WO2007015324A1 - Microphone element - Google Patents

Microphone element Download PDF

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Publication number
WO2007015324A1
WO2007015324A1 PCT/JP2006/309013 JP2006309013W WO2007015324A1 WO 2007015324 A1 WO2007015324 A1 WO 2007015324A1 JP 2006309013 W JP2006309013 W JP 2006309013W WO 2007015324 A1 WO2007015324 A1 WO 2007015324A1
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WO
WIPO (PCT)
Prior art keywords
optical fiber
light
core
sensor
microphone element
Prior art date
Application number
PCT/JP2006/309013
Other languages
French (fr)
Japanese (ja)
Inventor
Kazuhiro Watanabe
Hiroyuki Sasaki
Original Assignee
Tama-Tlo, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tama-Tlo, Ltd. filed Critical Tama-Tlo, Ltd.
Publication of WO2007015324A1 publication Critical patent/WO2007015324A1/en

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Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
    • G01H9/006Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors the vibrations causing a variation in the relative position of the end of a fibre and another element
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00

Definitions

  • the present invention relates to a microphone element, and more particularly to a microphone element using an optical fiber sensor.
  • Optical fibers have been widely used as means for transmitting signals, and sensors using optical fibers have been developed for various purposes in various systems.
  • Japanese Unexamined Patent Application Publication No. 2002-232999 describes an optical fiber loop interferometer type acoustic sensor and an acoustic detection method.
  • a loop-shaped optical fiber that is passed through a diaphragm that vibrates with an acoustic signal.Converts vibrations transmitted to the diaphragm to electrical signals from changes in the intensity of interference light obtained by propagating light clockwise and counterclockwise through the fiber. It is.
  • Japanese Unexamined Patent Application Publication No. 2000-65633 describes an optical waveguide vibration sensor system for remote detection.
  • the mechanical signal transmitted to the geophone from the interference pattern obtained by modulating the phase of the optical signal guided into the optical waveguide is converted into an electrical signal by the electrical signal generated by the geophone.
  • Japanese Patent Application Laid-Open No. 11 252696 describes a structure of a light modulation microphone.
  • the light emitting / receiving section that accommodates the light emitting element and the light receiving element separated from each other by the partition and the optical waveguide that transmits light from the light receiving / emitting section are formed separately and integrated with the thin film diaphragm.
  • the light of the light emitting part is reflected by the thin film diaphragm and received by the light receiving part.
  • the intensity of the light received by the light receiving part is modulated and converted into an electrical signal. It is.
  • the acoustic sensor described in Japanese Patent Laid-Open No. 2002-232999 is complicated as a whole device, and moreover, the device for detecting the interference light is expensive, so that it can be used as an acoustic sensor. There is a problem that becomes price.
  • the optical waveguide vibration sensor system described in Japanese Patent Application Laid-Open No. 2000-65633 has a problem that the entire apparatus is complicated and the optical waveguide vibration sensor system becomes expensive.
  • the microphone described in Japanese Patent Application Laid-Open No. 11-252696 has a problem in that a precise design is required and the manufacturing cost increases.
  • a problem to be solved is that, in a microphone using an optical fiber sensor, it is difficult to reduce the manufacturing cost as a simple structure.
  • the microphone element of the present invention includes a vibration sheet that captures vibration of a medium, a core provided on the vibration sheet, and a clad provided on an outer periphery of the core, and a part of the external environment of the transmitted light.
  • An optical fiber having a sensor unit that enables interaction with the optical fiber, a light source that emits light to the incident end of the optical fiber, and the light emitted from the output end of the optical fiber via the sensor unit And a light receiving portion for detecting light.
  • an optical fiber is provided on a vibration sheet that captures vibrations of a medium.
  • the optical fiber includes a core and a clad provided on the outer periphery of the core, and has a sensor unit that enables interaction with a part of the transmitted light.
  • a light source that emits light to the incident end of the optical fiber and a light receiving unit that detects light emitted from the output end force of the optical fiber via the sensor unit are provided.
  • the sensor unit includes the optical fiber.
  • This is a hetero core part having a core diameter different from the core diameter of the bar, and is configured to be joined to the middle part of the optical fiber.
  • the sensor unit is configured such that a light transmitting member having a refractive index equivalent to a refractive index of the core of the optical fiber or a refractive index of the cladding is joined to a middle part of the optical fiber. It is.
  • the optical fiber is preferably provided on the vibration sheet so that the optical fiber is bent with the sensor portion as a top portion.
  • the optical fiber including the sensor portion is linearly provided on the vibration sheet.
  • the optical fiber is bonded to the vibration sheet.
  • the optical fiber is embedded in the vibration sheet.
  • the microphone element of the present invention is a microphone using an optical fiber sensor, has a simple structure, and can be manufactured at low cost.
  • FIG. 1 is a schematic configuration diagram of a microphone element according to a first embodiment of the present invention.
  • FIG. 2A and FIG. 2B are graphs showing the intensity of incident light and emitted light of the microphone device according to the first embodiment of the present invention.
  • FIG. 3A is a perspective view of the optical fiber in the vicinity of the sensor part SP for showing an example of the configuration of the sensor part
  • FIG. 3B is a longitudinal sectional view in the vicinity of the sensor part.
  • FIG. 4A and FIG. 4B are cross-sectional views in the longitudinal direction in the vicinity of the sensor portion of the optical fiber, for illustrating an example of the configuration of the sensor portion.
  • FIG. 5 is a schematic configuration diagram of a main part of a microphone element according to a second embodiment of the present invention.
  • FIG. 1 is a schematic configuration diagram of a microphone element according to this embodiment.
  • optical fibers (20a, 20b) are provided by being attached to or embedded in a vibration sheet 13 that captures the vibration of the medium.
  • the vibration sheet 13 can capture vibrations transmitted to a medium on which the resin sheet 13 such as air or water is placed, for example, a resin sheet or paper, and transmit the vibrations to the optical fiber (20a, 20b). Any material can be used.
