WO2005100910A1 - Méthode de mesure d'une forme en trois dimensions et son équipement - Google Patents

Méthode de mesure d'une forme en trois dimensions et son équipement Download PDF

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Publication number
WO2005100910A1
WO2005100910A1 PCT/JP2004/005143 JP2004005143W WO2005100910A1 WO 2005100910 A1 WO2005100910 A1 WO 2005100910A1 JP 2004005143 W JP2004005143 W JP 2004005143W WO 2005100910 A1 WO2005100910 A1 WO 2005100910A1
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WIPO (PCT)
Prior art keywords
laser
plane
measurement
led
estimation
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PCT/JP2004/005143
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English (en)
Japanese (ja)
Inventor
Hiroshi Kawasaki
Ryo Furukawa
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Techno Dream 21 Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Techno Dream 21 Co., Ltd. filed Critical Techno Dream 21 Co., Ltd.
Priority to PCT/JP2004/005143 priority Critical patent/WO2005100910A1/fr
Priority to JP2006512207A priority patent/JP4379626B2/ja
Publication of WO2005100910A1 publication Critical patent/WO2005100910A1/fr

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • G06T7/521Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

Definitions

  • the present invention relates to a three-dimensional shape measuring apparatus that obtains distance information to a target object using laser light in the principle of triangulation, and in particular, it is possible to efficiently measure the entire peripheral shape of a target object in real time.
  • Devices that obtains distance information to a target object using laser light in the principle of triangulation, and in particular, it is possible to efficiently measure the entire peripheral shape of a target object in real time.
  • the present invention also relates to a method of measuring the three-dimensional shape of a target object using the above-mentioned apparatus.
  • the acquisition of shape depth information is “from a single direction” because usually only the depth information of the part visible from the sensor can be acquired.
  • a laser range finder using a laser high accuracy but large and expensive
  • photogrammetry using multiple images inexpensive but difficult to obtain a fine shape
  • Triangulation method using pattern floodlight inplicated arrangement of equipment
  • single eye camera method combining LED and laser for example, Japanese Patent Application Laid-Open No. 2 0 0 3 0 1 3 0 6 2 2
  • Non-Patent Document 1 the ICP method (Non-Patent Document 1) and its extension (Non-patent document 2) and the like have been studied. It is a method to realize more precise positioning, and a method to automatically align shapes from multiple directions far apart has not been realized yet.
  • Patent Document 3 a new system aiming at solving this inefficiency has been proposed in (Patent Document 3). In this system, by using (1) and (2) simultaneously, it is possible to check in real time the holes that could not be measured, and efficient measurement is possible.
  • this system are the "triangulation by using the pattern floodlight" three-dimensional measurement technique limited-expanded system, equipment force 3 massive addition, synchronization with the floodlight and camera essential And the size of the measurement object is limited.
  • the present invention uses the “method with a single-eye camera combining an LED and a laser” described in “Japanese Patent Application Laid-Open No. 2003-13201” in a three-dimensional measurement method.
  • the aim is to develop a measurement system of the whole circumference shape that eliminates the defects.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 200-03 1 3 0 6 2 1
  • Non Patent Literature P. J. Besl and N. D. McKay A method for registration of 3-Ds apes" IEEE Trans, of PAMI, vol. 14, No. 2, pp. 239-256, 1992 "
  • Non-patent literature 3 Szymon Rusmkiewicz, O. A. Hall-Holt and M.
  • Non Patent Literature 6 JA Sethian "": Level Set Methods and Fast Marching Methods "Cambridge University
  • the measuring device described in "Japanese Patent Application Laid-Open No. 2003-2013” has an LED attached to a laser, and while irradiating the target object with this laser, the measuring device with a monocular video camera and Each of the laser reflection positions is photographed at the same time. Since the three-dimensional position and orientation of the measuring device are identified by the LED, the three-dimensional coordinates of the laser reflection position can be obtained from the principle of triangulation.
  • the measuring device has the features described in the problems to be solved by the invention, such as simplicity of mechanism, ease of portability, high measurement efficiency, good accuracy, and low price.
  • This process is basically a process of re-estimating the laser plane using the detected laser position, and has the following three types of effects.
