CN101388320B - Electrodeless quasi-molecule lamp - Google Patents
Electrodeless quasi-molecule lamp Download PDFInfo
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- CN101388320B CN101388320B CN2008102167831A CN200810216783A CN101388320B CN 101388320 B CN101388320 B CN 101388320B CN 2008102167831 A CN2008102167831 A CN 2008102167831A CN 200810216783 A CN200810216783 A CN 200810216783A CN 101388320 B CN101388320 B CN 101388320B
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Abstract
The invention relates to an electrodeless quasi-molecule lamp, which emits lights through being excited by microwaves in the electrodeless way. The invention mainly improves the design of a tube and a resonant cavity, makes the tube through the electrodeless and excites the tube with the microwaves, has simple production technology, and solves the problems existing in a common tube of low electric efficiency, small power and short service life and the like. The resonant cavity adopts metal mesh plates with over 70% light transmittance ratio, and is fixed by a bracket. The whole set of the product has the advantages of high electric efficiency, high light transmittance ratio, long service life, low production cost, large power and convenient fixation and installation, can expand the application industries of quasi-molecule ultraviolet lights from high added value industries such as liquid crystal glass light cleaning, printing and the like to the industries such as medical treatment, water treatment, environment protection, chemical industry and material surface treatment and the like, and greatly widens the application range.
Description
Technical field
The invention belongs to the electrooptics field, relate to a kind of Excimer lamp, be specifically related to the fluorescent tube and the resonance cavity system of Excimer lamp by the microwave excitation Discharge illuminating.
Background technology
Excited quasi-molecular lampbulb is widely used in semiconductor integrated circuit at present, in the ultraviolet exposure apparatus according in the manufacturing process of electronic unit such as display panels and printed substrate etc., but what enter practical state now mostly is the Excimer lamp of high voltage electric field exciting light, (excited quasi-molecular lampbulb) of patent publication No. CN1494105A for example, (Excimer lamp) of patent publication No. CN101164136A etc., these Excimer lamps all are to adopt the inboard and outer tube outside installing electrodes of pipe in the lamp, by applying high voltage between electrode, gas discharge in the exciter lamp is luminous, the weakness that they are common, be exactly that high-tension electricity excites the electrical efficiency of quasi-molecule light low, so be difficult to make high-power, generally can only be tens watts, secondly because electrode near fluorescent tube, makes this coaxial rings tubular fluorescent tube be easy to generate crackle down in working order, influence useful life.Because these a little problems, so cost is high, can only on high value-added product, use, and with the performance of this product, also is this ground of useing force greatly in other field, so developing low-cost, efficient is higher, the life-span is longer high-power Excimer lamp are exactly natural selection.
Many universities and colleges and scientific research institution, enterprise are also arranged now at the novel quasi-molecule luminescent system of research both at home and abroad, the excitation energy comprises DC, AC, RF, microwave etc., domestic research steps is in microwave Excimer lamp direction achievement maximum, is 200510027965.0 (190nm, 207nm quasi-molecule microwave electrodeless discharge lamp and application) as Fudan University's number of patent application; The Electron Science University, Patent application number is 03117882.0 (a kind of microwave ultraviolet source); And my number of patent application is 200810065583.0 (continuous high-power micro-wave nonpolar ultraviolet generation device) etc.
In the actual use of my patented product, found the problem that some are new, how the problem as how fixing under the long situation of fluorescent tube improves the problem of light transmittance etc.
Summary of the invention
Therefore, the present invention be for solve in the actual use problem, the object of the present invention is to provide a kind of cheaply, be convenient to install and fix the microwave excited electrodeless quasi-molecule lamp that light transmission efficiency is high.
Electrodeless quasi-molecule lamp of the present invention, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that: resonance cavity system is made of waveguide base plate, cylindrical shape mesh plate, cover plate, wherein but the cylindrical shape mesh plate adopts the aluminium or the made such as silver, stainless steel of microwave reflection, and the mesh plate aperture opening ratio is greater than 70%.
Electrodeless quasi-molecule lamp of the present invention, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that: said electrodeless fluorescent tube adopts the manufacturing of deshydroxy transparency silica glass, and silicon dioxide purity is greater than 99.9%, and is all electrodeless inside and outside the fluorescent tube, be packaged with inert gas and halogen gas etc. in the fluorescent tube, lamp tube ends is equipped with the joint that does not absorb microwave.
Electrodeless quasi-molecule lamp of the present invention, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that; Resonance cavity system one end connects Wave guide system, but the other end is equipped with the cover plate of microwave reflection, is lined with the fixed head that does not absorb microwave of fixing electrodeless fluorescent tube in waveguide link and the cover plate, is fixed into integral body with support on cover plate and the waveguide base plate.
The fixed head of the fixing electrodeless fluorescent tube described in the electrodeless quasi-molecule lamp of the present invention is characterized in that: when being used for the light cleaning, the hole site of fixed lamp tube is eccentric.
Description of drawings
Fig. 1 is the structure chart of electrodeless quasi-molecule lamp of the present invention.
Fig. 2 is STRUCTURE DECOMPOSITION figure of the present invention.
Fig. 3 is that A of the present invention is to view.
Fig. 4 is that eccentric structure A of the present invention is to view.
Fig. 5 is that B of the present invention is to enlarged drawing.
Symbol description
11: cover plate; 12: fixed head; 13: clip; 14: joint; 15: electrodeless fluorescent tube; 16: fixed lever; 17: the cylindrical shape mesh plate; 18: waveguide cavity; 19: coupling aperture.
