WO2005108916A1 - Instrument de mesure a coordonnees et procede de mesure de structures a l'aide de cet instrument de mesure a coordonnees - Google Patents

Instrument de mesure a coordonnees et procede de mesure de structures a l'aide de cet instrument de mesure a coordonnees Download PDF

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Publication number
WO2005108916A1
WO2005108916A1 PCT/EP2005/004062 EP2005004062W WO2005108916A1 WO 2005108916 A1 WO2005108916 A1 WO 2005108916A1 EP 2005004062 W EP2005004062 W EP 2005004062W WO 2005108916 A1 WO2005108916 A1 WO 2005108916A1
Authority
WO
WIPO (PCT)
Prior art keywords
probing
optical sensor
illumination device
coordinate measuring
probe
Prior art date
Application number
PCT/EP2005/004062
Other languages
German (de)
English (en)
Inventor
Ralf Christoph
Original Assignee
Werth Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik Gmbh filed Critical Werth Messtechnik Gmbh
Priority to DE112005000934.3T priority Critical patent/DE112005000934B4/de
Publication of WO2005108916A1 publication Critical patent/WO2005108916A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points

Definitions

  • the invention relates to a coordinate measuring apparatus comprising an optical sensor for measuring the structure of an object by illuminating with a lighting device and / or probing of the object with a probe extension and a probing form comprehensive probe. Furthermore, the invention relates to a method for measuring the structure of an object by means of a coordinate measuring apparatus comprising an optical sensor with which indirectly via a probe element and / or directly the structure of the object is measured using a lighting device.
  • Swing table is recorded ("multi-sensor coordinate metrology", publishing modern industry, Ralf Christoph and Hans Joachim Neumann).
  • multi-sensor coordinate metrology publishing modern industry, Ralf Christoph and Hans Joachim Neumann.
  • the holes aligned axially parallel to the so-called fiber probe and thus measured.
  • the disadvantage of this solution is that relatively large coordinate measuring machines are required to accommodate the complex rotary / tilting table.
  • a significant cost is required to move the entire part.
  • a probing element and an optical sensor are jointly adjustable.
  • the probing element to the optical sensor is rotational and optionally translationally adjustable.
  • the probing element is a star key, the is connected via a rotary / swivel joint with the bracket from the rigid video camera goes out.
  • the present invention is based on the problem of further developing a coordinate measuring machine and a method for measuring the structure of an object by means of a coordinate measuring device of the type mentioned above so that micro-features of objects can be measured without any problems, without requiring a structurally complex construction of the coordinate measuring machine is.
  • the invention firstly provides a coordinate measuring machine comprising an optical sensor for measuring the structure of an object by illuminating with a lighting device and / or probing the object with a probe element comprising a probe extension and a probing mold element, wherein the optical sensor as a unit with the illumination device and / or the probe element is rotatable and / or pivotable.
  • an optical sensor such as image processing sensor is mounted together with a probing element such as fiber probe or a lighting device on in particular a rotary / pivot joint, so that a common alignment is performed on a geometric feature to be measured in space, without pivoting the object to be measured required is.
  • the illumination device is a transmitted light illumination device or an incident light illumination device.
  • a transmitted light illumination device it preferably has an L-shaped holder that can be fastened to the measuring head.
  • a magnetic interface is used in particular.
  • the holder may have a first section which can be connected to the measuring head, at least one preferably web-shaped second section projecting therefrom, and a third section having a one or more light sources extending transversely thereto.
  • the first and third sections may be parallel to each other.
  • the transmitted-light illumination device can be positioned by means of a probe changing device in different rotational positions relative to the measuring head, that is to say to the optical sensor such as a camera. This ensures that the holder does not collide with the object to be measured.
  • the joint such as rotary / pivot joint, is fastened to one of the coordinate axes, in particular the Z axis of the coordinate measuring machine.
  • a laterally acting optical sensor such as image processing sensor is used.
  • acting laterally means measuring in a plane extending perpendicular to the optical Z axis of the optical sensor.
  • the optical sensor may also be referred to as.
  • Distance sensor used or a distance sensor can also be used.
  • the probing element or the illuminating device is detachably connected to the optical sensor or a housing accommodating the same.
  • the probing element or the illumination device is mechanically coupled to the optical sensor or the housing via a magnetic interface.
  • the probing element or the illumination device is connected to a measuring head having the optical sensor.
  • the illumination device can have light sources, such as LEDs, arranged on rings which run concentrically to one another. Furthermore, a plurality of light sources can be connected together to form an optical unit, so that the illumination device comprises a plurality of optical units which can be activated to the desired extent. For example, the units may form quadrants of the incident illumination unit. Furthermore, it is provided that a light source is mounted on the joint as rotary / swivel joint or the receptacle for the probing element, which is used to generate a self-illumination of the probing or Antastformieris as fiber probe.
