WO2005053015A1

WO2005053015A1 - Work handling apparatus

Info

Publication number: WO2005053015A1
Application number: PCT/JP2003/015065
Authority: WO
Inventors: Takenori Hirakawa; Toshiharu Tanaka; Yoshiharu Goshima; Seiji Matsuda
Original assignee: Hirata Corporation
Priority date: 2003-11-26
Filing date: 2003-11-26
Publication date: 2005-06-09
Also published as: JPWO2005053015A1

Abstract

A work handling apparatus, comprising a movable table (21) carrying a tray for placing works thereon and reciprocatingly movable in a specified direction, articulated arms (410) disposed so as to be reciprocatingly movable between the tray and a treatment part with the treatment part (30) applying a specified treatment to the works positioned at the generally center of the tray and the works and driven in the horizontal or vertical direction to convey the works, a pair of handlers (40, 40’) having a plurality of suction heads (420) fitted to the tips of the articulated arms, and a control unit (70) drivingly controlling the pair of handlers and the movable table. The control unit drivingly controls both the carry-in operation for the untreated works from the tray to the treatment part and the carry-out operation for the treated works from the treatment part to the tray so as to be performed by the pair of handlers. The apparatus can be prevented from being completely stopped.

Description

Akira Itoda Work handling equipment

Technical field

The present invention relates to a work handling apparatus that holds, transports, and positions a workpiece when performing predetermined processing such as inspection, processing, and assembly on the workpiece, and particularly relates to a workpiece such as a semiconductor chip. The present invention relates to a work handling device used in a process of performing an inspection. Background art

Conventional handling devices for loading and unloading semiconductor chips (workpieces) to and from the inspection unit include, for example, two transport mechanisms for transporting the work, and suction of the workpiece to be orthogonal to the transport direction of the two transport mechanisms. In this case, there are two handlers that can reciprocate in the moving direction and the vertical direction, and the workpiece is transported by the two handlers between the inspection socket and the transport mechanism located at the center of the two transport mechanisms. A positioning method is known (for example, Japanese Patent Application Laid-Open No. 2002-148307, Japanese Patent Application Laid-Open No. 57-22570).

In this apparatus, transport mechanisms for transporting the work are provided on both sides of the inspection socket, one handler moves between one transport mechanism and the inspection socket to transport the work, and the other transport mechanism and the inspection socket are transported. It is difficult to consolidate each mechanism because the other handler moves between the other handlers and transports the work, and a relatively large space is required to install this equipment on a semiconductor manufacturing line. Atsuta.

In addition, as other handling devices, a plurality of tray placement sections for placing trays on which untested and inspected workpieces are placed, respectively, and transport of untested workpieces from the tray placement section to the vicinity of the inspection socket Robot to be detected, not detected from loader robot A loading mechanism that receives the workpiece (2) and carries it into the inspection socket, an unloading mechanism that transports the workpiece that has been inspected out of the inspection socket, and an unloader robot that transports the inspected workpiece that has been delivered from the unloading mechanism to the tray mounting part. There is a known one provided with such as (for example, Japanese Patent Application Laid-Open No. Hei 5-252153).

In this device, the work is stored in the tray loading section (untested product storage tray) → loader opening pot → loading mechanism → inspection socket → unloading mechanism → fan loader robot → tray loading section (non-defective product storage tray or defective product storage) Inspection processing is performed by a single transport along a series of transport paths called trays. If a failure occurs in any part of the transport path and transport becomes impossible, the entire flow stops and the inspection processing is completely completed. Not be able to do so, resulting in reduced production.

In addition, such a method of inspection processing by relay conveyance requires a common holding unit for holding the work in each of the loader robot, the loading mechanism, the unloading mechanism, and the unloader port. Therefore, when the type of work or the type of inspection socket is changed, it is necessary to change the holding part corresponding to the changed work in each of the loader robot, the loading mechanism, the unloading mechanism, and the unloader robot. However, the number of parts increases according to the type of the work or the inspection socket, and it takes time to set up such as reassembling work.

In addition, other handling devices include a plurality of tray loading units (tray supply units) on which trays on which uninspected and inspected workpieces are placed, respectively, and transfer of workpieces between the tray and the inspection socket. There is a known robot that has a suction head that is supported by a mouth pot and sucks and holds a work. The suction head is provided with a plurality of socket holders whose intervals can be adjusted according to the size of the inspection socket (see, For example, Japanese Unexamined Patent Application Publication No. 9-3211 183).

In this device, the inspection process can be performed on different workpieces without changing the suction head by appropriately adjusting the interval of the socket press according to the size of the different types of workpieces and the inspection socket. But the inspection socket arrangement is different (For example, only one test socket, two test sockets, three or more test sockets, etc.) It is necessary to replace the suction head.

The present invention has been made in view of the above circumstances, and has as its object to simplify the structure, consolidate each mechanism, reduce the size of the entire apparatus, save space in the installation area, and reduce the work space. In addition to shortening the time required to transport the workpieces, it prevents the entire processing line from stopping even if a failure occurs in a part of the equipment, thus improving the efficiency of inspection and processing of workpieces. It is possible to improve productivity by performing well, and even when the arrangement of, for example, sockets in the inspection unit (processing unit) is different, it can be easily dealt with without replacing parts, and no setup work such as replacement work is required. It is to provide a simple work handling device.

