WO2003106918A3 - Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen - Google Patents

Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen Download PDF

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Publication number
WO2003106918A3
WO2003106918A3 PCT/DE2003/001978 DE0301978W WO03106918A3 WO 2003106918 A3 WO2003106918 A3 WO 2003106918A3 DE 0301978 W DE0301978 W DE 0301978W WO 03106918 A3 WO03106918 A3 WO 03106918A3
Authority
WO
WIPO (PCT)
Prior art keywords
mechanical
contactless
measuring
optical analysis
tracing head
Prior art date
Application number
PCT/DE2003/001978
Other languages
English (en)
French (fr)
Other versions
WO2003106918A2 (de
Inventor
Hans-Ulrich Danzebrink
Original Assignee
Bundesrep Deutschland
Hans-Ulrich Danzebrink
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bundesrep Deutschland, Hans-Ulrich Danzebrink filed Critical Bundesrep Deutschland
Priority to AU2003250262A priority Critical patent/AU2003250262A1/en
Publication of WO2003106918A2 publication Critical patent/WO2003106918A2/de
Publication of WO2003106918A3 publication Critical patent/WO2003106918A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Eine Oberflächenmessvorrichtung zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen mit einem Tastkopf (2) zur mechanischen Messung hat eine Spiegel- und/oder Linsenanordnung (4) zur Fokussierung von Lichtstrahlen (3) derart, dass der Fokuspunkt (F) der von der Spiegel- und/oder Linsenanordnung (4) gebündelten Lichtstrahlen (3) wahlwei­se entweder auf den Tastkopf (2) zur Messung der Position oder Verlagerung des Tastkopfes (2) zur mechanischen Messung oder auf die zu untersuchende Objektoberfläche (1) zur berührungslosen-optischen Messung einstellbar ist.
PCT/DE2003/001978 2002-06-15 2003-06-12 Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen WO2003106918A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003250262A AU2003250262A1 (en) 2002-06-15 2003-06-12 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10226801.0 2002-06-15
DE10226801A DE10226801B4 (de) 2002-06-15 2002-06-15 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen

Publications (2)

Publication Number Publication Date
WO2003106918A2 WO2003106918A2 (de) 2003-12-24
WO2003106918A3 true WO2003106918A3 (de) 2004-03-18

Family

ID=29719136

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/001978 WO2003106918A2 (de) 2002-06-15 2003-06-12 Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen

Country Status (3)

Country Link
AU (1) AU2003250262A1 (de)
DE (1) DE10226801B4 (de)
WO (1) WO2003106918A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2965929B1 (fr) * 2010-10-07 2012-12-14 Centre Nat Rech Scient Microscope optique en champ proche
CN102636132A (zh) * 2012-03-09 2012-08-15 中国科学院长春光学精密机械与物理研究所 一种用于光学表面粗糙度标定的参考平面生成装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394962A2 (de) * 1989-04-24 1990-10-31 Olympus Optical Co., Ltd. Atomkraftmikroskop
DE4327250A1 (de) * 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
JPH1194848A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 測定装置
WO2003008905A1 (de) * 2001-07-16 2003-01-30 Werth Messtechnik Gmbh Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9112343D0 (en) * 1991-06-08 1991-07-31 Renishaw Transducer Syst Surface analysis apparatus
JPH0477605A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ
JPH0540034A (ja) * 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
US5756997A (en) * 1996-03-04 1998-05-26 General Nanotechnology, L.L.C. Scanning probe/optical microscope with modular objective/probe and drive/detector units
US5955661A (en) * 1997-01-06 1999-09-21 Kla-Tencor Corporation Optical profilometer combined with stylus probe measurement device
DE19816270A1 (de) * 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und Anordnung zur Erfassung der Geometrie von Gegenständen mittels eines Koordinatenmeßgeräts
DE19947287C2 (de) * 1999-09-30 2003-01-30 Surface Imaging Systems Gmbh Nahfeldmikroskop

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394962A2 (de) * 1989-04-24 1990-10-31 Olympus Optical Co., Ltd. Atomkraftmikroskop
DE4327250A1 (de) * 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
JPH1194848A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 測定装置
WO2003008905A1 (de) * 2001-07-16 2003-01-30 Werth Messtechnik Gmbh Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 09 30 July 1999 (1999-07-30) *

Also Published As

Publication number Publication date
DE10226801A1 (de) 2004-01-08
DE10226801B4 (de) 2005-03-31
AU2003250262A1 (en) 2003-12-31
WO2003106918A2 (de) 2003-12-24

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