  • the optical fiber (20a, 20b) has a configuration including a core and a cladding provided on the outer periphery of the core.
  • the optical fiber 20a and the optical fiber 20b are configured to transmit light transmitted through the optical fiber (20a, 20b). It is connected by a sensor part SP that enables interaction with some external worlds.
  • the optical fibers (20a, 20b) are provided so as to be bent with the sensor part SP as the top.
  • the light is emitted from the light source 14 such as a laser diode or a light emitting diode that emits light to the incident end of the optical fiber (20a, 20b) and the light emitting end of the optical fiber (20a, 20b) via the sensor unit SP.
  • a light receiving unit 15 such as a photodiode for detecting light is provided.
  • sensor light of 14 light sources is transmitted and received by the light receiving unit 15.
  • the degree of interaction with the external environment changes corresponding to the transmitted vibration, and the intensity of the transmitted light changes.
  • the intensity of the electrical signal obtained by receiving the output light from the optical fiber (20a, 20b) at the light receiving unit 15 is modulated in response to the vibration of the medium. In this way, the vibration is converted into an electrical signal. And function as a microphone.
  • the output of the light receiving unit 15 can be amplified by the amplifier 16 and output from the speaker 17 as sound.
  • FIGS. 2A and 2B are graphs showing the intensity of incident light from the light source 14 of the microphone element and the intensity of outgoing light received by the light receiving unit 15, respectively.
  • the intensity of the emitted light is modulated in accordance with the vibration transmitted to the vibration sheet.
  • FIG. 3A is a perspective view of the optical fiber (20a, 20b) in the vicinity of the sensor portion SP to show an example of the configuration of the sensor portion SP
  • FIG. 3B is a longitudinal sectional view in the vicinity of the sensor portion SP. It is.
  • the optical fiber (20a, 20b) constituting the microphone element is a single mode fiber having a core diameter of 9 / zm, for example, and the optical fiber 20a and the optical fiber 20b are transmitted through the optical fiber (20a, 20b). It is connected by the sensor part SP that enables interaction with a part of the outside of the light to be transmitted.
  • the optical fibers (20a, 20b) have a core 21 and a clad 22 provided on the outer periphery thereof.
  • the light from the light source 14 is also incident on the core 21 at the light incident end side force, and is emitted from the core 21 on the light emitting end side to the light receiving unit via the sensor unit SP.
  • the sensor part SP shown in FIGS. 3A and 3B is a hetero-core part 3 having a core diameter different from the core diameter of the optical fiber (20a, 20b), and includes a core 31 and a clad 32 provided on the outer periphery thereof. And have.
  • the optical core (3) constituting the optical fiber (20a, 20b) and the sensor part SP is almost coaxial so that the cores are joined at the interface 4 perpendicular to the longitudinal direction. Etc. are joined together.
  • the diameter bl of the core 31 in the hetero-core part 3 and the optical fiber (2 Oa , 20b) is different from the diameter al of the core 21 at the interface 4, and a part of the light leaks into the cladding 32 of the hetero-core part 3 due to the difference in the core diameter.
  • FIGS. 4A and 4B are cross-sectional views in the longitudinal direction of the optical fiber (20a, 20b) in the vicinity of the sensor part SP for illustrating an example of the configuration of the sensor part SP.
  • the diameter bl of the core 31 of the hetero-core part 3 constituting the sensor part SP is larger than the diameter aU of the core 21 of the optical fiber (20a, 20b).
  • the sensor portion SP is a light transmitting member having a refractive index equivalent to the refractive index of the core 21 or the refractive index of the cladding 22 of the optical fiber (20a, 20b). Can be made to be joined to the middle part of the optical fiber (20a, 20b).
  • a plurality of force members that connect one sensor part SP to the middle part of the optical fiber (20a, 20b) may be connected in series.
  • a plurality of optical fibers each provided with a sensor unit are provided on the same vibration sheet. You may choose.
  • the microphone element includes a vibration sheet that captures vibration of a medium, a vibration sheet that is provided on the vibration sheet, and a core and a cladding that is provided on the outer periphery of the core.
  • An optical fiber having a sensor unit that enables interaction with a part of the outside of the optical fiber, a light source that emits light to the incident end of the optical fiber, and an optical fiber exiting from the output end of the optical fiber And a light receiving unit that detects light.
  • the microphone element of the present embodiment is a microphone that uses an optical fiber sensor, has a simple structure, and can be manufactured at low cost.
  • the microphone element according to this embodiment is substantially the same as that of the first embodiment, but the arrangement of the optical fibers is different.
  • FIG. 5 is a schematic configuration diagram of a main part of the microphone element according to the present embodiment.
  • the optical fiber (20a, 20b) including the sensor part SP in the middle is provided on the vibration sheet 13 in a straight line.
  • the microphone element of the present embodiment is a microphone that uses an optical fiber sensor, is a simple structure, and can be manufactured at low cost. Therefore, it is easy to use remotely, and electromagnetic induction does not occur in the sensor part, so it can be used in places where EMI interference is a concern.
  • the vibration sheet and optical fiber parts that detect vibration do not use electricity, they can be used in water or in places where there is a risk of fire.
  • the microphone element of the above-described embodiment is arranged in a liquid consisting of only a gas such as air as a medium on which the microphone element is placed, and captures vibrations transmitted in the liquid and converts them into electrical signals. It is also possible.
  • any form of vibration that can be transmitted to the optical fiber can be converted into an electrical signal. Therefore, the vibration sheet or the optical fiber is brought into contact with a vibrating object such as an automobile engine to generate the electrical signal. It can also be used as a vibration sensor to convert to, and it can also be used as an aerospace related vibration sensor. It can also be used as a security sensor for crime prevention by detecting vibrations generated by intruders in the monitoring area as electrical signals.
  • the vibration sheet has a flat sheet shape, but is not limited thereto, and may have various shapes.
