WO2006006240A1 - Dispositif réflecteur - Google Patents

Dispositif réflecteur Download PDF

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Publication number
WO2006006240A1
WO2006006240A1 PCT/JP2004/010032 JP2004010032W WO2006006240A1 WO 2006006240 A1 WO2006006240 A1 WO 2006006240A1 JP 2004010032 W JP2004010032 W JP 2004010032W WO 2006006240 A1 WO2006006240 A1 WO 2006006240A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
cell
reference cell
reflecting mirror
support mechanism
Prior art date
Application number
PCT/JP2004/010032
Other languages
English (en)
Japanese (ja)
Inventor
Takeharu Oshima
Noboru Ito
Original Assignee
Mitsubishi Denki Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Denki Kabushiki Kaisha filed Critical Mitsubishi Denki Kabushiki Kaisha
Priority to EP04747498A priority Critical patent/EP1767972B1/fr
Priority to PCT/JP2004/010032 priority patent/WO2006006240A1/fr
Priority to US10/569,272 priority patent/US7232232B2/en
Priority to JP2006524533A priority patent/JP4283311B2/ja
Publication of WO2006006240A1 publication Critical patent/WO2006006240A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
    • G02B23/06—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors having a focussing action, e.g. parabolic mirror

Definitions

  • This invention is used in large telescopes that receive observation light from celestial bodies, millimeter waves, and submillimeter waves to observe celestial bodies, and support the mirror surface of a reflecting mirror composed of a plurality of split mirrors with high accuracy.
  • the present invention relates to a reflector apparatus.
  • the reflector part in the telescope system is mainly a single mirror when the aperture diameter is several meters.
  • a reflector with an aperture diameter of several tens of meters or more has a manufacturing problem with a single mirror. Therefore, a plurality of divided mirrors (hereinafter referred to as divided mirrors) are combined into one Techniques for constructing reflectors have been developed.
  • Japanese Patent Application Laid-Open No. 2003-186441 which is a Japanese patent application, shows a conventional reflecting mirror device.
  • the reflector apparatus disclosed in Japanese Patent Laid-Open No. 2003-188641 constitutes one reflector by arranging a plurality of split mirrors, and these split mirrors are back structures that are support structures. It is supported by the structure via an actuator.
  • the deformation of the back structure due to the pressure of the blown wind and the deformation of the back structure caused by the temperature distribution have had the problem that the mirror surface accuracy of the reflecting mirror composed of the split mirrors deteriorates.
  • the deformation that occurs in the back structure in this way is not only the mode deformation that occurs in the entire structure, but may also be locally deformed nonuniformly, and cannot be removed by techniques such as shape maintenance control based on mode deformation estimation. There was also a problem that the mirror surface accuracy of the reflector deteriorated due to local displacement of the reflector.
  • Patent Document 1 Japanese Patent Laid-Open No. 2003-188641 Disclosure of the invention
  • the present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a reflecting mirror device that supports the mirror surface of a reflecting mirror composed of a plurality of split mirrors with high accuracy. Means to solve the problem
  • a reflecting mirror device includes a reflecting mirror formed by arranging a plurality of split mirrors, a mirror cell that supports the reflecting mirror, and a structure provided between the reflecting mirror and the mirror cell. And a reference cell serving as a reference surface for position control of the reflecting mirror. Further, three reference cell support mechanisms are provided between the reference cell and the mirror cell, and the reference cell support mechanism restrains the reference cell in the axial direction and the circumferential direction of the reflector. . Furthermore, a force support mechanism for canceling the self-weight deformation of the reference cell is provided between the reference cell and the mirror cell, and the force support mechanism is an axial provided at a fulcrum on the mirror cell. It shall be equipped with a lateral rod with this end as a fulcrum and one end connected to the reference cell.
  • each cell of the Hercam structure includes a sub mirror cell that supports a plurality of split mirrors. Further, an actuator for positioning the split mirror is provided between the sub mirror cell and the split mirror.
  • a fluid support mechanism for supporting the reference cell is provided between the reference cell and the mirror cell.
  • a reflecting mirror device includes a reflecting mirror formed by arranging a plurality of divided mirrors, a mirror cell that supports the reflecting mirror, and a structure provided between the reflecting mirror and the mirror cell. And a reference cell serving as a reference surface for position control of the reflecting mirror.
