CN102157338A - Electrodeless quasimolecule lamp - Google Patents
Electrodeless quasimolecule lamp Download PDFInfo
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- CN102157338A CN102157338A CN2011100280992A CN201110028099A CN102157338A CN 102157338 A CN102157338 A CN 102157338A CN 2011100280992 A CN2011100280992 A CN 2011100280992A CN 201110028099 A CN201110028099 A CN 201110028099A CN 102157338 A CN102157338 A CN 102157338A
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- quasimolecule
- electrodeless
- quartz glass
- air barrier
- glass sleeve
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Abstract
The invention relates to an electrodeless quasimolecule lamp, which emits lights through being excited by microwaves in the electrodeless way. An air isolation system is added at the external part of a resonant cavity; the air isolation system comprises a quartz glass sleeve; nitrogen or other inert gases are filled into the quartz glass sleeve, so that the tube is isolated from air; quasimolecule vacuum ultraviolet lights with wavelengths less than 200nm can penetrate through the sleeve and irradiate outwardly, so that the quasimolecule vacuum ultraviolet lights can effectively act on liquids like water; the problem that the quasimolecule vacuum ultraviolet lights with wavelengths less than 200nm can not be used for the reasons that the optical distance is short and water absorbs microwaves and the like is solved; and the quasimolecule vacuum ultraviolet lights can be used in industries like water treatment, environment protection, material surface treatment and the like.
Description
Technical field
The invention belongs to the electrooptics field, relate to a kind of Excimer lamp, be specifically related to the air barrier systems of the resonant cavity of Excimer lamp by the microwave excitation Discharge illuminating.
Background technology
Excited quasi-molecular lampbulb is widely used in ultraviolet exposure apparatus according in the manufacturing process of electronic units such as semiconductor integrated circuit, display panels and printed substrate etc. at present, but what enter practical state now mostly is the Excimer lamp of high voltage electric field exciting light, (excited quasi-molecular lampbulb) of patent publication No. CN1494105A for example, (Excimer lamp) of patent publication No. CN101164136A etc.
Because the cost of excited quasi-molecular lampbulb is too high, limited its extensive use, therefore many universities and colleges and scientific research institution, enterprise are also arranged now at development of new quasi-molecule luminescent system both at home and abroad, as Fudan University's patent announcement number is 1713338A (190nm, 207nm quasi-molecule microwave electrodeless discharge lamp and application), and my patent No. is ZL 200810216783.1 (electrodeless quasi-molecule lamp) etc.
In the actual use of my patented product, found the problem that some are new, as when adopting when can produce wavelength and being lower than the fluorescent tube of vacuum-ultraviolet light of 200nm, can not allow vacuum-ultraviolet light shine on the object or in the water body, because vacuum-ultraviolet light send the back on very short distance just and oxygen react, just energy consumption.
Summary of the invention
Therefore, the present invention is in order to solve the problem in the actual use, the object of the present invention is to provide a kind ofly adopting can produce wavelength and be lower than the fluorescent tube of vacuum-ultraviolet light of 200nm the time when electrodeless quasi-molecule lamp, can be effectively illumination be mapped to system on the shone thing.
Electrodeless quasi-molecule lamp of the present invention, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that: an air barrier systems is arranged in the outside of resonance cavity system.
The air barrier systems of electrodeless quasi-molecule lamp of the present invention is characterized in that: a cover quartz glass sleeve is arranged, adopt the manufacturing of deshydroxy transparency silica glass, silicon dioxide purity is greater than 99.9%.
The air barrier systems of electrodeless quasi-molecule lamp of the present invention, it is characterized in that: quartz glass sleeve seals, and inner filling has nitrogen or other inert gas, and flows by fan circulation.
The air barrier systems of electrodeless quasi-molecule lamp of the present invention is characterized in that: a nitrogen or other inert gas input hole are arranged, an aspirating hole is arranged, an online oxygen content monitoring device is arranged, a pressure monitoring device is arranged.
Description of drawings
Fig. 1 is the structure chart of electrodeless quasi-molecule lamp of the present invention.
Fig. 2 is that A of the present invention is to view
Symbol description
11: Pressure gauge; 12: nitrogen or inert gas input hole; 13: fan; 14: aspirating hole; 15: the oxygen content monitoring system; 16: waveguide cavity; 17: coupling aperture closes shrouding; 18: the cylindrical shape mesh plate; 19: fixed lever; 20: the quasi-molecule fluorescent tube; 21: cover plate; 22: quartz glass sleeve.
Concrete case study on implementation
With reference to accompanying drawing, Fig. 1 is a structure chart of the present invention, the present invention implements in the following way, after microwave source produces microwave, microwave enters resonant cavity by the coupling aperture of waveguide 16, discharges in the excitation quasi-molecule fluorescent tube 20 are excited to take place Excimer UV light with gas, and Excimer UV light shines the resonant cavity outside by cylindrical shape mesh plate 18, shine on the materials such as outer gas of quartz glass sleeve 22 or liquid by quartz glass sleeve 22 again.
The coupling aperture of waveguide 16 has the coupling aperture of the material that does not absorb microwave to close shrouding 17 sealings, prevents that nitrogen or inert gas from leaking thus.
Resonance cavity system is that the base plate by cover plate 21, cylindrical shape mesh plate 18, waveguide cavity 16 constitutes jointly, and is fixing by fixed lever 19.
