WO2004106739A1 - Pompe a piston a vide - Google Patents

Pompe a piston a vide Download PDF

Info

Publication number
WO2004106739A1
WO2004106739A1 PCT/EP2004/005651 EP2004005651W WO2004106739A1 WO 2004106739 A1 WO2004106739 A1 WO 2004106739A1 EP 2004005651 W EP2004005651 W EP 2004005651W WO 2004106739 A1 WO2004106739 A1 WO 2004106739A1
Authority
WO
WIPO (PCT)
Prior art keywords
compression stage
piston
compression
cylinder
gas
Prior art date
Application number
PCT/EP2004/005651
Other languages
German (de)
English (en)
Inventor
Peter Langer
Rainer Hölzer
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2004106739A1 publication Critical patent/WO2004106739A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type

Definitions

  • the invention relates to a vacuum piston pump with a single lifting body, which has a piston at each of its two longitudinal ends, each of which oscillates in a cylinder and forms a first and a second compression stage with this cylinder.
  • Such a vacuum piston pump is known from DE-A-101 49 506 and WO 00/63556.
  • the two compression stages are connected in series by a gas connecting line for multi-stage compression.
  • the displacement of the two compression stages is the same, so that the first is particularly high at high inlet pressures Compression stage in the second compression stage, a significant over-compression is generated, which requires a relatively high drive power.
  • the object of the invention is to provide a vacuum piston pump which manages with a relatively low drive power.
  • vacuum pump is the greater of the piston and the cylinder 'of the first compression stage defined swept volume than that of the second compression stage. 'In this way, the pumping speed of the two compression stages is adapted to one another that in the second compression stage a substantial over-compression is avoided. As a result, less drive power is required for gas compression in the second compression stage.
  • the displacement difference between the first and the second compression stage is preferably realized in that the diameter of the circular piston and the circular cylinder of the first compression stage is larger than the diameter of the cylinder and the piston of the second compression stage.
  • a single lifting body which has pistons with a different cross-section and thus pistons with different lifting volumes, can be realized at its two longitudinal ends.
  • the area between the two pistons is a transition area which is not used for the longitudinal guidance of the lifting body and in which a radial step with a radial step height of approximately half the difference in the diameter of the two pistons is provided.
  • the piston of the second compression stage is smaller.
  • the sealing of the piston with respect to the cylinder is considerably improved, since the circumference of the gap between the piston and the cylinder is also reduced as the piston diameter is reduced.
  • the backflow losses particularly in the case of dry-running piston pumps, are considerably reduced.
  • the gas connecting line between the first compression stage and the second compression stage is arranged exclusively in the lifting body.
  • the shortest possible route is realized for the connecting line between the two compression stages.
  • the connecting line is preferably arranged between an outlet valve of the first compression stage and an inlet valve of the second compression stage, the outlet valve and the inlet valve being arranged on the respective piston end wall.
  • the gas from the first Compression stage thus reaches the shortest route through the outlet valve in the piston end wall into the connecting line in the lifting body and from there through the inlet valve on the piston end wall of the opposite piston into the compression chamber of the second compression stage.
  • the lifting body has a gas intermediate store in the course of the connecting line, the volume of which is greater than the displacement of the second compression stage.
  • the pressure acting on the outlet valve of the first compression stage and the pressure on the inlet valve of the second compression stage is kept more constant during the entire working cycle of the lifting body than would be the case with a small-volume connection between the two compression stages.
  • the pumping speed of the piston pump is improved and a lower pressure can be achieved on the suction side of the piston pump.
  • a strong negative pressure in the compression space of the second stage can thereby be avoided during the entire suction stroke of the second compression stage. This in turn significantly reduces the drive power required for the suction stroke.
  • the gas inlet of the first compression stage is formed by an inlet valve in the piston end wall.
  • the inlet valve is designed as a check valve.
  • gas can flow into the compression chamber through a piston pump inlet already during the beginning suction stroke of the piston of the first compression stage.
  • the gas overflows Corresponding openings in the cylinder and in the piston wall through a closed cylinder interior and finally through the inlet valve in the piston end wall of the first compression stage into the compression chamber during the start of the suction stroke of the piston of the first compression stage.
  • Fig. 1 shows a piston vacuum pump according to the invention with a conventional piston pump gas inlet
  • Fig. 2 shows a second embodiment of a piston vacuum pump according to the invention, in which a gas inlet for the first compression stage is provided in the piston end wall.
  • FIGS. 1 and 2 each show an embodiment of a vacuum piston pump 10, 110, each of which has a first compression stage 11 and a second compression stage 12 arranged in series behind it.
  • the piston pumps 10, 110 each have a single lifting body 14, 114, which has a piston 16, 116, 18 on each of its two longitudinal ends.
  • the pistons 16, 116, 18 and the cylinders 20, 22 are each circular in cross section. Every piston 16,116,18 each oscillates in a cylinder 20,22.
  • the pistons 16, 116, 18 form together with the cylinders 20, 22 assigned to them .
  • the lifting body 14,114 oscillates in the longitudinal direction, whereby the piston 16,116,18 respectively in the longitudinal direction into the associated cylinders 20 oscillate '22nd
  • the lifting body 14, 114 is driven contactlessly by an electromagnetic linear drive, which is not shown.
