WO2005019934A2 - Pate precurseur et procede d'elaboration - Google Patents

Pate precurseur et procede d'elaboration Download PDF

Info

Publication number
WO2005019934A2
WO2005019934A2 PCT/US2004/026701 US2004026701W WO2005019934A2 WO 2005019934 A2 WO2005019934 A2 WO 2005019934A2 US 2004026701 W US2004026701 W US 2004026701W WO 2005019934 A2 WO2005019934 A2 WO 2005019934A2
Authority
WO
WIPO (PCT)
Prior art keywords
paste
mold
ribs
pattern
surfactant
Prior art date
Application number
PCT/US2004/026701
Other languages
English (en)
Other versions
WO2005019934A3 (fr
Inventor
Chikafumi Yokoyama
Original Assignee
3M Innovative Properties Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Company filed Critical 3M Innovative Properties Company
Priority to CA002536520A priority Critical patent/CA2536520A1/fr
Priority to JP2006523987A priority patent/JP2007503604A/ja
Priority to EP04781405A priority patent/EP1656589A2/fr
Publication of WO2005019934A2 publication Critical patent/WO2005019934A2/fr
Publication of WO2005019934A3 publication Critical patent/WO2005019934A3/fr

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents

Definitions

  • the present invention relates to a photosensitive paste and, more particularly, to a precursor paste that can be advantageously used when forming a fine structure.
  • the present invention also relates to a method of producing the fine structure by using the paste, and to the fine structure thus produced.
  • a typical example of the fine structure is ribs formed on a back panel for a plasma display panel.
  • the flat panel displays that are small in thickness and light in weight have been gaining much attention as the next generation display apparatus.
  • the plasma display panel (PDP) has been used for business use, and recently for home use as wall-hung television receiver.
  • the PDP has such a constitution as schematically shown in Fig. 1. While only one discharge cell 56 is shown in PDP 50 for the purpose of simplicity, the discharge cell 56 is delimited by a front glass substrate 61, a back glass substrate 51 and ribs (also referred to as barrier rib, separator or barrier wall) 54 of fine structure.
  • the front glass substrate 61 has transparent display electrodes 63 consisting of scan electrodes and sustaining electrodes, a transparent dielectric layer 62 and a transparent protective layer 64 formed thereon.
  • the back glass substrate 51 has address electrodes 53 and a dielectric layer 52 formed thereon.
  • the display electrode 63 consisting of the scan electrode and the sustaining electrode, and the address electrodes 53 are perpendicular to each other and arranged at equal intervals.
  • Each of the discharge cells 56 has a fluorescent layer 55 formed on the inner wall thereof and is filled with rare gas (for example, Ne-Xe gas) so that spontaneous light emission occurs through plasma discharge between the electrodes.
  • the rib 54 is made generally in fine structure of ceramic to which the fine structure of the present invention can be applied. Fig.
  • FIG. 2 shows the ribs 54 of the present invention schematically as will be described in detail below, the ribs 54 being provided on the back glass substrate 51 together with the address electrodes 53 so as to form the back panel of the PDP.
  • shape and dimensional accuracy of the ribs have significant influence on the performance of the PDP, many methods have been proposed to create the ribs.
  • One such method involves molding a precursor ceramic paste into a desired shape and then sintering the paste to create the densified ceramic ribs.
  • Various improvements have been made on the mold and method employed for producing the same.
  • a metal or glass is used as the mold material, a curable coating solution is placed between the surface of the glass substrate and the mold to form the ribs, then the mold is removed after the coating solution has been cured, and the substrate onto which the cured coating solution has been transferred is fired (See JP 9- 12336).
  • the coating solution is a paste consisting of glass powder of low melting point as a major component.
  • This method of forming the ribs has various problems such that the mold must be produced with high machining accuracy, the ribs tend to include bubbles, the ribs can easily peel off the glass substrate, and it is necessary to keep the mold and the glass substrate in close contact with each other under reduced pressure, which requires installation of a pressure reducing apparatus that adds to the producing cost and requires skilled operator.
  • various improvements have been made on the rib forming paste.
  • the present inventors have found that when rib were formed by using a flexible mold with the photosensitive paste having a viscosity of 26,000, various defects occurred due to entrapment of bubbles. The occurrence of defects due to entrapment of bubbles was particularly marked in a grid pattern.
  • the present inventors have found that when a surfactant comprising a phosphorus based compound and a sulfonate-based compound are mixed with a photosensitive paste, dispersibility of fine particles in the paste is improved while maintaining high content of fine ceramic particles, thereby reducing the viscosity to 20,000 cps or less.
  • the present invention relates to a precursor paste, comprising: a photosensitive material; fine ceramic particles dispersed, as primary particles, in the photosensitive material; and a surfactant comprising a phosphorus based compound having at least one phosphorous atom with at least one -OH group and a sulfonate-based compound having a sulfonate group.
  • the precursor paste preferably has a viscosity of 1,500 to 20,000 cps at 22°C.
  • the present invention relates to a fine structure comprising a substrate and a pattern of projections of predetermined shape and dimensions formed on the surface of the substrate, that is formed by photocuring of the precursor paste of the present invention.
