WO2005047978A1 - Aqueous resist composition - Google Patents
Aqueous resist composition Download PDFInfo
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- WO2005047978A1 WO2005047978A1 PCT/JP2004/017309 JP2004017309W WO2005047978A1 WO 2005047978 A1 WO2005047978 A1 WO 2005047978A1 JP 2004017309 W JP2004017309 W JP 2004017309W WO 2005047978 A1 WO2005047978 A1 WO 2005047978A1
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- resist composition
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- weight
- aqueous
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/0325—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polysaccharides, e.g. cellulose
Definitions
- the present invention relates to a resist composition, particularly an aqueous solution or dispersion type resist composition, • used for production of printed boards, and to a method for producing a resist-coated substrate using the same.
- a print ' circuit ' board has hitherto been produced by forming a .resist coating film on an insulating substrate having a conductive metal layer such as copper foil (which may contain metal other than copper and is also referred to as a "copper clad substrate", hereinafter), exposing the resist coating film via a photomask having a desired pattern, developing the exposed resist coating film with water or alkali water, etching the conductive metal layer of the portion where no resist is remained with an etching solution, and removing the resist to form a desired wiring pattern.
- Examples of the method of forming a resist layer on a copper clad substrate includes a dry film method and a liquid resist coating method.
- a dip ' coating method in addition to a method of applying a liquid resist on a copper clad substrate by roll coating or screen printing.
- the copper clad substrate is dipped in a large amount of a resist composition solution (generally solution) and, after pulling up the substrate, the solvent is vaporized by drying to form a resist coating film on the copper clad substrate.
- a resist composition solution generally solution
- An organic solvent having high volatility has been used in the liquid resist composition used for dip coating method.
- an aqueous resist composition contains water having a low evaporation rate as a ' solvent, it requires a long time to dry the resist composition after coating. Therefore, so-called "sagging" occurs during drying of the resist solution to cause a problem such as ununiform thickness of the coating film.
- a thixotropic agent thixotropy imparting agent
- a thickener a thickener
- a cellulose derivative such as hydroxyalkyl cellulose (see, for example, Japanese Unexamined Patent Publication (Kokai) No. 55- 045725 and Japanese Unexamined Patent Publication (Kokai) No. 11-174667) .
- a cellulose derivative in an aqueous cellulose derivative solution causes reversible gelation at a given . temperature, and thus the cellulose derivative is precipitated from the solution at the above temperature or higher and viscosity of the aqueous solution drastically decreases.
- 2000-292922 discloses a photosensitive composition comprising a hydrophobic polymer and a water soluble polymer in a weight ratio (hydrophobic polymer/water soluble polymer) of 0.05 to 4.0 and also describes that a hydroxyalkyl cellulose can be used as the water soluble polymer.
- a hydroxyalkyl cellulose can be used as the water soluble polymer.
- the surface coated with the aqueous composition is not sufficiently dried because of hydrophilicity of the cellulose and thus the coated surface exhibits severe tack.
- the addition of water deteriorates smoothness of the coated surface and a problem such as deterioration of resolution .of a pattern has not been solved.
- An object of the present invention is to provide a resist composition containing water as a solvent, capable of forming a wiring pattern having a smooth surface with high accuracy while maintaining excellent adhesion and good tack of a resist.
- the present inventors have intensively studied and found that the above object can be achieved by using a specific amount of water and a specific solvent even if a very small amount of a cellulose derivative is used in a resist composition, comprising a water soluble or alkali soluble resin and cellulose derivative, and thus the present invention has been completed.
- the present invention is directed to the following [1] to [9] .
- An aqueous resist composition ' comprising (A) a resin soluble in water or an aqueous alkali solution, (B) a cellulose derivative, (C) water and (D) a hydroxyl group-containing organic solvent, wherein the content of the cellulose derivative (B) in the resist composition is within a range from 0.001 to 1.0% by weight, the content of water (C) is within a range from 25 to 65% by weight, and the content of the hydroxyl group-containing organic solvent (D) is within a range from 15 to 50% by weight.
- An aqueous resist composition comprising (A) a resin soluble in water or an aqueous alkali solution, (B) a cellulose derivative, (C) water, (D) a hydroxyl group- containing organic solvent, (E) a polymerizable unsaturated compound and (F) a photopolymerization initiator, wherein the content of the cellulose derivative (B) in the resist composition is within a range from 0.001 to 1.0% by weight, the content of water (C) is within a range from 25 to 65% by weight, and the content of the hydroxyl group-containing organic solvent (D) is within a range from 15 to 50% by weight.
