WO2006000501A8 - Verfahren und vorrichtung zum vermessen des strahlprofils eines laserstrahls, laserbearbeitungsmaschine - Google Patents
Verfahren und vorrichtung zum vermessen des strahlprofils eines laserstrahls, laserbearbeitungsmaschineInfo
- Publication number
- WO2006000501A8 WO2006000501A8 PCT/EP2005/052246 EP2005052246W WO2006000501A8 WO 2006000501 A8 WO2006000501 A8 WO 2006000501A8 EP 2005052246 W EP2005052246 W EP 2005052246W WO 2006000501 A8 WO2006000501 A8 WO 2006000501A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- laser beam
- shading element
- detector
- measuring
- Prior art date
Links
- 238000003754 machining Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 238000006073 displacement reaction Methods 0.000 abstract 4
- 238000011156 evaluation Methods 0.000 abstract 2
- 238000009795 derivation Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004030607.9 | 2004-06-24 | ||
DE102004030607A DE102004030607A1 (de) | 2004-06-24 | 2004-06-24 | Verfahren und Vorrichtung zum Vermessen des Strahlprofils eines Laserstrahls, Laserbearbeitungsmaschine |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006000501A1 WO2006000501A1 (de) | 2006-01-05 |
WO2006000501A8 true WO2006000501A8 (de) | 2006-03-09 |
Family
ID=34967985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2005/052246 WO2006000501A1 (de) | 2004-06-24 | 2005-05-17 | Verfahren und vorrichtung zum vermessen des strahlprofils eines laserstrahls, laserbearbeitungsmaschine |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102004030607A1 (de) |
WO (1) | WO2006000501A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011006553B4 (de) * | 2011-03-31 | 2013-04-11 | Trumpf Laser Gmbh + Co. Kg | Verfahren zum Ermitteln der Fokuslage eines Laserstrahls in seinem Arbeitsfeld oder Arbeitsraum |
DE102017201794B4 (de) | 2017-02-06 | 2019-11-07 | Carl Zeiss Smt Gmbh | Prüfvorrichtung als Bestandteil eines Reflektometers zur Bestimmung einer Strahllage eines Lichtstrahls |
EP3450936A1 (de) | 2017-09-05 | 2019-03-06 | Renishaw PLC | Optische vorrichtung und optisches verfahren zur beurteilung des strahlprofils einer kontaktlosen werkzeugeinstellungsvorrichtung |
KR20210038953A (ko) * | 2018-08-09 | 2021-04-08 | 코닝 인코포레이티드 | 기계에서 레이저 빔의 프로파일링을 위한 시스템, 방법, 및 장치 |
DE102019207237A1 (de) * | 2019-05-17 | 2020-11-19 | Schäfer Werkzeug- und Sondermaschinenbau GmbH | Prüfeinrichtung |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58139034A (ja) * | 1982-02-15 | 1983-08-18 | Sony Corp | ビ−ム強度測定装置 |
JPS603529A (ja) * | 1983-06-21 | 1985-01-09 | Nec Corp | 光ビ−ム径の測定方法 |
JPS6316232A (ja) * | 1986-07-09 | 1988-01-23 | Hitachi Ltd | レ−ザビ−ム径の測定方法 |
US5004890A (en) * | 1990-02-20 | 1991-04-02 | Amada Company, Limited | Method of evaluating quality of a laser beam in a laser processing machine |
US5069527A (en) * | 1990-04-26 | 1991-12-03 | Coherent, Inc. | Apparatus for measuring the mode quality of a laser beam |
US6559934B1 (en) * | 1999-09-14 | 2003-05-06 | Visx, Incorporated | Method and apparatus for determining characteristics of a laser beam spot |
US6666855B2 (en) * | 1999-09-14 | 2003-12-23 | Visx, Inc. | Methods and systems for laser calibration and eye tracker camera alignment |
US6713718B1 (en) * | 2001-11-27 | 2004-03-30 | Vi Engineering, Inc. | Scoring process and apparatus with confocal optical measurement |
-
2004
- 2004-06-24 DE DE102004030607A patent/DE102004030607A1/de not_active Ceased
-
2005
- 2005-05-17 WO PCT/EP2005/052246 patent/WO2006000501A1/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE102004030607A1 (de) | 2006-02-02 |
WO2006000501A1 (de) | 2006-01-05 |
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