CN107911782A - A kind of optical-fiber microphone probe and fiber microphone system - Google Patents
A kind of optical-fiber microphone probe and fiber microphone system Download PDFInfo
- Publication number
- CN107911782A CN107911782A CN201711134181.7A CN201711134181A CN107911782A CN 107911782 A CN107911782 A CN 107911782A CN 201711134181 A CN201711134181 A CN 201711134181A CN 107911782 A CN107911782 A CN 107911782A
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- Prior art keywords
- optical
- diaphragm
- fiber
- fiber microphone
- microphone probe
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
Abstract
Optical-fiber microphone probe provided in an embodiment of the present invention and fiber microphone system, are to contain SiO by using material2Composition diaphragm, and the diaphragm uses ripple struction, release the stress of diaphragm and add the coefficient of elasticity of diaphragm, on the premise of resonant frequency does not reduce, improve sensitivity and expand Hz-KHz, solve the problems, such as not realizing that higher sensitivity and wider frequency are rung existing for existing fiber microphone probe at the same time.
Description
Technical field
The present invention relates to technical field of acoustics, more particularly to a kind of optical-fiber microphone probe and fiber microphone system.
Background technology
Fiber microphone has high sensitivity, anti-electromagnetic interference capability is strong, transmission loss is low, passes as new microphone
The advantages that defeated distance is remote.Higher sensitivity can lift the operating distance of acoustical signal intelligence system；Anti-electromagnetic interference capability
It is used under the particular surroundings such as intense radiation, hot and humid, and can be applied under complicated landform environment carry out remote
Target acquisition, has huge application potential in fields such as transformer detection, gas pipeline monitoring, border early warning monitorings.
Conventional electrical microphone probe vibrating diaphragm used is mostly planar metal diaphragm, and the size of diaphragm influences sensitivity at the same time
And frequency response characteristic.Diaphragm size is bigger, and sensitivity is higher, while Hz-KHz can be caused to narrow；Diaphragm size is smaller, frequency
It is wider to ring scope, while sensitivity can be caused to diminish.So conventional electrical microphone is difficult to realize high sensitivity and wideband at the same time
Ring.If directly using metallic film develop optical-fiber microphone probe, on the one hand exist can not realize at the same time higher sensitivity and compared with
The problem of wideband is rung, on the other hand due to the use of metallic film, optical-fiber microphone probe is introduced by metal material so that sensitive
End, which is susceptible to high humility corrosion etc., to be influenced；According to the nonmetallic diaphragm without ripple struction, there is also can not realize at the same time
The problem of higher sensitivity and wider frequency are rung.
For existing fiber microphone mostly using the planar diaphragm without ripple struction, the material of the planar diaphragm is mostly gold
Belong to, silicon and polymer etc., cause the sensitivity of existing fiber microphone and Hz-KHz also more difficult while reach more excellent state.
The content of the invention
In a first aspect, an embodiment of the present invention provides a kind of optical-fiber microphone probe, to solve existing fiber microphone
The existing above problem.
Optical-fiber microphone probe provided in an embodiment of the present invention, including：Diaphragm, optical fiber, shell and reflectance coating, the diaphragm
The enclosure is arranged at, the reflectance coating is arranged on the diaphragm, and one end of the optical fiber is arranged in the shell
Portion, and with the diaphragm into a determining deviation, the other end of the optical fiber is arranged at the outside of the shell, the material of the diaphragm
To contain SiO2Composition, and the diaphragm has ripple struction.
Preferably, the diaphragm is square.
Preferably, the reflectance coating is arranged at the center of the diaphragm.
Preferably, the quantity of the optical fiber is one, wherein, the optical fiber both also served as output light as input optical fibre
It is fine.
Preferably, the quantity of the optical fiber is two, wherein, an optical fiber is used to input incident light, and another optical fiber is used
In output reflection light.
Preferably, the material of the reflectance coating is gold.