- aqueous resist composition according to any one of [1] to [5] , wherein the hydroxyl group-containing organic solvent (D) is at least one among a monoalkyl ether of a diol compound, a monoester of a diol compound and an aliphatic carboxylic acid, and an ⁇ - hydroxycarboxylate ester.
- D hydroxyl group-containing organic solvent
- a method for producing a resist-coated substrate which comprises dipping an insulating substrate containing a conductive metal in the aqueous resist composition according to any one of [1] to [6] .
- a method for producing a print circuit board which comprises using the aqueous resist composition according to any one of [1] to [6] .
- the resin soluble in water or an aqueous alkali solution (A) (hereinafter also referred to as a "water or alkali soluble resin") used in the resist composition of the present invention refers to a resin soluble in water or an aqueous alkali solution such as aqueous sodium carbonate solution.
- the water or alkali soluble resin of the present invention has such properties that it is soluble in a developer and is slightly soluble in an etching solution, and is preferably a component containing a resin having a carboxyl group or anhydride group thereof in the molecule.
- Examples of the resin having a carboxyl group or anhydride group thereof in the molecule include an acrylic resin which is a copolymer containing (meth) acrylic acid and a ( eth) acrylate ester as a monomer, a copolymer of (meth) acrylic acid and ethylene, and a copolymer of maleic anhydride and ethylene or styrene.
- an acrylic resin is particularly preferable.
- the (meth) acrylic acid means methacrylic acid and/or acrylic acid.
- the water or alkali soluble resin (A) is preferably a photopolymerizable resin which can cause photopolymerization under exposure to ultraviolet rays, X-rays or electron beams in the presence or absence of a photopolymerization initiator and includes, for example, those having a plurality of polymerizable groups such as ethylenically unsaturated bond in the molecule.
- photopolymerizable resin known resins can be used alone or in combination and can be selected from the following group of (1) to (5) : (1) a reaction product of an unsaturated hydroxyl compound and a resin having at least one functional group selected from among carboxyl group, carboxylic anhydride group, isocyanate group and epoxy group; (2) a reaction product of an unsaturated epoxy compound and a resin having at least one functional group selected from among carboxyl group, carboxylic anhydride group, isocyanate group, a ino group and hydroxyl group; (3) a reaction product of an unsaturated carboxylic acid or an unsaturated carboxylic anhydride and a resin having at least one functional group selected from among hydroxyl group, amino group, isocyanate group and epoxy group; (4) a reaction .product of an unsaturated amino compound and a resin having at least one functional group selected from among carboxyl group, carboxylic anhydride group, formyl group, keto group, isocyanate group and epoxy group; and (5)
- the weight-average molecular weight and an ⁇ acid value (mgKOH/g) of these photopolymerizable resins are not specifically limited, the weight-average molecular weight is preferably within a range from 500 to 100,000, more preferably from 1,000 to 50,000, and most preferably 2,000 to 20,000, and the acid value is preferably within a range from 20 to 350, more preferably from 50 to 250, and most preferably from 80 to 200.
- the weight-average molecular weight is measured by gel permeation chromatography, and the acid value is measured by the procedure defined in JIS K5601.
- the unsaturated hydroxyl compound examples include 2-hydroxyethyl (meth) acrylate, 2- hydroxypropyl (meth) acrylate, polyethylene glycol mono (meth) acrylates such as and diethylene glycol monoacrylate, polyethylene glycol mono (meth) acrylate such as triethylene glycol mono (meth) acrylate, 1, 4-butanediol mono (meth) acrylate, polyethylene glycol mono (meth) allyl ethers such as ethylene glycol mono (meth) allyl ether and diethylene glyc.ol mono (meth) allyl ether, N- methylolacrylamide, allyl alcohol, methallyl alcohol, hydroxystyrene, hydroxymethylstyrene and allyl phenol.
- polyethylene glycol mono (meth) acrylates such as and diethylene glycol monoacrylate
- polyethylene glycol mono (meth) acrylate such as triethylene glycol mono (meth) acrylate,
- the unsaturated epoxy compound examples include glycidyl (meth) acrylate, allyl glycidyl ether and 3, 4-epoxycyclohexyl methyl (meth) acrylate.
