WO2004028721A1

WO2004028721A1 - Ultrafine hole punching method and punching machine

Info

Publication number: WO2004028721A1
Application number: PCT/JP2003/005413
Authority: WO
Inventors: Toshihiko Mori; Kenji Hirota; Yuichi Nakano; Shinji Kurimoto
Original assignee: Nagoya Industrial Science Research Institute
Priority date: 2002-09-26
Filing date: 2003-04-25
Publication date: 2004-04-08
Also published as: JP2004114228A; AU2003235954A1

Abstract

An ultrafine hole punching machine (10) comprising a metallic holder member (13) secured with a ceramic fiber punch of 50 μm thick or less while projecting one end thereof slightly from one end face in the longitudinal direction, a member (21) for supporting the holder member slidably, a die 23 having a straight die hole (23f) located in the axial direction of the punch while spaced apart from the forward end thereof, a member for securing the slidable supporting member and the die, and a driving section (31) for moving the holder member along the slidable supporting member. When a voltage is applied while keeping a discharge distance between the surface of the die and the forward end of the punch provided with a metallic film on the surface, discharge takes place and a die hole is made.

Description

,

Description Ultra-fine hole punching method and punching equipment Technical field

INDUSTRIAL APPLICABILITY The present invention can precisely form fine holes in a metal or plastic thin plate and the like, and can be used for an ink jet nozzle for a printer, a fuel injection nozzle for an automobile, and a high density printer. TECHNICAL FIELD The present invention relates to an ultra-fine hole punching method and an ultra-fine hole punching apparatus which can be used for fine hole punching of high-performance fine parts such as a substrate, a filter, and a gas sensor for cooling a bottle. Background art

Conventionally, as an ultra-fine hole punching method, press working using a metal punch and a die is known. However, according to the press working, the hole size is limited due to the manufacturing limit of the punch. There is a problem that the machining limit is about 50 m. On the other hand, laser machining, electric discharge machining, and lithography machining are known as ultra-fine hole punching methods capable of making holes of 50/2 m or less. However, since laser processing is essentially processing by heat melting, it greatly damages the material of the workpiece and the hole shape is not a straight but a conical surface Problem. In the case of electric discharge machining, the material to be processed is limited to a material having good electric conductivity. In addition, lithographic processing has a problem that the hole shape is greatly affected by the characteristics of the etching liquid. In addition, in the case of the processing methods other than the press processing, there is a problem that the processing time is significantly longer than that of the press processing.

On the other hand, the present inventor has developed an ultra-fine hole punching process capable of performing a hole drilling of 50 m or less by press working with high accuracy and high reliability. _n

The method was invented (for example, “Transactions of the Japan Society of Mechanical Engineers, Vol. 65, No. 6 229, C Edition”, published by The Japan Society of Mechanical Engineers, January 2001, p. 369-374, The Transactions of the Japan Society of Mechanical Engineers, Vol. 65, No. 635, C Edition ", published by The Japan Society of Mechanical Engineers, July 2001, pp. 305-31. According to this processing method, first, a straight metal holder member is used to form a ceramic fiber made of high-hardness silicon carbide SiC or the like having a diameter of 50 m or less. The punch is aligned in the longitudinal direction (punching direction) of the holder member and one end thereof is aligned with the one end surface of the holder member, and the one end surface of the holder member is perpendicular to the punching direction. By polishing as much as possible, one end surface of the punch is made a smooth surface. Next, the punch is protruded from the one end face of the holder member by a predetermined length by removing one end side of the holder member by etching.

This holder member is slidably held in a longitudinal direction by a slide support member such as a stroke bearing, and is held in the axial direction of the holder member held by the slide support member. The metal material is placed at a distance, and the sliding support member and the die material are fixed by the fixing member. Then, the holder member is moved along the sliding support member by the holder driving means, and the punches protruding from the holder member are pressed against the die material. As a result, a straight die hole having an inner diameter slightly larger than the outer diameter of the punch is formed in the die material, and the die material is formed as a die. With this ultra-fine hole punching apparatus, a punch is passed through a thin plate placed on a die, through the thin plate, and into a die hole of the die. Straight fine holes with a punch diameter of 50 or less can be easily formed in a thin plate.

