AU2002244699A1 - Method for structuring an oxide layer applied to a substrate material - Google Patents

Method for structuring an oxide layer applied to a substrate material

Info

Publication number
AU2002244699A1
AU2002244699A1 AU2002244699A AU2002244699A AU2002244699A1 AU 2002244699 A1 AU2002244699 A1 AU 2002244699A1 AU 2002244699 A AU2002244699 A AU 2002244699A AU 2002244699 A AU2002244699 A AU 2002244699A AU 2002244699 A1 AU2002244699 A1 AU 2002244699A1
Authority
AU
Australia
Prior art keywords
structuring
oxide layer
substrate material
layer applied
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU2002244699A
Other versions
AU2002244699B2 (en
Inventor
Adolf Munzer
Reinhold Schlosser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SolarWorld Industries Deutschland GmbH
Original Assignee
Shell Solar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10104726A external-priority patent/DE10104726A1/en
Application filed by Shell Solar GmbH filed Critical Shell Solar GmbH
Publication of AU2002244699A1 publication Critical patent/AU2002244699A1/en
Application granted granted Critical
Publication of AU2002244699B2 publication Critical patent/AU2002244699B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU2002244699A 2001-02-02 2002-02-01 Method for structuring an oxide layer applied to a substrate material Ceased AU2002244699B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10104726.6 2001-02-02
DE10104726A DE10104726A1 (en) 2001-02-02 2001-02-02 Process for structuring an oxide layer applied to a carrier material
PCT/EP2002/001096 WO2002061854A2 (en) 2001-02-02 2002-02-01 Method for structuring an oxide layer applied to a substrate material

Publications (2)

Publication Number Publication Date
AU2002244699A1 true AU2002244699A1 (en) 2003-02-20
AU2002244699B2 AU2002244699B2 (en) 2006-08-31

Family

ID=7672635

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002244699A Ceased AU2002244699B2 (en) 2001-02-02 2002-02-01 Method for structuring an oxide layer applied to a substrate material

Country Status (8)

Country Link
US (1) US7129109B2 (en)
EP (1) EP1390987B1 (en)
JP (1) JP2004520713A (en)
CN (1) CN1316638C (en)
AT (1) ATE346382T1 (en)
AU (1) AU2002244699B2 (en)
DE (2) DE10104726A1 (en)
WO (1) WO2002061854A2 (en)

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