- unsaturated carboxylic acid and anhydride thereof there can be used (meth) acrylic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, sorbic acid, tetrahydrophthalic acid, cinnamic acid, nadic acid, oleic acid, linoleic acid, linolenic acid, eleostearic acid, ricanic acid, ricinoleic acid, arachidonic acid, and anhydrides thereof.
- the unsaturated amino compound examples include allylamine, diallylamine, aminostyrene, aminomethylstyrene, acrylamide, and a reaction product of an unsaturated carboxylic acid or a derivative . thereof and polyamine such as ethylenediamine.
- the unsaturated isocyanate compound there can be used 2-isocyanate ethyl (meth) acrylate, allyl isocyanate, and a reaction product of an unsaturated hydroxyl compound and polyisocyanate such as tolylene diisocyanate or xylylene diisocyanate.
- the resin having at least one functional group used in (1) to (5) is at least one homopolymer or copolymer selected from among an unsaturated carboxylic acid, an unsaturated carboxylic anhydride, an unsaturated isocyanate compound, an unsaturated epoxy compound, an unsaturated carboxyl compound and an unsaturated amino compound.
- Examples of the resin having a carboxyl group as a functional group include poly (meth) acrylic acid, a (meth) acrylic acid-methyl (meth) acrylate copolymer, a (meth) acrylic acid-styrene copolymer, a styrene-maleic anhydride copolymer, an ethylene- (meth) acrylic acid copolymer, terminal carboxylated polybutadiene, a terminal carboxylated butadiene-acrylonitrile copolymer, and an (anhydrous) carboxylic acid adduct of a phenol resin.
- Examples of the resin having a hydroxyl group include polyhydroxyethyl (meth) acrylate, hydroxyethyl (meth) acrylate-styrene copolymer, hydroxyethyl (meth) acrylate-methyl ethacrylate copolymer, novolak type phenol resin, polyvinyl alcohol, partially saponified ethylene-vinyl acetate copolymer, polyglycerin, polyvinylphenol, carboxylic acid adduct of epoxy resin, polyethylene glycol, polypropylene glycol, terminal hydroxylated (hydrogenated) polybutadiene, terminal hydroxylated (hydrogenated) pentroleum resin, and a reaction product of polyhydric alcohol and polyhydric isocyanate.
- Examples of the resin having an epoxy group include polyglycidyl (meth) acrylate, a glycidyl (meth) acrylate- styrene copolymer, a glycidyl (meth) acrylate-methyl methacrylate copolymer, a reaction product of a. novolak type phenol resin and epichlorohydrin, a reaction product of polyhydric phenol and epichlorohydrin, and a reaction product of polyhydric alcohol and epichlorohydrin.
- Examples of the resin having an amino group include polyacrylamide, polyallylamine, a saponified product of polyvinylformamide, a saponified product of polyvinylacetamide, polyaminostyrene, an aminostyrene- styrene copolymer, a reaction product of a carboxyl group-containing resin and polyhydric amine, an urea resin and a melamine resin.
- Examples of the resin having an isocyanate group include poly-2-isocyanate ethyl (meth) acrylate, a 2- isocyanate ethyl (meth) acrylate-methyl.(meth) acrylate copolymer, and a reaction product of a polyhydric isocyanate compound and a polyhydric hydroxyl compound.
- more preferable resin among resins (1) to ' (5) include: (1-1) a reaction product of an unsaturated hydroxyl compound and a resin having a carboxylic anhydride group, for example, a reaction product of hydroxyethyl acrylate and a styrene-maleic anhydride copolymer, and reaction products obtained by further reacting these reaction products with a base; (1-2) a reaction product of an unsaturated hydroxyl compound and a resin having an isocyanate group (2-1) a reaction product of an unsaturated epoxy compound and a resin having a carboxyl group, for example, a reaction product of glycidyl acrylate and a methacrylic acid-methyl methacrylate copolymer, a reaction product of 3, 4-epoxy-cyclohexyl methylacrylate and a methacrylic acid-methyl methacrylate copolymer, and reaction products obtained by further reacting these reaction products with a base; and (3-1) a reaction product of an
- a copolymer containing (meth) acrylic acid as a kind of constituent monomers is preferable and an acrylic resin comprising a copolymerized or modified product of (meth) acrylic acid and an ester thereof is more preferable.