  • the present invention relates to a method of producing a fine structure comprising a substrate and a pattern of projections of predetermined shape and dimensions formed on the surface of the substrate, that comprises the steps of: preparing a flexible mold that has a pattern of grooves of shape and dimensions, that correspond to the pattern of projections to be formed on the surface of the substrate; filling the grooves of the mold with the paste such as by placing the paste in a space between the substrate and the groove pattern of the mold; laminating the mold on the substrate; irradiating the paste with light of predetermined wavelengths to carry out photocuring, so as to form the fine structure that comprises the substrate and the pattern of projections integrally bonded therewith; and removing the mold from the fine structure.
  • Fig. 1 is a sectional view schematically showing an example of the prior art PDP to which the present invention can be also applied.
  • Fig. 2 is a perspective view showing a back panel for PDP having ribs of the present invention that is an embodiment of the fine structure of the present invention.
  • Fig. 3 is a perspective view showing one embodiment of the flexible mold used in the present invention.
  • Fig. 4 is a sectional view taken along line IV-iV of the flexible mold shown in Fig. 3.
  • Fig. 5A-5C are sectional views sequentially showing one method of producing the back panel for PDP having ribs of the present invention.
  • the present invention is directed to a (e.g. photosensitive) ceramic paste suitable for use in the production of fine structures such as rib of PDP ribs by molding the paste based on photocuring.
  • the photosensitive ceramic paste includes the following three kinds of components: (1) a photosensitive material, (2) fine ceramic particles dispersed, as primary particles, in the paste, and (3) a surfactant comprising a phosphorus based compound having at least one phosphorous atom with at least one -OH group in the molecule and a sulfonate-based compound having a sulfonate group in the molecule.
  • the photosensitive ceramic paste may optionally contain other additional components.
  • a photosensitive material as a first component may be various photosensitive materials used generally in a general-purpose photosensitive paste, but is preferably a photosensitive material containing a monomer or oligomer having a (meth)acryl group in the molecule.
  • methacryl group-containing monomer or oligomer examples include, but are not limited to triethylene glycol dimethacrylate, diethylene glycol dimethacrylate, ethylene glycol dimethacrylate, 1,6-hexanediol dimethacrylate, glycerin dimethacrylate, 2-hydroxy-3-acryloyloxypropyl methacrylate, neopentyl glycol dimethacrylate, 1,10-decanediol dimethacrylate, bisphenol A diglycidyl ether methacrylic acid adduct, and EO adduct dimethacrylate of bisphenol A.
  • the second component namely fine ceramic particles
  • the second component include various fine ceramic particles that are commonly used for photosensitive paste.
  • Ceramic materials that can be advantageously used in the form of fine particles in the embodiments of the present invention include, but are not limited to, glass, alumina, titania, zirconia and silica. Fine particles of these ceramic materials can be used individually or in a mixture of two or more kinds. Fine particles of one kind of ceramic material may also be covered by one or more thin coatings of another kind of ceramic material or, if necessary, by polymer coating instead of ceramic material.
  • the fine ceramic particles may have various particle sizes, they have average particle size of preferably from about 0.1 to 10 ⁇ m, and more preferably from about 0.5 to 5.0 ⁇ m, whenused in the formation of ribs or the like is taken into consideration.
  • the phosphorus based compound used as a third component (surfactant) in the photosensitive ceramic paste, together with the photosensitive resin and fine ceramic particles is not specifically limited as far as it is a phosphorus based compound having a at least one phosphorous atom with at least one -OH group in the molecule (i.e. having at least one phosphorus-based acid group), but is preferably a phosphorus based compound represented by the following general formula (I), (II), (III) or (IV):
  • R 1 to R 7 may be the same or different and represent a hydrocarbon group having 1 to 60 carbon atoms, which may optionally contain 1 to 30 heteroatoms, such as oxygen, nitrogen, sulfur, and the like, X represents an oxygen atom or a sulfur atom, and m represents an integer of 1 to 4.
  • Typical examples of the phosphorus based compound include, but are not limited to, phosphorous acid monoalkyl (Cl-10) esters and phosphorous acid dialkyl (Cl-10) esters, such as dibutyl phosphite, butyl phosphite, dimethyl phosphite, methyl phosphite, propyl phosphite, dipropyl phosphite, diphenyl phosphite, phenyl phosphite, isopropyl phosphite, diisopropyl phosphite and n-butyl-2-ethylhexyl phosphite; phosphoric acid monoalkyl (Cl-10) esters and phosphoric acid dialkyl (Cl-10) esters, such as dibutyl phosphate, butyl phosphate, methyl phosphate, propyl phosphate, dipropyl phosphate, dipheny
  • compounds having an unsaturated group such as acryl group, methacryl group or vinyl group at the alkyl moiety of the phosphorous acid alkyl esters may be used.
  • compounds having a phosphate or phosphinate group may be used.
  • More preferable phosphorus based compound includes a phosphorus based compound having two or more phosphate or phosphinate groups, for example, alkyldiphosphonic acid such as hy ⁇ roxyethylenediphosphonic acid.
  • the sulfonate-based compound used, as the surfactant, in combination with the phosphorus based compound is not specifically limited as far as it is a sulfonate-based compound having a sulfonate group in the molecule, and examples thereof include: sodium alkylbenzenesulfonate, calcium alkylbenzenesulfonate, sodium alkylnaphthalenesulfonate, naphthalenesulfonic acid-formalin condensate, sodium sulfosuccinic acid dialkyl ester, sodium alkyldiphenyl ether disulfonate and the like.
