WO2007037973A1 - Composition dielectrique cog destinee a etre utilisee avec des electrodes au nickel - Google Patents
Composition dielectrique cog destinee a etre utilisee avec des electrodes au nickel Download PDFInfo
- Publication number
- WO2007037973A1 WO2007037973A1 PCT/US2006/035426 US2006035426W WO2007037973A1 WO 2007037973 A1 WO2007037973 A1 WO 2007037973A1 US 2006035426 W US2006035426 W US 2006035426W WO 2007037973 A1 WO2007037973 A1 WO 2007037973A1
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- WIPO (PCT)
- Prior art keywords
- firing
- dielectric
- dielectric material
- composition
- atm
- Prior art date
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 20
- 239000000203 mixture Substances 0.000 title claims description 64
- 239000003990 capacitor Substances 0.000 claims abstract description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000012298 atmosphere Substances 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 11
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 10
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 10
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 10
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 10
- 238000010304 firing Methods 0.000 claims description 51
- 239000003989 dielectric material Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 14
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 229910052593 corundum Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 5
- 229910002370 SrTiO3 Inorganic materials 0.000 claims description 3
- 238000001354 calcination Methods 0.000 claims description 3
- 239000007772 electrode material Substances 0.000 claims description 3
- 229910000018 strontium carbonate Inorganic materials 0.000 claims description 3
- 229910014031 strontium zirconium oxide Inorganic materials 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 2
- 150000003624 transition metals Chemical class 0.000 claims description 2
- 239000002003 electrode paste Substances 0.000 claims 2
- LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 claims 2
- 238000005245 sintering Methods 0.000 abstract description 13
- 229910000990 Ni alloy Inorganic materials 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 6
- 230000015556 catabolic process Effects 0.000 abstract description 5
- 229910052712 strontium Inorganic materials 0.000 abstract description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract description 2
- 239000011159 matrix material Substances 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 229910000510 noble metal Inorganic materials 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000843 powder Substances 0.000 description 20
- 238000009472 formulation Methods 0.000 description 14
- 239000002243 precursor Substances 0.000 description 12
- 239000004020 conductor Substances 0.000 description 11
- 239000010953 base metal Substances 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 238000007639 printing Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000011118 polyvinyl acetate Substances 0.000 description 4
- 229920002689 polyvinyl acetate Polymers 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 3
- DAFHKNAQFPVRKR-UHFFFAOYSA-N (3-hydroxy-2,2,4-trimethylpentyl) 2-methylpropanoate Chemical compound CC(C)C(O)C(C)(C)COC(=O)C(C)C DAFHKNAQFPVRKR-UHFFFAOYSA-N 0.000 description 2
- FFQALBCXGPYQGT-UHFFFAOYSA-N 2,4-difluoro-5-(trifluoromethyl)aniline Chemical compound NC1=CC(C(F)(F)F)=C(F)C=C1F FFQALBCXGPYQGT-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- NNRLDGQZIVUQTE-UHFFFAOYSA-N gamma-Terpineol Chemical compound CC(C)=C1CCC(C)(O)CC1 NNRLDGQZIVUQTE-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- ISJNRPUVOCDJQF-UHFFFAOYSA-N (1-hydroxy-2,2,4-trimethylpentyl) 2-methylpropanoate Chemical compound CC(C)CC(C)(C)C(O)OC(=O)C(C)C ISJNRPUVOCDJQF-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- RUJPNZNXGCHGID-UHFFFAOYSA-N (Z)-beta-Terpineol Natural products CC(=C)C1CCC(C)(O)CC1 RUJPNZNXGCHGID-UHFFFAOYSA-N 0.000 description 1
- XFRVVPUIAFSTFO-UHFFFAOYSA-N 1-Tridecanol Chemical compound CCCCCCCCCCCCCO XFRVVPUIAFSTFO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- UHALKNGKVBXOBL-UHFFFAOYSA-N [B+]=O.[O-2].[Mg+2] Chemical compound [B+]=O.[O-2].[Mg+2] UHALKNGKVBXOBL-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000004675 formic acid derivatives Chemical class 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 1
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- QJVXKWHHAMZTBY-GCPOEHJPSA-N syringin Chemical compound COC1=CC(\C=C\CO)=CC(OC)=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QJVXKWHHAMZTBY-GCPOEHJPSA-N 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 229940087291 tridecyl alcohol Drugs 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/08—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances quartz; glass; glass wool; slag wool; vitreous enamels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/14—Silica-free oxide glass compositions containing boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/16—Compositions for glass with special properties for dielectric glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
- H01G4/1245—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates containing also titanates
Definitions
- This invention relates to a zirconate titanate based dielectric composition, and more particularly to a strontium-zirconate-titanate-based dielectric composition that can be used to form multilayer ceramic chip capacitors having internal base metal electrodes formed of nickel or nickel alloys.