  • the position of the laser plane which is estimated only by the wedge positioning position of the LED in each frame, is re-estimated using the value of distance estimation in all frames.
  • the estimation accuracy is improved, and the measurement accuracy is expected to be improved.
  • the detected laser can estimate the laser plane and obtain depth information of the laser reflection position. It becomes possible.
  • four LEDs are usually required for efficient estimation of the current position. According to the present invention, it is possible to measure less LED, and even less LED, and it has the effect of greatly improving the measurement efficiency and convenience. As a result, the number of measurement samplings can be increased and accuracy can be expected to improve. Furthermore, since the measuring device does not have to fit inside the camera, the ease of measurement is greatly improved.
  • the positional relationship between the laser and the LED can be measured. In this way, it is possible to reduce the influence of the error in the mounting position when mounting the LED and the laser on the final shape estimation result and to improve the accuracy.
  • the measuring device described in “Japanese Patent Application Laid-Open No. 200303 1 2 6 1” can only acquire depth information from the direction of one viewpoint. Therefore, we propose a method for acquiring the perimeter around a system in which a rotation table is added to the measuring device.
  • FIG. 1 is a diagram showing that the center position of the LED of the measuring device is set as the origin, and defining as an orthogonal coordinate system having x, y and z axes fixed to the measuring device.
  • FIG. 2 is a flow chart showing an algorithm for re-estimating a laser plane by off-line processing.
  • FIG. 3 shows that the deviation between the actual laser plane of the measuring instrument and the ideal laser plane (laser plane calculated from the arrangement of the LEDs) due to the mounting error of the LED and the laser is obtained.
  • FIG. 4 is a view showing a method of estimating the entire circumferential shape using a rotary table provided with LEDs.
  • FIG. 5 is a view showing a method of applying a calibration pattern to a rotary table, measuring it while rotating, and performing a calibration of the rotary table by optimization calculation from the pattern.
  • a straight line connecting the camera center and the LED on the image plane is extended in the direction of the rotary table, and the three-dimensional coordinates of the point where it collides with the actual LED are determined.
  • Fig. 7 shows that the turning radius of the LED installed is different. Is a diagram showing that each LED can be identified.
  • FIG. 8 is a diagram showing that three-dimensional coordinates measured in each frame are converted into a target object coordinate system using the estimated rotation angle to create an all-round shape.
  • FIG. 9 is a diagram showing the use of Poxel as a data format for storing the shape.
  • Fig. 10 shows a mechanism for voting to the voxel that contains the measured point when a certain point is measured, and at the end of the measurement, it is only for the button / with a certain number of votes or more. If there is a point, it is a figure showing that statistically correct 3D points and faces can be obtained.
  • Figure 1 1 shows that many LEDs are installed in the measuring equipment, some of them are selected to determine the initial position, and the remaining LEDs are used for optimization processing with error minimization.
  • Fig. 12 shows that the detected laser area is normally continuous, and even if the depth value changes rapidly in a step-like manner, it is a figure showing that each discontinuity is continuous up to the discontinuity point. is there.
  • FIG. 13 is a diagram showing that the area to be directly scanned is increased as the number of line lasers is increased.
  • the measuring device described in “Japanese Patent Application Laid-Open No. 2 0 0 3 0 1 3 0 6 2 1 1” estimates the laser plane, and uses the point (line) at which the object intersects with the plane, according to the principle of triangulation. , Estimate depth information. Possible causes of the estimation error of depth information are (1) estimation error of laser plane due to LED position detection error, and (2) estimation of laser plane due to mounting error of LED and laser plane, etc. An error, (3) detection error of the laser reflection position, can be considered.
  • the coordinate system of the measuring device is called “measuring device coordinate system", and the center position of the LED of the measuring device is defined as the origin, and defined as an orthogonal coordinate system with x, y, z axes fixed to the measuring device.
  • an orthogonal coordinate system with x, y, z axes fixed to the camera is called a camera coordinate system.
  • the position and orientation of the measuring instrument coordinate system relative to the camera coordinate system are estimated from the LEDs.
  • the position and orientation of the measuring instrument coordinate system relative to the camera coordinate system is called a pose of the measuring instrument coordinate system.
