WO2005055257A1 - Conductive paste and laminated ceramic electronic component - Google Patents

Conductive paste and laminated ceramic electronic component Download PDF

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Publication number
WO2005055257A1
WO2005055257A1 PCT/JP2004/017060 JP2004017060W WO2005055257A1 WO 2005055257 A1 WO2005055257 A1 WO 2005055257A1 JP 2004017060 W JP2004017060 W JP 2004017060W WO 2005055257 A1 WO2005055257 A1 WO 2005055257A1
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Prior art keywords
powder
external electrode
conductive paste
iron oxide
copper
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PCT/JP2004/017060
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French (fr)
Japanese (ja)
Inventor
Seiji Koga
Kiyotaka Maegawa
Kunihiko Hamada
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Murata Manufacturing Co., Ltd.
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Priority to JP2005515898A priority Critical patent/JP4211783B2/en
Publication of WO2005055257A1 publication Critical patent/WO2005055257A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/228Terminals
    • H01G4/232Terminals electrically connecting two or more layers of a stacked or rolled capacitor
    • H01G4/2325Terminals electrically connecting two or more layers of a stacked or rolled capacitor characterised by the material of the terminals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors

Definitions

  • the external electrode 5 is formed by applying a conductive paste containing a conductive metal powder, a glass powder, and an organic vehicle to each end of the multilayer body 4. , Formed by baking this.
  • the present invention also provides a laminated body formed of a plurality of laminated ceramic layers and an internal conductor film containing nickel as a main component and formed along the interface between the ceramic layers,
  • the present invention is also directed to a multilayer ceramic electronic component including an external electrode containing copper as a main component and formed on the outer surface of the laminate so as to be electrically connected to the conductor film.
  • the conductive paste according to the present invention is used for forming external electrodes of a multilayer ceramic electronic component.
  • a case where the conductive paste according to the present invention is applied to the multilayer ceramic capacitor 1 will be described with reference to FIG. 1 again.
  • the description of the basic configuration of the multilayer ceramic capacitor 1 is referred to the above description.
  • the iron oxide powder in the conductive paste according to the present invention is contained in an amount of 3 to 40% by volume based on the total volume of the copper powder and the iron oxide powder.
  • the glass powder should be contained in an amount of 10 to 25% by volume based on the total volume of the copper powder, the iron oxide powder, and the glass powder. It is.
  • the content of the glass powder in the conductive paste is limited to 10 to 25% by volume with respect to the total volume of the copper powder, the oxidized iron powder and the glass powder. If the volume is less than 10% by volume, the voids are sufficiently filled with the glass component in the external electrode 5. This is because the external electrode 5 is in a porous state because it cannot be formed, and when the content exceeds 25% by volume, a relatively large amount of glass component precipitates on the surface of the external electrode 5, which may lead to poor plating.
  • a nickel plating film was formed on the external electrodes by electroplating, and a tin plating film was further formed thereon to obtain a multilayer ceramic capacitor according to each sample.
  • the multilayer ceramic capacitor of each sample is impregnated with a fluorescent solution under vacuum, and then the tin plating film, nickel plating film and copper formed on the multilayer ceramic capacitor are mainly used.
  • the external electrode as a component is electrolytically peeled off, and the fluorescent liquid that has reached the surface of the laminate is removed. It was evaluated by observation. When a fluorescent solution was observed, the density was poor and indicated by ⁇ X '' in Table 2, and when no fluorescent solution was observed, the density was judged to be good and indicated by ⁇ 2 '' in Table 2. Was.
  • the "high-temperature load test failure rate" was obtained in order to evaluate the reliability of the multilayer ceramic capacitor, and was obtained after applying a 9.5V DC voltage for 100 hours at a temperature of 105 ° C.
  • the insulation resistance of the multilayer ceramic capacitor was less than 10 7 ⁇ , it was determined to be defective, and the occurrence rate of defective products among the 18 multilayer ceramic capacitors was calculated.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Ceramic Capacitors (AREA)
  • Conductive Materials (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

A conductive paste that can be advantageously used in the formation of external electrode (5) composed mainly of copper on an external surface of laminate (4) furnished with internal conductor films (3) composed mainly of nickel, which conductive paste can avoid cracking of the laminate (4) attributed to thickening of the internal conductor films (3) caused by excess diffusion of copper contained in the external electrode (5) into the internal conductor films (3). There is provided a conductive paste comprising copper powder, iron oxide powder, glass powder and an organic vehicle, wherein iron oxide powder is contained in an amount of 3 to 40 vol.% based on the total volume of copper powder and iron oxide powder, and glass powder in an amount of 10 to 25 vol.% based on the total volume of copper powder, iron oxide powder and glass powder.