• Disclosure of invention

A work handling apparatus according to a first aspect of the present invention that achieves the above object has a movable table that supports a tray on which a work is placed and that can reciprocate in a predetermined direction, and a processing unit that performs a predetermined process on the work. The arm is reciprocally movable between the tray and the processing unit so that it is sandwiched at the center, and is driven horizontally and vertically to transport the work. Drives the pair of handlers and the movable table, and carries in the unprocessed work from the tray car to the processing unit and unloads the processed work from the processing unit to the tray. And control means for controlling the driving so that the pair of handlers respectively perform the two operations.

According to this configuration, the movable table is appropriately moved to a predetermined position by the drive control of the control means, and one of the handlers sucks the work in the tray, carries the work in the tray, and carries the processed work. The other handler picks up the work in the tray at a different timing from the other handler. The workpiece is carried into the processing unit and the processed work is sucked again and carried out to the tray. As described above, in order to cause each of the pair of handlers to perform both the work loading operation and the work unloading operation, even if one of the handlers fails, the other handler is driven and the processing is continued. Can be prevented from completely stopping.

In the apparatus having the above configuration, the pair of handlers may be configured to be reciprocally movable in a direction substantially perpendicular to the reciprocating direction of the movable table.

According to this configuration, each path when the pair of handlers respectively perform the transport operation between the tray on the movable table and the processing unit can be formed symmetrically with respect to the center line. As a result, the transfer time of each handler can be made substantially the same, the time required for handling as a whole can be reduced, and productivity can be improved. In the apparatus having the above configuration, when the pair of handlers receives the work from the tray supported by the movable table or transfers the work to the tray, the control unit may move the target tray substantially in the middle of the pair of handlers. A configuration in which the movable table is driven and controlled so as to be positioned at the position can be adopted.

According to this configuration, the pair of handlers can move and receive the workpiece by moving the shortest distance, so that the transport time (the time required for handling) can be further reduced, and the productivity can be further improved.

In the apparatus having the above configuration, the handler is configured to rotate the plurality of suction heads provided at the distal end of the articulated arm and a desired angle position in a horizontal plane with respect to the articulated arm. And a head drive mechanism that performs the following.

According to this configuration, since a plurality of suction heads are provided at the tip of the articulated arm, not only can a plurality of workpieces be transported and processed at the same time, but also a plurality of suction heads can be processed by the head drive mechanism. By appropriately changing the relative angular position between the head and the articulated arm, it is possible to apply a required number of suction heads or a required type of suction head corresponding to different types of processing units. No need for replacement work.

In the apparatus having the above configuration, the handler is configured to swing the articulated arm in a horizontal plane. The suction head includes a horizontal drive mechanism that drives the arm and a vertical drive mechanism that reciprocates the articulated arm in the vertical direction, and the suction head has a lead presser that presses the lead provided on the workpiece and an inner side of the lead presser. Defines a movable pipe with a suction pad at the tip, which is provided so that it can move up and down in the vertical direction with respect to the lead holder, and a negative pressure passage that movably supports the movable pipe within a predetermined range in the vertical direction and guides the negative pressure to the movable pipe. And a holder vertical drive mechanism that reciprocates the holder in the vertical direction.

According to this configuration, the suction head can be positioned at a desired position by horizontally moving the articulated arm by the arm horizontal drive mechanism, and the suction head can be moved up and down by the arm vertical drive mechanism to move the suction head to a desired height. In addition, the height of the holder can be changed by the holder vertical drive mechanism, and the amount of movement of the movable pipe (suction pad) with respect to the lead holder can be adjusted appropriately. Therefore, when the work is temporarily sucked, the work can be sucked without the lead coming into contact with the lead holder, and when positioning and sucking the work again, the work is sucked by pressing the lead to the lead holder. can do. In addition, by providing an arm vertical drive mechanism and a holder vertical debris movement mechanism, the work suction operation and the work fixing operation to the processing unit can be optimized for each operation using separate drive mechanisms. It can be driven by driving force (pressing force).

In the apparatus having the above structure, the suction head has an upper rule head for supporting the holder, and a through hole for slidably passing the lead presser and the movable pipe. A lower head connected so as to be swingable about a predetermined axis in a horizontal plane, wherein the holder accommodates a detachable pad provided at an upper end of the movable pipe so as to be detachably attached to the negative pressure passage. And the movable pipe is swingably connected to the cavity with a predetermined gap.

According to this configuration, the suction head is formed by the upper head and the lower head, the lower head is swingably supported by the upper head, and the movable pipe is a holder. The workpiece or the processing unit (for example, the socket of the inspection unit) was inclined with respect to the vertical direction of the suction head because it was swingably supported by the cavity of the In this case, the lower head and the movable pipe are inclined so as to follow the inclination of the work or the processing unit, and the suction pad and the lead presser can abut on the work or the processing unit from a vertical direction. It can be set in the adsorption or processing section.

In addition, a work handling apparatus according to a second aspect of the present invention that achieves the above object has a tray carrying unit that carries a tray that holds a work, a processing unit that performs a predetermined process on the work, and a tray. Articulated arm driven horizontally and vertically to transport a workpiece while being reciprocated between the arm, a plurality of suction heads provided at the tip of the articulated arm, a plurality of suction heads A handler including a head drive mechanism for rotating the arm to a desired angular position in a horizontal plane with respect to the articulated arm; and control means for drivingly controlling the handler.