- Multilayer ceramic chip capacitors have been widely utilized as miniature- sized, high capacitance and high reliability electronic components. In accordance with increasing demands for high-performance electronic equipment, multilayer ceramic chip capacitors also have encountered marketplace demand for smaller size, higher capacitance, lower cost, and higher reliability.
- Multilayer ceramic chip capacitors generally are fabricated by forming alternating layers of an internal electrode forming paste and a dielectric layer-forming paste. Such layers are typically formed by sheeting, printing, or similar techniques, followed by concurrent firing.
- the internal electrodes have been formed of conductors such as palladium, gold, silver or alloys of the foregoing. Although palladium, gold and silver are expensive, they can be partially replaced by the use of relatively inexpensive base metals such as nickel and its alloys.
- a "base metal” is any metal other than gold, silver, palladium, and platinum. Base metal internal electrodes can become oxidized if fired in ambient air, so the dielectric layers and internal electrode layers must be co-fired in a reducing atmosphere. Firing in a reducing atmosphere, however, causes the dielectric layers to be reduced, which decreases resistivity.
- Multilayer ceramic chip capacitors using non-reducible dielectric materials have been proposed, however, such devices typically have a shorter life of insulation resistance (IR) and low reliability.
- IR insulation resistance
- COG characteristic The Electronic Industry Association (EIA) prescribes a standard for the temperature coefficient of capacitance (TCC) known as the COG characteristic.
- the COG characteristic requires that the change of capacitance be no greater than 30 ppm per degree centigrade ( ⁇ 30 ppm/°C) over the temperature range -55°C to +125 0 C. COG components do not exhibit capacitance aging.
- the present invention provides a dielectric composition that can be used to make ceramic multilayer capacitors compatible with internal electrodes containing base metals such as nickel or nickel alloys. Capacitors may be formed from the dielectric composition of the present invention to exhibit a stable dielectric constant with a small dielectric loss and excellent reliability under highly accelerated life testing conditions.
- the dielectric composition of the present invention comprises a uniform dense microstructure of grains having an average diameter of about 0.5 to about 3 microns. A uniform and dense grain microstructure is critical in achieving high reliability multilayer capacitors having dielectric layers thinner than 5 microns.
- the dielectric composition of the present invention comprises, prior to firing, a blend of the oxides of strontium, titanium, and zirconium. Oxides to aid in sintering such as MgO, B 2 O 3 , and MgO-CaO-SrO-Al 2 O 3 -SiO 2 may be added.
- Another embodiment of the present invention is an electronic device comprising a multilayer chip comprising a dielectric layer comprising a strontium- zirconate-titanate mix and a magnesium oxide-boron oxide mix.
- Yet another embodiment of the present invention is an electronic device comprising a multilayer chip comprising a dielectric layer comprising a strontium zirconate titanate mix and a MgO-CaO- SrO-Al 2 O 3 -SiO 2 mix.
- the present invention provides a method of forming an electronic component comprising applying particles of a dielectric material to a substrate and firing the substrate at a temperature sufficient to sinter the dielectric material, wherein the dielectric material comprises, prior to firing, a blend (in weight percent) of the ingredients in Table 1. It is to be understood that each numerical value herein (percentage, temperature, etc) is presumed to be preceded by "about.” Table 1. Oxide formulations of dielectric compositions.
- Another route is to begin with strontium carbonate, titanium dioxide, and zirconium oxide.
- the composition can also be made by firing a blend of one or more pre-reacted oxides such as SrTiO 3 or SrZrO 3 .
- the formulation of Table 2 will result in approximately the same dielectric material as that made by the formulation of Table 1.
