WO2005103324A1 - Procede de revetement de l'interieur d'un canal traversant - Google Patents

Procede de revetement de l'interieur d'un canal traversant Download PDF

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Publication number
WO2005103324A1
WO2005103324A1 PCT/EP2004/012505 EP2004012505W WO2005103324A1 WO 2005103324 A1 WO2005103324 A1 WO 2005103324A1 EP 2004012505 W EP2004012505 W EP 2004012505W WO 2005103324 A1 WO2005103324 A1 WO 2005103324A1
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WO
WIPO (PCT)
Prior art keywords
channel
pressure
coating
inlet
gas
Prior art date
Application number
PCT/EP2004/012505
Other languages
German (de)
English (en)
Inventor
Ursus KRÜGER
Raymond Ullrich
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2005103324A1 publication Critical patent/WO2005103324A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material

Definitions

  • the invention relates to a method for internally coating a through-channel according to claim 1.
  • turbine blades of steam or gas turbines have cooling air channels, which are through-channels through which air or steam flows during operation to cool the blade.
  • the channels are e.g. coated with aluminum and / or chrome using a CVD process.
  • the coating oxidizes or corrodes during operation, the resulting oxide layer preventing further corrosive attack on the base material of the blade.
  • the aluminum is largely converted into aluminum oxide.
  • the uniform coating of the inner surface of the cooling air ducts is a problem. Both the complete covering of the entire inner surface and the achievement of a uniform layer thickness from the inlet to the outlet of the Cooling air ducts can hardly be guaranteed by a CVD process.
  • the CVD process aluminum and / or chromium-containing gaseous precursors are passed through the cooling air channels. The chemical reaction and the resulting coating are initiated by heating the blade (thermal CVD).
  • US 5,807,428 discloses a CVD method for internally coating turbine blades, in which the gas is introduced through an inlet at the base of the turbine blade.
  • GB 1 549 845 discloses a method for internal coating using aluminum, in which the maximum pressure is 100 torr, that is to say that there is a negative pressure.
  • a method for gas diffusion coating of hollow workpieces is known from DE 40 35 789, that is to say the gas migrates into the hollow workpiece due to the diffusion gradient, so that no external pressure is applied.
  • the object is achieved by a method according to claim 1.
  • FIG. 1 shows a component with a through-channel
  • FIG. 2, 3 shows an exemplary pressure curve according to the invention
  • FIG. 4 shows the dependence of the reaction equilibrium on the pressure.
  • FIG. 5 shows the dependence of the deposition rate on the pressure and FIG. 6 shows a section of a turbine in which the method according to the invention is applied.
  • FIG. 1 shows a component 1 which, for example, a turbine component of a gas 100 (FIG. 6) or steam turbine, such as a guide 120 (FIG. 6) or rotor blade 130 (FIG. 6) or a combustion chamber 110 ( 6) is a gas turbine 100.
  • the component 1 has an elongated cavity or a long, in particular meandering through channel 7, which is surrounded by an outer wall 4, an inner surface 8 in the through channel 7 and an outer surface 9.
  • the through-channel 7 has an inlet 10 and an outlet 13.
  • gases for example gaseous metals, gaseous metal mixtures or gaseous precursors, are introduced in the region of the inlet 10 and are distributed in the through-channel 7.
  • the concentration c g of the coating material decreases over the length x of the through channel 7 due to the process, since the metal or the metals deposit on the inner surfaces 8 of the through channel 7 from the beginning, so that there is less metal in the gas at the end of the channel.
  • concentration c g decreases over the length x of the through channel 7 over the length x (FIG. 1). This results in an uneven coating, a greater layer thickness being achieved in the area of the inlet 10 than in the area of the outlet 13.
  • the curve profile of the concentration c g is then similar to a layer thickness of the coating 11 or concentration c g of the coating material (metal), for example Al, Pt, Cr, combinations of Al, Pt, Cr or alloys, in the through channel 7 along the length x.
  • metal for example Al, Pt, Cr, combinations of Al, Pt, Cr or alloys
  • the graphical representation of the decrease in concentration c g with respect to the metal (coating material) in FIG. 1 is only shown schematically and can have any other course of a decrease in the concentration c g over the length x.
  • the gases or gaseous precursors flow through the passage channel 7, there is not necessarily a pressure gradient between the inlet 10 and the outlet 13 so that the gases can flow through the passage channel 7, but because of a difference in concentration there is also a movement due to the diffusion law (grad c) the material of the gas.