According to this configuration, when the handler reciprocates between the tray carried on the tray carrier and the processing unit to transport the workpiece, the handler has a plurality of suction heads, so that a plurality of workpieces can be simultaneously loaded. Not only can it be transported, but also by driving the head drive mechanism and adjusting the relative angular position of the plurality of suction heads with respect to the articulated arm, the state of the processing unit (for example, the detection unit) The type of suction head to be used can be selected as appropriate according to the type of socket (one, two, three, or more). When a plurality of suction heads having different heads are used, an appropriate suction head suitable for the processing unit and the type of work can be used. Therefore, even if the type of processing unit (for example, the shape of the socket of the inspection unit or the shape of the socket of the inspection unit) is different, it is necessary to transfer and process the work without replacing the suction head. Can be.

In the apparatus having the above configuration, the handler includes an arm horizontal drive mechanism that drives the articulated arm so as to be swingable in a horizontal plane, and an arm that reciprocates the articulated arm in a vertical direction. The suction head includes a vertical press mechanism, and the suction head is provided so as to be able to protrude and retract in the vertical direction with respect to the lead presser inside the lead presser. A movable pipe having a suction pad on the movable pipe, a holter for movably supporting the movable pipe within a predetermined range in a vertical direction and defining a negative pressure passage for guiding a negative pressure to the movable pipe, and a holder vertical for reciprocatingly driving the holder in a vertical direction. The structure including the driving mechanism can be adopted.

According to this configuration, in a handler having a plurality of suction heads, the articulated arm can be moved horizontally by the arm water drive mechanism to position the plurality of suction heads at desired positions. The suction arm can be moved up and down to position the multiple suction heads at the desired height. In addition, the height of the holder can be changed by the holder vertical drive mechanism to move the movable pipe (suction pad) into and out of the lead holder. The amount can be adjusted appropriately. Therefore, when the work is temporarily sucked, the work can be sucked without the lead touching the lead holder, and when positioning and sucking again, the lead is pressed by the lead holder. Work can be sucked. In addition, by providing an arm vertical drive mechanism and a holder vertical drive mechanism, the suction operation of the work and the operation of fixing the work to the processing unit can be performed by using separate drive mechanisms to optimize the drive for each operation. It can be driven by force (pressing force).

In the apparatus having the above-mentioned configuration, the suction head has an upper head for housing the holder, and a through hole for slidably passing the lead presser and the movable pipe, and has a horizontal surface with respect to the upper holder. And a lower head connected to be swingable about a predetermined axis inside the holder, wherein the holder has a cavity for accommodating a detachable pad provided at an upper end of the movable pipe so that the detachable pad can be attached to and detached from the negative pressure passage. The movable pipe may be swingably connected to the cavity with a predetermined gap.

According to this configuration, in the handler including the plurality of suction heads, the suction head is formed by the upper head and the lower head, and the lower head is freely movable with respect to the upper head. The movable pipe is supported swingably with respect to the cavity of the holder. Therefore, if the workpiece or the processing center (for example, the socket of the inspection unit) is inclined with respect to the vertical direction of the suction head, the lower head and movable pipe will follow the inclination of the peak or the processing unit. The suction pad and the lead presser can contact the work or the processing section from a vertical direction, and the work can be accurately set to the suction or processing section. Brief Description of Drawings

FIG. 1 is an external perspective view showing an embodiment of a work handling apparatus according to the present invention.

FIG. 2 is a partial perspective view showing a pair of handlers, a processing unit, and a tray supporting unit which form part of the apparatus.

FIG. 3 is a perspective view showing a handler forming a part of the apparatus.

FIG. 4 is a plan view showing a handler forming a part of the apparatus.

FIG. 5 is a vertical cross-sectional view of the handler at E4-E4 in FIG.

FIG. 6 is a cross-sectional view of the handler at E5-E5 in FIG.

FIG. 7 is a side view of a suction head forming a part of the apparatus.

FIG. 8 is a side view of a suction head forming a part of the apparatus.

FIG. 9 is a vertical cross-sectional view of the suction head taken along a line E7-E7 in FIG.

FIGS. 10A, 10B, and 10C are cross-sectional views showing the positional relationship between the movable pipe forming a part of the suction head and the cavity.

FIG. 11 is a plan view showing a method of driving a pair of handlers.

FIG. 12 is a plan view showing an embodiment of the relationship between the articulated arm provided on the handler, the plurality of suction heads, and the processing unit.

FIG. 13 is a plan view showing another form of the relationship between the processing unit and the articulated arm and the plurality of suction heads provided in the handler.

Fig. 14 shows an articulated arm and multiple suction heads and a processing unit provided in the handler. It is a top view which shows the other relationship of the relationship with this.

FIG. 15 is a plan view showing still another relationship between the joint unit and the plurality of suction heads provided in the handler and the processing unit.

FIGS. 16A, 16B, 16C, 16D, 16E, and 16F are operation diagrams showing the operation of a suction head that sucks a work, transports and positions the work.

FIGS. 17A, 17B, 17C, 17D, 17E, and 17F are operation diagrams showing the operation of the suction head for sucking and transporting and positioning the work.

FIGS. 18A, 18B, 18C, 18D, and 18E are operation diagrams showing the operation of the suction head for sucking and conveying and positioning the work. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this embodiment, a semiconductor chip having leads protruding from both sides is employed as a work, and an inspection unit having a socket for inspecting and processing electrical characteristics of a semiconductor chip is employed as a processing unit.