  • the invention is also characterized by a method for measuring the structure of an object by means of a coordinate measuring apparatus comprising an optical sensor with which indirectly via a probe and / or directly the structure of the object is measured using a lighting device, wherein the optical sensor with the Lighting device and / or the probe element is rotated and / or pivoted as a unit.
  • a laterally acting optical sensor such as image processing sensor is used as an optical sensor.
  • the Antastformelement is further mechanically coupled to the optical sensor or a housing receiving this via a magnetic interface.
  • the illumination device and the probing element are interchangeable and in particular mechanically coupled to the measuring head via the magnetic interface.
  • the optical sensor measures structures of the object directly.
  • the optical sensor such as electronic camera in its position after the former has been brought into mechanical contact with a workpiece. Because either the probing element itself or the target, the immediate bar is connected to the probing element, is measured in the position, deformations of the probe receiving shaft have no effect on the measurement signal.
  • the elastic behavior of the shaft must be taken into account, nor can plastic deformation, hysteresis and drift phenomena of the mechanical coupling between the probe element and the sensor influence the measurement accuracy.
  • Deflections in the direction perpendicular to the sensor axis, such as the camera axis can be determined directly by shifting the image in a sensor field, in particular an electronic camera.
  • the evaluation of the image can be done with an already installed in a coordinate measuring machine image processing. This realizes a two-dimensional touch probe that can be easily coupled to an optical evaluation unit.
  • the deflection of the probe element in the direction of the sensor axis is measured by a focus system, as is already known in the optical coordinate metrology when focusing on the workpiece surface.
  • the contrast function of the image in the electronic camera is evaluated.
  • the deflection of the probe element in the direction of the sensor or camera axis is measured by the fact that the image size of a target mark is evaluated, so, for example, in a circular or annular target the change in diameter.
  • This effect is due to the radiation-optical imaging and can be specifically optimized by the design of the optical unit.
  • Coordinate metrology often uses so-called telecentric lenses, which are intended to realize a largely constant magnification even when deviating from the focal plane. This is achieved by moving the optical entrance pupil into the "infinite.” For the evaluation described above, one would be Optimization with reversed signs useful: Even a small deviation from the focal plane should result in a significant change in magnification.
  • a high depth of field should be realized, which allows a high-contrast imaging of the target over a relatively wide distance range.
  • An ideal optical unit in terms of its imaging properties would be for the application described above, for example, a pinhole camera.
  • the use of an annular target makes it possible to minimize size changes that result from blurring: The average ring diameter does not change to a first approximation by blurring, but only the ring width. Corresponding measuring methods also apply to the probing mold element itself.
  • the size change of the target mark is evaluated, however, which results from the combination of optical radiation resizing and the apparent magnification by blurred edges. Compared with the evaluation of the blurring function, this method makes use of the fact that the actual size of the target mark is unchangeable. The same applies to a measurement on the basis of the size change of the probing mold element itself.
  • the direct measurement of a probe element position is used to determine the structure of objects.
  • many different physical principles come into question for this direct measurement.
  • a photogrammetric method can be used.
  • Two camera systems with mutually inclined axes could be used.
  • the evaluation techniques known from industrial photogrammetry can be used. Further details, advantages and features of the invention will become apparent not only from the claims, the features to be taken from them-alone and / or in combination-but also from the following description of a preferred embodiment to be taken from the drawing.
  • 1 is a schematic diagram of a coordinate measuring machine
  • Fig. 2 is a schematic diagram of a Auflichtbeleuchtungs Surprise
  • Fig. 3 is a schematic diagram of a transmitted light illumination device.
  • a coordinate measuring device 10 is shown purely in principle.
  • the Koordinatenmessgerat 10 is executed in the embodiment in gantry design and has an existing example of granite base or base frame 12 with arranged on this measuring table 14, on which an object to be measured 15 is arranged.
  • a portal 16 is displaceable, which consists of columns 18, 20 and transversely to this extending cross member. From this is adjustable from a slide, from which in turn emanates a quill 24, which is adjustable along the Z-direction 26 and adjustable via the slide, not shown along X-axis 28 of the coordinate measuring machine.
  • the portal 16 itself is displaceable along the Y axis 30 of the coordinate measuring machine 10.
