WO2005088129A1

WO2005088129A1 - Liquid chemical supplying machine

Info

Publication number: WO2005088129A1
Application number: PCT/JP2004/011658
Authority: WO
Inventors: Takeo Yajima
Original assignee: Koganei Corporation
Priority date: 2004-03-15
Filing date: 2004-08-06
Publication date: 2005-09-22
Also published as: TW200530506A; JP4566989B2; TWI289177B; JPWO2005088129A1

Abstract

A liquid chemical supplying machine is provided with a hollow piston (15), a bellows (12) which has a large bellows part (16) on one side of the hollow piston and a small bellows part (17) on the other side, and a cylinder tube (11) which has an inner circumferential surface (11a) for guiding the outer peripheral surface of the hollow piston (15) and housing the bellows (12). A pump chamber (20) is provided on the inner side of the bellows (12). On the both sides of the hollow piston (15), a working chamber (43) for giving thrust toward the small bellows part (17) to the hollow piston (15) and a working chamber (44) for giving thrust toward the large bellows part (16) to the hollow piston (15) are provided. When the working chambers (43 and 44) are selectively supplied with a fluid, the hollow piston (15) reciprocates in the axial direction, and the pump chamber (20) expands and contracts in the horizontal direction. When the pump chamber (20) expands, liquid chemicals are sucked into the pump chamber (20), and when it contracts, the liquid chemicals are discharged from the pump chamber (20).

Description

Specification

Chemical supply device

Technical field

The present invention relates to a drug solution supply device configured to discharge a drug solution by a predetermined amount. Background art

In manufacturing processes in the technical fields such as semiconductor wafer manufacturing technology, liquid crystal manufacturing technology, magnetic disk manufacturing technology, and multilayer wiring substrate manufacturing technology, photoresist solutions, spinion glass solutions, polyimide resin solutions, and pure water Liquid chemicals such as image liquids, etching liquids, and organic solvents are used, and a chemical liquid supply device is used for applying these chemical liquids.

For example, when a photoresist solution is applied to the surface of a semiconductor wafer, the photoresist solution is dropped on the surface of the semiconductor wafer O while the semiconductor wafer is rotated on a horizontal plane. As a chemical solution supply device used for such a resist solution cloth, there is a device in which a pump chamber communicating with a chemical solution supply inlet and a chemical solution discharge port is formed by a flexible tube (for example, see Japanese Patent Application Laid-Open Publication No. _ 0—See 6 15 58). In such a drug solution supply device, when the pump chamber is expanded by elastically deforming the flexible tube, the drug solution is sucked into the pump chamber from the drug solution inlet, and when the pump chamber is contracted, the drug solution is discharged from the drug solution outlet. Will be discharged.

Conventionally, in order to convert the mechanical reciprocating movement of the drive unit driven by a motor or a pneumatic cylinder etc. into the expansion / contraction movement of the pump chamber, an expansion / contraction chamber that seals the incompressible medium as indirect liquid. The pump chamber is provided so as to surround the outer periphery of the pump chamber, and the expansion and contraction chamber is elastically deformed by mechanical reciprocating motion of the drive unit, thereby indirectly expanding and contracting the pump chamber by using an incompressible medium. The technology is known. For example, in the technology disclosed in the above-mentioned patent publications, a small bellows portion, which is an elastic member forming an expansion / contraction chamber, and a large volume change per unit displacement amount in the axial direction, and a large bellows portion. The working disk is mounted between the two, and the driving unit reciprocates the working disk in the axial direction to occupy a certain volume in the expansion / contraction chamber. The pump chamber is expanded and contracted through the liquid.

By the way, if the working disk unit is reciprocated by using a motor or a pneumatic cylinder as a drive source as in the chemical liquid supply device disclosed in Patent Document 1, the chemical liquid can be accurately discharged by a predetermined amount. On the other hand, the structure of the entire chemical supply device is complicated.

An object of the present invention is to provide a chemical liquid supply device capable of sucking and discharging a chemical liquid by a fluid supply means having a simple structure. Disclosure of the invention

The chemical solution supply device of the present invention is a chemical solution supply device that expands the volume of a pump chamber, sucks a chemical solution into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical solution outside the pump chamber, A hollow piston and a small bellows portion provided integrally on one side of the hollow piston and a large size provided integrally on the other side of the hollow piston and having a larger volume change per unit displacement in the axial direction than the small bellows. A bellows having a bellows portion, in which the pump chamber is formed inward, and an inner peripheral surface which accommodates the bellows and guides the outer peripheral surface of the hollow piston so as to be slidable in the axial direction. A cylinder tube defining a first working chamber on one side and a second working chamber on the other side of the hollow piston, and a cylinder tube integrally provided on one of the bellows portions; A first fixed end portion fixed to the first working chamber, and a second fixed end portion provided integrally with the other bellows portion and fixed to the cylinder tube. A fluid is selectively supplied to the second working chamber and the hollow piston is reciprocated in the axial direction to expand and contract the pump chamber.

The chemical solution supply device of the present invention is a chemical solution supply device that expands the volume of a pump chamber, sucks a chemical solution into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical solution outside the pump chamber, The hollow piston and a small bellows part integrally provided on one side of the hollow piston and the other side of the hollow piston are integrally provided on the other side, and a change in volume per unit displacement in the axial direction is smaller than that of the small bellows part. A large bellows portion, the inside of which the pump chamber is formed, and an inner periphery for accommodating the bellows and guiding the outer peripheral surface of the hollow piston slidably in the axial direction. Surface is provided A cylinder tube that defines a first working chamber on one side and a second working chamber on the other side of the hollow piston, and the first working chamber is directed to one side of the hollow piston. A spring member for adding spring force is mounted, and is provided integrally with one of the bellows portions and is provided integrally with a first fixed end portion fixed to the cylinder tube and the other bellows portion, A second fixed end fixed to the cylinder tube, and the hollow piston is reciprocated in the axial direction by supply and discharge of a fluid to and from the second working chamber, thereby expanding and contracting the pump chamber. It is characterized by doing.