Description

明 細 書  Specification
導電性ペーストおよび積層セラミック電子部品  Conductive paste and multilayer ceramic electronic components
技術分野  Technical field
[0001] この発明は、導電性ペーストおよび積層セラミック電子部品に関するもので、特に、 積層セラミック電子部品の外部電極を形成するために好適に用いられる導電性べ一 スト、およびこの導電性ペーストを用いて外部電極が形成された積層セラミック電子 部品に関するものである。  The present invention relates to a conductive paste and a multilayer ceramic electronic component, and in particular, to a conductive base suitably used for forming external electrodes of the multilayer ceramic electronic component, and a method using the conductive paste. The present invention relates to a multilayer ceramic electronic component having external electrodes formed thereon.
背景技術  Background art
[0002] この発明にとって興味ある積層セラミック電子部品の一例としての積層セラミックコン デンサの一般的な構造が図 1に断面図で示されて 、る。  A general structure of a multilayer ceramic capacitor as an example of a multilayer ceramic electronic component that is of interest to the present invention is shown in a cross-sectional view in FIG.
[0003] 図 1に示すように、積層セラミックコンデンサ 1は、積層された複数のセラミック層 2、 およびセラミック層 2間の界面に沿って形成された複数の内部導体膜 3をもって構成 された、積層体 4を備えているとともに、積層体 4の外表面上であって、積層体 4の各 端部上に形成された 2つの外部電極 5を備えている。 As shown in FIG. 1, a multilayer ceramic capacitor 1 includes a plurality of stacked ceramic layers 2 and a plurality of internal conductor films 3 formed along an interface between the ceramic layers 2. It has the body 4 and has two external electrodes 5 formed on the outer surface of the laminate 4 and on each end of the laminate 4.
[0004] 内部導体膜 3は、各々の端縁の一部が積層体 4の外表面にまで届くように形成され て外部電極 5に電気的に接続されるが、一方の外部電極 5に電気的に接続される内 部導体膜 3と他方の外部電極 5に電気的に接続される内部導体膜 3とが積層方向に 交互に配置されている。 The internal conductor film 3 is formed so that a part of each edge reaches the outer surface of the multilayer body 4 and is electrically connected to the external electrode 5. The internal conductor films 3 electrically connected to each other and the internal conductor films 3 electrically connected to the other external electrode 5 are alternately arranged in the laminating direction.
[0005] また、外部電極 5上には、半田濡れ性や耐熱性などを向上させる目的で、たとえば[0005] Further, on the external electrodes 5, for the purpose of improving solder wettability, heat resistance, and the like, for example,
、ニッケルによる第 1のめつき膜 6が形成され、さらにその上に、錫または半田による 第 2のめつき膜 7が形成される。 Then, a first plating film 6 made of nickel is formed, and a second plating film 7 made of tin or solder is further formed thereon.
[0006] このような積層セラミックコンデンサ 1において、通常、外部電極 5は、導電性金属粉 末とガラス粉末と有機ビヒクルとを含有する導電性ペーストを、積層体 4の各端部に塗 布し、これを焼き付けることによって形成される。 In such a multilayer ceramic capacitor 1, usually, the external electrode 5 is formed by applying a conductive paste containing a conductive metal powder, a glass powder, and an organic vehicle to each end of the multilayer body 4. , Formed by baking this.
[0007] ところで、内部導体膜 3に含まれる導電成分として、最近では、卑金属、特に-ッケ ルが用いられることが多くなつてきている。このように、内部導体膜 3がニッケルを主成 分とする場合、外部電極 5を形成するために用いられる導電性ペーストに含まれる導 電性金属粉末としては、銅粉末を用いることが好ましい (たとえば、特許文献 1および 2参照)。これは、外部電極 5の形成のために導電性ペーストを焼き付ける際、内部導 体膜 3に含まれるニッケルと外部電極 5のための導電性ペーストに含まれる銅との間 で固相拡散が起こり、 Ni— Cu合金を生成して、内部導体膜 3と外部電極 5との良好な 接合状態を確保できるためである。 [0007] By the way, recently, as a conductive component contained in the internal conductor film 3, a base metal, particularly, nickel has been increasingly used. As described above, when the internal conductor film 3 is mainly composed of nickel, the conductive paste contained in the conductive paste used to form the external electrode 5 is used. It is preferable to use copper powder as the conductive metal powder (for example, see Patent Documents 1 and 2). This is because when the conductive paste is baked to form the external electrode 5, solid phase diffusion occurs between nickel contained in the internal conductor film 3 and copper contained in the conductive paste for the external electrode 5. This is because a Ni—Cu alloy can be generated to ensure a good bonding state between the internal conductor film 3 and the external electrode 5.
[0008] し力しながら、上述したように、外部電極 5の形成のための導電性ペーストが銅を含 み、他方、内部導体膜 3の形成のための導電性ペーストがニッケルを含む場合にお いて、外部電極 5を形成するために導電性ペーストを焼き付けると、外部電極 5に含 まれる銅が内部導体膜 3に含まれるニッケルに過剰に拡散することがある。  [0008] As described above, while the conductive paste for forming the external electrode 5 contains copper, the conductive paste for forming the internal conductor film 3 contains nickel, as described above. Here, when a conductive paste is baked to form the external electrode 5, copper contained in the external electrode 5 may excessively diffuse into nickel contained in the internal conductor film 3.
[0009] このような銅の過剰な拡散は、内部導体膜 3を太らせ、そのときに発生する応力によ つて、積層体 4にクラックを生じさせることになる。積層体 4で発生したクラックは、積層 セラミックコンデンサ 1の信頼性を低下させる。  [0009] Such excessive diffusion of copper causes the internal conductor film 3 to be thickened, and causes cracks in the laminate 4 due to the stress generated at that time. The cracks generated in the multilayer body 4 reduce the reliability of the multilayer ceramic capacitor 1.
[0010] 上述のような外部電極 5に含まれる銅の、内部導体膜 3への過剰な拡散を防ぐため 、外部電極 5の形成のための導電性ペーストの焼付け温度を低くすることが考えられ る。  [0010] In order to prevent excessive diffusion of copper contained in the external electrode 5 into the internal conductor film 3 as described above, it is conceivable to lower the baking temperature of a conductive paste for forming the external electrode 5. You.
[0011] し力しながら、導電性ペーストを低温で焼き付けると、外部電極 5の緻密性を十分に 確保できないことがある。そのため、前述しためっき膜 6および 7の形成のためのめつ き工程において、めっき液が、外部電極 5に存在するオープンポアを通して、あるい は外部電極 5に含まれるガラス成分を溶解しながら、積層体 4中に浸入し、セラミック 層 2の電気絶縁性を低下させることがある。  [0011] If the conductive paste is baked at a low temperature while pressing, the denseness of the external electrode 5 may not be sufficiently secured. Therefore, in the above-described plating step for forming the plating films 6 and 7, the plating solution passes through the open pores existing in the external electrode 5 or dissolves the glass component contained in the external electrode 5, It may penetrate into the laminate 4 and reduce the electrical insulation of the ceramic layer 2.
[0012] なお、外部電極 5の緻密性を高めるためには、より高温で焼き付ければよいことにな る力 このように高温で焼き付けると、前述したような外部電極 5に含まれる銅の内部 導体膜 3への過剰な拡散が生じることに起因する問題を引き起こすば力りでなぐ外 部電極 5に含まれるガラス成分の流動性が増し、このガラス成分が外部電極 5の表面 に浮き出し、めっき膜 6および 7の形成のためのめっき工程において、めっき不良を 招くことがある。  [0012] In order to increase the denseness of the external electrode 5, a force that is required to be baked at a higher temperature is obtained. The fluidity of the glass component contained in the external electrode 5 increases by force, which causes a problem caused by excessive diffusion into the conductive film 3, and the glass component emerges on the surface of the external electrode 5 and plating occurs. In the plating process for forming the films 6 and 7, plating failure may be caused.
