WO2004001470A1 - Reseau selectif planaire athermique - Google Patents

Reseau selectif planaire athermique Download PDF

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Publication number
WO2004001470A1
WO2004001470A1 PCT/GB2003/002615 GB0302615W WO2004001470A1 WO 2004001470 A1 WO2004001470 A1 WO 2004001470A1 GB 0302615 W GB0302615 W GB 0302615W WO 2004001470 A1 WO2004001470 A1 WO 2004001470A1
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Prior art keywords
waveguide
mach
zender
multiplexer
awg
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PCT/GB2003/002615
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English (en)
Inventor
Tsjerk Hans Hoekstra
Roland Munzner
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Gemfire Europe Limited
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Publication of WO2004001470A1 publication Critical patent/WO2004001470A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
    • G02B6/12028—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence based on a combination of materials having a different refractive index temperature dependence, i.e. the materials are used for transmitting light

Definitions

  • AWGs Athermal AWGs
  • a new technique for making AWGs athermal is a new technique for making AWGs athermal.
  • AWGs sometimes also known as “phasars” or “phased arrays", are now well-known components in the optical communications network industry.
  • An AWG is a planar structure comprising an array of waveguides arranged side-by-side which together act like a diffraction grating in a spectrometer.
  • AWGs can be used as multiplexers and as demultiplexers, and a single AWG design can commonly be used both as a multiplexer and demultiplexer. The construction and operation of such AWGs is well known in the art.
  • a typical AWG mux/demux is illustrated in Fig.l and comprises a substrate or "die” 1 having provided thereon an arrayed waveguide grating 5 consisting of an array of channel waveguides 8 (hereinafter referred to as "array waveguides"), only some of which are shown, which are optically coupled between two free space regions 3,4 each in the form of a slab waveguide.
  • At least one input waveguide 2 is optically coupled to an input face 9 of the first slab waveguide 3 for inputting a multiplexed input signal thereto, and a plurality of output waveguides 10 (only two shown) are optically coupled to an output face 20 of the second slab waveguide 4 for outputting respective wavelength channel outputs therefrom to the edge 12 of the die 1.
  • the physical length of the waveguides increases incrementally by the same amount from one waveguide to the next
  • the material system most commonly used for the fabrication of such AWG mux/demux devices is silica-on-silicon.
  • Fig.1(b) shows a cross- sectional view of a typical waveguide formed in this material system.
  • the array waveguides and slab waveguides are typically formed (e.g. using standard photolithographic and etching techniques) as "cores" 15 on a silicon substrate 14 (an oxide layer and/or cladding layer 17 may be provided on the substrate prior to depositing the waveguide cores) and are covered in a cladding material 16, this being done for example by Flame Hydrolysis Deposition (FHD) or Chemical Vapour Deposition (CVD) fabrication processes.
  • FHD Flame Hydrolysis Deposition
  • CVD Chemical Vapour Deposition
  • the temperature sensitivity of AWGs manufactured in silica-on- silicon is a known problem.
  • the temperature coefficient of wavelength selective devices manufactured in silica-on-silicon is approximately 0.012nm/°C. This corresponds to a frequency shift of about 45 GHz over a temperature range of 30°C, which is often unacceptable to telecoms network designers.
  • Various mechanisms have been tried to reduce this temperature sensitivity, so that the AWG will be substantially insensitive to temperature i.e. "athermal”.
  • One technique is to use active temperature stabilisation (i.e. a thermostatically controlled heater on the PLC), but this consumes a lot of power.
  • Another technique overlays all or part of the AWG with a material having a negative thermo-optic coefficient, such as a polymer material, in order to counteract the change in refractive index of the array waveguides due to temperature changes.
  • a material having a negative thermo-optic coefficient such as a polymer material
  • another technique is to use a negative thermal expansion substrate in order to counteract change in optical path length of the array waveguides, as described in EP 1 072 908A.
  • Yet another technique for achieving athermalisation is to use a mechanically movable input optical fibre waveguide at the input slab waveguide of the AWG in order to try to make the AWG athermal. See or example W098/13718.
  • This solution is based on the fact that the position of the launching point for the input signal, on the input face 9 of the first slab waveguide, determines the central wavelength ⁇ c output from the AWG. A slight change in the position of the launching point can be used to compensate for drift in the central wavelength with temperature change.