- the dielectric material comprises, prior to firing, a blend (in weight percent) of the ingredients in Table 3.
- Another embodiment of the present invention is a multilayer ceramic chip capacitor comprising alternately stacked layers of a dielectric material and an internal electrode material comprising a transition metal other than Ag, Au, Pd, or Pt, wherein the dielectric material comprises a sintered blend of any of the formulations of Tables 1, 2, or 3.
- Yet another embodiment is a lead-free and cadmium- free dielectric paste comprising a solids portion wherein the solids portion comprises a glass component, wherein the glass component comprises, prior to firing, the ingredients of Table 1, Table 2, or Table 3.
- FIG.l is a cross-sectional view of a multilayer ceramic chip capacitor according to an embodiment of the invention.
- Multilayer chip capacitors are fabricated by alternately stacking dielectric layers and internal electrodes to form green chips.
- the internal electrodes of interest herein are comprised of base metals including nickel or nickel alloys.
- the dielectric composition that forms the dielectric layers is produced by wet milling the components of the dielectric with an organic vehicle system.
- the dielectric composition is deposited on a carrier film, such as polyester or polypropylene, or a belt, such as stainless steel, paper, or a substrate such as alumina or glass, coating the film, and forming sheets, which are alternately stacked with electrodes to form the green chips.
- the organic vehicle is removed by heating to a temperature less than about 35O 0 C in an air atmosphere. Once the vehicle is removed, the green chips are then fired in a reducing atmosphere of wet nitrogen and hydrogen having an oxygen partial pressure of about 10 ⁇ 12 to about ICF 8 atm, at a temperature of about 1200°C to about 135O 0 C.
- a reducing atmosphere of wet nitrogen and hydrogen having an oxygen partial pressure of about 10 ⁇ 12 to about ICF 8 atm, at a temperature of about 1200°C to about 135O 0 C.
- Various heating profiles may be used both for removing the binder and for firing the chip.
- the configuration of multilayer ceramic capacitors is well known in the art.
- an exemplary structure of a multilayer ceramic chip capacitor 1 is shown.
- External electrodes 4 of the capacitor 1 are disposed on side surfaces of the capacitor chip 1 and in electrical connection with internal electrode layers 3.
- the capacitor chip 1 has a plurality of alternately stacked dielectric layers 2.
- the shape of the capacitor chip 1 is not critical although it is often rectangular shaped. Also, the size is not critical and the chip may have appropriate dimensions in accordance with a particular application, typically in the range of 1.0 to 5.6 mm x 0.5 to 5.0 mm x 0.5 to 1.9 mm.
- the internal electrode layers 3 are stacked such that at opposite ends they are alternately exposed at opposite side surfaces of the chip 1.
- the internal electrode layers 3 of one group are exposed at one side surface of the chip 1 and the internal electrode layers 3 of another group are exposed at the opposite side surface of the chip 1.
- One external electrode 4 is applied to one side surface of the capacitor chip 1 in electrical contact with the internal electrode layers 3 of the one group, and the other external electrode 4 is applied to the opposite side surface of the chip 1 in electrical contact with the internal electrode layers 3 of the other group.
- the dielectric layers are formed of a dielectric material formed by sintering a blend including oxides of strontium, titanium and zirconium, as in Tables 1, 2, or 3.
- a sintering aid including B 2 O 3 , MgO or MgO-CaO-Al 2 O 3 -SiO 2 -SrO may be useful.
- Another route is to begin with strontium titanate and strontium zirconate, as in Tables 4 or 5.
- the dielectric compositions herein possess fine crystal grains that typically have a mean size of about 0.5 to about 3 microns, with a grain size of less than about 0.7 micron being preferred.
- Each dielectric layer has a thickness of up to about 50 microns. Preferably, the thickness of each dielectric layer is from about 0.5 microns to about 50 microns. More preferably, the thickness of each dielectric layer is from about 2 microns to about 10 microns.
- the compositions herein may be employed to make multilayer ceramic chip capacitors having thin dielectric layers to ensure minimal degradation of capacitance over the service life.
- the number of dielectric layers stacked in a chip capacitor is generally from about 2 to about 800, and preferably from about 3 to about 400.
