WO2004083285A1 - Matiere composite - Google Patents

Matiere composite Download PDF

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Publication number
WO2004083285A1
WO2004083285A1 PCT/GB2004/001222 GB2004001222W WO2004083285A1 WO 2004083285 A1 WO2004083285 A1 WO 2004083285A1 GB 2004001222 W GB2004001222 W GB 2004001222W WO 2004083285 A1 WO2004083285 A1 WO 2004083285A1
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WO
WIPO (PCT)
Prior art keywords
component
fibrous material
composite material
fibrous
less
Prior art date
Application number
PCT/GB2004/001222
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English (en)
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WO2004083285A8 (fr
Inventor
Kenneth Malcolm Seargent
Original Assignee
Victrex Manufacturing Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victrex Manufacturing Limited filed Critical Victrex Manufacturing Limited
Publication of WO2004083285A1 publication Critical patent/WO2004083285A1/fr
Priority to US10/978,821 priority Critical patent/US20050100724A1/en
Publication of WO2004083285A8 publication Critical patent/WO2004083285A8/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor

Definitions

  • This invention relates to a composite material and particularly, although not • exclusively, relates to a composite material for use in an abrasive environment, for example during the manufacture of an electronic part.
  • One preferred embodiment relates to the use of a composite material in the manufacture of a retaining ring used to mount a substrate which is subjected to chemical mechanical polishing (CMP) .
  • CMP chemical mechanical polishing
  • CMP is used in the semi-conductor industry for planarizing wafers.
  • a wafer carrier assembly is in contact with a polishing pad mounted on a CMP apparatus.
  • the wafers are typically mounted on a carrier or polishing head which provides a controllable pressure urging the wafers against the rotating polishing pad.
  • the pad has a relative movement with respect to the wafer driven by an external driving force.
  • the CMP apparatus effects polishing or rubbing movement between the surface of each thin semiconductor wafer and the polishing pad whilst dispersing a polishing slurry containing abrasive particles in a reactive solution to effect both chemical activity and mechanical activity while applying a pressure between the wafer and the polishing pad.
  • US 6468136 Bl (Applied Materials, Inc) describes a method of CMP on a substrate surface which involves mounting the substrate in a carrier comprising a retaining ring having a mechanical hardness greater than 85 durometer and then subjecting the surface to CMP using a polishing pad having a hardness of less than about 60 durometer.
  • the document advocates use of retaining rings comprising a polymer reinforced with carbon fibres. Whilst fibre reinforced polymers having relatively high hardness may be made and are well known, disadvantageously, in some situations, any wear- of retaining rings made from such fibre reinforced polymers may be problematic. In particular, carbon and carbon fibres are electrically conductive and even small levels may detrimentally contaminate semi-conductor wafers that may be polished in CMP.
  • carbon/carbon fibres may be abrasive and therefore scratch the wafer surface.
  • wear rates of carbon or carbon fibre-based materials may be relatively low, even a relatively small level of wear may necessitate replacement of a retaining ring made out of the composite material and loss of some production.
  • a method of manufacturing a first component which is arranged to be subjected to an abrasive force in use when incorporated into a device comprising forming the first component from a composite material which comprises a matrix material and a first fibrous material, other than carbon fibre.
  • Said first component may be arranged to be contacted in use by a second component wherein said first and second components are movable relative to one another so that a frictional force acts between the first and second components .
  • Said first and second components are preferably made of different materials.
  • Said first component may be arranged to be contacted in use by a second component which comprises an abrasive fluid or a solid which would tend to abrade the first component when contacting it.
  • An abrasive fluid will be more abrasive than air. It may be arranged to move relative to the first component at a velocity of at least 0.1 m/s, suitably at least 1 m/s, preferably at least 5 m/s, especially at least 10 m/s. In some cases, the velocity may be greater than 100 m/s or even 200 m/s.
  • a said abrasive fluid may have a temperature of greater than 30°C, preferably greater than 100°C, more preferably greater than 200°C.
  • a said abrasive fluid may comprise a gas or a liquid.
  • a said abrasive fluid may include solid particles which may be abrasive in use.
  • a said abrasive fluid may comprise a fluid jet.
  • a said abrasive fluid may be at a pressure of greater than ambient pressure, for example of at least 10 atmospheres.
