WO2006015505A8 - Vakuumschleuse - Google Patents

Vakuumschleuse

Info

Publication number
WO2006015505A8
WO2006015505A8 PCT/CH2005/000421 CH2005000421W WO2006015505A8 WO 2006015505 A8 WO2006015505 A8 WO 2006015505A8 CH 2005000421 W CH2005000421 W CH 2005000421W WO 2006015505 A8 WO2006015505 A8 WO 2006015505A8
Authority
WO
WIPO (PCT)
Prior art keywords
door
driving rod
opening
door opening
vacuum lock
Prior art date
Application number
PCT/CH2005/000421
Other languages
English (en)
French (fr)
Other versions
WO2006015505A1 (de
Inventor
Van Mast Bart Scholte
Silvio Jaeger
Original Assignee
Oc Oerlikon Balzers Ag
Van Mast Bart Scholte
Silvio Jaeger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oc Oerlikon Balzers Ag, Van Mast Bart Scholte, Silvio Jaeger filed Critical Oc Oerlikon Balzers Ag
Priority to CN2005800273027A priority Critical patent/CN101014406B/zh
Priority to JP2007525143A priority patent/JP2008509359A/ja
Priority to BRPI0514321-7A priority patent/BRPI0514321A/pt
Priority to EP05759680A priority patent/EP1778391A1/de
Priority to CA002576367A priority patent/CA2576367A1/en
Priority to KR1020077005491A priority patent/KR101186715B1/ko
Publication of WO2006015505A1 publication Critical patent/WO2006015505A1/de
Publication of WO2006015505A8 publication Critical patent/WO2006015505A8/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/02—Air-pressure chambers; Air-locks therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J13/00—Covers or similar closure members for pressure vessels in general
    • F16J13/22—Covers or similar closure members for pressure vessels in general with movement parallel to the plane of the opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J13/00—Covers or similar closure members for pressure vessels in general
    • F16J13/24—Covers or similar closure members for pressure vessels in general with safety devices, e.g. to prevent opening prior to pressure release
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Power-Operated Mechanisms For Wings (AREA)
  • Sliding Valves (AREA)
  • Barrages (AREA)
  • Lock And Its Accessories (AREA)

Abstract

Eine Vakuumschleuse mit einer vertikal angeordneten verschliessbaren Türöffnung (10) umfasst folgenden Merkmale: a) eine Schiebetüre (1) ist zum Öffnen und Schliessen parallel zur Ebene der Türöffnung (10) und von dieser etwas beabstandet angeordnet; b) die Türe (1) ist an deren Rückseite mit einer Antriebsstange (2) wirkverbunden und gegenüber der Türöffnung mit einem vorgegebenen Abstand gelagert; c) die Türe (1) ist mit der Antriebsstange (2) über einen Lenkungsmechanismus verbunden, derart, dass bei einer Hemmung des Schliessvorganges durch eine Behinderung (7) im Bereich der Türöffnung (10) die Türe (1) an eine die Türöffnung (10) umschliessende Dichtung (4) lateral angedrückt wird; d) die Türe (1) ist mit der Antriebsstange (2) und/oder dem antriebsstangenseitigen Lenkungsmechanismus mit einem Federelement (8) derart verbunden, dass diese das Gewicht der Türe (1) knapp kompensiert. Dadurch wird sichergestellt, dass bei unbeabsichtigtem Hineingreifen in die Schleusenöffnung beim Schliessvorgang keine Verletzungen möglich sind.
PCT/CH2005/000421 2004-08-13 2005-07-19 Vakuumschleuse WO2006015505A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN2005800273027A CN101014406B (zh) 2004-08-13 2005-07-19 真空闸门以及将基质引入真空室中的方法
JP2007525143A JP2008509359A (ja) 2004-08-13 2005-07-19 真空ロック
BRPI0514321-7A BRPI0514321A (pt) 2004-08-13 2005-07-19 comporta de vácuo
EP05759680A EP1778391A1 (de) 2004-08-13 2005-07-19 Vakuumschleuse
CA002576367A CA2576367A1 (en) 2004-08-13 2005-07-19 Vacuum lock
KR1020077005491A KR101186715B1 (ko) 2004-08-13 2005-07-19 진공 로크

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH13422004 2004-08-13
CH1342/04 2004-08-13

Publications (2)

Publication Number Publication Date
WO2006015505A1 WO2006015505A1 (de) 2006-02-16
WO2006015505A8 true WO2006015505A8 (de) 2007-02-22

Family

ID=34972258

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2005/000421 WO2006015505A1 (de) 2004-08-13 2005-07-19 Vakuumschleuse

Country Status (9)