By adopting a high-hardness ceramic fiber as the bunch, a defect-free and perfect circular bunch with a diameter of 5 O ^ m or less can be easily manufactured. It is possible, and it is possible to punch very fine holes as compared with conventional press working. In addition, the use of ceramic fiber allows the punch to be made of metal. _Q

The chemical affinity for the material to be added is low, and thus the effect of suppressing seizure and wear of the punch is obtained.

However, according to the above-described ultra-fine hole punching method, punching is performed by directly pressing a punch on the die material, so that a high strength die material is used. The punch was susceptible to damage if used, and the advantages of using a high-hardness ceramic fiber bonnet could not be fully exploited.

The present invention is intended to solve the above-described problem, and makes use of the advantage of a punch made of a high-hardness ceramic fiber and uses a high-strength material as a material of a die. It is an object of the present invention to provide an ultra-fine hole punching method and an ultra-fine hole punching apparatus by press working that can perform the following. Disclosure of the invention

In order to achieve the above object, the first aspect of the invention is characterized in that at least one ceramic fiber punch is formed by a holder member. Along with holding in the punching direction, a punch is protruded from one end surface of the holder member, a metal film is provided on the surface of the protruding punch, and the holder member can be slid in the punching direction by the sliding support member. And a conductive dice material is arranged at a distance from one end face of the holder member held by the sliding support member in a direction facing the one end face of the holder member, and the slide support member and the die are arranged. The material is fixed in an insulated state by a fixing member, and the holder member is moved along the sliding support member by the holder driving means, so that the tip of the boss protruding from the holder member and the die material While maintaining the discharge distance between the surfaces of A voltage is applied between the punch and the die material to cause a discharge, and the die material is formed into a die by forming a die hole through which the punch can pass. Another object of the present invention is to form a fine hole in a thin plate by using a punch and a die. In the first invention, the holder member is provided with a metal film on the surface of the punch projecting from one end surface of the holder member. By moving it, the voltage can be concentrated and applied between the holder member and the die material while maintaining the discharge distance between the tip of the punch protruding from the holder member and the surface of the die material. Thus, a discharge can be reliably generated between the tip of the punch and the die material. Therefore, a die hole slightly larger than the thickness of the punch can be easily formed in the die material without directly contacting the punch with the die material. Further, since it is not necessary to directly perform the die hole machining with the punch, damage to the punch is prevented. The sliding support member and the die material are fixed by a fixing member, and the positional relationship between the two does not change even after the die hole is formed. By moving the holder member, the punch is reliably passed through the die hole of the die. Therefore, according to this ultra-fine hole punching method, it is possible to easily and reliably form a fine hole corresponding to the thickness of a punch in a thin plate in a short time. In addition, since the punch is not damaged in the formation of the die hole, a long service life of about 100,000 punches is ensured.

Also, in this ultra-fine hole punching method, the thickness of the punch, which is a ceramic fiber, can be reduced to 50 m or less. According to this ultra-fine hole punching method, an ultra-fine hole corresponding to a punch thickness of 50 m or less can be easily and reliably formed in a thin plate.

In this ultra-fine hole punching method, after applying a voltage between the punch and the die material held at the discharge distance to cause a discharge for a predetermined time, the punch is moved from the discharge distance to a predetermined first length. Then, after a certain period of time, the tip of the punch is brought closer to the die material by a predetermined second length than the discharge distance, and the process of causing discharge for a predetermined time can be repeated. . _K