  • a mixing ratio of the phosphorus based compound to the sulfonate-based compound is usually within a range from about 99: 1 to 1: 99, and preferably from about 90: 10 to 10: 90.
  • weight ratio is usually within a range from about 99: 1 to 1: 99, and preferably from about 90: 10 to 10: 90.
  • the photosensitive ceramic paste of the present invention has viscosity of 20,000 cps or less, preferably within a range from 2,000 to 10,000 cps as measured at 22°C.
  • a surfactant having a phosphate group is synergistically employed in combination with a surfactant having a sulfonate group.
  • a surfactant having a sulfonate group it was unexpectedly made possible to disperse fine particles of glass or ceramic to the level of primary particles in the photosensitive paste.
  • the viscosity could be decreased to 10,000 cps or less, for example, for a photosensitive paste containing 80% by weight of fine glass particles.
  • viscosity of a photosensitive paste containing 80% by weight of fine glass particles could be decreased only to a high value of 26,000 cps when only a phosphorus based compound having a phosphate group was added as a surfactant. Further, the viscosity of the photosensitive paste could be decreased only to a high value of 35,000 cps when only a sulfonate-based compound having a sulfonate group was added as a surfactant.
  • the viscosity of the photosensitive paste could be decreased to as low as 6,000 cps.
  • the maximum particle size of the paste of the invention was about 2 to 3 ⁇ m and fine particles of glass were dispersed as the primary particles (average particle size of about 2 to 3 ⁇ m), making a great contribution to the effects of the present invention.
  • the paste described herein was also found to have improved shelf life. For example, the paste of the invention was left to stand at 22°C for two months and found not to deteriorate as indicated by gelation.
  • the content of the fine ceramic particles in the photosensitive ceramic paste of the present invention is usually within a range from 60 to 90% by weight, and preferably from about 70 to 85%) by weight.
  • the content of the fine ceramic particles in the paste is out of the range described above, it can adversely effect the production and characteristics of the fine structure. Adverse effects such as faulty application of the paste, damage or defect of the fine structure such as ribs and difficulty of releasing from the mold may be observed.
  • the photosensitive ceramic paste of the present invention optionally contains additives, which are commonly used in a general-purpose photosensitive paste, in addition to the above-mentioned components.
  • Suitable additives include binders, photopolymerization initiators, diluents, ultraviolet absorbers, sensitizers, auxiliary sensitizers, polymerization inhibitors, plasticizers, thickeners and organic solvents.
  • the photosensitive ceramic paste of the present invention can have various compositions as far as it satisfies the above-mentioned constituent features, and preferably has a composition comprising: 5 to 15 parts by weight of a photosensitive resin, 60 to 90 parts by weight of fine ceramic particles, 0.1 to 1.0 parts by weight of a surfactant made of a phosphorus based compound, 0.1 to 1.0 parts by weight of a surfactant made of a sulfonate-based compound, 5 to 15 parts by weight of a diluent, and 0.02 to 0.25 parts by weight of a photopolymerization initiator.
  • the ceramic paste having such a composition may contain optional additives in commonly employed amounts.
  • the photosensitive ceramic paste of the present invention is preferably cured by photocuring through irradiation with light via a flexible mold having a pattern of grooves of predetermined shape and dimensions being formed on the surface thereof, and is therefore useful as the fine structure-providing precursor paste.
  • a typical example of the fine structure is ribs formed on a back panel of PDP.
  • the pattern of grooves of the flexible mold for making the ribs on the back panel of PDP may be a straight pattern or a plurality of grooves arranged at equal intervals substantially in parallel to each other, but is preferably a grid pattern of a plurality of grooves arranged at equal intervals substantially in parallel to each other and crossing each other.
  • the ribs of the back panel of PDP may be formed in either a straight pattern or a grid pattern, although grid pattern is preferable.
  • the present invention provides a fine structure having a pattern of projections of predetermined shape and dimensions formed on the surface of a substrate.
  • the fine structure of the present invention is preferably ribs of a back panel of PDP.
  • the pattern of projecting ribs may be either a straight pattern of a plurality of ribs arranged at equal intervals substantially in parallel to each other, or a grid pattern of a plurality of ribs arranged at equal intervals substantially in parallel to each other and crossing each other, but is preferably a grid pattern of ribs.
  • the present invention provides a method of producing a fine structure having a pattern of projections of predetermined shape and dimensions formed on the surface of a substrate.
  • the method of the present invention comprises the steps of: preparing a flexible mold that has a pattern of grooves of shape and dimensions, which correspond to the pattern of projections, formed on the surface thereof; placing the photosensitive ceramic paste (fine structure precursor paste) of the present invention in a space between the substrate and the grooves pattern of the mold, filling the grooves of the mold with the ceramic paste and laminating the mold on the substrate; irradiating the ceramic paste with light of predetermined wavelengths to carry out photocuring, so as to form the fine structure comprising the substrate and the pattern of projections integrally bonded therewith; and removing the mold from the fine structure.
  • the fine structure is preferably ribs of the back panel of PDP. Therefore, the method of the present invention preferably further includes the step of forming a set of address electrodes at equal intervals substantially in parallel to and independently from each other on the surface of the substrate.