- the multilayer ceramic chip capacitor of the invention generally is fabricated by forming a green chip by conventional printing and sheeting methods using pastes, and firing the green chip. After firing, the chip is tumbled dry in a medium such as alumina or silica to round off corners. Next, a conductive paste, containing, for example, copper is then applied to both ends to connect the exposed inner electrodes together to make terminations. The chip is then termination fired at about 800 0 C in a nitrogen atmosphere to sinter the conductor (e.g., copper) into a solid conduction pad at both ends, to form a multilayer capacitor.
- the terminations are external electrodes 4 as shown in Figure 1.
- a paste for forming the dielectric layers can be obtained by mixing an organic vehicle with a raw dielectric material, as disclosed herein. Also useful are precursor compounds that convert to such oxides and composite oxides upon firing, as stated hereinabove.
- the dielectric material is obtained by selecting compounds containing these oxides, or precursors of these oxides, and mixing them in the appropriate proportions. The proportion of such compounds in the raw dielectric material is determined such that after firing, the desired dielectric layer composition may be obtained.
- the raw dielectric material is generally used in powder form having a mean particle size of about 0.1 to about 3 microns, and more preferably about 1 micron or less.
- Organic Vehicle is a binder in an organic solvent or a binder in water.
- binder used herein is not critical; conventional binders such as ethyl cellulose, polyvinyl butanol, ethyl cellulose, and hydroxypropyl cellulose, and combinations thereof are appropriate together with a solvent.
- the organic solvent is also not critical and may be selected in accordance with a particular application method (i.e., printing or sheeting), from conventional organic solvents such as butyl carbitol, acetone, toluene, ethanol, diethylene glycol butyl ether; 2,2,4- trimethyl pentanediol monoisobutyrate (Texanol ® ); alpha-terpineol; beta-terpineol; gamma terpineol; tridecyl alcohol; diethylene glycol ethyl ether (Carbitol ® ), diethylene glycol butyl ether (Butyl Carbitol ® ) and propylene glycol; and blends thereof, Products sold under the Texanol ® trademark are available from Eastman Chemical Company, Kingsport, TN; those sold under the Dowanol ® and Carbitol ® trademarks are available from Dow Chemical Co., Midland, ML [0026] Alternatively, the binder could
- PVA and PVAC are generally not compatible with boron containing ceramic dielectric powders.
- An aqueous slurry including a boron containing glass together with PVA and/or PVAC tends to suffer severe gelation. Therefore, ceramic dielectric powders that do not contain boron, as disclosed in this invention, are of particular importance for water based slurry processing.
- the pastes doelectric or electrode pastes.
- the paste contains about 1 to 5 wt % of the binder and about 10 to 50 wt % of the organic solvent, with the balance being either the metal component (for an electrode) or a dielectric component (for a dielectric layer).
- the respective pastes may contain up to about 10 wt % of other additives such as dispersants, plasticizers, dielectric compounds, and insulating compounds.
- a paste for forming internal electrode layers is obtained by mixing an electro-conductive material with an organic vehicle.
- the conductive material used herein includes conductors such as conductive metals and alloys as mentioned herein and various compounds which convert into such conductors upon firing, for example, oxides, organometallic compounds and resinates.
- An example of a suitable nickel paste is EL51-012 nickel paste from Ferro Corporation.
- the conductor that forms the internal electrode layers 3 is not critical, although a base metal preferably is used since the dielectric material of the dielectric layers 2 has anti-reducing properties.
- Typical base metals include nickel and its alloys.
- Preferred nickel alloys contain at least one other metal selected from Mn, Cr, Co, Cu, and Al. Alloys containing at least about 95 wt % of nickel are preferred. It is to be noted that nickel and nickel alloys may contain up to about 0.1 wt% of phosphorous and other trace components (i.e., impurities).
- the thickness of the internal electrode layers may be controlled to suit a particular application, but the layers are typically up to about 5 microns thick.
- an internal electrode layer has a thickness of about 0.5 to about 5 microns and more preferably about 1 to about 5 microns.
- External Electrode The conductor that forms the external electrodes 4 is not critical, although inexpensive metals such as copper, nickel, and alloys of either or both, optionally containing Mn, Cr, Co, or Al, are preferred.