  • Said abrasive fluid may comprise a plasma jet.
  • the solid may be made of any other type of material.
  • it could be a metal or a plastics material .
  • said first component may comprise said composite material and said second component may comprise a different composite material or may comprise a said matrix material as described herein in the absence of a said fibrous material.
  • a fluid may contact the first and second components.
  • the fluid may be a lubricant or a chemical polishing fluid. Alternatively, in some cases, no fluid may be used.
  • said first component is such that, in use, when subjected to a . said abrasive force, it is also subjected to a temperature above ambient temperature.
  • the temperature it is subjected to may be greater than 30°C, preferably greater than 50°C, preferably greater than 100°C or even greater than 150°C.
  • a first component as described may be used in close association with electronic parts.
  • the composite material when abraded, may be substantially non-electrically conductive (unlike composite materials which include a substantial amount of carbon fibre) so the abraded material may have little detrimental effect on the electronic part.
  • said method is a method of manufacturing a first component for use in the manufacture of an electronic part, for example in the manufacture of integrated circuits and/or semiconductor devices such as semi-conductor wafers.
  • said first component may be used in and/or during the treatment of a substrate, for example in an abrasive treatment thereof, such as chemical mechanical polishing (CMP) .
  • said first component may comprise a retaining means, for example a retaining ring, for retaining a substrate to be subjected to the treatment
  • the second component may be a treatment means, for example a polishing means, arranged to contact the substrate to treat it.
  • composite materials which include carbon fibre may be disadvantageous in, for example, CMP applications.
  • said composite material includes less than 20 wt%, preferably less than 10 wt%, more preferably less than 5 wt%, especially less than 1 wt% of carbon fibres.
  • said composite material includes no carbon fibres .
  • Said composite material preferably includes less than 20 wt%, preferably less than 10 wt%, more preferably less than 5 wt%, especially less than 1 wt% of fibrous material (preferably of any material) having a resistivity of greater than 10 6 ohms per sq., preferably greater than 10 12 ohms per sq.
  • said composite material includes no fibrous material (and preferably no component at all) having a resistivity of less than 10 6 ohms per sq.
  • Said matrix material preferably comprises an engineering resin, for example a tough semi-crystalline resin. Examples are provided in Figure 1 hereinafter.
  • Said matrix material preferably comprises a polyether, especially an aromatic polyether, for example an aromatic polyetherketone or polyethersulphone .
  • Preferred polyethers are those shown in Figure 1.
  • Said matrix material may include a polyarylene sulphide.
  • Said matrix material preferably comprises a polyaryletherketone or sulphone.
  • Said matrix material preferably comprises a polyaryletherketone, with polyetherketone, polyetheretherketone and polyetherketoneketone being preferred and polyetherketone and polyetheretherketone being especially preferred.
  • Polyetheretherketone is the most preferred matrix material.
  • Said matrix material may comprise a mixture of polyetheretherketone and polyarylene sulphide.
  • said matrix material consists essentially of polyetheretherketone.
  • at least 50 wt%, preferably, at least 80 wt%, more preferably at least 90 wt%, especially 100 wt% of said matrix material is made up of a single type of engineering resin.
  • Said first fibrous material is preferably discontinuous.
  • Said first fibrous material preferably has a resistivity of greater than 10 6 ohms per sq.
  • Said first fibrous material may be independently selected from glasses, synthetic organic polymers (not including carbon fibre), inorganic fibrous materials and ceramics.
  • glasses examples include silicic acid and other very fine glass fibre products.
  • Examples of synthetic organic polymers include polyaramids .
  • inorganic materials include metal oxides, for example alumina.
  • said first fibrous material is independently selected from inorganic fibrous materials and ceramics.
  • a preferred first fibrous material comprises metal oxide fibres such as alumina fibres.
  • Said first fibrous material is preferably a substantially non-fibrillated fibre.
  • Said first fibrous material suitably comprises some fibres having diameters in the range 3 to 10 ⁇ , suitably preferably in the range 3 to 6 ⁇ m.
  • said first fibrous material includes less than 10%, preferably less than 5%, especially less than 1% of fibres having a diameter of less than I m.
  • greater than 50%, preferably greater than 75%, more preferably greater than 90% of the fibres in said first fibrous . material have a diameter in the range 3 to 10//m, especially in the range 3 to 6 ⁇ m.