  • the mold used in the practice of the present invention is preferably a flexible mold comprising a support and a molding layer that is provided on the support and has a pattern of grooves of predetermined shape and dimensions, which correspond to the pattern of projection, formed on the surface thereof.
  • the flexible mold will be described in detail later.
  • the practice of the present invention will be described in more detail below with reference to the accompanying drawings.
  • Fig. 2 shows ribs 54 of PDP that is a typical example of the fine structure of the present invention.
  • the ribs 54 of PDP are formed on the back panel glass substrate 51 so as to constitute the back panel of the PDP, and can be advantageously used when incorporated in the PDP 50 as shown in Fig. 1. While the ribs 54 shown are formed in a straight pattern, a grid pattern of ribs that cross each other at right angles is also included in the scope of the present invention, and photosensitive ceramic paste of the present invention can fully achieve its excellent effects when the ribs are formed in a grid pattern. Intervals c (cell pitch) of the ribs 54 shown in the drawing may be changed in accordance to the screen size and/or other factors, but usually within a range from about 150 to 400 ⁇ m. Ribs are generally required to be free of defects and to have high dimensional accuracy.
  • the ribs are required to be formed at the predetermined positions co ⁇ esponding to the address electrodes with almost no deviation allowing tolerance of several tens of micrometers. A positional error of more than several tens of micrometers will have adverse effect on the condition of emitting visible light thus making satisfactory spontaneous light emission impossible. As larger screen sizes are becoming more popular, accuracy of rib pitch poses a serious problem. When the ribs 54 are viewed as a whole, accuracy of several tens of ppm is required for the total pitch R (distance between outermost ribs: although only five ribs are shown in the drawing, actually there are about 3,000 ribs) of the ribs, while it varies a little depending on the substrate size and the rib shape.
  • the mold comprising the support and the molding layer that is supported by the support and has a pattern of grooves is advantageously used in the practice of the present invention, accuracy of several tens of ppm is required for the total pitch R (distance between outermost grooves) of the mold, too. According to the present invention, such problems of dimensional accuracy can also be solved.
  • the mold preferably comprises the support comprising a plastic film, and the molding layer having a pattern of grooves (groove portion) formed by molding of a photocurable resin on one side of the support.
  • the support suited for practice of the present invention is a film made of a plastic material.
  • plastic material suited for use as the support examples include, but are not limited to, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), stretched polypropylene, polycarbonate and triacetate.
  • PET film is useful as the support and, for example, polyester film such as TetoronTM film can be advantageously used as the support.
  • TetoronTM film can be advantageously used as the support.
  • These plastic films may be used as a single-layer film, or two or more kinds of them may be used in combination as a multi-layer film. While the plastic film may have various thicknesses depending on the constitutions of the mold and the PDP, the thickness is usually within a range from 0.01 to 1.0 mm, and preferably within a range from 0.1 to 0.4 mm.
  • the flexible mold has a molding layer formed thereon.
  • the molding layer has the pattern of grooves of predetermined shape and dimensions, which co ⁇ espond to the pattern of projections such as the ribs or other fine structure of the PDP back panel to be produced by using the mold, being formed on the surface thereof and may also be called the shape forming layer.
  • the molding layer normally consists of a single layer, but may also be formed in a multi-layer structure from two or more kinds of material having different properties if necessary. Both the support and the molding layer are preferably transparent, when it is taken into consideration that a photocurable molding material is used.
  • Fig. 3 is a perspective view schematically showing a part of a preferable embodiment of the flexible mold
  • Fig. 4 is a sectional view taken along line IV-iV of Fig. 3.
  • the flexible mold 10 is not designed for the production of the back glass substrate 51 having straight pattern of ribs comprising a plurality of ribs 54 arranged in parallel to each other shown in Fig. 2.
  • the photosensitive ceramic paste of the present invention is particularly useful in producing the back glass substrate having grid pattern of ribs.
  • the flexible mold 10 has the pattern of grooves having predetermined shape and dimensions formed on the surface thereof, as illustrated.
  • the pattern of grooves constituted from a plurality of grooves 4 that are arranged at equal intervals substantially in parallel to each other while crossing.
  • this constitution of the grooves formed on the surface in grid pattern is particularly useful in fo ⁇ ning the PDP ribs having grid pattern of projections.
  • the flexible mold 10 may have additional layer or the constituting layers thereof may be processed as required, but the mold is basically constituted from the support 1 and the molding layer 11 formed thereon having the groove portion 4 as shown in Fig. 3.
  • the molding layer 11 is preferably made of a curable material.
  • the curable material is a thermocurable material or a photocurable material. Particularly, the photocurable material is useful because it can be cured within a comparatively short time without requiring a long and large heating furnace for formation of the molding layer.