  • various materials such as a resin sheet and paper can be used.
  • a light emitting element other than a semiconductor light emitting element such as a laser diode or a light emitting diode can be used.
  • any element that converts light into an electrical signal can be used in addition to a photodiode.
  • the microphone element of the present invention can be applied to a microphone or a vibration sensor that converts vibration transmitted to a medium such as air or water into an electric signal.

Abstract

A microphone element using an optical fiber sensor, having a simple structure achieving lower production costs. An optical fiber (29a, 20b) is provided on a vibration sheet (13) for capturing vibration of a medium. The optical fiber (20a, 20b) has a core and a clad provided around the outer periphery of the core, a sensor (SP) for enabling a part of light being transmitted to interact with the surroundings, and a light source (14) for emitting light to an entry end of the optical fiber (20a, 20b), and a light receiving section (15) for detecting, through the sensor section (SP), light emitted from an exit end of the optical fiber (20a, 20b).

Description

明 細 書  Specification
マイクロフォン素子  Microphone element
技術分野  Technical field
[0001] 本発明はマイクロフォン素子に関し、特に、光ファイバセンサを用いたマイクロフォン 素子に関するものである。 背景技術  The present invention relates to a microphone element, and more particularly to a microphone element using an optical fiber sensor. Background art
[0002] 光ファイバは信号を伝達する手段として広く普及してきており、光ファイバを用いた センサは種々の方式で様々な目的のために開発されている。  [0002] Optical fibers have been widely used as means for transmitting signals, and sensors using optical fibers have been developed for various purposes in various systems.
中でも、光ファイバを利用したマイクロフォンとしては、下記の特許文献 (特開 2002 — 232999号公報、特開 2000— 65633号公報、特開平 11— 252696号公報;)に 記載がある。  Among these, microphones using optical fibers are described in the following patent documents (Japanese Patent Laid-Open Nos. 2002-232232, 2000-65633, and 11-252696).
[0003] 特開 2002— 232999号公報には、光ファイバループ干渉計型の音響センサ及び 音響検出方法が記載されて ヽる。音響信号で振動する振動板に通したループ状光 ファイバに時計回り及び反時計回りに光を伝播させて得られる干渉光の強度変化か ら振動板に伝達される振動を電気信号に変換するものである。  [0003] Japanese Unexamined Patent Application Publication No. 2002-232999 describes an optical fiber loop interferometer type acoustic sensor and an acoustic detection method. A loop-shaped optical fiber that is passed through a diaphragm that vibrates with an acoustic signal.Converts vibrations transmitted to the diaphragm to electrical signals from changes in the intensity of interference light obtained by propagating light clockwise and counterclockwise through the fiber. It is.
[0004] 特開 2000— 65633号公報には、遠隔検出用の光導波振動センサシステムについ て記載されている。ジォフォンにより発生する電気信号により、光導波管内に案内さ れる光信号の位相を変調して得られる干渉パターンからジォフォンに伝えられる機械 的振動を電気信号に変換するものである。  [0004] Japanese Unexamined Patent Application Publication No. 2000-65633 describes an optical waveguide vibration sensor system for remote detection. The mechanical signal transmitted to the geophone from the interference pattern obtained by modulating the phase of the optical signal guided into the optical waveguide is converted into an electrical signal by the electrical signal generated by the geophone.
[0005] 特開平 11 252696号公報には、光変調方式マイクロフォンの構造について記載 されている。発光素子と受光素子が隔壁で分離された状態で収納される受発光部と 、受発光部からの光を伝達する光導波路とが別体で形成され、薄膜ダイヤフラムとと もに一体ィ匕して構成され、発光部力 の光を薄膜ダイヤフラムで反射して受光部で受 光し、薄膜ダイヤフラムが音波により振動すると受光部で受光する光の強度が変調さ れて電気信号に変換されるものである。  [0005] Japanese Patent Application Laid-Open No. 11 252696 describes a structure of a light modulation microphone. The light emitting / receiving section that accommodates the light emitting element and the light receiving element separated from each other by the partition and the optical waveguide that transmits light from the light receiving / emitting section are formed separately and integrated with the thin film diaphragm. The light of the light emitting part is reflected by the thin film diaphragm and received by the light receiving part. When the thin film diaphragm is vibrated by sound waves, the intensity of the light received by the light receiving part is modulated and converted into an electrical signal. It is.
[0006] しかし、特開 2002— 232999号公報に記載の音響センサは、装置全体が複雑で あることや、さらには干渉光を検出する装置は高価であるため、音響センサとしても高 価になってしまう問題がある。 [0006] However, the acoustic sensor described in Japanese Patent Laid-Open No. 2002-232999 is complicated as a whole device, and moreover, the device for detecting the interference light is expensive, so that it can be used as an acoustic sensor. There is a problem that becomes price.
また、特開 2000— 65633号公報に記載の光導波振動センサシステムは、装置全 体が複雑であり、光導波振動センサシステムとして高価になってしまう問題があった。 また、特開平 11— 252696号公報に記載のマイクロフォンでは、精密な設計が必 要であり、製造コストが高くなつてしまうという問題があった。  Further, the optical waveguide vibration sensor system described in Japanese Patent Application Laid-Open No. 2000-65633 has a problem that the entire apparatus is complicated and the optical waveguide vibration sensor system becomes expensive. In addition, the microphone described in Japanese Patent Application Laid-Open No. 11-252696 has a problem in that a precise design is required and the manufacturing cost increases.
[0007] また、上記の光ファイバセンサに関して、いわゆるヘテロコア部をセンサとして用い る構成が国際公開 97Z48994号パンフレットおよび特開 2003— 214906号公報に 記載されている。 [0007] In addition, regarding the above optical fiber sensor, configurations using a so-called heterocore portion as a sensor are described in International Publication No. 97Z48994 and Japanese Patent Laid-Open No. 2003-214906.