Concrete case study on implementation
With reference to accompanying drawing, wherein Fig. 1 is a structure chart of the present invention, Fig. 2 is STRUCTURE DECOMPOSITION figure of the present invention, the present invention implements in the following way, after microwave source produces microwave, microwave enters resonant cavity by the coupling aperture 19 of waveguide 18, and the discharge in the excitation quasi-molecule fluorescent tube 15 is excited to take place Excimer UV light with gas.
Resonance cavity system is that the base plate by cover plate 11, cylindrical shape mesh plate 17, waveguide cavity 18 constitutes jointly, also comprises auxiliary clip 13, the fixed lever 16 that is connected and fixed.
As shown in Figure 5, the reticulate perforation plate of the employing alveolate texture of cylindrical shape mesh plate 17, aperture opening ratio be greater than 70%, the light transmittance height.
Electrodeless lamp system then is made of electrodeless fluorescent tube 15 (envelope has krypton gas, argon gas, xenon, halogen gas etc. in the fluorescent tube), joint 14, the fixed head 12 that also comprises auxiliary fixed lamp tube in addition, the material of electrodeless fluorescent tube adopts the deshydroxy transparency silica glass, silicon dioxide purity is greater than 99.9%, and the material of joint and fixed head can be that TEFLON, quartz glass, pottery or other do not absorb the material of microwave.
The about 1000mm of its total length of electrodeless fluorescent tube as shown in Figure 1, bore is about 22.5mm, when being excited, whole fluorescent tube is all luminous, owing to adopt electrodeless mode, so can not have in the fluorescent tube production process in the utmost point lamp because electrode interface is installed the problem of running into, and can not have utmost point lamp in the process of lamp luminescence yet and electrode and fluorescent tube contact site cause the problem of lamp tube service life reduction because of heating or gap when luminous.
With reference to accompanying drawing 4, as during as purposes such as light cleaning, because rayed when being cleaned body surface, adopts eccentric manner, to dwindle fluorescent tube and the distance that is applied body surface.
Though only two embodiment of the present invention are described, but, under the prerequisite that does not deviate from the spirit and scope of the present invention, the present invention obviously also has the form of many variations and change, for example reticulate perforation plate also can be the arbitrary shape mesh plate beyond the alveolate texture, and fluorescent tube also can be the fluorescent tube even the bulb of random length and diameter.
Claims (4)
1. electrodeless quasi-molecule lamp, it includes microwave source, Wave guide system, resonance cavity system, electrodeless fluorescent tube etc., luminous by gas discharge in the incentive action excitation fluorescent tube of microwave, it is characterized in that: resonance cavity system is made of waveguide base plate, cylindrical shape mesh plate, cover plate, wherein but the cylindrical shape mesh plate adopts the aluminium or the made such as silver, stainless steel of microwave reflection, and the mesh plate aperture opening ratio is greater than 70%.
2. electrodeless quasi-molecule lamp according to claim 1, it is characterized in that: said electrodeless fluorescent tube adopts the manufacturing of deshydroxy transparency silica glass, silicon dioxide purity is greater than 99.9%, all electrodeless inside and outside the fluorescent tube, be packaged with inert gas and halogen gas etc. in the fluorescent tube, lamp tube ends is equipped with the joint that does not absorb microwave.
3. resonance cavity system according to claim 1, it is characterized in that: resonance cavity system one end connects Wave guide system, but the other end is equipped with the cover plate of microwave reflection, be lined with the fixed head that does not absorb microwave of fixing electrodeless fluorescent tube in waveguide link and the cover plate, be fixed into integral body with support on cover plate and the waveguide base plate.
4. fixed head according to claim 3 is characterized in that: when being used for the light cleaning, the hole site of fixed lamp tube is eccentric.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102167831A CN101388320B (en) | 2008-10-24 | 2008-10-24 | Electrodeless quasi-molecule lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102167831A CN101388320B (en) | 2008-10-24 | 2008-10-24 | Electrodeless quasi-molecule lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101388320A CN101388320A (en) | 2009-03-18 |
| CN101388320B true CN101388320B (en) | 2010-04-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102167831A Expired - Fee Related CN101388320B (en) | 2008-10-24 | 2008-10-24 | Electrodeless quasi-molecule lamp |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102097282A (en) * | 2010-11-30 | 2011-06-15 | 王颂 | Electrodeless excimer lamp and application thereof |
| CN102157338A (en) * | 2011-01-26 | 2011-08-17 | 王颂 | Electrodeless quasimolecule lamp |
| CN103258715A (en) * | 2013-05-08 | 2013-08-21 | 王颂 | 308nm electrodeless quasi-molecule lamp |
| CN103227098A (en) * | 2013-05-15 | 2013-07-31 | 王颂 | 282nm/222nm electrodeless excimer lamp |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1494105A (en) * | 2002-10-03 | 2004-05-05 | 株式会社Orc制作所 | Excited quasi-molecule lamp |
| CN1713338A (en) * | 2005-07-21 | 2005-12-28 | 复旦大学 | Electrodes microwave discharging light with 190nm and 207nm quasi-molecule and use thereof |
| CN2833878Y (en) * | 2005-11-02 | 2006-11-01 | 美的集团有限公司 | Electrodeless ultraviolet device for generating ultraviolet rays by utilizing microwave excitation |
-
2008
- 2008-10-24 CN CN2008102167831A patent/CN101388320B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1494105A (en) * | 2002-10-03 | 2004-05-05 | 株式会社Orc制作所 | Excited quasi-molecule lamp |
| CN1713338A (en) * | 2005-07-21 | 2005-12-28 | 复旦大学 | Electrodes microwave discharging light with 190nm and 207nm quasi-molecule and use thereof |
| CN2833878Y (en) * | 2005-11-02 | 2006-11-01 | 美的集团有限公司 | Electrodeless ultraviolet device for generating ultraviolet rays by utilizing microwave excitation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101388320A (en) | 2009-03-18 |
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