- Specific examples thereof include a reaction product of glycidyl acrylate and a methacrylic acid-methyl methacrylate copolymer, a reaction product of 3, 4-epoxy-cyclohexyl methylacrylate and a methacrylic acid-methyl methacrylate copolymer, and reaction products obtained by further reacting these reaction products with a base.
- the photopolymerizable resin there can also be used, in addition to the resins (1) to (5) , the followings: (6) a homopolymer or copolymer of a conjugated diene compound, and a modified product thereof, such as polybutadiene ; (7) a polymerizable unsaturated resin obtained by adding an unsaturated dicarboxylic acid or an anhydride thereof to an unsaturated bond in a fatty acid chain of an ester product of an epoxy resin and an unsaturated fatty acid; (8) a polymerizable unsaturated resin comprising an unsaturated fatty acid-modified high acid value alkyd resin; and (9) a mixture of a polymerizable unsaturated resin comprising a maleinated oil and an ethylenically unsaturated compound having at least one polymerizable unsaturated bond in the molecule.
- the -content of the resin (A) in the aqueous resist composition of the present invention is usually within a range from 5 to 40% by weight, preferably from 7 to 30% by weight, and particularly preferably from 9 to 25% by weight.
- the content is . less than 5% by weight, the thickness of the coating film formed on an insulating substrate is too thin and thus there may arise such a problem that the strength of the coating film decreases.
- the content is more than 40% by weight, the thickness of the coating film is too thick and thus there may arise such a problem that viscosity drastically increases and the drying time increases.
- the cellulose derivative (B) in the present invention is that in which an alkyl group, a hydroxyalkyl group or a carboxyalkyl group is introduced into a hydroxyl group of cellulose.
- Known cellulose derivatives can be used without limitation and hydroxyalkyl ' cellulose is preferable.
- the alkyl group include methyl group, ethyl group, propyl group and butyl group;
- examples of the hydroxyalkyl group include hydroxyethyl group, hydroxypropyl group and hydroxybutyl group;
- examples of the carboxyalkyl group include carboxymethyl group.
- the cellulose derivative include alkyl ethers of celluloses such as methyl cellulose, ethyl cellulose and benzyl cellulose; hydroxyalkyl ethers of hydroxyethyl cellulose and hydroxypropyl cellulose; alkylhydroxyalkyl ethers of methylhydroxyethyl cellulose, ethylhydroxyethyl cellulose, methylethylhydroxyethyl cellulose, methylhydroxypropyl cellulose and ethylhydroxypropyl cellulose; carboxyalkyl celluloses such as carboxymethyl cellulose; and cellulose esters such as cellulose acetate.
- alkyl ethers of celluloses such as methyl cellulose, ethyl cellulose and benzyl cellulose
- hydroxyalkyl ethers of hydroxyethyl cellulose and hydroxypropyl cellulose alkylhydroxyalkyl ethers of methylhydroxyethyl cellulose, ethylhydroxyethyl cellulose
- the amount of the alkyl group or hydroxyalkyl group to be introduced can be set within any range according to the purposes, but is usually within a range from 0.05 to 2.5 equivalents per glucose unit contained in the cellulose.
- methyl cellulose, ethylhydroxyethyl cellulose, methylhydroxypropyl cellulose, ethylhydroxypropyl cellulose and hydroxypropyl cellulose are preferable and hydroxypropyl cellulose is particularly preferable.
- cellulose derivatives can be used and examples thereof include HEC DAICEL (manufactured by DAICEL CHEMICAL INDUSTRIES, LTD.), Belmocoll (manufactured by Akzo Nobel Co., Ltd.), HEC (manufactured by SUMITOMO SEIKA CHEMICALS CO., LTD.), KLUCEL (manufactured by Sansyo Co., Ltd.), Metolose (manufactured by Shin-Etsu Chemical Co., Ltd.), Nisso HPC (manufactured by Nippon Soda Co., Ltd.) and Tylose (manufactured by Clariant Japan Co., Ltd.).
- HEC DAICEL manufactured by DAICEL CHEMICAL INDUSTRIES, LTD.
- Belmocoll manufactured by Akzo Nobel Co., Ltd.