  • a reference cell serving as a reference surface for position control of the reflecting mirror.
  • a force support mechanism for canceling the self-weight deformation of the reference cell is provided between the reference cell and the mirror cell, and the force support mechanism is an axial provided at a fulcrum on the mirror cell. It shall be equipped with a lateral rod with the end of this axial lever as a fulcrum and one end connected to the reference cell.
  • each cell of the Harcam structure includes a sub mirror cell that supports a plurality of split mirrors.
  • each cell of the Harcam structure includes a sub mirror cell that supports a plurality of split mirrors.
  • a fluid support mechanism for supporting the reference cell is provided between the reference cell and the mirror cell.
  • FIG. 1 is a configuration diagram showing a configuration of a reflecting mirror device according to Embodiment 1 of the present invention.
  • FIG. 2 is a configuration diagram showing a configuration of a reference cell of the reflecting mirror device according to Embodiment 1 of the present invention.
  • FIG. 3 is a configuration diagram showing an example of a configuration of a fixed support mechanism according to Embodiment 1 of the present invention.
  • FIG. 4 is a configuration diagram showing an example of a configuration of a force support mechanism according to Embodiment 1 of the present invention.
  • FIG. 5 is a configuration diagram showing a configuration of a reflecting mirror device including a control system according to Embodiment 1 of the present invention.
  • FIG. 6 is a configuration diagram showing a configuration of a reflecting mirror device according to Embodiment 2 of the present invention.
  • FIG. 7 is a configuration diagram showing a configuration of a fluid pressure support mechanism of a reflecting mirror device according to Embodiment 2 of the present invention.
  • FIG. 1 is a configuration diagram of a reflecting mirror device according to a first embodiment.
  • FIG. 1 (a) is a front view of the reflecting mirror device
  • FIG. 1 (b) is a side view of the reflecting mirror device.
  • 1 is a dividing mirror, and a plurality of dividing mirrors 1 are laid on a reflecting mirror surface (for example, on a parabolic surface or a surface after the mirror surface correction).
  • 2 is a cluster mirror formed by a plurality of split mirrors 1 (area surrounded by a thick line in FIG. 1).
  • one split mirror 1 is formed by 19 split mirrors 1 and 18
  • the cluster mirror 2 forms a reflecting mirror.
  • the split mirror 1 is grouped with the cluster mirror 2 as one unit, and the sub-mirror cell provided for each cluster mirror 2 Support by 3.
  • Cluster mirror 2 and sub-mirror cell 3 as a group are called a cluster, and 4 is assigned.
  • Reference numeral 5 denotes a mirror cell that supports a plurality of sub-mirror cells 3. Therefore, the split mirror 1 is grouped with the cluster 4 as one unit and supported by the submirror cell 3 as a structure, and the plurality of submirror cells 3 are supported by the mirror cell 5 as a structure. The split mirror 1 is finally supported by the mirror cell 5.
  • FIG. 2 is a configuration diagram for the reference cell of the reflecting mirror device according to the first embodiment.
  • Reference numeral 7 denotes a fixing support mechanism that is provided in the mirror cell 5 and fixes the reference cell 6.
  • Reference numeral 8 denotes a force support mechanism that is provided in the mirror cell 5 and supports the reference cell 6 in a weightless state.
  • the fixed support mechanism 7 is provided at three locations of the reference cell 6, and each fixed support mechanism 7 is a mechanism that restrains two degrees of freedom, and the axial direction of the reflector and the circle with respect to the center of the reference cell Restrain the circumferential direction.
  • the reference cell 6 is positioned in the space with the mirror cell 5 as a reference by the fixed support mechanism 7 with two degrees of freedom constrained provided at three locations as described above. Since the restraint of the reference cell 6 by the fixed support mechanism 7 should not be over-restraint, the internal deformation of the reference cell 6 caused by the restraint by the fixed support mechanism 7 is suppressed. In the case where the position of the reflecting mirror device changes due to a change in the observation direction, that is, when the position of the mirror cell 5 changes, the position of the reference cell 6 changes accordingly.
  • the force support mechanism 8 suppresses its own weight deformation due to the posture change of the reference cell 6.
  • the reference cell 6 is supported in a substantially weightless state by a plurality of force support mechanisms 8 provided in the mirror cell 5.
  • the reference cell 6 is light and has a structure that can be handled as a rigid body as a whole, and FIG. 2 shows the reference cell 6 having a no-cam structure.
  • the reference cell 6 may be a triangular truss structure, for example.
  • the reference cell 6 is reduced in weight.
