formed of a semi-transparent or opaque substrate) is formed of a transparent electrode and the other electrode
  • the electrode (electrophoresis electrode) may have a configuration formed of a non-transparent electrode such as a metal electrode. In this case, observation and photographing (optical imaging) in the electrode region are possible by using reflected (epi-illumination) light (epi-illumination mode) by the non-transparent electrode.
  • an electric field formed by an alternating voltage is applied to a sample from a separate electrode array provided with the electrophoresis lane 3 in between.
  • the dielectric substance can have a stable dielectrophoretic behavior, and the dielectric substance can be efficiently transported (dielectrophoresis). Can do. Therefore, even when the above configuration is adopted, the application range for the test conditions can be expanded and the observation environment can be improved as compared with the conventional case.
  • the lower substrate 1 and the upper substrate 2 are formed of a transparent substrate, or even if a non-transparent substrate is used, a part of the electrophoresis lane 3 is used.
  • Both the second electrode 42 and the second electrode 42 may be formed of a non-transparent electrode such as a metal electrode.
  • Examples of the metal material include metals such as aluminum (A1), titanium (Ti), molybdenum (Mo), platinum (Pt), gold (Au), and alloys containing these metals. Can be used.
  • the metal electrode is formed by using the metal material, forming a metal film by sputter deposition or the like, and patterning the metal film into an electrode shape using photolithography. be able to.
  • one of the lower substrate 1 and the upper substrate 2 is formed of a non-transparent substrate, or optically provided on one side of the electrophoresis lane 3 (flow path). Since the non-transparent electrode is formed, the installation power of the imaging device (imaging system 80) such as a CCD is limited to one of the substrates in the swimming lane 3 described above.
  • At least one of the first electrode 41 and the second electrode 42 is a region where the particles 91 receive a dielectrophoretic force.
  • dielectrophoresis panel 10 After confirming the dielectrophoretic behavior with the electrophoresis panel 10), use the double-sided metal electrode substrate (dielectrophoresis panel 10) in which all wirings on both sides of the electrophoresis lane 3 are formed with metal wirings (metal electrodes) as described above. You can do it.
  • the object may be retained and transported by the double-sided metal electrode substrate (dielectrophoresis panel 10).
  • the present embodiment will be described mainly based on FIGS. In the present embodiment, differences from the ninth embodiment will be mainly described, and components having the same functions as those used in the ninth embodiment have the same numbers. The description is omitted.
  • the first electrode 41 and the second electrode 42 are mainly composed of any transparent electrodes such as ITO, ⁇ , and !!
  • the case has been described as an example.
  • the resistivity of transparent conductive materials such as ⁇ , ⁇ , and ⁇ is two orders of magnitude higher than that of metal materials such as Al and Au. Therefore, in comparison with the case where the first electrode 41 and the second electrode 42 are formed of metal electrodes, as shown in the ninth embodiment, when both electrodes (wirings) having the same shape are formed of a transparent conductive material, It is relatively high resistance of 1 to 2 digits.
  • the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41A-42A) 1S are exemplified by the dielectrophoresis panel 10 partially formed of transparent electrodes. explain.
  • FIG. 25 is a plan view of the dielectrophoresis panel 10 that works with the present embodiment as viewed from the upper substrate side.
  • FIG. 26 is a cross-sectional view of the dielectrophoresis panel 10 shown in FIG.
  • FIG. 27 is a cross-sectional view showing a schematic configuration of another dielectrophoresis panel according to the present embodiment.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 has a sample (electrophoresis) in each electrophoresis lane 3 on the portion where each electrophoresis lane 3 and the electrophoresis electrode arrays 41 ⁇ and 42 ⁇ ⁇ overlap.
  • An observation area 9 is provided for observing and imaging (transmission) the medium 90).
  • the first electrode 41 in the observation region 9 is composed of a transparent electrode 41a, and the first electrode 41 that does not overlap the observation region 9 has a metal material (metal electrode 41b).
  • the second electrode 42 in the observation area 9 is composed of a transparent electrode 42a.
  • a metal material (metal electrode 42b) is used for the second electrode 42 that does not overlap with the region 9.
  • an electrode having a two-layer structure in which a metal electrode layer is partially formed on a transparent electrode layer Use electrode wiring
  • the transparent electrode 41a or the transparent electrode 42a only the portion of the first electrode 41 and the second electrode 42 that overlaps the observation region 9 is the transparent electrode 41a or the transparent electrode 42a.
  • It consists of a layer electrode (single-layer wiring), and the other part is a two-layer electrode consisting of a transparent electrode 41a and a metal electrode 41b (two-layer wiring), or a two-layer electrode consisting of a transparent electrode 42a and a metal electrode 42b ( Two-layer wiring)!
  • each electrophoresis lane 3 is overlapped with the first electrode 41 and the second electrode 4 2 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ), that is, each electrophoresis lane 3
  • the first electrode 41 and the second electrode 42 electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇
  • the transparent electrode transparent electrode 41a or transparent electrode 42a
  • the first electrode 41... And the second electrode 42... Formation region are used as the observation region 9.
  • a transparent conductive material such as ITO, ⁇ , ⁇ , etc.
  • a transparent conductive material such as ITO, ⁇ , ⁇ , etc.
  • soot is preferably used.
  • a metal material such as aluminum (A1), titanium (Ti), molybdenum (Mo), platinum (Pt), gold (Au), or an alloy containing these metals should be used. Is possible.
  • the electrode width, electrode interval, electrode length (wiring length), etc. of the first electrode 41 and the second electrode 42 are also described.
  • the conditions are not particularly limited, and are appropriately determined according to the size of the particle 91 to be analyzed (that is, the particle 91 in the electrophoresis medium 90) and the intended operation (separation, collection, transportation, etc.). You only have to set it.
  • the film thickness of the first electrode 41 and the second electrode 42 (transparent electrode 41a'42a and metal electrode 41b'42b) and the electrode material in each electrode layer can also be set as appropriate, and are particularly limited. is not.
  • the electrode length of the single-layer wiring portion of each of the transparent electrodes 41a'42a in the first electrode 41 and the second electrode 42 is not particularly limited. What is necessary is just to set suitably according to the resistivity etc. of the 1st electrode 41 and the 2nd electrode 42 (electrophoresis electrode array 41 * 42 *).
  • the electrodes (wirings) of the same shape are formed of the transparent conductive material and the metal material as described above on the single-layer wiring portion of the transparent electrode 41a'42a in the electrophoresis electrode array 41 ⁇ and 42 ⁇ .
  • An electrode formed of a transparent electrode material has a relatively high resistance compared to an electrode formed of a metal material.
  • the overlapping region of the first electrode 41 and the second electrode 42 (electrophoretic electrode array 41 ⁇ / 42 ⁇ ) with the spacing layer 43 includes a two-layer structure of the transparent electrode 41a and the metal electrode 41b and the transparent electrode 42a.
  • the first electrode 41 and the second electrode 42 force have a transparent electrode 4 la in a part of the migration lane 3.
  • each of the transparent electrodes 42a has a single layer structure.
  • the present embodiment first, as in the ninth embodiment, after forming a coating film on the lower substrate 1 by sputtering deposition or the like, by patterning into an electrode shape using photolithography, On the lower substrate 1, transparent electrodes 41a are formed. On the other hand, on the upper substrate 2, after forming an ITO film by sputter deposition or the like, the transparent electrode 42 a... Is formed on the upper substrate 2 by patterning into an electrode shape using photolithography.
  • a metal material is used as described above, and a metal film is formed by sputtering deposition or the like.
  • the metal film is patterned into an electrode shape using photolithography, and a wiring portion that overlaps the observation region 9 in the patterned metal film (in this embodiment, in the migration lane 3 and above) Remove the pattern in the wiring area near electrophoresis lane 3).
  • the method for forming portions other than the electrophoresis electrode arrays 41 and 42 is basically the same as that in the ninth embodiment. Also in the present embodiment, at the same time as the formation of the first electrode 41 and the second electrode 42, the end portions of the first electrode 41 and the second electrode 42 are mounted as mounting terminals as mounting terminals 44. 45 is patterned.
  • the portion of the electrophoresis electrode array 41 ⁇ ⁇ or 42 ⁇ that overlaps the observation region 9 provided in the electrophoresis train 3 as described above is the transparent electrode 41a ⁇
  • the other part is composed of the transparent electrode 41 & '42 & a low-resistance metal electrode 41421 (421). Observation is possible from both the top and bottom of the migration lane 3 (above the lower substrate 1 side and the upper substrate 2 side) without being blocked by the electrode 41 and the second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ ⁇ 42 ⁇ ).
  • the resistance of the entire electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ⁇ is compared with the case of using an electrophoresis electrode array having the same shape (same pattern) as the migration electrode array 41 ⁇ ⁇ 42 ⁇ and having transparent electrode force. And can be kept low. Therefore, according to the present embodiment, the observation conditions for the optical observation are not limited, and the usability can be suppressed because the attenuation / delay of the input voltage (electrophoresis control input voltage) can be suppressed.
  • the dielectrophoresis panel 10 and the dielectrophoresis apparatus 70 with high measurement accuracy, and the dielectrophoresis system 85 can be realized.
  • the electrophoretic electrode arrays 41 ⁇ and 42 ⁇ are configured by the transparent electrode 4 la '42a such as a heel in the portion overlapping the observation region 9, and the other portions are transparent. Electrode 41a'42a has a resistance lower than that of metal electrode 41b'42b, such as Au.This embodiment is not limited to this. It suffices that at least a part of the electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ is formed of a transparent electrode in a region overlapping with 9.
  • the electrophoresis electrode arrays 41 ⁇ and 42 ⁇ have a region (that is, the electrophoresis electrode array 41 ⁇ and the electrophoresis electrode array 41 ⁇ and 42 ⁇ overlap with the observation region 9 (the region where the particles 91 receive the dielectrophoretic force).