The chemical solution supply device according to the present invention is characterized in that a stopper for restricting a reciprocating stroke of the hollow piston is disposed in each of the working chambers. In the chemical solution supply device of the present invention, a sleeve is rotatably mounted as a stopper in contact with an end surface of the hollow biston inside the cylinder tube, and is formed on an inner peripheral surface of the cylinder tube on an outer peripheral surface of the sleep. A male screw which is screw-coupled to the female screw is formed, and the movement stroke of the hollow piston is made variable by rotation of the sleeve. The chemical solution supply device of the present invention is a chemical solution supply device that expands the volume of a pump chamber, sucks a chemical solution into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical solution outside the pump chamber, A hollow piston and a small bellows portion provided integrally on one side of the hollow piston and a hollow bellows provided integrally on the other side have a larger volume change per unit displacement in the axial direction than the small bellows portion. A bellows having a large bellows portion, wherein the pump chamber is formed inward, and an inner peripheral surface for guiding the outer peripheral surface of the hollow piston slidably in the axial direction is provided. A cylinder tube to be housed, a first opposing surface provided in the cylinder tube to face one end surface of the hollow piston, and forming a first working chamber in the cylinder tube; A second opposing surface that is provided on the cylinder tube so as to face the other end surface of the hollow piston and that forms a second working chamber inside the cylinder tube; and that is integrally provided on one of the bellows portions; A first fixed end portion fixed to the cylinder tube; and a second fixed end portion provided integrally with the other bellows portion and fixed to the cylinder tube, wherein the first operation Chamber and the second working chamber A fluid is selectively supplied to reciprocate the hollow piston in the axial direction to expand and contract the pump chamber.

The chemical solution supply device of the present invention is a chemical solution supply device that expands the volume of a pump chamber, sucks a chemical solution into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical solution outside the pump chamber, A hollow piston and a small bellows portion provided integrally on one side of the hollow piston and a hollow bellows provided integrally on the other side have a larger volume change per unit displacement in the axial direction than the small bellows portion. A bellows having a large bellows portion, wherein the pump chamber is formed inward, and an inner peripheral surface for guiding the outer peripheral surface of the hollow piston slidably in the axial direction is provided. A cylinder tube to be housed, a first opposing surface provided in the cylinder tube to face one end surface of the hollow piston, and forming a first working chamber in the cylinder tube; A second opposing surface that is provided on the cylinder tube so as to face the other end surface of the hollow piston, and that forms a second working chamber in the cylinder tube; A spring member for applying spring force toward one side is attached, and a first fixed end portion provided integrally with one of the bellows portions and fixed to the cylinder tube, and an integral with the other of the bellows portions And a second fixed end fixed to the cylinder tube, and the hollow piston is reciprocated in the axial direction by supply and discharge of a fluid to and from the second working chamber, The pump chamber is expanded and contracted.

In the chemical solution supply device of the present invention, a sleeve is rotatably mounted between the cylinder tube and the bellows, and the sleeve forms at least one of the first and second facing surfaces. A male screw is formed on an outer peripheral surface of the cylinder tube and is screwed to a female screw formed on an inner peripheral surface of the cylinder tube, and a rotation stroke of the hollow piston can be varied by rotation of the sleeve.

In the chemical solution supply device of the present invention, a flexible tube having both ends held by the fixed end portion and forming the pump chamber therein is disposed inside the bellows, and the bellows and An expansion / contraction chamber in which an incompressible medium is enclosed is formed between the flexible tube and the flexible tube.

According to the present invention, a large mouth portion and a small mouth portion are provided on a body. A bellows having an empty piston is accommodated in the cylinder tube, and a working chamber is defined between the cylinder tube and the bellows on both sides of the hollow piston. When the hollow piston reciprocates in the axial direction by supplying fluid to at least one of the two working chambers, the two bellows parts are displaced in the axial direction, and the pump chamber inside the bellows expands and contracts. By this expansion and contraction, a chemical solution can be sucked into the pump chamber or discharged from the pump chamber. Since the hollow bellows is provided integrally with the bellows and the bellows can be directly driven in the axial direction by the fluid, the chemical solution supply device can be downsized with a small number of parts.

A working chamber can be formed between each bellows part and the cylinder tube. Also, by incorporating a sleeve inside the cylinder tube, an operating chamber can be formed between the end surface of the piston and the opposing surface of the sleeve.

The hollow piston is reciprocated in the axial direction by alternately and selectively supplying fluid to both working chambers. In addition, a panel member is attached to one working chamber, and the other working chamber is supplied with a fluid that drives the hollow piston by staking the panel force, thereby supplying and discharging the fluid to the other working chamber. The piston is reciprocated in the axial direction. A flexible tube having an inner side as a pump chamber is arranged inside the bellows, and a change in the volume inside the bellows is transmitted to the flexible tube via an indirect medium, so that the pump chamber inside the flexible tube is provided. In addition to being able to smoothly suck and discharge the chemical solution, it is possible to make it difficult for the altered substance to adhere.

By arranging the stopper in contact with the hollow piston in each working chamber, the reciprocating stroke of the hollow piston can be regulated. A rotating sleeve having an opposing surface in contact with the hollow piston and screwed to the cylinder tube is incorporated in at least one of the working chambers, and the position of the moving stroke end of the hollow piston is changed by rotating the rotating sleeve. The amount of the chemical solution sucked into or discharged from the pump chamber can be changed steplessly.

By incorporating a permanent magnet into the hollow biston and detecting the position of the hollow biston, the amount of the chemical solution to be sucked or discharged can be more accurately detected. The chemical solution supply device is used as a pump and also as a pack pack pulp. Brief Description of Drawings

FIG. 1 is a perspective view showing a chemical solution supply device according to one embodiment of the present invention. FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is a sectional view taken along line 3-3 in FIG.

FIG. 4 is a cross-sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 5 is a cross-sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 6 is a sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 7 is a perspective view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 8 is a sectional view taken along the line 8-8 in FIG.

FIG. 9 is a perspective view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 10 is a cross-sectional view taken along a line 10-10 in FIG.