特許文献 1:特開昭 59— 184511号公報  Patent Document 1: JP-A-59-184511
特許文献 2:特開平 11-97281号公報 発明の開示 Patent Document 2: JP-A-11-97281 Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0013] そこで、この発明の目的は、上述のような問題を解決し得る、導電性ペーストおよび これを用いて外部電極が形成された積層セラミック電子部品を提供しょうとすることで ある。  Therefore, an object of the present invention is to provide a conductive paste and a multilayer ceramic electronic component having an external electrode formed using the conductive paste, which can solve the above-described problems.
課題を解決するための手段  Means for solving the problem
[0014] この発明は、積層セラミック電子部品の外部電極を形成するために用いられる、導 電性ペーストにまず向けられる。この発明に係る導電性ペーストは、銅粉末とガラス 粉末と有機ビヒクルとを含有するが、上述した技術的課題を解決するため、さらに酸 化鉄粉末を含有することを特徴としている。そして、酸化鉄粉末は、銅粉末および酸 化鉄粉末の合計体積に対して、 3— 40体積%含有し、ガラス粉末は、銅粉末、酸ィ匕 鉄粉末およびガラス粉末の合計体積に対して、 10— 25体積%含有することを特徴と している。 The present invention is first directed to a conductive paste used to form external electrodes of a multilayer ceramic electronic component. The conductive paste according to the present invention contains copper powder, glass powder, and an organic vehicle, but is characterized by further containing iron oxide powder in order to solve the above-mentioned technical problem. The iron oxide powder contains 3 to 40% by volume based on the total volume of the copper powder and the iron oxide powder, and the glass powder contains the total volume of the copper powder, the iron oxide powder and the glass powder. , 10-25% by volume.
[0015] この発明は、また、積層された複数のセラミック層と、セラミック層間の界面に沿って 形成された、ニッケルを主成分とする内部導体膜とをもって形成された積層体、なら びに、内部導体膜に電気的に接続されるように積層体の外表面上に形成された、銅 を主成分とする外部電極を備える、積層セラミック電子部品にも向けられる。  [0015] The present invention also provides a laminated body formed of a plurality of laminated ceramic layers and an internal conductor film containing nickel as a main component and formed along the interface between the ceramic layers, The present invention is also directed to a multilayer ceramic electronic component including an external electrode containing copper as a main component and formed on the outer surface of the laminate so as to be electrically connected to the conductor film.
[0016] この発明に係る積層セラミック電子部品において、上記外部電極が、前述したこの 発明に係る導電性ペーストを焼結させて得られた焼結体力 なることを特徴として ヽ る。  [0016] The multilayer ceramic electronic component according to the present invention is characterized in that the external electrode is a sintered body obtained by sintering the above-described conductive paste according to the present invention.
[0017] この発明は、また、チタンを含有する複合酸化物を主成分とする、積層された複数 のセラミック層と、セラミック層間の界面に沿って形成された、ニッケルを主成分とする 内部導体膜とをもって構成された積層体、ならびに、内部導体膜に電気的に接続さ れるように積層体の外表面上に形成された、銅を主成分とする外部電極を備える、積 層セラミック電子部品にも向けられる。  [0017] The present invention also provides a plurality of stacked ceramic layers mainly composed of a composite oxide containing titanium, and an internal conductor mainly composed of nickel formed along an interface between the ceramic layers. A multilayer ceramic electronic component comprising: a multilayer body constituted by a film; and an external electrode mainly composed of copper formed on an outer surface of the multilayer body so as to be electrically connected to the internal conductor film. Also directed to.
[0018] 上記積層セラミック電子部品において、この発明では、外部電極が、ガラス成分とし て、鉄酸化物およびチタン酸化物を含有するホウケィ酸亜鉛系ガラスを含み、セラミ ック層とこれに接する外部電極との界面に、ニッケル、亜鉛、チタンおよび鉄を含有 するスピネル構造の結晶相を生成して ヽる反応層が形成されて!ヽることを特徴として いる。 [0018] In the multilayer ceramic electronic component, according to the present invention, the external electrode includes, as a glass component, zinc borosilicate glass containing iron oxide and titanium oxide, and a ceramic layer and an external electrode in contact with the ceramic layer. Contains nickel, zinc, titanium and iron at the interface with the electrode This is characterized in that a reaction layer is formed by forming a spinel-structured crystalline phase.
発明の効果  The invention's effect
[0019] この発明に係る導電性ペーストは、前述したように、所定量の酸化鉄粉末を含有し ている。この酸化鉄の含有は、導電性ペーストを積層セラミック電子部品の外部電極 の形成のために用いたとき、次のような効果をもたらす。  [0019] The conductive paste according to the present invention contains a predetermined amount of iron oxide powder as described above. The inclusion of iron oxide has the following effects when the conductive paste is used for forming external electrodes of a multilayer ceramic electronic component.
[0020] まず、導電性ペーストに含有される酸化鉄は、酸素供与効果があり、焼付け時に還 元されて、酸素を放出する。この放出された酸素は、導電性ペーストの脱脂を促進し 、導電性ペーストに含有される銅粉末の焼結性を向上させ、結果として、外部電極の 緻密性を向上させる。  First, iron oxide contained in the conductive paste has an oxygen donating effect, and is reduced during baking to release oxygen. The released oxygen accelerates the degreasing of the conductive paste, improves the sinterability of the copper powder contained in the conductive paste, and as a result, improves the denseness of the external electrode.
[0021] また、導電性ペーストの焼付け時において、導電性ペーストに含有されるガラス成 分中に酸ィ匕鉄が溶解し、このように酸ィ匕鉄が溶解したガラス成分と積層体に備えるセ ラミック層を構成するセラミックとが反応し、セラミック層とこれに接する外部電極との 界面に反応層が形成される。  [0021] Further, at the time of baking of the conductive paste, the oxidized iron is dissolved in the glass component contained in the conductive paste, and the glass component in which the oxidized iron is dissolved is provided in the laminate. The ceramic constituting the ceramic layer reacts, and a reaction layer is formed at the interface between the ceramic layer and an external electrode in contact with the ceramic layer.
[0022] この反応層は、まず、外部電極の成分が内部導体膜へ過剰に拡散することを防止 し、その結果、外部電極に含まれる銅が、内部導体膜に含まれる、たとえばニッケル に過剰に拡散することによって、内部導体膜が太ることを防止し、積層体においてク ラックを生じさせ〖こくくすることができる。  [0022] The reaction layer first prevents the components of the external electrode from excessively diffusing into the internal conductor film. As a result, the copper contained in the external electrode becomes excessively contained in the internal conductor film, for example, nickel. This prevents the internal conductor film from becoming thicker, and can cause cracks in the laminate to increase the thickness.