  • the observation region 9 the region where the particles 91 receive the dielectrophoretic force.
  • the part formed by the transparent electrode 41a'42a that is, each electrode is transparent electrode 41a or transparent electrode 42
  • a portion where the metal electrode 41b'42b is provided (that is, a portion where the metal electrode 41b or the metal electrode 42b is further provided).
  • the migration electrode array 41A.42A has the metal electrodes 41b'42b formed (laminated) on a part of the region where the migration electrode arrays 41 ⁇ and 42 ⁇ do not overlap the observation region 9 with respect to the transparent electrodes 41a'42a. It has a structure that can be.
  • the migration electrode array 41A ⁇ 42 ⁇ is such that at least a part of the migration electrode array 41 ⁇ ⁇ 42 ⁇ ⁇ is a transparent electrode 41a'42a in the region where the migration electrode array 41 ⁇ ⁇ 42 ⁇ overlaps the observation region 9. If each electrode is formed (that is, each electrode is formed only by the transparent electrode 41a or the transparent electrode 42a), a part of the observation region 9 or a part of the non-observation region is not transparent (semi-transparent or An opaque (conductive) material (low-resistance conductive material) may have a configuration in which a third electrode is provided.
  • the third electrode may be provided in place of the metal electrode 4 lb ⁇ 42b, or may be used in combination with the metal electrode 4 lb ⁇ 42b.
  • the third electrode has a laminated structure with respect to the metal electrode 41b′42b, which may be provided in the same layer as the metal electrode 41b′42b.
  • a structure having a multilayer structure of at least one electrode force of two electrodes 42 having three or more layers may be used.
  • the dielectrophoresis panel 10 includes, for example, only one of the lower substrate 1 and the upper substrate 2 formed of a transparent electrode, and the migration lane in the other substrate.
  • the dielectrophoresis panel 10 includes the lower substrate 1 and the upper substrate 2 in which the electrophoresis lane 3, the first electrode 41, and the second electrode 42 (electrophoresis electrode arrays 41 ⁇ and 42 ⁇ ) on both substrates.
  • a non-transparent substrate (semi-transparent or opaque substrate) provided with a region (one of which may be an opening) may also have a structure.
  • the first electrode 41 and the second electrode 42 (electrophoresis electrode) in the observation region 9 (the region where the electrophoresis electrode array 41 ⁇ ⁇ 42 is superposed on the observation region 9).
  • Array 41 ⁇ ⁇ 42 ⁇ ) is used as a transparent electrode
  • first electrode 41 and second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ) in the other regions are connected with, for example, a transparent electrode and a low resistance non-transparent electrode such as a metal electrode.
  • a non-transparent electrode that is, a non-transparent electrode structure in a plan view
  • the electrophoresis electrode in the observation region 9 that is, the region where the electrophoresis lane 3 and the electrophoresis electrode array 41 ⁇ / 42 ⁇ overlap each other.
  • the transparent electrode can be used for transmission mode (observation and imaging with transmitted light) or epi-illumination mode (observation and imaging with reflected (epi-illumination) light from the object to be observed)
  • the dielectrophoresis panel 10 that can use the reflection mode for observing and projecting the reflected (reflection) light from the non-transparent electrode (metal electrode).
  • the observation conditions can be relaxed, and more complex dielectrophoretic behavior can be observed.
  • two types of observations are possible by using both the transmission mode with a transparent electrode and the epi-illumination mode with a non-transparent electrode (reflection (epi-reflection) electrode) such as a metal electrode as described above. It is possible to provide a dielectrophoresis panel 10 capable of analyzing various types of angle.
  • the migration electrode arrays 4 1 4 and 42 ⁇ In this case, for example, as shown in FIG. 27, in the observation region 9, that is, in the region where the electrophoresis lane 3 and the migration electrode arrays 41 ⁇ and 42 ⁇ overlap, the migration electrode arrays 4 1 4 and 42 ⁇ One of the migration electrode arrays, in the present embodiment, for example, only the migration electrode array 41A includes a region having a single-layer structure of the transparent electrode 41a, and a metal electrode 41b provided on the transparent electrode 41a.
  • the other migration electrode array 42A has a single layer structure of the transparent electrode 42a, and has a layer structure region.
  • the migration electrode array 41 ⁇ ⁇ 42 ⁇ (first electrode 41 and second electrode 42) force As described above, both of the portions have the transparent electrode force, and at least one of the metal electrodes has The above-mentioned electrophoresis electrode array 4 1 A ⁇ 42 A overall resistance can be kept low compared to the case where the electrode array 41 A ⁇ 42 A is formed of only transparent electrodes 4 la ⁇ 42 a, and the parasitic capacitance between each electrode is reduced. In addition to being able to do this, as described above, it is possible to provide the dielectrophoresis panel 10 that can use any one of the transmission mode and the epi-illumination mode using the translucent Z-illumination of light on the electrode surface.
  • the ratio (9aZ9b) of the portion (transparent region 9a) where the electrophoretic electrode arrays 41 ⁇ and 42 ⁇ (first electrode 41 and second electrode 42) both have a transparent electrode force is not particularly limited.
  • the lower limit is 1Z3, that is, lZ3 ⁇ 9aZ9b (that is, transparent region 9a in observation region 9 above). It is preferable that the ratio is 1Z3 and 9aZ9b.
  • L ⁇ 9aZ9b that is, the ratio of the transparent area 9a in the observation area 9 is 1Z2 or more
  • the electrophoretic electrode array 10 is used as the dielectrophoresis panel 10 of the transmission mode Z incident mode dual-use type using light transmission Z incident on the electrode surface.
  • the force described by taking as an example the case where a part of 41 ⁇ and 42 ⁇ is formed of a transparent electrode.
  • the present embodiment is not limited to this.
  • any one of the lower substrate 1 and the upper substrate 2 is overlapped with the migration lane 3 and the migration electrode arrays 41 and 42 on the substrate.
  • Area (observation area 9) is formed of a non-transparent substrate having a transparent area, and the other substrate is a transparent substrate, or an area where the electrophoresis lane 3 and the electrophoresis electrode array 41A • 42 • overlap.
  • differences from the ninth and tenth embodiments will be mainly described, and a configuration having the same functions as the components used in the ninth and tenth embodiments. Elements are given the same numbers and their explanation is omitted.
  • FIGS. 28 (a) to (c) are cross-sectional views of the dielectrophoresis panel 10 shown in FIG. 21, showing the state in which the target particles in the electrophoresis medium are floated and transported using the dielectrophoresis system 85 shown in FIG.
  • FIG. 5 is a cross-sectional view of another main part schematically shown in FIG.
  • FIGS. 29 (a) to (c) show how the target particles in the electrophoresis medium are floated and conveyed using the dielectrophoresis system 85 shown in FIG. It is other principal part sectional drawing typically shown in a cross section.
  • Fig. 28 (a) and Fig. 29 (a) show how the target particles are levitated!
  • FIGS. 29 (b) and 29 (c) show a state in which the levitated target particles are conveyed.
  • the migration electrode array 41 A ⁇ 42 ⁇ electrodes adjacent to each other in each migration electrode array 41 ⁇ ⁇ 42 ⁇ , for example, the above-mentioned In the electrophoresis electrode array 41A, the above control is applied to the first electrode 41 (41 ⁇ , 41 ⁇ + 1, 41 ⁇ + 2, 41 ⁇ + 3, 41 ⁇ + 4, ..., 41x + m) High frequencies with different phases are applied by the substrates 50 and 55, respectively.
  • the second electrodes 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4, ..., 42x + m) adjacent to each other in the electrophoresis electrode array 42A are also controlled as described above. High frequencies having different phases are applied by the substrates 50 and 55, respectively.
  • X and m are arbitrary integers of 1 or more.
  • each of the first electrodes 41 (41x, 41x + l, 41x + 2, 41x +) is passed through the migration lane 3 (migration medium layer).
  • 3, 41x + 4, ..., 41x + m) and the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4) , ..., 42x + m) and the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4, ..., 42x + m)
  • the first electrode row and the second electrode row are vertically opposed to each other.
  • a high frequency satisfying the phase conditions described in Table 1 below is applied to each moving electrode.
  • n an integer of 1 or more.
  • n 2
  • the xth first electrode 41 is connected to the electrode 41 (41x + 2) and the Xth second electrode 42 (42x) in the second electrode example facing the xth first electrode 41 (4 lx).
  • a high frequency is applied so that the phase difference with respect to ⁇ becomes ⁇ , and the same as the ⁇ th first electrode 41 with respect to the x + second second electrode 42 (42 ⁇ + 2) in the second electrode row ( Apply high frequency with phase difference 0).
  • a high frequency is applied so that the phase difference from the x-th first electrode 41 (41x) is ⁇ , and the x-th second electrode 42 (42 ⁇ + 2) is By applying the same high frequency as the first electrode 41 (phase difference 0), the electrode 41 ⁇ , 41x + 2, 42x, 42x + 2, the particle 91 (particle 91 a) trapped in the center of the space surrounded by the x + 3rd first electrode 41 (41x + 3 ) And x + 1st second electrode 42 (42x + 1), a high frequency is applied so that the phase difference between the x + 1 first electrode 41 (41x + 1) is ⁇ and ⁇ + 3 By applying the same high frequency (phase difference 0) as the first electrode 41 (41 ⁇ + 1) to the second electrode 42 (42 ⁇ + 3),
  • the ⁇ + 4th first electrode 41 (41 ⁇ + 4) and the ⁇ + second second electrode 42 (42 ⁇ + 2) are connected to the ⁇ +
  • a high frequency is applied so that the phase difference from the second first electrode 41 (41 ⁇ + 2) is ⁇ , and the above ⁇ + 2 is applied to the ⁇ + 4th second electrode 42 (42 ⁇ + 4).
  • Part of the particles 91 (91a) further move to the center of the space surrounded by the electrodes 41x + 2, 41x + 4, 42x + 2, 42x + 4.