FIG. 11 is a sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 12 is a cross-sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 13 is a sectional view showing a chemical solution supply device according to another embodiment of the present invention. FIG. 14 is a sectional view showing a chemical solution supply device according to another embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a plurality of embodiments will be described in detail with reference to the drawings. In the drawings showing the embodiments, common members are denoted by the same reference numerals. FIG. 1 is a perspective view showing a chemical solution supply device 10a according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line 2 — 2 in FIG. 1, and FIG. It is a cross-section view of 3 $ spring.

As shown in FIG. 1, the chemical solution supply device 10a has a cylinder tube 11 whose outer peripheral surface is substantially square, and inside the cylinder tube 11, as shown in FIG. 2 and FIG. An elastically deformable bellows 12 is incorporated, and the bellows 12 is housed in a cylinder tube 11. The bellows 12 has a fixed end 13 on the suction side, a fixed end 14 on the discharge side, and a hollow piston 15 between these fixed ends 13, 14, A large bellows part 16 is provided between the fixed end part 13 and the hollow piston 15, and a small bellows part is provided between the fixed end part 14 and the hollow piston 15. 17 are provided. Thus, the fixed ends 13 and 14, the hollow piston 15, the large bellows 16 and the small bellows 17 are integrally formed of an elastically deformable material.

If the effective diameter of the large bellows part 16 is D and the effective diameter of the small bellows part 1 mm is d, the effective diameter D is set to be larger than the effective diameter d. The volume change per unit displacement when elastically deformed in the direction is larger than that of the small bellows portion 17. Here, the effective diameters d and D of the small bellows part 17 and the large bellows part 16 in the axial expansion and contraction process of the small bellows part 17 are respectively. Mean average inner diameter. In the case shown in the figure, a small bellows part 17 is arranged on the discharge side and a large bellows part 16 is arranged on the suction side, but a large bellows part 16 is arranged on the discharge side. At the same time, a small mouth opening 17 may be arranged on the bow I side.

A flexible tube 18 made of an elastic material and capable of expanding and contracting in the radial direction is disposed inside the bellows 12, and a pump chamber 20 is provided inside the flexible tube 18. An expansion / contraction chamber 19 is formed between the flexible tube 18 and the bellows 12, and an incompressible medium such as a liquid is sealed in the expansion / contraction chamber 19 as an indirect liquid. Therefore, when the hollow piston 15 is axially moved toward the large bellows part 16, the large bellows part 16 and the small bellows part 17 are displaced in the axial direction respectively, and the effective diameter D The length of the large bellows part 16 becomes shorter, and the length of the small bellows part 17 with an effective diameter d becomes longer, so that the inner volume of the bellows 12 becomes smaller and incompressible. The flexible tube 18 elastically deforms radially inward via the medium, and the pump chamber 20 contracts. Conversely, when the hollow piston 15 is moved in the axial direction toward the small bellows part 17, the length of the large bellows part 16 with an effective diameter D becomes longer, and the small bellows with an effective diameter d becomes larger. Since the length of the part 17 is shortened, the inner volume of the bellows 12 is increased, and the flexible tube 18 is elastically deformed radially outward through the incompressible medium, so that the pump chamber 20 expands. One end of the flexible tube 18 is fixed to the fixed end 13 by a connecting member 21 fitted therein, and the other end of the flexible tube 18 is fitted to the inside thereof. It is fixed to the fixed end portion 14 by the connecting member 22 to be joined.

The connecting member 21 is connected to the suction-absorbing I-side flow path 23. A discharge side flow path 25 is connected to the other connecting member 22, and the discharge side flow path 25 is connected to a coating nozzle 26 as a liquid discharge section. Have been. The discharge-side flow path 25 may be provided with a filter for removing foreign substances in the chemical solution supplied to the application nozzle 26. The suction side flow path 23 incorporates a suction side opening / closing valve 27 for opening and closing this flow path, and the discharge side flow path 25 incorporates a discharge side opening / closing valve 28 for opening and closing this flow path. Have been. The bow I side flow path 23 and the discharge side flow path 25 are formed by resin pipes. As the suction-side on-off valve 27 and the discharge-side on-off valve 28, a solenoid valve operated by an electric signal, an air operated valve operated by air pressure may be used, and a check valve or a check valve is used. You may do it.

The flexible tube 18, the connecting members 21, 22, the suction-side flow path 23, and the discharge-side flow path 25, when the chemical liquid contained in the chemical liquid tank 24 is a photoresist liquid, It is made of fluorocarbon resin such as polytetrafluoroethylene (PTFE) and polytetrafluoroethylene / perfluoroalkoxyethylene copolymer resin (PFA) so that it does not react with chemicals. Bellows 12 is also manufactured by PTF E and PFA. To manufacture the bellows 12, a rod-shaped resin material may be cut into the shape shown in the figure, or may be formed using a resin mold. When the bellows 12 is cut or molded using a resin mold, the inner surface of the bellows 12 is smoothed, and there is no stagnation of the chemical solution inside, preventing deterioration and contamination due to it. Is done. However, the resin material is not limited to PTFE or PFA, and other resin materials or metal materials may be used as long as they are elastically deformable.

In order to fix the bellows 12 to the cylinder tube 11 provided on the outside thereof, a fixing plate 32 engaging with an engaging groove 31 formed in the fixed end portion 13 covers the cover 33. Is fixed to one end face of the cylinder tube 11 by a bolt 34, and the fixed end portion 13 is fixed to the cylinder tube 11 by a fixing plate 32. Similarly, a fixing plate 3 2 engaging with an engaging groove 35 formed in the fixed end portion 14 is fixed to the other end surface of the cylinder tube 11 by a bolt 34 via a cover 33, The fixed end 14 is fixed to the cylinder tube 11 via the fixing plate 32. The hollow piston 15 has a large diameter portion 36 and small diameter portions 37, 38 provided on both sides of the large diameter portion 36, and the large diameter portion 36 is guided to the inner peripheral surface 1 la of the cylinder tube 11 1. And slide in the axial direction. A first sleeve 41 that covers the outer peripheral surface of the small diameter portion 37 is fixed inside one end of the cylinder tube 11, and a second sleep 4 2 that covers the small diameter portion 38 inside the other end of the cylinder tube 11. Has been fixed. The sleeve 41 contacts the outer peripheral surface of the small-diameter portion 37 to guide the small-diameter portion 37 slidably in the axial direction. The sleeve 42 contacts the outer peripheral surface of the small-diameter portion 38 to make the small-diameter portion 38. Are slidably guided in the axial direction. The first working chamber 43 is defined in the cylinder tube 11 by the end face 36a on one side of the hollow piston 15 and the facing face 41a of the sleeve 41 facing the hollow piston 15. A second working chamber 44 is defined in the cylinder and tube 11 by the other end surface 36 b of the stone 15 and the opposing surface 42 a of the sleeve 42 opposed thereto. As described above, the first working chamber 43 is formed on one side of the hollow piston 15, and the second working chamber 44 is formed on the other side.