[0023] また、反応層の存在は、積層体へのめっき液の浸入を効果的に防止する。前述し た外部電極の緻密性の向上も、また、めっき液の浸入の防止に寄与する。さらに、導 電性ペースト中のガラス成分は、前述したように、ここに酸ィ匕鉄が溶解することによつ て、その耐めっき液溶解性が向上する。このガラス成分の耐めっき液溶解性の向上も 、また、めっき液の浸入を防止するのに寄与する。  Further, the presence of the reaction layer effectively prevents the plating solution from entering the laminate. The above-described improvement in the fineness of the external electrodes also contributes to prevention of intrusion of the plating solution. Further, as described above, the glass component in the conductive paste dissolves the iron oxide therein, thereby improving the plating solution solubility. This improvement in the solubility of the glass component in the plating solution also contributes to preventing the penetration of the plating solution.
[0024] このようなことから、この発明によれば、電気絶縁性ゃ耐候性などの信頼性に優れ た積層セラミック電子部品を提供することができる。  From the above, according to the present invention, it is possible to provide a multilayer ceramic electronic component having excellent reliability such as electrical insulation and weather resistance.
図面の簡単な説明  Brief Description of Drawings
[0025] [図 1]図 1は、この発明にとって興味ある積層セラミック電子部品の一例としての積層 セラミックコンデンサ 1を図解的に示す断面図である。 [図 2]図 2は、図 1に示した積層セラミックコンデンサ 1の部分 Aを拡大して図解的に示 す断面図であり、この発明に係る導電性ペーストを用いて形成された外部電極 5とセ ラミック層 2との界面に形成された反応層 8を図解するものである。 FIG. 1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 as an example of a multilayer ceramic electronic component that is of interest to the present invention. [FIG. 2] FIG. 2 is an enlarged cross-sectional view schematically illustrating a portion A of the multilayer ceramic capacitor 1 shown in FIG. 1, and shows external electrodes 5 formed using a conductive paste according to the present invention. 3 illustrates a reaction layer 8 formed at the interface between the ceramic layer 2 and the ceramic layer 2.
符号の説明  Explanation of symbols
[0026] 1 積層セラミックコンデンサ [0026] 1 Multilayer ceramic capacitor
2 セラミック層  2 Ceramic layer
3 内部導体膜  3 Internal conductor film
4 積層体  4 laminate
5 外部電極  5 External electrode
6, 7 めっき膜  6, 7 Plating film
8 反応層  8 Reaction layer
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0027] この発明に係る導電性ペーストは、積層セラミック電子部品の外部電極を形成する ために用いられるものである。以下に、図 1を再び参照しながら、この発明に係る導電 性ペーストが積層セラミックコンデンサ 1にお 、て適用された場合にっ 、て説明する。 なお、積層セラミックコンデンサ 1の基本的構成についての説明は、前述の説明を援 用する。 [0027] The conductive paste according to the present invention is used for forming external electrodes of a multilayer ceramic electronic component. Hereinafter, a case where the conductive paste according to the present invention is applied to the multilayer ceramic capacitor 1 will be described with reference to FIG. 1 again. The description of the basic configuration of the multilayer ceramic capacitor 1 is referred to the above description.
[0028] 積層セラミックコンデンサ 1において、外部電極 5は、この発明に係る導電性ペース トを積層体 4の外表面上に付与し、乾燥させた後、焼成することによって得られた焼 結体から構成される。  [0028] In the multilayer ceramic capacitor 1, the external electrode 5 is formed from a sintered body obtained by applying the conductive paste according to the present invention on the outer surface of the multilayer body 4, drying, and firing. Be composed.
[0029] 導電性ペーストは、銅粉末とガラス粉末と有機ビヒクルとに加えて、酸化鉄粉末を含 有している。ここで、銅粉末は、銅または銅を主成分とする金属力 なるものである。 また、酸化鉄粉末は、 Fe O 、FeOおよび Fe Oのいずれの鉄酸化物から構成され  [0029] The conductive paste contains iron oxide powder in addition to copper powder, glass powder, and an organic vehicle. Here, the copper powder is copper or a metal having copper as a main component. The iron oxide powder is composed of iron oxide of any of FeO, FeO and FeO.
2 3 3 4  2 3 3 4
てもよい。また、ガラス粉末としては、たとえばホウケィ酸亜鉛系ガラス力もなるものが 好適に用いられる。  May be. Further, as the glass powder, for example, a powder having a zinc borosilicate-based glass power is preferably used.
[0030] この発明に係る導電性ペースト中の酸化鉄粉末は、銅粉末および酸化鉄粉末の合 計体積に対して、 3— 40体積%含有するようにされる。また、ガラス粉末は、銅粉末、 酸化鉄粉末およびガラス粉末の合計体積に対して、 10— 25体積%含有するようにさ れる。 [0030] The iron oxide powder in the conductive paste according to the present invention is contained in an amount of 3 to 40% by volume based on the total volume of the copper powder and the iron oxide powder. The glass powder should be contained in an amount of 10 to 25% by volume based on the total volume of the copper powder, the iron oxide powder, and the glass powder. It is.
[0031] 図 2は、図 1に示した積層セラミックコンデンサ 1の部分 Aを拡大して図解的に示す 断面図である。  FIG. 2 is a cross-sectional view schematically showing an enlarged part A of the multilayer ceramic capacitor 1 shown in FIG.
[0032] 図 2に示すように、この発明に係る導電性ペーストを用いて外部電極 5が形成され たとき、積層体 4に備えるセラミック層 2とこれに接する外部電極 5との界面には、反応 層 8が形成される。  As shown in FIG. 2, when the external electrode 5 is formed using the conductive paste according to the present invention, the interface between the ceramic layer 2 included in the laminate 4 and the external electrode 5 in contact with the ceramic layer 2 includes: A reaction layer 8 is formed.
[0033] セラミック層 2を構成するセラミックとして、たとえば BaTiOのようなチタンを含有す  [0033] As the ceramic constituting the ceramic layer 2, for example, titanium such as BaTiO is contained.
3  Three
る複合酸化物を主成分とするものが用いられ、内部導体膜 3がニッケルを主成分とし 、外部電極 5を形成するために用いられる導電性ペーストにおいて、ガラス粉末とし て、ホウケィ酸亜鉛系ガラスカゝらなるものが用いられたとき、外部電極 5は、ガラス成 分として、鉄酸化物およびチタン酸化物を含有するホウケィ酸亜鉛系ガラスを含む状 態となり、反応層 8においては、ニッケル、亜鉛、チタンおよび鉄を含有するスピネル 構造の結晶相を生成することが確認されて 、る。  In the conductive paste used for forming the external electrodes 5, the inner conductor film 3 is mainly composed of nickel, and in the conductive paste used for forming the external electrodes 5, zinc borate-based glass powder is used as the glass powder. When such a material is used, the external electrode 5 is in a state of containing zinc borosilicate glass containing iron oxide and titanium oxide as a glass component, and nickel and zinc are contained in the reaction layer 8. It has been confirmed that a crystalline phase having a spinel structure containing titanium and iron is formed.
[0034] 前述したように、導電性ペースト中の酸化鉄粉末の含有量を、銅粉末および酸ィ匕 鉄粉末の合計体積に対して、 3— 40体積%と限定したのは、次の理由による。  [0034] As described above, the content of the iron oxide powder in the conductive paste is limited to 3 to 40% by volume based on the total volume of the copper powder and the iron oxide powder, for the following reason. by.