し力し、国際公開 97Z48994号パンフレットおよび特開 2003— 214906号公報に は、ヘテロコア型の光ファイバセンサをマイクロフォンとして用いることについての記 載はない。  However, in the pamphlet of International Publication No. 97Z48994 and Japanese Patent Laid-Open No. 2003-214906, there is no description about using a hetero-core type optical fiber sensor as a microphone.
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0008] 解決しょうとする問題点は、光ファイバセンサを利用したマイクロフォンにおいて、簡 便な構造として、製造コストを安価にすることが困難であるという点である。 [0008] A problem to be solved is that, in a microphone using an optical fiber sensor, it is difficult to reduce the manufacturing cost as a simple structure.
課題を解決するための手段  Means for solving the problem
[0009] 本発明のマイクロフォン素子は、媒体の振動を捕捉する振動シートと、前記振動シ ートに設けられ、コアおよびコアの外周に設けられたクラッドを備え、伝送する光の一 部の外界との相互作用を可能にするセンサ部を有する光ファイバと、前記光ファイバ の入射端に対して光を出射する光源と、前記センサ部を介して前記光ファイバの出 射端から出射される前記光を検出する受光部とを有する。  [0009] The microphone element of the present invention includes a vibration sheet that captures vibration of a medium, a core provided on the vibration sheet, and a clad provided on an outer periphery of the core, and a part of the external environment of the transmitted light. An optical fiber having a sensor unit that enables interaction with the optical fiber, a light source that emits light to the incident end of the optical fiber, and the light emitted from the output end of the optical fiber via the sensor unit And a light receiving portion for detecting light.
[0010] 上記の本発明のマイクロフォン素子は、媒体の振動を捕捉する振動シートに、光フ アイバが設けられている。光ファイバは、コアおよびコアの外周に設けられたクラッドを 備え、伝送する光の一部の外界との相互作用を可能にするセンサ部を有する構成で ある。  In the microphone element of the present invention described above, an optical fiber is provided on a vibration sheet that captures vibrations of a medium. The optical fiber includes a core and a clad provided on the outer periphery of the core, and has a sensor unit that enables interaction with a part of the transmitted light.
さらに、光ファイバの入射端に対して光を出射する光源と、センサ部を介して光ファ ィバの出射端力 出射される光を検出する受光部とが備えられている。  Furthermore, a light source that emits light to the incident end of the optical fiber and a light receiving unit that detects light emitted from the output end force of the optical fiber via the sensor unit are provided.
[0011] 上記の本発明のマイクロフォン素子は、好適には、前記センサ部は、前記光フアイ バのコア径と異なるコア径を有するヘテロコア部であり、前記光ファイバの中途部に 接合されてなる構成である。 [0011] In the microphone element of the present invention described above, preferably, the sensor unit includes the optical fiber. This is a hetero core part having a core diameter different from the core diameter of the bar, and is configured to be joined to the middle part of the optical fiber.
あるいは、好適には、前記センサ部は、前記光ファイバのコアの屈折率あるいはクラ ッドの屈折率と同等の屈折率を持つ光透過部材が前記光ファイバの中途部に接合さ れてなる構成である。  Alternatively, preferably, the sensor unit is configured such that a light transmitting member having a refractive index equivalent to a refractive index of the core of the optical fiber or a refractive index of the cladding is joined to a middle part of the optical fiber. It is.
[0012] 上記の本発明のマイクロフォン素子は、好適には、前記光ファイバが前記センサ部 を頂部として屈曲するようにして前記振動シートに設けられて 、る。  In the microphone element of the present invention described above, the optical fiber is preferably provided on the vibration sheet so that the optical fiber is bent with the sensor portion as a top portion.
あるいは、好適には、前記センサ部の部分を含む前記光ファイバが直線状に前記 振動シートに設けられて 、る。  Alternatively, preferably, the optical fiber including the sensor portion is linearly provided on the vibration sheet.
[0013] 上記の本発明のマイクロフォン素子は、好適には、前記光ファイバが前記振動シー トに貼り合わされている。 [0013] In the microphone element of the present invention, preferably, the optical fiber is bonded to the vibration sheet.
あるいは、好適には、前記光ファイバが前記振動シートに埋め込まれている。  Alternatively, preferably, the optical fiber is embedded in the vibration sheet.
発明の効果  The invention's effect
[0014] 本発明のマイクロフォン素子は、光ファイバセンサを利用したマイクロフォンであって 、簡便な構造であり、安価に製造することが可能である。  The microphone element of the present invention is a microphone using an optical fiber sensor, has a simple structure, and can be manufactured at low cost.
図面の簡単な説明  Brief Description of Drawings
[0015] [図 1]図 1は本発明の第 1実施形態に係るマイクロフォン素子の模式構成図である。  FIG. 1 is a schematic configuration diagram of a microphone element according to a first embodiment of the present invention.
[図 2]図 2Aおよび図 2Bは本発明の第 1実施形態に係るマイクロフォン素子の入射光 と出射光の強度を示すグラフである。  FIG. 2A and FIG. 2B are graphs showing the intensity of incident light and emitted light of the microphone device according to the first embodiment of the present invention.
[図 3]図 3Aは、センサ部の構成の一例を示すための、光ファイバのセンサ部 SP近傍 での斜視図であり、図 3Bはセンサ部近傍での長手方向の断面図である。  FIG. 3A is a perspective view of the optical fiber in the vicinity of the sensor part SP for showing an example of the configuration of the sensor part, and FIG. 3B is a longitudinal sectional view in the vicinity of the sensor part.
[図 4]図 4Aおよび図 4Bは、センサ部の構成の一例を示すための、光ファイバのセン サ部近傍での長手方向の断面図である。  FIG. 4A and FIG. 4B are cross-sectional views in the longitudinal direction in the vicinity of the sensor portion of the optical fiber, for illustrating an example of the configuration of the sensor portion.