  • first fibrous material which comprises fine diameter material facilitates the preparation of a first component having ceramic properties.
  • Said composite material may include at least 20 wt%, suitably at least 25 wt%, preferably at least 30 wt%, more preferably at least 35 wt%, especially at least 40 wt% of said matrix material.
  • the amount of said matrix material may be 80 wt% or less, preferably 70 wt% or less, more preferably 65 wt% or less, especially 60 wt% or less.
  • Said . composite material may include at least 15 wt%, suitably at least 25 wt%, preferably at least 30 wt%, more preferably at least 35 wt%, especially at least 40 wt% of said first fibrous material.
  • the amount of said first fibrous material may be 80 wt% or less, preferably 70 wt% or less, more preferably 60 wt% or less, especially 50 wt% or less.
  • the ratio of wt% of said matrix material to the wt% of said first fibrous material is suitably in the range 0.3 to 3, preferably in the range 1 to 2, more preferably 0.6 to 1.5.
  • said composite material may comprise a said matrix material, a said first fibrous material and a first additive.
  • Said composite material may include 0 to 10 wt% of said first additive.
  • the wt% of said first additive in said composite material may be 0 to 20 wt%, preferably 0 to 15 wt%, especially 0 to 10 wt%, of the weight of said matrix material in said composite material.
  • Said first additive may be particulate. It may be organic. It is preferably a lubricant, for example a solid lubricant. It may be a fluoropolymer, such as PTFE or silicone.
  • said composite material may comprise a said matrix material, a said first fibrous material and a said second fibrous material.
  • said second fibrous material is other than carbon fibre.
  • said second fibrous material may be chemically the same as said first fibrous material (but may be in a different physical form) , it is preferably a chemically different material.
  • said second fibrous material is physically different from said first fibrous material.
  • Said second fibrous material is preferably fibrillated.
  • Said second fibrous material is preferably a pulp.
  • Said second fibrous material is preferably a para aramid.
  • Said composite material may include less than 55 wt%, suitably less than 25wt%, preferably less than 15 wt%, more preferably less than 10 wt%, especially less than 6 wt% of said second fibrous material.
  • the composite material includes at least 0.5 wt%, preferably at least 1 wt%, more preferably at least 2 wt%, especially at least 3 wt% of said second fibrous material.
  • the ratio of the wt% of said second fibrous material to said first fibrous material in said composite is suitably in the range 0 to 1, is preferably in the range 0.005 to 0.7, is more preferably in the range 0.01 to 0.5 and, especially, is in the range 0.03 to. 0.15.
  • Said second fibrous material preferably has a specific surface area of greater than 5m 2 /g, more preferably greater than 7m 2 /g, especially greater than 8m 2 /g.
  • the specific surface area of the second fibrous material may be in the range 5-14 m 2 /g, preferably 7-12m 2 /g.
  • the sum of the wt% of all fibrous materials (including said first and second fibrous materials and any further fibrous materials) in said composite may be at least 15 wt%, suitably at least 25 wt%, preferably at least 30 wt%, more preferably at least 35 wt%, especially at least 40 wt% .
  • the sum of the wt% may be 80 wt% or less, preferably 70 wt% or less, more preferably 60 wt% or less.
  • the ratio of the wt% of said matrix material to the sum of the wt% of all fibrous materials in said composite is suitably in the range 0.3 to 6, preferably 0.3 to 3, more preferably, 0.6 to 1.5.
  • said first component is formed from said composite material by injection moulding or extrusion.
  • injection moulder or extruder barrel temperatures of at least 100°C, preferably at least 200°C, more preferably at least 300°C . and especially at least 350°C.
  • composite materials described (especially ones comprising 55 to 65 wt% of matrix material, e.g. polyetheretherketone; and 35 to 45 wt% of a said first fibrous material, e.g. an inorganic discontinuous fine diameter material such as one comprising metal oxide, e.g. alumina, fibres) can be machined into desired shapes for example to define nozzles or other structures having openings and or which have complex shapes which cannot easily be made by injection moulding or extrusion alone.
  • the method may include machining a precursor of said first component to manufacture said first component.
  • a method of manufacturing said composite material of said first aspect may comprise:
  • each fibrous material e.g. said first fibrous material and said second (and any other) fibrous material (s) when provided
  • each fibrous material are contacted with said matrix material in said liquid medium.
  • said liquid medium may be at a temperature of less than 0°C when said matrix material and fibrous material (s) are initially contacted with the liquid medium.
  • said liquid medium is at a temperature of greater than 0°C.
