WO2004082814A3 - Verfahren und vorrichtung zum benetzen eines substrats mit einer flüssigkeit - Google Patents

Verfahren und vorrichtung zum benetzen eines substrats mit einer flüssigkeit Download PDF

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Publication number
WO2004082814A3
WO2004082814A3 PCT/EP2004/002977 EP2004002977W WO2004082814A3 WO 2004082814 A3 WO2004082814 A3 WO 2004082814A3 EP 2004002977 W EP2004002977 W EP 2004002977W WO 2004082814 A3 WO2004082814 A3 WO 2004082814A3
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WO
WIPO (PCT)
Prior art keywords
wetting
substrate
liquid
wetted
protective layer
Prior art date
Application number
PCT/EP2004/002977
Other languages
English (en)
French (fr)
Other versions
WO2004082814A2 (de
Inventor
Gerhard Hartwich
Peter Frischmann
Herbert Wieder
Thomas Kratzmueller
Norbert Persike
Original Assignee
Friz Biochem Gmbh
Gerhard Hartwich
Peter Frischmann
Herbert Wieder
Thomas Kratzmueller
Norbert Persike
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Friz Biochem Gmbh, Gerhard Hartwich, Peter Frischmann, Herbert Wieder, Thomas Kratzmueller, Norbert Persike filed Critical Friz Biochem Gmbh
Priority to US10/550,475 priority Critical patent/US20060257630A1/en
Priority to JP2006500070A priority patent/JP2006521538A/ja
Priority to EP04722244A priority patent/EP1606671A2/de
Publication of WO2004082814A2 publication Critical patent/WO2004082814A2/de
Publication of WO2004082814A3 publication Critical patent/WO2004082814A3/de

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
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    • B01L3/0289—Apparatus for withdrawing or distributing predetermined quantities of fluid
    • B01L3/0293—Apparatus for withdrawing or distributing predetermined quantities of fluid for liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
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    • C40B—COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Molecular Biology (AREA)
  • Composite Materials (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Laminated Bodies (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Ein Verfahren zum Benetzen eines Substrats mit einer Flüssigkeit umfasst die Verfahrensschritte a) Bereitstellen eines Substrats mit einer zu benetzenden Oberfläche; b) Bereitstellen einer Benetzungsflüssigkeit; c) Aufbringen einer Schutzschicht auf das Substrat, die die zu benetzende Oberfläche von der Umgebung trennt; d) Strukturieren der Schutzschicht, um vorbestimmte Benetzungsgebiete auf der zu benetzenden Oberfläche des Substrats freizulegen; und e) Aufbringen der Benetzungsflüssigkeit auf die freigelegten Benetzungsge­biete mittels einer Benetzungsvorrichtung ohne direkten Kontakt zwischen der Benetzungsvorrichtung und der zu benetzenden Oberfläche des Sub­strats. Die Erfindung enthält auch ein solcher massenherstellbares Substrat.
PCT/EP2004/002977 2003-03-21 2004-03-22 Verfahren und vorrichtung zum benetzen eines substrats mit einer flüssigkeit WO2004082814A2 (de)

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US10/550,475 US20060257630A1 (en) 2003-03-21 2004-03-22 Method and device for wetting a substrate with a liquid
JP2006500070A JP2006521538A (ja) 2003-03-21 2004-03-22 基板を液体で湿潤する方法及び装置
EP04722244A EP1606671A2 (de) 2003-03-21 2004-03-22 Verfahren und vorrichtung zum benetzen eines substrats mit einer flüssigkeit

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DE10312628.7 2003-03-21
DE2003112628 DE10312628A1 (de) 2003-03-21 2003-03-21 Verfahren und Vorrichtung zum Benetzen eines Substrats mit einer Flüssigkeit