Country Link
US (1) US20060033061A1 (de)
EP (1) EP1778391A1 (de)
JP (1) JP2008509359A (de)
KR (1) KR101186715B1 (de)
CN (1) CN101014406B (de)
BR (1) BRPI0514321A (de)
CA (1) CA2576367A1 (de)
TW (1) TWI390102B (de)
WO (1) WO2006015505A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2420711B (en) * 2004-11-11 2008-04-30 Brian John Wilson An autoclave and a latching and locking device therefor
WO2008084475A2 (en) * 2007-01-08 2008-07-17 Baromedi Ltd. Hyperbaric chamber
EP2220411B1 (de) * 2007-12-11 2012-03-21 Isentropic Limited Ventil
KR100978831B1 (ko) * 2008-08-20 2010-08-30 (주)에이알텍 환경시험기용 챔버의 슬라이딩 도어 구조
KR101096132B1 (ko) 2010-02-18 2011-12-20 세메스 주식회사 진공 챔버의 도어 장치 및 그것을 갖는 기판 처리 장치
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
KR101019270B1 (ko) * 2010-11-15 2011-03-07 김준범 작업성이 양호한 진공성형장치
CN104421437B (zh) * 2013-08-20 2017-10-17 中微半导体设备(上海)有限公司 活动阀门、活动屏蔽门及真空处理系统
CN106462084B (zh) * 2014-05-07 2018-10-19 迈普尔平版印刷Ip有限公司 用于目标处理机械的封闭件
CN104441914A (zh) * 2014-12-22 2015-03-25 中国电子科技集团公司第二研究所 矩形薄壳除泡腔体的密封机构
EP3239567A1 (de) * 2016-04-27 2017-11-01 VAT Holding AG Torventil mit kurvenführung
HK1216973A2 (zh) * 2016-06-03 2016-12-09 香港中華煤氣有限公司 管道關閉裝置
DE102019001115A1 (de) 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
CN110131456B (zh) * 2019-05-23 2020-06-23 华霆（合肥）动力技术有限公司 阀门、电池包及电动车
GB2586047B (en) * 2019-07-31 2022-05-25 Thermo Fisher Scient Bremen Gmbh A sliding door assembly for an ICP torch box
CN113457753B (zh) * 2021-06-29 2022-07-05 中国人民解放军陆军军医大学第一附属医院 一种便移生物安全柜

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1172058B (de) * 1962-05-02 1964-06-11 Teves Kg Alfred Klimapruefschrank
CH420758A (de) * 1963-04-02 1966-09-15 Schertler Siegfried Absperrschieber
GB1089272A (en) * 1964-06-08 1967-11-01 Edwards High Vacuum Int Ltd Improvements in or relating to gate valves
CH420759A (de) * 1965-03-03 1966-09-15 Schertler Siegfried Absperrschieber, insbesondere für Gas- und Vakuumleitungen
US4535967A (en) * 1984-01-05 1985-08-20 Joy Manufacturing Company Expanding gate valve with fluid-powered actuator
US4694390A (en) * 1985-06-28 1987-09-15 Electric Power Research Institute, Inc. Microprocessor-based control and diagnostic system for motor operated valves
US5186594A (en) * 1990-04-19 1993-02-16 Applied Materials, Inc. Dual cassette load lock
FR2672099B1 (fr) * 1991-01-25 1993-04-09 Cit Alcatel Vanne.
US5667197A (en) * 1996-07-09 1997-09-16 Lam Research Corporation Vacuum chamber gate valve and method for making same
US6056267A (en) * 1998-05-19 2000-05-02 Applied Materials, Inc. Isolation valve with extended seal life
US6214292B1 (en) * 1998-07-01 2001-04-10 Jose Maria Las Navas Garcia Sample auto-loader for use with an analytical combustion furnace
AU2001273666A1 (en) * 2000-07-07 2002-01-21 Applied Materials, Inc. Automatic door opener
DE10144955B4 (de) * 2001-09-12 2006-06-29 Asys Automatic Systems Gmbh & Co. Kg Vorrichtung zum Beschicken von Mikrosystemen

Also Published As

Publication number Publication date
BRPI0514321A (pt) 2008-06-10
CN101014406A (zh) 2007-08-08
CA2576367A1 (en) 2006-02-16
TW200606321A (en) 2006-02-16
CN101014406B (zh) 2011-07-13
EP1778391A1 (de) 2007-05-02
JP2008509359A (ja) 2008-03-27
US20060033061A1 (en) 2006-02-16
KR101186715B1 (ko) 2012-09-27
TWI390102B (zh) 2013-03-21
KR20070074548A (ko) 2007-07-12
WO2006015505A1 (de) 2006-02-16

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