  • the temperature may be greater than 5°C, preferably greater than 10°C, more preferably greater than 15°C, especially 20°C or greater.
  • the temperature could be greater than 100°C, preferably less than 80°C, more preferably less than 50°C, especially less than 30°C.
  • said liquid medium may be at ambient temperature when said matrix material and fibrous material (s) are initially contacted with liquid medium.
  • the liquid medium is at ambient pressure when said matrix material and fibrous material (s) are initially contacted therewith and, preferably, at all times prior to removal of said liquid medium.
  • the method suitably involves mixing the matrix material and fibrous material (s) in said liquid medium.
  • Any suitable mixing means may be used. It is preferred to use a mechanical mixing means, for example a paddle mixer.
  • the mixing means is selected to minimise forces on the fibrous material (s) which could size reduce the material detrimentally.
  • the mixture may be maintained at a temperature in the range 10°C to 50°C, suitably at ambient temperature. Suitably, it is not necessary to apply heat to the mixture during its mixing.
  • a slurry of said matrix material and said fibrous material (s) in said liquid medium is produced.
  • both the matrix material and fibrous material (s) are substantially insoluble in said liquid medium.
  • said matrix material and fibrous material (s) are substantially homogenously dispersed in said slurry.
  • the amount of said liquid medium in said mixture may be selected so that the matrix material and fibrous material (s) can be intimately mixed in the method, suitably so that the matrix and fibrous material (s) are substantially uniformly dispersed throughout the liquid medium.
  • the ratio of the weight of liquid medium to the weight of fibrous material (s) may be at least 5, suitably 10 or more.
  • Such relatively low ratios may be sufficient for fibrous material (s) having relatively short lengths to be dispersed.
  • the fibrous material (s) comprise (s) relatively long fibres
  • the ratio may be higher - it may be 50, 100 or 150 or more.
  • the ratio is less than 500, more preferably less than 250, especially less than 200.
  • the filler material (s) is/are separated, as far as possible, so that there are individual elements of said fibrous material (s) in said mixture - that is, the mixture formed is preferably substantially homogenous .
  • the mixture of matrix material and fibrous material (s) is contacted with a support and liquid medium removed from the mixture.
  • the support supports the forming composite material as liquid medium is removed therefrom.
  • the support includes openings therein via which said liquid medium may be removed, for example by said liquid medium passing from one side to an opposite side of said support.
  • Said support is preferably perforate. It is preferably part of a sieve means.
  • liquid medium is allowed to drain away from the forming composite material suitably under the action of gravity. Removal of liquid medium may be vacuum assisted.
  • a layer of composite material is formed on said support. In some situations, a further layer may be formed over said layer, for example by contacting said layer with more of said matrix material and fibrous material (s) in said liquid medium.
  • the method includes a drying stage.
  • the formed composite material is dried. This may be effected by application of heat, suitably at a temperature which is greater than the boiling point of said liquid medium. Said temperature is preferably less than 300°C and, more preferably, is less than 200°C.
  • said formed composite material is dried in an oven.
  • the method may include a step of increasing the density of the formed composite material after at least some of said liquid medium has been removed from said mass. This may be achieved by use of a press or other compaction means. Said step of increasing the density may be carried out before or after said drying stage.
  • continuous sheets of the composite material may be formed, suitably using pressure to increase the density of the composite material.
  • Parts having desired shapes may be stamped out of or otherwise formed from- the sheets.
  • Said composite material may be divided up into smaller parts for example having a maximum dimension of less than 5cm, preferably less than 3.5cm, more preferably less than 2cm.
  • Said smaller parts are preferably of a size such that they can feed processing apparatus, for example an injection moulder or extruder which may be used to produce said first component from the composite material.
  • the parts may have a maximum dimension of greater than 0.5mm, preferably greater than 1mm.
  • Said liquid medium used in the method is preferably unreactive to the matrix material and fibrous material (s) under the conditions of the method.
  • Said liquid medium preferably has a boiling point of less than 200°C, preferably less than 150°C. The boiling point may be at least 50°C, preferably at least 80°C.
  • Said liquid medium could include one or more co-solvents it preferably does not.