- the thickness of the external electrode layers may be controlled to suit a particular application, but the layers are typically up about 10 to about 50 microns thick, preferably about 20 to about 40 microns thick.
- Paste for forming external electrodes is prepared by the same method as for the internal electrodes.
- a green chip then may be prepared from the dielectric layer-forming paste and the internal electrode layer- forming paste.
- a green chip is prepared by alternately printing the pastes onto a substrate of a polyester film, (e.g., polyethylene terephthalate (PET)), in laminar form, cutting the laminar stack to a predetermined shape and separating it from the substrate.
- PET polyethylene terephthalate
- a sheeting method wherein a green chip is prepared by forming green sheets from the dielectric layer-forming paste, printing the internal electrode layer-forming paste on the respective green sheets, and stacking the printed green sheets. After the organic vehicle is removed from the green chip, it is fired.
- the organic vehicle may be removed under conventional conditions, by heating at a rate of 0.01 °C to 20°C/hour, more preferably about 0.03 - 0.1°C/hour, with a hold temperature of about 150°C to about 350°C, preferably about 200 °C to about 300 °C, more preferably about 250 0 C, and a hold time of about 30 - 700 minutes, preferably about 200 - 300 minutes in an air atmosphere.
- the green chip is then fired in an atmosphere, which is determined according to the type of conductor in the internal electrode layer- forming paste.
- the firing atmosphere may have an oxygen partial pressure of about 10 "12 to about 10 '8 atm. Sintering at a partial pressure lower than about 10 "12 atm should be avoided, since at such low pressures the conductor can be abnormally sintered and may become disconnected from the dielectric layers.
- oxygen partial pressures above about 10 ⁇ 8 atm the internal electrode layers may be oxidized. Oxygen partial pressures of about 10 "11 to about 10 "9 atm are most preferred.
- the temperature is raised from room temperature to a peak temperature of from about 1150°C to about 1350°C, more preferably from about 1250°C to about 1350°C.
- the temperature is held for about two hours to enhance densif ⁇ cation. Lower hold temperatures provide insufficient densification whereas higher hold temperatures can lead to very large grains.
- the firing is preferably conducted in a reducing atmosphere.
- An exemplary firing atmosphere includes wet N 2 , or a humidified mixture of N 2 and H 2 gases.
- the sintering ramp rate is about 5O 0 C to about 500°C/hour, preferably about 200°C to 300°C/hour; hold temperature of about 1200°C to about 135O 0 C, preferably about 1250 0 C to about 135O 0 C, more preferably about 1275°C to about 1325 0 C.
- the hold time is about 0.5 to about 8 hours, preferably about 1 to 3 hours, and the cooling rate is about 50 0 C to 500°C/hour, preferably about 200 0 C to 300°C/hour.
- the organic vehicle removal and firing may be carried out either continuously or separately. If continuously, the process includes organic vehicle removal, changing the atmosphere without cooling, heating to the firing temperature, holding at the firing temperature for a specified time and cooling afterwards. If separately, after organic vehicle removal and cool down, the temperature of the chip is raised to the sintering temperature and the atmosphere then is changed to a reducing atmosphere.
- the resulting chip may be polished at end faces by barrel tumbling and/or sand blasting, for example, before the external electrode-forming paste is printed or transferred and fired to form external electrodes (terminations). Firing of the external electrode-forming paste may be carried out in a dry nitrogen atmosphere (about 10 "6 atm oxygen partial pressure), at about 600 0 C to 800 0 C, for about 10 minutes to about 1 hour. [0036] If necessary, pads are formed on the external electrodes by plating or other methods known in the art. The multilayer ceramic chip capacitors of the invention can be mounted on printed circuit boards, for example, by soldering. [0037] EXAMPLES. The following examples are provided to illustrate preferred aspects of the invention and are not intended to limit the scope of the invention.
- Multilayer ceramic capacitors with pure nickel electrodes, 10 active layers, with each layer being 5 to 10 microns thick were prepared and sintered in a reducing atmosphere (p ⁇ 2 of 10 '11 to 10 "8 atm) at 1275°C to 1350°C. Physical and electrical measurements were carried out.
- the fired chips exhibited a dielectric permittivity over 30, DF ⁇ 0.1 % at 1 MHz, TCC of less than ⁇ 30 ppm/°C from - 55 0 C to +125°C, IR > 10 13 ohms at 25 0 C, IR >10 12 ohms at 125°C.