  • This mechanical solution has the possible disadvantage of being relatively complex to manufacture and also requires the whole device to be hermetically packaged (in order to protect the interface between the movable input fibre and the input slab waveguide face) which makes the packaging of the device complex and expensive.
  • an athermal multiplexer/demultiplexer device comprising: an arrayed waveguide grating (AWG) comprising first and second slab waveguides and a plurality of array waveguides optically coupled therebetween, the array waveguides having predetermined optical path length differences therebetween; a plurality of output waveguides optically coupled to the second slab waveguide of the AWG; and a Mach-Zender apparatus having first and second sides, the first side being optically coupled to at least one input waveguide and the second side comprising a plurality of output ports optically coupled to an input side of the first slab waveguide of the AWG, wherein the Mach-Zender apparatus is formed and arranged so that the temperature sensitivity of the Mach-Zender apparatus substantially compensates for the temperature sensitivity of the AWG whereby the device is substantially athermal.
  • AWG arrayed waveguide grating
  • the Mach-Zender apparatus preferably comprises an optical coupler coupling an output end of the at least one input waveguide to at least two waveguide arms which terminate in two said output ports respectively.
  • the coupler may, for example, conveniently comprise a Y- branch coupler, a directional coupler, or a multi-mode interferometer (MMI) coupler.
  • MMI multi-mode interferometer
  • the design of the Mach-Zender apparatus can be used to control the position, on the input face of the first slab waveguide, of a combined output signal formed by the signals output from the plurality of output ports of the Mach-Zender apparatus, in response to an input signal directed into an input end of the at least one input waveguide.
  • the two waveguide arms of the Mach-Zender apparatus are formed and arranged such that the change in the position (on the input face of the first slab waveguide) of the combined output signal of the two output ports of the Mach-Zender apparatus with change in temperature compensates sufficiently for the temperature sensititivity of the AWG so that the central wavelength of the mux/demux device is substantially independent of the temperature of the device.
  • one waveguide arm of the Mach-Zender apparatus may comprise a portion made of a material having a rate of change of refractive index with temperature of opposite sign to the rest of the waveguide arm.
  • one waveguide arm of the Mach-Zender apparatus may have a portion of its length made of a material having a negative rate of change of refractive index with temperature, for example a polymer material.
  • one waveguide arm of the Mach-Zender apparatus may comprise a portion made of a material having a rate of change of refractive index with temperature of different magnitude to, but with the same sign, as the rest of the waveguide arm.
  • the output ports of the Mach-Zender apparatus may be coupled directly to the input side of the first slab waveguide.
  • the output ports may be optically coupled to the first slab waveguide by another optical feature such as a multi-mode interference filter (hereinafter referred to as an MMI) as described in US 6,289,147 and which may, for example, be acting as a passband flattening feature.
  • MMI multi-mode interference filter
  • one or more passband flattening features may be optically coupled between the second slab waveguide and the output waveguides.
  • the free spectral range of the Mach-Zender apparatus is preferably equal to the channel spacing of the AWG. In another embodiment, the free spectral range of the AWG is approximately equal to half the free spectral range of the Mach-Zender apparatus.
  • Fig.1 is a plan schematic view of a prior art AWG mux/demux device
  • Fig.2(a) is a plan schematic view of another prior art mux/demux device, designed to have a flat passband;
  • Fig.2(b) is a schematic plan view of a Mach-Zender apparatus used in the embodiment of Fig.2(a);
  • Fig.3 is a plan schematic view of an athermal mux/demux device according to one embodiment of the invention;
  • Fig.4 is a plan schematic view of a modified version of the device of Fig.3; and Fig.5 is a schematic plan view of a lattice filter arrangement for use in a further embodiment of the invention.
  • Fig.2 illustrates an AWG mux/demux device as described in US 5,488,680. Like parts in Figs. 1 and 2 are referenced by like reference numerals.
  • the device comprises an AWG like that of the device of Fig.l, fabricated in silica-on-silicon technology, but with a Mach-Zender apparatus 20 coupled between the input waveguide 2 and the input slab waveguide 3.
  • the Mach-Zender apparatus is shown in more detail in Fig.2(b) and is in the form of a Mach-Zender Interferometer (MZI) comprising a Y-branch coupler 22 connected between the input waveguide 2 of the device and two waveguide arms 23,24 of unequal length which diverge way from one another and then approach each other again in an output section 28 of the MZI.