  • the piston pumps 10, 110 are operated dry, ie without lubricant. In order to make this possible, appropriate materials are selected for the sliding surfaces of the pistons 16, 116, 18 and the cylinders 20, 22.
  • a compression space 24, 26 of different sizes is formed by the piston 16, 116, 18 and the associated cylinder 20, 22.
  • the compression space 24 of the first low-pressure side compression stage 11 is larger than the compression space 26 of the second high-pressure side compression stage 12.
  • the piston and cylinder diameter of the first compression stage 11 is approximately 40 mm, while the diameter of the piston 18 and the cylinder 22 of the second compression stage 12 is approximately 18 mm. While the two pistons 16, 116, 18 are each guided in the associated cylinders 20, 22, the central region of the lifting body 14 is arranged without guidance in a correspondingly enlarged cavity 23.
  • the gas to be pumped out of a recipient passes via a piston pump gas inlet 28 and a cylinder wall inlet valve 30 directly into the compression space 24 of the first compression stage 11 when the piston 16, 116 is in its suction end position or its initial compression position and releases the cylinder wall intake valve 30.
  • the cylinder wall inlet valve 30 is designed as a circumferential annular narrow groove in the cylinder wall.
  • the gas compressed in the compression chamber 24 of the first compression stage 11 passes through an outlet valve 32 into an interior space in the lifting body 14, which extends approximately over the entire length of the lifting body 14.
  • the interior is not designed as a small-volume line, but rather as a large-volume gas buffer store 34, which, however, also forms the connecting line between the first compression stage 11 and the second compression stage 12.
  • the volume of the gas buffer store 34, 34 ', 35 is larger than the compression space 26 of the second compression stage 12.
  • the pressure-controlled outlet valve 32, 132 of the first compression stage 11 is formed by openings 40, 140 in the end wall 42, 142, and a stiffly biased inside the end wall 42, 142 Valve pressure plate 44.144, a compression spring 46.146 and an opening pin 48.148.
  • the opening pin 48, 148 abuts against the cylinder end wall 50, whereby the exhaust valve 32, 132 is opened and the compressed gas from the compression space 24 into the gas buffer store 34, 34 ', 35 in the lifting body 14, 114 flows.
  • the forced opening also ensures opening in the final pressure mode.
  • the outlet valve of the first compression stage 11 can also be positively controlled.
  • an inlet valve 54 is arranged, through which the Gas can flow from the gas buffer store 34, 34 ', 35 into the compression space 26 of the second compression stage 12.
  • the inlet valve 54 is designed as a pressure-controlled spring tongue valve and opens or remains open as long as the pressure in the gas intermediate store is slightly above the pressure in the compression chamber 26 of the second compression stage 12. This is the case in particular during the suction stroke of the piston 18 of the second compression stage 12.
  • the inlet valve can also be designed as an inertia-controlled valve lobe valve.
  • the end wall of the cylinder 22 or the compression space 26 of the second compression stage 12 is formed by a valve plate 60 of an outlet valve 62, which is biased in the closed position by a compression spring 64.
  • the outlet valve 62 is designed as a check valve and opens as soon as the pressure in the compression space 26 of the second compression stage 12 is slightly above the atmospheric pressure which is present at the rear of the valve plate 60. The gas finally flows out of the piston pump through the opened outlet valve 62 through a lateral piston pump gas outlet 80 at approximately atmospheric pressure.
  • the vacuum piston pump 110 of FIG. 2 also has an additional inlet valve 70, which opens during the initial phase of the suction stroke of the piston 116 of the first compression stage 11 in question and allows gas to flow from the gas inlet 28 into the compression chamber 24.
  • an additional inlet valve 70 is designed as a check valve and is formed by an elastic valve plate 78.
  • the additional inlet valve 70 opens during the suction stroke as soon as the gas pressure in the compression space 24 is slightly below the gas pressure in the inlet space 76.
  • the opening of the inlet valve 70 is triggered by the pressure difference, but can also be triggered by inertia forces in another embodiment. As a result, an extreme negative pressure in the compression space 24 is avoided during the suction stroke of the first compression stage, so that the drive power required for the suction stroke is relatively small.
  • the suction pressure at the piston pump gas inlet 28 is in the so-called final pressure mode, i.e. when the target pressures are reached, below 10 mbar.
  • the pressure in the gas intermediate store 34, 34 ', 35 is between 10 and 100 mbar in the final pressure mode.
  • the pressure in the compression chamber 26 of the second compression stage 12 and in the piston pump gas outlet 80 is approximately 30 mbar above atmospheric pressure.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à piston à vide (10) comprenant un seul corps de levage (14) présentant respectivement à ses deux extrémités longitudinales un piston (16,18) qui oscille respectivement dans un vérin (20,22) et forme respectivement avec ce vérin (20,22) un premier et un deuxième étage de compression (11,12). Les deux étages de compression (11,12) sont reliés par un conduit de raccordement de gaz, le premier étage de compression (11) est monté en amont du deuxième étage de compression (12). La chambre de compression (24) formée par le piston (16) et le vérin (20) du premier étage de compression (11) est plus grande que la chambre de compression (26) du deuxième étage de compression (12), cette chambre étant formée par le piston (18) et le vérin (22) du deuxième étage de compression (12). Ainsi la surcompression dans le deuxième étage de compression diminue au début de la mise sous vide d'un récipient. De plus, la section transversale de la fente entre le piston (18) et le cylindre (22) du deuxième étage de compression est réduite, ce qui améliore l'action de pompage du deuxième étage de compression.
PCT/EP2004/005651 2003-05-30 2004-05-26 Pompe a piston a vide WO2004106739A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10324597 2003-05-30
DE10324597.9 2003-05-30

