WO2006031650A2 - Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation - Google Patents
Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation Download PDFInfo
- Publication number
- WO2006031650A2 WO2006031650A2 PCT/US2005/032179 US2005032179W WO2006031650A2 WO 2006031650 A2 WO2006031650 A2 WO 2006031650A2 US 2005032179 W US2005032179 W US 2005032179W WO 2006031650 A2 WO2006031650 A2 WO 2006031650A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ultra
- pure
- low
- per million
- weight
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/08—Doped silica-based glasses containing boron or halide
- C03C2201/11—Doped silica-based glasses containing boron or halide containing chlorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/21—Doped silica-based glasses containing non-metals other than boron or halide containing molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/23—Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03C2201/42—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium
Definitions
- Defects can be categorized into two general types: 1) extrinsic impurities, such as metal contamination, and 2) defects in the normal Si-O 2 network structure, such as a Si atom bonding directly to another Si atom instead of to an oxygen atom, for example.
- extrinsic impurities such as metal contamination
- defects in the normal Si-O 2 network structure such as a Si atom bonding directly to another Si atom instead of to an oxygen atom, for example.
- defect free SiO 2 quartz structure each Si bonds to four other oxygen atoms in a lattice-like structure.
- the amount of impurities and/or network defects in the bulb envelope can cause formation of color centers, which can result in absorption of the emitted ultraviolet and vacuum ultraviolet radiation and can also lead to localized heating and/or overheating. Localized heating and/or overheating can result in increased thermal stresses and cause catastrophic bulb failure since these bulbs generally operate at elevated pressures.
- the term "ultra-pure quartz” generally refers to the impurities in the quartz material whereas the term “low-defect quartz” refers to imperfections in the basic quartz material of Si (silicon) and O (oxygen), and in the structure or network of these elements.
- the bulbs in accordance with the present disclosure can be fabricated from ultra-pure quartz or low defect quartz or a combination of ultra-pure and low defect quartz.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007531371A JP4974007B2 (en) | 2004-09-10 | 2005-09-08 | Electrodeless lamp for emitting ultraviolet radiation and / or vacuum ultraviolet radiation |
KR1020077008132A KR101169114B1 (en) | 2004-09-10 | 2005-09-08 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
EP05796590A EP1789991A2 (en) | 2004-09-10 | 2005-09-08 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/937,947 US7166963B2 (en) | 2004-09-10 | 2004-09-10 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
US10/937,947 | 2004-09-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006031650A2 true WO2006031650A2 (en) | 2006-03-23 |
WO2006031650A3 WO2006031650A3 (en) | 2006-07-20 |
Family
ID=35735416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/032179 WO2006031650A2 (en) | 2004-09-10 | 2005-09-08 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
Country Status (7)
Country | Link |
---|---|
US (1) | US7166963B2 (en) |
EP (1) | EP1789991A2 (en) |
JP (1) | JP4974007B2 (en) |
KR (1) | KR101169114B1 (en) |
CN (1) | CN101053060A (en) |
TW (1) | TWI387994B (en) |
WO (1) | WO2006031650A2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1879215A2 (en) * | 2006-07-12 | 2008-01-16 | Nordson Corporation | Ultraviolet lamp system with cooling air control |
JP2008159387A (en) * | 2006-12-22 | 2008-07-10 | Satoshi Horikoshi | Ultraviolet light source and chemical reaction accelerating device |
JP2009152203A (en) * | 2007-12-21 | 2009-07-09 | Nordson Corp | Uv lamp system, and method with improved magnetron control |