  • the photocurable material is preferably a photocurable monomer or oligomer, and more preferably an acrylic monomer or oligomer.
  • the curable material can contain optional additives.
  • Suitable additives include polymerization initiators (for example, photoinitiators) and antistatic agents.
  • examples of the acrylic monomer suited for formation of the molding layer include, but are not limited to, urethane acrylate, polyether acrylate, acrylamide, acrylonitrile, acrylic acid and acrylate ester.
  • examples of the acrylic monomer suited for formation of the molding layer include, but are not limited to, urethane acrylate oligomer and epoxy acrylate oligomer.
  • the urethane acrylate and oligomer thereof can provide a flexible and tough cured article after curing, and can also contribute to an improvement in productivity of the mold because of very large curing rate among acrylates.
  • the molding layer becomes optically transparent. Therefore, the flexible mold comprising such a molding layer enables the use of the photocurable molding material when the fine structure such as PDP ribs is produced.
  • These acrylic monomers or oligomers may be used alone, or two or more kinds of them may be optionally used in combination.
  • the support 1 carrying the molding layer 11 is preferably a plastic film of which thickness is usually within a range from about 0.05 to 1.0 mm.
  • the support is preferably optically transparent. When the support is optically transparent, since light irradiated for curing can transmit through the support, the molding layer can be formed by using a photocurable molding material.
  • a typical example of transparent support is as described above.
  • the fine structure may be formed in various structures, typical example thereof is the rib portion of the substrate (back panel) of PDP wherein the ribs are formed on a flat glass sheet.
  • the method of producing the PDP substrate having the grid pattern of ribs by using the flexible mold shown in Figs. 3 and 4 will be described below with reference to Fig. 5.
  • the producing apparatus shown in Figs. 1 to 3 of Japanese Unexamined Patent Publication (Kokai) No. 2001-191345, for example, can be advantageously used for the practice of the present invention.
  • a flat glass sheet having electrodes disposed thereon at equal intervals in parallel to each other is prepared in advance and is set on a surface plate. Then as shown in Fig.
  • the flexible mold 10 of the present invention having the pattern of grooves is placed at a predetermined position on the flat glass sheet 31 , and alignment of the flat glass sheet 31 and the mold 10 is carried out. Since the mold 10 is transparent, alignment of the flat glass sheet 31 and the electrodes can be carried out easily. More specifically, the alignment is carried out either under visual observation or by using a sensor such as CCD camera so as to make the groove portion of the mold 10 and electrodes on the flat glass sheet 31 parallel to each other. At this time, the mold 10 and distance between adjacent electrodes on the flat glass sheet 31 may be made equal by controlling the temperature and humidity, as required. This is because the mold 10 and the flat glass sheet 31 expand or shrink with different rates with temperature and humidity.
  • a laminate roll 23 is placed on one edge of the mold 10.
  • the laminate roll 23 is preferably a rubber roll.
  • the one edge of the mold 10 is preferably fixed on the flat glass sheet 31. In this way, alignment of the flat glass sheet 31 (with electrodes) and the mold 10 may be maintained during subsequent operations. Then the other free edge of the mold 10 is lifted by a holder (not shown) and is moved to above the laminate roll 23 so as to expose the flat glass sheet 31.
  • the photosensitive paste 33 comprises the photosensitive ceramic paste of the present invention described previously.
  • the photosensitive ceramic paste 33 may be supplied, for example, by means of a paste hopper equipped with a nozzle.
  • the photosensitive ceramic paste 33 is supplied onto the flat glass sheet 31 not evenly over the surface. Instead, the rib precursor 33 is supplied only to a position on the flat glass sheet 31 near the laminate roll 23 as shown in Fig. 5(A). This is because the photosensitive ceramic paste 33 can be spread uniformly over the flat glass sheet 31 as the laminate roll 23 moves over the mold 10 in the process to be described later.
  • the photosensitive ceramic paste 33 has viscosity preferably within a range from 2,000 to 10,000 cps in order to carry out this operation smoothly as well.
  • method of supplying the photosensitive ceramic paste is not limited to that described above.
  • the photosensitive ceramic paste may also be applied so as to coat the entire surface of the flat glass sheet, although not shown.
  • the laminate roll 23 is moved over the mold 10 at a predetermined speed by a motor (not shown) as indicated with an arrow in Fig. 5(A). While the laminate roll 23 is moving over the mold 10, a pressure is applied onto the mold 10 progressively from one edge to the other edge thereof by the gravity of the laminate roll 23, so as to spread the photosensitive ceramic paste 33 over the space between the flat glass sheet 31 and the mold 10 thereby filling the grooves of the mold 10 with the paste. That is, the photosensitive ceramic paste 33 fills the grooves successively while replacing the air therein.
  • thickness of the photosensitive ceramic paste can be controlled within a range from several micrometers to several tens of micrometers by adjusting the viscosity of the ceramic paste, or the diameter, weight or traveling speed of the laminate roll.
  • the grooves of the mold also serve as channels for air flow. Even when air is captured in the grooves, the air can be efficiently purged to the outside of the mold when the pressure is applied as described above. As a result, with this method, bubbles can be prevented from remaining in the grooves even when the photosensitive ceramic paste is supplied under the atmospheric pressure. In other words, necessity to reduce the pressure can be eliminated when applying the photosensitive ceramic paste. It needs not to say that pressure may be reduced so as to make the removal of bubbles easier.