As a result, a discharge is generated for a predetermined time between the holder member and the die material while maintaining a discharge distance between the tip of the punch protruding from the holder member and the surface of the die material, and then the punch is driven. By separating the first distance from the discharge distance, the punch can be properly prevented from being damaged by the discharge. Furthermore, after a certain time, the tip of the punch is brought closer to the die material by a second length than the discharge distance to perform the discharge for a predetermined time, thereby forming a hole having a substantially constant depth. Can be. By repeatedly performing such a discharge process, a die having a die hole having a size corresponding to the thickness of the punch can be formed. As a result, the life of the punch can be further prolonged. In addition, the configuration of the second invention is characterized by at least one ceramic fiber. A holder member in which the punch is aligned in the punching direction and one end of the punch is slightly protruded from one end surface in the punching direction, and a sliding support member which holds the holder member slidably in the punching direction. And a die provided with a die hole through which the punch can penetrate, which is arranged at a distance from the tip of the punch in the axial direction of the punch of the holder member, and the sliding support member and the die are in an insulated state. And a holder driving means for moving the holder member in the punching direction along the sliding support member. The die is opposed to one end surface of the holder member and extends in the punching direction from the one end surface. They are spaced apart While maintaining the discharge distance between the surface of the conductive die material and the tip of the punch provided with a metal film on the surface protruding from the holder member, a power supply is applied between the punch and the die material. In this case, a dice hole is formed in the die material by applying a voltage to cause a discharge.

In the second invention, the holder member is a punch in which the punches, which are ceramic fibers, are aligned in the punching direction and one end thereof is slightly projected from one end face and fixed. Further, the die is disposed so as to face one end surface of the holder member and to be separated from the one end surface in the punching direction. _c

While maintaining the discharge distance between the surface of the metal die material and the tip of the punch provided with the metal film on the surface protruding from the holder member, apply a voltage from the power supply between the punch and the die material. It was obtained by applying a discharge to form a die hole in the die material. Therefore, according to this ultra-fine hole punching apparatus, fine holes corresponding to the thickness of the punch can be easily and reliably formed in a thin plate in a short time. In addition, the punch is not damaged in forming the die hole, so about 100,000 punches are possible.

In addition, in this ultra-fine hole punching apparatus, the punch, which is a ceramic fiber, can have a thickness of 50 m or less. With this ultra-fine hole punching apparatus, ultra-fine holes corresponding to the thickness of the punch can be easily and reliably formed in a thin plate.

In this ultra-fine hole punching machine, a voltage is applied by a power supply between a punch and a die material held at a discharge distance to generate a discharge for a predetermined time, and then the pouring is performed by a holder driving means. The punch is separated from the discharge distance by a predetermined first length, and after a certain period of time, the tip of the punch is moved closer to the die material by a predetermined second length from the discharge distance by the holder driving means. Thus, it is possible to provide a discharge control means for repeatedly performing a process of generating a discharge for a predetermined time by applying a voltage from a power supply.

In the present invention, based on the control of the discharge control means, the holder driving means controls the power supply while maintaining the discharge distance between the tip of the punch protruding from the holder member and the surface of the die material. A voltage is applied between the tip of the punch and the die material to generate discharge for a predetermined time. Thereafter, the punch is separated from the discharge distance by the first length by the holder driving means, whereby damage due to discharge of the punch is properly prevented. Further, based on the control of the discharge control means, the tip of the punch is moved to the discharge distance by the holder driving means after a predetermined time. The die is brought close to the die material by the second length, and a voltage is applied from the power supply to generate a discharge between the tip of the punch and the die material for a predetermined period of time. Can be processed. By repeating the discharge process based on the control of the discharge control means, it is possible to punch an ultra-fine hole provided with a die having a die hole slightly larger than the punch. A processing device is obtained. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a schematic diagram showing a schematic configuration of an ultra-fine hole punching apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a punching block of the ultra-fine hole punching apparatus.

FIG. 3 is a partial sectional view showing a holder member.

FIG. 4 is a front view and a sectional view showing a die.

FIG. 5 is an explanatory diagram for explaining a manufacturing process of the holder member.

FIG. 6 is an explanatory diagram illustrating a method for manufacturing a die.

FIG. 7 is a graph for explaining the timing of discharge in the production of a die.

Hereinafter, embodiments of the present invention will be described. FIG. 1 is a schematic view showing a schematic configuration of an ultra-fine hole punching apparatus according to one embodiment, FIG. 2 is a perspective view of a punching block, and FIG. 3 is a holder. The members are shown in a partial cross-sectional view, and FIG. 4 shows the die in a front view and a cross-sectional view. The ultra-fine hole punching machine 10 is composed of a cubic housing 11 and a bracket 1 housed on the lower side of the housing 11 and provided on its inner wall surface. W «

1 A punching block 12 for forming a single hole fixed to a and a driving unit 31 and a driving unit 31 that are housed in the upper part of the housing 11 and operate the punching block 12. And a discharge power supply 38 for applying a discharge voltage under the control of the control unit 36.