  • the fixed support mechanism 7 and the force support mechanism 8 are reduced in size and weight, and the mirror cell 5 is reduced in weight.
  • the entire reflector can be reduced in weight.
  • the plurality of force support mechanisms 8 are provided at nodes (points with black dots) of the hard cam structure, but by arranging the force support mechanisms 8 at appropriate intervals, It is possible to thin out.
  • the surface of the reference cell 6 (axial of the reflector)
  • the surface perpendicular to the axis) can be used as a reference plane for controlling the position of the split mirror 1 and the cluster mirror 2 in the axial direction of the reflecting mirror, since the unevenness in the axial direction of the reflecting mirror caused by the deformation of its own weight is suppressed.
  • the reference cell 6 also has the above-described deformation caused by the wind force that the mirror cell 5 is subjected to external force and the temperature distribution generated in the mirror cell 5 as well as by its own weight deformation accompanying the change in the attitude of the reflector device.
  • the reference cell 6 through which the deformation is difficult to be transmitted can be handled as a substantially rigid body, and can be used as a reference plane for position control of the split mirror 1 and the cluster mirror 2 in the axial direction of the reflecting mirror. Since the reference cell 6 is located between the mirror cell 5 and the reflecting mirror, it is also a feature of the present invention that it is difficult to receive external wind force or heat input.
  • FIG. 3 is a configuration diagram showing an example of the configuration of the fixed support mechanism 7.
  • 9 is a support base fixed to the mirror cell 5
  • 10 is a spherical bearing provided on the support base 9
  • 11 is a linear guide provided between the spherical bearing 10 and the reference cell 6.
  • the fixed support mechanism 7 can be constituted by the support base 9, the spherical bearing 10 and the linear guide 11.
  • This fixed support mechanism 7 constrains three degrees of freedom of translation by means of a spherical bearing 10, and one of the degrees of freedom is released by the linear guide 11, so after all, the reference cell 6 is translated by two degrees of freedom by one fixed support mechanism. You will be restrained.
  • the direction of the translational two degrees of freedom to be constrained is the reflector axial direction and the circumferential direction with respect to the center of the reference cell 6.
  • the fixed support mechanism 7 that restricts the two degrees of freedom of translation as described above is not limited to that shown in FIG.
  • FIG. 4 is a configuration diagram showing an example of the configuration of the force support mechanism 8.
  • 12 is a support base provided in the mirror cell 5
  • 13 is an axial lever provided with the support base 12 as a fulcrum
  • 14 is an axial counterweight provided at one end of the axial lever 13
  • 15 is A lateral lever having the other end of the axial lever 13 as a fulcrum
  • 16 is a lateral counterweight provided at one end of the lateral lever 15.
  • the other end of the lateral lever 15 is connected to the axial center of gravity position in the reference cell 6.
  • the axial counterweight 14, the lateral counterweight 16, and the reference cell 6 are balanced in the plane of the reflector in the axial and lateral directions.
  • Each weight distribution and positional relationship are set so as to establish the relationship. This balance relationship is established even when the mirror cell 5 and the reference cell 6 are tilted, and it is possible to obtain a state in which the reference cell 6 is supported in a no-load state.
  • FIG. 5 is a configuration diagram showing the configuration of the reflecting mirror device including the control system according to Embodiment 1 of the present invention.
  • 17 is a cluster position sensor that is provided in the reference cell 6 and measures the axial position of the reflector mirror between the reference cell 6 and the outer periphery of one cluster mirror 2, and 18 is provided in the submirror cell 3.
  • This is a split mirror position sensor that measures the reflector axial position between cell 3 and split mirror 1.
  • Reference numeral 19 denotes an actuator that is provided on the sub-mirror cell 3 and changes the position of each split mirror 1 in the axial direction of the reflecting mirror.
  • 20 is a cluster mirror controller that receives position information from the cluster position sensor 17 and commands a position control value for each cluster mirror 2.
  • 21 is a cluster mirror controller. This is a split mirror control device that commands a control value to the actuator 19 on the basis of the addition with the position information.
  • Reference numeral 22 denotes an external input terminal for inputting an external command value to the cluster mirror control device 20.
  • the reference cell 6 maintains a stable shape with respect to changes in the mirror attitude, external wind pressure, and heat input. Therefore, the split cell 1 and the reference mirror 6 are used as a reference. Controls the position of the mirror mirror 2 in the axial direction.