A sealing member 45 for sealing between the inner peripheral surface of the cylinder tube 11 and the hollow piston 15 is attached to the large-diameter portion 36, and the small-diameter portions 37 and 38 are provided with the sealing member 45, respectively. A sealing member 46 for sealing between the small diameter 咅 P 37, 38 and the sleeves 41, 42 is attached, and furthermore, the respective sleeves 41, 42 have respective sleep 41, 4. A seal member 47 that seals between the cylinder tube 11 and the cylinder tube 11 is attached.

When the hollow piston 15 reciprocates in the axial direction, the volume of the space formed by the large bellows part 16 and the sleeve 41 covering it changes, and the small bellows part 17 becomes Since the volume of the space formed by the sleeve 42 that covers the cylinder changes, the cylinder tube 11 has a bridge port 48 a in order to remove that space and communicate with the IS. 49 a is formed, and the clear port 48 a communicates with the space between the large bellows part 16 and the sleeve 41 through the communication hole 48 b formed in the sleeve 41, The support 49 a communicates with the space between the small bellows portion 1 Ί and the sleeve 42 via a communication hole 49 b formed in the sleeve 42.

In the cylinder tube 11, a supply / discharge port 51 a communicating with the working chamber 43 and a supply / discharge port 51 b communicating with the working chamber 44 open on the outer peripheral surface of the cylinder tube 11. The supply / discharge port 5 la communicates with the working chamber 4 3 through the gap between the cylinder tube 11 and the sleeve 41, and the supply / discharge port 5 lb is connected to the cylinder tube 11 and sleep 42. The working chamber 44 communicates with the working chamber 44 through a gap between the two. In order to supply compressed air alternately and selectively to both working chambers 4 3 and 4 4, the channels 5 3 & and 5 3 b of the pneumatic supply unit 52 are supplied with supply ports 5 la and 5 The air pressure supply source 55 is connected to each of the flow paths 53 a and 53 b via a solenoid valve 54. The solenoid valve 54 is connected to the supply port 56 communicating with the air pressure supply source 55, the output port 57 communicating with the flow path 53a, the output port 58 communicating with the flow path 53b, and communicating with the outside. This is a 5-port 2-position switching valve having discharge ports 59, 60. Power is supplied to the solenoid 61 by connecting the supply port 56 to the output port 58 by connecting the supply port 56 to the output port 58, and by connecting the discharge port 59 to the output port 57 by the discharge position. It operates to the suction bow I position that connects the input port 56 and the output port 57 and connects the discharge port 60 and the output port 58. Therefore, when the solenoid 61 is energized, the fluid is supplied to the working chamber 44 and the fluid in the working chamber 43 is discharged, and the hollow piston 15 moves toward the large bellows part 16 and the pump chamber 20 shrinks. On the other hand, when the power supply to the solenoid 61 is cut off, the fluid is supplied to the working chamber 43 and the fluid in the working chamber 44 is discharged, and the hollow piston 15 moves in the opposite direction. Will expand.

The thickness of the outer sleeve 42 of the small bellows part 17 is set to be larger than that of the outer sleeve 41 of the large bellows part 16. The area of the pressure receiving surface, that is, the end surface 36 b of the empty piston 15 is set larger than the pressure receiving surface, that is, the end surface 36 a of the hollow piston 15 to which the opposing surface 41 a faces. Therefore, a large thrust can be applied to the hollow piston 15 when supplying a fluid to the working chamber 44 and contracting the pump chamber 20 to discharge a chemical solution. Even if a filter is provided, it is possible to reliably discharge the chemical against the flow resistance of the filter.

Compressed air is supplied to each of the working chambers 4 3 and 4 4 .Negative pressure air is selectively supplied to each of the working chambers 4 3 and 4 4 to supply the hollow piston 15. The hollow piston 15 may be reciprocated in the axial direction, or the liquid may reciprocate the hollow piston 15.

In the hollow piston 15, the position where the end surface 36 a of the large diameter portion 36 contacts the opposing surface 41 a of the sleeve 41, and the end surface 36 b abuts the opposing surface 42 a of the sleeve 42. It will reciprocate in the axial direction between the position. In order to detect that the hollow piston 15 has moved to the predetermined position at each reciprocating end, a permanent magnet 62 is attached to the hollow piston 15 as shown in FIG. As shown in Fig. 1, the sensor mounting grooves 63a and 63b formed in the surface extend in the axial direction so that the magnetically sensitive sensors 64a and 64b are mounted. Has become. One sensor 64a detects that the hollow piston 15 has approached the predetermined position toward the facing surface 42a, and the other sensor 64b has the hollow piston 15 facing the facing surface 41a. Thus, it can be detected that the vehicle has approached a predetermined position. This makes it possible to accurately detect the amount of the chemical solution sucked into the pump chamber 20 or discharged from the pump chamber 20. However, only one sensor is provided for the cylinder tube 11 and the hollow piston 15 detects that the hollow piston 15 has approached the predetermined position on the opposing surface 41 a that is the stroke end on the discharge side. It may be moved until 5 comes into contact with the opposing surface 42a, which is the stroke end on the suction side. In addition, the mounting position of the sensor may be arbitrarily changed to arbitrarily change the discharge amount.