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007044664B4 (de) 2007-09-18 2012-01-05 Friz Biochem Gesellschaft Für Bioanalytik Mbh Verdrängungsassay zur Detektion von Nukleinsäureoligomer-Hybridisierungsereignissen
GB2455746B (en) * 2007-12-19 2011-03-09 Cambridge Display Tech Ltd Electronic devices and methods of making the same using solution processing techniques
DE102008048342B4 (de) * 2008-09-22 2013-01-24 Laser-Laboratorium Göttingen eV SERS-Substrat, Verfahren zu seiner Herstellung und Verfahren zum Detektieren eines Analyten mittels SERS
EP2319630A1 (de) * 2009-11-05 2011-05-11 Heidelberger Druckmaschinen AG Verfahren zum mehrfarbigen, permanenten Lackieren eines Produkts
US8974869B2 (en) * 2010-01-26 2015-03-10 Robert Hamilton Method for improving plating on non-conductive substrates
CN108212947A (zh) * 2017-12-27 2018-06-29 武汉金顿激光科技有限公司 激光清洗工艺
CN111940423B (zh) * 2020-08-07 2021-07-13 武汉金顿激光科技有限公司 一种飞机非导电复合涂层的原位激光清洗方法
CN115537800B (zh) * 2022-09-29 2024-09-27 江苏大学 一种金属表面多级超疏水结构的加工系统及其制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996029629A2 (en) * 1995-03-01 1996-09-26 President And Fellows Of Harvard College Microcontact printing on surfaces and derivative articles
JPH10123315A (ja) * 1996-10-24 1998-05-15 Canon Inc カラーフィルターの製造方法
US5807522A (en) * 1994-06-17 1998-09-15 The Board Of Trustees Of The Leland Stanford Junior University Methods for fabricating microarrays of biological samples
DE19754978A1 (de) * 1997-12-11 1999-07-01 Bruker Daltonik Gmbh Probenträger für die MALDI-Massenspektrometrie nebst Verfahren zur Herstellung der Platten und zum Aufbringen der Proben
EP1219980A2 (de) * 2000-12-21 2002-07-03 Seiko Epson Corporation Methode und Apparat zur Herstellung eines Farbfilters, eines Flüssigkristallgerätes und eines elektrolumineszierenden Gerätes, Methode und Apparat zur Entladung von Material
US6440645B1 (en) * 1997-07-18 2002-08-27 Cambridge Sensors Limited Production of microstructures for use in assays

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3505750A1 (de) * 1985-02-20 1986-08-21 Basf Ag, 6700 Ludwigshafen Campherdithiolen-komplexe und deren verwendung
DE4318663C1 (de) * 1993-06-04 1994-10-13 Siemens Solar Gmbh Verfahren zur Maskierung und Bearbeitung einer Oberfläche eines Substrates
US5554684A (en) * 1993-10-12 1996-09-10 Occidental Chemical Corporation Forming polyimide coating by screen printing
EP0937096B1 (de) * 1996-11-06 2004-02-04 Sequenom, Inc. Verfahren zur massenspektrometrie
US6048623A (en) * 1996-12-18 2000-04-11 Kimberly-Clark Worldwide, Inc. Method of contact printing on gold coated films
US6159754A (en) * 1998-05-07 2000-12-12 Intel Corporation Method of making a circuit edit interconnect structure through the backside of an integrated circuit die
US6576478B1 (en) * 1998-07-14 2003-06-10 Zyomyx, Inc. Microdevices for high-throughput screening of biomolecules
DE19952323A1 (de) * 1999-10-29 2001-05-03 Few Chemicals Gmbh Wolfen Schutzschicht mit antiadhäsiven Eigenschaften
CA2401118A1 (en) * 2000-02-23 2001-08-30 Zyomyx, Inc. Microfluidic devices and methods
EP1373561B1 (de) * 2000-06-13 2009-02-18 The Trustees of Boston University Verwendung von mass-matched nukleotide in der analyse von oligonukleotidmischungen sowie in der hoch-multiplexen nukleinsäuresequenzierung
US6780233B1 (en) * 2001-05-24 2004-08-24 Seagate Technology Llc Wettability improvement of spun-on resist and thermoplastic materials
US20050014151A1 (en) * 2001-09-12 2005-01-20 Marcus Textor Device with chemical surface patterns
US7491628B2 (en) * 2004-05-05 2009-02-17 California Institute Of Technology Method for patterning large scale nano-fibrous surfaces using capillography

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5807522A (en) * 1994-06-17 1998-09-15 The Board Of Trustees Of The Leland Stanford Junior University Methods for fabricating microarrays of biological samples
WO1996029629A2 (en) * 1995-03-01 1996-09-26 President And Fellows Of Harvard College Microcontact printing on surfaces and derivative articles
JPH10123315A (ja) * 1996-10-24 1998-05-15 Canon Inc カラーフィルターの製造方法
US6440645B1 (en) * 1997-07-18 2002-08-27 Cambridge Sensors Limited Production of microstructures for use in assays
DE19754978A1 (de) * 1997-12-11 1999-07-01 Bruker Daltonik Gmbh Probenträger für die MALDI-Massenspektrometrie nebst Verfahren zur Herstellung der Platten und zum Aufbringen der Proben
EP1219980A2 (de) * 2000-12-21 2002-07-03 Seiko Epson Corporation Methode und Apparat zur Herstellung eines Farbfilters, eines Flüssigkristallgerätes und eines elektrolumineszierenden Gerätes, Methode und Apparat zur Entladung von Material

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 10 31 August 1998 (1998-08-31) *

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EP1606671A2 (de) 2005-12-21
WO2004082814A2 (de) 2004-09-30
DE10312628A1 (de) 2004-10-07
US20060257630A1 (en) 2006-11-16
JP2006521538A (ja) 2006-09-21

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