WO2004055227A3 - Verfahren und vorrichtung zum cvd-beschichten von werkstücken - Google Patents

Verfahren und vorrichtung zum cvd-beschichten von werkstücken Download PDF

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Publication number
WO2004055227A3
WO2004055227A3 PCT/DE2003/003916 DE0303916W WO2004055227A3 WO 2004055227 A3 WO2004055227 A3 WO 2004055227A3 DE 0303916 W DE0303916 W DE 0303916W WO 2004055227 A3 WO2004055227 A3 WO 2004055227A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating
workpieces
workpiece
granulate
cvd coating
Prior art date
Application number
PCT/DE2003/003916
Other languages
English (en)
French (fr)
Other versions
WO2004055227A2 (de
Inventor
Frank Seidel
Original Assignee
Mtu Aero Engines Gmbh
Frank Seidel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mtu Aero Engines Gmbh, Frank Seidel filed Critical Mtu Aero Engines Gmbh
Priority to EP03767459A priority Critical patent/EP1570106A2/de
Priority to US10/538,953 priority patent/US20060147625A1/en
Publication of WO2004055227A2 publication Critical patent/WO2004055227A2/de
Publication of WO2004055227A3 publication Critical patent/WO2004055227A3/de
Priority to US11/538,953 priority patent/US7338626B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C23C10/08—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases only one element being diffused
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45557—Pulsed pressure or control pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Die Erfindung betrifft ein Verfahren und eine Vorrichtung zur CVD-Beschichtung eines Werkstücks. Bei Verfahren zum CVD-Beschichten, insbesondere zum Alitieren, mindestens eines Werkstücks (11) wird ein Beschichtungsgas erzeugt, welches der Beschichtung des oder jeden Werkstücks dient. Erfindungsgemäss werden zu beschichtende Werkstücke in einem Beschichtungsraum (10) angeordnet, wobei in Nähe der zu beschichtenden Werkstücke Beschichtungsgranulat (17) angeordnet wird. Der Beschichtungsraum wird zusammen mit den zu beschichtenden Werkstücken und zusammen mit dem Beschichtungsgranulat auf Prozesstemperatur erhitzt. Nach dem Erreichen der Prozesstemperatur wird ein Prozessgas auf das Beschichtungsgranulat eingeleitet, wobei hierdurch das Beschichtungsgas erzeugt wird.
PCT/DE2003/003916 2002-12-14 2003-11-26 Verfahren und vorrichtung zum cvd-beschichten von werkstücken WO2004055227A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP03767459A EP1570106A2 (de) 2002-12-14 2003-11-26 Verfahren und vorrichtung zum cvd-beschichten von werkstücken
US10/538,953 US20060147625A1 (en) 2002-12-14 2003-11-26 Method and device for the cvd coating of workpieces
US11/538,953 US7338626B1 (en) 2002-12-14 2006-10-05 High cavitation, low tonnage rubber mold machine and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10258560.1 2002-12-14
DE10258560A DE10258560A1 (de) 2002-12-14 2002-12-14 Verfahren und Vorrichtung zum CVD-Beschichten von Werkstücken

Publications (2)

Publication Number Publication Date
WO2004055227A2 WO2004055227A2 (de) 2004-07-01
WO2004055227A3 true WO2004055227A3 (de) 2004-09-23

Family

ID=32477654

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/003916 WO2004055227A2 (de) 2002-12-14 2003-11-26 Verfahren und vorrichtung zum cvd-beschichten von werkstücken

Country Status (4)

Country Link
US (1) US20060147625A1 (de)
EP (1) EP1570106A2 (de)
DE (1) DE10258560A1 (de)
WO (1) WO2004055227A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2014377B1 (de) * 2007-07-12 2010-03-31 Siemens Aktiengesellschaft Halterung für Turbinenschaufeln
FR2992977B1 (fr) * 2012-07-03 2017-03-10 Snecma Procede et outillage pour le depot d'un revetement metallique en phase vapeur sur des pieces en super alliages
DE102014205426A1 (de) * 2014-03-24 2015-09-24 Siemens Aktiengesellschaft Gestell zur Halterung von Bauteilen
FR3047255B1 (fr) * 2016-01-28 2018-01-12 Snecma Mexico, S.A. De C.V. Outillage pour la mise en oeuvre d'un procede de depot d'un revetement metallique en phase vapeur sur des pieces de turbomachine
DE102018202297A1 (de) * 2018-02-15 2019-08-22 MTU Aero Engines AG Vorrichtung und Verfahren zum Gasphasenbeschichten von Werkstücken
DE102018221579A1 (de) * 2018-12-13 2020-06-18 MTU Aero Engines AG Vorrichtung und Verfahren zum Gasphasenbeschichten von Werkstücken

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4119967C1 (de) * 1991-06-18 1992-09-17 Mtu Muenchen Gmbh
US5368888A (en) * 1991-11-04 1994-11-29 General Electric Company Apparatus and method for gas phase coating of hollow articles
US5462013A (en) * 1991-12-04 1995-10-31 Howmet Corporation CVD apparatus and method for forming uniform coatings
US6180170B1 (en) * 1996-02-29 2001-01-30 Mtu Motoren- Und Turbinen-Union Muenchen Gmbh Device and method for preparing and/or coating the surfaces of hollow construction elements
US6203851B1 (en) * 1998-01-30 2001-03-20 MTU MOTOREN-UND TURBINEN-UNION MüNCHEN GMBH Gas phase coating process and apparatus for gas-phase coating of workpieces
WO2002055754A2 (de) * 2001-01-11 2002-07-18 Mtu Aero Engines Gmbh Verfahren und vorrichtung zum gasphasendiffusionsbeschichten von metallischen bauteilen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4156042A (en) * 1975-04-04 1979-05-22 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Coating articles having fine bores or narrow cavities in a pack-cementation process

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4119967C1 (de) * 1991-06-18 1992-09-17 Mtu Muenchen Gmbh
US5368888A (en) * 1991-11-04 1994-11-29 General Electric Company Apparatus and method for gas phase coating of hollow articles
US5462013A (en) * 1991-12-04 1995-10-31 Howmet Corporation CVD apparatus and method for forming uniform coatings
US6180170B1 (en) * 1996-02-29 2001-01-30 Mtu Motoren- Und Turbinen-Union Muenchen Gmbh Device and method for preparing and/or coating the surfaces of hollow construction elements
US6203851B1 (en) * 1998-01-30 2001-03-20 MTU MOTOREN-UND TURBINEN-UNION MüNCHEN GMBH Gas phase coating process and apparatus for gas-phase coating of workpieces
WO2002055754A2 (de) * 2001-01-11 2002-07-18 Mtu Aero Engines Gmbh Verfahren und vorrichtung zum gasphasendiffusionsbeschichten von metallischen bauteilen

Also Published As

Publication number Publication date
WO2004055227A2 (de) 2004-07-01
US20060147625A1 (en) 2006-07-06
DE10258560A1 (de) 2004-07-08
EP1570106A2 (de) 2005-09-07

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