Next, the operation of the chemical solution supply device 10a will be described. As shown in Figs. 2 and 3, if the state where the hollow piston 15 is almost at the center of the bellows 12 in the axial direction of the bellows 12 is set to the neutral state, it operates when the solenoid 61 is de-energized. Fluid is supplied to the chamber 43, and the hollow piston 15 moves from the neutral state to the small bellows part 17 side until the large diameter 咅 36 of the hollow piston 15 contacts the sleeve 42. . At this time, the entire bellows 12 is displaced so that the small bellows portion 17 is shortened, and the large bellows portion 16 having a large effective diameter D is displaced so as to be longer. 2 The volume of the pump chamber 20 inside is increased. As a result, the pump chamber 20 is in a negative pressure state, and the chemical in the chemical tank 24 is sucked into the pump chamber 20. At this time, the suction side opening / closing valve 27 operates to open the bow suction I side flow path 23, and the discharge side opening / closing valve 28 operates to close the discharge side flow path 25. . On the other hand, when the solenoid 61 is energized, the solenoid valve 54 switches from the suction position to the discharge position, and the working chamber 44 is supplied with fluid and the fluid in the working chamber 43 is discharged through the discharge port 59. And is discharged outside. As a result, the hollow piston 15 moves toward the large base portion 16 until the large diameter portion 36 of the hollow piston 15 comes into contact with the sleeve 41. Since the large diameter portion is displaced so as to be shorter and the effective diameter d is smaller and the small bellows portion 17 is displaced so as to be longer, the volume of the pump chamber 20 inside the bellows 12 is small. Become. As a result, the chemical solution in the pump chamber 20 sucked in the suction process described above is discharged toward the application nozzle 26. At this time, the suction-side on-off valve 27 operates to close the suction-side flow path 23, and the discharge-side on-off valve 28 operates to open the discharge-side flow path 25.

In the chemical solution supply device 10a, the solenoid valve 54 is switched to the discharge position and the suction position at a predetermined timing by controlling the energization of the solenoid 61, and the opening and closing valves 27, 28 are switched. The pump chamber 20 is expanded and contracted at a predetermined timing, and the chemical liquid can be applied from the application nozzle 26.

After discharging a predetermined amount of the chemical solution from the application nozzle 26, it may be necessary to perform a suck-back operation in order to prevent the chemical solution from dripping from the application nozzle 26. In this case, with the suction-side on-off valve 27 closed and the discharge-side on-off valve 28 open, the hollow piston 15 is moved to the small bellows part 17 to expand the pump chamber 20. Let it. When performing such a suck-back operation, a solenoid valve or an air operated valve that opens and closes by an external signal without using a check valve as each of the opening and closing valves 27 and 28 is used. Will use.

FIG. 4 is a cross-sectional view showing a chemical solution supply device 10b according to another embodiment of the present invention, and FIG. 4 shows a portion corresponding to FIG. 2 in the above-described chemical solution supply device 10a. In this chemical supply device 10b, a hollow piston 15 of a bellows 12 shown in FIG. 4 is formed by an inner piston portion 15a and an outer piston portion 15b, and the inner piston portion 1b is formed. 5a is integrally formed of resin together with the fixed ends 13 and 14, the large bellows part 16 and the small bellows part 17 together. The outer piston portion 15b is formed entirely of metal into a cylindrical shape, and has a large diameter portion 36 and small diameter portions 37, 38. Biston part 15 The bellows 1 and 2 are assembled by fixing them. Thus, the structure of the bellows 12 is different from the case shown in FIGS. 2 and 3, but the other structures can be the same.

FIG. 5 is a sectional view showing a chemical solution supply device 10c according to another embodiment of the present invention, and FIG. 5 shows a portion of the chemical solution supply device 10b corresponding to FIG. In the chemical supply device 1 ° c shown in FIG. 5, the above-mentioned flexible tube 18 is not provided inside the bellows 12, and the inside of the bellows 12 is connected to the pump chamber 20. Has become.

When the photoresist solution contained in the solution tank 24 is discharged to the application nozzle 26 by the solution supply device 10c shown in FIG. 5, the bellows 12 should not react with the solution. Manufactured from PTFE or PFA. This chemical solution supply device 10c may also be configured such that the hollow biston 15 is formed by the inner biston portion 15a and the outer biston portion 15b shown in FIG.

Also in the chemical liquid supply device 10b shown in FIG. 4 and the chemical liquid supply device 10c shown in FIG. 5, the air pressure supply unit 52 shown in FIG. 2 is attached to the cylinder tube 11 and the solenoid valve 54 is operated. By reciprocating the hollow piston 15 of the bellows 12 in the axial direction, a chemical solution is sucked into the pump chamber 20 when the pump chamber 20 is expanded, and the pump chamber is contracted when the pump chamber 20 is contracted. The chemical solution is discharged from inside 20.

FIG. 6 is a cross-sectional view showing a chemical solution supply device 10d according to another embodiment of the present invention, and FIG. 6 shows a portion of the chemical solution supply device 10a corresponding to FIG. In the chemical solution supply device 10d shown in FIG. 6, one sleeve 41 has a large-diameter base end 39a and a small-diameter distal end 39b, and is provided outside the distal end 39b. Has a compression coil panel incorporated as a panel member 65. Thus, in the case shown in FIG. 6, the spring member 65 is mounted in the working chamber 43 on one side of the hollow piston 15, while the other Compressed air is supplied in the same manner as the chemical liquid supply devices 10a to 10c.

The supply / discharge port 51b is connected to the pneumatic supply passage 53b of the pneumatic supply unit 52a, and the pneumatic supply passage 53b is connected to the pneumatic supply source via a solenoid valve 54a. 5 5 is connected. The solenoid valve 54a has a supply port 56 communicating with the air pressure supply source 55, an output port 57 communicating with the pneumatic flow path 53b, and a discharge port 59 communicating with the outside. This is a 3-port 2-position switching valve that has a suction position that connects the discharge port 59 and the output port 57 when the solenoid 61 is energized, and a supply port 5 that shuts off the power to the solenoid 61. It operates to the discharge position that connects 6 to the output port 57.