- the dielectric breakdown voltage exceeds 140 V/micron. Reliability test was conducted by subjecting chips at 140 0 C with 300V DC voltage applied. No failure was observed after 115 hours.
- Example 1 A dielectric composition identified as Precursor 1 was formed by mixing, blending, and/or milling in water appropriate amounts of the oxides as shown in Table 6. The powders were mixed at high shear (about 5000/min) with 1% Darvan ® C, a polymeric deflocculant available from RT Vanderbilt Co., Inc., Norwalk, CT. The mixed powders were bead milled to a particle D 50 of about 0.65 micron using 0.5 mm YTZ (yttria stabilized zirconia). The powders are calcined at 1200 0 C for 5 hours. The calcined powders are then pulverized by conventional means to afford Precursor 1.
- the composition of Precursor 1 after calcination, can be represented by the following expression: SrZro. 955 Ti 0 . 045 0 3 .
- To Precursor 1 was added 2MgO*3 B 2 O 3 (as a combination OfMg(OH) 2 and H 3 BO 3 ), as a sintering flux, in accordance with the formulation in Table 7.
- the blended powders are mixed at high shear (about 5000/min), bead milled to a particle D 50 of about 0.40 micron using 0.5 mm YTZ, dried and pulverized by conventional means to afford the dielectric powder of Example 1.
- the powder of Example 1 contains the combination of simple oxides as set forth in Table 8 and has a formula that may be expressed alternately as: 98.979 wt% of SrZr 0 . 955 Tio.o 45 0 3 + 0.547 wt% of MgO + 0.474 wt% B 2 O 3 . Table 8. Oxide ingredients of Example 1 dielectric powder.
- the final powders had an average particle size of 0.3 to 1 micron.
- One hundred grams of the above powders was then added to 28.8 grams of an organic vehicle comprising polyvinyl butanol, toluene, and ethanol, and wet milled for 24 hours to prepare a slurry for tape casting.
- the wet slurry was coated on a polyester film to form dielectric green tapes.
- the thickness of the dielectric green tapes was from about 5 to about 15 microns depending on the specific testing to be performed on them.
- Nickel electrodes were printed onto the dried green dielectric tape by conventional screen-printing methods using a conventional nickel paste.
- a total of 10 sheets were stacked and bonded under a pressure of 5100 psi and a temperature of 130°F (54°C) to form a green chip.
- the chip dimension is about 0.12"(L) x 0.06"(W) (EIA1206 size) or 0.08"(L) x 0.05" (W) (EIA0805 size)
- the green chip was heated to remove the organic vehicle accordance with the burn-out cycle of Table 9.
- chips first had their binder removed at a temperature of about 265 0 C (Table 9) and then were sintered at a temperature from 1250 0 C to 135O 0 C in a gas mixture of N 2 /H 2 /H 2 O at a p ⁇ 2 from 10 '11 to 10 "8 atm.
- the gas mixture was achieved by humidifying the N 2 /H 2 gases through a wetter with a water temperature of 35 0 C.
- the chip thus obtained was corner rounded by tumbling.
- An external electrode forming copper paste available as TM50-081 from Ferro Corporation of Cleveland, Ohio was applied to the end faces and fired in a dry nitrogen atmosphere at 775°C for about 70 minutes to form external electrodes.
- the multilayer capacitor thus processed had dimensions of about 3.2 mm x 1.6 mm (EIA 1206 size) or about 2.1 mm x 1.3 mm (EIA0805 size) with variable thickness.
- the dielectric layers were 6 to 15 microns thick, and the internal nickel electrode layers were about 1.5 microns thick.
- Multilayer chip capacitors were made from the powders of Example 1 and tested. Firing conditions as well as electrical properties are summarized in Table 10. All examples (Ia to Ig) in Table 10 were fired at the indicated temperature for 2 hours. TABLE 10. Firing conditions and electrical properties for MLCCs of Example 1.