  • a particle 91 for example, a particle 91 having a diameter of about 10 m is shown in Figs. 28 (a) to (c). It can be efficiently transported by the new migration mechanism shown.
  • the dielectrophoresis system 85 basically uses the same dielectrophoresis system 85 as the dielectrophoresis system 85 described in the ninth embodiment, except for the signals applied to the electrode rows. .
  • the particles 91 are injected into the electrophoresis lane 3 from one injection 'discharge hole 5 in the electrophoresis lane 3.
  • the side force close to one injection 'discharge hole 5 in the electrophoresis lane 3 is also sequentially applied to the electrodes (41x, 41x + 1, 41x + 2, 41x + 3, 41x + 4) in the first electrode row,
  • the electrodes in the second electrode array (Al, A2, A3, A4) are arranged so as to overlap with the electrodes Al, A2, A3, A4 via the migration lane 3 (migration medium layer) ( 42x, 42x + l, 42x + 2, 42x + 3, 42x + 4) is Bl, B2, B3, B4, the above electrodes Al, A3, Bl, B3 have an amplitude of 4.5V and a frequency of 50kHz.
  • Is applied under the phase condition that satisfies the relationship when n 2 in Table 1, the electrodes A1, A3, Bl, B3 in the electrophoresis medium layer
  • the injected particles 91 are trapped in the center of the enclosed space.
  • a high frequency is applied so that the phase difference from the Xth first electrode 41 (41x) is ⁇ , and the X + second second electrode For 42 (42 ⁇ + 2), the same (phase difference 0) high frequency (AC voltage) as the ⁇ th first electrode 41 (41 ⁇ ) is applied.
  • this embodiment is not limited to this. Is not to be done.
  • the electrodes in either one of the first electrode row and the second electrode row are sequentially set to Ax, Ax + 1, ..., Ax + m, and The electrodes in the other electrode array arranged at positions overlapping with the electrodes Ax, Ax + 1,..., Ax + m via electrophoresis lane 3 (electrophoresis medium layer) are connected to Bx, Bx + 1,.
  • the particles 91 are transported. Can be performed efficiently.
  • the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is a unit of x consisting of a combination of the four electrodes Ax, Ax + n, Bx, Bx + n.
  • the four electrodes Ax, Ax + n, Bx, Bx + n for example, electrodes 41x, 41x + 2, 42x, 42x + 2 as shown in FIG.
  • particles 91 (91a) can be trapped by TWD generated in the direction of rotation inside the four electrodes.
  • the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is sequentially changed to one unit of x that also has the combined force of the four electrodes Ax, Ax + n, Bx, Bx + n.
  • the particle 91 (91a) rotates in the opposite direction to that described in Table 3 and is located at the center of the space surrounded by the electrodes Ax, Ax + n, Bx, Bx + n. Trapped.
  • the migration mechanism shown in Figs. 29 (a) to (c) is more complicated in the movement of the particles 91 (91a) than the migration mechanism shown in Figs. 28 (a) to (c). It becomes. For this reason, when a highly viscous solvent is used, the direction force particles 91 (91a) employing the migration mechanism shown in FIGS. 28 (a) to (c) are less likely to receive resistance. Therefore, when a highly viscous solvent is used and the transport distance of the particles 91 (91a) is long, the migration mechanism shown in FIGS. 28 (a) to (c) is adopted. This is preferable.
  • the control of the levitation force and the transport of the particles 91 are performed separately, whereas in the present embodiment, the particles 91 are transported while giving the levitation force as described above. Therefore, there is also an advantage that the particles 91 are difficult to settle.
  • the staying particles 91 are removed. It can be lifted and transported again.
  • a DEP mode signal (see Embodiment 9) is applied to the electrophoresis lane 3. After the particles 91 remaining (residual) in the middle of the particle 3 are levitated, the four electrodes Ax, Ax + n, Bx, Bx + n near the particles 91 are shown in Table 2 (for example, Table 1).
  • the particles 91 remaining in the middle of the electrophoresis lane 3 are visually confirmed, a DEP mode signal is applied, and the above table 1 is again applied.
  • the particles 91 remaining in the middle of the electrophoresis lane 3 can be transported as described above.
  • n is an integer of 1 or more, and the value of n is the height of the migration space (the substrate gap between the lower substrate 1 and the upper substrate 2) and the arrangement of the electrodes. What is necessary is just to select suitably according to conditions, such as a pitch. However, if the value of n is too large, the effect of dielectrophoretic force is weakened.
  • Non-Patent Document 5 for example, a pole-shaped gold electrode (gold pole electrode) is arranged on a glass substrate in a quadrupole arrangement so that the distance between two parallel electrodes and two pairs forming a pair are arranged. It is disclosed that the electric field strength distribution changes with the distance between the electrodes and the radius of the gold pole electrode as parameters.
  • n is within the range of forces 1 to 5 depending on the pitch between the first electrode example and the second electrode array, and the pitch and electrode width between the electrodes in each electrode array. Is desirable
  • the electrodes Ax, Ax + n, Bx, Bx + n are substantially square (preferably It is more preferable that the electrodes are arranged so as to be square) (n is selected above). That is, in the migration mechanism shown in FIGS. 28 (a) to (c) and FIGS. 29 (a) to (c), In the sectional views shown in FIGS. 28 (a) to (c) and FIGS. 29 (a) to (c), the electrodes 41x, 41x + 2, 42x, 42x + 2 are substantially square (preferably square). In other words, with respect to the electrodes 41x, 41x + 2, 42x, 42x + 2,
  • the distance between the first electrode 41 and the second electrode 42 (the surface of the first electrode 41 and the second electrode).
  • the distance between the center of electrode 41x and the center of electrode 41x + n, and the distance between the center of electrode 42x and the center of electrode 42x + n is H.
  • the X-th electrode in one of the first electrode row and the second electrode row Is the Ax, x + n-th electrode is Ax + n (X and n are arbitrary integers of 1 or more), and the other electrode arranged at the position facing each of the electrodes Ax, Ax + n through the electrophoresis lane
  • Each electrode in the electrode array (hereinafter referred to as “second electrode array”) is Bx, Bx + n
  • the distance between the surface of Ax and the surface of Bx is V
  • the center of Ax is Assuming that the distance from the center of Ax + n is H, the control board 5 0 ⁇ 55 (1)
  • the above ⁇ satisfies HZV ⁇ 5, and the phase difference of Ax + n with respect to Ax and the position of Bx Force to apply AC voltage so that the phase difference is both ⁇ and the phase difference of Bx + n to Ax is 0, or
  • the voltage (AC voltage) applied to each of the electrodes is controlled so that the control boards 50 and 55 are applied to each of the electrodes under a phase condition that satisfies the above relationship.
  • the dielectric substance for example, the particle 91 (91a)
  • the dielectric substance is placed at the center of the space surrounded by the electrodes Ax, Ax + 2, Bx, Bx + 2. Can be trapped.
  • control boards 50 and 55 are connected to the "first electrode array” and the "second electrode".
  • the target electrode to which the AC voltage is applied in the ⁇ pole array '' sequentially so that the x of one unit, which is the combined force of the four electrodes Ax, Ax + n, Bx, Bx + n, increases by one
  • AC voltage AC voltage
  • the dielectric substance for example, particle 91 (91 a)
  • the dielectric material can be transported. Therefore, according to the above configuration, the dielectric substance can be transported more efficiently than in the conventional TWD mode.
  • the sample (electrophoresis medium 90) that can be handled is limited to the height of the gold pole electrode. For example, only a single sample or a small amount of sample (eg, a cell) can be handled. In contrast, according to the present embodiment, since the electrode length is defined only by the size of the lower substrate 1 and the upper substrate 2, the quadrupole operation with four electrodes as one unit is performed. A large amount of specimen can be handled.
  • phase relationship of the AC signal described in the present embodiment does not necessarily satisfy the relationship described in each table above, and does not necessarily satisfy (approximate) the above description. If it is within a range, it may be in a state slightly deviated from the phases described in the above tables.
  • the AC signal has an external (that is, FPC17'46) force and the migration electrode array 41 ⁇ ⁇ 42
  • the phase shift within the range in which the dielectrophoretic behavior is obtained is within the allowable range, and the phase conditions described in the above tables include the phase shift within the allowable range. May be.
  • FIG. 30 is a plan view of the dielectrophoresis panel 10 according to the present embodiment as viewed from the upper substrate side.
  • FIG. 31 is a cross-sectional view taken along the line D′-D ′ of the dielectrophoresis panel 10 shown in FIG. 30 is a cross-sectional view taken along the line E′-E ′ of the dielectrophoresis panel 10 shown in FIG. 30 (ie, a cross-sectional view in the longitudinal direction of the electrophoretic lane 3). 'Same as the cross section.
  • the upper substrate is indicated by a two-dot chain line.
  • the dielectrophoresis panel 10 includes a plurality of electrophoresis lanes 3 as flow paths.
  • the electrophoresis lane 3 is divided into one substrate of the pair of substrates, in the present embodiment, on the surface facing the upper substrate 2 on the lower substrate 1.
  • partition walls 43a epitrophoresis lane walls
  • separating the electrophoresis lanes 3 ... are patterned along the formation area of each electrophoresis lane 3.
  • the spacing layer 43 serves as the partition wall. That is, in the present embodiment, the partition wall 43a is formed by the spacing member 43, more strictly, a sealing material that constitutes the spacing layer 43.
  • Each partition wall 43a intersects the migration electrode array 41 ⁇ ⁇ 42 ⁇ (first electrode 41 and second electrode 42) and migration lane 3 ⁇ '(in this embodiment, (Orthogonal) so as to be arranged in a vertical direction with respect to the electrophoresis electrode array 41 ⁇ ⁇ ⁇ and 42 ⁇ ⁇ !
  • a spacer such as a glass spacer is mixed as a reactive adhesive (thermosetting adhesive) on the lower substrate 1 on which the lower surface protective film 7 is formed.