As shown in FIG. 1, FIG. 2, and FIG. 11, the work handling apparatus includes a tray storage unit 10 for storing a tray T on which a work W is placed, and a tray T disposed and supplied above the tray storage unit 10. The tray support section 20 for carrying, the inspection section 30 as a processing section for performing an inspection process on the work W, and the tray T carried on the tray support section 20 and the inspection section 3 are arranged so as to be able to reciprocate freely. Handlers 40, 40 'for transporting the work W, positioning parts 50, 50' for once removing and positioning the work W sucked by the handlers 40, 40 ', a pair of handlers 40, 40, and a tray support part 20 Further, an upper plate 60 holding the positioning portions 50 and 50 ', a control unit 70 as a control means for controlling various controls, and the like are provided.

As shown in Fig. 1, the tray storage unit 10 includes a tray stock unit 11, a tray supply unit 12, and a tray stop unit 13 that are arranged adjacent to each other in the horizontal direction (X direction). It has two tray discharge sections 14 and 15.

The tray stock unit 11 includes a plurality of stacked trays T on which a stack of trays is placed, a lifting table that moves up and down in the vertical direction (Z direction), a drive mechanism that drives the lifting table up and down, and a lowermost stacked unit. A push port for pushing the tray T toward the tray supply unit 12 and a drive mechanism therefor are provided.

The tray supply unit 12, the tray stop unit 13, and the tray discharge units 14, 15 and 15, respectively, a lifting table and a lifting table that can be raised and lowered in the vertical direction (direction) with the tray 载 installed. And a drive mechanism for driving up and down.

As shown in FIGS. 1 and 2, the tray supporting portion 20 has a substantially rectangular shape, and has a movable table 21 disposed above the tray housing portion 10 and a movable table 2 fixed to the upper plate 60. 2 guides 2 that support reciprocating movement in the X direction on the Χ Υ plane, 2 movable guides 2 Lead screw 2 3 connected to table 1 and fixed to upper plate 60 to rotate lead screw 2 3 Motor 24 and the like.

As shown in FIGS. 1 and 2, the movable table 21 is formed so as to have a rectangular outline, and carries three trays 供給 supplied from the tray storage unit 10 and arranged adjacent to each other in the X direction. Further, it carries one tray which is arranged adjacently in the Υ direction.

That is, in the tray carrying portion 20, when the motor 24 rotates the lead screw 23, the movable table 21 moves to a desired position in the X direction, and each opening for holding the three trays Τ. The tray is positioned immediately above one of the tray supply unit 12, the tray stop unit 13 and the tray discharge units 14 and 15. When the handlers 40 and 40 receive the untested work W from the tray 又 and transfer the inspected work W to the tray 、, the movable table 2 I and the target tray T are paired. Are driven to be positioned near a straight line L (see Fig. 2) which is approximately halfway between the handlers 40 and 40 '(two guides 4Ol).

As shown in FIGS. 1 and 2, the inspection unit 30 as a processing unit can be It is arranged behind the moving tape holder 21 and is exposed from the upper plate 60. The inspection unit 30 has a socket 31 for connecting four works W (semiconductor chips) at the same time. When the work W is set (inserted) into the socket 31, a predetermined electrical connection is automatically established. An inspection is performed to determine whether the characteristics are satisfied.

As shown in FIG. 2, the pair of handlers 40, 40 ′ is arranged so that the inspection unit 30 is sandwiched substantially at the center in the forward / backward movement direction (X direction) of the movable table 21, that is, the inspection unit Direction (Y direction) perpendicular to the reciprocating direction (X direction) of the movable table 21 1 is arranged on the upper plate 60 so as to be symmetrical with respect to the straight line L in the Y direction passing through the center of 30 It is formed so that it can reciprocate freely.

That is, the pair of handlers 40 and 40 ′ are respectively a guide 410 extending in the Y direction and a lead screw 402 and a lead arranged in the internal space of the guide 410 and extended in the Y direction. Horizontal movable part 400, which is screwed to screw 402, and can move in the Y direction, Vertical movable part 404, which is held in horizontal movable part 403 and can move in the Z direction, Vertical movable part 400 Articulated arm 4 10 0 that is connected to 4 and can swing in a horizontal plane (XY plane), and a plurality (four in this case) of suction heads 4 20 provided at the tip of the articulated arm 4 10 etc. It has.

Further, the pair of handlers 40 and 40 ′ respectively has a motor 405 and a vertical movable section 4 that drive the horizontal movable section 403 in the horizontal direction (Y direction) via a lead screw 402. 0 4 (that is, the articulated arm 4 10) is driven vertically in the Z direction by the arm vertical drive mechanism 406, and the articulated arm 4 10 is swingably driven in a horizontal plane (XY plane). A horizontal drive mechanism 407, a plurality of suction heads 420, and a head drive mechanism 408 that rotationally drives the plurality of suction heads 420 to a desired angle position in a horizontal plane with respect to the articulated arm 410. ing.

Therefore, when the motor 405 rotates, the horizontal movable member 403, that is, the articulated arm 410 and the plurality of suction heads 420 are moved in the horizontal direction via the lead screw 402. (Y direction). Further, the pair of handlers 40, 40 are arranged so as to overlap with each other with the respective articulated arms 410 extended in the reciprocating direction (X direction) of the movable tape holder 21. I have. That is, since the articulated arm 4 10 is employed, it can be moved in the Y direction while being appropriately rotated to prevent interference between the two, so that a pair of handlers 40, 40 ′ in the X direction is used. Can be arranged closer (the two can be integrated), and the device can be downsized.

As shown in FIG. 3, the plurality of suction heads 420 are connected to each other through a pitch changer 430 that adjusts the interval (pitch) between the suction heads and a coupling portion 440 that can be manually attached and detached. It is held at the tip of the arm 410.