As shown in FIG. 2, the punching block 12 is made of high-hardness silicon carbide SiC having a diameter of 50 im or less coaxially from the center of one end face (the lower end face in the figure). Punch 15, which is a ceramic fiber, is coaxially attached to the slightly protruding holder member 13 and the other end (upper side in the figure) of holder member 13. Stroke that holds the support rod 17, which is a metal round bar, slidably, is placed on a cylindrical sliding support member 21 such as a bearing, and the bracket 11 a. In a state where the fixed die 23 and the die 23 and the sliding support member 21 are coaxially opposed to each other with a predetermined space therebetween, the die 23 and the sliding support member 2 are arranged. And a connecting plate 25 for connecting 1 and 2 on the side surface. Fibers made of high-hardness silicon carbide SiC have a network structure formed by, for example, a spinning method in which a material is blown from nozzles. As the ceramic fiber, a carbon-based material such as silicon carbide SiC having high hardness is preferable.

As shown in FIG. 3, the holder member 13 is provided with a pair of semi-cylindrical aluminum cases 14 made of aluminum, and is arranged along the axial direction at the axial center of the holder 14. A punch 15 made of ceramic fiber is sandwiched with one end of the holder slightly protruding from one end of the holder 14, and a holder 14 is provided in a shaft hole at one end. There is provided a fixing member 16 which is a cylindrical fixing member in which a support rod 17 is fitted in a shaft hole on the other end side while being fitted in a state where one end is slightly protruded. The holders 14 and the support rods 17 are attached to the holes 16a and 16c, respectively, which are screwed into the screw holes 16a and 16c provided on the outer wall at one end and the other end of the fixing bracket 16. Is fixed to the fixing bracket 16 by tightening u

You.

The formation of the holder member 13 is performed as shown in FIG. First, at a position of the center of the holder 14 composed of a pair of semi-cylindrical aluminum cases, the punch 15 is aligned with one end face of the holder 14 along the axial direction and one end thereof. Is held between the holders 14 (Fig. 5 (a)). The holder 14 is fitted into the cylindrical fixing bracket 16 with one end thereof slightly protruding, and is fixed to the fixing bracket 16 by tightening with the fixing bracket 16 (No. 5 Figure (b);). The mounting of the support rod 17 to the fixing bracket 16 may be performed at the same time as the mounting of the holder 14 or separately after the holder 14 is processed.

Next, the protruding portion of the holder 14 fixed to the fixing bracket 16 is removed by lathing so as to have a conical surface except for the center portion, and the protruding portion of the holder 14 is further removed. Polished with diamond abrasive, puffed with cotton cloth, and polished on a flat stainless steel plate, so that the tip of the punch 15 is flattened and has a flat blade angle. (Fig. 5 (c)). Note that the order of lathe processing and polishing may be reversed. Next, one end of the holder 14 is brought into contact with the electrolytic solution, and a voltage is applied between the holder 14 and the electrolytic solution, so that the tip of the holder 14 is etched away by electrolytic polishing. As a result, a holder member 13 is formed (FIG. 5 (e)) in which the punch 15 protrudes from the tip portion by a desired length.

The holder member 13 is slidably attached to the sliding support member 21 in the longitudinal direction (punching direction) by inserting the support rod 17 into the sliding support member 21. At the protruding end of the support rod 17 protruding from the sliding support member 21, a pressing plate 18 is fixed at a right angle to the shaft and extends radially outward. A coil spring 19 is wound around a portion protruding from the sliding support member 21 of FIG. Holder member 13 is a coil spring The support bracket 19 is urged in the direction of the support rod by 19, and the other end of the fixing bracket 16 is in contact with the end face of the sliding support member 21. A bracket 22 is attached to the side surface of the sliding support member 21 and extends in the radial direction.