Preferably, it is described to contain SiO2Composition further include Si3N4。
Preferably, the ripple struction of the diaphragm processes ripply nonplanar structure for the membrane surface.
Second aspect, an embodiment of the present invention provides a kind of fiber microphone system, the fiber microphone system is also wrapped
Include the optical-fiber microphone probe described in first aspect.
Optical-fiber microphone probe provided in an embodiment of the present invention and fiber microphone system, by using material be containing
SiO2Composition diaphragm, and the diaphragm uses ripple struction, releases the stress of diaphragm and adds the elasticity system of diaphragm
Number, on the premise of resonant frequency does not reduce, improves sensitivity and expands Hz-KHz, solve existing fiber microphone
The problem of higher sensitivity and wider frequency are rung can not be realized existing for probe at the same time.
Brief description of the drawings
Fig. 1 is the planar structure schematic diagram of the first optical-fiber microphone probe provided in an embodiment of the present invention；
Fig. 2 is the planar structure schematic diagram of the second optical-fiber microphone probe provided in an embodiment of the present invention；
Fig. 3 is the composition structure diagram using the fiber microphone system of F-P interference-type optical fibers microphone probe；
Fig. 4 (a) is the top view of fiber microphone diaphragm provided in an embodiment of the present invention；
Fig. 4 (b) is the sectional view of fiber microphone diaphragm provided in an embodiment of the present invention.
Embodiment
Fig. 1 is the planar structure schematic diagram of the first optical-fiber microphone probe provided in an embodiment of the present invention.
In one example, as shown in Figure 1, the optical-fiber microphone probe is intensity type optical-fiber microphone probe, including：Film
Piece 4, optical fiber 1,12 (not shown) of optical fiber 2, shell 3 and reflectance coating, wherein, 4 diaphragms are arranged inside shell 3, reflectance coating
12 are arranged on the diaphragm, and one end of optical fiber 1 and optical fiber 2 is arranged at the inside of shell 3, and with diaphragm 4 into a determining deviation, light
The other end of fibre 1 and optical fiber 2 is arranged at the outside of shell 3, and the material of diaphragm 4 is to contain SiO2Composition, and there is ripple
Line structure.
In one example, diaphragm 4 is square, or other shapes.
In one example, reflectance coating 12 is arranged at the center of diaphragm 4, can also be arranged at the other positions of diaphragm 4.
In one example, optical fiber 1 is used to input incident light, and optical fiber 2 is used for output reflection light.
In one example, the material of reflectance coating 12 is golden, such as platinum or gold, or other reflectivity height,
Not oxidizable material.
In one example, containing SiO2Composition further include Si3N4。
In one example, the ripple struction of diaphragm 4 processes ripply nonplanar structure for the membrane surface.
Wherein, diaphragm 4 uses micro-electromechanical processing technology development, its surface is machined with a plurality of ripple.The superposition of ripple struction
On the one hand the stress of diaphragm 4 is released so that the performance of diaphragm 4 is substantially reduced by ambient temperature influence degree；On the other hand increase
The coefficient of elasticity of diaphragm 4 is added, while upper resonance frequency is ensured, mechanical sensitivity is improved at least one magnitude.
In the design process, can be flexible by the depth and width of optimum choice ripple struction, ripple spacing, ripple quantity
Adjust mechanical sensitivity and resonant frequency.In order to reduce the hardness of convoluted diaphragm, contain SiO preferably by low stress2's
Composition (can also be other low stress semi-conducting materials), and by controlling technological process and technological parameter to realize low stress
The processing of diaphragm.The optical-fiber microphone probe is to contain SiO by using material2Composition diaphragm, and combine diaphragm watch
The a plurality of ripple of face processing, has reached while has improved sensitivity and expand the effect of wide Hz-KHz.
Wherein, which includes 2 two optical fiber of optical fiber 1 and optical fiber, and optical fiber 1 is used to input incident light, and optical fiber 2 is used
In output reflection light.
Fig. 2 is the planar structure schematic diagram of the second optical-fiber microphone probe provided in an embodiment of the present invention.