  • the off-line algorithm is as follows (Fig. 2).
  • this algorithm is applied, all data at the time of measurement shall be saved. However, instead of storing all the video data, only the detected laser position data and LED coordinates may be stored. In this way, not only can the amount of data saved be greatly reduced, but it is sufficient to perform image processing only once.
  • Algorithm for Re-estimating Plane (1) Suppose that there are n frames. The k th frame is described as F (k). The pose of the measuring device coordinate system estimated for F (k) is p (k), and the laser reflection position detected for F (k) is r.
  • L ′ be the laser plane expressed in the measuring instrument coordinate system (L, not dependent on the frame number).
  • L ' generate a number of points according to the reliability of the estimation, and add them to the set D' (k) representing them in the measuring instrument coordinate system.
  • the multiple regression analysis in step (3.4) is processed in the measuring instrument coordinate system.
  • the measuring instrument coordinate system if the estimation of the measuring instrument's attitude is correct and the laser plane is not deviated, the z-coordinates of all estimation points are 0, and all multiple regression coefficients are 0.
  • the results of multiple regression analysis can be evaluated by examining the displacement from this plane for the plane parameters obtained. If many points deviate from the estimated plane, it is considered that the value of the distance image and / or the estimation of the posture are wrong. Therefore, in this case, the frame itself Remove from the estimation data of the remote image so as not to affect the final distance image estimation.
  • the distance image is updated using the corrected plane parameters as needed, without re-estimating the distance image. Also good.
  • the results may be difficult to converge. In such a case, it is expected that the results will be easier to converge by smoothing the distance image with a median filter or the like and suppressing errors in the distance image.
  • the four low LEDs need to be detected. If there are 8 LEDs attached to the measuring device, linear interpolation is performed with a weight of 1 when 8 LEDs are detected and a weight of 0 when 4 LEDs are detected (for example, When six LEDs are detected, 0.5). When the result is less than 1 and the estimated pose P (k) is close to the pauses P (k_l) and P (k + 1) of the previous and subsequent frames (threshold processing), P (k-1), P The weight of (k + 1) is also added. However, when the weight exceeds 1, the value is set to 1. The number of points to be added is up to 4 points, and the number of points (weight x 4) is rounded down. By repeating this series of processing, the position / attitude of the laser plane estimated from the LED and the accuracy of the final shape are improved.
  • the weights of the LEDs may be non-linear functions. Also, the weight of the LED may be increased to further increase the influence of the initial position. In that case, for example, it is better to increase the maximum number of points to add.
  • the reliability of the three-dimensional estimation calculated from this angle may be used as a weight.
  • the sensitivity of the error, which is calculated from Non-Patent Document 4 may be used as a weight.
  • the laser plane is not estimated in that frame.
  • the above-mentioned off-line algorithm is applied as it is to estimate the laser plane in the frame. can do.
  • the information from the LED is not used at all, unlike the case of the above-mentioned improvement of the laser plane accuracy.
  • the laser plane can be estimated by the detected laser, and efficient depth information of the laser position can be obtained.
  • the actual laser plane of the measuring instrument and the ideal laser plane (laser calculated from the arrangement of the LEDs) It is possible to obtain the deviation between LED and laser due to mounting error of the flat surface) (called calibration of the laser flat surface) (Fig. 3). Since this deviation affects all three-dimensional estimation, it is possible to obtain an accurate initial shape by obtaining it beforehand and using this parameter from the beginning of the next measurement.
  • the parameters of the laser plane calibration besides the median value, an average value or a deviation when the quantization error is small may be selected.
  • FIG. 4 a method of estimating the entire circumference shape using a rotary table on which LEDs are installed will be described (FIG. 4).
  • This has the advantage that the rotation angle can be determined by image processing without using a sensor other than the camera, and the feature point can be easily extracted.
  • a method of calculating the rotation angle using this rotary table will be described. First, perform calibration on the rotation axis and rotation plane of the rotary table in advance.
  • the LED placed on the turntable draws an ellipse on the 2D image when the table is rotated. Therefore, if the ellipse is analyzed, the rotation axis can be estimated.