  • a precursor P x can likewise convert into coating material B and escaping gas.
  • reaction equilibrium g of these reactions can be shifted by the pressure p.
  • FIG. 2 The pressure gradient according to the prior art, which is necessary for a flow, for example, is shown in FIG. 2 with the dashed line 19.
  • a larger gradient (curve 16, FIG. 2) is generated in the flowing gas, in which
  • the flow rate is increased, for example by using a pump.
  • This pressure gradient is generated at least temporarily or always during the coating process.
  • the pressure decreases continuously over the length x.
  • the course 16 shown in FIG. 2 is only shown schematically.
  • the curve p (x) can of course show a different course (e.g. linear).
  • the invention is based on the knowledge that the deposition rate r of the coating process, here for example from the gas phase, depends on the pressure p, as is shown, for example, in FIG. At a high pressure p there is a low deposition rate r, whereas at a low pressure p the deposition rate r increases.
  • the curve r (p) can of course show a different course (eg linear).
  • the gas flowing through the passage 7 can be a vaporized coating material such as aluminum, that is to say an aluminum vapor, but, for example, a carrier gas can also be used, which is added to the coating gas in order to adjust the pressure gradient.
  • the carrier gas can be any gas which, at the temperatures in component 1 and at the corresponding temperatures, does not cause an undesirable reaction (corrosion, ...) with the material of component 1.
  • Noble gases such as argon or helium or nitrogen or carbon dioxide, optionally also hydrogen, can preferably be used.
  • the pressure at the inlet 10 is' at least Ibar.
  • a pressure of greater than 2 bar at inlet 10 is preferably used.
  • Pressure values between 2 and 5 bar and 3 bar and 6 bar can preferably also be used at inlet 10.
  • pressure values at inlet 10 are used for values from 1 bar to 2 bar, 2 bar to 3 bar, 3 bar to 4 bar, 4 bar to 5 bar or 5 bar to 6 bar.
  • FIG. 4 shows the dependence of an equilibrium constant g of a chemical equilibrium on the pressure p.
  • the quotient g is formed, for example, by the concentration of the end product B divided by that of the starting materials Pi + P 2 .
  • a value> 1 for g means that the equilibrium is on the side of the end product B.
  • the equilibrium of the reaction lies with the starting materials P x and P 2 .
  • the ratio g B to g P can be set as desired by varying the pressure p 0 .
  • CVD deposition at the inlet 10 of the cooling air channels 7 with a high metal concentration in the gas tends to reduce the deposition due to the increased pressure p and at the outlet 13 with a lower metal concentration in the gas tends to increase the deposition rate r with the lower pressure p, so that despite uneven concentration c (over the length x of the through-channel 7) an equalization of the deposition rate r is achieved.
  • the invention can be applied to other coating methods such as e.g. Transfer PVD procedure.
  • the process can also be applied to long blind holes, since a pressure gradient can also be created there, even if no medium is flowing.
  • the method can also be carried out, for example, in such a way that the blind hole is built up in such a way that a gas can flow out at the end of the blind hole and the blind hole is closed again at the end of the coating process.
  • Another possibility is to insert a probe into the blind hole so that the gas flows out of the probe at the end of the blind hole.
  • the deposition rate r can of course also be alternatively or additionally controlled by other parameters, such as temperature T (x) or concentration c (x), which are locally different or have a gradient. It is important here that the coating parameter p, c, T is influenced in such a way, that is to say that it differs locally, that the deposition rate r along the through channel 7 is made uniform or, in particular, is the same everywhere.
  • FIG. 6 schematically shows an example of how turbine blades 120, 130 are cooled.
  • the gas turbine 100 is designed for a comparatively high outlet temperature of the working medium M emerging from the combustion chamber 110 of approximately 1200 ° C. to 1300 ° C.
  • at least some of the moving blades 120 and the guide blades 130 are designed to be coolable by cooling air K as the cooling medium.
  • the working medium M flowing out of the combustion chamber 110 first encounters a number of guide vanes 130, which form the so-called first row of guide vanes 115 and are suspended in the combustion chamber 110 via their respective platforms 180. Seen in the direction of flow of the working medium M, the blades 120 forming the first row of blades follow, the guide vanes 130 forming the second row of blades, and the blades 120 forming the second row of blades.