[図 5]図 5は本発明の第 2実施形態に係るマイクロフォン素子の要部の模式構成図で ある。  FIG. 5 is a schematic configuration diagram of a main part of a microphone element according to a second embodiment of the present invention.
符号の説明  Explanation of symbols
[0016] 3…ヘテロコア部、 4…界面、 13· ··振動シート、 14…光源、 15· ··受光部、 16…アン プ、 17· ··スピーカー、 18· ··コンピュータ、 20a, 20b…光ファイノく、 21, 31· ··コア、 2 2, 32· · ·クラッド、 30· · ·光透過部材、 SP…センサ部、 W…リーク光 [0016] 3 ... Hetero core part, 4 ... Interface, 13 ... Vibration sheet, 14 ... Light source, 15 ... Light receiving part, 16 ... Amplifier, 17 ... Speaker, 18 ... Computer, 20a, 20b … Light phino, 21, 31 ··· core, 2 2, 32 ··· Clad, 30 ··· Light transmitting member, SP… Sensor part, W… Leakage light
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0017] 以下に、本発明のマイクロフォン素子の実施の形態について、図面を参照して説明 する。 Hereinafter, embodiments of a microphone element of the present invention will be described with reference to the drawings.
[0018] i mm  [0018] i mm
図 1は本実施形態に係るマイクロフォン素子の模式構成図である。  FIG. 1 is a schematic configuration diagram of a microphone element according to this embodiment.
例えば、媒体の振動を捕捉する振動シート 13に貼り合わされて、あるいは埋め込ま れて、光ファイバ(20a, 20b)が設けられている。振動シート 13は、例えば榭脂シート や紙など、空気や水などの榭脂シート 13が置かれている媒体に伝達される振動を捕 捉して光ファイバ(20a, 20b)に伝達することができる材料であればよい。  For example, optical fibers (20a, 20b) are provided by being attached to or embedded in a vibration sheet 13 that captures the vibration of the medium. The vibration sheet 13 can capture vibrations transmitted to a medium on which the resin sheet 13 such as air or water is placed, for example, a resin sheet or paper, and transmit the vibrations to the optical fiber (20a, 20b). Any material can be used.
光ファイバ(20a, 20b)は、コアおよびコアの外周に設けられたクラッドを備えた構 成であり、光ファイバ 20aと光ファイバ 20bとは、光ファイバ(20a, 20b)中を伝送する 光の一部の外界との相互作用を可能にするセンサ部 SPにより接続されている。本実 施形態においては、例えば、光ファイバ(20a, 20b)がセンサ部 SPを頂部として屈曲 するようにして設けられて!/、る。  The optical fiber (20a, 20b) has a configuration including a core and a cladding provided on the outer periphery of the core. The optical fiber 20a and the optical fiber 20b are configured to transmit light transmitted through the optical fiber (20a, 20b). It is connected by a sensor part SP that enables interaction with some external worlds. In the present embodiment, for example, the optical fibers (20a, 20b) are provided so as to be bent with the sensor part SP as the top.
さらに、光ファイバ(20a, 20b)の入射端に対して光を出射するレーザダイオードや 発光ダイオードなどの光源 14と、センサ部 SPを介して光ファイバ(20a, 20b)の出射 端から出射される光を検出するフォトダイオードなどの受光部 15を備えている。  Furthermore, the light is emitted from the light source 14 such as a laser diode or a light emitting diode that emits light to the incident end of the optical fiber (20a, 20b) and the light emitting end of the optical fiber (20a, 20b) via the sensor unit SP. A light receiving unit 15 such as a photodiode for detecting light is provided.
[0019] 上記の構成では、空気や水などの榭脂シート 13が置かれている媒体に振動が伝 達して光ファイバ(20a, 20b)に伝達されると、振動は振動シート 13から光ファイバ( 20a, 20b)に伝達される。 [0019] In the above configuration, when vibration is transmitted to the medium on which the resin sheet 13 such as air or water is placed and transmitted to the optical fiber (20a, 20b), the vibration is transmitted from the vibration sheet 13 to the optical fiber. (20a, 20b).
光ファイバ(20a, 20b)中には、光源 14力ものセンサ光が伝送されており、受光部 15で受光されている。  In the optical fibers (20a, 20b), sensor light of 14 light sources is transmitted and received by the light receiving unit 15.
このとき、光ファイバ(20a, 20b)の中途部に設けられたセンサ部 SPでは、伝達さ れる振動に対応して外界との相互作用の程度が変化し、伝送する光の強度が変化 するので、受光部 15で光ファイバ(20a, 20b)の出力光を受光して得られる電気信 号は、媒体の振動に対応して強度が変調されており、このようにして振動が電気信号 に変換されてマイクロフォンとして機能する。 受光部 15の出力は、アンプ 16で増幅してスピーカー 17から音声として出力するこ とがでさる。 At this time, in the sensor part SP provided in the middle part of the optical fiber (20a, 20b), the degree of interaction with the external environment changes corresponding to the transmitted vibration, and the intensity of the transmitted light changes. The intensity of the electrical signal obtained by receiving the output light from the optical fiber (20a, 20b) at the light receiving unit 15 is modulated in response to the vibration of the medium. In this way, the vibration is converted into an electrical signal. And function as a microphone. The output of the light receiving unit 15 can be amplified by the amplifier 16 and output from the speaker 17 as sound.
あるいは、コンピュータ 18あるいはスペクトルアナライザなどに音声データとして取り 込み、振動周波数解析など、所望のデータ処理を施すことができる。  Alternatively, it can be captured as audio data in a computer 18 or a spectrum analyzer and subjected to desired data processing such as vibration frequency analysis.
[0020] 図 2A及び図 2Bは、それぞれ上記のマイクロフォン素子の光源 14からの入射光と 受光部 15で受光される出射光の強度を示すグラフである。 FIGS. 2A and 2B are graphs showing the intensity of incident light from the light source 14 of the microphone element and the intensity of outgoing light received by the light receiving unit 15, respectively.