In this chemical supply device 10 d, when compressed air is supplied to the working chamber 44, the hollow piston 15 moves in the axial direction toward the large bellows part 16, and the large bellows part 16 To expand the small bellows part 17 in the axial direction to contract the pump chamber 20. As a result, the volume of the pump chamber 20 is reduced, and the chemical in the pump chamber 20 is discharged toward the application nozzle 26. On the other hand, when the compressed air in the working chamber 44 is exhausted, the hollow biston 15 moves by the spring force of the spring member 65 until it comes into contact with the tip of the sleeve 42, and the large port part 16 is moved. The pump is expanded in the axial direction, the small bellows portion 17 is contracted in the axial direction, and the pump chamber 20 expands. As a result, the volume of the pump chamber 20 is increased, and the chemical solution in the solution tank 24 is sucked into the pump chamber 2 °.

As described above, by selecting the supply and discharge of the fluid to and from the working chamber 44, the expansion of the pump chamber 20 by the spring force of the spring member 65 and the pressure of the compressed air supplied to the working chamber 44 The pump chamber 20 is contracted. The spring member 65 may be incorporated into the working chamber 44, in which case compressed air is supplied to the working chamber 43. In the chemical solution supply device 10d, a flexible tube 18 is incorporated in the bellows 12, but the flexible tube 1 is similar to the chemical solution supply device 10c shown in FIG. The pump chamber 20 may be formed inside the bellows 12 by removing 8. Further, similarly to the bellows 12 of the chemical solution supply device 1 Ob, the hollow piston 15 may be formed by the inner piston portion 15a and the outer [| piston portion 15b]. Further, in the chemical liquid supply devices 10 b to 10 d shown in FIGS. 4 to 6, the permanent magnet 62 shown in FIG. 3 is attached to the hollow piston 15, and the sensors 64 a, By mounting 64b, it is possible to detect that the hollow piston 15 has moved to the position of the predetermined stroke end, and it is also possible to accurately detect the amount of the chemical solution to be sucked or discharged. However, only one sensor is provided in the cylinder tube 11, and the sensor detects that the hollow piston 15 has approached the predetermined position at the opposing surface 41a, which is the stroke end on the discharge side. The hollow piston 15 may be moved until it comes into contact with the facing surface 42a which is the stroke end on the suction side. Further, the mounting position of the sensor may be arbitrarily changed to arbitrarily change the discharge amount.

FIG. 7 is a perspective view showing a chemical solution supply device 10e according to another embodiment of the present invention, and FIG. 8 is a sectional view taken along line 8-8 in FIG. In the chemical solution supply device 10 e shown in FIGS. 7 and 8, the sleeve 42 is fixed to the cylinder tube 11 in the same manner as the above-described chemical solution supply devices 10 a to 10 d, but the A rotary sleeve 66 is rotatably incorporated between the cylinder 12 and the cylinder tube 11. A male screw 67 is formed on the outer peripheral surface of the rotary slip 66, and a female screw 68 is formed on the inner peripheral surface 11a of the cylinder tube 11 to be screwed to the male screw 67. You.

A large-diameter portion 69 is provided at the base end of the rotating sleeve 66, and a window portion 70 that exposes a part of the large-diameter portion 69 to the outside as shown in FIG. Is formed, and the rotating sleeve 66 is rotated by the operator through the window 70. When the rotating sleeve 66 is rotated, the position where the opposing surface 66a of the rotating sleeve 66 contacts the piston end surface 36a of the large diameter portion 36 changes, and the large bore of the hollow piston 15 changes. The stroke in the direction toward the edge 16 can be adjusted. The windows 70 are provided on the four outer surfaces of the cylinder tube 11 respectively, but may be provided only on any one of the outer surfaces. The sleeve 42 is fixed to the cylinder tube 11, but the sleeve 42 is used as a rotating sleeve so that the hollow piston 15 can change the moving stroke in the direction toward the small bellows portion 17. Alternatively, both the sleeves may be used as rotating sleeves to change the stroke of the hollow piston 15 in both axial directions.

Also in this chemical supply device 10e, similarly to the chemical supply device 10c shown in FIG. 5, the flexible tube 18 is removed so that the pump chamber 20 is formed inside the bellows 12. You may do it. Further, similarly to the bellows 12 of the chemical solution supply device 1 Ob, the hollow piston 15 may be formed by the inner piston portion 15a and the outer piston portion 15b.

FIG. 9 is a perspective view showing a chemical solution supply device 10f according to another embodiment of the present invention. FIG. 10 is a sectional view taken along the line 10—10 in FIG. The chemical solution supply device 1 Of has the same structure as the bellows 12 described above, whereas the cylinder tube 11 is shorter than the above-described one and has a length for accommodating the hollow piston 15. . The fixed plate 32 engaged with the engagement groove 31 of the fixed end 13 is connected to the cylinder tube 11 via four connecting rods 71 fixed to the cylinder tube 11 with bolts 34. The fixed plate 32, which is connected to one end of the fixed end 1 and engages with the engagement groove 35 of the fixed end portion 14, is fixed to the cylinder tube 1 It by the bolt 34. 2 is connected to the other end of the cylinder tube.

At one end of the cylinder tube 11, a portion corresponding to the above-mentioned sleeve 41 is integrated, and a facing surface 41 a facing the piston end surface 36 a is provided on the inner surface of the cylinder tube 11. A working chamber 43 is formed between the facing surface 41a and the piston end surface 36a. A sleeve 42 is fixed to the other end of the cylinder tube 11 by press-fitting. The facing surface 42 a of the sleeve 42 faces the piston end surface 36 b, and the facing surface 42 a and the piston end surface A working chamber 44 is formed between the working chamber 34 and 36 b.

Each of the working chambers 43, 44 is connected to the pneumatic supply unit 52 shown in FIG. 2, and is operated by the fluid supplied to the working chambers 43, 44. The hollow piston 15 reciprocates in a linear direction, and expands and contracts the pump chamber 20 in the same manner as the above-mentioned respective chemical liquid supply devices.

In this chemical supply device 1 Of, the flexible tube 18 may be removed as shown in FIG. 5 to provide a pump chamber 20 inside the bellows 12, as shown in FIG. The bellows 12 may be formed by an inner piston 咅! ^ 15a and an outer piston portion 15b as shown in FIG. .