The die 23 has a rectangular parallelepiped block shape made of metal as shown in Fig. 4, and the upper surface 23a is formed in a symmetrical mountain shape that is inclined on both sides with the center in the longitudinal direction as the center. A recess 23 d is formed vertically from the bottom surface 23 c to the top of the top surface 23 a on the one side surface 23 b (front side in the figure) in the width direction. The top side is rounded into a semicircle, leaving a thin wall 23 e with a thickness of about 1 mm between the top and the top. A die hole 23 f through which a punch 15 can pass is formed in the top of the thin portion 23 e so as to penetrate in the vertical direction. The die 23 has mounting holes 23 g penetrating in the width direction on both sides in the longitudinal direction. The die 23 is arranged so that the punch 15 and the die hole 23 ί are coaxially located at a predetermined distance from one end face of the holder member 13, and the bracket is provided on the side surface thereof. 24 is tightened and fixed by a bolt (not shown) inserted into the mounting hole 23 g. A resin connection plate 25 is attached to the brackets 22 and 24 to connect the two, so that the punching block 12 is formed as a body. You. The punching block 12 is mounted on the bracket 11a provided in the housing 11 by the bracket 24, and is fixed to the bracket 11a and stands upright.

The drive unit 31 includes a piezoelectric actuator unit 32 fixed to a bracket 11 b attached to the upper right end of the housing 11 and extending vertically downward, and an actuator unit 32. It is provided with a drive power supply 33 for energizing the switch 32, and a cantilever 34 for mechanically amplifying the movement of the actuator 32. The cantilever 34 has a long body 34a, a fixed end 34b, and a thin connecting piece 34c for connecting the both in a straight state. _R

The cantilever 34 is fixed to the inner wall of the housing 11 at a fixed end 34 b on the right side of the lower end of the piezoelectric actuator 32, and is a long body 34 a Extends horizontally toward the punching block 12 side. The cantilever 34 is configured so that the main body 34a following the connecting piece 34c is pushed up and down by the actuator 32, and the fixed end 34b is By bending the connecting piece 34c as a fulcrum, the main body 34a can move up and down. The free end of the main body 34 a of the cantilever 34 is disposed on the pressing plate 18 at the upper end of the support rod 17, and a protrusion 3 4 on the lower surface thereof for pressing the pressing plate 18. d is provided. On the top surface of the tip end of the main body 34 a of the cantilever 34, a projecting rod 34 e on which a coil panel is wound is provided in the extending direction of the support rod 17. The upward movement of the protruding rod 34 e is limited to a predetermined range by abutting the bracket 11 c fixed to the housing 11. A control unit 36 and a discharge power supply 38 are provided in the housing 11. The control unit '36 controls the energization state of the drive power supply 33 of the drive unit 31 and also controls the energization state of the discharge power supply 38. Next, the formation of the die hole 23 f of the die 23 using the ultra-fine hole punching machine will be described.

First, a gold film is applied to the surface of the protruding punch 15 by depositing gold on one end side of the holder 14 from which the punch 15 protrudes from the tip by electropolishing. As a result, the punch 15A made of ceramic fiber, which is an insulating material, has conductivity. As shown in FIG. 6, in the above-mentioned ultra-fine hole punching apparatus, a holder member 13 having a surface coated with a gold film on a punch 15 A is provided with a support rod 17 and a sliding support member 21. It is attached to the sliding support member 21 by passing through. Furthermore, instead of the die 23, a die material 23A in which the through-hole is not formed in the thin portion 23e on the upper surface of the die 23 is supplied to an ultra-fine hole punching machine. It is attached. In this state, energization control of the drive power supply 33 is performed based on the control of the control unit 36, and the actuator 32 is driven. In response to this, the cantilever 34 is pushed, and the supporting rod 17 is pushed downward accordingly, so that the punch 15A projecting from the lower end of the holder member 13 and the die material are formed. An appropriate discharge distance dh is set between the upper thin portion 23 e of 23 A and the thin portion 23 e. In this state, a predetermined voltage t 1 is applied between the die material 23 A and the holder member 13 for a predetermined time by the discharge power source 38 under the control of the control unit 36. As a result, a discharge is generated between the die material 23 A and the tip of the conductive punch 15 A, and the discharge causes the thin portion 23 of the die material 23 A to face the punch 15 A. e is melted and slightly pierced. Since the punch 15A of the holder member 13 is made of ceramic five-fiber, there is no damage by short-time discharge. After the lapse of a predetermined time t1, the actuator 32 is driven by the control of the control unit 36, the holder member 13 is pulled up, and the discharge distance dh in which the tip of the punch 15 is the first length. Raised 5 m above.