  • a calibration pattern may be attached to the rotary table, and it may be measured while rotating it, and a method to obtain it from the pattern by optimization calculation may be used (Fig. 5).
  • the LEDs behind the object will not be visible, so install multiple LEDs so that the LEDs can be observed at all times.
  • each LED can be identified by making the rotation radius of multiple LEDs different from each other (Fig. 7).
  • the estimated point contains an error as it is, when a certain point is measured, a mechanism for voting to the poxel including the measured point is used. If there is a point only in a certain poxel, a statistically correct 3D point can be obtained (Fig. 10).
  • 3D coordinates may be stored as they are, or rotation angles and depth information may be stored separately.
  • the color information of the estimated three-dimensional point is used to compare with the color information of surrounding points and poxels. Further, the accuracy can be improved.
  • Non-Patent Document 5 When generating faces, it is possible to efficiently generate faces from poxels by using the Martin cube algorithm (Non-Patent Document 5).
  • a method using a level set (Non-patent document 6) or an extension of the Martin cube algorithm with an implicit function (Non-patent document 7) may be used to generate a plane with high accuracy.
  • LEDs can be used to increase the accuracy of the laser plane. Plane estimation is possible if there are at least 3 LEDs. Also, if there are four, the initial position can be calculated efficiently. Furthermore, if there are more than that, errors can be effectively reduced. However, if the number of LEDs is simply increased, the measuring device will become large. However, in the proposed system, this is not preferable because the measuring device needs to be captured in the same screen as the target. . Therefore, install as many LEDs as possible on the measurement equipment, select some of them to determine the initial position, and use the remaining LEDs for optimization processing by minimizing errors. If used, accuracy can be improved effectively (Fig. 11).
  • the position and attitude of the measuring device estimated in the frames before and after or near it may be used without using the LED.
  • 3D estimation accuracy can be directly improved if the detection accuracy of the LED and the laser area is improved.
  • the LED with sub-pixel accuracy can be obtained. This makes it possible to estimate the position of Furthermore, higher precision can be achieved by applying optimization by elliptic fitting, not just weighted averaging.
  • the scan line may be set radially from there and the peak on the line may be searched. This enables laser detection with sub-pixel accuracy, which is more accurate than simple threshold processing.
  • the shooting location of the measuring device in the previous frame also remains as a difference, so this part can be masked using the estimated measuring device position and orientation. Just do it.
  • the reflectance of the laser differs depending on the material and color of the target object, it may not be possible to detect the laser with respect to an object with a large difference in color tone only by the radiation scan. Therefore, this problem can be avoided if the exposure is adjusted in advance so that the color of the object is well understood, the image is acquired by adjusting the shutter speed and the like, and the laser reflection value is divided by the object color.
  • the detected laser area is usually continuous (straight or curved). Even if the depth value changes rapidly in a step-like manner, each of the discontinuities is continuous (Fig. 12). Therefore, isolated points that do not have any laser area around them are considered to be noise with high probability, so these are removed.
  • three-dimensional depth information may be used, or two-dimensional continuity may be examined on a two-dimensional image. In the former case, the accuracy is increased, and in the latter case, the computational complexity is reduced.
  • the proposed measuring device uses a hand shake mechanism, so the shutter speed is increased and shooting is performed to prevent camera shake. Therefore, when measurement is performed under a fluorescent lamp that blinks at a low frequency such as 60 Hz, the composition of the images may differ greatly in each frame. In that case, inter-frame difference processing does not work well.
  • the brightness representative of each frame is determined in each frame, and the ratio is corrected. Assuming that the brightness of a frame to be a reference is 1, if the brightness power of a frame is ⁇ ", the brightness value p (u, v) of the pixel coordinates (u, V) of that frame is p after correction p (u, V) ⁇ r.
  • an average value of all pixels may be used, or an average or median value of pixels sampled constantly or randomly from the entire screen may be used to improve calculation efficiency.
  • the direction in which the radial scan is performed can be limited (the area is 1/4), and efficient measurement is possible.
  • a filter that transmits only light of the same wavelength as the laser is mounted on the mirror, only the laser is reflected, the LED of the measuring device is reflected on the mirror, the illumination attached to the ceiling, etc. Since the influence of the reflection is eliminated, false recognition is reduced and efficient measurement is possible.
