WO2006012141A1 - Matrice de brassage a grand nombre d'acces, strictement non bloquante, plane, a difference relative d'indice ultra-elevee - Google Patents

Matrice de brassage a grand nombre d'acces, strictement non bloquante, plane, a difference relative d'indice ultra-elevee Download PDF

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Publication number
WO2006012141A1
WO2006012141A1 PCT/US2005/022063 US2005022063W WO2006012141A1 WO 2006012141 A1 WO2006012141 A1 WO 2006012141A1 US 2005022063 W US2005022063 W US 2005022063W WO 2006012141 A1 WO2006012141 A1 WO 2006012141A1
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WO
WIPO (PCT)
Prior art keywords
switch matrix
branch
switches
waveguide
planar switch
Prior art date
Application number
PCT/US2005/022063
Other languages
English (en)
Inventor
Louay Eldada
Fujita Junichiro
Original Assignee
E.I. Dupont De Nemours And Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/879,264 external-priority patent/US20050157975A1/en
Application filed by E.I. Dupont De Nemours And Company filed Critical E.I. Dupont De Nemours And Company
Publication of WO2006012141A1 publication Critical patent/WO2006012141A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1223—Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material
    • G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/066—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide channel; buried

Definitions

  • the present invention is directed to highly integrated lightwave circuits made from ultrahigh-index-contrast materials. Specifically the present invention is directed to optical switch arrays and means for their fabrication.
  • the switch arrays of both Goth et al and Okuno et al are based upon the thermo-optic effect in a Mach-Zehnder interferometer configuration.
  • the size of switching matrices implemented in silica on a silicon substrate is limited by the refractive index contrast that may be readily achieved in silica, which is at most around 4%.
  • the present invention provides a planar switch matrix comprising a waveguide layer and an electrode layer, the waveguide layer comprises a plurality of 1x2 Y-branch thermo ⁇ optic digital optical switches, each said Y-branch comprises a buried channel waveguide exhibiting a refractive index contrast of greater than 5%, the electrode layer comprises a plurality of electrodes, each electrode being disposed on the cladding layer of said buried channel waveguide, two thus disposed electrodes per Y-branch.
  • the present invention further provides a method for performing an optical switching function, the method comprising
  • planar switch matrix comprising a waveguide layer and an electrode layer, the waveguide layer comprising a plurality of 1x2 Y-branch thermo- optic digital optical switches, each said Y-branch comprising a buried channel waveguide exhibiting a refractive index contrast of greater than 5%, the electrode layer comprising a plurality of electrodes, each electrode being disposed on the cladding layer of said buried channel waveguide, two thus disposed electrodes per Y-branch.
  • FIGURES Figure 1 depicts 20 stages of 2,095,104 1x2 switches which make up a 1024x1024 strictly non-blocking cross-connect switch matrix of the invention.
  • Figure 2 depicts a 2x2 MMl-based thermo-optic switch for a 30% index contrast in (a) the bar state and (b) the cross state.
  • Figure 3 depicts top and side views of multi-level optical interconnects used to minimize chip dimensions and eliminate the excess loss at waveguide crossings.
  • switching matrices of as high as 1024x1024 arrays have been simulated by utilizing index contrasts as high as 30%.
  • a 1024x1024 optical switch matrix was simulated which measured
  • an index contrast of at least 5% and preferably about 30% is provided in a buried-channel configuration, enabling ultra-high confinement of the optical mode and ultra-small radii of curvature in bends.
  • polymeric materials having a 30% contrast in refractive index are employed to form buried channel waveguide, which is key to the fabrication of the planar lightwave circuit components of the switch of the present invention. Since the utilization of the thermo-optic effect for optical switching purposes requires the deposition of electrodes on the surface of the waveguide, only a buried channel waveguide, as opposed to an air-clad waveguide, is suitable for use.
  • thermo- optic Y-branch digital optical switches as the smallest building block
  • RTS Recursive Tree Structure
  • both insertion loss and cross-talk in the array of Figure 1 will depend upon the path the given optical signal follows since different paths through the matrix have different lengths and different numbers of crossings.
  • the lowest loss and lowest crosstalk is associated with the 1-to-1 and 1024-to-1024, which are the shortest paths and do not include any crossings.
  • the longest paths, 1-to- 1024 and 1024-to-1 , with 3,047 crossings, would be expected to exhibit larger insertion loss and more cross talk.
  • the design of the switch matrix of the invention is based upon the use of (I) straight waveguides, (ii) bends, (iii) crossings, and (iv) 1x2 Y-branch thermo-optic digital optic switches.
  • these building blocks are characterized and optimized individually, the well-known principals of superposition can be used to accurately predict the behavior of the entire switching circuit.