[0035] すなわち、酸化鉄粉末の含有量が 3体積%未満では、酸化鉄粉末の含有の効果 が十分に発揮されない。そのため、酸化鉄による酸素供与効果が少なぐ導電性べ 一ストの脱脂を十分に促進し得ず、外部電極 5の緻密性を十分に向上させることがで きない。また、セラミック層 2とこれに接する外部電極 5との界面に、外部電極 5中のガ ラス成分とセラミックとの反応による反応層が生成されにくく、外部電極 5に含有される 銅の内部導体膜 3中への過剰な拡散を抑制することができず、積層体 4においてクラ ックが生じやすくなつてしまう。  [0035] That is, when the content of the iron oxide powder is less than 3% by volume, the effect of the iron oxide powder content is not sufficiently exhibited. Therefore, degreasing of the conductive paste, which has a small oxygen donating effect by iron oxide, cannot be sufficiently promoted, and the denseness of the external electrode 5 cannot be sufficiently improved. In addition, a reaction layer due to the reaction between the glass component in the external electrode 5 and the ceramic is hardly generated at the interface between the ceramic layer 2 and the external electrode 5 in contact with the ceramic layer 2, and the copper internal conductor film contained in the external electrode 5 Excessive diffusion into 3 cannot be suppressed, and cracks tend to occur in laminate 4.
[0036] 他方、酸化鉄粉末の含有量が 40体積%を超えると、導電性ペースト中の銅粉末の 焼結が抑制され、得られた外部電極 5がポーラスな状態となってしまい、積層セラミツ クコンデンサ 1の信頼性が低下する。  [0036] On the other hand, when the content of the iron oxide powder exceeds 40% by volume, sintering of the copper powder in the conductive paste is suppressed, and the obtained external electrode 5 becomes porous, and the laminated ceramics The reliability of the capacitor 1 decreases.
[0037] また、前述したように、導電性ペースト中のガラス粉末の含有量を、銅粉末、酸ィ匕鉄 粉末およびガラス粉末の合計体積に対して、 10— 25体積%と限定したのは、 10体 積%未満であると、外部電極 5においてガラス成分によって空隙を十分に埋めること ができないために、外部電極 5がポーラスな状態となり、他方、 25体積%を超えると、 外部電極 5の表面にガラス成分が比較的多く析出し、めっき不良を招くことがあるから である。 [0037] Further, as described above, the content of the glass powder in the conductive paste is limited to 10 to 25% by volume with respect to the total volume of the copper powder, the oxidized iron powder and the glass powder. If the volume is less than 10% by volume, the voids are sufficiently filled with the glass component in the external electrode 5. This is because the external electrode 5 is in a porous state because it cannot be formed, and when the content exceeds 25% by volume, a relatively large amount of glass component precipitates on the surface of the external electrode 5, which may lead to poor plating.
[0038] なお、導電性ペーストの焼付け時の脱脂を促進するため、導電性ペーストに含有さ れる酸ィ匕鉄粉末の酸素供与効果によることに代えて、焼付け時の雰囲気の酸素濃度 を上げることが考えられるが、このように、雰囲気の酸素濃度を上げても、外部電極 5 の表面層の脱脂は促進される可能性があるが、外部電極 5の内部では脱脂の十分 な促進を望むことができな 、。  [0038] In order to promote degreasing during baking of the conductive paste, the oxygen concentration of the atmosphere during baking should be increased instead of relying on the oxygen donating effect of the oxidized iron powder contained in the conductive paste. Although it is conceivable that degreasing of the surface layer of the external electrode 5 may be promoted even when the oxygen concentration in the atmosphere is increased in this way, it is desirable to sufficiently promote degreasing inside the external electrode 5. I can't.
[0039] また、導電性ペーストに酸化鉄粉末を含有させることに代えて、導電性ペーストに 含有されるガラス成分に酸化鉄を含有させることも考えられる。しカゝしながら、ガラス 成分中の酸化鉄は、導電性ペースト中に粉末として含有される酸化鉄に比べると、焼 付け工程において還元されにくぐしたがって、酸素供与効果が低い。  [0039] Instead of including iron oxide powder in the conductive paste, it is also conceivable to include iron oxide in a glass component contained in the conductive paste. However, iron oxide in the glass component is less likely to be reduced in the baking process than iron oxide contained as a powder in the conductive paste, and thus has a lower oxygen donating effect.
[0040] また、酸化鉄に代えて、たとえば酸ィ匕コバルトまたは酸ィ匕ニッケルなどの金属 酸ィ匕 物の平衡酸素分圧が比較的高 ヽ酸化物(還元されやす ヽ酸化物)を用いることも考 えられるが、これら酸化コバルトや酸化ニッケルは、酸化鉄よりも還元されやすいため 、酸素を放出するタイミングが早すぎ、そのため、脱脂を促進する効果は薄い。  Further, instead of iron oxide, a metal oxide having a relatively high equilibrium oxygen partial pressure (a metal oxide that is easily reduced) such as a metal oxide such as cobalt oxide or nickel oxide is used. Although it is conceivable that these cobalt oxides and nickel oxides are more easily reduced than iron oxides, the timing of releasing oxygen is too early, and therefore, the effect of accelerating the degreasing is weak.
[0041] 次に、この発明の範囲を決定するため、およびこの発明による効果を確認するため に実施した実験例について説明する。  Next, experimental examples performed to determine the scope of the present invention and to confirm the effects of the present invention will be described.
[0042] 表 1に示すような体積%をもって、銅粉末、酸化鉄粉末としての Fe O粉末、ガラス  [0042] Copper powder, Fe O powder as iron oxide powder, glass
2 3  twenty three
粉末および有機ビヒクルを、 3本ロールによって混合および分散処理し、試料 1一 20 の各々〖こ係る導電性ペーストを得た。  The powder and the organic vehicle were mixed and dispersed using a three-roll mill to obtain each of the conductive pastes of Samples 1-120.
[0043] [表 1]
Figure imgf000010_0001
[Table 1]
Figure imgf000010_0001
[0044] なお、試料 1一 20のうち、試料 1と試料 9、試料 2と試料 10、試料 3と試料 11、試料 4 と試料 12、試料 5と試料 15、試料 6と試料 18、および試料 7と試料 19は、それぞれ、 組成に関しては互いに同一であるが、後述する「焼付けピーク温度」が異なっている [0044] Note that, of Samples 1 to 20, Sample 1 and Sample 9, Sample 2 and Sample 10, Sample 3 and Sample 11, Sample 4 and Sample 12, Sample 5 and Sample 15, Sample 6 and Sample 18, and Sample Samples 7 and 19 have the same composition, but differ in the “baking peak temperature” described later.
[0045] 表 1の「Fe O粉末」の欄において括弧内に示した数値は、銅粉末および Fe O [0045] In the column of "Fe O powder" in Table 1, the values shown in parentheses are the values of copper powder and Fe 2 O 3.
2 3 2 3 粉末の合計体積に対する、 Fe O粉末の体積%を示している。また、表 1の「ガラス  It shows the volume percentage of Fe 2 O 3 powder with respect to the total volume of 2 3 2 3 powder. In addition, Table 1
2 3  twenty three
粉末」の欄において括弧内に示した数値は、銅粉末、 Fe O  The values in parentheses in the column of `` Powder '' are copper powder, Fe 2 O 3
2 3粉末およびガラス粉末 の合計体積に対する、ガラス粉末の体積%を示して 、る。  Shows the volume percentage of glass powder with respect to the total volume of 23 powder and glass powder.
[0046] また、ガラス粉末としては、平均粒径が 2 μ mであり、軟ィ匕点 530— 560°Cのホウケ ィ酸亜鉛系ガラスカゝらなるものを用いた。また、有機ビヒクルとしては、主にアクリル榭 脂からなる有機バインダを、主にテルビネオールからなる有機溶剤に溶解させたもの を用いた。 The glass powder has an average particle size of 2 μm and has a softening point of 530-560 ° C. A glass material made of zinc oxide-based glass was used. Further, as the organic vehicle, an organic vehicle obtained by dissolving an organic binder mainly composed of an acrylic resin in an organic solvent mainly composed of terbineol was used.
[0047] 次に、 BaTiOを主成分としかつ各厚みが 2 mとされたセラミック層および-ッケ  Next, a ceramic layer containing BaTiO as a main component and each having a thickness of 2 m was used.
3  Three
ルを主成分とする内部導体膜が形成された、積層セラミックコンデンサのための積層 体を用意した。この積層体を得るため、還元性雰囲気中において、 1200— 1400°C の温度での焼成工程を実施した。  A multilayer body for a multilayer ceramic capacitor, on which an internal conductor film mainly composed of a capacitor was formed, was prepared. In order to obtain this laminate, a firing step at a temperature of 1200 to 1400 ° C. was performed in a reducing atmosphere.
