WO2007022406A2 - Systeme et procede d'imagerie holographique amelioree - Google Patents
Systeme et procede d'imagerie holographique amelioree Download PDFInfo
- Publication number
- WO2007022406A2 WO2007022406A2 PCT/US2006/032263 US2006032263W WO2007022406A2 WO 2007022406 A2 WO2007022406 A2 WO 2007022406A2 US 2006032263 W US2006032263 W US 2006032263W WO 2007022406 A2 WO2007022406 A2 WO 2007022406A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- target
- zero order
- imaging system
- operable
- image information
- Prior art date
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 113
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims description 45
- 230000010287 polarization Effects 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 31
- 230000007547 defect Effects 0.000 description 42
- 235000012431 wafers Nutrition 0.000 description 24
- 238000001093 holography Methods 0.000 description 20
- 238000005286 illumination Methods 0.000 description 17
- 230000000903 blocking effect Effects 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 238000001914 filtration Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000002939 deleterious effect Effects 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009416 shuttering Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
- G03H2001/0447—In-line recording arrangement
Abstract
L'invention concerne un procédé et un système d'imagerie holographique améliorée. Le système peut comprendre une source, un ou plusieurs composants du système d'imagerie, un diviseur de faisceau, un filtre spatial et un mélangeur de faisceaux. La source peut être mise en oeuvre pour produire un premier faisceau d'énergie électromagnétique, et le(s) composant(s) du système d'imagerie peu(ven)t être mis en oeuvre pour créer une interaction entre au moins une partie du premier faisceau et une cible. Le diviseur de faisceau peut être mis en oeuvre pour séparer la partie du premier faisceau interagissant avec la cible et produire un faisceau de référence et un faisceau cible après l'interaction du premier faisceau avec la cible. Le filtre spatial peut être mis en oeuvre pour extraire des données d'image d'ordre zéro du faisceau de référence et les transmettre en tant que faisceau d'ordre zéro. Le mélangeur de faisceaux peut être mis en oeuvre pour mélanger le faisceau d'ordre zéro avec le faisceau cible en vue de créer une image holographique.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06789846A EP1924877A2 (fr) | 2005-08-18 | 2006-08-18 | Systeme et procede d'imagerie holographique amelioree |
JP2008527159A JP2009505105A (ja) | 2005-08-18 | 2006-08-18 | 改良型ホログラフィ撮像のためのシステムおよび方法 |
IL189373A IL189373A0 (en) | 2005-08-18 | 2008-02-07 | System and method for improved holographic imaging |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70932805P | 2005-08-18 | 2005-08-18 | |
US60/709,328 | 2005-08-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007022406A2 true WO2007022406A2 (fr) | 2007-02-22 |
WO2007022406A3 WO2007022406A3 (fr) | 2009-05-22 |
Family
ID=37758428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/032263 WO2007022406A2 (fr) | 2005-08-18 | 2006-08-18 | Systeme et procede d'imagerie holographique amelioree |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1924877A2 (fr) |
JP (1) | JP2009505105A (fr) |
IL (1) | IL189373A0 (fr) |
WO (1) | WO2007022406A2 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102519976A (zh) * | 2011-12-26 | 2012-06-27 | 上海大学 | 光学元件亚表面缺陷数字全息检测装置 |
CN102597890A (zh) * | 2010-01-27 | 2012-07-18 | Asml控股股份有限公司 | 具有空间滤光片的全息掩模检查系统 |
JP2015503128A (ja) * | 2011-12-22 | 2015-01-29 | ゼネラル・エレクトリック・カンパニイ | ラベルを使用しない高コントラストの細胞イメージングのための定量位相顕微鏡法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120081684A1 (en) * | 2009-06-22 | 2012-04-05 | Asml Netherlands B.V. | Object Inspection Systems and Methods |
US9207638B2 (en) * | 2009-10-08 | 2015-12-08 | Universite Libre De Bruxelles | Off-axis interferometer |
TWI725875B (zh) * | 2018-01-16 | 2021-04-21 | 美商伊路米納有限公司 | 結構照明成像系統和使用結構化光來創建高解析度圖像的方法 |
CN109187545B (zh) * | 2018-07-03 | 2020-08-25 | 昆明理工大学 | 一种卷烟机辊轮的滤嘴棒缺陷检测装置及检测方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5110207A (en) * | 1989-07-31 | 1992-05-05 | Raytheon Company | Optical system including interferometer for enhancing the performance of a photoconductive non-shot noise limited detector |
US5986781A (en) * | 1996-10-28 | 1999-11-16 | Pacific Holographics, Inc. | Apparatus and method for generating diffractive element using liquid crystal display |
US7085028B2 (en) * | 2002-08-21 | 2006-08-01 | Sony Corporation | Hologram recording apparatus, hologram recording method, and hologram recording medium |
-
2006
- 2006-08-18 JP JP2008527159A patent/JP2009505105A/ja active Pending
- 2006-08-18 WO PCT/US2006/032263 patent/WO2007022406A2/fr active Application Filing
- 2006-08-18 EP EP06789846A patent/EP1924877A2/fr not_active Withdrawn
-
2008
- 2008-02-07 IL IL189373A patent/IL189373A0/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5110207A (en) * | 1989-07-31 | 1992-05-05 | Raytheon Company | Optical system including interferometer for enhancing the performance of a photoconductive non-shot noise limited detector |
US5986781A (en) * | 1996-10-28 | 1999-11-16 | Pacific Holographics, Inc. | Apparatus and method for generating diffractive element using liquid crystal display |
US7085028B2 (en) * | 2002-08-21 | 2006-08-01 | Sony Corporation | Hologram recording apparatus, hologram recording method, and hologram recording medium |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102597890A (zh) * | 2010-01-27 | 2012-07-18 | Asml控股股份有限公司 | 具有空间滤光片的全息掩模检查系统 |
JP2015503128A (ja) * | 2011-12-22 | 2015-01-29 | ゼネラル・エレクトリック・カンパニイ | ラベルを使用しない高コントラストの細胞イメージングのための定量位相顕微鏡法 |
EP2795389A4 (fr) * | 2011-12-22 | 2015-08-12 | Gen Electric | Microscopie de phase quantitative pour imagerie de cellule à contraste élevé sans étiquette |
CN102519976A (zh) * | 2011-12-26 | 2012-06-27 | 上海大学 | 光学元件亚表面缺陷数字全息检测装置 |
Also Published As
Publication number | Publication date |
---|---|
IL189373A0 (en) | 2008-08-07 |
JP2009505105A (ja) | 2009-02-05 |
EP1924877A2 (fr) | 2008-05-28 |
WO2007022406A3 (fr) | 2009-05-22 |
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