  • a region where the lower substrate 1 and the upper substrate 2 excluding the migration lane 3 formation region are disposed opposite to each other that is, the migration lane 3 formation region and the mounting 'connection portion). It can be formed at the same time as the spacing layer 43 outside the migration lane 3 formation region by coating between the migration lanes 3 and the lower substrate 1 (excluding the 44 side end).
  • each partition wall 43a is set to about 2 mm.
  • a glass spacer having a particle size of 40 ⁇ m is mixed in the sealing material so that the thickness of migration lane 3 (the height of the spacing layer 43) is uniform.
  • each partition wall 43a is formed of the sealing material containing the spacer, so (Lane height) can be kept uniform.
  • the swimming lane wall 4 including the plurality of partition walls 43a can be easily formed by forming a pattern of the sealing material using printing or a drawing method. Thus, a plurality of electrophoresis lanes 3 can be easily formed.
  • the lower substrate 1 and the upper substrate 2 are disposed to face each other, and bonded to each other. It is possible to form the electrophoresis lane 3 surrounded by the upper substrate 2 and the spacing layer 43 (partition wall 43a) that partitions the space between the lower substrate 1 and the upper substrate 2.
  • the dielectrophoresis panel 10 which is effective in the present embodiment is formed.
  • the specific size made in the present embodiment is also just an example of the embodiment, and the size of each component described above can be variously changed depending on the analysis target.
  • the lane width is also limited to the above size. is not.
  • the lane width is preferably 1 cm (about 1 cm), but as shown in the ninth embodiment, it is particularly preferably 8 mm.
  • the layer thickness of the spacing layer 43 (partition wall 43a), that is, the gap of the electrophoresis lane 3 is not particularly limited.
  • the gap in the electrophoresis lane 3 is maintained by, for example, a spacer included in the sealing material constituting the spacing layer 43 (partition wall 43a).
  • the lane width (interval between the partition walls 43a'43a) and the lane length of each electrophoresis lane 3 are not particularly limited.
  • the force described by taking as an example the case where the electrophoresis lanes 3 are formed in five rows in parallel is not limited to this. Absent.
  • Samples such as sample solutions are injected into and discharged from each lane 3 An injecting / discharging hole 5 (opening) is formed.
  • a plurality of electrophoresis lanes 3 are provided in parallel, and the electrophoresis electrodes (first electrode 41 and second electrode 42) acting in common on each electrophoresis lane 3 are provided.
  • the electrophoresis control voltage is applied to the electrophoresis electrode array 41A • 42A.
  • each of the electrophoresis electrode arrays can be collectively input.
  • one type of signal is applied to each comb-shaped electrode (electrophoresis electrode array 41A / 42A) provided with a common swimming electrode in each electrophoresis lane 3 provided in parallel to each other.
  • an electric field can be applied to multiple lanes 3 simultaneously. Therefore, according to the present embodiment, migration control of a plurality of samples (electrophoresis medium 90) can be performed simultaneously in a lump.
  • a plurality of different types of samples for example, samples having different relative dielectric constants and viscosities of solvents, or particles in the solvent without complicated setting of the experimental environment.
  • Samples with different physical properties can be placed under the same conditions under the same migration conditions, and the dielectrophoresis chip that can be applied to various test conditions with a wide range of application to the test conditions. It is possible to realize a dielectrophoresis apparatus and further a dielectrophoresis system.
  • the dielectrophoresis system 85 including the dielectrophoresis panel 10 shown in FIG. 30 instead of the dielectrophoresis panel 10 shown in FIG.
  • the plurality of particles 91 having different relative dielectric constants can be identified by the difference in transport speed. Specific examples thereof will be described below.
  • both latex particles and silica particles are conveyed to the injection / discharge holes 5 on the opposite side of the injection / discharge holes 5 into which each electrophoresis medium 90 is injected. Is done.
  • the dielectrophoretic force depends on the dielectric constant of the particles and the solvent, the frequency of the applied voltage, and the like.
  • the dielectric constant of silica particles is higher than the dielectric constant of latex particles. For this reason, both particles have different migration speeds (conveyance speeds). Therefore, by applying a signal under the same conditions to a plurality of electrophoresis lanes 3 as described above, it is possible to select and identify particles having different relative dielectric constants.
  • the dielectrophoresis panel 10 dielectrophoresis chip having the plurality of electrophoresis lanes 3 as described above, the type of the solvent 92 (electrophoresis medium 90) can be migrated.
  • the type of the solvent 92 electrophoresis medium 90
  • By changing each lane 3 and selecting a plurality of specific particles at the same time, or by using the same solvent 92 (electrophoresis medium 90) and changing the electrode shape for each lane 3, a specific plurality of particles 91 It is also possible to sort the particles at the same time, which makes it possible to efficiently sort multiple particles. Therefore, according to the present embodiment, it is possible to realize a dielectrophoresis chip and a dielectrophoresis device that correspond to a wide range of applications, and further a dielectrophoresis system 85.
  • the spacing layer 43 (partition wall 43a) is formed on the lower substrate 1 has been described as an example.
  • the spacing layer 43 (partition wall 43a) is described above. May not necessarily be formed on the lower substrate 1, but may be formed on the upper substrate 2.
  • the spacing layer 43 (partition wall 43a) is formed on the lower substrate 1 on which the lower surface protective film 7 is formed, that is, on the lower surface protective film 7.
  • the present embodiment is not limited to this, and when the lower surface protective film 7 and the upper surface protective film 8 are formed, the spacing retaining layer 43 (partition wall 43a) in the lower surface protective film 7 and the upper surface protective film 8 is formed. ) A part or all of the formation region, that is, the region overlapping with the spacing layer 43 (partition wall 43a) may be removed. With such a structure, even when the adhesion between the lower surface protective film 7 and the upper surface protective film 8 and the sealing material is poor, sufficient adhesion can be obtained. Further, in the present embodiment, as described in the ninth embodiment, the lower surface protective film 7 and the upper surface protective film 8 are not necessarily formed!
  • the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 A-42A) 1S each electrophoresis lane 3.
  • the case where it is provided in the vertical direction is described as an example.
  • the present embodiment is not limited to this, and the same electrode (electrophoresis electrode array 41A) is connected to a plurality of electrophoresis lanes 3.
  • the first electrode 41 and the second electrode 42 are necessarily perpendicular to the respective electrophoresis lanes 3 as long as they act in common on the respective electrophoresis lanes 3. There is no need to even extend in the direction.
  • each electrophoresis lane 3 it is preferable that the observation regions in each electrophoresis lane 3 are provided adjacent to each other. Therefore, it is preferable that the first electrode 41 and the second electrode 42 are provided in a direction perpendicular to the respective electrophoresis lanes 3...
  • the first electrode 41 and the second electrode 42 are not limited to transparent electrodes, but can be in various forms as described above.
  • the first electrode 41 and the second electrode 42 have a laminated structure of, for example, a transparent electrode 41a'42a and a metal electrode 41b'42b.
  • the resistance of the entire electrophoresis electrode array 41 A ⁇ 42 mm can be further lowered and the parasitic capacitance can be reduced.
  • the electrophoresis electrode arrays 41 ⁇ and 42 ⁇ are observed in the observation region 9 in each of the electrophoresis lanes 3.
  • the force is both provided with a portion that is a transparent electrode cover (transparent region 9a) and at least one portion provided with a metal electrode (epi-illumination region 9b). Therefore, if the transmission mode by the transparent electrode and the epi-illumination mode by the metal electrode are switched by the electrophoresis lane 3, different analyzes can be performed simultaneously. Further, according to the above configuration, more complicated dielectrophoretic behavior can be observed.
  • the migration lanes 3 and 3 adjacent to each other are connected to the migration electrode arrays 41 and 42 (the first electrode 41 and the second electrode 42) force.
  • Both may have a configuration including an observation region 9 having a transparent electrode force and an observation region 9 provided with a metal electrode in at least one of them.
  • FIG. 32 is a plan view showing a schematic configuration of the main part of the dielectrophoresis panel 10 according to the present embodiment, and FIG. 32 is an outline of the electrophoresis lane 3 forming part of the dielectrophoresis panel 10. The configuration is shown.
  • the electrode width and the electrode interval of each electrode (first electrode 41, second electrode 42) in the electrophoresis electrode array 41 ⁇ 42A are An example was given in which each case was constant (LZS was 30 m) regardless of whether the force overlapped with Lane 3 or not. That is, in Embodiment 12, the migration electrode array 41A.42A has a stripe structure in which each electrode in the migration electrode array 41A.42A is provided in parallel with each other in a stripe shape. As an example, this was explained.
  • the electrode width and the electrode interval of each of the first electrode 41 and the second electrode 42 are the same as those of the first electrode 41 and the second electrode 42, respectively.
  • the area where 2-electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ) overlaps electrophoresis lane 3 is different from the other areas. Therefore, in the present embodiment, the electrode shapes of the first electrode 41 and the second electrode 42 are such that the first electrode 41 and the second electrode 42 (migration electrode array 41A-42A) overlap with the migration lane 3. And the other areas are different
  • a frame provided as an electrophoresis lane wall (interval holding layer 43) between the lower substrate 1 and the upper substrate 2 independently of each other.
  • an electrode array 41A.42A is provided.
  • the first electrode 41 and the second electrode 42 are each formed, for example, with an electrode width (L) m and an electrode interval (S) 10 m (electrode pitch 20 m), while other regions, That is, the first electrode 41 and the second electrode 42 in the region not related to electrophoresis (that is, outside the electrophoresis lane 3) have an electrode width of 30 / ⁇ ⁇ (and a maximum electrode interval of 30 / zm (that is, adjacent to each other). Electrode interval 30 ⁇ m at the center between electrophoresis lanes 3 and 3 and electrode pitch 60 ⁇ m at the center.