- EXAMPLE 2 To precursor 1 was added a mixture OfMg(OH) 2 , CaCO 3 , Al 2 O 3 and SiO 2 according to Table 11, as a sintering aid (effectively resulting in MgO-CaO-Al 2 O 3 -SiO 2 after firing). The powder was processed according to Example 1. Table 11. Formulation of Example 2 dielectric prior to firing
- the powder of Example 2 has a formula that may be expressed alternately as: 98.003 wt% of SrZro. 955 Tio.o 45 0 3 + 0.178 wt% of MgO + 0.144 wt % of CaO + 0.579 wt% OfAl 2 O 3 + 1.096 wt% Of SiO 2 .
- the powder of Example 2 has the formulations of Table 12.
- Example 2 The final powder of Example 2 was processed according to the procedures of Example 1 to fabricate MLCC chips for electrical testing. Firing conditions as well as electrical properties are summarized in Table 13. Examples 2a to 2d in Table 13 were fired at the indicated temperature for 2 hours.
- EXAMPLES 3 - 14 To Precursor 1 was added various amounts of a mixtures including any or all of MgO 5 CaO, Al 2 O 3 , SiO 2 , and/or SrO as a sintering aid in accordance with the formulations of Examples 3 - 14 in Table 14. Because the sintering aid in Examples 12, 13 and 14 also contain SrO, the total SrO in those examples comes both from Precursor 1 and from the sintering aid. The total weight of Precursor 1 is the sum of the first three columns (SrO, ZrO 2 and TiO 2 ) for Examples 3 to 14. For the purpose of easy comparison, the composition and MLCC electrical properties of Example 2 are also included in Tables 14 and 15.
- Example 3 The final powders of Examples 3 - 14 were processed according to the procedures of Example 1 to fabricate MLCC chips for electrical testing. Firing conditions as well as electrical properties are summarized in Table 14. The MLCCs were fired for two hours each.
- the exemplary chips made from the composition of Examples 1-14 all have very high dielectric constants, low DF, small fired grain sizes, and high breakdown voltages.
- the TCC meets the COG standard and the IR at 25°C and 125°C all exceed EIA specifications.
- the exemplary chips made from the composition of Examples 1-14 all have very high dielectric constants, low DF, small fired grain sizes, and high breakdown voltages.
- the TCC meets the COG standard and the IR at 25°C and 125°C all exceed EIA specifications.
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Abstract
L'invention concerne des condensateurs ultraminces multicouches en céramique qui remplissent les exigences COG et qui sont compatibles avec les conditions de frittage en atmosphère réductrice de façon que des métaux non nobles tels que le nickel et les alliages de nickel puissent être utilisés pour des électrodes internes et externes. Les condensateurs présentent des propriétés diélectriques souhaitables (capacité élevée, facteur de faible dissipation, résistance d'isolement élevée), un excellent rendement dans les essais de durée de vie fortement accélérés et une très bonne résistance au claquage diélectrique. Les couches diélectriques comprennent une matrice de zirconate de strontium dopée avec d'autres oxydes métalliques tels que TiO2, MgO, B2O3, CaO, A12O3 SiO2 et SrO dans diverses combinaisons. La figure 1 illustre une vue en coupe d'un condensateur ultramince multicouche en céramique (1) selon un mode de réalisation de l'invention. Les électrodes externes (4) du condensateur (1) sont disposées sur des surfaces latérales de la puce de condensateur (1) et en connexion électrique avec les couches des électrodes internes (3). La puce de condensateur (1) comprend une pluralité de couches diélectriques empilées en alternance (2).