  • a filter for example, something as simple as red cellophane can be used.
  • the band interference filter for the IC industry or the band pass filter etc. is even better.
  • the discriminative power S of the laser is required, but the reflected laser has a long optical path length and is darker than the laser directly irradiated, so that discrimination can be made by this characteristic.
  • the estimated value may be considered incorrect, and the frame may be removed from shape estimation.
  • the rotation angle is calculated so as to minimize the square error of the multiple regression analysis calculated at that time by performing the above-mentioned multiple regression analysis by off-line processing while slightly varying the rotation angle. Just do it. Since an accurate initial position has already been determined by the LEDs installed on the rotary table, stable convergence is possible even with a simple method such as binary search.
  • the above processing is performed for all the frames, and the error e in each frame is added up as E, and this process is repeated many times until E converges.
  • the present invention proposes a method of measuring the entire circumference with high accuracy by off-line processing and a rotation table. Off-line processing mainly improves the following three points. The first restores unused frames, the second improves the estimated accuracy of the laser plane, and the third improves the accuracy of the rotation angle. These effects can dramatically improve the final shape.
  • this system can display the measurement results on the display in real time, the user can measure while checking the situation of 3D measurement on the screen on the spot. As a result, if there is a hole (a part where measurement data is missing), the user can immediately re-measure and efficient measurement of the entire circumference becomes possible.
  • the off-line processing improves the estimation accuracy of the laser plane and is expected to improve the accuracy.
  • it is possible to obtain depth information of the laser reflection position.
  • it is possible to measure the positional relationship (manufacturing error) between the laser and the LED, which can correct the influence of this error and improve the final accuracy.
  • Non-Patent Document 3 Since 3D estimation and alignment are performed in real time and simultaneously, it is possible to immediately confirm whether the hole (the missing part of the measurement data) is open. Moreover, the proposed method has a simple structure, so it can clear all the problems of systems with similarities (Non-Patent Document 3).
  • the efficiency of the measurement can be increased by using mirrors and multiple lasers.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Les scanners 3D existants sont généralement chers, imposants et lourds car ils exigent un mécanisme de contrôle mécanique spécial ou son équivalent. Une méthode pour restaurer un modèle en trois dimensions à partir de plusieurs feuilles de jeux d'images est toujours en cours de recherche et sa précision et son efficacité sont faibles. Il peut généralement mesurer une forme uniquement dans la direction de visualisation et un traitement compliqué, à savoir l'alignement et l'intégration de formes, est nécessaire après la mesure pour parvenir à la totalité de la forme de la circonférence. Dans la méthode de mesure dans laquelle l'équipement de mesure ayant une LED fixée sur un laser sert à photographier simultanément l'équipement de mesure et la position de réflexion du laser au moyen d'une caméra vidéo monoculaire tout en irradiant un objet avec un rayon laser, un traitement hors ligne unique est réalisé. Principalement, on estime à nouveau un plan laser en utilisant une position de laser détectée, pour améliorer la précision de la mesure, l'efficacité et la commodité. De plus, la totalité de la forme de la circonférence peut être mesurée à l'aide d'un système également équipé d'une table rotative ; le traitement peut se poursuivre tout en confirmant les parties manquantes des données, simultanément à la mesure.
PCT/JP2004/005143 2004-04-09 2004-04-09 Méthode de mesure d'une forme en trois dimensions et son équipement WO2005100910A1 (fr)

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PCT/JP2004/005143 WO2005100910A1 (fr) 2004-04-09 2004-04-09 Méthode de mesure d'une forme en trois dimensions et son équipement
JP2006512207A JP4379626B2 (ja) 2004-04-09 2004-04-09 3次元形状計測方法及びその装置

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Cited By (13)

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JP2007322351A (ja) * 2006-06-05 2007-12-13 Mitsubishi Electric Corp 3次元物体照合装置
WO2008056427A1 (fr) * 2006-11-08 2008-05-15 Techno Dream 21 Co., Ltd. Procédé de mesure de forme tridimensionnelle et dispositif correspondant
ES2380531A1 (es) * 2009-07-17 2012-05-16 Elio Berhanyer, S.L. Escáner tridimensional sin contacto para la medición de objetos.