Publications (1)

Publication Number Publication Date
WO2004106739A1 true WO2004106739A1 (fr) 2004-12-09

Family

ID=33482312

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/005651 WO2004106739A1 (fr) 2003-05-30 2004-05-26 Pompe a piston a vide

Country Status (1)

Country Link
WO (1) WO2004106739A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009049242A1 (de) * 2009-10-12 2011-04-21 Schaeffler Technologies Gmbh & Co. Kg Hydraulische Pumpeinrichtung
CN102654093A (zh) * 2011-02-28 2012-09-05 德尔福技术控股有限公司 泵压头
CN103256201A (zh) * 2013-04-09 2013-08-21 北京康斯特仪表科技股份有限公司 同轴同向运动气体增压机构及气体增压方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE528725A (fr) *
US1636614A (en) * 1927-07-19 Piston assembly
US3190545A (en) * 1961-07-05 1965-06-22 Basf Ag Piston seal for a multistage high pressure gas compressor
DE29917072U1 (de) * 1999-09-28 2000-01-13 G.E.M.A. Maschinenhandel GmbH, 45966 Gladbeck Vorrichtung zum Füllen von Druckluftkartuschen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE528725A (fr) *
US1636614A (en) * 1927-07-19 Piston assembly
US3190545A (en) * 1961-07-05 1965-06-22 Basf Ag Piston seal for a multistage high pressure gas compressor
DE29917072U1 (de) * 1999-09-28 2000-01-13 G.E.M.A. Maschinenhandel GmbH, 45966 Gladbeck Vorrichtung zum Füllen von Druckluftkartuschen

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009049242A1 (de) * 2009-10-12 2011-04-21 Schaeffler Technologies Gmbh & Co. Kg Hydraulische Pumpeinrichtung
CN102654093A (zh) * 2011-02-28 2012-09-05 德尔福技术控股有限公司 泵压头
CN103256201A (zh) * 2013-04-09 2013-08-21 北京康斯特仪表科技股份有限公司 同轴同向运动气体增压机构及气体增压方法
CN103256201B (zh) * 2013-04-09 2016-04-27 北京康斯特仪表科技股份有限公司 同轴同向运动气体增压机构及气体增压方法

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