Priority Applications (4)
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US10/599,925 US7858548B2 (en) | 2006-09-13 | 2006-09-13 | COG dielectric composition for use with nickel electrodes |
KR1020087007022A KR101351150B1 (ko) | 2005-09-28 | 2006-09-13 | 니켈 전극에 사용하기 위한 씨오지 유전성 조성물 |
CN2006800358797A CN101272991B (zh) | 2005-09-28 | 2006-09-13 | 用于与镍电极一起使用的cog电介质组合物 |
US12/945,932 US8114801B2 (en) | 2005-09-28 | 2010-11-15 | COG dieletric composition for use with nickel electrodes |
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US72147705P | 2005-09-28 | 2005-09-28 | |
US60/721,477 | 2005-09-28 |
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US11/599,925 A-371-Of-International US8722219B2 (en) | 2005-11-16 | 2006-11-14 | Fuel cell stack having gas discharge passage and drainage passage joined at one end of the stack |
US12/945,932 Division US8114801B2 (en) | 2005-09-28 | 2010-11-15 | COG dieletric composition for use with nickel electrodes |
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US9093223B2 (en) | 2013-01-29 | 2015-07-28 | Samsung Electro-Mechanics Co., Ltd. | Multilayer ceramic capacitor and mounting board having multilayer ceramic capacitor mounted thereon |
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CN101786864B (zh) * | 2009-12-22 | 2012-12-05 | 广东风华高新科技股份有限公司 | 一种与镍内电极匹配的陶瓷介质材料及所得电容器的制备方法 |
KR20130012716A (ko) * | 2011-07-26 | 2013-02-05 | 삼성전기주식회사 | 적층 세라믹 전자부품 |
CN102903949A (zh) * | 2012-10-13 | 2013-01-30 | 苏州征之魂专利技术服务有限公司 | 一种新能源动力电池结构 |
CN105225835B (zh) * | 2014-07-04 | 2018-06-22 | 上海金沛电子有限公司 | 一种晶硅片式电容器的制备方法 |
TWI634092B (zh) * | 2015-07-23 | 2018-09-01 | 菲洛公司 | 與鎳電極倂用之cog介電組成物及形成電子組件之方法 |
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US4987108A (en) * | 1987-03-11 | 1991-01-22 | Murata Manufacturing Co., Ltd. | Dielectric paste |
US5756408A (en) * | 1995-10-30 | 1998-05-26 | Kyocera Corporation | Glass-ceramic sintered body |
US5998036A (en) * | 1997-02-11 | 1999-12-07 | Stein; Sidney J. | Dielectric pastes and tapes, and metal substrates coated therewith |
US6355586B1 (en) * | 1999-02-25 | 2002-03-12 | Asahi Glass Company, Limited | Low melting point glass and glass ceramic composition |
JP2003146697A (ja) * | 2001-11-13 | 2003-05-21 | Sanwa Denzai:Kk | 誘電体組成物 |
JP2005094026A (ja) * | 2004-10-22 | 2005-04-07 | Nec Corp | 電子回路基板 |
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US6309995B1 (en) * | 1998-12-31 | 2001-10-30 | Mra Laboratories, Inc. | Magnesium zinc titanate powder with a barium boron lithium silicate flux and a multilayer ceramic COG capacitor made therefrom |
CN100385583C (zh) * | 1998-12-31 | 2008-04-30 | Mra实验室股份有限公司 | 制造多层陶瓷电容器的方法和由其制成的多层陶瓷电容器 |
-
2006
- 2006-09-13 KR KR1020087007022A patent/KR101351150B1/ko active IP Right Grant
- 2006-09-13 CN CN2006800358797A patent/CN101272991B/zh not_active Expired - Fee Related
- 2006-09-13 WO PCT/US2006/035426 patent/WO2007037973A1/fr active Application Filing
Patent Citations (6)
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US4987108A (en) * | 1987-03-11 | 1991-01-22 | Murata Manufacturing Co., Ltd. | Dielectric paste |
US5756408A (en) * | 1995-10-30 | 1998-05-26 | Kyocera Corporation | Glass-ceramic sintered body |
US5998036A (en) * | 1997-02-11 | 1999-12-07 | Stein; Sidney J. | Dielectric pastes and tapes, and metal substrates coated therewith |
US6355586B1 (en) * | 1999-02-25 | 2002-03-12 | Asahi Glass Company, Limited | Low melting point glass and glass ceramic composition |
JP2003146697A (ja) * | 2001-11-13 | 2003-05-21 | Sanwa Denzai:Kk | 誘電体組成物 |
JP2005094026A (ja) * | 2004-10-22 | 2005-04-07 | Nec Corp | 電子回路基板 |
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US9093223B2 (en) | 2013-01-29 | 2015-07-28 | Samsung Electro-Mechanics Co., Ltd. | Multilayer ceramic capacitor and mounting board having multilayer ceramic capacitor mounted thereon |
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KR101351150B1 (ko) | 2014-02-17 |
CN101272991B (zh) | 2012-01-18 |
CN101272991A (zh) | 2008-09-24 |
KR20080048493A (ko) | 2008-06-02 |
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