  • a rotary / pivot joint 32 with two degrees of freedom.
  • the rotary / pivot joint 32 is connected to a housing 34 of an optical sensor 35 such as image processing sensor, which is thus continuously rotatable / pivotable in space.
  • Housing 34 with sensor 35 may be referred to as a measuring head.
  • a holding and adjusting head 38 is connected, in which a probing element 40 is preferably in the form of a fiber probe.
  • the probing element 40 has a stylus extension 42 with arranged at the end probing 44 or button. At least in the region of the probing shaping element 44, the probe extension 42 can be designed to be flexible in bending, as described, inter alia, by EP-B-0 988 505, to the disclosure of which reference is expressly made.
  • the contact-forming element 44 or a marker directly assigned to it from the push-button extension 42 is located in the focal plane of the optical sensor 35, in particular in the form of an image-processing sensor.
  • the object 15 or its structures can be measured in a simple manner, wherein only the unit image sensor sensor probe must be adjusted, which are mentioned steplessly rotatable and pivotable in space. An adjustment of the object 15 to the probing element 40 is thus not required.
  • an intrinsic lighting of the probing mold element 44 can be made possible in order to not necessarily make external lighting necessary. Consequently, the measurement of the probing mold 44 can be made by the image processing sensor in any spatial positions.
  • the holding and adjusting head 38 that is to say the probing element 40
  • the optical sensor 35 or its housing 34 via the magnetic interface 36
  • a simple separation can take place.
  • This makes it possible to store the mounting and adjusting head 38 in a parking position 48.
  • the magnetic interface 36 is disconnected. It is then possible to record a dark field incident illumination device 50 via the magnetic interface 36, the illumination sources of which, such as LEDs 52, being aligned such that they are aligned with the focal plane of the image processing sensor and thus directly permit measurement with the image processing sensor.
  • the light sources 52 may be arranged on concentrically extending rings.
  • a plurality of light sources 52 can be interconnected to form units so that illumination of the object 15 in the focal plane of the image processing sensor is made possible to the desired extent.
  • the light sources 52 can be interconnected to quadrants.
  • the magnetic interface 36 it is possible to use the magnetic interface 36 to connect a transmitted-light illumination device 60 to the optical sensor 35 or its housing 34.
  • the optical sensor 35 which is, as mentioned, preferably an image processing sensor, in the transmitted light method or incident light method, wherein the illumination required for this purpose is adjustable together with the optical sensor 35.
  • the transmitted light illumination device 60 preferably comprises an L-shaped holder 62, which at the measuring head, d. H. the housing 34 is attached.
  • the holder 62 is based on a coupling element 61, which is connectable to the magnetic interface 36 or a portion thereof.
  • the below the object to be measured 15 to be arranged lighting such as LED light sources 63 are integrated in the L-shaped bracket 62. Between the light source 63 and the object, a diffuser 64 may be provided. Furthermore, there is the possibility that the transmitted-light device 60 can be picked up by a probe changing device in different rotational positions relative to the optical sensor 35, that is to say the measuring head. Thereby, a collision of the L-shaped bracket 62 with the measurement object 15 can be avoided.
  • the optical sensor 35 can be adjustable together with the stylus extension 42 and the probing element 44 comprising the probing element 40.
  • the contact element 40 or the transmitted-light illumination device 62 or the incident-light illumination device 50 are in particular connected via a magnetic interface 36 to the test head, which includes the sensor 35, which in turn starts from a rotary swivel joint or rotary or pivot joint 32, which is on a coordinate axis in the exemplary embodiment on the Z-axis 26.
  • Probe element 40 or transmitted light illumination device 60 or Auflichtbeleuch- processing device 50 can optionally be moved in parking positions 48 to use one of the measuring units with which the object 15 is to be measured.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un instrument de mesure à coordonnées (10) et un procédé de mesure de structures à l'aide d'un élément de balayage (40) doté d'un prolongateur (42) et d'un élément de balayage (44) permettant de mesurer la structure d'un objet ainsi que d'un détecteur optique qui permet de détecter la position de l'élément de balayage ou de l'élément moulé de balayage. L'élément de balayage et le détecteur optique se présentent sous la forme d'une unité réglable par rapport à une attache de l'instrument de mesure à coordonnées. Pour mesurer facilement les microcaractéristiques des objets sans nécessiter un instrument de mesure à coordonnées de conception coûteuse, le détecteur optique et l'élément de balayage (40) sont reliés, sous la forme d'une unité, à l'attache par une articulation rotative ou pivotante et /ou rotative-pivotante (32).
PCT/EP2005/004062 2004-05-04 2005-04-16 Instrument de mesure a coordonnees et procede de mesure de structures a l'aide de cet instrument de mesure a coordonnees WO2005108916A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112005000934.3T DE112005000934B4 (de) 2004-05-04 2005-04-16 Koordinatenmessgerät sowie Verfahren zum Messen von Strukturen mittels eines Koordinatenmessgerätes