  • said liquid medium consists essentially of water.
  • Said first component may have any feature of the first component described in said first aspect.
  • Said first component preferably does not have a dog-bone shape.
  • Said first component preferably does not consist of a rectangular cross-section elongate member having a cross-section of 13 to 14mm in a first direction and 3 to 3.5mm in a second direction perpendicular to the first direction, capped at both ends by respective bulbous end pieces .
  • Said first component may include an opening which may have a diameter of less than 0.5m, preferably less than 0.1m, especially less than 0.05m.
  • the diameter may be at least 0.1mm, preferably at least 0.5mm, especially at least 1mm.
  • Said first component may be selected from a bearing, a nozzle, a ring, a washer (e.g. a thrust washer), and any part of any of the aforesaid.
  • said first component may include a composite material comprising 50 to 70 wt% (more preferably 55 to 65 wt%, especially 58 to 62 wt%) , of matrix material (e.g. a polyether such as polyetheretherketone or other preferred matrix materials as described herein) and 30 to 50 wt% (more preferably 35 to 45 wt%, especially 38 to 42 wt%) of a said first fibrous material (e.g. an inorganic discontinuous fine diameter material such as one comprising a metal oxide, e.g. alumina fibres).
  • matrix material e.g. a polyether such as polyetheretherketone or other preferred matrix materials as described herein
  • a said first fibrous material e.g. an inorganic discontinuous fine diameter material such as one comprising a metal oxide, e.g. alumina fibres.
  • Said first component may be used in CMP and, in this case, suitably comprises a retaining means, for example a retaining ring, for retaining a substrate to be subjected to CMP in position.
  • a first component preferably comprises a composite material which includes 20-80 wt% of a matrix material which comprises and preferably consists essentially of polyetheretherketone and 20-80 wt% of fibrous materials including a said first fibrous material which is suitably selected from inorganic fibrous materials and ceramics.
  • Said composite preferably includes a second fibrous material which is fibrillated.
  • an assembly comprising a first component as described according to said first or said second aspects incorporated into a device.
  • said first component is preferably arranged to be subjected to an abrasive force in use.
  • said first component may be arranged to be contacted in use by a second component which comprises an abrasive fluid or a solid as described according to said first aspect.
  • Said device is preferably for use during the manufacture of electronic parts for example in CMP.
  • an electronic part manufacturing process the process using a first component and/or a device according to the first, second and/or third aspects .
  • the process involves retaining a substrate, for example a . afer, in position using a first component as described herein.
  • a method of polishing a substrate for example in CMP, which involves using a retaining means comprising a composite material as described herein to retain the substrate in position and polishing the substrate.
  • a polishing means used to polish the substrate may also contact said composite material .
  • Composite materials comprising a first relatively non- fibrillated fibrous material and a second relatively fibrillated material have been found to be unexpectedly advantageous. Accordingly, in a seventh aspect, the invention provides a composite material which comprises a first fibrous material, a second relatively fibrillated fibrous material and a matrix material.
  • Said first fibrous material may be any fibrous material, including but not limited to those described above.
  • Said first fibrous material could be carbon fibre.
  • Said first fibrous material is preferably non-fibrillated.
  • Said second fibrillated fibrous material could be any material available in fibrillated form.
  • Said second fibrous material is preferably a pulp.
  • Said matrix material may be any thermofusible material.
  • the matrix is available in particulate form so that it can be incorporated into a composite material using the slurry methodology described in the first aspect.
  • Said matrix material may be a metal, for example aluminium or an alloy thereof.
  • said matrix material is a high temperature engineering resin as described herein.
  • said composite material of the seventh aspect comprises a matrix of polyetheretherketone, a second fibrillated polyaramid and a first fibrous material which is preferably a ceramic and/or metal oxide fibrous material.
  • the wt% of the matrix material and first . and second fibrous materials of the seventh aspect may be as described in any aspect herein.
  • said composite material includes less than 15 wt%, more preferably less than 10 wt%, especially 6 wt% or less of said second fibrillated fibrous material.
  • Said composite material suitably includes at least 0.5 wt%, preferably at least 1 wt%, more preferably at least 2 wt%, especially at least 3 wt% of said second fibrillated fibrous material.