  • the reference cell 6 has a Hercam structure, and a sub-mirror cell 3 is arranged in each Hercam cell. Each submirror cell 3 has a support structure provided corresponding to each cluster mirror 2.
  • Reflector mirror axial position control of the split mirror 1 measures the positional relationship between each split mirror 1 and the reference cell 6, and controls each split mirror based on the positional deviation calculated based on the position measurement results. As shown in Fig.
  • the cluster mirror control device 20 calculates the representative position of each cluster mirror 2 in the axial direction of the reflecting mirror based on the position measurement by the cluster position sensor 17 provided on the outer periphery of each cluster mirror 2.
  • the representative positions to be calculated are clusters located in the periphery of each cluster mirror 2.
  • the representative position of each cluster mirror 2 is represented by a plurality of position measurement values.
  • the cluster mirror control device 20 calculates how much the surface shape of the entire reflecting mirror is displaced in the reflecting mirror axial direction based on the calculated reflecting mirror axial position of each cluster mirror 2. be able to.
  • the cluster mirror control device 20 outputs a command value to the actuator 19 so as to remove this positional deviation.
  • the actuator 19 corresponding to the cluster mirror position sensor 17 disposed on the outer periphery of each cluster mirror 2 is operated to set the axial direction position of the split mirror 1 positioned on the outer periphery of each cluster mirror 2 to a desired value. Operate the actuator so that it is positioned.
  • the split mirror 1 located inside each cluster mirror 2 is controlled based on the axial position measurement value by the split mirror position sensor 18.
  • the cluster mirror control device 20 outputs position control command values to each split mirror 1 in each cluster mirror 2 when performing position control to each cluster mirror 2, and this command value and split mirror position sensor 18
  • the axial position measurement value obtained by the above is added and input to the split mirror control device 21.
  • the split mirror control device 21 controls the actuator 19 by giving a command value so that the axial position force of each split mirror 1 becomes the above position control command value.
  • FIG. 6 is a configuration diagram of the reflecting mirror device according to the second embodiment.
  • reference numeral 23 denotes a fluid pressure support mechanism.
  • This fluid pressure support mechanism 23 is provided in the mirror cell 5 and supports the reference cell 6 by fluid pressure.
  • a plurality of fluid pressure support mechanisms 23 are arranged in the mirror cell 5 so as to support each node of the reference cell 6.
  • the mirror cell 5, reference cell 6 and fluid pressure support mechanism 23 shown in FIG. 6 replace the mirror cell 5, reference cell 6, force support mechanism 8, and fixed support mechanism 7 not shown in FIG.
  • a mirror device may be configured. Also in the reflector device with this configuration, as in the first embodiment, by performing control by the cluster position sensor 17, the split mirror position sensor 18, the actuator 19, the cluster mirror control device 20, and the split mirror control device 21, It is possible to control the position of the reflector.
  • FIG. 7 is a configuration diagram showing the configuration of the fluid support mechanism 23 of the reflecting mirror device according to the second embodiment. It is. 24 is an axial bellows that supports the reference cell 6 in the axial direction, 25 is an axial pipe that connects to the axial bellows 24, 26 is a lateral bellows that supports the reference cell 6 in the lateral direction, and 27 is connected to the lateral bellows 26. Lateral piping. In FIG. 6, the axial bellows 24 is divided into three systems, and each system is connected by an axial pipe 25 shown in FIG. These three axial pipes are labeled 25A, 25B, and 25C in Fig. 6.
  • the pressure in the axial bellows 24 is the same, and the support reaction force for supporting the reference cell 6 in the reflector axial direction is constant.
  • the reference cell 6 is restrained from the axial translational direction of the reflector and the rotation about two axes in the reference cell plane.
  • the reference cell 6 is also supported by the lateral bellows 26 and restrains the uniaxial translational direction (lateral direction shown in FIG. 6: the vertical direction in FIG. 6) in the plane of the reference cell 6.
  • FIG. 7 by a bellows (not shown), the uniaxial translational direction in the plane of the reference cell 6 (direction perpendicular to the lateral direction shown in FIG. 6: the horizontal direction in FIG.
  • the present invention can be applied to an optical and radio telescope device provided with a reflecting mirror and a communication antenna device provided with a reflecting mirror for the purpose of communication.