- HEC manufactured by SUMITOMO SEIKA CHEMICALS CO., LTD.
- KLUCEL manufactured by Sans
- the content of the cellulose derivative (B) is within a range from 0.001 to 1.0% by weight based on the aqueous resist composition of the present invention. When the content is not within the above range, it is difficult to obtain the effect of the present invention. When the content is more than 1.0% by weight, not only smoothness of the surface of the coating film deteriorates, but also the resulting coating film exhibits severe tack.
- a weight ratio of the water soluble or alkali soluble resin (A) to the cellulose derivative (B) , (A) / (B) is preferably within a range from 10 to 1000.
- the content of the component (A) is preferably 15% by weight or more.
- the amount of an organic solvent having high volatility can be reduced by containing water (C) . Also it is made possible to increase a fire point of the resist composition and to enhance safety during storage and transportation.
- the content of water (C) in the aqueous resist composition of the present invention is required so as to control gelation of the cellulose derivative and to obtain good shape of the coating film, and is within a range from 25 to 65% by weight, preferably from 25 to 60% by weight, more preferably from 30 to 56% by weight, still more preferably from 35 to 52% by weight, and most preferably from 35 to 50% by weight, based on the aqueous resist composition.
- the hydroxyl group-containing organic solvent (D) of the present invention is a compound having at least one hydroxyl group in the molecule and known organic solvents can be used without limitation.
- an alcohol compound, a diol compound, a monoalkyl ether of a diol compound, a monoester of a diol compound and an aliphatic carboxylic acid, and an ⁇ - hydroxycarboxylate ester are preferable. Also these hydroxyl group-containing organic solvents can be used alone or in combination.
- the content of the component (D) in the aqueous resist composition of the present invention is within a range from 15 to 50% 'by weight, preferably from 20 to 55% by weight, more preferably from 20 to 45% by weight, still more preferably from 25 to 45% by weight, and most preferably from 25 to 40% ' by weight, based on the aqueous resist composition of the present invention.
- the content of the component (D) is less than 15% by weight, it is hard to suppress gelation of the cellulose derivative caused by heating, and thus the coating film has poor smoothness and it becomes hard to obtain a pattern with high accuracy. Furthermore, “sagging" occurs during drying and uniformity of the thickness of the coating film deteriorates. When the content is more than 50% by weight, solubility of the cellulose derivative deteriorates, and thus the coating film has poor smoothness and it becomes hard to obtain, a pattern with high accuracy.
- hydroxyl group-containing organic solvent (D) examples include methanol, ethanol, 1- propanol, isopropanol, 1-butanol, 1-pentanol, ethylene glycol, propylene glycol, glycerin, 1, 2-propanediol, diethylene glycol, triethylene glycol, tetraethylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, triethylene glycol monobutyl ether, ethylene glycol monoacetate, diethylene glycol monoacetate, triethylene glycol monoacetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monol mono
- an ⁇ -hydroxycarboxylate ester can also be used and known ⁇ -hydroxycarboxylate esters can be used without limitation.
- Specific examples of the ⁇ - hydroxycarboxylate ester include glycolate esters such as methyl glycolate, ethyl glycolate, .
- n-propyl glycolate isopropyl glycolate, n-butyl glycolate, isobutyl glycolate, n-pentyl glycolate, n-hexyl glycolate and cyclohexyl glycolate
- lactate esters such as methyl lactate, ethyl lactate, n-propyl lactate, isopropyl lactate, n-butyl lactate, isobutyl lactate, amyl lactate, isoamyl lactate, n-hexyl lactate, cyclohexyl lactate and benzyl lactate
- ⁇ -hydroxybutyrate esters such as methyl ⁇ -hydroxybutyrate, ethyl ⁇ -hydroxybutyrate, n-propyl ⁇ - hydroxybutyrate, isopropyl ⁇ -hydroxybutyrate, n-butyl ⁇ - hydroxybutyrate, isobutyl ⁇ -hydroxybutyrate, n-pent
- organic solvents can also be added, if necessary.
- the solvent include ketones such as acetone, methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, ethylbenzene and tetramethylbenzene; glycol ethers such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethylene glycol dimethyl ether, ethylene glycoldiethyl ether, ethylene glycol dibutyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether and diethylene glycol dibutyl ether; acetate esters such as methyl acetate, ethyl acetate and butyl
- the aqueous resist composition of the present invention further contains a polymerizable unsaturated compound (E) , in addition to the components (A) to (D) .