入射光は一定の強度を有しているのに対し、振動シートに伝達される振動に対応し て出射光の強度が変調されて 、る。  While the incident light has a constant intensity, the intensity of the emitted light is modulated in accordance with the vibration transmitted to the vibration sheet.
[0021] 上記のマイクロフォン素子を構成する光ファイバとセンサ部について説明する。 [0021] An optical fiber and a sensor unit constituting the microphone element will be described.
図 3Aは、センサ部 SPの構成の一例を示すための、光ファイバ(20a, 20b)のセン サ部 SP近傍での斜視図であり、図 3Bはセンサ部 SP近傍での長手方向の断面図で ある。  FIG. 3A is a perspective view of the optical fiber (20a, 20b) in the vicinity of the sensor portion SP to show an example of the configuration of the sensor portion SP, and FIG. 3B is a longitudinal sectional view in the vicinity of the sensor portion SP. It is.
例えば、マイクロフォン素子を構成する光ファイバ(20a, 20b)は、例えばコア径 9 /z mのシングルモードファイバであり、光ファイバ 20aと光ファイバ 20bとは、光フアイ バ(20a, 20b)中を伝送する光の一部の外界との相互作用を可能にするセンサ部 S Pにより接続されている。  For example, the optical fiber (20a, 20b) constituting the microphone element is a single mode fiber having a core diameter of 9 / zm, for example, and the optical fiber 20a and the optical fiber 20b are transmitted through the optical fiber (20a, 20b). It is connected by the sensor part SP that enables interaction with a part of the outside of the light to be transmitted.
光ファイバ(20a, 20b)は、コア 21と、その外周部に設けられたクラッド 22とを有す る。光源 14からの光は、光入射端側力もコア 21に入射され、センサ部 SPを介して光 出射端側のコア 21から受光部へと出射される。  The optical fibers (20a, 20b) have a core 21 and a clad 22 provided on the outer periphery thereof. The light from the light source 14 is also incident on the core 21 at the light incident end side force, and is emitted from the core 21 on the light emitting end side to the light receiving unit via the sensor unit SP.
[0022] 図 3Aおよび図 3Bに示すセンサ部 SPは、光ファイバ(20a, 20b)のコア径と異なる コア径を有するヘテロコア部 3であり、コア 31と、その外周部に設けられたクラッド 32 とを有する。 The sensor part SP shown in FIGS. 3A and 3B is a hetero-core part 3 having a core diameter different from the core diameter of the optical fiber (20a, 20b), and includes a core 31 and a clad 32 provided on the outer periphery thereof. And have.
ヘテロコア部 3におけるコア 31の径 blは、光ファイバ(20a, 20b)のコア 21の径 aU り小さく、例えば al= 9 m、 Η= 5 μ mである。また、ヘテロコア部 3の長さ clは数 mm 〜数 cmであり、例えば lmm程度である。  The diameter bl of the core 31 in the hetero-core portion 3 is smaller than the diameter aU of the core 21 of the optical fiber (20a, 20b), for example, al = 9 m and Η = 5 μm. Further, the length cl of the hetero-core part 3 is several mm to several cm, for example, about lmm.
光ファイバ(20a, 20b)とセンサ部 SPを構成するへテロコア部 3は、長手方向に直 交する界面 4でコア同士が接合するようにほぼ同軸に、例えば汎用化されている放電 による融着などにより、接合されている。 [0023] 図 3Aおよび図 3Bに示すように、光ファイバ(20a, 20b)の中途部にセンサ部 SPが 接合されてなる構成において、ヘテロコア部 3におけるコア 31の径 blと光ファイバ(2 Oa, 20b)のコア 21の径 alとが界面 4で異なっており、このコア径の差に起因して光の 一部がヘテロコア部 3のクラッド 32にリーク Wする。リーク Wを小さくするように、コア 2 1とコア 31の径の組み合わせをすると大部分の光は再び光ファイバ 21に入射し、伝 送される。このとき、センサの挿入損失は小さぐまた、リーク Wの程度は屈曲などの 外界の変化により、鋭敏に変化する。また、コア 21とコア 31の径の組み合わせによつ ては、リーク Wを極度に大きくすることもできる。この場合、多くのリーク Wの光がクラッ ド 32と外界との境界面においてエバネッセント波を発生させ、外界に作用させ変化を 感受することができる。 The optical core (3) constituting the optical fiber (20a, 20b) and the sensor part SP is almost coaxial so that the cores are joined at the interface 4 perpendicular to the longitudinal direction. Etc. are joined together. As shown in FIGS. 3A and 3B, in the configuration in which the sensor part SP is joined to the middle part of the optical fiber (20a, 20b), the diameter bl of the core 31 in the hetero-core part 3 and the optical fiber (2 Oa , 20b) is different from the diameter al of the core 21 at the interface 4, and a part of the light leaks into the cladding 32 of the hetero-core part 3 due to the difference in the core diameter. When the diameters of the cores 21 and 31 are combined so as to reduce the leak W, most of the light enters the optical fiber 21 again and is transmitted. At this time, the insertion loss of the sensor is small, and the degree of leak W changes sharply due to changes in the external environment such as bending. Further, depending on the combination of the diameters of the core 21 and the core 31, the leak W can be extremely increased. In this case, a large amount of leak light W generates an evanescent wave at the interface between the clad 32 and the outside world, and acts on the outside world to sense a change.
[0024] 上記のようにリークする光は、センサ部 SPにおける光ファイバの屈曲の度合 、や光 ファイバが置かれている環境に応じて変化するので、外界と相互作用した結果生じた 変化を検知することができる。本実施形態においては、外界力もの振動によりリーク する光の強度が変調され、従って下流の光ファイバ 20bへと伝送される光の強度も変 調される。  [0024] Light that leaks as described above changes depending on the degree of bending of the optical fiber in the sensor unit SP and the environment in which the optical fiber is placed, so that changes that occur as a result of interaction with the outside world are detected. can do. In the present embodiment, the intensity of the leaked light is modulated by the vibration of the external force, and therefore the intensity of the light transmitted to the downstream optical fiber 20b is also modulated.