[0048] 次に、上記積層体の両端部に、表 1に示した試料 1一 20の各々に係る導電性べ一 ストを浸漬により塗布し、 150°Cの温度で 15分間乾燥させた後、酸素濃度 lOOppm 以下の N— O雰囲気中において焼き付けを実施し、導電性ペーストの焼結体から [0048] Next, a conductive paste according to each of Samples 120 shown in Table 1 was applied to both ends of the laminate by dipping, and dried at a temperature of 150 ° C for 15 minutes. Baking in an N-O atmosphere with an oxygen concentration of lOOppm or less
2 2  twenty two
なる外部電極を形成した。  External electrodes were formed.
[0049] ここで、表 2の「焼付けピーク温度」の欄に示すように、試料 1一 8については、最高 温度 820°Cを 10分間付与する焼付け条件を適用し、試料 9一 20については、最高 温度 880°Cを 10分間付与する焼付け条件を適用した。 Here, as shown in the column of “baking peak temperature” in Table 2, the baking conditions of applying a maximum temperature of 820 ° C. for 10 minutes were applied to samples 18 and 18 and A baking condition of applying a maximum temperature of 880 ° C. for 10 minutes was applied.
[0050] 次に、上記外部電極上に、電気めつきによって、ニッケルめっき膜を形成し、さらに その上に錫めつき膜を形成し、各試料に係る積層セラミックコンデンサを得た。 Next, a nickel plating film was formed on the external electrodes by electroplating, and a tin plating film was further formed thereon to obtain a multilayer ceramic capacitor according to each sample.
[0051] 次に、このようにして得られた各試料に係る積層セラミックコンデンサについて、表 2 に示すように、「反応層の厚み」、「めっき不良率」、「緻密性」および「高温負荷試験 不良率」をそれぞれ評価した。 Next, as shown in Table 2, regarding the multilayer ceramic capacitors according to the respective samples thus obtained, “reaction layer thickness”, “plating defect rate”, “denseness”, and “high temperature load” The test failure rate was evaluated.
[0052] 「反応層の厚み」につ 、ては、積層セラミックコンデンサの断面を SEM (走査型電 子顕微鏡)にて観察することによって求めた。 [0052] The "thickness of the reaction layer" was determined by observing a cross section of the multilayer ceramic capacitor with a scanning electron microscope (SEM).
[0053] 「めっき不良率」につ 、ては、積層セラミックコンデンサの外部電極上の錫めつき膜 を剥離した状態で、外部電極を 50倍の実体顕微鏡にて観察し、ニッケルめっき膜の 下地の銅を主成分とする外部電極が露出しているものをめつき不良品と判定し、この ようなめっき不良品の発生率を求めたものである。 [0053] Regarding the "plating failure rate", the tin-coated film on the external electrode of the multilayer ceramic capacitor was peeled off, and the external electrode was observed with a stereoscopic microscope of 50 times. Those having exposed external electrodes containing copper as a main component were determined to be defective plating, and the incidence of such defective plating was determined.
[0054] 「緻密性」につ 、ては、各試料に係る積層セラミックコンデンサに蛍光液を真空含浸 させた後、積層セラミックコンデンサに形成されている錫めつき膜、ニッケルめっき膜 および銅を主成分とする外部電極を電解剥離して、積層体表面に到達した蛍光液を 観察することによって評価したものである。蛍光液が認められた場合には、緻密性が 劣り、表 2において「X」で示し、蛍光液が認められない場合には、緻密性が良好で あるとして、表 2において「〇」で示した。 Regarding “density”, the multilayer ceramic capacitor of each sample is impregnated with a fluorescent solution under vacuum, and then the tin plating film, nickel plating film and copper formed on the multilayer ceramic capacitor are mainly used. The external electrode as a component is electrolytically peeled off, and the fluorescent liquid that has reached the surface of the laminate is removed. It was evaluated by observation. When a fluorescent solution was observed, the density was poor and indicated by `` X '' in Table 2, and when no fluorescent solution was observed, the density was judged to be good and indicated by `` 2 '' in Table 2. Was.
[0055] 「高温負荷試験不良率」は、積層セラミックコンデンサの信頼性を評価するために求 めたもので、 105°Cの温度下で、 9. 5Vの直流電圧を 100時間印加した後の積層セ ラミックコンデンサの絶縁抵抗が 107 Ω未満となったものを不良品と判定し、 18個の 積層セラミックコンデンサ中での不良品の発生率を求めたものである。 [0055] The "high-temperature load test failure rate" was obtained in order to evaluate the reliability of the multilayer ceramic capacitor, and was obtained after applying a 9.5V DC voltage for 100 hours at a temperature of 105 ° C. When the insulation resistance of the multilayer ceramic capacitor was less than 10 7 Ω, it was determined to be defective, and the occurrence rate of defective products among the 18 multilayer ceramic capacitors was calculated.
[0056] [表 2]  [Table 2]
Figure imgf000012_0001
Figure imgf000012_0001
[0057] 表 1および表 2において、試料番号に *を付したものは、この発明の範囲外のもの である。 [0057] In Tables 1 and 2, the samples numbered with * are out of the scope of the present invention.
[0058] まず、表 1に示すように、ガラス粉末の含有率に関して、試料 8および 17では、ガラ ス粉末が、導電性ペーストの体積に対して、 7. 5体積%、すなわち、銅粉末、 Fe O 粉末およびガラス粉末の合計体積に対して、 30体積%というように、 25体積%を超 えて含有しているので、外部電極の表面にガラス成分が比較的多く析出し、表 2に示 すように、高いめっき不良率を示した。 First, as shown in Table 1, with respect to the glass powder content, in Samples 8 and 17, the glass powder contained 7.5% by volume of the conductive paste, ie, copper powder, Fe O As it contains more than 25% by volume, such as 30% by volume, based on the total volume of the powder and glass powder, a relatively large amount of glass components precipitate on the surface of the external electrode, as shown in Table 2. In addition, a high plating defect rate was shown.
[0059] 他方、試料 13では、表 1に示すように、ガラス粉末力 導電性ペーストの体積に対し て、 1. 25体積%、すなわち、銅粉末、 Fe O粉末およびガラス粉末の合計体積に [0059] On the other hand, in Sample 13, as shown in Table 1, 1.25% by volume based on the volume of the glass powder force conductive paste, that is, the total volume of copper powder, FeO powder, and glass powder.
2 3  twenty three
対して、 5体積%というように、 10体積%未満にすぎないので、外部電極においてガ ラス成分によって空隙を十分に埋めることができず、表 2に示すように、緻密性が劣り 、また、高い高温負荷試験不良率を示した。  On the other hand, since it is less than 10% by volume, such as 5% by volume, the voids cannot be sufficiently filled by the glass component in the external electrode, and as shown in Table 2, the denseness is poor. The high temperature load test failure rate was high.
[0060] 次に、 Fe O粉末の含有率に関して、表 1に示すように、試料 1 Next, regarding the content of the Fe 2 O 3 powder, as shown in Table 1, the sample 1
2 3 一 3および 9一 11で は、 Fe O粉末が、導電性ペーストの体積に対して、 0. 4体積%以下、すなわち、銅 In 2 3 1 3 and 9 1 1 1, Fe O powder is not more than 0.4% by volume based on the volume of the conductive paste, that is, copper
2 3 twenty three
粉末および Fe O粉末の合計体積に対して、 2体積%以下というように、 3体積%未  3% by volume, such as 2% by volume or less, based on the total volume of the powder and FeO powder
2 3  twenty three
満である。そのため、反応層を生成しやすくする Fe Oの効果がほとんど得られない  Is full. Therefore, the effect of Fe O, which makes it easy to form a reaction layer, is hardly obtained.
2 3  twenty three
か全く得られないため、表 2に示すように、薄い反応層しか形成されず、導電性べ一 スト中の銅の内部導体膜への過剰な拡散を抑制することができず、積層体にクラック が多数生じ、高い高温負荷試験不良率を示した。  As shown in Table 2, only a thin reaction layer was formed, and excessive diffusion of copper in the conductive base into the internal conductor film could not be suppressed. Many cracks occurred, indicating a high failure rate in the high temperature load test.