- the polymerizable unsaturated compound (E) is not specifically limited as far as it is a compound which is polymerized in the presence of a photopolymerization initiator (F) , and known polymerizable unsaturated compounds can be used alone or in combination.
- the content of the polymerizable unsaturated compound (E) in the resist composition of the present invention is within a range from 0.1 to 10% by weight, preferably from 0.5 to 7% by weight, and most preferably from 1 to 5% by weight, based on the aqueous resist composition of the present invention.
- content of the polymerizable unsaturated compound (E) is less than 0.01% by weight, photopolymerization does not sufficiently proceeds and it may become hard to maintain performances suited for use as the resist.
- the content is more than 10% by weight, not only properties of the coating film deteriorate, but also the coating film exhibits severe tack.
- polymerizable unsaturated compound examples include an unsaturated hydroxyl compound, an unsaturated epoxy compound, an unsaturated carboxylic acid or unsaturated carboxylic anhydride, an unsaturated amino compound, an unsaturated isocyanate compound, styrene, vinyltoluene, divinylbenzene, (meth) acrylic acid alkyl or aryl ester such as methyl methacrylate, a (meth) acrylate ester of a polyhydric alcohol, and an allyl ether of a polyhydric alcohol.
- Examples of the (meth) acrylate ester of the polyhydric alcohol include ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, ethoxylated trimethylolpropane tri (meth) acrylate, glycerin tri (meth) acrylate, pentaerythritol tetra (meth) acrylate and ethoxylated pentaerythritol tetra (meth) acrylate.
- allyl ether of the polyhydric alcohol examples include ethylene glycol diallyl ether, diethylene glycol diallyl ether, diallyl ether, polyethyleneglycol diallyl ether, trimethylolpropane triallyl ether, glycerin triallyl ether and pentaerythritol tetraallyl ether.
- photopolymerization initiator known photopolymerization initiators can be used.
- benzoin benzoin methyl ether
- benzoin ethyl ether benzyl, diphenyl disulfide, tetramethylthiuram sulfide, diacetyl, eosin, thionine, Michler's ketone, anthraquinone, chloroanthraquinone,methylanthraquinone, ⁇ -hydroxyisobutylphenone, p- isopropyl- ⁇ -hydroxyisobutylphenone,- ⁇ , ⁇ ' -dichloro-4- phenoxyacetophenone, 1-hydroxy-l-cyclohexylacetophenone, 2, 2-dimethoxy-2-phenylacetophenone,- methylbenzoyl formate, 2-methyl-l- [4- (methylthio) phenyl] -2- morpholinopropan-1-one, benzophenone, thioxanthone, 2- chlorothioxanthone,
- the photopolymerization initiators may be used alone or in combination.
- the content of the photopolymerization initiator is within a range from 0.01 to 10% by weight, preferably from 0.1 to 5% by weight, and most preferably from 0.5 to 3% by weight, based on the aqueous resist composition of the present invention.
- the photosensitive composition of the present invention can contain polymerization inhibitors so as to maintain stability during storage and processing.
- the polymerization inhibitor conventionally known polymerization inhibitors can be used.
- Examples thereof include phenols (for example, '3, 5-ditert-butyl-4- hydroxytoluene), hydroquinones (for example, hydroquinone and hydroquinone monomethyl ether) and catechols (for example, catechol, tert-butylcatechol and pyrogallol) .
- catechols for example, catechol, tert-butylcatechol and pyrogallol
- colorants such as acid blue, phthalocyanine blue, phthalocyanine green, iodine green, disazo yellow, crystal violet, titanium oxide, carbon black and naphthalene black
- silicone, fluorine and polymeric defoamers and/or leveling agents such as imidazole, thiazole, triazole and silane coupling agents.
- surfactants can be added so as to adjust surface tension.
- the surfactant is not specifically limited and known surfactants can be used. Examples thereof include anionic surfactants (for example, sodium dodecylbenzenesulfonate, sodium laurate, and ammonium salt of polyoxyethylene alkyl ether sulfate) , nonionic surfactants (for example, polyoxyethylene alkyl ether, polyoxyethylene alkyl ester, polyoxyethylene sorbitan fatty acid ester, polyoxyethylene alkyl phenyl ether, polyoxyethylene alkylamine and polyoxyethylene alkylamide) and acetylene glycol surfactants. In the present invention, these surfactants can be used alone or in combination.