  • Said composite material suitably includes 20-80 wt% of said matrix material and 20-80 wt% of said first fibrous material .
  • a composite material comprising a matrix material as described herein and a first fibrous material as described herein, wherein said first fibrous material comprises fibres having diameters in the range 3 to 10 ⁇ m.
  • Said first fibrous material suitably comprises some fibres having diameters in the range 3 to 10 ⁇ m, preferably In the range 3 to 6 ⁇ m .
  • said first fibrous material includes less than 10%, preferably less than 5%, especially less than 1% of fibres having diameters of less than 1/iia.
  • greater than 50%, preferably greater than 75%, more preferably greater than 90% of the fibres in said first fibrous material have a diameter in the range 3 to 10 ⁇ m, especially in the range 3 to 6 ⁇ m.
  • a material in granular or a powderous form comprising, preferably consisting of, a composite material as described herein.
  • Said powder or granules suitably comprises particles having a maximum dimension of less than 10mm, preferably less than 7.5mm, more preferably less than 5mm, especially 3mm or less.
  • Said material preferably comprises granules. Each granule in said material preferably has a maximum dimension as aforesaid.
  • Said material may be a composite material comprising 50 to 70 wt% (more preferably 55 to 65 wt%, especially 58 to 62 wt%) , of matrix material (e.g. a polyether such as polyetheretherketone or other preferred matrix materials as described herein) and 30 to 50 wt% (more preferably 35 to 45 wt%, especially 38 to 42 wt%) of a said first fibrous material (e.g. an inorganic discontinuous fine diameter material such as one comprising a metal oxide, e.g. alumina fibres) .
  • matrix material e.g. a polyether such as polyetheretherketone or other preferred matrix materials as described herein
  • 30 to 50 wt% more preferably 35 to 45 wt%, especially 38 to 42 wt%
  • a said first fibrous material e.g. an inorganic discontinuous fine diameter material such as one comprising a metal oxide, e.g. alumina fibres
  • a package comprising a material
  • Saffil LA Trade Mark
  • Rf 85 material was used unless otherwise specified.
  • Saffil L (Trade Mark)- alumina fibre obtained from Saffil Ltd of Cheshire, England. This fibre is less well milled compared to Saffil LA and has a higher setting height (i.e. 340mm) .
  • Saffil HA Trade Mark
  • Saffil Ltd of Cheshire, England Saffil HA- a high alpha form of alumina fibre obtained from Saffil Ltd of Cheshire, England.
  • PEEKTM 450 G a standard melt viscosity granular grade of polyetheretherketone obtained from Victrex Pic of Thornton Cleveleys, U.K.
  • PEEKTM 150 G a low melt viscosity granular grade of polyetheretherketone obtained from Victrex Pic.
  • KEVLAR PULP - a para-Ara id pulp (i.e. poly- paraphenyleneterephthalamide) having a fibre cut length of 1.5mm + 0.4mm measured according to ASTM Method D3661 and a denier pre filament of 1.5 den + 0.2 measured according to D1907, obtained from DuPont .
  • TWARON PULP - a para-Aramid pulp (i.e. poly- parahenyleneterephthalamide) having a specific surface area (mean) of 12-15 m 2 /g; an arithmetic average fibre length of 0.5mm, obtained from Teijin Twaron bv.
  • Varying amounts of selected fibrous materials were mixed with water in a plastic bucket to form a slurry.
  • the amount of water used may be selected according to the nature of the fibrous material, for example in terms of its type and volume fraction. By way of example, making the material of Example 6 used about 10 litres of water for 800g of composite. For short fibres (e.g. of 200 microns or less) the wt% of water to fibres may be 10:1; for longer fibres (e.g. of 6mm or more), it may be 200:1 or more.
  • Polyetheretherketone powder was added to the fibrous material/water slurry under the action of a stirrer.
  • the mixture was sieved using a 200mm round sieve (200 ⁇ m mesh size) to allow the water to separate from the solid material and thereby form a pad (retained within the sieve) comprising fibrous material and polyetheretherketone.
  • the pad was dried in an oven at a temperature of about 150°C.
  • the dry material is in the form of a cake that crumbles easily into a flock-like material that can be fed directly into an injection moulder or extruder.
  • Flock-like materials prepared as described in Example 1 were -injection moulded into plaques. 1 inch (2.5cm) disks were cut from the plaques.
  • comparative example C3 relates to a PPS test sample which is the standard material used in CMP applications.
  • the 1 inch (2.5cm) disks prepared as described in Example 2 were tested using a CETR wear tester using a standard set of conditions. Two different slurries were used, the first being SSW-2000 Tungsten Fluid with 3% hydrogen peroxide and the second being S-12 Oxide slurry. For each disk, the wear rate was assessed in both milligrams abraded per hour (mg/hr) and in microns abraded per hour (micron/hr) . Results are provided in Tables 2 to 8 below. Results