FIG. 11 is a cross-sectional view showing a chemical solution supply device 10g according to another embodiment of the present invention. In this chemical supply device 10 g, the hollow biston 15 has the small diameter portion described above.

37, 38 and sleeves 41, 42 for guiding the small diameter portions 37, 38 are not provided, and operate between the large bellows 16 and the cylinder tube 11. Room

4 3 is formed, and the working chamber 4 is located between the small mouthpiece part 17 and the cylinder tube 11. 4 are formed. In each of the working chambers 43, 44, compressed air is supplied from a pneumatic supply unit 52 shown in FIG. 2, the hollow piston 15 reciprocates in the axial direction, and the pump chamber 20 moves in the lateral direction. Expands and contracts.

As shown in FIG. 11, inside the cylinder tube 11, a stopper made of a cylindrical sleeve that is located in the respective working chambers 4 3, 4 4 and regulates the reciprocating stroke of the hollow piston 15 3 , 74 are fixed by press fitting. However, the respective stops 73, 74 may be fixed to the cylinder tube 11 with screw members (not shown).

FIG. 12 is a cross-sectional view showing a chemical solution supply device according to another embodiment of the present invention. In this chemical solution supply device 10h, a panel is provided in the working chamber 44 shown in FIG. A member 75 is incorporated, and one end of the panel member 75 is in contact with the end face of the piston, and the other end is in contact with the end face of the fixed end portion 14. An air supply unit 52 a shown in FIG. 6 is connected to the supply / discharge port 51 a, and the hollow piston 1 1 is selected by selecting the supply and discharge of the fluid to and from the working chamber 43. 5 reciprocates in the axial direction, and the pump chamber 20 expands and contracts.

FIG. 13 is a cross-sectional view showing a chemical solution supply device 10i according to another embodiment of the present invention. The chemical solution supply device 10i is a flexible tube attached to the bellows 12 shown in FIG. The structure is the same as that of the chemical solution supply device 10 g shown in FIG. 11.

FIG. 14 is a cross-sectional view showing a chemical solution supply device 10j according to another embodiment of the present invention. This chemical solution supply device 10j is a chemical solution supply device 10g shown in FIG. Used as a work valve.

In the chemical solution supply device 10 j, a pump 76 for sucking the chemical solution from the chemical solution nozzle 24 is connected to the suction side channel 23. The pump 76 is a device for sucking and discharging a fixed amount of the chemical solution toward the application nozzle 26, and the above-described chemical solution supply devices 10a to 10i can be used, but are not limited thereto. Instead, other types of chemical pumps can be used. When the chemical liquid supply devices 10 a to 10 i are used as the pump 76, an on-off valve is provided in the flow path on the upstream side of the pump 76. Suction side flow path between chemical solution supply device 10 j and pump 76 The on-off valve 77 is provided with a solenoid valve operated by an external electric signal and an air operated valve operated by air pressure.

The operation of the chemical liquid supply device 10j as a work-back valve will be described. The chemical solution supply device 10j as a suck-back hopper performs a suck-back operation performed to prevent the chemical solution from dripping from the application nozzle 26 after discharging a predetermined amount of the chemical solution from the application nozzle 26. Therefore, while the chemical liquid is being supplied from the pump 76 to the application nozzle 26, the solenoid 61 is energized, and the volume of the pump chamber 20 is kept in a reduced and contracted state. At this time, the suction side flow path 23 is opened by the operation of the on-off valve 77, and the chemical solution sucked by the pump 76 flows into the suction side flow path 23, the pump chamber 20 and the discharge side flow path 25. Through the application nozzle 26. Since the pump chamber 20 is held in a contracted state, the flow of the chemical from the pump 76 to the application nozzle 26 is not blocked by the chemical supply device 10j.

After a predetermined amount of the chemical solution is discharged from the application nozzle 26, in order to prevent the liquid from dripping, the power supply to the solenoid 61 is cut off to expand the pump chamber 20, and the on-off valve 7 is opened. The suction side flow path 23 is closed by the operation of 7. As a result, the chemical solution remaining in the application nozzle 26 and the discharge-side flow path 25 is sucked into the pump chamber 20, and the dripping of the chemical solution from the application nozzle 26 can be prevented.

Also in the chemical supply device shown in Figs. 8 to 14, the permanent magnet 62 shown in Fig. 3 is mounted on the hollow piston 15 and the sensors 64a and 64b are mounted on the cylinder tube 11. May be. In the chemical solution supply device shown in FIGS. 9 to 14, as shown in FIG. 8, the sleep as a stop is made rotatable inside the cylinder tube 11 and is screwed to the female screw formed in the cylinder tube 11. An external thread may be formed on the outer peripheral surface of the sleeve to change the position of the stroke end of the hollow piston 15.

The present invention is not limited to the above embodiment, and can be variously modified without departing from the gist thereof. For example, the portable tube 18 is not limited to a circular cross section, and may be a flat tube. Enclosed in expansion / contraction chamber 19 As the incompressible medium to be used, powder or granules other than liquid may be used.

. In the above-mentioned embodiment, the compressed air supplied from the air pressure supply source 55 is used as a working fluid to move the hollow piston 15 more, but the hollow piston is used as a working fluid using negative pressure air or liquid. 15 may be driven. Industrial applicability

The chemical solution supply device of the present invention is used for applying a chemical solution such as a photoresist solution to an application nozzle or the like.

Claims

The scope of the claims

1. A chemical liquid supply device that expands the volume of a pump chamber, sucks a chemical liquid into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical liquid outside the pump chamber. A small bellows part integrally provided on one side and a large bellows part integrally provided on the other side of the hollow piston and having a larger volume change per unit displacement in the axial direction than the small bellows; A bellows in which the pump chamber is formed inward;

An inner peripheral surface that accommodates the bellows and guides the outer peripheral surface of the hollow piston slidably in the axial direction is provided, and a first working chamber on one side of the hollow piston and a second working chamber on the other side. A cylinder tube that defines a working chamber of the cylinder;

A first fixed end portion provided integrally with one of the bellows portions and fixed to the cylinder tube;

A second fixed end portion provided integrally with the other bellows portion and fixed to the cylinder tube;

A liquid supply device for selectively supplying a fluid to the first working chamber and the second working chamber to reciprocate the hollow piston in the axial direction, thereby expanding and contracting the pump chamber. .