  • MZI Mach-Zender Interferometer
  • this output section of the MZI has a length such that the two waveguide arms are strongly coupled in the output section 28.
  • the two waveguide arms terminate in two output ports 25,26 connected to the input face 9 of the first slab waveguide 3.
  • the length of the waveguides in the output section 28 is chosen so that half the power propagating in each of the waveguide arms prior to reaching the output ports is transferred to the other one of the waveguide arms.
  • the two output ports 25,26 of the waveguide arms 23,24 are spaced apart by a predetermined distance d.
  • the Y-branch coupler 22 transfers half the power of the input signal to each of the waveguide arms 23,24 of the MZI. Because there is a difference ⁇ L in the physical length of the two waveguide arms, there is a wavelength-dependent phase difference ⁇ between the two signals which emerge from the output ports 25,26.
  • the spacing d between the two output ports, and the difference in length ⁇ L of the two waveguide arms, can be chosen so as to achieve a desired phase difference ⁇ between the output ports.
  • An input signal directed into the Y-branch coupler 22 from the input waveguide 2 of the device will produce two signal beam spots at the MZI output ports 25,26 respectively which effectively combine to produce a resultant image of the input signal, on the input face of the first slab waveguide 3.
  • the phase difference ⁇ produced between the two signals emerging from the output ports depends on the wavelength ⁇ of the input signal.
  • the output signal formed at the output of the MZI will be centered at a midpoint P 0 between the two output ports 25,26, since half the power of the input signal is propagating in each arm of the MZI, at the output end of the MZI. If the input signal wavelength is increased to ⁇ 2 so that the phase difference is decreased by ⁇ /2, the output signal will be centered on the optical axis P 2 (in the output section 28) of one of the waveguide arms.
  • Fig.3 illustrates an athermal mux/demux device according to one embodiment of the present invention. This is a modified version of the device of Fig.2.
  • a portion 30 of the length of one of the waveguide arms 23 of the MZI is made of a polymer material.
  • the polymer material, and the length L p of the polymer section are chosen so as to control the movement of the imaged input signal on the input face 9 of the first slab waveguide 3 in response to change of temperature, so as to compensate for the temperature driven angular dispersion of the AWG.
  • the temperature driven angular dispersion of the MZI is used to compensate (automatically) for the temperature driven angular dispersion of the AWG, so that the overall device behaves athermally.
  • No driving heaters are required to maintain temperature stability of the AWG, or to control the phase difference between the waveguide arms of the MZI. This keeps power consumption of the device to a minimum.
  • the temperature driven angular dispersion of an AWG is defined as the change in the central wavelength ⁇ c of the AWG with temperature T, namely d ⁇ c /dT.
  • Variation in the central wavelength of an AWG with temperature change is highly undesirable.
  • the change in the central wavelength is largely caused by the change in optical path lengths of the array waveguides 8 in response to temperature change.
  • temperature change will also cause a change in the optical path length difference between the two waveguide arms of the MZI.
  • n eff is the effective refractive index of the polymer waveguide portion of the MZI
  • ⁇ A w G is the channel spacing of the AWG
  • ⁇ L is length difference between the two waveguide arms of the MZI
  • ⁇ is the wavelength of a signal input to the MZI
  • m is the operating order of the MZI.
  • the inherent temperature driven angular dispersion of the AWG can be compensated by an inverse shift in the position of the imaged signal incident (from the MZI) on the input face 9 of the input slab waveguide, so that the central wavelength ⁇ c output from the overall mux/demux device (i.e. MZI +AWG) remains constant, or at least substantially constant e.g. for a temperature range from -5°C to +70°C, the temperature shift of the central wavelength ⁇ c is preferably lpm/K or less. This is about one order of magnitude smaller than what is observed for a non-athermalised AWG.
  • ⁇ here denotes the phase shift required at the input to the coupler section 28 in order to form the correctly positioned field distribution (i.e. the imaged input signal) at the ports 25,26 to compensate for the temperature driven angular dispersion d ⁇ /dT of the AWG, for a signal wavelength ⁇ over a temperature change ⁇ T.
  • d ⁇ /dT the correctly positioned field distribution
  • a negative dn eff /dT will be required, which can be most conveniently achieved by using a polymer material for the "different material" portion 30 of the waveguide arm 23.