  • the photosensitive ceramic paste is cured.
  • the laminate of the flat glass sheet 31 and the mold 10 is put into a light irradiating apparatus (not shown) to irradiate the ceramic paste 33 with ultraviolet rays (UL) via the flat glass sheet 31 and the mold 10.
  • UL ultraviolet rays
  • ribs are made of the photosensitive ceramic paste.
  • the flat glass sheet 31 and the mold 10 are taken out of the light irradiating apparatus with the ribs 34 bonded onto the flat glass sheet 31, and the mold 10 is removed as shown in Fig. 5(C).
  • the mold typically has good release properties. However, a release coating may be optionally applied to the mold to aid in easy removal of the mold 10 with less force without damaging the ribs 34 that adheres to the flat glass sheet 31. Of course, no major apparatus is required for this mold releasing operation.
  • Photocurable oligomer bisphenol A diglycidyl methacrylate acid adduct
  • Photocurable monomer triethylene glycol dimethacrylate (manufactured by . _ ,
  • Photocuring initiator bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide
  • Fine ceramic particles mixed powder of lead glass and ceramic (manufactured 4r , Q ⁇ by Asahi Glass Co. under the trade name of "RFW-030") ' °
  • Phosphorus based surfactant phosphate propoxyalkyl polyol (manufactured by 25.3 g 3M under the trade name of "POCA”)
  • Sulfonate-based surfactant sodium dodecylbenzenesulfonate (manufactured by
  • a flexible resin mold having 2593 ribs, each rib being 200 ⁇ m in height, 100 ⁇ m in width at the top, and 540 mm in length, at a 360 ⁇ m pitch was made for the production of PDP back panel.
  • a PDP glass substrate was coated with the photosensitive ceramic paste that was made as described above to a thickness of about 100 ⁇ m with a coating blade.
  • the flexible mold was laminated onto the glass substrate coated with the glass paste, while flexing the mold and making alignment.
  • a laminate roll 200 mm in diameter and 100 kg in weight was moved at a speed of 40 mm per second. Pressure applied to the mold was generated only by the weight of the laminate roll.
  • the mold laminated onto the glass substrate was irradiated on both sides of mold and glass substrate with light having wavelengths from 400 to 450 nm for 30 seconds using an array of fluorescent lamps produced by Phillips Corp.
  • the photosensitive glass paste was cured and turned into ribs.
  • the glass substrate with the ribs formed thereon was removed from the mold, and the glass substrate with the ribs was obtained.
  • Total pitch (distance between outermost ribs) was measured at five points on the mold used in the molding operation and the glass substrate that was obtained, with the results shown in Table 1.
  • Table 1 Table 1
  • the ribs made by using the phosphorus based surfactant and sulfonate-based surfactant in the paste according to the present invention showed dimensions almost identical with those of the mold, indicating that the ribs were formed with high dimensional accuracy.
  • the glass substrate with the ribs formed thereon was then fired at 550°C for one hour to remove organic components contained in the paste by combustion, thereby to form the ribs made of glass components. Upon observation of the ribs formed on the back panel with an optical microscope, no defect was detected.
  • Comparative Example 1 The process described in Example 1 was conducted, except for using 50.6 g of phosphorus based surfactant (phosphate propoxyalkyl polyol) instead of the combination of phosphorus based surfactant and sulfonate-based surfactant for the purpose of comparison, when making the photosensitive ceramic paste.
  • B viscosity of the paste thus obtained was 26,000 cps (shaft #5, 20 rpm).
  • a glass substrate having ribs formed thereon was made in the process described in Example 1, using photosensitive ceramic paste prepared as described above. Since the glass paste had high viscosity of 26,000 cps in this example, greater pressure was applied when laminating the mold onto the glass substrate coated with the glass paste.
  • the ribs made by using the paste containing only phosphorus based surfactant showed difference in dimension from the mold, about 70 ⁇ m at the maximum. Ribs of high dimensional accuracy could not be easily formed in this example.
  • the glass substrate with the ribs formed thereon was then fired at 550°C for one hour to remove organic components contained in the paste by combustion, thereby to form the ribs made of glass components. Upon observation of the ribs formed on the back panel with an optical microscope, many defects were detected.
  • Comparative Example 2 The process described in Example 1 was conducted, except for using 50.6 g of sulfonate-based surfactant (sodium dodecylbenzenesulfonate) instead of the combination of phosphorus based surfactant and sulfonate-based surfactant for the purpose of comparison, when making the photosensitive ceramic paste.
  • B viscosity of the paste thus obtained was 35,000 cps (shaft #5, 20 rpm).
  • a glass substrate having ribs formed thereon was made in the process described in Example 1, using the photosensitive ceramic paste prepared as described above. Since the glass paste had high viscosity of 35,000 cps in this example, greater pressure was applied when laminating the mold onto the glass substrate coated with the glass paste.
  • a laminate roll 200 mm in diameter and 250 kg in weight was moved at a speed of 10 mm per second.
  • the glass substrate with the ribs formed thereon was removed from the mold, and the glass substrate having the ribs was obtained.
  • Total pitch (distance between outermost ribs) of the ribs was measured at five points on the mold used in the molding operation and the glass substrate that was obtained.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Conductive Materials (AREA)
  • Surface Treatment Of Glass (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