  • the first electrode 41 group and the second electrode 42 group in the electrophoresis lane 3 necessary for observation of the migration phenomenon that is, the first electrode 41 group and the second electrode 42 in the observation region 9.
  • Only the second electrode (group 42) is the required narrow-pitch wiring, and the other areas of the first electrode 41 group and the second electrode 42 group (the first electrode 41 group in the gap 22) are unrelated to the migration phenomenon.
  • the second electrode (group 42) is wide pitch wiring.
  • FIG. 33 is another plan view showing the schematic configuration of the main part of the dielectrophoresis panel 10 according to the present embodiment, and FIG. 33 shows the migration lane 3 forming part of the dielectrophoresis panel 10. A schematic configuration is shown.
  • the dielectrophoresis panel 10 shown in FIG. 33 includes the electrode width and the electrode width of each of the first electrode 41 and the second electrode 42 in each of the three electrophoresis lanes 3 provided in parallel and spaced apart from each other. It differs from the dielectrophoresis panel 10 shown in Fig. 32 in that the electrode spacing (electrode pitch) is different.
  • the electrode width and the electrode interval in each of the first electrode 41 and the second electrode 42 are, for example, one substrate end (in this embodiment, for example, the lower substrate 1 end)
  • the migration electrode arrays 41 and 42 are provided so that the migration lane 3 on the side farther from the mounting / connecting part 44) provided in the part becomes larger.
  • the electrophoresis electrode arrays 41 and 42 shown in FIG. 33 are overlapped with each electrophoresis lane 3 in the electrophoresis lane 3 on the mounting-connector 44 side (the electrophoresis lane at the left end in FIG. 33).
  • Lane 3 In order of force, for example, electrode part P1 consisting of first electrode 41 group and second electrode 42 group with electrode width 10 ⁇ m, electrode interval 10 m (electrode pitch 20 ⁇ m), and electrode width 20 ⁇ m m, electrode interval 20 ⁇ m (electrode pitch 40 ⁇ m) electrode part P2 consisting of first electrode 41 group and second electrode 42 group, electrode width 30 ⁇ m, electrode interval 30 m (electrode pitch 60 ⁇ m)
  • the first electrode 41 group and the second electrode 42 group force electrode part P3 in total 3 types of strip-like electrode parts P1, P2, and P3.
  • the first electrode 41 and the second electrode 42 between the electrode portions P1 and P2 each have, for example, an electrode width of 30 m and an electrode interval of 10 m (electrode pitch at the electrode portion PI side end portion). 20 ⁇ m), and an electrode interval of 20 m (electrode pitch 40 m) at the end portion on the electrode P2 side.
  • the electrode interval is determined by the array width of the electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ( In the electrophoretic electrode array 41 A ⁇ 42A, the electrode width changes linearly according to the electrode width between the first electrodes 41 ⁇ 41 at both ends and the electrode width between the second electrodes 42 ⁇ 42 at both ends. Is formed.
  • the first electrode 41 and the second electrode 42 between the electrode parts ⁇ 2 and ⁇ 3 have an electrode width of 30 ⁇ m and an electrode spacing of 20 ⁇ m at the electrode part P2 side end (electrode pitch of 40 ⁇ m).
  • electrode pitch of 40 ⁇ m.
  • m) electrode spacing 30 ⁇ m (electrode pitch) H)
  • the width of the electrode array 41 A ⁇ 42 mm (the electrode width between the first electrodes 41 ⁇ 41 at both ends of the electrode array 41 ⁇ 42 mm and both sides It is formed so as to change linearly according to the electrode width between the second electrodes 42 and 42 at the end.
  • the electrode shapes (or electrode widths, electrode spacings) of the electrophoresis electrode arrays 41 and 42 for each electrophoresis lane 3 are described. ) Can be used to select and identify a plurality of specific particles at the same time, and it is possible to efficiently select a plurality of particles. Another advantage is that it is possible to observe differences in migration behavior of multiple lanes 3 at once.
  • Embodiments 9 to 14 will be mainly described, in particular, differences from Embodiments 12 to 14 will be described, and Embodiments 9 to 14 will be described. Constituent elements having the same functions as those used in FIG.
  • FIG. 34 (a) is a plan view showing a schematic configuration of the main part of the dielectrophoresis panel 10 according to this embodiment.
  • FIG. 34 (a) shows a schematic configuration of the migration lane 3 formation portion of the dielectrophoresis panel 10.
  • FIG. 34 (b) to (e) are plan views schematically showing the shapes of the first electrode 41 and the second electrode 42 in each electrophoresis lane 3 of the dielectrophoresis panel 10 shown in FIG. 34 (a). .
  • the dielectrophoresis panel 10 includes a first electrode 41 and a second electrode 42 (in each of four electrophoresis lanes 3 provided in parallel.
  • the shape of the electrophoresis electrode array 41A.42A) is different.
  • the migration electrode array 41 A ⁇ 42 ⁇ has a linear first electrode 41 and a second electrode 42 with a wiring width of 30 m as shown in Fig. 34 (b). (Stripe-type electrode structure).
  • the electrophoresis electrode array 41A.42A is a straight line having a wiring width of 45 ⁇ m as shown in FIG.
  • the linear first electrode 41 and the second electrode 42 have a structure (stripe-type electrode structure) in which stripes are provided. Then, in the electrophoresis lane 3C, which is next to the mounting lane connecting section 44 next to the electrophoresis lane 3B, the electrophoresis electrode array 41A.42A has a ridged shape with a wiring width of 30 m (see FIG. 34 (d)). A plurality of saw-shaped) first electrodes 41 and second electrodes 42 are arranged in parallel at equal intervals.
  • the electrophoresis electrode arrays 41 ⁇ and 42 ⁇ have a wave width of 30 m as shown in FIG.
  • the mold has a structure in which a plurality of first electrodes 41 and second electrodes 42 are arranged in parallel at equal intervals.
  • the electrode spacing (electrode pitch) in each of the first electrode 41 and the second electrode 42 is 60 ⁇ m.
  • the dielectrophoresis behavior is the same as the first electrode 41 and the second electrode 42 (electrophoresis electrode array 4) even when the same sample (electrophoresis medium 90) is used and driven with the same control voltage. Depending on the shape of 1 ⁇ ⁇ 42 ⁇ ), it depends on the state of the electric field in the sample (electrophoresis medium 90).
  • the electrode shapes of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ) for each electrophoresis lane 3, By changing at least one of the width and the electrode spacing, it becomes possible to simultaneously select and identify a plurality of specific particles 91 in the electrophoresis medium 90. As a result, for example, the plurality of particles 91 can be efficiently selected. In addition, according to the above configuration, there is a merit that the difference in the migration behavior of the particles 91 in the plurality of migration lanes 3 can be collectively observed.
  • the dielectrophoresis panel 10 that works on the present embodiment, the shapes of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 ⁇ ⁇ 42 ⁇ ), The dielectrophoresis panel in which at least one of the electrode width and the electrode interval is different for each electrophoresis lane 3 has been described as an example.
  • the present embodiment is not limited to this.
  • the dielectrophoresis panel 10 useful for the present embodiment has a predetermined gap 22 (between the electrophoresis lanes) between the electrophoresis lanes 3 and 3 adjacent to each other. Region), and the gap 22 and the migration lane 3 include at least one of the shape, electrode width, and electrode spacing of the first electrode 41 and the second electrode 42 (migration electrode array 41 ⁇ ⁇ 42 ⁇ ). Is different Have a composition that speaks! / You can speak! / ⁇ .
  • the electrode shape of the migration electrode array 41A.42A in the migration lanes 3A.3B.3C is not a stripe shape
  • the electrode shape of the migration electrode array 41 ⁇ ⁇ 42 ⁇ in the gap 22 is a stripe structure. By shortening the wiring length, it is possible to suppress an increase in wiring resistance.
  • the migration lane 3 and the gap portion 22 have different migration widths and intervals between the electrodes in the migration electrode array 41 and the migration electrode array 41.
  • the electrode shape of 42 mm is made different, the low resistance of the migration electrode array 41 ⁇ ⁇ 42 ⁇ (wiring) in the dielectrophoresis panel 10 can be achieved.
  • the electrode array is arranged only on one substrate as described above, and more complicated electrophoretic behavior can be obtained as compared with the case.
  • the dielectrophoresis chip is a dielectrophoresis chip that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to a sample containing the dielectric substance.
  • An electrophoresis lane for dielectrophoretic migration of the dielectric substance and the electrophoresis lane
  • an electrode array that dielectrophores the dielectric substance by applying an alternating voltage to apply an electric field to the sample injected into the electrophoresis lane.
  • the facing surface of the electrophoresis lane facing the electrode array in at least a part of the region where the electrophoresis lane and the electrode array overlap is transparent, and the electrode array overlaps the transparent area in the electrophoresis lane.
  • At least a part of the electrode of the portion is formed of a transparent electrode, and has a structure.
  • the surface of the migration lane facing the electrode row in at least a part of the region where the migration lane force and the electrode row overlap is transparent, and the In the electrode array, at least a part of the electrode overlapping the transparent region in the migration lane is formed of a transparent electrode, that is, in the region where the migration lane and the electrode overlap, at least a part thereof. Since both are transparent, when observing the sample, the dielectrophoretic force is applied to the electrode region, that is, the dielectric substance from any direction above and below the electrophoresis lane without being blocked by the electrode. Observation in the area that gives For this reason, according to the above configuration, the observation direction can be selected.
  • observation and photographing using transmitted light observation and photographing using a transmission mode
  • observation and photographing using a transmission mode observation and photographing using a transmission mode
  • an observation system using projection can be constructed. Therefore, according to the above configuration, it is possible to provide a dielectrophoresis chip in which the restriction of the observation conditions is relaxed compared to the conventional case. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis chip in which the observation environment is improved as compared with the conventional case where the application range for the test conditions is wide. Since the dielectrophoresis chip can be observed and photographed with transmitted light as described above, it is very effective for observation using a lot of fluorescence observation and filtering.