  • the polymer material, and the configuration (e.g. width and height) of the polymer waveguide section can be readily chosen and designed respectively so that the MZI has a negative dn eff /dT of the required magnitude.
  • a "partial" polymer fill-in in the waveguide cladding is used i.e. the cladding is removed (e.g.
  • the dn eff /dT of this modified waveguide portion then simply depends on the portion of the waveguide mode field which reaches into this polymer region. In effect, the positive dn eff /dT of the silica waveguide is partially compensated by the negative dn eff /dT of the polymer.
  • An appropriate depth of polymer infill can be readily determined using a mode solver (software program) to determine the mode field, mode index, and dispersion of the waveguide mode within the modified MZI arm and, using this information, adjusting the depth of infill as required in order the resulting mode field does not introduce losses which are unacceptably high from a design perspective e.g. insertion loss, and polarisation-dependent loss (PDL).
  • mode solver software program
  • the length L p of the polymer section of the waveguide also influences the optical path length difference between the two arms of the MZI and so can be adjusted, in conjunction with the n e f of the polymer section, so as to arrive at the calculated required optical path length difference.
  • the desired depth of polymer in-fill in the waveguide cladding is first determined and then the length L p of the polymer section can be calculated utilising this information and the above-described equations defining m ⁇ and m (assuming that the other parts of the two waveguides of the MZI are equivalent in length and mode index).
  • the "different material" portion 30 of the waveguide arm 23 may have a dn eff /dT of different magnitude, but of the same sign, as the silica waveguides.
  • the temperature driven angular dispersion, d# 0 familialJdT, of the MZI to be considerably less than its wavelength driven angular dispersion , ⁇ OM f ⁇ , preferably such that:
  • f out is the output angle of the focussed (signal) beam on the output side of the second AWG slab coupler 4.
  • ⁇ is the AWG channel spacing and ⁇ L is in this case the path length difference between adjacent array waveguides of the AWG.
  • the free spectral range of the AWG (FSRA WG ) is covered in approximately half of the free spectral range of the MZI (FSR M z ⁇ )- This can be defined as follows:
  • N AW G_channeis is the number of channels of the AWG
  • ⁇ A wG is the channel spacing of the AWG (in terms of wavelength)
  • ⁇ L M z ⁇ is the length difference between the two waveguide arms 23,24 of the MZI. This may have the effect of restricting the number of AWG channels available in the working device.
  • the MZI is in principle still determined by the same equations as the first-described embodiment, namely:
  • the polymer section 30 of the waveguide arm 23 may conveniently be fabricated by first etching a slot through the (upper) cladding 16 and down through the core 15 of the waveguide arm using a conventional dry etching technique such as reactive ion etching or plasma etching.
  • the slot can then be filled with polymer solution by spin casting.
  • Alternative fabrication techniques are also possible.
  • Fig.3 uses a directional coupler 28 at the output end of the MZI, as in the prior art device of Figs.2(a) and2(b).
  • Fig.4 shows a modified version of the embodiment of Fig.3 in which a multi-mode interference filter 40 (hereinafter referred to as an "MMI") is coupled directly between the output ports 25,26 of the MZI, and the input face of the input slab waveguide 3 of the AWG, instead of using a directional coupler 28.
  • MMI multi-mode interference filter 40
  • the operation of the device of Fig.4 is similar to the device described in US6,289,147 (which utilises an MMI between an MZI and an AWG, in order to broaden the passband of each output channel of the AWG), but modified so that the MZI is designed to compensate for the temperature driven angular dispersion of the AWG as described already above in relation to Fig.3.
  • the MZI may need to incorporate a section 30 of polymer or other material having a negative thermal coefficient (dn eff /dT) in order to make the mux/demux device substantially athermal.
  • the coupler between the input waveguide 2 and the two waveguide arms 23,24 of the MZI need not always be a Y-branch coupler.
  • a directional coupler could equally well be used, or another form of coupler e.g. an MMI coupler.
  • more than one MZI may be used at the input side of the AWG.
  • three or more couplers may effectively be cascaded, with two waveguide arms linking adjacent couplers, so as to form a lattice filter arrangement (sometimes alternatively referred to as a cascaded coupler arrangement), as illustrated in Fig.5 which shows four directional couplers spaced apart by three pairs of waveguide arms to form three cascaded MZIs 40,42,44.