As shown in FIG. 2, the arm vertical drive mechanism 406 includes a motor 406 a, a lead stalled (not shown) that is rotationally driven by the motor 406 a and is screwed to the vertical movable member 404. Is formed. Therefore, when the motor 406a rotates, the vertically movable member 404, that is, the articulated arm 410 and the plurality of suction heads 420 are moved in the vertical direction via the lead sturure. (Z direction) to the desired height position.

As shown in FIG. 5, the arm horizontal drive mechanism 407 includes a motor 407 a held by a vertically movable member 404, a pulley 407 b directly connected to the motor 407 a, and a joint type key 407. Speed reduction mechanism 407c connected to the speed reduction mechanism 410, pulley 407d directly connected to the speed reduction mechanism 407c, belt 4 connecting pulley 407b and pulley 407d It is formed by 07 e etc.

The reduction mechanism 407c has an elliptical cam to which the pulley 407d is directly connected, a plurality of ball bearings arranged on the outer periphery of the elliptical cam, and a plurality of teeth fitted on the outer surface of the ball bearing to form an outer peripheral surface. An elastically deformable cylindrical spline, which is directly connected to the articulated arms 4 10, 4 10 ′, has teeth on its inner peripheral surface where the teeth of the cylindrical spline fit, and is fixed to the vertical movable member 4 04. The rotation of the motor 407 a is reduced and transmitted to the articulated arm 410.

2 Therefore, when the motor 407a rotates, the articulated arm 410 and the plurality of suction heads 420 are moved to a desired position in the horizontal direction (on the XY plane) via the reduction mechanism 407c or the like. Is moved to.

As shown in FIGS. 3, 5, and 6, the head drive mechanism 408 includes a motor 408a fixed to the vertical movable section 404, and a pulley directly connected to the motor 408a. 408b, pulley 408c, pulley 408b and pulley 408c directly connected to the connecting portion 440 supported rotatably at the tip of the articulated arm 410 The belt 408d connects the pulleys 408e, and the tension is formed by a pulley 408e or the like.

Therefore, when the motor 408a rotates, the plurality of suction heads 420 are positioned at a desired angular position in the horizontal plane with respect to the articulated arm 410 via the belt 408d and the like. Is rotated and positioned.

As shown in FIGS. 7 to 9, the suction head 420 is in a horizontal plane (XY plane) with respect to the upper head 4 21 connected to the pitch changer 4 30 and the upper head 4 21. And a suction pipe 4 23 connected to the lower head 4 2 2 and the upper head 4 2 1, which are swingably connected around a predetermined axis, and which guides a negative pressure. Holder 4 2 4 that defines 4 2 4 a, formed below as part of holder 4 2 4 and penetrated to the lower end? Cavity part 4 25 with L 4 25a, reciprocating drive of holder 4 25 in vertical direction (Z direction) Holder vertical drive mechanism 4 26, connected to cavity 4 25 through through hole 4 25a At the same time, a movable pipe 4 2 7 slidably passed through the through hole 4 2 2 a of the lower head 4 2 2, a flow sensor 4 2 8 for measuring the flow rate in the suction pipe 4 2 3, etc. It has.

As shown in FIGS. 7 to 9, the lower head 4 22 has, at its lowermost end, a substantially rectangular recess 4 2 2 b that can accommodate the sucked work W, and an outer edge of the recess 4 2 2 b. It has a lead presser 4 2 2 c defined by the section.

Also, as shown in FIGS. 7 to 9, the lower head 4 22 is connected to the upper head 4 2 1 by a pivot 4 29 a having an axis in a horizontal plane (XY plane). It can swing freely within a predetermined angle range (for example, ± 1 degree to ± 1.5 degrees), and has a pivot 4 The axis 4 29 b is perpendicular to 29 a and has an axis in a horizontal plane (XY plane). It can swing freely around R 2 within a predetermined angle range (for example, ± 1 degree to ± 1.5 degrees). Consolidated.

When no force is applied from the outside, the lower head 422 is evenly urged by the spring 429c and moves in the same direction as the upper head 421 (upper head). (Do not incline with respect to c. 421).

The hollow portion 4 25 defines a predetermined space communicating with the negative pressure passage 4 24 a of the honoreda 4 24, as shown in FIGS. Formed through holes 425a through which the movable pipes 427 pass, bottom surfaces 425b and top surfaces 425c in order to support them movably within a predetermined range (for example, a stroke of 2 mn! To 5mm) in the direction. are doing.

The movable pipe 4 27 has a rubber suction pad 4 27 a at its tip (lowest end) and a rubber detachable pad 4 27 b at its upper end as shown in FIGS. 1OA to 10 C. A regulating frame 427c for regulating the amount of deformation of the detachable pad 427b is integrally provided. The movable pipe 4 27 has a detachable pad 4 27 b and a regulating frame 4 27 c housed in the hollow portion 4 25, and as shown in FIG. 1OA, the lower surface of the regulating frame 4 27 c From the state of being seated on the bottom surface 4 25 b of the cavity 4 25, as shown in FIG. 10C, the state where the detachable pad 4 27 b is in close contact with the upper surface 4 25 b of the cavity 4 25 It is supported so that it can reciprocate up and down in the range up to.

In addition, the movable pipe 422 is slidably passed through the through hole 422 a of the lower head 422, and the inside of the lead retainer 422 c extends from the lead retainer 422 c. It is inserted (coupled) into the through-hole 425 a with a predetermined gap so that it can move out and in and out of the cavity 425 in a predetermined angle range. Therefore, when the workpiece W to be suctioned or the socket 31 of the inspection section 30 is slightly inclined with respect to the horizontal plane (XY plane), the suction pad 427a follows the inclination. The lower head 4 2 2 receives the tilting force. It is tilted around より from the power of. Thereby, while the movable pipe 427 moves up and down smoothly, the suction pad 427 a can be in close contact with the inclined work W or the detection section 30 (socket 31).