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US7622378B2 (en) | 2005-11-09 | 2009-11-24 | Tokyo Electron Limited | Multi-step system and method for curing a dielectric film |
US8956457B2 (en) * | 2006-09-08 | 2015-02-17 | Tokyo Electron Limited | Thermal processing system for curing dielectric films |
US7993528B2 (en) * | 2007-04-25 | 2011-08-09 | Necamp David Richard | Method and apparatus for treating materials using electrodeless lamps |
US20090075491A1 (en) * | 2007-09-13 | 2009-03-19 | Tokyo Electron Limited | Method for curing a dielectric film |
US20090226695A1 (en) * | 2008-03-06 | 2009-09-10 | Tokyo Electron Limited | Method for treating a dielectric film with infrared radiation |
US7858533B2 (en) * | 2008-03-06 | 2010-12-28 | Tokyo Electron Limited | Method for curing a porous low dielectric constant dielectric film |
US20090226694A1 (en) * | 2008-03-06 | 2009-09-10 | Tokyo Electron Limited | POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING |
US7977256B2 (en) | 2008-03-06 | 2011-07-12 | Tokyo Electron Limited | Method for removing a pore-generating material from an uncured low-k dielectric film |
US8895942B2 (en) * | 2008-09-16 | 2014-11-25 | Tokyo Electron Limited | Dielectric treatment module using scanning IR radiation source |
US20100065758A1 (en) * | 2008-09-16 | 2010-03-18 | Tokyo Electron Limited | Dielectric material treatment system and method of operating |
US20100193510A1 (en) * | 2009-02-02 | 2010-08-05 | Danilychev Vladimir A | Wireless radiative system |
US20110232677A1 (en) * | 2010-03-29 | 2011-09-29 | Tokyo Electron Limited | Method for cleaning low-k dielectrics |
CN102157338A (en) * | 2011-01-26 | 2011-08-17 | 王颂 | Electrodeless quasimolecule lamp |
KR20150089184A (en) * | 2014-01-27 | 2015-08-05 | 엘지전자 주식회사 | Plasma lighting system |
JP6912098B2 (en) * | 2015-12-18 | 2021-07-28 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | Reduction of carbon content of silicon dioxide granules and preparation of quartz glass |
WO2017103115A2 (en) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Production of a silica glass article in a suspended crucible made of refractory metal |
KR20180095624A (en) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 | Manufacture of opaque silica glass products |
TWI728018B (en) * | 2015-12-18 | 2021-05-21 | 德商何瑞斯廓格拉斯公司 | Preparation of quartz glass bodies from silicon dioxide powder |
CN108698883A (en) | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | The mist projection granulating of silica in quartz glass preparation |
CN108698882A (en) * | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | The ammonia treatment of SiO 2 powder in quartz glass preparation |
CN109153593A (en) | 2015-12-18 | 2019-01-04 | 贺利氏石英玻璃有限两合公司 | The preparation of synthetic quartz glass powder |
US20190031554A1 (en) * | 2015-12-18 | 2019-01-31 | Heraeus Quarzglas Gmbh & Co. Kg | Preparation of a quartz glass body in a standing sinter crucible |
TWI813534B (en) * | 2015-12-18 | 2023-09-01 | 德商何瑞斯廓格拉斯公司 | Preparation of quartz glass bodies with dew point monitoring in the melting oven |
TWI720090B (en) * | 2015-12-18 | 2021-03-01 | 德商何瑞斯廓格拉斯公司 | Preparation of carbon-doped silicon dioxide granulate as an intermediate in the preparation of quartz glass |
EP3390308A1 (en) | 2015-12-18 | 2018-10-24 | Heraeus Quarzglas GmbH & Co. KG | Glass fibers and preforms made of quartz glass having low oh, cl, and al content |
CN108698884A (en) * | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | The steam treatment of SiO 2 powder in quartz glass preparation |
US11952303B2 (en) | 2015-12-18 | 2024-04-09 | Heraeus Quarzglas Gmbh & Co. Kg | Increase in silicon content in the preparation of quartz glass |
JP6927643B2 (en) * | 2015-12-18 | 2021-09-01 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | Preparation of quartz glass in a suspended sintered crucible |
TW201736290A (en) * | 2015-12-18 | 2017-10-16 | 何瑞斯廓格拉斯公司 | Preparation and post-treatment of a quartz glass body |
JP6981710B2 (en) * | 2015-12-18 | 2021-12-17 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | Preparation of Fused Quartz from Silicon Dioxide Granules |
