WO2006020533A3 - Vertical-offset coater and methods of use - Google Patents

Vertical-offset coater and methods of use Download PDF

Info

Publication number
WO2006020533A3
WO2006020533A3 PCT/US2005/028003 US2005028003W WO2006020533A3 WO 2006020533 A3 WO2006020533 A3 WO 2006020533A3 US 2005028003 W US2005028003 W US 2005028003W WO 2006020533 A3 WO2006020533 A3 WO 2006020533A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
coater
path
transport system
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/028003
Other languages
French (fr)
Other versions
WO2006020533A2 (en
Inventor
Klaus Hartig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cardinal CG Co
Original Assignee
Cardinal CG Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cardinal CG Co filed Critical Cardinal CG Co
Priority to AT05784314T priority Critical patent/ATE546396T1/en
Priority to JP2007525689A priority patent/JP2008509805A/en
Priority to CA002554011A priority patent/CA2554011A1/en
Priority to EP05784314A priority patent/EP1781560B1/en
Publication of WO2006020533A2 publication Critical patent/WO2006020533A2/en
Publication of WO2006020533A3 publication Critical patent/WO2006020533A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/365—Coating different sides of a glass substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides a coater, and methods of using the coater, for depositing thin films onto generally-opposed major surfaces of a sheet-like substrate. The coater has a substrate transport system adapted for supporting the substrate in vertical-offset configuration wherein the substrate is not in a perfectly vertical position but rather is offset from vertical by an acute angle. The transport system defines a path of substrate travel extending through the coater. The transport system is adapted for conveying the substrate along the path of substrate travel. Preferably, the transport system includes a side support for supporting a rear major surface of the substrate. The preferred side support bounds at least one passage through which coating material passes when such coating material is deposited onto the substrate’s rear major surface. Preferably, the coater includes at least one coating apparatus (e.g., which is adapted for delivering coating material) on each of two sides of the path of substrate travel. The coating apparatuses preferably are adapted for depositing coatings onto both of the generally-opposed major surfaces of the substrate in a single pass of the substrate along the path of substrate travel.
PCT/US2005/028003 2004-08-12 2005-08-05 Vertical-offset coater and methods of use Ceased WO2006020533A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT05784314T ATE546396T1 (en) 2004-08-12 2005-08-05 VERTICAL OFFSET COATOR AND METHOD OF USE
JP2007525689A JP2008509805A (en) 2004-08-12 2005-08-05 Vertical offset coater and method of use
CA002554011A CA2554011A1 (en) 2004-08-12 2005-08-05 Vertical-offset coater and methods of use
EP05784314A EP1781560B1 (en) 2004-08-12 2005-08-05 Vertical-offset coater and methods of use

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60092304P 2004-08-12 2004-08-12
US60/600,923 2004-08-12

Publications (2)

Publication Number Publication Date
WO2006020533A2 WO2006020533A2 (en) 2006-02-23
WO2006020533A3 true WO2006020533A3 (en) 2006-08-24

Family

ID=35908056

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/028003 Ceased WO2006020533A2 (en) 2004-08-12 2005-08-05 Vertical-offset coater and methods of use

Country Status (6)

Country Link
US (2) US7678198B2 (en)
EP (1) EP1781560B1 (en)
JP (1) JP2008509805A (en)
AT (1) ATE546396T1 (en)
CA (1) CA2554011A1 (en)
WO (1) WO2006020533A2 (en)

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KR20060134363A (en) * 2005-06-22 2006-12-28 엘지.필립스 엘시디 주식회사 Apparatus of inclined type carrier transfer
JP4842370B2 (en) * 2007-03-07 2011-12-21 株式会社アルバック Vacuum device, substrate transfer method
US7954627B2 (en) * 2007-03-23 2011-06-07 Btsystems, Llc Bin transporter system
DE102007022431A1 (en) * 2007-05-09 2008-11-13 Leybold Optics Gmbh Plasma-coating assembly for flat surfaces e.g. thin film solar cells has moving electrode and fixed electrode
DE102007052524B4 (en) * 2007-11-01 2012-05-31 Von Ardenne Anlagentechnik Gmbh Transport and vacuum coating system for substrates of different sizes
US9782949B2 (en) 2008-05-30 2017-10-10 Corning Incorporated Glass laminated articles and layered articles
US20100059115A1 (en) 2008-09-05 2010-03-11 First Solar, Inc. Coated Substrates and Semiconductor Devices Including the Substrates
TWI502751B (en) * 2008-09-05 2015-10-01 First Solar Inc Coated substrates and semiconductor devices including the substrates
US8842357B2 (en) 2008-12-31 2014-09-23 View, Inc. Electrochromic device and method for making electrochromic device
US9664974B2 (en) 2009-03-31 2017-05-30 View, Inc. Fabrication of low defectivity electrochromic devices
JP6049051B2 (en) * 2011-07-29 2016-12-21 日東電工株式会社 Double-side vacuum deposition method
DE102011083139B4 (en) * 2011-09-21 2013-12-24 Von Ardenne Anlagentechnik Gmbh Substrate treatment process and substrate treatment plant
KR20200035328A (en) 2011-12-12 2020-04-02 뷰, 인크. Thin-film devices and fabrication
EP2650135A1 (en) * 2012-04-12 2013-10-16 KBA-NotaSys SA Intaglio printing plate coating apparatus
JP6042545B2 (en) 2012-08-23 2016-12-14 国立大学法人東京農工大学 Highly transparent aluminum nitride single crystal layer and device comprising the same
JP2016511938A (en) 2013-01-29 2016-04-21 ヘクサテック，インコーポレイテッド Optoelectronic devices incorporating single crystal aluminum nitride substrates
US9748409B2 (en) 2013-03-14 2017-08-29 Hexatech, Inc. Power semiconductor devices incorporating single crystalline aluminum nitride substrate
FR3005654B1 (en) * 2013-05-17 2017-03-24 Saint Gobain METHOD FOR DEPOSITING COATINGS ON A SUBSTRATE
US11133158B2 (en) 2013-06-10 2021-09-28 View, Inc. Glass pallet for sputtering systems
US11688589B2 (en) 2013-06-10 2023-06-27 View, Inc. Carrier with vertical grid for supporting substrates in coater
US9321259B2 (en) * 2013-11-11 2016-04-26 Lee Milazzo Anti-friction roller
CN104150784B (en) * 2014-07-15 2016-12-07 河南康平光电高科有限公司 A kind of sheet mounting frame for glass coating machine
EP3387163B1 (en) * 2015-12-11 2020-04-29 Cardinal CG Company Method of coating both sides of a substrate
WO2019223952A1 (en) * 2018-05-23 2019-11-28 Agc Glass Europe Double sided coated glass substrate and method for making the same
JP2022541143A (en) * 2019-07-19 2022-09-22 サン－ゴバン グラス フランス Base material sheet conveying device
CN113145415B (en) * 2021-04-26 2023-03-24 芜湖东信光电科技有限公司 Surface coating method of ultrathin flexible glass

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Also Published As

Publication number Publication date
US8906206B2 (en) 2014-12-09
JP2008509805A (en) 2008-04-03
ATE546396T1 (en) 2012-03-15
US20060035021A1 (en) 2006-02-16
US20100221422A1 (en) 2010-09-02
EP1781560A2 (en) 2007-05-09
CA2554011A1 (en) 2006-02-23
US7678198B2 (en) 2010-03-16
WO2006020533A2 (en) 2006-02-23
EP1781560B1 (en) 2012-02-22

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