As shown in FIGS. 7 and 9, the holder vertical drive mechanism 4 26 is a step motor 4 26 a fixed to the upper head 4 2 1, and a pinion directly connected to the step motor 4 26 a. 4 2 6 b, rack 4 2 4 b provided on holder 4 2 4 and mating with pinion 4 2 6 b, LM guide 4 2 6 c, spring 4 2 6 d, etc. that bias holder 4 2 4 upward Is formed.

When the step motor 4 26 a rotates, the holder 4 2 4 moves in the vertical direction (Z direction) with respect to the upper head 4 2 1, and the lower head 4 2 2 (lead presser 4 2 The amount of protrusion of the movable pipe 4 27 (suction pad 4 27 a) from 2 c) is adjusted. Even if the stepping motor 424 a fails, the holder 424 is urged upward by the spring 429 c, so that the holder 424 can be prevented from falling due to its own weight.

Next, the schematic operation of a pair of handlings 40 and 40 'in this device will be described with reference to FIG. The pair of handlers 40, 40 'and the movable table 21 are driven and controlled based on a signal issued from the control unit 70.

First, the movable table 21 is driven, and the tray on which the untested work W is placed is positioned substantially at the center (near the straight line L). Then, one handler 40 picks up the uninspected work W from the tray T by suction and transports it to the positioning unit 50 at the back left in the Y direction (path A in FIG. 11). Therefore, once the workpiece W is released and positioned, the workpiece W is sucked again and carried into the inspection unit 30 (socket 31) as shown in FIG. 12 (path B in FIG. 11). ). Then, the inspection by the inspection unit 30 is performed.

On the other hand, the other handler 40 sucks untested work W from tray T

Five The workpiece is taken out, transported to the positioning section 50 ′ at the far right in the Y direction (path C in FIG. 11), where the workpiece W is separated and positioned. Until the inspection of the workpiece W held at 40 ends, the apparatus waits at that position or a position near the inspection unit 30.

When the inspection is completed, the handler 40 conveys (unloads) the inspected work W to the front center in the Y direction ′ and delivers it to the tray T on the movable table 21 (see FIG. 11). Route D). At this time, the movable table 21 is driven so as to position the tray T for storing the inspected workpiece W substantially at the center.

Subsequently, the other handler 40, which is waiting at a position above the positioning unit 50 'or near the inspection unit 30, outputs the workpiece W to the inspection unit 30 (socket 3) as shown in FIG. 1) (Route E in Fig. 11). Then, the inspection by the inspection unit 30 is performed.

Then, the movable table 21 is driven again, and the tray T on which the untested work W is placed is positioned at substantially the center (near the straight line L), and one handler 40 moves the untested work W from the tray T. W is sucked out, taken out, transported to the positioning section 50 at the back left in the Y direction (path A in FIG. 11), where the work W is once separated and positioned, and the work W is sucked again. Until the inspection of the workpiece W held by the other handler 40 'is completed, the process waits at that position or a position near the inspection unit 30.

When the inspection of the workpiece W held by the other handler 40 ′ is completed, the other handler 40 ′ transports (unloads) the inspected workpiece W to the front center in the Y direction and moves the movable table 21. Transfer to the upper tray T (path F in Fig. 11). At this time, the movable table 21 is driven so as to position the tray T for storing the inspected work W substantially at the center, as described above.

As described above, one handler 40 (or 40 ′) is used in order to cause each of the pair of handlers 40, 40 ′ to perform the loading and unloading operations of the workpiece W separately and independently. If another fails, the other handler 40 "" (or 40) is driven

6 Since processing continues, it is possible to prevent the equipment from completely stopping. As a result, although the productivity is lower than in the case of full operation, the inspection process can be continued, and the productivity can be increased as compared with the case where the operation is completely stopped.

Further, when the pair of handlers 40 and 40 ′ each receive the work W from the tray T carried on the movable table 21 or when receiving the work W on the tray T, the target tray T is paired. The movable table 21 is controlled so as to be positioned at a substantially intermediate position between the handlers 40 and 40 ′ of the pair of handlers 40 and 40 ′. The transfer and transfer of the workpiece W can be performed, so that the transfer time (the time required for handling) can be shortened, and the productivity can be further improved.

In this embodiment, as shown in FIG. 12, the inspection unit 30 has four sockets 31, and four suction heads 4 20 provided on the nozzles 40 and 40 ′. Are used, but as shown in Fig.13 to Fig.15, for example, when Puma ', inspection 咅 30' '', 30 have two or one socket 31 The arm horizontal drive mechanism 407 and the head drive mechanism 408 are appropriately driven so that only two or one suction head 420 is used for loading and unloading the work W. Then, the drive is controlled.

As described above, by driving the head drive mechanism 408 and the like to adjust the relative angular positions of the plurality of suction heads 420 with respect to the articulated arm 41 Ο, the inspection unit Suction head to be used according to the state of 30 (for example, one with only one socket 31, one with two sockets, one with three or more sockets, etc.) Can be appropriately selected. Therefore, even if the type of the inspection unit (for example, the arrangement of the sockets) is different, the workpiece W can be transported and inspected without replacing the suction head 420.