L'invention concerne une pâte précurseur à structure fine qui permet de produire des nervures d'écran au plasma ou d'autres fines structures, avec un rapport de forme important et selon une précision élevée, sans déformation de motif ni autre défaut. La pâte photosensible comprend un matériau photosensible, des particules en céramique fines dispersées en tant que particules primaires dans la pâte, et un tensioactif comprenant un composé au phosphore et un composé au sulfonate.
PCT/US2004/026701 2003-08-22 2004-08-17 Pate precurseur et procede d'elaboration WO2005019934A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002536520A CA2536520A1 (fr) 2003-08-22 2004-08-17 Pate precurseur et procede d'elaboration
JP2006523987A JP2007503604A (ja) 2003-08-22 2004-08-17 前駆ペースト及びその製造方法
EP04781405A EP1656589A2 (fr) 2003-08-22 2004-08-17 Pate precurseur et procede d'elaboration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003-208442 2003-08-22
JP2003208442A JP2005068181A (ja) 2003-08-22 2003-08-22 微細構造体前駆ペースト、微細構造体及びその製造方法

Publications (2)

Publication Number Publication Date
WO2005019934A2 true WO2005019934A2 (fr) 2005-03-03
WO2005019934A3 WO2005019934A3 (fr) 2005-06-02

Family

ID=34208978

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/026701 WO2005019934A2 (fr) 2003-08-22 2004-08-17 Pate precurseur et procede d'elaboration

Country Status (7)