  • This design allows finer adjustment (than in the "single MZI" embodiments of Figs.3 and 4) of the temperature sensitivity of the portion of the mux/demux device prior to the AWG. This, in turn, may allow greater freedom in the design of other features of the device.
  • the Mach-Zender apparatus may be formed by three waveguides 45,46,47 coupled between an MMI coupler 48 and the first slab waveguide (or an MMI coupled to the first slab waveguide).
  • the lattice filter of Fig.5 could be formed by several such Mach-Zender apparatus coupled end-to-end as shown in Fig.6 (i.e. MMI coupler 48 + three waveguide arms + MMI coupler 50 + three waveguide arms + etc.).
  • the present invention in essence utilises the same principle as the prior art mechanical approach to athermalisation (i.e. adjusting the position of the input signal spot on the input face of the input slab waveguide, in order to compensate for drift in the central wavelength ⁇ c of the AWG), but has the benefit of being an integrated approach in which the whole athermal device is integrally formed on the same PLC chip. No mechanical movement, or moving parts, are required in the invention and thus fabrication is easier than the prior art mechanical approach. Moreover, there is no gap between the input fibre and the slab causing reliability problems.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

Cette invention se rapporte à un dispositif multiplexeur/démultiplexeur athermique, qui comprend un réseau sélectif planaire (AWG) pourvu d'un appareil de Mach-Zender couplé optiquement à son côté d'entrée. L'appareil de Mach-Zender comporte un premier et un second côté, le premier côté étant couplé optiquement à un guide d'onde d'entrée du dispositif et le second côté comprenant deux ports de sortie couplés optiquement à un côté d'entrée du premier guide d'onde bidimensionnel du réseau sélectif planaire AWG. L'appareil de Mach-Zender est configuré pour que sa sensibilité à la température compense essentiellement la sensibilité à la température du réseau sélectif planaire, de telle sorte que ledit dispositif est pratiquement athermique. Dans un mode de réalisation, une partie de la longueur de l'un des bras de l'appareil de Mach-Zender est en matériau polymère, cette partie guide d'onde en polymère étant conçue pour que son indice de réfraction effectif avec la température (dneff/dT) ait un taux de variation de signe négatif.
PCT/GB2003/002615 2002-06-19 2003-06-18 Reseau selectif planaire athermique WO2004001470A1 (fr)

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GB0214085A GB0214085D0 (en) 2002-06-19 2002-06-19 Athermal arrayed waveguide grating
GB0214085.3 2002-06-19

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GB2411486A (en) * 2004-02-27 2005-08-31 Agilent Technologies Inc Array waveguide grating with multiple input channels
EP1857846A1 (fr) * 2006-05-19 2007-11-21 JDS Uniphase Corporation Interféromètre de Mach-Zehnder asymétrique doté d'une tension d'entraînement réduite couplé à un réseau de guide d'ondes compact à faible perte
WO2008118270A1 (fr) * 2007-03-24 2008-10-02 Lucent Technologies Inc. Appareil de compensation de dispersion optique réglable
CN100432658C (zh) * 2005-08-11 2008-11-12 浙江大学 一种基于非对称干涉臂马赫曾德干涉仪型传感器
WO2010007888A1 (fr) * 2008-07-14 2010-01-21 日本電信電話株式会社 Circuit de multiplexage et de démultiplexage de longueur d'onde optique
CN102483489A (zh) * 2009-09-18 2012-05-30 日本电信电话株式会社 光波长合分波回路
EP3650895A1 (fr) * 2013-01-28 2020-05-13 Aurrion, Inc. Filtre optique athermique avec modulation active et commande simplifiée
CN111208605A (zh) * 2015-07-24 2020-05-29 瞻博网络公司 波导阵列中的相位调谐
WO2021099369A1 (fr) * 2019-11-19 2021-05-27 Universiteit Gent Lecture insensible à la température sur puce

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2411486A (en) * 2004-02-27 2005-08-31 Agilent Technologies Inc Array waveguide grating with multiple input channels
CN100432658C (zh) * 2005-08-11 2008-11-12 浙江大学 一种基于非对称干涉臂马赫曾德干涉仪型传感器
EP1857846A1 (fr) * 2006-05-19 2007-11-21 JDS Uniphase Corporation Interféromètre de Mach-Zehnder asymétrique doté d'une tension d'entraînement réduite couplé à un réseau de guide d'ondes compact à faible perte
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