Next, the work W by the suction heads 420 of the nozzles 40 and 40 '(holders 424, movable pipes 422, suction pads 427a, detachable pads 427b, etc.) is used. Import of The operation and the unloading operation will be described in detail with reference to FIGS. 16 to 18E.

First, as shown in FIG. 16A, the suction head 4 20 (the suction pad 4 27 a of the movable pipe 4 27) 1 is positioned above the tray T on which the untested work W is placed. . At this time, the movable pipe 427 is located at the lower end of the hollow part 425.

Then, as shown in FIG. 16B, when the holder vertical drive mechanism 426 is driven, the holder 424 is lowered, and at the same time, the suction pad 427 a provided at the lower end of the movable pipe 427. Starts to descend toward the workpiece W, and the suction pad 427a contacts the upper surface of the workpiece W as shown in FIG. 16C. Here, the center of the suction pad 427a and the center of the work W are in a state of being deviated.

Subsequently, the holder 4 24 is further lowered by driving the holder vertical drive mechanism 4 26, and as shown in FIG. 16D, the detachable pad 4 2 7 b provided at the upper end of the movable pipe 4 27 is hollow. The peak W is in close contact with the upper surface of the part 425 and communicates with the negative pressure passage, and the peak W is sucked by the suction force of the negative pressure. Here, when the work W is slightly inclined with respect to the horizontal plane, the movable pipe 427 is inclined according to the inclination, and the suction pad 427 a sucks the work W from the vertical direction.

Then, as shown in FIG. 16E, the holder 424 is raised by the drive of the holder vertical drive mechanism 426, and the movable pipe 427 and the suction pad 427a are connected to the lead of the workpiece W. Hold workpiece W at the position where W1 has risen to a position where it does not contact lead retainer 4 2 2 c.

Subsequently, as shown in FIG. 16F, by driving the arm vertical drive mechanism 406, the articulated arm 410 and the suction head 420 are raised and held at a predetermined height position. Then, the workpiece W is moved in the horizontal direction and the work W is carried in above the positioning sections 50, 50.

Subsequently, as shown in FIG. 17A, by driving the arm vertical drive mechanism 406, the articulated arm 410 and the suction head 420 are moved above the positioning sections 50, 50 '. It descends to the specified height position.

8 Then, the suction operation by the suction head 420 is released, and as shown in FIG. 17B, the movable pipe 427 is lowered and held on the bottom surface of the hollow portion 425, and the peak W is reduced. It separates from the suction pad 427a and falls into the positioning sections 50 and 50 ', and is positioned.

Then, as shown in FIG. 17C, the holder 4 24 is lowered by the drive of the holder vertical drive mechanism 4 26, and the suction pad 4 27 a comes into contact with the workpiece W and the movable pipe 4 The detachable pad 4 2 7 b provided on the upper end of 27 is in close contact with the upper surface of the S cavity portion 4 25 and communicates with the negative pressure passage, and the workpiece W is sucked again by the suction force of the negative pressure. At this time, the center of the work W is positioned at the center of the suction pad 427a. Then, as shown in FIG. 17D, by driving the holder vertical drive mechanism 4 26, the movable pipe 4 27 and the suction rod 4 a rise upward integrally with the holder 4 2 4. Then, the work W enters the concave portion 4 2 2 b of the lower head 4 2 2, and the lead W 1 comes into contact with the lead presser 4 2 2 c.

Subsequently, by driving the arm vertical drive mechanism 406, the articulated arm 410 and the suction head 420 are raised and held at a predetermined height position, and then moved in the horizontal direction, As shown in FIG. 17E, the work W is loaded above the inspection section 30 (socket 31).

Then, by driving the arm vertical drive mechanism 406, the articulated arm 410 and the suction head 420 are lowered, and as shown in FIG. 17F, the work W is moved to the inspection section 30 (socket). 3 At the same time as setting in 1), press and hold it at the specified pressure. Inspection is performed in this state.

When the inspection is completed, the articulated arm 410 and the suction head 420 are raised and held at the predetermined height position by the horse vertical movement of the arm vertical drive mechanism 406, and as shown in FIG. 18A. As shown in the figure, the work W is carried out of the inspection unit 30 (socket 31) and moved to above the tray T carried on the movable table 21.

Then, as shown in FIG. 18B, the arm vertical drive mechanism 406 is driven to

9 As shown in FIG. 18C, the suction operation is released and the inspected work W is delivered to the tray T, as shown in FIG. 18C.

Then, as shown in FIG. 18D, the arm vertical drive mechanism 406 is driven to move up to the articulated arm 4 10 and the suction head 4 2 CH, and the movable pipe 4 2 It is held at the lower end of 25.

Thereafter, as shown in FIG. 18E, when the articulated arm 410 and the suction head 420 are raised to a predetermined height position, a series of transfer and processing operations are completed. In this device, the above-described series of operations are performed alternately and continuously in the handlers 40 and 40 '.

In the above embodiment, the case where the movable tape holder 21 is formed so as to be able to reciprocate in the X direction orthogonal to the moving direction (Y direction) of the handlers 40 and 40 ′ has been described. It may be formed to be reciprocally movable in directions intersecting at other angles. In the above embodiment, the semiconductor chip is shown as the work W. However, the present invention is not limited to this, and other electronic components or mechanical components may be handled. As the processing unit, the electrical characteristic inspection and inspection unit 30 has been described, but the present invention is not limited to this. For example, processing such as cutting, painting, or attaching a part to a workpiece. As described above, the apparatus of the present invention may be applied to a processing unit that performs other processing.