- a viscosity at 25°C of the resist composition of the present invention is preferably within a range from 5 to 500 mPa-S, more- preferably from 10 to 300 mPa-S, still- more preferably from 15 to 200 mPa-S, and most preferably from 20 to 150 mPa-S.
- the viscosity can be measured by a commercially available B type rotation viscometer .
- the resist composition of the present invention can be prepared by mixing the above components according to .
- any method for example, a method .of charging the respective components in a vessel equipped with a stirring blade while stirring.
- the respective components may be simultaneously or successively charged in a vessel for mixing.
- the respective components may be charged by a single or several portions.
- the temperature during mixing is not specifically limited and is usually within a range from 5 to 50°C, and is preferably from 10 to 40°C.
- the respective components may be mixed at a given temperature or mixed while varying the temperature.
- the resist composition of the present invention can be applied to any coating method, but is particularly useful for a dip coating method.
- the dip coating method is a known method and a coated substrate is produced by charging a large amount of a resist composition in a vessel, dipping an insulating substrate comprising a conductive metal layer such as copper clad laminate and vertically pulling up the insulating substrate at any rate.
- the resist composition in the vessel can be set to any temperature and the temperature is preferably within a range from 10 to 50°C.
- An apparatus used in the dip coating method is not specifically limited and known apparatuses can be used. To form a uniform film, an apparatus capable of varying a climbing rate during pulling up is preferably used.
- Examples of a commercially available dip coating apparatus include Full Automatic Dip Coater AD-7200, Semi Automatic Dip Coater SD-6200 and Five Coater SZC-720 (manufactured by SAZMA Communication Industry Co., Ltd.).
- a print circuit board having a desired wiring pattern is usually produced from the copper clad substrate obtained by the dip coating method through the steps of drying, exposure, development, etching and removal of the resist film and, if necessary, other optional steps. Examples As the respective components (A) to (F) of the resist, following were used.
- (B) Cellulose derivative (b-1) Hydroxyethyl cellulose (manufactured by Tokyo Kasei Kogyo Co. , Ltd. )
- (b-2) Methyl cellulose manufactured by Tokyo Kasei Kogyo Co., Ltd.)
- TAA Triethylamine
- NMM N-methyl morpholine
- ELCOMETER INC. Adhesion Tester, Model F106, apparatus for measuring a peeling strength when peeling off an aluminum cylinder adhered onto the coated surface
- C number of patterns with chipping and warp is 4 among 5 patterns
- D number of patterns with chipping and warp is 5 among 5 patterns
- the resist film was removed with an aqueous 3 wt% sodium hydroxide solution at 45°C, followed by washing and drying to obtain a substrate on which a copper wiring pattern is formed.
- Examples 2 to 6> In the same manner as in Example 1, except that components described in Table 1 were used as the respective components in the amount described in Table 1, aqueous resist compositions were prepared. In the same manner as in Example 1, evaluation was conducted. The results are shown in Table 1.
- ⁇ Comparative Example 1> In the same manner as in Example 1, except that hydroxyethyl cellulose was not used, an aqueous resist composition was prepared. In the same manner as in Example 1, evaluation was conducted. The results are shown in Table 1.
- ⁇ Comparative Example 2> In the same manner as in Example 1, except that the amount of hydroxyethyl cellulose was 2.0 parts by weight, an aqueous resist composition was prepared.
- Example 1 In the same manner as in Example 1, evaluation was conducted. The results are shown in Table 1. ⁇ Examples 7 to 16> In the same manner as in Example 1, except that components described in Table 2 were used as the respective components in the amount described in Table 2, aqueous resist compositions were prepared. In the same manner as in Example 1, evaluation • was conducted. The results are shown in Table 2.
- the aqueous resist composition of the present invention is excellent in adhesion, tack and surface smoothness and can provide a print circuit board on which a wiring pattern with high accuracy is formed.
Abstract
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WO2003048860A1 (en) * | 2001-12-03 | 2003-06-12 | Showa Denko K. K. | Photosensitive composition and production processes for photosensitive film and printed wiring board |
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