[0061] なお、特に表 2を参照しながら、上記試料 1一 3と試料 9一 11との間で比較すると、 焼付けピーク温度を 880°Cと高くした試料 9一 11によれば、焼付けピーク温度が 820 °Cと比較的低い試料 1一 3に比べて、緻密性の改善が図られているが、高温負荷試 験不良率については、それほどの改善を図ることができな力つた。  [0061] In particular, referring to Table 2, when comparing Samples 13 and 9 with Samples 9-11, according to Sample 9-11 in which the baking peak temperature was increased to 880 ° C, the baking peak temperature was high. Although the compactness was improved compared with the samples 13 and 13 whose temperature was relatively low at 820 ° C, the failure rate of the high temperature load test was not so much improved.
[0062] 他方、 Fe O粉末の含有率に関して、表 1に示すように、試料 20では、 Fe O粉  [0062] On the other hand, as shown in Table 1, the content of FeO powder
2 3 2 3 末力 導電性ペーストの体積に対して、 10体積0 /0、すなわち、銅粉末および Fe O By volume of the 2 3 2 3 end force conductive paste 10 volume 0/0, i.e., copper powder and Fe O
2 3 粉末の合計体積に対して、 50体積%というように、 40体積%を超えて含有している。 そのため、表 2に示すように、反応層が生成されやすくなつたものの、外部電極の焼 結が抑制され、緻密性が悪ぐ高い高温負荷試験不良率を示した。  It contains more than 40% by volume, such as 50% by volume, based on the total volume of the 23 powder. As a result, as shown in Table 2, although the reaction layer was easily formed, the sintering of the external electrode was suppressed, and a high failure rate in the high-temperature load test, which was inferior in denseness, was exhibited.
[0063] これらに対して、表 1に示すように、 Fe O粉末の含有率が、銅粉末および Fe O [0063] On the other hand, as shown in Table 1, the content of Fe 2 O 3 powder was
2 3 2 3 粉末の合計体積に対して、 3— 40体積%であり、かつ、ガラス粉末の含有率が、銅粉 末、 Fe O粉末およびガラス粉末の合計体積に対して、 10— 25体積%であるという 2 3 2 3 3-40% by volume based on the total volume of powder, and the content of glass powder is 10-25% by volume based on the total volume of copper powder, FeO powder and glass powder. %
2 3 twenty three
条件を満たす、この発明の範囲内にある試料 4一 7、 12、 14一 16、 18および 19につ いて考察する。 Samples 4-1 7, 12, 14-1 16, 18 and 19 that meet the requirements and fall within the scope of the present invention And consider.
[0064] この発明の範囲内にある上記試料のうち、表 2に示すように、 880°Cといった比較的 高い焼付けピーク温度が適用された試料 12、 14一 16、 18および 19では、いずれも 、十分な厚みの反応層が形成され、めっき不良率、緻密性および高温負荷試験不良 率の 、ずれにっ ヽても良好な結果を示した。  As shown in Table 2, among the samples within the scope of the present invention, samples 12, 14, 116, 18, and 19 to which a relatively high baking peak temperature of 880 ° C. was applied, As a result, a reaction layer having a sufficient thickness was formed, and good results were obtained even with respect to deviations in the plating failure rate, denseness, and high temperature load test failure rate.
[0065] 他方、試料 4一 7では、表 2に示すように、焼付けピーク温度が 820°Cと比較的低い ため、特に試料 5、 6および 7において、緻密性が劣り、高い高温負荷試験不良率を 示した。し力しながら、これら試料 5、 6および 7を、これら各々と同じ組成を有する試 料 15、 18および 19と比較すればわ力るように、焼付けピーク温度を 880°Cと高くす れば、緻密性および高温負荷試験不良率をともに改善することができる。  On the other hand, as shown in Table 2, in Samples 4 to 7, the baking peak temperature was relatively low at 820 ° C., and therefore, particularly in Samples 5, 6, and 7, the denseness was poor and the high temperature load test failure was high. The rate was shown. By increasing the baking peak temperature to 880 ° C, as shown, while comparing these Samples 5, 6 and 7 with Samples 15, 18 and 19, which have the same composition as each other, , Compactness and high-temperature load test failure rate can both be improved.
[0066] 以上のように、所定量の Fe O粉末を導電性ペーストに含有させることによって、め  As described above, by adding a predetermined amount of Fe 2 O powder to the conductive paste,
2 3  twenty three
つき不良を生じさせないようにしながら、緻密であり、かつ高温負荷試験で良好な結 果をもたらす、外部電極を形成することができる。  It is possible to form an external electrode that is dense and gives good results in a high-temperature load test, while preventing the occurrence of poor defects.
[0067] これは、外部電極形成のための焼き付け時において、 Fe Oが外部電極中のガラ [0067] This is because during the baking for forming the external electrode, FeO
2 3  twenty three
ス成分に溶解するとともに、 BaTiOを主成分とするセラミック層に含まれるチタンが  Titanium dissolved in the ceramic layer containing BaTiO as the main component
3  Three
外部電極中のガラス成分に溶解かつ拡散することによって、外部電極中のガラス成 分の耐めっき液溶解性が向上したためであり、かつ、セラミック層と外部電極との界面 に反応層が形成され、この反応層が外部電極成分の内部導体膜への過剰な拡散を 防止したためである。  This is because the dissolution and diffusion of the glass component in the external electrode improved the plating solution solubility of the glass component in the external electrode, and a reaction layer was formed at the interface between the ceramic layer and the external electrode. This is because the reaction layer prevented excessive diffusion of the external electrode component into the internal conductor film.
[0068] なお、前述した反応層は耐酸性を有して!/、る。このことは、外部電極を形成した積 層セラミックコンデンサの断面を酸性の錫めつき液に浸漬しても、反応層がめっき液 に溶解しな 、ことから確認された。  The reaction layer described above has acid resistance! This was confirmed by the fact that the reaction layer did not dissolve in the plating solution even when the cross section of the multilayer ceramic capacitor having the external electrodes formed was immersed in an acidic tin plating solution.
[0069] また、反応層の結晶構造を高温 XRD (X線回折)で、また、構成元素を SAM (走査 型ォージェ電子顕微鏡)で分析したところ、ニッケル、亜鉛、チタンおよび鉄を含有す るスピネル構造の結晶相を生成していることが確認された。 When the crystal structure of the reaction layer was analyzed by high-temperature XRD (X-ray diffraction), and the constituent elements were analyzed by SAM (scanning Auger electron microscope), the spinel containing nickel, zinc, titanium and iron It was confirmed that a crystalline phase having a structure was formed.
[0070] なお、上記実験例では、酸化鉄粉末として、 Fe O粉末を用いたが、 FeO粉末ま [0070] In the above experimental example, FeO powder was used as the iron oxide powder.
2 3  twenty three
たは Fe O粉末を用いた場合であっても、同様の効果が得られる。  The same effect can be obtained even when FeO powder is used.
3 4  3 4
[0071] また、上記実験例では、積層セラミック電子部品が積層セラミックコンデンサであつ て、セラミック層を構成するセラミックが BaTiO を主成分とするものの場合であつたが In the above experimental example, the multilayer ceramic electronic component is a multilayer ceramic capacitor. Therefore, the case where the ceramic constituting the ceramic layer is composed mainly of BaTiO
3  Three
、 BaTiO系に限らず、チタンを含有する複合酸化物を主成分とするセラミックからセ  In addition to BaTiO-based ceramics, ceramics mainly composed of titanium-containing composite oxides
3  Three
ラミック層が構成された積層セラミック電子部品全般について、同様の効果を得ること ができる。 The same effect can be obtained for all the multilayer ceramic electronic components having the lamic layer.

Claims

請求の範囲 The scope of the claims
[1] 積層セラミック電子部品の外部電極を形成するために用いられる、導電性ペースト であって、  [1] A conductive paste used for forming external electrodes of a multilayer ceramic electronic component,
銅粉末と酸化鉄粉末とガラス粉末と有機ビヒクルとを含有し、  Contains copper powder, iron oxide powder, glass powder, and organic vehicle,
酸化鉄粉末は、銅粉末および酸化鉄粉末の合計体積に対して、 3— 40体積%含 有し、  The iron oxide powder contains 3 to 40% by volume based on the total volume of the copper powder and the iron oxide powder,
ガラス粉末は、銅粉末、酸化鉄粉末およびガラス粉末の合計体積に対して、 10— 2 5体積%含有する、  Glass powder contains 10 to 25% by volume based on the total volume of copper powder, iron oxide powder and glass powder.
導電性ペースト。  Conductive paste.
[2] 積層された複数のセラミック層と、前記セラミック層間の界面に沿って形成された、 ニッケルを主成分とする内部導体膜とをもって構成された積層体、ならびに、前記内 部導体膜に電気的に接続されるように前記積層体の外表面上に形成された、銅を主 成分とする外部電極を備える、積層セラミック電子部品であって、  [2] A laminate comprising a plurality of laminated ceramic layers and an internal conductor film containing nickel as a main component and formed along an interface between the ceramic layers, and an electric current is applied to the internal conductor film. A multilayer ceramic electronic component comprising an external electrode mainly composed of copper, formed on an outer surface of the laminate so as to be electrically connected,
前記外部電極は、請求項 1に記載の導電性ペーストを焼結させて得られた焼結体 力もなる、積層セラミック電子部品。  2. A multilayer ceramic electronic component, wherein the external electrode also has a sintered body obtained by sintering the conductive paste according to claim 1.
[3] チタンを含有する複合酸化物を主成分とする、積層された複数のセラミック層と、前 記セラミック層間の界面に沿って形成された、ニッケルを主成分とする内部導体膜と をもって構成された積層体、ならびに、前記内部導体膜に電気的に接続されるように 前記積層体の外表面上に形成された、銅を主成分とする外部電極を備える、積層セ ラミック電子部品であって、 [3] Consisting of a plurality of stacked ceramic layers mainly composed of a composite oxide containing titanium and an internal conductor film mainly composed of nickel formed along the interface between the ceramic layers. And a multilayer ceramic electronic component comprising an external electrode containing copper as a main component and formed on an outer surface of the multilayer so as to be electrically connected to the internal conductor film. hand,
前記外部電極は、ガラス成分として、鉄酸化物およびチタン酸化物を含有するホウ ケィ酸亜鉛系ガラスを含み、  The external electrode includes, as a glass component, zinc borosilicate glass containing iron oxide and titanium oxide,
前記セラミック層とこれに接する前記外部電極との界面に、ニッケル、亜鉛、チタン および鉄を含有するスピネル構造の結晶相を生成して ヽる反応層が形成されて 、る 積層セラミック電子部品。  At the interface between the ceramic layer and the external electrode in contact with the ceramic layer, a reaction layer is formed by generating a crystal phase having a spinel structure containing nickel, zinc, titanium and iron.
PCT/JP2004/017060 2003-12-01 2004-11-17 Conductive paste and laminated ceramic electronic component WO2005055257A1 (en)

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JP2013179268A (en) * 2012-02-03 2013-09-09 Murata Mfg Co Ltd Ceramic electronic component
US9234610B2 (en) 2007-11-07 2016-01-12 Parker-Hannifin Corporation Aluminum foil based hose
US9330847B2 (en) 2014-01-27 2016-05-03 Samsung Electro-Mechanics Co., Ltd. Conductive paste for external electrodes and multilayer ceramic electronic component manufactured using the same

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JP7088134B2 (en) 2019-07-17 2022-06-21 株式会社村田製作所 Electronic components
JP7226161B2 (en) 2019-07-17 2023-02-21 株式会社村田製作所 electronic components

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JPH05243079A (en) * 1992-03-02 1993-09-21 Asahi Chem Ind Co Ltd Paste for external electrode of laminar ceramic capacitor, and capacitor using the same
JPH06203626A (en) * 1993-01-06 1994-07-22 Asahi Chem Ind Co Ltd Low-temperature bakable conductive paste

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JPS63131405A (en) * 1986-11-20 1988-06-03 旭硝子株式会社 Composition for conductor
JPH05243079A (en) * 1992-03-02 1993-09-21 Asahi Chem Ind Co Ltd Paste for external electrode of laminar ceramic capacitor, and capacitor using the same
JPH06203626A (en) * 1993-01-06 1994-07-22 Asahi Chem Ind Co Ltd Low-temperature bakable conductive paste

Cited By (3)

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US9234610B2 (en) 2007-11-07 2016-01-12 Parker-Hannifin Corporation Aluminum foil based hose
JP2013179268A (en) * 2012-02-03 2013-09-09 Murata Mfg Co Ltd Ceramic electronic component
US9330847B2 (en) 2014-01-27 2016-05-03 Samsung Electro-Mechanics Co., Ltd. Conductive paste for external electrodes and multilayer ceramic electronic component manufactured using the same

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