  • the electrode array preferably includes a metal electrode in a portion other than a portion overlapping the transparent region in the electrophoresis lane.
  • an electrode formed of the transparent electrode material is compared with an electrode formed of a metal material (metal electrode).
  • the resistance is relatively high. Therefore, in order to keep the resistivity as low as possible, the electrode array has a metal electrode in the electrode array, such as a two-layer structure of a transparent electrode and a metal electrode. It is preferable. Therefore, by providing the metal electrode in a portion that does not overlap with the transparent region in the electrophoretic lane in the electrode example, when observing the sample, the electrophoretic lane is not blocked by the electrode.
  • the resistance of the entire electrode array can be kept low compared to the case where the electrode array is formed only of transparent electrodes.
  • the parasitic capacitance between the electrodes can be reduced. Therefore, according to the above configuration, the observation conditions for optical observation are not limited, and the measurement accuracy that is easy to use that can suppress the attenuation of the input voltage (electrophoresis control input voltage) delay. High-performance dielectrophoresis chip can be provided!
  • the portion of the electrode that overlaps the transparent region in the migration lane in the electrode row includes a portion having a transparent electrode force and a portion on which a metal electrode is provided.
  • electrodes that overlap the transparent region in the electrophoresis lane that is, the electrode force in the observation region in the dielectrophoresis chip, a portion made of a transparent electrode, and a metal electrode are provided. Therefore, the resistance of the entire electrode array can be reduced as compared with the case where the electrode array is formed of only transparent electrodes, and the parasitic capacitance between the electrodes can be reduced.
  • observation and imaging transmission mode
  • observation and imaging reflection mode
  • a plurality of the electrophoresis lanes are provided on one substrate, and that each electrode in the electrode array is provided across the plurality of electrophoresis lanes.
  • a plurality of the electrophoresis lanes are provided on one substrate, and each electrode in the electrode array is provided across the plurality of migration lanes. That is, since each electrode is provided in common for a plurality of electrophoresis lanes, an alternating voltage (electrophoresis control voltage) that applies a dielectrophoretic force to the dielectric substance is applied to each electrode in each electrophoresis lane. Can be entered in batch. That is, according to the above configuration.
  • an electric field can be simultaneously applied to a plurality of electrophoresis lanes. Therefore, according to the above configuration, the migration control of a plurality of samples can be performed simultaneously.
  • the type of sample for example, a medium such as a solvent
  • the type of sample for example, a medium such as a solvent
  • a plurality of the electrophoresis lanes are provided on one substrate as described above, and each electrode in the electrode array is provided across the plurality of electrophoresis lanes. It is preferable that at least one condition among the shape of the electrode row, the electrode width, and the electrode interval be different between the adjacent lanes.
  • a plurality of the electrophoresis lanes are provided on one substrate as described above, and each electrode in the electrode array is provided across the plurality of electrophoresis lanes.
  • Each of the electrophoresis lanes is provided apart from each other, and at least one of the shape of the electrode row, the electrode width, and the electrode spacing in each of the swimming lanes and in the region between the electrophoresis lanes. The two conditions are preferably different.
  • the electrode shape of the electrode row in the region between the migration lanes is a stripe structure. It is also possible to suppress the increase in wiring resistance by shortening the wiring length.
  • the migration lane is formed of a pair of substrates and a migration lane wall provided between the substrates, and the migration lane wall holds an interval between the pair of substrates inside. It is preferable to contain a spacer.
  • the migration lane wall internally maintains a space between the pair of substrates.
  • the lane height of the electrophoresis lane can be kept uniform by containing There is an effect.
  • the dielectrophoresis chip is provided with an electrophoresis lane wall along the electrophoresis lane on the electrophoresis lane force substrate, and at least a region of the electrophoresis lane wall formed on the substrate. It is preferable that a protective film covering the electrode row is provided in a region excluding a part.
  • the protective film that covers the electrode array is provided on the substrate, so that the migrating dielectric substance is adsorbed to the electrode array in the electrophoresis lane. Can be prevented.
  • the protective film is provided in a region on the substrate excluding at least a part of the region where the migration lane wall is formed, whereby adhesion between the protective film and the material of the migration lane wall is achieved. Even if it is bad, if you can get enough adhesion!
  • the migration lane is formed of a pair of substrates and a migration lane wall provided between the pair of substrates, and the migration lane is disposed between the pair of substrates. It is preferable to have an inlet for injecting samples! /.
  • the injection port is inevitably formed between the pair of substrates due to the pattern of the migration lane wall, so that a material and a process are separately used to form the injection port. Do not need. Therefore, according to the above configuration, the dielectrophoresis chip can be formed more efficiently than the case where the dielectrophoresis chip is provided with the injection port by drill or the like.
  • the dielectrophoresis chip preferably has input terminal portions for inputting the same voltage from both ends of each electrode to both ends of each electrode in the electrode row. .
  • the electrode array includes a first electrode array and a second electrode array each including a plurality of electrodes arranged in the lane direction of the electrophoresis lane, and the electrophoresis lane includes the electrophoresis lane and the electrophoresis lane.
  • the surfaces facing the electrode rows of the electrophoresis lane are transparent, and the first electrode row and the second electrode row are transparent.
  • Each of the two electrode arrays applies an electric field to the sample injected into the migration lane by forming an electric field by an alternating voltage between the electrodes in each electrode array, and the first electrode array and the second electrode
  • Each electrode in the row is provided so as to face each other through the migration lane and cross the migration lane, and the first electrode row and the second electrode row are transparent in the migration lane. That face opposite areas At least partially formed of a transparent electrode, preferred is Rukoto, of electrodes.
  • each electrode in the first electrode row and the second electrode row is provided so as to face each other via the migration lane, so that it is injected into the migration lane.
  • an electrode for applying an electric field formed by an alternating voltage is provided on the sample so as to sandwich the sample. Therefore, an electric field formed by an alternating voltage is applied to the dielectric material from both surfaces of the sample (sample layer) containing the dielectric material, that is, two opposing surfaces so as to sandwich the dielectric material. Therefore, the behavior of dielectrophoresis of the dielectric substance can be stabilized as compared with the case where the electric field is applied only from one side (one side) of the sample (sample layer).
  • a dielectrophoresis chip that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior is provided. can do.
  • each of the electrodes in the first electrode row and the second electrode row is provided via the migration lane. It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior.
  • a voltage is applied to one of the first electrode row and the second electrode example, and a voltage is applied to both the electrode rows. Can be used properly during the same experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.
  • At least one of the first electrode row and the second electrode row includes a metal electrode in a portion other than the portion facing the transparent region in the migration lane. Is preferred!
  • first electrode row and the second electrode row are arranged in a portion facing the transparent region in the migration lane, and the migration lane in the first electrode row and the second electrode row. It is preferable that the electrodes opposed to each other have a transparent electrode force portion and at least one portion provided with a metal electrode.
  • the dielectrophoresis chip applies the above-mentioned induction by applying an electric field formed by an alternating voltage to a sample containing an inductive substance.
  • the first electrode row and the second electrode row are formed on the sample injected into the swimming lane by forming an electric field by an alternating voltage between the electrodes in each electrode row.
  • Each of the electrodes in the first electrode row and the second electrode row is provided so as to face each other through the electrophoresis lane, and the electric field is applied.
  • the electrodes in the first electrode row and the second electrode row are provided to face each other via the electrophoresis lane, so that they are injected into the electrophoresis lane.
  • an electrode for applying an electric field formed by an alternating voltage is provided on the sample so as to sandwich the sample. Therefore, according to the above-described configuration, as described above, the above-described dielectric substance is sandwiched between both surfaces of the sample (sample layer) containing the dielectric substance so as to sandwich the dielectric substance. Since an electric field formed by an AC voltage is applied from each surface, the dielectric substance is dielectrophoretically compared to the case where the electric field is applied only from one surface (one surface) of the sample (sample layer). The behavior can be stabilized.
  • the electric field is applied to the dielectric substance from both sides of the sample (sample layer). Therefore, the dielectric substance is applied only from one side of the sample (sample layer). Compared with the case where an electric field is applied, the electric field exerted on the dielectric substance becomes stronger. For this reason, according to the above configuration, the dielectrophoretic force of the dielectric substance can be increased without increasing the driving voltage, compared to the case where the electric field is applied only from one side of the sample (sample layer). Can do.
  • a dielectrophoresis chip that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior is provided. There is an effect that can be done.
  • the force of each of the first electrode array and the second electrode array are provided via the migration lanes, for example, it is possible to apply AC voltages with different conditions such as phase and amplitude to the first electrode row and the second electrode row, for example. It is. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior.
  • the first electrode row and the second electrode row may have the same shape in a region where both electrode rows and the electrophoresis lane face each other.
  • the first electrode row and the second electrode row may have the same shape in a region where both electrode rows and the electrophoresis lane face each other.
  • the first electrode array and the second electrode array are ideally used from the viewpoint of the collection effect of the dielectric substance (dielectric particles) at the electrode ends, the control of the levitation force, and the transport control. It is desirable that they overlap with each other in plan view.
  • the first electrode array and the second electrode array overlap each other in a planar manner, for example, from both surfaces of the sample (sample layer) containing the dielectric substance, that is, from two opposing surfaces, respectively.
  • a symmetrical electric field can be applied.
  • the first electrode row and the second electrode row are exactly overlapped in a plane, the control of the levitation force and the transport control of the dielectric substance are facilitated. For this reason, it is desirable that the first electrode row and the second electrode row have the same shape in a region where both electrode rows and the migration lane face each other.
  • each electrode in the first electrode row and the second electrode row is provided so as to intersect with the electrophoresis lane, and the electrophoresis lane includes:
  • the facing surfaces of the migration lane and the electrode rows in at least a part of the region where the migration lane and the first electrode row and the second electrode row face each other are transparent, and the first lane is transparent. It is preferable that at least a part of the electrode in at least one of the electrode row and the second electrode row facing the transparent region in the electrophoresis lane is formed of a transparent electrode.