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004022314A DE102004022314A1 (de) 2004-05-04 2004-05-04 Koordinatenmessgerät sowie Verfahren zum Messen von Strukturen mittels eines Koordinatenmessgerätes
DE102004022314.9 2004-05-04

Publications (1)

Publication Number Publication Date
WO2005108916A1 true WO2005108916A1 (fr) 2005-11-17

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PCT/EP2005/004062 WO2005108916A1 (fr) 2004-05-04 2005-04-16 Instrument de mesure a coordonnees et procede de mesure de structures a l'aide de cet instrument de mesure a coordonnees

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DE (2) DE102004022314A1 (fr)
WO (1) WO2005108916A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104662388B (zh) 2012-05-07 2018-06-26 卡尔蔡司工业测量技术有限公司 用于坐标测量机的可替换照明模块
CN104395689B (zh) 2012-05-07 2016-05-18 卡尔蔡司工业测量技术有限公司 用于坐标测量机的改进的照明模块
DE102014117978A1 (de) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Vorrichtung und Verfahren zur Messung von Werkstücken
WO2015082683A2 (fr) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Dispositif et procédé pour la mesure de pièces
EP3569973B1 (fr) 2014-12-12 2021-01-20 Werth Messtechnik GmbH Machine de mesure de coordonnées et procédés de mesure de caractéristiques sur des pièces
DE102015121582A1 (de) 2014-12-12 2016-06-16 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Messung von Merkmalen an Werkstücken

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998057121A1 (fr) * 1997-06-12 1998-12-17 Werth Messtechnik Gmbh Appareil de mesure de coordonnees comportant un palpeur et detecteur optique mesurant la position de ce dernier
WO1999063301A1 (fr) * 1998-05-29 1999-12-09 Werth Messtechnik Gmbh Dispositif pour la mesure de structures d'un objet
WO2002025206A1 (fr) * 2000-09-20 2002-03-28 Werth Messtechnik Gmbh Dispositif et procede de mesure opto-tactile de structures

Family Cites Families (3)

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Publication number Priority date Publication date Assignee Title
US4574199A (en) * 1983-01-27 1986-03-04 Diffracto Ltd. Sensing location of an object
US5825666A (en) * 1995-06-07 1998-10-20 Freifeld; Daniel Optical coordinate measuring machines and optical touch probes
JP2001154098A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 画像プローブ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998057121A1 (fr) * 1997-06-12 1998-12-17 Werth Messtechnik Gmbh Appareil de mesure de coordonnees comportant un palpeur et detecteur optique mesurant la position de ce dernier
WO1999063301A1 (fr) * 1998-05-29 1999-12-09 Werth Messtechnik Gmbh Dispositif pour la mesure de structures d'un objet
WO2002025206A1 (fr) * 2000-09-20 2002-03-28 Werth Messtechnik Gmbh Dispositif et procede de mesure opto-tactile de structures

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DE112005000934A5 (de) 2007-05-24
DE102004022314A1 (de) 2005-12-22
DE112005000934B4 (de) 2019-11-28

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