Abstract

L’invention décrit un dispositif réflecteur, dans lequel dispositif des miroirs divisés (1) sont regroupés dans l’unité de cluster (4), et supportés par des sous-cellules miroirs (3) sous forme de corps structurels. La pluralité de sous-cellules miroirs (3) est supportée par une cellule miroir (5) sous forme de corps structurel, et tous les miroirs divisés (1) sont finalement supportés par la cellule miroir (5). Les cellules de référence (6) sont supportées par une pluralité de mécanismes de support résistants installés dans la cellule miroir (5) dans un état généralement dépourvu de gravité pour supprimer les renfoncements axiaux et les protubérances sur un réflecteur provoqués par la déformation sous son propre poids et peuvent être utilisées comme plan de référence pour contrôler les positions axiales des réflecteurs des miroirs divisés (1) et des miroirs en cluster (2).
PCT/JP2004/010032 2004-07-14 2004-07-14 Dispositif réflecteur WO2006006240A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP04747498A EP1767972B1 (fr) 2004-07-14 2004-07-14 Appareil à miroir réfléchissant
PCT/JP2004/010032 WO2006006240A1 (fr) 2004-07-14 2004-07-14 Dispositif réflecteur
US10/569,272 US7232232B2 (en) 2004-07-14 2004-07-14 Reflector device
JP2006524533A JP4283311B2 (ja) 2004-07-14 2004-07-14 反射鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/010032 WO2006006240A1 (fr) 2004-07-14 2004-07-14 Dispositif réflecteur

Publications (1)

Publication Number Publication Date
WO2006006240A1 true WO2006006240A1 (fr) 2006-01-19

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ID=35783606

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/010032 WO2006006240A1 (fr) 2004-07-14 2004-07-14 Dispositif réflecteur

Country Status (4)

Country Link
US (1) US7232232B2 (fr)
EP (1) EP1767972B1 (fr)
JP (1) JP4283311B2 (fr)
WO (1) WO2006006240A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9016879B2 (en) 2012-03-14 2015-04-28 Mitsubishi Electric Corporation Primary mirror support structure and telescope unit
JP2020160355A (ja) * 2019-03-27 2020-10-01 三菱電機株式会社 連結機構および反射鏡装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009007447A2 (fr) * 2007-07-11 2009-01-15 Universite Libre De Bruxelles Miroir déformable
DE102013204305A1 (de) * 2013-03-13 2014-09-18 Carl Zeiss Smt Gmbh Anordnung zur Aktuierung wenigstens eines Elementes in einem optischen System
US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror

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Publication number Priority date Publication date Assignee Title
US4775230A (en) * 1986-12-10 1988-10-04 Carl-Zeiss-Stiftung Support system for a telescope mirror
US5592336A (en) * 1994-12-20 1997-01-07 Mitsubishi Denki Kabushiki Kaisha Reflector supporting mechanism
JP2002182124A (ja) * 2000-12-13 2002-06-26 Mitsubishi Electric Corp 副鏡揺動装置
US20030112201A1 (en) * 2001-12-17 2003-06-19 Mitsubishi Denki Kabushiki Kaisha Mirror surface accuracy measuring device and mirror surface control system of reflector antenna
JP2003227986A (ja) * 2002-02-04 2003-08-15 Nikon Corp 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置

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US4218114A (en) * 1975-12-19 1980-08-19 Bunch Jesse C Heliostat apparatus
US4825062A (en) * 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system
FR2823573B1 (fr) * 2001-04-13 2003-08-08 Centre Nat Etd Spatiales Dispositif de montage et de correction de la position d'un miroir s'etendant dans l'ombre du miroir et systeme optique equipe de ce dispositif

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US4775230A (en) * 1986-12-10 1988-10-04 Carl-Zeiss-Stiftung Support system for a telescope mirror
US5592336A (en) * 1994-12-20 1997-01-07 Mitsubishi Denki Kabushiki Kaisha Reflector supporting mechanism
JP2002182124A (ja) * 2000-12-13 2002-06-26 Mitsubishi Electric Corp 副鏡揺動装置
US20030112201A1 (en) * 2001-12-17 2003-06-19 Mitsubishi Denki Kabushiki Kaisha Mirror surface accuracy measuring device and mirror surface control system of reflector antenna
JP2003227986A (ja) * 2002-02-04 2003-08-15 Nikon Corp 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9016879B2 (en) 2012-03-14 2015-04-28 Mitsubishi Electric Corporation Primary mirror support structure and telescope unit
JP2020160355A (ja) * 2019-03-27 2020-10-01 三菱電機株式会社 連結機構および反射鏡装置
JP7193397B2 (ja) 2019-03-27 2022-12-20 三菱電機株式会社 連結機構、反射鏡装置および支持ユニット
JP7361874B2 (ja) 2019-03-27 2023-10-16 三菱電機株式会社 支持ユニット

Also Published As

Publication number Publication date
US20060221473A1 (en) 2006-10-05
EP1767972A1 (fr) 2007-03-28
US7232232B2 (en) 2007-06-19
EP1767972B1 (fr) 2011-11-02
JPWO2006006240A1 (ja) 2008-04-24
EP1767972A4 (fr) 2009-07-01
JP4283311B2 (ja) 2009-06-24

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