  • each of the electrodes is provided so as to intersect with the migration lane, and the migration lane includes at least a part of a region where the migration lane faces the first electrode row and the second electrode row.
  • At least one of the surfaces facing each of the electrode rows in the above is transparent, and the electrode row facing the transparent area in the migration lane of the first electrode row and the second electrode row is It is preferable that at least a part of the electrode in the portion facing the transparent region in the electrophoresis lane is formed of a transparent electrode.
  • each electrode in the first electrode array and the second electrode array is provided so as to intersect the electrophoresis lane, and for example, (1) the electrophoresis lane
  • Each of the opposite surfaces of the electrophoresis lane to the electrode rows in at least a part of the region where the migration lane and the first electrode row and the second electrode row face each other (that is, overlap) are transparent,
  • at least one of the first electrode row and the second electrode row has a force that at least a part of the electrode facing the transparent region in the migration lane is formed of a transparent electrode.
  • the electrophoresis lane is opposed to each electrode array in at least a part of a region where the electrophoresis lane and the first electrode array and the second electrode array oppose (ie, overlap). Less face Both of them are transparent, and the electrode row that faces the transparent region in the migration lane in the first electrode row and the second electrode row faces the transparent region in the migration lane.
  • each electrode in the first electrode row and the second electrode row is provided so as to intersect the electrophoresis lane, and the electrophoresis lane includes the electrophoresis lane and the first electrode lane.
  • the surface facing the electrode rows of the electrophoresis lane in at least a part of the region where the electrode rows and the second electrode rows face each other (that is, overlap) is transparent, and the first electrode row And the second electrode row is formed by forming at least a part of the electrode facing the transparent region in the migration lane as a transparent electrode.
  • observation with a transmitted light and photographing observation with a transmission mode, photographing
  • observation with a transmission mode, photographing observation with a transmission mode, photographing
  • an observation system by projection can be constructed. Therefore, according to the above configuration, it is possible to provide a dielectrophoresis chip in which the restriction of the observation conditions is relaxed. Since the dielectrophoresis chip can be observed and photographed by transmitted light as described above, it is very effective for observation using a lot of fluorescence observation and filtering.
  • At least one of the first electrode row and the second electrode row includes a metal electrode in a portion other than the portion facing the transparent region in the migration lane. Is preferred!
  • an electrode formed of the transparent electrode material is compared with an electrode formed of a metal material (metal electrode).
  • the resistance is relatively high.
  • the electrode row has a metal electrode in the electrode row, such as a two-layer structure of a transparent electrode and a metal electrode. Therefore, by providing the metal electrode in a portion other than the portion facing the transparent region in the electrophoresis train in the electrode example (that is, the portion not facing), observation in the electrode region is possible.
  • the resistance of the entire electrode array can be reduced as compared with the case where the electrode array is formed of only transparent electrodes, and the parasitic capacitance between the electrodes can be reduced. Therefore, according to the above configuration, observation in the electrode region is possible, and attenuation and delay of the input voltage (electrophoresis control input voltage) can be suppressed. The effect is that a dielectrophoresis chip can be provided.
  • each electrode in the first electrode row and the second electrode row is provided so as to cross the electrophoresis lane
  • the electrophoresis lane includes: The facing surfaces of the electrophoresis lane to the electrode rows in at least a part of the region where the electrophoresis lane and the first electrode row and the second electrode row face each other (that is, overlap) are transparent, and The first electrode row and the second electrode row are connected to the migration level.
  • a portion of the first electrode row and the second electrode row facing the transparent region in the first electrode row and the second electrode row facing each other through the migration lane are both transparent electrode force portions and at least one metal It is preferable to have a portion provided with an electrode.
  • the above in the first electrode row and the second electrode row in the portion facing the transparent region in the migration lane, the above in the first electrode row and the second electrode row.
  • the resistance of the entire electrode array can be reduced.
  • the electrode array can be kept low, and the parasitic capacitance between the electrodes can be reduced.
  • observation and photographing using transmitted light that passes through the transparent electrodes (transmission) Mode) and reflection (epi-illumination) from the metal electrode It is possible to provide a dielectrophoresis chip that can be used for both observation and photographing (epi-illumination mode) using light.
  • each electrode in the first electrode row and the second electrode row is provided so as to intersect the electrophoresis lane, and the electrophoresis lane includes one substrate. It is preferable that a plurality of electrodes are provided on the top, and each electrode in the first electrode row and the second electrode row is provided across the plurality of migration lanes.
  • each electrode in the first electrode row and the second electrode row is provided so as to intersect the migration lane, and the migration lane force is on one substrate.
  • There are a plurality of electrodes and each electrode in the electrode row is provided across the plurality of swimming lanes, that is, each electrode is provided in common in the plurality of electrophoresis lanes.
  • an AC voltage electrophore control voltage
  • an electric field can be applied to a plurality of electrophoresis lanes simultaneously. Therefore, according to the above configuration, migration control of a plurality of samples can be performed simultaneously in a lump.
  • each electrode force in the first electrode row and the second electrode row is provided so as to intersect the electrophoresis lane, and
  • the type of sample for example, a medium such as a solvent
  • a medium such as a solvent is the same, and it is possible to simultaneously select a plurality of specific particles by changing the electrode shape for each electrophoresis lane, which makes it possible to efficiently select a plurality of particles. Therefore, according to said structure, there exists an effect that the dielectrophoresis chip corresponding to a wide use can be provided.
  • the dielectrophoresis chip is provided so as to intersect with the electrophoretic lanes of the respective electrode forces in the first electrode row and the second electrode row.
  • the electrodes may be adjacent to each other in the electrophoresis lanes. It is preferable that at least one of the column shape, electrode width, and electrode interval is different.
  • the dielectrophoresis chip is provided so as to intersect with the electrophoretic lanes of the respective electrode forces in the first electrode array and the second electrode array.
  • the electrophoresis lanes are separated from each other. It is preferable that at least one of the shape, the electrode width, and the electrode interval of the electrode row is different in each of the electrophoresis lanes and the area between the electrophoresis lanes! ! /
  • the electrode shape of the electrode row in the region between the migration lanes is a stripe structure. It is also possible to suppress the increase in wiring resistance by shortening the wiring length.
  • At least one of the shape, the electrode width, and the electrode interval of the electrode array is formed in each electrophoresis lane and in a region between the electrophoresis lanes.
  • the dielectrophoresis apparatus has the configuration including the dielectrophoresis chip.
  • the dielectrophoresis system has a configuration including the dielectrophoresis apparatus as described above.
  • the dielectrophoresis system includes the dielectrophoresis chip and has the configuration described above.
  • the dielectrophoresis apparatus and the dielectrophoresis system force As described above, the facing surface of the electrophoretic lane and the electrode array in at least part of the region where the electrophoretic lane and the electrode array overlap is transparent, and
  • the electrode array includes a dielectrophoresis chip in which at least a part of an electrode that overlaps a transparent region in the electrophoresis lane is formed of a transparent electrode. Any direction above or below the migration lane that is not blocked by the electrodes provided on the migration lane of the migration chip Therefore, it is possible to observe the electrode region, that is, the region in which the dielectrophoretic force is applied to the dielectric substance.
  • observation with transmitted light and imaging observation and imaging with transmission mode
  • observation and imaging with transmission mode observation and imaging with transmission mode
  • an observation system by projection can be constructed. Therefore, it is possible to provide a dielectrophoresis apparatus and a dielectrophoresis system in which the restrictions on the observation conditions are relaxed compared to the conventional case and the application range to the test conditions is wide. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis apparatus and a dielectric swimming system in which the observation environment is improved as compared with the related art.
  • the dielectrophoresis apparatus has, as the dielectrophoresis chip, a first electrode array and a second electrode array each having a plurality of electrodes arranged in the lane direction of the electrophoresis lane. And, as described above, each of the electrodes in the first electrode row and the second electrode row is provided with a dielectrophoresis chip provided opposite to each other via the electrophoretic lane.
  • An electric field formed by an alternating voltage is applied to the conductive material so that the dielectric material is sandwiched between both surfaces of the sample (sample layer) containing the dielectric material, that is, two opposing surfaces. Therefore, compared to the case where the electric field is applied only from one side (one side) of the sample (sample layer), the behavior of dielectrophoresis of the dielectric substance can be stabilized.
  • the electric field is applied to the dielectric substance from both sides of the sample (sample layer), the electric field is applied only to the single-sided force of the sample (sample layer). Compared with the case where the electric field is applied, the electric field exerted on the dielectric substance becomes stronger. For this reason, according to the above configuration, the dielectrophoretic force of the dielectric substance can be increased without increasing the driving voltage, compared to the case where the electric field is applied only from one side of the sample (sample layer). it can.
  • a dielectrophoresis apparatus that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior is provided. be able to.
  • each electrode in the first electrode row and the second electrode row is provided via the migration lane, so that, for example, the first electrode row It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. Therefore, the electric field is applied only from one side (one side) of the sample (sample layer). In other words, compared to the case where one electrode array is not used, it is possible to control the electrophoretic behavior more efficiently or to control the electrophoretic behavior more complicated. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis apparatus in which the observation environment is improved as compared with the conventional case where the application range for the test conditions is wide.
  • a voltage is applied to one of the first electrode row and the second electrode example, and a voltage is applied to both the electrode rows. Can be used properly during the same experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.
  • the dielectrophoresis apparatus includes a control unit that controls a voltage applied to the first electrode array and the second electrode array, and the control unit includes the first electrode array and the first electrode array.
  • the control unit includes the first electrode array and the first electrode array.
  • the AC voltages having different phases are applied to the electrodes adjacent to each other, and the AC voltages having the same phase are applied to the electrodes facing each other via the migration lane. I like to talk.