  • the blades 120 are designed for a particularly reliable supply of cooling air K essentially over the entire base cross section of their respective blade root 183.
  • the blade root 183 is the respective one
  • Blade 120 each provided with a plurality of inflow openings 186 for cooling air K.
  • the inflow openings 186 of each rotor blade 120 are arranged one behind the other, for example in the longitudinal direction of the turbine shaft 102.
  • Each inflow opening 186 is guided through the airfoil 189 of the respective rotor blade 120.
  • the subchannel 192 of the respective rotor blade 120 which is assigned to the front inflow opening 186 in the flow direction of the working medium M, is guided, starting from the associated inflow opening 186, in a meandering manner through the front part of the respective rotor blade 120, as is shown only schematically in the figure.
  • the sub-channel 192 opens on the outlet side into a number of outlet openings 198 for the cooling air K, which are arranged on the front edge 201 of the respective rotor blade 120, as seen in the direction of flow of the working medium M.
  • the rear inflow opening 186 of the respective rotor 120 communicates with a sub-channel 195 which is likewise meandering in the rear part of the respective rotor 120.
  • the sub-channel 195 opens on the outlet side in a number of at the rear edge 204 of the respective one Rotary blades 120 arranged outlet openings 207.
  • each rotor blade 120 The subchannels 192, 195 of each rotor blade 120 are completely decoupled from one another on the cooling air side.
  • the subchannels 192, 195 form a meandering channel with, for example, an inlet.
  • each sub-channel 192, 195 to be supplied with cooling air K which is adapted to the respective requirements with regard to its coating parameters.
  • the pressure level that the cooling air K must have or exceed in the area of the outlet openings 198 or 207 is dependent on the position of the respective rotor blade 120 along the. Turbine shaft 102 and whether the cooling air K exits counter to the flow direction of the working medium M or in the flow direction of the working medium M. Therefore must In particular, the cooling air K supplied to the outlet openings 198 have a higher operating pressure than the cooling air K supplied to the outlet openings 207.
  • Both the subchannels 192, 195 and the outlet openings 198 can be coated using the method according to the invention.
  • the cooling air supply system of the gas turbine 100 is adapted accordingly.
  • the cooling air supply system comprises a first supply chamber 210 integrated in the turbine shaft 102, which in the exemplary embodiment according to FIG. Is connected via a bore 213 guided in the turbine shaft 102 to the first inflow opening 186, seen in the longitudinal direction of the turbine shaft 102, of each of the rotor blades 120 forming the first row of rotor blades is.
  • the cooling air supply system comprises, for example, a second supply chamber 216 for cooling air K.
  • This is arranged behind the first supply chamber 210, as seen in the longitudinal direction of the turbine shaft 102, and is likewise integrated into the turbine shaft 102.
  • the second supply chamber 216 is connected on the cooling air side via a bore 219 to the rear inflow opening 186, as seen in the longitudinal direction of the turbine shaft 102, of each of the rotor blades 120 forming the first row of rotor blades.
  • the second supply chamber 216 is connected via a bore 222 to the front inflow opening 186, as seen in the longitudinal direction of the turbine shaft 102, of each of the rotor blades 120 forming the second row of blades.
  • each inflow opening 186 of each rotor blade 120 is assigned a separate cooling air supply integrated into the turbine shaft.
  • each Inflow opening 186 and with it also the respective downstream subchannel 192, 195 can thus be acted upon with cooling air K independently of the other subchannel 195 or 192.
  • the partial flows of cooling air K thus formed can therefore be adapted to the individual conditions specified on the outlet side.
  • the subchannel 192 can be charged with cooling air K which is at a higher pressure than the subchannel 195.
  • the first supply chamber 210 is supplied with correspondingly high-quality cooling air K which is under comparatively high pressure.
  • the second supply chamber 216 from which the second sub-channel 192 of the blades 120 forming the first row of blades is supplied with cooling air K, is supplied with comparatively inferior cooling air K which is at a lower pressure.
  • the total amount of high-quality cooling air K which is under particularly high pressure can thus be kept comparatively low and can be limited only to those areas of the respective rotor blade 120 for which the supply of such high-quality cooling air K is actually necessary.
  • the inflow openings 186 of the rotor blades 120 are arranged in the base region of the respective blade root 183.