The air barrier systems is by quartz glass sleeve 22, the base plate of waveguide cavity 16, coupling aperture closes shrouding 17, Pressure gauge 11, nitrogen or inert gas input hole 12, fan 13, aspirating hole 14, oxygen content monitoring system 15 constitutes, during first the use, vacuumize by aspirating hole 14, again by nitrogen or inert gas input hole 12 input nitrogen or inert gases, repeatable operation, make the oxygen content of 22 li of quartz glass sleeves be lower than the numerical value of requirement, make the air pressure of quartz glass sleeve 22 li inputs nitrogen or inert gas keep barotropic state then, the gas pressure that quartz glass sleeve is 22 li is observed by Pressure gauge 11, and the oxygen content gas that quartz glass sleeve is 22 li is confirmed by oxygen content monitoring system 15.
Because be to reduce the content of oxygen by vacuumizing the method that has charged into nitrogen or inert gas more repeatedly in the quartz glass sleeve 22, oxygen content is very low, thus the energy of Excimer UV line not can by oxygen consumption what.
When adopting, electrodeless quasi-molecule lamp of the present invention can produce the fluorescent tube that wavelength is lower than the vacuum-ultraviolet light of 200nm, be used for interrupting molecular link, during organic substance in the decomposition water, quartz glass sleeve is installed in the water, allow pellicular water flow through from the sleeve pipe periphery, make ultraviolet light can shine whole water layer, thereby reach the purpose of decomposing organic matter.
When adopting, electrodeless quasi-molecule lamp of the present invention can produce the fluorescent tube that wavelength is lower than the vacuum-ultraviolet light of 200nm, be used for interrupting molecular link, during organic substance on the decomposed solution crystal panel, adopt the quartz glass sleeve of square-section, press close to liquid crystal panel, and be blown into nitrogen or other inert gas, make ultraviolet light can be radiated on the liquid crystal panel in both gaps, reach the purpose of decomposing organic matter, finish light and clean.
Though only two embodiment of the present invention are described, but, under the prerequisite that does not deviate from the spirit and scope of the present invention, the present invention obviously also has the form of many variations and change, for example resonant cavity can be box or ball-type, fluorescent tube also can be the fluorescent tube even the bulb of random length and diameter, and quartz glass sleeve can be box or the like.
Claims (4)
1. electrodeless quasi-molecule lamp, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that: an air barrier systems is arranged in the outside of resonance cavity system.
2. air barrier systems according to claim 1 is characterized in that: a cover quartz glass sleeve is arranged, adopt the manufacturing of deshydroxy transparency silica glass, silicon dioxide purity is greater than 99.9%.
3. air barrier systems according to claim 1, it is characterized in that: quartz glass sleeve seals, and inner filling has nitrogen or other inert gas, and flows by fan circulation.
4. air barrier systems according to claim 1 is characterized in that: a nitrogen or other inert gas input hole are arranged, an aspirating hole is arranged, an online oxygen content monitoring device is arranged, a pressure monitoring device is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100280992A CN102157338A (en) | 2011-01-26 | 2011-01-26 | Electrodeless quasimolecule lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100280992A CN102157338A (en) | 2011-01-26 | 2011-01-26 | Electrodeless quasimolecule lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102157338A true CN102157338A (en) | 2011-08-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100280992A Pending CN102157338A (en) | 2011-01-26 | 2011-01-26 | Electrodeless quasimolecule lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102157338A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103227098A (en) * | 2013-05-15 | 2013-07-31 | 王颂 | 282nm/222nm electrodeless excimer lamp |
| CN112133624A (en) * | 2020-10-10 | 2020-12-25 | 罗璐 | Excimer lamp with cooling air chamber on end face and beauty instrument |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101053060A (en) * | 2004-09-10 | 2007-10-10 | 艾克塞利斯技术公司 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
| CN101131228A (en) * | 2006-08-21 | 2008-02-27 | 优志旺电机株式会社 | Excimer lamp device |
| CN101388320A (en) * | 2008-10-24 | 2009-03-18 | 王颂 | Electrodeless quasi-molecule lamp |
| CN101857283A (en) * | 2010-06-18 | 2010-10-13 | 江苏技术师范学院 | Device for treating waste water with microwave electrodeless excimer lamp and gas distributing system for lamp |
-
2011
- 2011-01-26 CN CN2011100280992A patent/CN102157338A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101053060A (en) * | 2004-09-10 | 2007-10-10 | 艾克塞利斯技术公司 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation |
| CN101131228A (en) * | 2006-08-21 | 2008-02-27 | 优志旺电机株式会社 | Excimer lamp device |
| CN101388320A (en) * | 2008-10-24 | 2009-03-18 | 王颂 | Electrodeless quasi-molecule lamp |
| CN101857283A (en) * | 2010-06-18 | 2010-10-13 | 江苏技术师范学院 | Device for treating waste water with microwave electrodeless excimer lamp and gas distributing system for lamp |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103227098A (en) * | 2013-05-15 | 2013-07-31 | 王颂 | 282nm/222nm electrodeless excimer lamp |
| CN112133624A (en) * | 2020-10-10 | 2020-12-25 | 罗璐 | Excimer lamp with cooling air chamber on end face and beauty instrument |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Wang Song Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110817 |