このようにして受光部 15で光信号を電気信号に変換することで、媒体の振動に対 応する電気信号が得られる。  In this way, by converting the optical signal into an electric signal by the light receiving unit 15, an electric signal corresponding to the vibration of the medium can be obtained.
[0025] センサ部 SPとしては、他の構成を採用することも可能である。 [0025] Other configurations may be adopted as the sensor unit SP.
図 4A及び図 4Bは、センサ部 SPの構成の一例を示すための、光ファイバ(20a, 20 b)のセンサ部 SP近傍での長手方向の断面図である。  FIGS. 4A and 4B are cross-sectional views in the longitudinal direction of the optical fiber (20a, 20b) in the vicinity of the sensor part SP for illustrating an example of the configuration of the sensor part SP.
図 4Aでは、センサ部 SPを構成するへテロコア部 3のコア 31の径 blが、光ファイバ( 20a, 20b)のコア 21の径 aUりも大きな構成となって!/、る。  In FIG. 4A, the diameter bl of the core 31 of the hetero-core part 3 constituting the sensor part SP is larger than the diameter aU of the core 21 of the optical fiber (20a, 20b).
図 4Bに示すように、ヘテロコア部の代わりに、センサ部 SPは、光ファイバ(20a, 20 b)のコア 21の屈折率あるいはクラッド 22の屈折率と同等の屈折率を持つ光透過部 材 30が光ファイバ(20a, 20b)の中途部に接合されてなる構成とすることもできる。  As shown in FIG. 4B, in place of the hetero-core portion, the sensor portion SP is a light transmitting member having a refractive index equivalent to the refractive index of the core 21 or the refractive index of the cladding 22 of the optical fiber (20a, 20b). Can be made to be joined to the middle part of the optical fiber (20a, 20b).
[0026] 図面上はセンサ部 SPを光ファイバ(20a, 20b)の中途部に 1個接続している力 複 数個を直列に接続してもよい。 [0026] In the drawing, a plurality of force members that connect one sensor part SP to the middle part of the optical fiber (20a, 20b) may be connected in series.
また、それぞれにセンサ部が設けられた複数の光ファイバを同一の振動シートに設 けてもよい。 In addition, a plurality of optical fibers each provided with a sensor unit are provided on the same vibration sheet. You may choose.
[0027] 上記のように、本実施形態に係るマイクロフォン素子は、媒体の振動を捕捉する振 動シートと、振動シートに設けられ、コアおよびコアの外周に設けられたクラッドを備え 、伝送する光の一部の外界との相互作用を可能にするセンサ部を有する光ファイバ と、光ファイバの入射端に対して光を出射する光源と、センサ部を介して光ファイバの 出射端から出射される光を検出する受光部とを有する構成である。  As described above, the microphone element according to the present embodiment includes a vibration sheet that captures vibration of a medium, a vibration sheet that is provided on the vibration sheet, and a core and a cladding that is provided on the outer periphery of the core. An optical fiber having a sensor unit that enables interaction with a part of the outside of the optical fiber, a light source that emits light to the incident end of the optical fiber, and an optical fiber exiting from the output end of the optical fiber And a light receiving unit that detects light.
[0028] 本実施形態のマイクロフォン素子は、光ファイバセンサを利用したマイクロフォンで あって、簡便な構造であり、安価に製造することが可能である。  The microphone element of the present embodiment is a microphone that uses an optical fiber sensor, has a simple structure, and can be manufactured at low cost.
[0029] 2実 餱  [0029] 2 fruit
本実施形態に係るマイクロフォン素子は、実質的に第 1実施形態と同様であるが、 光ファイバの配置が異なって!/、る。  The microphone element according to this embodiment is substantially the same as that of the first embodiment, but the arrangement of the optical fibers is different.
[0030] 図 5は本実施形態に係るマイクロフォン素子の要部の模式構成図である。  FIG. 5 is a schematic configuration diagram of a main part of the microphone element according to the present embodiment.
中途部のセンサ部 SPの部分を含む光ファイバ(20a, 20b)が直線状に振動シート 13に設けられている。  The optical fiber (20a, 20b) including the sensor part SP in the middle is provided on the vibration sheet 13 in a straight line.
[0031] 本実施形態のマイクロフォン素子は、第 1実施形態と同様に、光ファイバセンサを利 用したマイクロフォンであって、簡便な構造であり、安価に製造することが可能である 光ファイバであるため、遠隔利用が容易であり、センサ部に電磁誘導が起きないた め EMI障害が懸念される場所での利用も可能である。また、振動を検知する振動シ ートと光ファイバの部分では電気を使用しないので、水中での利用や発火の危険の ある場所での利用も可能である。  [0031] Similar to the first embodiment, the microphone element of the present embodiment is a microphone that uses an optical fiber sensor, is a simple structure, and can be manufactured at low cost. Therefore, it is easy to use remotely, and electromagnetic induction does not occur in the sensor part, so it can be used in places where EMI interference is a concern. In addition, since the vibration sheet and optical fiber parts that detect vibration do not use electricity, they can be used in water or in places where there is a risk of fire.
[0032] 上記の本実施形態のマイクロフォン素子は、マイクロフォン素子が置かれる媒体とし ては空気などの気体だけでなぐ液体中に配置し、液体中に伝達される振動を捉え て電気信号に変換することも可能である。 [0032] The microphone element of the above-described embodiment is arranged in a liquid consisting of only a gas such as air as a medium on which the microphone element is placed, and captures vibrations transmitted in the liquid and converts them into electrical signals. It is also possible.