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Abstract

L'invention a trait à une matière composite qui peut servir à fabriquer un premier élément pouvant, lors de son utilisation, être soumis à une force d'abrasion. La matière composite contient une matière de base, par exemple du polyaryléthercétone, une première matière fibreuse et, éventuellement, une seconde matière fibreuse. La matière composite peut servir à fabriquer un anneau de retenue utilisé pour monter un substrat soumis à un polissage mécanique chimique.
PCT/GB2004/001222 2002-05-02 2004-03-19 Matiere composite WO2004083285A1 (fr)

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US10/978,821 US20050100724A1 (en) 2002-05-02 2004-11-02 Composite material

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GB0306639A GB0306639D0 (en) 2003-03-22 2003-03-22 Composite material
GB0306639.6 2003-03-22

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WO2004083285A8 WO2004083285A8 (fr) 2004-11-25

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Citations (7)

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EP0204520A2 (fr) * 1985-05-29 1986-12-10 Sumitomo Chemical Company, Limited Composition de résine de polyéthercétone
WO1993017856A1 (fr) * 1992-03-05 1993-09-16 The Dow Chemical Company Materiaux composites polymeres a faible densite et renforces de fibres
EP1118432A2 (fr) * 2000-01-18 2001-07-25 Applied Materials, Inc. Tampon de polissage de substrat
US6468136B1 (en) * 2000-06-30 2002-10-22 Applied Materials, Inc. Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching
WO2003093354A1 (fr) * 2002-05-02 2003-11-13 Victrex Manufacturing Limited Procede de fabrication de materiau composite

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0034258A2 (fr) * 1980-01-22 1981-08-26 Teijin Limited Matériau de friction
DE3230441A1 (de) * 1982-08-16 1984-02-16 Borg-Warner Corp., 60604 Chicago, Ill. Werkstoff fuer trockenes, asbestfreies reibmaterial bzw. reibelemente
EP0204520A2 (fr) * 1985-05-29 1986-12-10 Sumitomo Chemical Company, Limited Composition de résine de polyéthercétone
WO1993017856A1 (fr) * 1992-03-05 1993-09-16 The Dow Chemical Company Materiaux composites polymeres a faible densite et renforces de fibres
EP1118432A2 (fr) * 2000-01-18 2001-07-25 Applied Materials, Inc. Tampon de polissage de substrat
US6468136B1 (en) * 2000-06-30 2002-10-22 Applied Materials, Inc. Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching
WO2003093354A1 (fr) * 2002-05-02 2003-11-13 Victrex Manufacturing Limited Procede de fabrication de materiau composite

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