As shown in Fig. 2, the optical-fiber microphone probe passes for Fabry-Perot (Fabry-Perot, F-P) interference-type optical fiber
Sound device is popped one's head in.Compared with Fig. 2, microphone probe only has an optical fiber 11, and optical fiber 11 is both used as input optical fibre, also serves as exporting
Optical fiber.
Fig. 3 is the composition structure diagram using the fiber microphone system of F-P interference-type optical fibers microphone probe.By scheming
3 understand that the fiber microphone system includes：Diaphragm 4, light source 5, coupler 6, photodetector 7, amplifier 8, signal processor
9th, display 10 and sound equipment 13.Wherein, the operation principle of the fiber microphone and flow are as follows：
The light that built-in light source 5 is sent, by coupler transfer to optical fiber 11, optical fiber 11 is resent to diaphragm 4 after receiving
In reflectance coating 12, after diaphragm 4 modulates the power of the reflected light, again pass by optical fiber 11 and reflex to coupler 6 and coupled, so
The optical signal after coupling is sent to photodetector 6 afterwards, since input light and reflected light interfere in same optical fiber, shape
Into periodic spectral signal, while acoustical signal effect diaphragm 4, diaphragm 4 vibrate, and cause interference spectrum centre wavelength to occur
Offset, while the offset of spectral wavelength is detected by optical signal amplification, by signal processor 9 by amplifier 8, and light is believed
Number acoustical signal is converted into, acoustic information is obtained finally by display 10 or sound equipment 13.
Optical-fiber microphone probe provided in an embodiment of the present invention, including：Diaphragm, shell, optical fiber and reflectance coating, diaphragm are set
In the enclosure, reflectance coating is arranged on diaphragm, and one end of optical fiber is arranged at the diaphragm into a determining deviation, the other end
The outside of shell, is to contain SiO by using material2Composition diaphragm, reduce the hardness of diaphragm, and the diaphragm uses
Ripple struction, releases the stress of diaphragm and adds the coefficient of elasticity of diaphragm, so that on the premise of resonant frequency does not reduce,
Improve sensitivity and expand Hz-KHz.
Above-described embodiment, has carried out the purpose of the present invention, technical solution and beneficial effect further
Describe in detail, it should be understood that the foregoing is merely the embodiment of the present invention, be not intended to limit the present invention
Protection domain, all any modification, equivalent substitution, improvement and etc. on the basis of technical scheme, done should all
It is included within protection scope of the present invention.
Claims (9)
1. a kind of optical-fiber microphone probe, including：Diaphragm, optical fiber, shell and reflectance coating, the diaphragm are arranged in the shell
Portion, the reflectance coating are arranged on the diaphragm, and one end of the optical fiber is arranged at the enclosure, and with the diaphragm into
Certain distance is placed, and the other end of the optical fiber is arranged at the outside of the shell, it is characterised in that
The material of the diaphragm is to contain SiO2Composition, and the diaphragm has ripple struction.
2. optical-fiber microphone probe according to claim 1, it is characterised in that the diaphragm is square.
3. optical-fiber microphone probe according to claim 1, it is characterised in that the reflectance coating is arranged at the diaphragm
Center.
4. optical-fiber microphone probe according to claim 1, it is characterised in that the quantity of the optical fiber is one, wherein,
The optical fiber both also served as output optical fibre as input optical fibre.
5. optical-fiber microphone probe according to claim 1, it is characterised in that the quantity of the optical fiber is two, wherein,
A piece optical fiber is used to input incident light, and another optical fiber is used for output reflection light.
6. optical-fiber microphone probe according to claim 1, it is characterised in that the material of the reflectance coating is gold.
7. optical-fiber microphone probe according to claim 1, it is characterised in that described to contain SiO2Composition further include
Si3N4。
8. optical-fiber microphone probe according to claim 1, it is characterised in that the ripple struction of the diaphragm is the film
Piece surface processes ripply nonplanar structure.