Country Link
EP (1) EP1656589A2 (fr)
JP (2) JP2005068181A (fr)
KR (1) KR20060118406A (fr)
CN (1) CN1839352A (fr)
CA (1) CA2536520A1 (fr)
TW (1) TW200513794A (fr)
WO (1) WO2005019934A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007067469A2 (fr) 2005-12-08 2007-06-14 Molecular Imprints, Inc. Procédé permettant d'expulser un gaz positionné entre un substrat et un moule
US7478791B2 (en) 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
US7670543B2 (en) 2004-08-26 2010-03-02 3M Innovative Properties Company Method of forming microstructures with a template
US7708926B2 (en) 2002-07-11 2010-05-04 Molecular Imprints, Inc. Capillary imprinting technique
US10670962B2 (en) 2017-02-20 2020-06-02 Samsung Electronics Co., Ltd. Photosensitive compositions, preparation methods thereof, and quantum dot polymer composite pattern produced therefrom

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
JP2019019673A (ja) * 2017-07-11 2019-02-07 日立オートモティブシステムズ株式会社 ポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023130A (en) * 1995-09-06 2000-02-08 Kyocera Corporation Plasma display substrate and a production method thereof
WO2001095361A2 (fr) * 2000-06-08 2001-12-13 3M Innovative Properties Company Procede de production d'une nervure pour un substrat d'ecran a plasma

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023130A (en) * 1995-09-06 2000-02-08 Kyocera Corporation Plasma display substrate and a production method thereof
WO2001095361A2 (fr) * 2000-06-08 2001-12-13 3M Innovative Properties Company Procede de production d'une nervure pour un substrat d'ecran a plasma

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7708926B2 (en) 2002-07-11 2010-05-04 Molecular Imprints, Inc. Capillary imprinting technique
US7670543B2 (en) 2004-08-26 2010-03-02 3M Innovative Properties Company Method of forming microstructures with a template
US7478791B2 (en) 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
WO2007067469A2 (fr) 2005-12-08 2007-06-14 Molecular Imprints, Inc. Procédé permettant d'expulser un gaz positionné entre un substrat et un moule
EP1958025A2 (fr) * 2005-12-08 2008-08-20 Molecular Imprints, Inc. Procédé permettant d'expulser un gaz positionné entre un substrat et un moule
EP1958025A4 (fr) * 2005-12-08 2009-10-21 Molecular Imprints Inc Procédé permettant d'expulser un gaz positionné entre un substrat et un moule
US10670962B2 (en) 2017-02-20 2020-06-02 Samsung Electronics Co., Ltd. Photosensitive compositions, preparation methods thereof, and quantum dot polymer composite pattern produced therefrom

Also Published As

Publication number Publication date
JP2005068181A (ja) 2005-03-17
WO2005019934A3 (fr) 2005-06-02
EP1656589A2 (fr) 2006-05-17
KR20060118406A (ko) 2006-11-23
TW200513794A (en) 2005-04-16
CN1839352A (zh) 2006-09-27
CA2536520A1 (fr) 2005-03-03
JP2007503604A (ja) 2007-02-22

Similar Documents

Publication Publication Date Title
US20090008529A1 (en) Flexible Mold and Methods
US6802754B2 (en) Method for precise molding and alignment of structures on a substrate using a stretchable mold
US7033534B2 (en) Method for forming microstructures on a substrate using a mold
US20100129611A1 (en) Flexible mold, production method thereof and production method of fine structures
JP2005193473A (ja) 転写用成形型及びその製造方法ならびに微細構造体の製造方法
US7288013B2 (en) Method of forming microstructures on a substrate and a microstructured assembly used for same
US20060235107A1 (en) Method of reusing flexible mold and microstructure precursor composition
JP2008536716A (ja) 硬化した重合可能な樹脂組成物を含む可撓性成形型
EP1656589A2 (fr) Pate precurseur et procede d'elaboration
WO2004062870A1 (fr) Moule flexible, son procede de fabrication et procede de fabrication de structures fines
US20060043637A1 (en) Methods of forming barrier rib microstructures with a mold
US20060131784A1 (en) Flexible mold, method of manufacturing same and method of manufacturing fine structures
KR20060111506A (ko) 화상 표시 패널용 기판의 제조 방법
KR20070055506A (ko) 롤러 상에 제공되는 분리형 몰드로 미세 구조물을 형성하는방법
US20070071948A1 (en) Method of making barrier partitions and articles
JP2004160843A (ja) 可とう性成形型及びその製造方法ならびに微細構造体の製造方法
JP5324553B2 (ja) 可とう性成形型
KR20070017144A (ko) 가요성 금형 및 방법
JP2018150443A (ja) 活性エネルギー線硬化性組成物
KR20070057854A (ko) 몰드로 격벽 미세 구조물을 형성하는 방법

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200480024065.4

Country of ref document: CN

AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2004781405

Country of ref document: EP

ENP Entry into the national phase in:

Ref document number: 2536520

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 1020067003498

Country of ref document: KR

Ref document number: 2006523987

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 2004781405

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1020067003498

Country of ref document: KR