CN103267491A (zh) * 2012-07-17 2013-08-28 深圳大学 自动获取物体表面完整三维数据的方法及系统
CN109099838A (zh) * 2018-08-16 2018-12-28 华南农业大学 一种基于折反射的单目立体视觉系统三维信息测量方法
CN109856642A (zh) * 2018-12-20 2019-06-07 上海海事大学 一种旋转三维激光测量系统及其平面标定方法
CN111220100A (zh) * 2020-04-10 2020-06-02 广东博智林机器人有限公司 基于激光束的测量方法、装置、系统、控制设备及介质
WO2020209135A1 (fr) * 2019-04-09 2020-10-15 株式会社Ihi Dispositif de déduction de forme et dispositif de déchargement
JP2020172351A (ja) * 2019-04-09 2020-10-22 株式会社Ihi 荷揚げ装置
JP2020173132A (ja) * 2019-04-09 2020-10-22 株式会社Ihi 形状導出装置
JP2021004769A (ja) * 2019-06-25 2021-01-14 住友金属鉱山株式会社 基板の検査装置、基板の検査方法
CN112884880A (zh) * 2021-01-20 2021-06-01 浙江大学 一种基于线激光的蜜柚三维建模装置和方法
CN114322837A (zh) * 2021-11-30 2022-04-12 国珑智能科技(威海)有限公司 一种双八字三维视觉在线测量物体断面形状的装置及方法

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Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007322351A (ja) * 2006-06-05 2007-12-13 Mitsubishi Electric Corp 3次元物体照合装置
WO2008056427A1 (fr) * 2006-11-08 2008-05-15 Techno Dream 21 Co., Ltd. Procédé de mesure de forme tridimensionnelle et dispositif correspondant
JP5307549B2 (ja) * 2006-11-08 2013-10-02 有限会社テクノドリーム二十一 3次元形状計測方法およびその装置
ES2380531A1 (es) * 2009-07-17 2012-05-16 Elio Berhanyer, S.L. Escáner tridimensional sin contacto para la medición de objetos.
CN103267491A (zh) * 2012-07-17 2013-08-28 深圳大学 自动获取物体表面完整三维数据的方法及系统
CN109099838B (zh) * 2018-08-16 2020-01-17 华南农业大学 一种基于折反射的单目立体视觉系统三维信息测量方法
CN109099838A (zh) * 2018-08-16 2018-12-28 华南农业大学 一种基于折反射的单目立体视觉系统三维信息测量方法
CN109856642A (zh) * 2018-12-20 2019-06-07 上海海事大学 一种旋转三维激光测量系统及其平面标定方法
JP7285121B2 (ja) 2019-04-09 2023-06-01 株式会社Ihi 荷揚げ装置
WO2020209135A1 (fr) * 2019-04-09 2020-10-15 株式会社Ihi Dispositif de déduction de forme et dispositif de déchargement
JP2020172351A (ja) * 2019-04-09 2020-10-22 株式会社Ihi 荷揚げ装置
JP2020173132A (ja) * 2019-04-09 2020-10-22 株式会社Ihi 形状導出装置
CN113613994A (zh) * 2019-04-09 2021-11-05 株式会社Ihi 形状导出装置及卸货装置
JP7285122B2 (ja) 2019-04-09 2023-06-01 株式会社Ihi 形状導出装置
JP2021004769A (ja) * 2019-06-25 2021-01-14 住友金属鉱山株式会社 基板の検査装置、基板の検査方法
CN111220100A (zh) * 2020-04-10 2020-06-02 广东博智林机器人有限公司 基于激光束的测量方法、装置、系统、控制设备及介质
CN112884880B (zh) * 2021-01-20 2022-07-15 浙江大学 一种基于线激光的蜜柚三维建模装置和方法
CN112884880A (zh) * 2021-01-20 2021-06-01 浙江大学 一种基于线激光的蜜柚三维建模装置和方法
CN114322837A (zh) * 2021-11-30 2022-04-12 国珑智能科技(威海)有限公司 一种双八字三维视觉在线测量物体断面形状的装置及方法

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