9. a kind of fiber microphone system, it is characterised in that the fiber microphone system is further included as claim 1-8 is any
Optical-fiber microphone probe described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711134181.7A CN107911782B (en) | 2017-11-16 | 2017-11-16 | Optical fiber microphone probe and optical fiber microphone system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711134181.7A CN107911782B (en) | 2017-11-16 | 2017-11-16 | Optical fiber microphone probe and optical fiber microphone system |
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| CN107911782A true CN107911782A (en) | 2018-04-13 |
| CN107911782B CN107911782B (en) | 2020-04-07 |
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| CN201711134181.7A Active CN107911782B (en) | 2017-11-16 | 2017-11-16 | Optical fiber microphone probe and optical fiber microphone system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108900250A (en) * | 2018-08-28 | 2018-11-27 | 太原理工大学 | A kind of mining passive sound pick up equipment |
| CN111464927A (en) * | 2020-04-07 | 2020-07-28 | 中国电子科技集团公司第三研究所 | Optical fiber microphone and sensitive structure and preparation method thereof |
| CN111998932A (en) * | 2020-08-04 | 2020-11-27 | 北京航空航天大学 | Graphene corrugated film optical fiber F-P sound pressure sensor and manufacturing method thereof |
| CN112904491A (en) * | 2021-01-21 | 2021-06-04 | 北京航空航天大学 | Optical fiber F-P probe with adjustable membrane-based interface stress and manufacturing method thereof |
| CN115031825A (en) * | 2022-06-09 | 2022-09-09 | 西北大学 | Optical fiber ground sound sensor and optical fiber ground sound sensor device |
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| US20040062406A1 (en) * | 2001-11-16 | 2004-04-01 | Yoshio Sakamoto | Diaphragm structure of light-sound converter |
| CN101504311A (en) * | 2009-03-16 | 2009-08-12 | 北京航空航天大学 | Sensing head of optical fiber acoustic sensor |
| US20090202195A1 (en) * | 2008-02-11 | 2009-08-13 | Nicholas Lagakos | Fiber Optic Pressure Sensors and Catheters |
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| CN101808264A (en) * | 2010-02-10 | 2010-08-18 | 中国科学院半导体研究所 | Optical fiber laser microphone |
| CN103152684A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | Optical-fiber microphone probe |
| CN103152685A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | F-P (Fabry-Perot) interference principle-based optical fiber microphone |
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| US20040062406A1 (en) * | 2001-11-16 | 2004-04-01 | Yoshio Sakamoto | Diaphragm structure of light-sound converter |
| US20090202195A1 (en) * | 2008-02-11 | 2009-08-13 | Nicholas Lagakos | Fiber Optic Pressure Sensors and Catheters |
| US20100123903A1 (en) * | 2008-11-19 | 2010-05-20 | Industrial Technology Research Institute | Optical scanning probe |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108900250A (en) * | 2018-08-28 | 2018-11-27 | 太原理工大学 | A kind of mining passive sound pick up equipment |
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| CN111464927A (en) * | 2020-04-07 | 2020-07-28 | 中国电子科技集团公司第三研究所 | Optical fiber microphone and sensitive structure and preparation method thereof |
| CN111998932A (en) * | 2020-08-04 | 2020-11-27 | 北京航空航天大学 | Graphene corrugated film optical fiber F-P sound pressure sensor and manufacturing method thereof |
| CN111998932B (en) * | 2020-08-04 | 2021-06-29 | 北京航空航天大学 | Graphene corrugated film optical fiber F-P sound pressure sensor and manufacturing method thereof |
| CN112904491A (en) * | 2021-01-21 | 2021-06-04 | 北京航空航天大学 | Optical fiber F-P probe with adjustable membrane-based interface stress and manufacturing method thereof |
| CN115031825A (en) * | 2022-06-09 | 2022-09-09 | 西北大学 | Optical fiber ground sound sensor and optical fiber ground sound sensor device |
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|---|---|
| CN107911782B (en) | 2020-04-07 |
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