Further, after a lapse of a predetermined time t2, the actuator 32 is driven at a predetermined voltage under the control of the control section 36, and the cantilever 34 is pressed accordingly, and the support rod 1 is accordingly moved. The second length is between the punch 15A protruding from the lower end of the holder member 13 as a result of the lower portion 7 being pressed down and the thin upper portion 23e of the die material 23A. The discharge distance dh is set to be 1 jim below the discharge distance dh. After a lapse of a predetermined discharge time t1, the actuator is driven by the control of the control unit 36, and the holder is driven. The member 13 is pulled up and the tip of the punch 15 is likewise pulled up 5 m. As described above, under the control of the control unit 36, the so-called 5-m turn discharge is performed by 5 m 51 -h after the end of the discharge from the initial discharge distance, and then lowered by 1 β m at a time. Processing is performed

Actually, as shown in Fig. 7, the punch 15A is separated from the discharge distance dh. At the position above, drop the discharge voltage by 5 m and apply the discharge voltage, and after the elapse of the predetermined time t1,

5 After a certain period of time t2, 1 m is added, and the (1 + 5) m punch is lowered.After the discharge voltage is applied for a predetermined period of time, 5 m is pulled up. The evening discharge pattern is repeated. As a result, a straight die hole 23 f having an inner diameter slightly larger than the outer diameter of the punch 15 can be formed in the thin portion 23 e of the die material 23 A.

The punch 15 formed in this manner is mounted on the die 23 using an ultra-fine hole punching device provided with a die 23 having a die hole 23 f through which the die can pass. The punch 15 is penetrated through the thin plate W and passed through the die hole 23 f of the die 23 with respect to the placed thin plate W. Holes can be formed easily in a short time

As described above, according to the present embodiment, since the metal film is provided on the surface of the punch 15 protruding from the one end face force of the holder member 13 and from the holder member 13, When a voltage is applied between the holder member 13 and the die material 23 A while maintaining the discharge distance between the tip of the protruding punch 15 A and the surface of the die material 23 A, the punch 1 5 Discharge is reliably generated between the tip and the die material 23A. As a result, a straight die hole 23 f having an inner diameter slightly larger than the outer diameter of the punch 15 can be formed in the die material 23 A.

The sliding support member 21 and the die material 23 A are fixed by the connecting plate 25, and the positional relationship between the two changes even after the die hole 23 f is formed. By moving the holder member 13 along the sliding support member 21, the punch 15 can be reliably inserted into the die hole 23 f of the die 23. You. For this reason, in the present embodiment, the punch 15 is passed through the thin plate W to the die hole 23 f with respect to the thin plate W placed on the die 23. , A short hole of 50 m or less in the thin plate W It can be easily formed in between. As a result, the ultra-fine hole punching apparatus according to the present embodiment can be used for an ink jet nozzle for a printer, a fuel injection nozzle for an automobile, a high-density print substrate, a filter, a gas It can be suitably used for punching fine holes in high-performance fine parts such as gas sensors for turbine cooling.

In forming the die hole 23f, after discharging for a predetermined time t1 at the discharge distance, the punch was separated by 5 m from the discharge distance, and after a certain time, the tip of the punch was moved from the discharge distance by 1 Discharge is carried out for a predetermined time by bringing it closer to the die material 23 A by m, and the punch outer diameter is maintained without damaging the punch 15 by repeating the discharge treatment every 5 m. A die 23 having a straight die hole 23 ί with a slightly larger inner diameter can be formed. As a result, the punch 15 has a long service life capable of punching about 100,000 times.

In the above embodiment, the die member is provided with one punch, but is not limited thereto, and may be a die member provided with a plurality of punches. is there. Further, in the above-described embodiment, by setting the thickness of the punch to 50 im or less, a particularly great effect that punching of an ultra-fine hole can be obtained is obtained. However, it is of course possible to apply the present invention even when the thickness of the punch is larger than 50 m. Further, in the above-described embodiment, the shape of the fine hole formed by the punch is circular, but the shape of the fine hole is not limited to this, and the shape of the fine hole can be changed to an elliptical shape by changing the shape of the punch. It is also possible to use a polygon.