  • the goal is a switch matrix that is characterized over-all as exhibiting insertion loss in the range of 0.01 to 0.2 dB/cm at 1550 nm wavelength, cross-talk suppression in the range of -40 to -60 dB, and power consumption by the thermo-optic switch of 20 to 5OmW per heater.
  • the switch matrix of the present invention comprises a waveguide layer and an electrode layer.
  • the design rules in Table 1 define the waveguide layer parameters of the switch matrix of the present invention.
  • the electrode layer provides local heating for the thermo-optic actuation of the switches.
  • Each digital optical switch (1x2 Y-branch) is provided with two heaters according to the present invention, each heater having two ] connections. Connecting to each heater individually would require 4,190,210 bond pads, including two grounds. Serializing all switching stages without losing functionality, through the use foveas, reduces this number. Consequently, the electrical part of the switch matrix includes 1 ,048,578 signal connections and two common grounds. As a result of the space needed to route the electrode leads connecting heaters and bond pads, the middle wiring stage needs to be extended.
  • each of the 2x2 Y-branch-based switches is replaced with a 2 ⁇ 2 multimode interference (MMI) switch (see Fig. 2), and the switching submatrices are staggered to decrease the chip length.
  • MMI multimode interference
  • the result is a 1024x1024 switch matrix having dimensions of 4.2x6.3 cm 2 , allowing four such complex structures to fit on a standard 6" silicon wafer.
  • multi- level optical interconnects are utilized (see Fig. 3) to minimize chip dimensions and eliminate the excess loss at waveguide crossings.
  • Fabrication of the switch matrix of the invention may be accomplished according to any means known in the art. Suitable methods include, but are not necessarily limited to, mask lithography, phase mask lithography, laser direct writing, and electron beam direct writing.
  • the trenches are preferably fabricated using Excimer laser ablation or electron beam direct writing followed by reactive ion etching.
  • an incoming optical signal is coupled to a first switch in the planar switch matrix of the invention.
  • the other switches in the matrix will be set “on” or “off by employing the thermo-optic effect in order to create the desired "route” of the incoming light signal from switch to switch through the switching matrix and output through the desired switch.
  • the instant invention is not limited to a specific class of materials to be employed in the invention but rather by the differences in the refractive indices thereof and their mutual compatibility in the fabrication process.
  • a preferred embodiment of the present invention employs organic polymers in the thermo-optically controlled waveguide structures. Organic polymers are well known to exhibit a large thermo-optic coefficient.
  • Low refractive index polymers suitable for use as cladding in a preferred embodiment of the present invention include but are not limited to copolymers of tetrafluoroethylene and 4,5-difluoro-2,2-bis(trifluoromethyl)-1 ,3-dioxole (refractive index of 1.28 at 1550 nm) and polyhexafluoropropylene (refractive index of 1.32 at 1550 nm).
  • High refractive index polymers suitable for use as the core in a preferred embodiment of the present invention include but are not limited to polystyrene (refractive index of 1.59 at 1550 nm), polycarbonate (refractive index of 1.59 at 1550 nm), poly(o-chlorostyrene)(refractive index of 1.61 at 1550 nm, polyamide-imide (refractive index of 1.64 at 1550 nm), and poly(9-vinyl carbazole) (refractive index of 1.68) at 1550 nm).
  • inorganic waveguide materials that exhibit large differences in refractive index.
  • Such materials include a waveguide structure wherein silicon nitride is employed for the waveguide core and silicon dioxide for the cladding. These two materials exhibit an index contrast of about 30%.
  • Waveguide properties can be specifically tailored by adjusting the index contrast for optimum performance in a given application. This is readily accomplished for index contrast values below 30%, by forming a core composition that is an alloy of silicon nitride and silicon dioxide, a material known as silicon oxynitride.
  • a preferred fabrication method involves the use of two photosensitive liquid monomers, CL and CO, to form optical waveguides.
  • CL is used for the waveguide clad and CO is used for the waveguide core.
  • the refractive index of CL is lower than the refractive index of CO.
  • - CL is cured by blanket exposure under a UV lamp, the full layer polymerizes and solidifies.
  • - CO is spin-coated on top of the cured CL.
  • - CO is developed with an organic solvent, leaving free-standing structures that represent the waveguide cores.
  • - CL is spin-coated on top of the cured CL/CO on the wafer.
  • - CL is cured by blanket exposure under a UV lamp, the full layer polymerizes and solidifies, resulting in buried-channel waveguides where the CO cores are fully surrounded by CL.
  • - Sputtering is used to deposit metal on the polymer.
  • Photolithography is used to pattern the metal and form heaters and the base of interconnects and wire bond pads.
  • Electroplating is used to plate up the wire bond pads and electrical interconnects leading from the bond pads to the heaters.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