また、光ファイバに伝達される振動であればどのような形態でも電気信号に変換可 能であるので、自動車のエンジンなどの振動する対象物に振動シートや光ファイバを 接触させて振動を電気信号に変換する振動センサとしても利用可能であり、その他 航空宇宙関連の振動センサとしても利用できる。 また、監視領域にお!、て侵入者などが発生させる振動を電気信号として捉えて検 知することで、防犯用セキュリティセンサに利用することも可能である。 In addition, any form of vibration that can be transmitted to the optical fiber can be converted into an electrical signal. Therefore, the vibration sheet or the optical fiber is brought into contact with a vibrating object such as an automobile engine to generate the electrical signal. It can also be used as a vibration sensor to convert to, and it can also be used as an aerospace related vibration sensor. It can also be used as a security sensor for crime prevention by detecting vibrations generated by intruders in the monitoring area as electrical signals.
[0033] 本発明は上記の説明に限定されな!、。  [0033] The present invention is not limited to the above description!
例えば、振動シートは平坦なシート状としているが、これに限らず、様々な形状とし てもよい。振動シートの材料としても榭脂シートや紙などのほ力 種々の材料を用いる ことができる。  For example, the vibration sheet has a flat sheet shape, but is not limited thereto, and may have various shapes. As the material of the vibration sheet, various materials such as a resin sheet and paper can be used.
光源としてはレーザダイオードや発光ダイオードなどの半導体発光素子以外の発 光素子などを用いることができる。  As the light source, a light emitting element other than a semiconductor light emitting element such as a laser diode or a light emitting diode can be used.
受光部としては、フォトダイオードなどのほか、光を電気信号に変換する素子であれ ば使用できる。  As the light receiving section, any element that converts light into an electrical signal can be used in addition to a photodiode.
その他、本発明の要旨を逸脱しない範囲で、種々の変更が可能である。 産業上の利用可能性  In addition, various modifications can be made without departing from the scope of the present invention. Industrial applicability
[0034] 本発明のマイクロフォン素子は、空気や水などの媒体に伝達される振動を電気信 号に変換するマイクロフォンや振動センサに適用できる。 The microphone element of the present invention can be applied to a microphone or a vibration sensor that converts vibration transmitted to a medium such as air or water into an electric signal.

Claims

請求の範囲 The scope of the claims
[1] 媒体の振動を捕捉する振動シートと、  [1] A vibration sheet for capturing the vibration of the medium;
前記振動シートに設けられ、コアおよびコアの外周に設けられたクラッドを備え、伝 送する光の一部の外界との相互作用を可能にするセンサ部を有する光ファイバと、 前記光ファイバの入射端に対して光を出射する光源と、  An optical fiber having a sensor unit provided on the vibration sheet, including a core and a cladding provided on an outer periphery of the core, and capable of interacting with a part of the transmitted light; and an incident of the optical fiber A light source that emits light toward the edge;
前記センサ部を介して前記光ファイバの出射端から出射される前記光を検出する 受光部と  A light receiving unit that detects the light emitted from the output end of the optical fiber via the sensor unit;
を有するマイクロフォン素子。  A microphone element having
[2] 前記センサ部は、前記光ファイバのコア径と異なるコア径を有するヘテロコア部であ り、前記光ファイバの中途部に接合されてなる構成である  [2] The sensor unit is a hetero-core unit having a core diameter different from the core diameter of the optical fiber, and is configured to be joined to a middle part of the optical fiber.
請求項 1に記載のマイクロフォン素子。  The microphone element according to claim 1.
[3] 前記センサ部は、前記光ファイバのコアの屈折率あるいはクラッドの屈折率と同等 の屈折率を持つ光透過部材が前記光ファイバの中途部に接合されてなる構成である 請求項 1に記載のマイクロフォン素子。 [3] The sensor unit has a configuration in which a light transmitting member having a refractive index equivalent to a refractive index of a core of the optical fiber or a refractive index of a clad is joined to a middle part of the optical fiber. The microphone element as described.
[4] 前記光ファイバが前記センサ部を頂部として屈曲するようにして前記振動シートに 設けられている [4] The optical fiber is provided on the vibration sheet so as to bend with the sensor portion as a top portion.
請求項 1に記載のマイクロフォン素子。  The microphone element according to claim 1.
[5] 前記センサ部の部分を含む前記光ファイバが直線状に前記振動シートに設けられ ている [5] The optical fiber including the sensor portion is linearly provided on the vibration sheet.
請求項 1に記載のマイクロフォン素子。  The microphone element according to claim 1.
[6] 前記光ファイバが前記振動シートに貼り合わされて 、る [6] The optical fiber is bonded to the vibration sheet.
請求項 1に記載のマイクロフォン素子。  The microphone element according to claim 1.
[7] 前記光ファイバが前記振動シートに埋め込まれて 、る [7] The optical fiber is embedded in the vibration sheet.
請求項 1に記載のマイクロフォン素子。  The microphone element according to claim 1.
PCT/JP2006/309013 2005-08-01 2006-04-28 Microphone element WO2007015324A1 (en)

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US10576643B2 (en) 2014-08-22 2020-03-03 President And Fellows Of Harvard College Sensors for soft robots and soft actuators

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CN103925985A (en) * 2014-04-10 2014-07-16 华中科技大学 Vibrating sensor based on core-free optical fiber and detection device based on vibrating sensor
JP2017528661A (en) * 2014-08-22 2017-09-28 プレジデント アンド フェローズ オブ ハーバード カレッジ Electronic strain limiting layer for soft actuator with flexibility and stretchability
US10576643B2 (en) 2014-08-22 2020-03-03 President And Fellows Of Harvard College Sensors for soft robots and soft actuators
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CN107402063A (en) * 2017-09-26 2017-11-28 河南科技大学 A kind of method for the trap setting and its signal acquisition for gathering transplanter vibration signal
CN107402063B (en) * 2017-09-26 2023-09-19 河南科技大学 Capturing device for collecting vibration signals of transplanting machine and method for capturing signals of capturing device

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