2. The chemical solution supply device according to claim 1, wherein both ends are held by the fixed end portion, and a flexible tube forming the pump chamber therein is disposed inside the bellows; A chemical liquid supply device, wherein an expansion / contraction chamber in which an incompressible medium is enclosed is formed between the bellows and the flexible tube.

3. The chemical liquid supply device according to claim 1, wherein a stopper for regulating a reciprocating stroke of the hollow piston is disposed in each of the working chambers.

4. The chemical solution supply device according to claim 1, wherein the inside of the cylinder tube is A sleeve is rotatably mounted as a stopper abutting on the end surface of the hollow piston, and a male screw is formed on the outer peripheral surface of the sleeve to be screw-coupled to a female screw formed on the inner peripheral surface of the cylinder tube. A chemical supply device characterized in that the movable stroke of the hollow biston is variable.

5. A chemical liquid supply device that expands the volume of the pump chamber, sucks a chemical liquid into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical liquid outside the pump chamber. It has a small bellows part provided integrally on one side and a large bellows part provided integrally on the other side of the hollow piston and having a larger change in volume per unit displacement in the axial direction than the small bellows part. A bellows in which the pump chamber is formed;

An inner peripheral surface for accommodating the bellows and guiding the outer peripheral surface of the hollow piston in a sliding manner in the axial direction is provided, and a first working chamber on one side of the hollow piston and a second operating chamber on the other side are provided. A cylinder tube defining a working chamber of the cylinder;

A panel member for adding a spring toward the one side with respect to the hollow piston is attached to the first working chamber,

A chemical liquid supply device, wherein the hollow piston is reciprocated in the axial direction by supply and discharge of a fluid to and from the second working chamber, and the pump chamber is expanded and contracted.

6. The chemical liquid supply device according to claim 5, wherein a flexible tube forming the pump chamber inside while a 两 end is held by the fixed end is disposed inside the bellows, A chemical liquid supply device, wherein an expansion / contraction chamber in which an incompressible medium is enclosed is formed between the bellows and the flexible tube.

7. The chemical solution supply device according to claim 5, wherein the hollow is provided in each of the working chambers. A chemical liquid supply device, wherein a stopper for regulating a reciprocating stroke of a piston is provided.

8. The chemical liquid supply device according to claim 5, wherein a sleeve is rotatably mounted inside the cylinder tube as a stopper abutting on an end surface of the hollow piston, and an inner peripheral surface of the cylinder tube is provided on an outer peripheral surface of the sleeve. A chemical liquid supply device, comprising: forming a male screw to be screw-coupled to a female screw formed in the female screw; and changing a moving stroke of the hollow biston by rotation of the sleep.

9. A chemical liquid supply device that expands the volume of the pump chamber, sucks a chemical liquid into the pump chamber, and contracts the volume of the pump chamber to discharge the chemical liquid outside the pump chamber. It has a small bellows part provided integrally on one side and a large bellows part provided integrally on the other side of the hollow piston and having a larger change in volume per unit displacement in the axial direction than the small bellows part. A bellows in which the pump chamber is formed;

An inner peripheral surface that guides the outer peripheral surface of the hollow piston slidably in the axial direction is provided, and a cylinder tube that houses the bellows,

A first facing surface provided in the cylinder tube to face one end surface of the hollow piston and forming a first working chamber in the cylinder tube;

A second opposed surface provided in the cylinder tube to face the other end surface of the hollow piston, and forming a second working chamber in the cylinder tube;

10. The chemical solution supply device according to claim 9, wherein a sleeve is rotatably mounted between the cylinder tube and the base, and at least one of the first and second opposed surfaces is attached by the sleeve. Forming an external thread on the outer peripheral surface of the sleeve to be screw-coupled to a female screw formed on the inner peripheral surface of the cylinder tube; and rotating the sleeve to change the moving stroke of the hollow piston. Chemical supply device.

11. The chemical solution supply device according to claim 9, wherein both ends are held by the fixed end portion, and a flexible tube forming the pump chamber therein is disposed inside the bottle. A chemical solution supply device, wherein an expansion / contraction chamber in which an incompressible medium is enclosed is formed between the bellows and the flexible tube.

12. A chemical liquid supply device that expands the volume of a pump chamber, sucks a chemical liquid into the pump chamber, contracts the volume of the pump chamber, and discharges the chemical liquid outside the pump chamber.

A hollow bellows and a small bellows portion provided integrally on one side of the hollow piston, and a volume per unit amount of displacement in the axial direction provided integrally on the other side of the hollow piston are greater than the small bellows portion. A bellows having a large large bellows portion, wherein the pump chamber is formed inside;

An inner peripheral surface that guides the outer peripheral surface of the hollow biston slidably in the axial direction is provided, and a cylinder tube that accommodates the bellows,

A first facing surface that is provided on the cylinder tube so as to face one end surface of the hollow piston, and that forms a first working chamber in the cylinder tube;

A panel member for applying a panel force toward the one side to the hollow piston is attached to the first working chamber,

A first fixed end portion provided integrally with one of the bellows portions and fixed to the cylinder tube; A second fixed end portion provided integrally with the other bellows portion and fixed to the cylinder tube;

13. The chemical solution supply device according to claim 12, wherein a sleeve is rotatably mounted between the cylinder tube and the bellows, and the sleeve forms the first facing surface with which the panel member abuts. And a stopper surface for restricting a movement stroke of the hollow piston in the sleeve.

14. The chemical solution supply device according to claim 12, wherein both ends are held by the fixed end portion, and a flexible tube forming the pump chamber is disposed inside the bellows, wherein the bellows is provided. A chemical liquid supply device, wherein an expansion / contraction chamber in which an incompressible medium is enclosed is formed between the chemical tube and the flexible tube.