US10730780B2 (en) | 2015-12-18 | 2020-08-04 | Heraeus Quarzglas Gmbh & Co. Kg | Preparation of a quartz glass body in a multi-chamber oven |
CN108698891A (en) * | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | Gas bleed for melting baking oven and the method for preparing quartz glass |
TW201731780A (en) * | 2015-12-18 | 2017-09-16 | 何瑞斯廓格拉斯公司 | Preparation of a quartz glass body in a hanging metal sheet crucible |
EP3638631A1 (en) * | 2017-06-14 | 2020-04-22 | Heraeus Quarzglas GmbH & Co. KG | Preparation of a quartz glass body |
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US4501993A (en) * | 1982-10-06 | 1985-02-26 | Fusion Systems Corporation | Deep UV lamp bulb |
JPS62106618A (en) * | 1985-11-05 | 1987-05-18 | Mitsubishi Electric Corp | Photochemical vapor growth device |
US4945290A (en) * | 1987-10-23 | 1990-07-31 | Bbc Brown Boveri Ag | High-power radiator |
JPH0891867A (en) * | 1994-09-21 | 1996-04-09 | Sumitomo Metal Ind Ltd | Ultraviolet ray transmitting synthetic quartz glass and its production |
JP2001146434A (en) * | 1999-01-21 | 2001-05-29 | Tosoh Corp | Optical material for ultraviolet ray and method for producing the material |
EP1125897A1 (en) * | 1999-06-10 | 2001-08-22 | Asahi Glass Company Ltd. | Synthetic quartz glass and method for preparing the same |
US6610990B1 (en) * | 1999-07-29 | 2003-08-26 | Quay Technologies Ltd. | UV light source |
US20030195107A1 (en) * | 1998-10-28 | 2003-10-16 | Asahi Glass Company Limited | Synthetic quartz glass and process for producing it |
US20040118155A1 (en) * | 2002-12-20 | 2004-06-24 | Brown John T | Method of making ultra-dry, Cl-free and F-doped high purity fused silica |
Family Cites Families (20)
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US3234431A (en) | 1961-06-28 | 1966-02-08 | Bardocz Arpad | Electronically controlled spectroscopic high voltage spark source |
US3334261A (en) | 1965-10-24 | 1967-08-01 | Sylvania Electric Prod | High pressure discharge device having a fill including iodine mercury and at least one rare earth metal |
DE2363843A1 (en) | 1973-12-21 | 1975-06-26 | Philips Patentverwaltung | METAL IODIDE VAPOR DISCHARGE LAMP |
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JPH0755845B2 (en) * | 1988-09-03 | 1995-06-14 | 信越石英株式会社 | Transmitter for laser light |
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-
2004
- 2004-09-10 US US10/937,947 patent/US7166963B2/en not_active Expired - Fee Related
-
2005
- 2005-09-08 EP EP05796590A patent/EP1789991A2/en not_active Withdrawn
- 2005-09-08 KR KR1020077008132A patent/KR101169114B1/en active IP Right Grant
- 2005-09-08 CN CNA2005800379657A patent/CN101053060A/en active Pending
- 2005-09-08 WO PCT/US2005/032179 patent/WO2006031650A2/en active Application Filing
- 2005-09-08 JP JP2007531371A patent/JP4974007B2/en not_active Expired - Fee Related
- 2005-09-09 TW TW094131089A patent/TWI387994B/en active
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1879215A2 (en) * | 2006-07-12 | 2008-01-16 | Nordson Corporation | Ultraviolet lamp system with cooling air control |
EP1879215A3 (en) * | 2006-07-12 | 2008-01-23 | Nordson Corporation | Ultraviolet lamp system with cooling air control |
US8410410B2 (en) | 2006-07-12 | 2013-04-02 | Nordson Corporation | Ultraviolet lamp system with cooling air control |
JP2008159387A (en) * | 2006-12-22 | 2008-07-10 | Satoshi Horikoshi | Ultraviolet light source and chemical reaction accelerating device |
JP2009152203A (en) * | 2007-12-21 | 2009-07-09 | Nordson Corp | Uv lamp system, and method with improved magnetron control |
Also Published As
Publication number | Publication date |
---|---|
US7166963B2 (en) | 2007-01-23 |
JP2008512845A (en) | 2008-04-24 |
TW200614317A (en) | 2006-05-01 |
TWI387994B (en) | 2013-03-01 |
JP4974007B2 (en) | 2012-07-11 |
CN101053060A (en) | 2007-10-10 |
US20060055300A1 (en) | 2006-03-16 |
KR20070057923A (en) | 2007-06-07 |
KR101169114B1 (en) | 2012-07-26 |
WO2006031650A3 (en) | 2006-07-20 |
EP1789991A2 (en) | 2007-05-30 |
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