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)

Abstract

Les procédés actuels de revêtement intérieur produisent un revêtement irrégulier et/ou incomplet d'un canal à l'intérieur d'un composant. Le procédé décrit génère par exemple un gradient de pression dans le canal traversant (7, 192, 195), de sorte que le taux de dépôt en fonction de la pression (r(p)) qui caractérise le procédé de revêtement permette d'ajuster localement le taux de dépôt (r) par l'intermédiaire du gradient de pression.
PCT/EP2004/012505 2004-04-19 2004-11-04 Procede de revetement de l'interieur d'un canal traversant WO2005103324A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04009063 2004-04-19
EP04009063.1 2004-04-19

Publications (1)

Publication Number Publication Date
WO2005103324A1 true WO2005103324A1 (fr) 2005-11-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2921938A1 (fr) * 2007-10-03 2009-04-10 Snecma Sa Procede pour deposer un revetement d'aluminium sur une piece metallique creuse
CN114107916A (zh) * 2022-01-26 2022-03-01 北京航空航天大学 保持叶片气膜冷却孔通畅的镀覆方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3158499A (en) * 1961-07-07 1964-11-24 Union Carbide Corp Method of depositing metal coatings in holes, tubes, cracks, fissures and the like
GB1549845A (en) * 1975-04-04 1979-08-08 Secr Defence Diffusion coating of metal or other articles
US5368888A (en) * 1991-11-04 1994-11-29 General Electric Company Apparatus and method for gas phase coating of hollow articles
WO1997032054A1 (fr) * 1996-02-29 1997-09-04 MTU MOTOREN- UND TURBINEN-UNION MüNCHEN GMBH Dispositif et procede pour preparer et/ou revetir les surfaces d'elements de construction creux
WO1999003599A1 (fr) * 1997-07-18 1999-01-28 Chromalloy Gas Turbine Corporation Procede et dispositif servant a effectuer le revetement en phase gazeuse de surfaces interieures complexes d'articles creux
EP1001050A2 (fr) * 1998-11-16 2000-05-17 Forschungszentrum Karlsruhe GmbH Procédé de revêtement interieur des capillaires et utilisation des tels capillaires

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3158499A (en) * 1961-07-07 1964-11-24 Union Carbide Corp Method of depositing metal coatings in holes, tubes, cracks, fissures and the like
GB1549845A (en) * 1975-04-04 1979-08-08 Secr Defence Diffusion coating of metal or other articles
US5368888A (en) * 1991-11-04 1994-11-29 General Electric Company Apparatus and method for gas phase coating of hollow articles
WO1997032054A1 (fr) * 1996-02-29 1997-09-04 MTU MOTOREN- UND TURBINEN-UNION MüNCHEN GMBH Dispositif et procede pour preparer et/ou revetir les surfaces d'elements de construction creux
WO1999003599A1 (fr) * 1997-07-18 1999-01-28 Chromalloy Gas Turbine Corporation Procede et dispositif servant a effectuer le revetement en phase gazeuse de surfaces interieures complexes d'articles creux
EP1001050A2 (fr) * 1998-11-16 2000-05-17 Forschungszentrum Karlsruhe GmbH Procédé de revêtement interieur des capillaires et utilisation des tels capillaires

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2921938A1 (fr) * 2007-10-03 2009-04-10 Snecma Sa Procede pour deposer un revetement d'aluminium sur une piece metallique creuse
CN114107916A (zh) * 2022-01-26 2022-03-01 北京航空航天大学 保持叶片气膜冷却孔通畅的镀覆方法
CN114107916B (zh) * 2022-01-26 2022-04-08 北京航空航天大学 保持叶片气膜冷却孔通畅的镀覆方法

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