L'invention concerne des circuits à ondes lumineuses hautement intégrés, constitués de matériaux présentant une différence relative d'indice ultra-élevée. L'invention porte plus spécifiquement sur des matrices de commutation optique et des moyens permettant la production de celles-ci.
PCT/US2005/022063 2004-06-29 2005-06-21 Matrice de brassage a grand nombre d'acces, strictement non bloquante, plane, a difference relative d'indice ultra-elevee WO2006012141A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/879,264 US20050157975A1 (en) 2004-01-20 2004-06-29 Ultrahigh index contrast planar strictly non-blocking high-port count cross-connect switch matrix
US10/879,264 2004-06-29

Publications (1)

Publication Number Publication Date
WO2006012141A1 true WO2006012141A1 (fr) 2006-02-02

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5263111A (en) * 1991-04-15 1993-11-16 Raychem Corporation Optical waveguide structures and formation methods
CA2306325A1 (fr) * 1999-04-30 2000-10-30 Jds Uniphase Inc. Coupleur thermo-optique a interference multimode
DE10054370A1 (de) * 2000-10-30 2002-05-16 Infineon Technologies Ag Optisches Verteilerelement
WO2002044777A1 (fr) * 2000-11-28 2002-06-06 Redfern Integrated Optics Pty. Ltd. Compensateur de phase thermo-optique a consommation reduite

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5263111A (en) * 1991-04-15 1993-11-16 Raychem Corporation Optical waveguide structures and formation methods
CA2306325A1 (fr) * 1999-04-30 2000-10-30 Jds Uniphase Inc. Coupleur thermo-optique a interference multimode
DE10054370A1 (de) * 2000-10-30 2002-05-16 Infineon Technologies Ag Optisches Verteilerelement
WO2002044777A1 (fr) * 2000-11-28 2002-06-06 Redfern Integrated Optics Pty. Ltd. Compensateur de phase thermo-optique a consommation reduite

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
ELDADA L: "TELECOM OPTICAL COMPONENTRY: PAST, PRESENT, FUTURE", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 4604, 9 November 2001 (2001-11-09), pages 1 - 15, XP001183539, ISSN: 0277-786X *
LOUAY ELDADA: "Polymer microphotonics", PROCEDINGS OF THE SPIE-NANO AND MICRO-OPTICS FOR INFORMATION SYSTEMS, vol. 5225, no. 1, 3 August 2003 (2003-08-03), SAN DIEGO, CA, USA, pages 49 - 60, XP002332425 *
NAITO T ED - SAWCHUCK A A (ED) OPTICAL SOCIETY OF AMERICA / INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS: "Seamless ultra-wide-band transmission technologies", OPTICAL FIBER COMMUNICATION CONFERENCE. (OFC). POSTCONFERENCE DIGEST. ATLANTA, GA, MARCH 23 - 28, 2003, TRENDS IN OPTICS AND PHOTONICS SERIES. (TOPS), WASHINGTON, DC : OSA, US, vol. TOPS. VOL. 86, 23 March 2003 (2003-03-23), pages 326 - 327, XP010680100, ISBN: 1-55752-746-6 *
RABBERING F L W ET AL: "Polymeric 16x16 digital optical switch matrix", OPTICAL COMMUNICATION, 2001. ECOC '01. 27TH EUROPEAN CONFERENCE ON SEPT. 30 - OCT. 4, 2001, PISCATAWAY, NJ, USA,IEEE, vol. 6, 30 September 2001 (2001-09-30), pages 78 - 79, XP010582885, ISBN: 0-7803-6705-7 *

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