Further, in the above embodiment, the first length for separating the punch from the discharge distance is set to 5 m ', and the second length for bringing the tip of the punch closer to the die material than the discharge distance is 1 m. m, but not limited to this, the first length and the second length may vary depending on the diameter of the punch, the shape of the die, the applied voltage, etc. It can be changed and set. In addition, the configuration of the ultra-fine hole punching apparatus described in the above embodiment is an example, and various modifications can be made without departing from the gist of the present invention.

Industrial applicability

According to the present invention, in press working, a high-strength material is used as a material of a die while taking advantage of a punch made of a high-hardness ceramic fiber. Fine holes can be formed with high precision in metal or plastic thin plates. The present invention relates to an ink jet nozzle for a printer, a fuel injection nozzle for an automobile, a high-density printed circuit board, a filter, a fine hole punching of a high-performance fine component such as a gas sensor for cooling a gas turbine. It is suitable for use in:

Claims

lb Claims Scope

1. With the holder member, at least one punch, which is a ceramic fiber, is aligned in the punching direction of the holder member, and is held from one end surface of the holder member. Protrude the punch,

Providing a metal film on the surface of the protruding punch,

The holder member is slidably held in a punching direction by an automatic support member,

An electrically conductive dice material is arranged at a distance from the one end surface in a direction facing the one end surface of the holder member held by the sliding support member, and the sliding support member and the dice material are arranged. Are fixed by a fixing member in an insulated state, and the holder member is moved along the sliding support member by holder driving means, and the tip of the punch protruding from the holder member and the die While maintaining the discharge distance between the surfaces of the die material, a voltage is applied between the punch and the die material to cause a discharge, and a die through which the punch can pass through the die material. The die material is formed as a die by forming a die hole, and a fine hole is formed in the thin plate by the bonch and the die.

An ultra-fine hole punching method characterized by this.

2. The method for punching ultra-fine holes according to claim 1, wherein the thickness of the punch, which is the ceramic fiber, is set to 5 Owm or less.

3. After applying a voltage between the punch and the die material held at the discharge distance to generate a discharge for a predetermined time, the punch is separated from the discharge distance by a predetermined first length. Further, after a certain time, a process of causing the tip of the punch to approach the die material by a predetermined second length from the discharge distance to generate a discharge for a predetermined time is repeatedly performed. 3. The method for punching ultra-fine holes according to claim 1 or 2, wherein:

4. With at least one punch, which is one of the ceramic fins, aligned in the punching direction and one end of the punch slightly protruded from one end surface in the punching direction. A fixed holder member,

A sliding support member for holding the holder member slidably in the punching direction and a die hole which is arranged apart from the tip of the punch in the axial direction of the punch of the holder member and through which the punch can pass. A die having

A fixing member for fixing the sliding support member and the die in an insulated state, and holder driving means for moving the holder member in a punching direction along the sliding support member.

The die has a surface of a conductive die material that faces the one end surface of the holder member and is spaced apart from the one end surface in the punching direction and a surface protruding from the holder member has a metal surface. While maintaining a discharge distance between the tip of the punch provided with a film and a discharge distance, a voltage is applied from a power supply between the punch and the die material to cause discharge, and the die material is applied to the die material. With holes

An ultra-fine hole punching machine characterized by this.

5. The apparatus for punching out ultra-fine holes according to claim 4, wherein the thickness of the punch, which is the ceramic fiber, is 5 Om or less. .

6. After a voltage is applied by the power source between the punch held at the discharge distance and the die material to generate a discharge for a predetermined time, the punch is held by the holder driving unit. A predetermined first length is separated from the discharge distance, and after a predetermined time, the tip of the punch is moved to the die material by a predetermined second length from the discharge distance by the holder driving means. 6. The method according to claim 4 or 5, further comprising a discharge control means for causing a voltage to be applied by the power supply and causing a discharge for a predetermined time to be repeated. Ultra-fine described in Top 8

Small hole punching machine