  • alternating voltages having different phases are applied to the electrodes adjacent to each other in the first electrode row and the second electrode row, and the migration lane is An AC voltage having the same phase is applied to the electrodes facing each other through the two electrodes, so that the dielectric substance can be applied to both surfaces of the sample (sample layer) containing the dielectric substance, that is, from the two opposing faces.
  • Each can apply a symmetric electric field. Therefore, according to the above configuration, there is an effect that a strong dielectrophoretic force can be obtained.
  • control unit applies an AC voltage so that the phases are sequentially shifted by ⁇ with respect to the electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. I prefer it to be something!
  • the levitation force of the dielectric substance is efficiently controlled by applying the AC voltage so that the phases are sequentially shifted by ⁇ to the electrodes adjacent to each other in each electrode row. If you can, it will have a positive effect.
  • control unit applies an AC voltage so that the phase is sequentially shifted by ⁇ 2 to the electrodes adjacent to each other in the first electrode row and the second electrode row. Preferably there is. [0509] As described above, by applying an AC voltage so that the phase is sequentially shifted by ⁇ 2 to the electrodes adjacent to each other in each electrode row, the dielectric substance can be efficiently conveyed. If you can!
  • the dielectrophoresis apparatus includes a control unit that controls a voltage applied to the first electrode row and the second electrode row, and the control unit includes the first electrode row and the first electrode row.
  • the control unit includes the first electrode row and the first electrode row.
  • AC voltages having different phases are applied to the electrodes adjacent to each other, and AC voltages having different phases are applied to the electrodes facing each other via the migration lane. I like it.
  • the dielectric material can be separated and transported only by switching the target electrode to which the voltage is applied.
  • the dielectric material can be easily separated and transported more efficiently.
  • the dielectric material is transported while giving a levitating force to the dielectric material, the dielectric material is difficult to settle and has both the effect of habit.
  • control unit (1) sets the X-th electrode in the first electrode array to ⁇ , X
  • the + ⁇ -th electrode is ⁇ + ⁇ ( ⁇ and ⁇ are integers of 1 or more), and the second electrode array arranged at a position facing each of the electrodes ⁇ , ⁇ + ⁇ through the electrophoresis lane ⁇ ⁇ , ⁇ + ⁇ respectively, and the distance between the surface of Ax and the surface of ⁇ is V, and the distance between the center of Ax and the center of Ax + n is H, Satisfying HZV ⁇ 5, the phase difference of Ax + n and Bx with respect to Ax is ⁇ , and the AC voltage is applied so that the phase difference of Bx + n with respect to Ax is 0.
  • the Xth electrode in the first electrode row is Ax
  • the x + nth electrode is Ax + n
  • the electrodes in the second electrode array arranged at positions facing the electrodes Ax and Ax + n are Bx and Bx + n, respectively, and between the surface of the Ax and the surface of Bx.
  • the above-mentioned n satisfies HZV ⁇ 5, and either Ax + n or Bx above Ax
  • the electrode has a phase difference of ⁇ ⁇ 2
  • the other electrode has a phase difference of 3 ⁇ ⁇ 2
  • an AC voltage is applied so that the phase difference of Bx + n with respect to Ax is ⁇ . It is preferable.
  • the electrodes Ax, Ax + 2, Bx in the electrophoresis lane can be applied to each of the electrodes by applying an alternating voltage under a phase condition that satisfies the above relationship.
  • Bx + 2 has the effect of trapping the dielectric material in the center of the space.
  • control unit selects four target electrodes Ax, Ax + n, Bx, and Bx + n to which the alternating voltage is applied in the first electrode row and the second electrode row. It is preferable that the unit is moved sequentially so that the X of each unit, which also has the combined force of the electrodes, increases by one.
  • the target electrode to which the AC voltage is applied in the first electrode row and the second electrode row is composed of a combination of four electrodes Ax, Ax + n, Bx, and Bx + n 1
  • the dielectric material is trapped in the center of the space surrounded by the unit to which the AC voltage is applied, and the dielectric is trapped.
  • the substance can be transported. Therefore, according to the above configuration, the dielectric substance can be efficiently transported as compared with the conventional TWD mode.
  • the dielectrophoresis system force includes a first electrode row and a second electrode row each having a plurality of electrodes arranged in the lane direction of the electrophoresis lane, and as described above, the first electrode row And a second dielectrophoresis chip provided with the respective electrodes in the second electrode array facing each other through the electrophoretic lane, or a dielectrophoresis device including the dielectrophoresis chip. Since the electric field formed by the AC voltage is applied to both the surfaces of the sample (sample layer) containing the dielectric substance so as to sandwich the dielectric substance, the electric field formed by the AC voltage is applied to the conductive substance. Compared with the case where the electric field is applied only from one side (one side) of the sample (sample layer), the behavior of dielectrophoresis of the dielectric substance can be stabilized.
  • a dielectrophoresis system that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior. be able to.
  • each electrode in the first electrode row and the second electrode row is provided via the migration lane, for example. It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis system in which the observation environment is improved as compared with the conventional case where the application range for the test conditions is wide.
  • a voltage is applied to one of the first electrode row and the second electrode row, and a voltage is applied to both the electrode rows. Can be used properly during the same experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.
  • dielectrophoresis chip dielectrophoresis apparatus, and dielectrophoresis system described above can be suitably applied to, for example, a bio-research microarray such as separation and detection of specific cells.
  • the dielectrophoresis chip, the dielectrophoresis apparatus, and the dielectrophoresis system according to the present invention are used for bioresearch microarrays such as separation and detection of specific cells, for example, dielectric substances such as biomolecules and resin beads.
  • bioresearch microarrays such as separation and detection of specific cells, for example, dielectric substances such as biomolecules and resin beads.
  • a wide range of blood cell components such as red blood cells, white blood cells, and lymphocytes; bacteria such as Escherichia coli and Listeria; biomolecules such as DNA (deoxyribonucleic acid; deoxyribose nucleic acid) and tannoic acid;
  • DNA deoxyribonucleic acid; deoxyribose nucleic acid
  • tannoic acid tannoic acid
  • it is suitably used for applications such as analysis of DNA, proteins, cells, etc. (reaction 'detection' separation 'transport); chemical synthesis (microplant);

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  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrostatic Separation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

Selon cette invention, un panneau électrophorétique (10) provoque la migration d'une substance diélectrique par application d'un champ électrique généré par une tension alternative, vers un échantillon contenant la substance diélectrique susmentionnée. Ce panneau électrophorétique (10) est équipé, sur un substrat inférieur (1), de plusieurs voies de migration (3) destinées à provoquer la migration diélectrique de la substance diélectrique. Sur le substrat inférieur (1) est situé un réseau d'électrodes de migration (6) contenant plusieurs électrodes de migration (6a) se croisant avec les voies de migration (3) et provoquant la migration diélectrique de la substance diélectrique par application d'une tension alternative de façon à appliquer le champ électrique à l'échantillon injecté dans les voies de migration (3). Au moins une partie des faces des voies de migration (3) opposées au réseau d'éléctrodes de migration (6) sont transparentes, au niveau des zones dans lesquelles les voies de migration (3) et le réseau d'électrodes (6) sont superposés. En outre, dans le réseau d'électrodes de migration (6), les électrodes de migration (6a) sont constituées au moins en partie d'électrodes transparentes au niveau des parties superposées aux parties transparentes des voies de migration (3).
PCT/JP2006/320879 2005-10-19 2006-10-19 Systeme, dispositif et puce electrophoretiques WO2007046485A1 (fr)

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WO2009044902A1 (fr) * 2007-10-05 2009-04-09 Kyushu Institute Of Technology Dispositif et procédé de diélectrophorèse
JP2009092422A (ja) * 2007-10-04 2009-04-30 National Institute Of Advanced Industrial & Technology 電極ならびにそれを用いた転写装置および転写方法
JP2013520298A (ja) * 2010-02-22 2013-06-06 ルナマイクロ・エービー 動電学的流体システム
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CN105817322A (zh) * 2016-03-23 2016-08-03 北京上派环境科技有限公司 一种使用柱状介电电泳电极的工业除尘设备
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JPWO2008149797A1 (ja) * 2007-06-01 2010-08-26 隆治 円城寺 誘電体微粒子濃縮装置
JP4548742B2 (ja) * 2007-06-01 2010-09-22 隆治 円城寺 誘電体微粒子濃縮装置
JP2009092422A (ja) * 2007-10-04 2009-04-30 National Institute Of Advanced Industrial & Technology 電極ならびにそれを用いた転写装置および転写方法
WO2009044902A1 (fr) * 2007-10-05 2009-04-09 Kyushu Institute Of Technology Dispositif et procédé de diélectrophorèse
US8864972B2 (en) 2007-10-05 2014-10-21 Kyushu Institute Of Technology Dielectrophoresis apparatus and method
JP2013520298A (ja) * 2010-02-22 2013-06-06 ルナマイクロ・エービー 動電学的流体システム
US9168527B2 (en) 2010-02-22 2015-10-27 LunaMicro AB Electrokinetic fluidic system
WO2014207618A1 (fr) * 2013-06-28 2014-12-31 International Business Machines Corporation Puce microfluidique avec électrodes diélectrophorétiques s'étendant dans un chemin d'écoulement hydrophile
US9901926B2 (en) 2013-06-28 2018-02-27 International Business Machines Corporation Microfluidic chip with dielectrophoretic electrodes extending in hydrophilic flow path
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GB2565668B (en) * 2016-04-08 2020-10-14 Ibm Particle manipulation and trapping in microfluidic devices using two-dimensional material
GB2565668A (en) * 2016-04-08 2019-02-20 Ibm Particle manipulation and trapping in microfluidic devices using two-dimensional material
EP3427832A1 (fr) * 2017-07-12 2019-01-16 Sharp Life Science (EU) Limited Espaceur pour le côté chargé du dispositif d'ewod
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