In the above embodiment, a plurality of suction heads 420 are employed in the configuration including the pair of handlers 40, 40 '. However, the present invention is not limited to this, and one handler 40 (or 4 0 '), even if a plurality of suction heads 420 are used, the suction heads 420 must be exchanged for the inspection unit 30 with a different arrangement or number of sockets 31. Instead, a necessary number of suction heads 420 can be appropriately selected from a plurality of suction heads 420 and used.

In the above embodiment, the same suction head is used as the plurality of suction heads. However, different suction heads are used depending on the types of the work and the processing unit (inspection unit). It is also possible to appropriately select and use the adsorption head.

In the above embodiment, the configuration including the processing unit (inspection unit 30) in the apparatus has been described. However, the processing unit (inspection unit 1530) itself is not a component of the present invention, and the apparatus of the present invention is not included in the apparatus. What is necessary is just to apply to the predetermined processing part.

As described above, according to the work handling apparatus of the present invention, a movable table, a pair of handlers having an articulated arm and a suction head, a pair of handlers, and control means for driving and controlling the movable table are provided. In each of the two cases, both the loading operation and the unloading operation are performed, so that if one of the handlers fails, the other handler is driven and processing continues, so the equipment is completely The stoppage can be prevented.

Also, a plurality of suction heads are provided on the articulated arm of the handler, and the plurality of suction heads can be driven to rotate at a desired angular position with respect to the articulated arm. In addition, a required number or types of suction heads can be applied corresponding to different types of processing units.

2

Claims

The scope of the claims

1. A movable table that carries a tray for holding workpieces and is reciprocable in a predetermined direction,

A processing section for performing a predetermined process on the work is disposed at the center so as to be able to reciprocate between the tray and the processing section, and is driven in a horizontal direction and a vertical direction to transport the work. A pair of handlers each having an articulated arm and a suction head provided at the tip thereof,

The pair of handlers and the movable table are driven and controlled, and both operations of loading an unprocessed work from the tray to the processing unit and unloading a processed work from the processing unit to the tray are performed by: Control means for driving and controlling the pair of handlers to perform the respective operations;

A work handling device.

2. The pair of handlers are formed so as to be capable of reciprocating in a direction substantially perpendicular to the reciprocating direction of the movable table.

2. The work handling apparatus according to claim 1, wherein:

3. The control means, when the pair of handlers receives a work from the tray card carried on the movable table or transfers the work to the tray, respectively, sets a target tray to the abbreviation of the pair of handlers. Drivingly controlling the movable table so as to be positioned at an intermediate position;

3. The work handling apparatus according to claim 2, wherein:

4. The handler comprises: a plurality of suction heads provided at the distal end of the articulated arm; and a plurality of suction heads provided in a horizontal plane with respect to the articulated arm. A head drive mechanism that rotates to an angular position,

The work handling apparatus according to claim 1, comprising:

5. The handler includes: an arm horizontal drive mechanism that drives the articulated arm so as to swing freely in a horizontal plane; and an arm vertical drive mechanism that drives the articulated arm back and forth in the vertical direction.

The suction head includes: a lead holder for holding a lead provided on a work; a movable pipe having a suction pad at a distal end provided inside the lead holder so as to be able to protrude and retract in a vertical direction with respect to the lead holder. A holder that movably supports the movable pipe within a predetermined range in the vertical direction and defines a negative pressure passage that guides a negative pressure to the movable pipe; and a holder vertical drive mechanism that reciprocates the holder in the vertical direction. 5. The work handling apparatus according to claim 4, wherein:

6. The suction head has an upper head that supports the holder, and a through hole that slidably passes through the lid holder and the movable pipe. A lower head connected to be swingable about a predetermined axis in a horizontal plane, wherein the detachable pad provided at an upper end of the movable pipe is attached to and detached from the negative pressure passage. Has a cavity to accommodate it,

The movable pipe is swingably connected to the cavity with a predetermined gap.

6. The work handling apparatus according to claim 5, wherein:

7. A tray holder for holding a tray on which a work is placed;

An articulated arm that is reciprocally disposed between a processing unit that performs a predetermined process on the work and the tray and that is driven horizontally and vertically to transport the work; Suction head, wherein the plurality of suction heads are articulated A handler including a head drive mechanism that rotationally drives the arm to a desired angular position in a horizontal plane with respect to the arm;

Control means for driving and controlling the handler;

A work handling device.

8. The handler includes: an arm horizontal drive mechanism that drives the articulated arm so as to swing freely in a horizontal plane; and an arm vertical horse motion mechanism that reciprocates the articulated arm in a vertical direction.

The suction head includes: a lead holder for holding a lead provided on a work; a movable pipe having a suction pad at a distal end provided inside the lead holder so as to be able to protrude and retract in a vertical direction with respect to the lead holder. A holder that movably supports the movable pipe within a predetermined range in the vertical direction and defines a negative pressure passage that guides a negative pressure to the movable pipe; and a holder vertical drive mechanism that reciprocates the holder in the vertical direction. 8. The work handling device according to claim 7, wherein:

9. The suction head has an upper head for accommodating the holder, and a through hole through which the lid presser and the movable pipe are slidably passed. And a lower head connected to be swingable about a predetermined axis in a horizontal plane. The holder accommodates a detachable pad provided at an upper end of the movable pipe so that the detachable pad can be attached to and detached from the negative pressure passage. Having a hollow part,

The movable pipe is connected to the hollow portion with a predetermined gap so as to be swingable,

9. The work handling equipment according to claim 8, wherein: